JP4690022B2 - Microscope revolver - Google Patents

Description

  The present invention relates to a microscope revolver used in an environment that requires a high degree of cleanness or an environment that does not require a high degree of cleanness.

  The revolver of the microscope selects and arranges the objective lens necessary for observation of the sample on the optical axis of the microscope by rotating a rotating member equipped with a plurality of objective lenses. It is inevitable that fine dust is generated. This dust scatters outside the revolver and falls on the sample, or while floating, it is carried by the airflow of the surrounding air and adheres to the sample and interferes with observation by the microscope.

  Various countermeasures against dust generation have been taken for the revolver to prevent this from happening. In particular, a microscope revolver used in a clean room such as a semiconductor manufacturing factory is required to have a high level of dust generation countermeasures.

  FIG. 9 is a configuration diagram of a microscope revolver disclosed in Patent Document 1. In FIG. The rotating member 1 is provided with mounting holes 3 for mounting a plurality of objective lenses 2. The rotating member 1 is rotatably attached to the fixed portion 4 by a rotating shaft 5, and each attaching hole 3 can be arranged on the optical axis 6 of the microscope. Balls 7 and 8 are provided at contact positions of the rotating member 1 with the rotating shaft 5 and the fixed portion 4 in order to reduce friction generated when the rotating member 1 rotates. The revolver includes a rotation driving mechanism 9 for the rotating member 1 by power. The rotational drive mechanism 9 includes an electric prime mover 10. The prime mover 10 is attached to the fixed portion 4 by a support member 11. The drive gear 12 of the rotation drive mechanism 9 is constituted by a pinion attached to the drive shaft 13 of the prime mover 10. The driven gear 14 of the rotation drive mechanism 9 is constituted by an internal gear formed around the rotating member 1, covers the pinion from the lower side, meshes with the pinion, and enables the rotating member 1 to rotate.

  The cover 15 is provided on the fixed portion 4. The cover 15 and the rotating member 1 cover the drive gear 12 and the driven gear 14. The cover 15 has a suction pipe 16 and a suction pipe connection port 17 for connection in order to remove foreign matter between the rotary member 1 and the cover 15. The rotating member 1 has an upward annular groove 18 centered on the rotation center of the rotating member 1 at the periphery. The cover 15 has an annular edge 19 engaged with the annular groove 18. Thereby, the rotating member 1 can rotate with respect to the cover 15.

  With such a configuration, a space that covers the drive gear 12 and the driven gear 14 is formed by the cover 15 and the rotating member 1. Foreign matter such as dust and dust generated from the contact portion of the drive gear 12 and the driven gear 14 due to this space is received inside the space of the cover 15 and the rotating member 1. The cover 15 prevents dust inside the revolver from rising due to vibration of the microscope or air convection and scattering or floating outside.

  Since the internal gear is formed around the rotary member 1, the rotary member 1 and the cover 15 are located inside the engagement position between the annular groove 18 and the annular edge 19 and from a wall forming a part of the internal gear. The contact portion between the drive gear 12 and the driven gear 14 is covered inside. As a result, foreign matter such as dust and dust such as metal powder generated from the drive gear 12 and the driven gear 14 due to wear and the like and splashes of lubricating oil are received inside the space of the cover 15 and the rotating member 1.

  Further, the annular groove 18 and the annular edge 19 doubly prevent foreign matter from falling from the revolver and scattering.

  Furthermore, since the suction pipe 16 is connected to the suction pipe connection port 17 and the space between the cover 15 and the rotary member 1 is sucked by the pump, the foreign matter therebetween can be removed.

As described above, Patent Document 1 has a structure in which dust is not trapped outside the revolver but is confined inside the revolver. Further, the suction pipe 16 is connected to remove dust by sucking air inside the revolver. Such a configuration is adapted for use in an environment where a high degree of cleanliness is required.
Japanese Utility Model Publication No. 5-4121

  The microscope revolver of Patent Document 1 requires a special shape for the rotating member 1, the cover 15, and the like in order to confine dust inside the revolver. Compared with a microscope revolver used in a normal environment, the microscope revolver of Patent Document 1 is expected to increase the cost of parts.

  The structure of the microscope revolver of Patent Document 1 is a dedicated structure for use in an environment where a high degree of cleanness is required. Therefore, under a normal environment, a microscope revolver for a normal environment is separately prepared separately. In order to adapt the microscope revolver to a high degree of cleanliness, it is desirable to have a simple structure as much as possible, to realize its function at a low cost, and to be able to use it even in a normal environment.

  The present invention provides a fixing member connected and fixed to the microscope main body, a rotating member mounted with a plurality of objective lenses and supported rotatably with respect to the fixing member, and a gap between the rotating member and the fixing member. An opening provided in the revolver of the microscope revolver in which the objective lens necessary for observation is arranged on the optical axis of the microscope body by rotating the rotary member and having a cover that covers the rotating member and the fixing member. A microscope revolver that includes an opening portion, an opening shielding member that is attachable to and detachable from the opening, and an air suction pipe that is attachable to and detachable from the opening.

  INDUSTRIAL APPLICABILITY The present invention can provide a microscope revolver that has an inexpensive and simple structure and can be arbitrarily selected and adapted to an environment requiring a high degree of cleanliness and a normal environment.

  Hereinafter, a first embodiment of the present invention will be described with reference to the drawings.

  FIG. 1 is an overall configuration diagram of a microscope. The microscope body frame 20 is provided with a stage 21 that can move up and down. A sample 22 is placed on the stage 21. A revolver 23 is attached to the lower surface of the upper arm 20 a of the main body frame 20. The revolver 23 is provided with a plurality of mounting holes 25 for mounting the objective lens 24. These mounting holes 25 are generally screw holes. An observation barrel 26 is provided on the upper surface of the upper arm 20a. An eyepiece lens 27 is attached to the observation barrel 26.

  FIG. 2 is a configuration diagram of the revolver 23 of the microscope. The fixing member 30 of the revolver 23 is provided with a cylindrical hole 31 for the observation optical path. The optical axis P of the microscope main body passes through the hole 31. The fixed member 30 is provided with a disk body 32 that is inclined with respect to the optical axis P. A rotating member 34 is attached to the outer peripheral edge of the disk body 32 via a ball 33 so as to be rotatable about a shaft 35. A small space 36 is formed between the disk body 32 and the rotating member 34 of the fixing member 30. A driven gear 37 is provided on the outer peripheral edge of the rotating member 34. A motor 39 is connected to the driven gear 37 via each gear 38. The rotational force of the motor 39 is transmitted to the driven gear 37 via each gear 38. Thereby, the rotating member 34 rotates. The rotation amount of the rotation member 34 is controlled by a rotation positioning mechanism (not shown), and the objective lens 24 having a magnification necessary for observation, for example, is arranged on the optical axis P of the microscope body from among the plurality of objective lenses 24.

  The cover 40 provided on the fixed member 30 includes the fixed member 30, the rotating member 34, and the driven member except for the central portion including the mounting holes 25 and the shafts 35 for mounting the plurality of objective lenses 24 on the rotating member 34. The gear 37, each gear 38, and the motor 39 are covered. The cover 40 is bent upward in the vicinity of the driven gear 37, and a gap 41 is opened between the cover 40 and the driven gear 37.

  An opening screw portion 42 is provided on the side of the cover 40 opposite to the motor 39 via the optical axis P. The screw formed in the opening screw portion 42 is common to, for example, screw specifications of commercially available parts. A lid 43 as a shielding member or a pipe joint 44 as an air suction pipe can be selectively attached to the opening screw portion 42. The lid 43 and the pipe joint 44 are each formed with a screw corresponding to the opening screw portion 42.

  For the pipe joint 44, for example, a commercially available part for air pipe is used. A pipe tube 45 as an air suction pipe is attached to the pipe joint 44. The piping tube 45 is formed of, for example, a commercially available resin elastic member such as polyurethane or nylon. A negative pressure generator 46 such as a pump is connected to the other end of the pipe tube 45. As the opening screw portion 42, an existing hole or screw hole provided in the cover 40 may be used, or an existing screw hole provided in the revolver 23 may be used.

  Next, the operation of the revolver 23 of the microscope configured as described above will be described.

  Under a normal environment, the lid 43 is attached to the opening screw portion 42 provided in the cover 40 of the revolver 23. Most of the dust generated as the rotating member 34 rotates accumulates in the revolver 23. There is no practical problem with a microscope used in a normal environment.

  On the other hand, a microscope used in an environment such as a clean room such as a semiconductor manufacturing factory is required to have a high countermeasure against dust generation. Under such circumstances, it is natural that solid dust such as dust generated with the rotation of the rotating member 34 is not scattered outside the revolver 23, and further, oil generated inside the revolver 23. It is necessary to take measures to prevent mist-like dust such as mist from leaking out of the revolver 23.

  FIG. 3 shows a microscope revolver 23 used in an environment that requires a high degree of cleanliness, such as in a clean room such as a semiconductor manufacturing factory. A pipe joint 44 provided with a pipe tube 45 is attached to the opening screw portion 42 of the cover 40. When the negative pressure generator 46 such as a pump connected to the pipe tube 45 is activated, a negative pressure air flow F is generated in the pipe tube 45. When this negative pressure air flow F is generated, the pressure distribution is biased inside the revolver 23. As a result, the air inside the revolver 23 is guided and flows toward the lower atmospheric pressure, and a suction airflow Q is generated. Note that the arrow indicating the suction airflow Q in FIG. 3 is shown only in a part of the revolver 23, and actually the suction airflow Q is also generated in the gap between the disk body 32 and the rotation member 34 of the fixed member 30.

  This suction air flow Q enters the gap 41 between the cover 40 of the revolver 23 and the rotating member 34 and passes around the rotating member 34, and then in the piping joint 44 and the piping tube 45 attached to the opening screw portion 42. This is a flow of air that flows out of the revolver 23 through the inside. The mist-like dust floating inside the revolver 23 by the suction airflow Q is guided to the suction airflow Q and discharged to the outside of the revolver 23. Dust generated from the driven gear 37, the gears 38, and the motor 39 is also guided to the suction airflow Q and discharged to the outside of the revolver 23. As a result, the mist-like dust floating inside the revolver 23 is prevented from leaking around the revolver 23.

  As described above, according to the first embodiment, the pipe joint 44 provided with the lid 43 on the opening screw portion 42 provided on the cover 40 or provided with the pipe tube 45 for suctioning air with negative pressure is provided. Since it is configured to be mounted, the revolver 23 can be adapted to each specification that can be used in two environments: a normal environment and an environment that requires a high degree of cleanliness such as in a clean room such as a semiconductor manufacturing factory. be able to.

  In order to change to each specification under these circumstances, an opening screw portion 42 is provided in the cover 40 of the existing microscope, or an existing hole or screw hole provided in the cover 40 or an existing screw provided in the revolver 23 is provided. Since it is only necessary to attach a pipe joint 44 having a pipe tube 45 to the screw hole, etc., an existing microscope used in a normal environment is required to have a high degree of cleanness with an inexpensive and simple configuration. It can be changed to a specification that can be used in the environment.

  Accordingly, the pipe joint 44 and the lid 43 can be easily attached to and detached from the opening threaded portion 42 with respect to the cover 40, respectively, so that the specification can be adapted to use in a normal environment with a single revolver. You can easily select two types of specifications, one that is suitable for use in environments that require a high degree of cleanliness.

  If the specification is changed to an environment that requires a high degree of cleanliness such as in a clean room such as a semiconductor manufacturing factory, the inside of the revolver 23 is passed through the pipe joint 44 and the pipe tube 45 attached to the opening screw portion 42 provided in the cover 40. By sucking the air at a negative pressure, a suction air flow Q is generated, and mist-like dust inside the revolver 23 such as dust generated from the driven gear 37, each gear 38 and the motor 39 can be discharged to the outside of the revolver 23.

  Since the piping tube 45 is connected to the opening screw portion 42 to the cover 40 via the piping joint 44, the piping tube 45 is not easily pulled out from the opening screw portion 42, and in an environment that requires a high degree of cleanliness. High reliability in use.

  Next, a second embodiment of the present invention will be described with reference to the drawings. The same parts as those in FIG. 2 are denoted by the same reference numerals, and detailed description thereof is omitted.

  FIG. 4 is a configuration diagram of the revolver 23 of the microscope, and FIG. 5 is an external view of the revolver 23. As an observation method of the microscope, predetermined optical elements 50 and 51 such as an analyzer may be arranged on the optical axis P of the microscope, such as a differential interference observation method and a simple polarization observation method. In order to arrange these optical elements 50 and 51 on the optical axis P of the microscope, the revolver 23 is provided with a mounting opening 52 for inserting an optical element that allows an optional unit (optical unit) to be inserted.

  For example, two types of sliders (first slider and second slider) 53 and 54 can be inserted into and removed from the mounting opening 52 as optional units. The mounting opening 52 and the opening 47 are provided on the axis in the moving direction for inserting and removing the first slider 53 or the second slider 54.

  The first slider 53 is used under a normal environment. The first slider 53 houses and holds the optical element 50. The storage position of the optical element 50 is where the optical element 50 is disposed on the optical axis P when the first slider 53 is mounted in the mounting opening 52.

  The second slider 54 is used in an environment that requires a high degree of cleanliness, such as in a clean room such as a semiconductor manufacturing factory. The second slider 54 is provided with a storage chamber 55 on the leading side when mounted in the mounting opening 52 through the opening 47, and the optical element 51 is stored and held in the storage chamber 55. The storage position of the optical element 51 is a position where the optical element 51 is disposed on the optical axis P when the second slider 54 is mounted in the mounting opening 52.

  An air suction chamber 56 is provided on the rear side of the second slider 54, and a pipe tube 45 is connected to the air suction chamber 56 via a pipe joint 44. An air circulation opening 57 is provided in the air suction chamber 56. The air circulation opening 57 is located in the atmosphere covered by the cover 40 on the slider surface side that becomes the objective lens 24 side when the second slider 54 is mounted from the opening 47 into the mounting opening 52. It is a place arranged in the space between the cover 40 and the fixing member 30.

  Next, the operation of the revolver 23 of the microscope configured as described above will be described.

  When used in a normal environment, the first slider 53 is inserted from the opening 47 provided in the cover 40 of the revolver 23. The first slider 53 is inserted into the mounting opening 52 and the optical element 50 is disposed on the optical axis P. In this state, most of the dust generated as the rotating member 34 rotates accumulates inside the revolver 23. There is no practical problem with a microscope used in a normal environment.

  On the other hand, when used in an environment such as a clean room such as a semiconductor manufacturing factory, the second slider 54 is inserted from the opening 47 provided in the cover 40 of the revolver 23 as shown in FIG. The second slider 54 is inserted into the mounting opening 52, the optical element 51 is disposed on the optical axis P, and the air circulation opening 57 is fixed in the atmosphere covered with the cover 40, that is, the cover 40. It arrange | positions in the space between the members 30. FIG.

  When the negative pressure generator 46 such as a pump is operated, a negative pressure air flow F is generated in the piping tube 45. When this negative pressure air flow F is generated, the pressure distribution is biased inside the revolver 23. Thus, as in the first embodiment, the air inside the revolver 23 is guided and flows toward the lower atmospheric pressure, and a suction airflow Q is generated. The mist-like dust floating inside the revolver 23 by the suction airflow Q is guided to the suction airflow Q and discharged to the outside of the revolver 23. Dust generated from the driven gear 37, the gears 38, and the motor 39 is also guided to the suction airflow Q and discharged to the outside of the revolver 23. As a result, the mist-like dust floating inside the revolver 23 is prevented from leaking around the revolver 23.

  As described above, according to the second embodiment, the second slider that houses the optical element 51 such as an analyzer disposed on the optical axis P of the microscope, such as a differential interference observation method or a simple polarization observation method. 54 is provided with an air suction chamber 56, an air circulation opening 57 is provided in the air suction chamber 56, and the pipe tube 45 is connected via the pipe joint 44 for air suction. Similar to the embodiment, the revolver 23 can be adapted to each specification that can be used in two environments: a normal environment and an environment that requires a high degree of cleanliness such as in a clean room such as a semiconductor manufacturing factory. be able to. That is, since the first slider 53 and the second slider 54 can be easily inserted and removed and replaced by a simple operation, the single revolver 23 can be used in a normal environment and an environment that requires a high degree of cleanliness. Easy to choose for each specification.

  Since the second slider 54 is individually provided with a storage chamber 55 for storing the optical element 51 and an air suction chamber 56 provided with an air circulation opening 57, the operation of the negative pressure generator 46 such as a pump is operated. Even if the negative pressure air flow F is generated by the above, the optical element 51 is not affected by the negative pressure air flow F.

  Next, a third embodiment of the present invention will be described with reference to the drawings. The same parts as those in FIG. 2 are denoted by the same reference numerals, and detailed description thereof is omitted.

  FIG. 7 is a configuration diagram of the revolver 23 of the microscope. The revolver 22 is provided with a plurality of mounting holes 25 for mounting the objective lens 24. These mounting holes 25 are generally screws. Although the objective lens 24 having an arbitrary magnification is mounted in these mounting holes 25, the mounting holes 25 may remain depending on the use conditions of the microscope.

  A lid 60 or a suction unit 61 as a shielding member can be inserted into and removed from the mounting hole 25 by screwing or loosening the screw. The lid 60 is attached to the mounting hole 25 by screwing, thereby preventing light from entering the inside of the revolver 23 and leaving the dust generated inside the revolver 23 in an open state. It is prevented that the mounting holes 25 are scattered outside the revolver 23.

  The suction unit 61 has an adapter 62 that can be screwed to the mounting hole 25. The adapter 62 is formed in an annular shape. One end of a piping member 64 is connected to the inner wall of the adapter 62 via a rotary bearing 63 such as a ball bearing. The piping member 64 can rotate with respect to the adapter 62 via the rotary bearing 63. The piping member 64 is curved, for example, in an L shape. A pipe tube 45 is connected to the other end of the pipe member 64 via a pipe joint 44. Note that the piping member 64 is not limited to the L-shape, and may be formed in a straight line or the angle at which the piping member 64 is bent according to the piping position of the piping tube 45.

  Next, the use of the revolver 23 of the microscope configured as described above will be described.

  When used in a normal environment, the lid 60 is attached to the attachment hole 25 by screw tightening. This prevents light from entering the inside of the revolver 23 as described above, and prevents dust generated inside the revolver 23 from scattering from the mounting hole 25 to the outside of the revolver 23. In this state, most of the dust generated as the rotating member 34 rotates accumulates inside the revolver 23. There is no practical problem with a microscope used in a normal environment.

  On the other hand, when used in an environment such as a clean room such as a semiconductor manufacturing factory, the suction unit 61 is mounted in the mounting hole 25 of the rotating member 34 as shown in FIG.

  When the negative pressure generator 46 such as a pump is operated, a negative pressure air flow F is generated in the piping tube 45. When this negative pressure air flow F is generated, the pressure distribution is biased inside the revolver 23. Thus, as in the first embodiment, the air inside the revolver 23 is guided and flows toward the lower atmospheric pressure, and a suction airflow Q is generated. The mist-like dust floating inside the revolver 23 by the suction airflow Q is guided to the suction airflow Q and discharged to the outside of the revolver 23. Dust generated from the driven gear 37, the gears 38, and the motor 39 is also guided to the suction airflow Q and discharged to the outside of the revolver 23. As a result, the mist-like dust floating inside the revolver 23 is prevented from leaking around the revolver 23.

  As described above, according to the third embodiment, the suction unit in which the piping tube 45 is connected to the mounting hole 25 via the piping member 64 and the rotary bearing 63 with respect to the lid 60 and the adapter 62 that can be screwed. 61, so that it can be mounted, in the same manner as in the first embodiment, there are two environments: a normal environment and an environment that requires a high degree of cleanliness such as in a clean room such as a semiconductor manufacturing factory. The revolver 23 can be adapted to each specification usable in That is, since the lid 60 and the suction unit 61 can be easily inserted and removed and replaced by simple operations, the single revolver 23 can easily be used for each specification under normal environments and environments that require a high degree of cleanliness. You can choose.

  Even if the rotating member 34 is rotated in order to select the objective lens 24 having the magnification necessary for observation, the piping member 64 of the suction unit 61 rotates with respect to the adapter 62 via the rotating bearing 63. The arrangement positions of the piping member 64 and the piping tube 45 can be maintained in a certain direction.

  In addition, this invention is not limited to the said 1st thru | or 3rd embodiment, You may deform | transform as follows.

  For example, although the piping tube 45 is attached to the piping member 64 via the piping joint 44, the piping tube 45 may be directly attached to the piping member 64.

  The opening 47 where the piping tube 45 is mounted can be installed at any location on the cover 40 as long as the mist-like dust floating inside the revolver 23 can be discharged outside the revolver 23 by the suction airflow Q. It is.

  Further, the number of openings 47 is not limited to one, but may be a plurality of places, and each pipe tube 45 may be attached to each opening 47 to suck air.

  The lids 43 and 60 are not limited to being attached by screwing, but may be formed by an elastic member such as rubber and fitted into the opening 47 or the attachment hole 25.

1 is an overall configuration diagram of a microscope to which a first embodiment of a microscope revolver according to the present invention is applied. FIG. The block diagram of the revolver of the microscope. The block diagram when the revolver of the microscope is used in an environment that requires a high degree of cleanliness. The block diagram of 2nd Embodiment of the revolver of the microscope which concerns on this invention. External view of the revolver of the microscope. The figure which shows the state which inserted the 2nd slider in the revolver at the time of using the revolver of the microscope in the environment which requires a high degree of cleanliness. The block diagram of 3rd Embodiment of the revolver of the microscope which concerns on this invention. The figure which shows the state which mounted | wore the revolver with the suction unit at the time of using the revolver of the microscope in the environment which requires a high degree of cleanliness. The block diagram of the conventional revolver for microscopes.

Explanation of symbols

  20: body frame, 21: stage, 20a: upper arm, 23: revolver, 24: objective lens, 25: mounting hole, 26: observation tube, 27: eyepiece, 30: fixing member, 31: hole, 32: Disc body, 33: ball, 34: rotating member, 35: shaft, 36: space, 37: driven gear, 38: gear, 39: motor, 40: cover, 41: gap, 42: opening screw part, 43: lid 44: piping joint, 45: piping tube, 46: negative pressure generator, 47: opening, 50, 51: optical element, 52: mounting opening, 53: first slider, 54: second slider, 55: storage chamber, 56: air suction chamber, 57: air circulation opening, 60: lid, 61: suction unit, 62: adapter, 63: rotating bearing, 64: piping member.

Claims (11)

A fixing member connected and fixed to the microscope main body, a plurality of objective lenses, a rotating member supported rotatably with respect to the fixing member, and a gap between the rotating member and the fixing member. In a microscope revolver that has a cover that opens and covers the rotating member and the fixing member, and rotates the rotating member to position the objective lens necessary for observation on the optical axis of the microscope main body.
At least one opening provided in the revolver;
A shielding member for the opening that is detachable from the opening;
A pipe for air suction removable from the opening;
Comprising
The shielding member or the pipe is attached to the opening.
A microscope revolver characterized by that. The air suction pipe is attached to the opening in an environment where dust generation countermeasures are required,
The shielding member is attached to the opening under a normal environment other than the environment where the dust generation countermeasure is required.
The microscope revolver according to claim 1, wherein: A rotation drive source provided on the outer peripheral edge of the rotation member via a connecting member;
The covering body covers the rotational drive source,
The microscope revolver according to claim 1, wherein: The rotating member is formed in a disc shape and rotates around its central portion,
The cover is provided with the gap across the entire circumference of the outer peripheral edge of the rotating member.
The microscope revolver according to claim 1, wherein: An optical unit holding an optical element disposed on the optical axis of the microscope main body is connected to one end of the air suction pipe,
The optical unit is provided with an air circulation opening that communicates with the air suction pipe, and can be inserted into and removed from the optical axis of the microscope body through the opening of the cover.
The microscope revolver according to claim 1, wherein: The optical unit holds the optical element on the front side to be mounted on the microscope body, and the air suction pipe is connected to the rear side and the air circulation opening is provided.
The microscope revolver according to claim 1, wherein: The air circulation opening is disposed in an atmosphere covered by the cover when mounted on the microscope body.
The microscope revolver according to claim 6. The opening is a mounting hole for mounting the objective lens provided in the rotating member, and the shielding member or the air suction pipe is mounted in the mounting hole.
The microscope revolver according to claim 1, wherein: The opening is an existing screw hole provided in the rotating member, and the shielding member or the air suction pipe is attached to the screw hole.
The microscope revolver according to claim 1, wherein: The air suction pipe is a tube formed of an elastic material.
The microscope revolver according to claim 1, wherein: The air suction pipe causes air to flow into the cover body from at least the gap by discharging air, and discharges the floating body floating in the atmosphere covered by the cover body to the outside of the cover body. ,
The microscope revolver according to claim 1, wherein:

Images