JP6430678B2 - projector - Google Patents

Description

  The present disclosure relates to a projector that projects an image on an object. In particular, the present invention relates to a focus-free projector that does not require focus adjustment according to the distance to an object on which an image is projected.

  A known projector is a device that projects and displays a still image or a moving image on a flat display surface such as a screen. The projected image (primary image) is, for example, a still image on a slide (positive film), a still image or a moving image on a liquid crystal panel. A slide or a liquid crystal panel is a display medium that forms a two-dimensional pattern that defines an image, and forms a two-dimensional pattern (luminance distribution) by being illuminated by, for example, a high-intensity discharge lamp or an LED (Light Emitting Diode) light source. The primary image is enlarged and projected on a screen as a display surface by the projection lens optical system to form an image. Typical examples of such a projector include a data projector, a video projector, a game projector, a front projection TV set, a rear projection TV set, and the like.

  With a conventional projector, every time the distance to the screen (projection distance) is changed or the magnification of the display is changed, a focused image is formed on the screen unless the focal length of the projection lens optical system is adjusted. I couldn't. This will be described later with reference to FIG.

  On the other hand, a focus-free projector that scans a screen at high speed with a thinly collimated laser beam has been proposed (for example, Patent Document 1). In such a projector, an image is formed by modulating the intensity of the laser beam in accordance with the luminance signal while performing raster scanning of the laser beam using a MEMS (Micro Electro Mechanical System) mirror. Since the size of the laser beam irradiation spot on the screen hardly depends on the projection distance, a clear image can be obtained without focusing.

JP 2011-2221060 A

  In the projector described in Patent Document 1, one or several laser beams with high collimated light intensity (power density) are emitted from the laser light source, so that the laser beam accidentally enters the eyes of the viewer. In some cases, problems such as retinal damage may occur. For this reason, it is necessary to restrict humans from entering the space between the projector and the screen, or to reduce the intensity of the laser beam to such an extent that no adverse effect will occur even if laser light enters the eye. . This reduces the degree of freedom in designing the projector system and prevents the realization of a bright display image.

  Embodiments of the present disclosure provide a completely new configuration projector that operates in a focus-free manner.

  In one exemplary aspect, the projector according to the present invention is a projector that projects an image onto an object in a focus-free manner, the transmissive spatial light modulator forming a two-dimensional pattern that defines the image, and the spatial light modulation A laser light source for irradiating the device with laser light, and the spatial light modulator generates a bundle of a plurality of light beams having a spatial intensity distribution of the two-dimensional pattern from the laser light.

  In another aspect, the projector of the present invention is a projector that projects an image onto an object in a focus-free manner, and includes a plurality of transmissive spatial light modulators that form a two-dimensional pattern that defines the image, and the plurality of spaces. A plurality of laser light sources for irradiating the light modulators with laser beams of different wavelength ranges, and each of the plurality of spatial light modulators includes a bundle of a plurality of light beams having a spatial intensity distribution of the two-dimensional pattern. Generated from the laser light.

  In yet another aspect, the projector of the present invention is a projector that projects an image onto an object in a focus-free manner, the spatial light modulator forming a two-dimensional pattern defining the image in a light modulation region, and the spatial light One or a plurality of semiconductor laser elements that irradiate the light modulation region of the modulator with laser light, and the spatial light modulator is configured to emit a bundle of a plurality of light beams having a spatial intensity distribution of the two-dimensional pattern. All of the one or a plurality of semiconductor laser elements generated from the laser light are arranged so that the semiconductor lamination direction is orthogonal to the minimum dimension direction of the light modulation region of the spatial light modulator.

  According to an embodiment of the present disclosure, a bundle of a plurality of light beams emitted from a transmissive spatial light modulator is incident on an object, and an image is formed on the object with each light beam irradiation point on the object as a pixel. To do. Since each light beam formed from the laser light has high directivity, a clear image can be projected onto the object without depending on the distance to the object.

FIG. 1 is a cross-sectional view schematically illustrating a non-limiting exemplary configuration example of the projector according to the present disclosure. FIG. 2 is a front view schematically showing a configuration example of the spatial light modulator 20 that can be used in the projector of the present disclosure. FIG. 3A is a cross-sectional view schematically showing light beams 300a and 300b emitted from two openings (pixel regions) 22 of the spatial light modulator 20 forming a certain two-dimensional pattern. FIG. 3B is a cross-sectional view schematically showing light beams 300a, 300b, 300c, and 300d emitted from the four openings (pixel regions) 22 of the spatial light modulator 20 forming another two-dimensional pattern. is there. FIG. 3C is a cross-sectional view illustrating an example in which the laser light 30 is incident on the spatial light modulator 20 obliquely. FIG. 4 is a cross-sectional view schematically illustrating an example in which the light beams 300a and 300b emitted from the opening (pixel region) 22 of the spatial light modulator 20 are spread by diffraction. FIG. 5 is a cross-sectional view showing the spatial light modulator 20 with a microlens array in which microlenses are arranged on the emission side of each opening (pixel region) 22. FIG. 6 is a diagram illustrating an example of a configuration in which the laser light 30 emitted from the laser light source 10 is incident on the spatial light modulator 20 without collimation into parallel light. FIG. 7 is a diagram illustrating a configuration example of a conventional projector using a projection lens optical system. FIG. 8A is a perspective view schematically illustrating an example in which text data is projected and displayed on the screen 200 using the projector 100 according to the present disclosure. FIG. 8B is a perspective view showing a state in which a part of the light beam emitted from projector 100 is blocked by another screen 200a. FIG. 8C is a perspective view schematically showing a state in which the screen 200 is inclined. FIG. 8D is a perspective view showing an example in which an image is displayed on the screen 200 that is not flat but is broken in the middle. FIG. 9 is a cross-sectional view schematically illustrating a configuration example of the projector 100 according to the embodiment of the present disclosure. FIG. 10 is a cross-sectional view schematically illustrating a configuration example of the spatial light modulator 20 in the embodiment of the present disclosure. FIG. 11 is a cross-sectional view illustrating a configuration example of the projector 100 according to another embodiment of the present disclosure. FIG. 12 is a cross-sectional view illustrating a configuration example of the projector 100 according to still another embodiment of the present disclosure. FIG. 13 is a cross-sectional view illustrating a configuration example of the projector 100 according to still another embodiment of the present disclosure. FIG. 14 is a cross-sectional view illustrating a configuration example of the projector 100 according to still another embodiment of the present disclosure. FIG. 15 is a cross-sectional view illustrating a configuration example of the projector 100 according to still another embodiment of the present disclosure. FIG. 16 is a cross-sectional view illustrating a configuration example of the projector 100 according to still another embodiment of the present disclosure. FIG. 17 is a cross-sectional view illustrating a configuration example of the projector 100 according to still another embodiment of the present disclosure. FIG. 18A is a diagram showing an operation of the projector 100 that projects a color image by a field sequential method. FIG. 18B is another diagram illustrating the operation of the projector 100 that projects a color image by the field sequential method. FIG. 18C is still another diagram illustrating the operation of the projector 100 that projects a color image by the field sequential method. FIG. 19 is a diagram showing temporal changes in the lighting states of the laser light sources 10R, 10G, and 10B in the projector 100 operating in the field sequential method. FIG. 20 is a diagram illustrating a configuration example of a three-plate projector 100 according to the present disclosure. FIG. 21 is a perspective view schematically showing a basic configuration of a typical semiconductor laser element. FIG. 22A is a perspective view schematically showing how the laser beam 30 emitted from the light emitting region 124 of the semiconductor laser element 10D spreads (divergence). FIG. 22B is a side view schematically showing how the laser beam 30 spreads. On the right side of the figure, for reference, a front view of the semiconductor laser element 10D viewed from the positive direction of the z-axis is also shown. FIG. 22C is a top view schematically showing how the laser beam 30 spreads. FIG. 22D is a graph showing the spread of the laser light 30 in the y-axis (fast axis) direction. FIG. 22E is a graph showing the spread of the laser beam 30 in the x-axis (slow axis) direction. FIG. 23 is a graph showing an example of the relationship between the y-axis direction size Fy and the x-axis direction size Fx of the cross section of the laser light 30 and the distance from the light emitting region 124 (position in the z-axis direction). FIG. 24 is a perspective view illustrating a configuration example for realizing the projector 100 of FIG. 15 using the semiconductor laser element 10D. FIG. 25 is a perspective view showing another configuration example for realizing projector 100 in FIG. FIG. 26 is a diagram showing an example of the configuration of an exposure apparatus that projects an image onto a workpiece 200b having a step on the surface. FIG. 27 is a diagram illustrating an example of a configuration in which a bundle of light beams 300 is incident on a light receiving surface of a light receiving element 200c such as an image sensor.

<Terminology>
“Object” means screen, wall, glass, desktop, building, road, vehicle, body part (eg arm, palm, back, etc.) or whole body, collection of water droplets or powder particles, fluid, translucent body, Widely includes photosensitive resins, image sensors (light receiving elements), and the like.

  The “image” is not limited to characters, symbols, and images, and includes a random pattern having no meaning, a pattern encoded like a two-dimensional barcode, a circuit wiring pattern, and the like.

  “Projection” includes not only enlargement but also reduction.

  The “laser light” is not limited to laser light generated by single mode oscillation, and includes laser light generated by multimode oscillation and light obtained by multiplexing laser beams having different wavelengths. The laser light is not limited to visible light, and may be infrared or ultraviolet light waves (electromagnetic waves).

  A “spatial light modulator” is a device that spatially modulates the intensity of light (the amplitude of electromagnetic waves), and does not include a device that spatially modulates only the phase. A typical example of the spatial light modulator is a liquid crystal panel (transmission type liquid crystal display device) capable of changing light transmittance in units of pixels. The spatial light modulator may be a slide (positive film or reversal film) in which a two-dimensional pattern to be formed does not change with time, a sample on a slide, an OHP sheet, or a cutout for shadows. Such a display medium can change a two-dimensional pattern by exchanging with another display medium suitably. The spatial light modulator (Spatial Light Modulator) may be simply expressed as “SLM”.

<Principle>
Before specifically describing an embodiment of a projector according to the present disclosure, a basic configuration example and an operation principle of the projector will be described.

  FIG. 1 is a cross-sectional view illustrating an exemplary basic configuration of the projector 100 according to the present disclosure. In the figure, coordinate axes (Y axis and Z axis) associated with the orientation of the projector 100 are shown. Although not shown in FIG. 1, an X axis exists in a direction orthogonal to both the Y axis and the Z axis, and XYZ coordinates are formed from the X axis, the Y axis, and the Z axis orthogonal to each other. Coordinate axes are also described in other drawings as necessary.

  This projector 100 is a projector that projects an image onto an object such as a screen 200, and a transmissive spatial light modulator 20 that forms a two-dimensional pattern that defines the image, and the spatial light modulator 20 with laser light 30. And a laser light source 10 for irradiation. For the sake of simplicity, FIG. 1 shows a configuration in which the optical axis of the laser beam 30 is parallel to the Z axis. The direction of the optical axis of the laser beam 30 may be changed on the way by a mirror (not shown) placed in the optical path.

  In this example, the laser light 30 emitted from the laser light source 10 is shaped by the beam shaping lens 40. The beam shaping lens 40 in this example includes a concave lens 40a and a convex lens 40b. The size (diameter) of the cross section perpendicular to the optical axis of the laser beam 30 is enlarged by the concave lens 40a and collimated to parallel light by the convex lens 40b. The laser beam 30 transmitted through the beam shaping lens 40 irradiates the back side of the spatial light modulator 20. The laser light 30 passes through a plurality of openings 22 of the spatial light modulator 20 and is emitted as a bundle of light beams 300. The intensity of the plurality of light beams 300 is modulated when passing through the opening 22 of the spatial light modulator 20.

  FIG. 2 is a front view schematically showing an arrangement example of the openings 22 in the spatial light modulator 20 that can be used in the projector 100 of the present disclosure. The spatial light modulator 20 generates a bundle of a plurality of light beams 300 having a two-dimensional spatial intensity distribution along the XY plane from the laser light 30 (see FIG. 1). Specifically, an array of openings 22 through which each of the plurality of light beams 300 passes is formed, and one light beam 300 is emitted for each opening 22. Note that the region other than the opening 22 does not necessarily have to be covered with one continuous light shielding layer. For example, if a plurality of wirings extending in the X-axis direction and a plurality of wirings extending in the Y-axis direction intersect and the region that transmits light when viewed from the Z-axis direction is divided into a plurality of parts, Functions as an “opening”.

  The arrangement of the openings 22 shown in FIG. 2 is merely an example, and the arrangement pattern is not limited to the example of FIG. You may employ | adopt the delta arrangement | positioning by which each opening 22 is arrange | positioned at the vertex of a triangle. The shape of each opening 22 is not limited to a rectangle, and may be a square, a hexagon, other polygons, a circle, an ellipse, or other complex shapes. The arrangement of the openings 22 need not be periodic and may be irregular.

  In the arrangement example of FIG. 2, when the size in the X-axis direction of one opening 22 is dx and the size in the Y-axis direction is dy, dx and dy can be set in a range of about 1 μm to 100 μm, for example. . Further, when the center-to-center distance in the X-axis direction of the array of the openings 22 is Px and the center-to-center distance in the Y-axis direction is Py, Px and Py are, for example, about 1.1 to 2 times dx and dy, respectively. Can be set to a size of.

  In the example of FIG. 2, horizontal × vertical = 15 × 5 apertures 22 are illustrated, but this is merely an example, and the number of apertures 22 included in one spatial light modulator 20 is, for example, horizontal 1024 ×. There may be 768 vertical. The number of openings 22 may be larger or smaller than this example, and is set to an arbitrary value according to the number of pixels required for the projection image.

  In the spatial light modulator 20 in this example, the light transmittance of each opening 22 can be changed in an analog manner in response to a drive signal (video signal), whereby the intensity of each light beam 300 is adjusted. . For example, it is assumed that the transmittances of the openings 22a, 22b, and 22c are set to 100%, 60%, and 0%, respectively. At this time, if the intensity (the square of the electric field amplitude) of the light beam 300 emitted from the opening 22a is 100 (arbitrary unit), the intensity (the square of the electric field amplitude) of the light beam 300 emitted from the opening 22b is 60. Further, the light beam 300 is not emitted from the opening 22c. In this way, by adjusting the spatial transmittance distribution of the spatial light modulator 20, it is possible to control the spatial intensity distribution of the bundle formed by the light beams 300 emitted from the multiple apertures 22, respectively. A typical example of the spatial light modulator 20 having such a function is a transmissive liquid crystal panel. When the spatial light modulator 20 is realized by a transmissive liquid crystal panel, a plurality of pixel regions included in the liquid crystal panel can function as a plurality of openings 22, respectively. A configuration example and operation of the liquid crystal panel will be described later.

  The spatial light modulator 20 according to the present disclosure is a spatial light amplitude modulator that modulates not “phase” but “amplitude (intensity)” of an incident laser beam 30 in units of pixels. The emission angle of the light beam 300 emitted from each opening 22 of the spatial light modulator 20 is constant for each opening 22 regardless of the two-dimensional pattern (transmission in-plane distribution) to be formed.

  As shown in FIG. 1, a bundle of many light beams 300 emitted from the spatial light modulator 20 is incident on the screen 200 and forms an array of irradiation points (light beam spots) on the screen 200. As a result, an image having pixels as the irradiation points of the individual light beams 300 on the screen 200 is formed on the screen 200. Such an array of irradiation points of the light beam 300 constitutes a projection image corresponding to the two-dimensional pattern on the spatial light modulator 20. Since the plurality of light beams 300 emitted from the spatial light modulator 20 are formed from the laser light 30 having high spatial coherence, the individual light beams 300 have high directivity. For this reason, even if the distance from the spatial light modulator 20 to the screen 200 changes, and the screen 200 moves to a position indicated by a broken line, for example, “blurred by defocus” does not occur in the projected image, and the projected image is clear. There is no change.

  As described above, the projector of the present disclosure operates in a focus-free manner, and can form a clear image without “blurring due to defocus” at an arbitrary projection distance.

  FIG. 3A schematically shows a laser beam 30 incident on the spatial light modulator 20 forming a certain two-dimensional pattern and light beams 300a and 300b emitted from the two openings 22 of the spatial light modulator 20. It is sectional drawing shown. The transmittance of the opening 22 that does not emit the light beam 300 is set to 0%. The laser beam 30 is a light wave having high coherence, and is a monochromatic (single wavelength) plane wave in the illustrated example.

  3B shows a laser beam 30 incident on the spatial light modulator 20 forming another two-dimensional pattern, and light beams 300a, 300b, 300c emitted from the four openings 22 of the spatial light modulator 20. It is sectional drawing which shows 300d typically. The transmittance of the opening 22 that does not emit the light beam 300 is set to 0%.

  As shown in FIGS. 3A and 3B, the bundle of light beams 300 emitted from the spatial light modulator 20 has a spatial intensity distribution corresponding to the two-dimensional pattern formed by the spatial light modulator 20. When an object is arranged so as to block part or all of the bundle of light beams 300, the light beam 300 incident on the object forms a bright light beam spot on the object surface. Since an array of these light beam spots (bright spots) forms a projected image as an array of pixels, a projection lens optical system for imaging is not necessary. The bundle of light beams 300 emerging from the spatial light modulator 20 may be referred to as an array of needle beams.

  FIG. 3C is a cross-sectional view illustrating an example in which the laser light 30 is incident on the spatial light modulator 20 obliquely. In the illustrated example, the light beams 300a and 300b are emitted obliquely. As described above, the laser light 30 may be incident on the spatial light modulator 20 at an angle rather than perpendicularly. Further, the laser beam 30 does not need to be a plane wave, and may be a spherical wave as long as the radius of curvature of the wave front is sufficiently larger than the size of the opening 22. Further, the wavelength of the laser beam 30 is not limited to one, and the laser beams 30 having different wavelengths may be configured to enter the same spatial light modulator 20 simultaneously or sequentially. When the projection of the image is not intended for human observation, the wavelength of the laser beam 30 may be out of the visible light range.

  FIG. 4 shows an example in which the light beams 300 a and 300 b emitted from the opening 22 of the spatial light modulator 20 are spread by the diffraction effect of the opening 22. The diffraction of the light beam 300 is in principle defined by the shape and size of the individual apertures 22 and the wavelength λ of the laser light 30. In general, the smaller the size of the opening 22, the stronger the diffraction and the easier the light beam 300 will spread. The spread of the light beam 300 can be defined by how much the cross-sectional size orthogonal to the optical axis (Z axis) of the light beam 300 increases as the Z coordinate increases. When the distance from the light emitting side surface of the spatial light modulator 20 is Rz and the diameter of the cross section of the light beam 300 at the distance Rz is D (Rz), the relationship of D (Rz) = 2θ × Rz is established approximately. To do. When the screen is located at the distance Rz, the size of the light beam spot (pixel) on the screen is equal to D (Rz).

  Such expansion of the light beam 300 by diffraction is negligible when the size of the opening 22 is sufficiently larger than the wavelength λ of the laser light 30 and the projection distance is short. However, when the size of the opening 22 is small and the projection distance is long, a microlens array 29 is arranged on the emission side of the opening 22 to suppress the spread of the individual light beams 300, for example, as shown in FIG. It is preferable. Each of the microlenses constituting the microlens array 29 can adjust and collimate the wavefront of the light beam 300 so as to cancel the spread due to diffraction of the light beam 300 emitted from the opening 22. The spread control of the light beam 300 by the microlens array 29 can be realized for the first time by adopting the transmissive spatial light modulator 20.

  The configuration that suppresses the spread of the light beam 300 caused by diffraction by the opening 22 is not limited to the microlens array 29. When the liquid crystal panel is used as the spatial light modulator 20, if the electric field distribution formed around each pixel electrode is adjusted to appropriately control the refractive index distribution of the liquid crystal layer, a lens effect is imparted and a diffraction effect is obtained. Can be offset.

  Diffraction can also occur due to the periodic arrangement of a large number of apertures 22. Such diffraction by “multi-slits” is convolved with diffraction by “single slits” of the individual apertures 22, and as a result, a light beam narrowed down at the center of each aperture 22 can be generated. In that case, a sufficiently thin light beam 300 can be realized over a long distance even if the microlens array 29 is omitted.

  FIG. 6 shows a configuration example in which the laser light 30 emitted from the laser light source 10 is incident on the spatial light modulator 20 without collimation into parallel light. In this example, the laser light 30 emitted from the laser light source 10 enters the spatial light modulator 20 while enlarging a cross section perpendicular to the optical axis. In other words, the laser light 30 having a curved wavefront like a spherical wave enters the spatial light modulator 20. However, since the size of the opening 22 is sufficiently smaller than the radius of curvature of the wavefront, it can be handled as if a plane wave is incident on each opening 22 at a predetermined angle. A plurality of light beams 300 formed from such laser light 30 are not parallel but show an emission angle corresponding to the position of the opening 22. For this reason, when an optical element such as a lens is not interposed between the spatial light modulator 20 and the screen 200, the image formed on the screen 200 changes when the distance from the spatial light modulator 20 to the screen 200 changes. The size also changes. In the example of FIG. 6, the image formed on the screen 200 becomes larger as the distance from the spatial light modulator 20 to the screen 200 becomes longer. The “image size” is proportional to the interval (center distance) between the light beam spots on the screen 200. Even if the image becomes larger, the number of light beam spots (pixels) constituting the image does not change. Even in this case, focusing is unnecessary, and an image free from “blurring due to defocus” is formed on the screen 200 placed at an arbitrary position.

  Here, an example of imaging by a conventional projector using a projection lens optical system will be described with reference to FIG. The projector shown in FIG. 7 includes an incoherent light source 18 such as a xenon lamp that emits white light, a liquid crystal panel 250, and a projection lens optical system 550. The distance from the surface (object surface) of the liquid crystal panel 250 that displays the primary image to the projection lens optical system 550 is a, the distance from the projection lens optical system 550 to the screen 200 (projection distance) is b, and the projection lens optical system 550 When the focal length is f, the relationship 1 / a + 1 / b = 1 / f needs to be established. The projection magnification M is determined by the equation M = b / a. In such a projector, a focused image is formed on the screen 200 unless the focal length f of the projection lens optical system 550 is adjusted every time the projection distance b is changed or the projection magnification M is changed. I can't. When the focus is on the screen 200 at the position indicated by the solid line, if the screen 200 is moved to the position of the broken line, “blurring due to defocus” occurs on the screen 200 at that position.

  On the other hand, the projector 100 according to the present disclosure forms an image without focusing light rays emitted from various points of the primary image (object surface) at various angles on corresponding points on the screen 200. No blur due to focus.

  FIG. 8A is a perspective view schematically illustrating an example in which text data is projected and displayed on the screen 200 using the projector 100 according to the present disclosure. FIG. 8B is a perspective view showing a state in which a part of the light beam bundle emitted from the projector 100 is blocked by another screen 200a. As can be seen from FIG. 8B, an image without defocusing is formed on both of the two screens 200 and 200a placed at different positions from the projector 100.

  FIG. 8C schematically shows a state where the screen 200 is inclined. In this state, the distance from the projector 100 to the screen 200 varies greatly depending on the position of the screen 200. Even in such a case, an image out of focus is formed at any position on the screen 200.

  FIG. 8D is a perspective view showing an example in which an image is displayed on the screen 200 that is not flat but is broken in the middle. A typical example of such a screen 200 is a wall surface portion orthogonal to the corner of the room. In general, the wall surface is not necessarily flat, but even when an object surface having unevenness, a step, or a curved surface is used as the screen 200, an image without defocusing is formed at any position on the object surface.

  In reality, the characters displayed on the screen 200 become larger as the distance from the projector 100 becomes longer. However, in these drawings, the size of the characters is changed according to the distance for simplicity. I have not done that.

  As described above, according to the projector of the present disclosure, a clear image can be formed even on an object having a shape that cannot be projected by the conventional projector as shown in FIG. 7, and projection mapping can also be realized. The projector according to the present disclosure is not a method of scanning a screen at a high speed with one or several laser beams, but a method of simultaneously irradiating an object such as a screen with a large number of light beams. For this reason, the brightness of an image displayed on an object such as a screen can be sufficiently increased even if the intensity of each light beam is suppressed to a level that is safe for human eyes. Because the power of the light beam is distributed, for example, even if a person in front of the screen on which the projected image is displayed faces the direction of the projector and some light beams hit the face There is almost no need to worry about the adverse effects of laser light entering through the pupil.

(Embodiment)
Hereinafter, embodiments of the projector of the present disclosure will be described. A more detailed description than necessary may be omitted. For example, detailed descriptions of already well-known matters and repeated descriptions for substantially the same configuration may be omitted. This is to avoid the following description from becoming unnecessarily redundant and to facilitate understanding by those skilled in the art. The inventors provide the accompanying drawings and the following description to enable those skilled in the art to fully understand the present disclosure. They are not intended to limit the claimed subject matter.

  FIG. 9 is a cross-sectional view schematically illustrating a configuration example of the projector 100 according to a non-limiting exemplary embodiment of the present disclosure. The projector 100 is a projector that projects an image onto an object such as a screen 200, and irradiates the spatial light modulator 20 with a laser beam and a transmissive spatial light modulator 20 that forms a two-dimensional pattern that defines the image. The laser light source 10 is provided. A driving current flows from the laser driver 60 to the laser light source 10 to control the laser oscillation state of the laser light source 10. The spatial light modulator 20 is driven by the SLM driver 70. The laser driver 60 and the SLM driver 70 are controlled by a computer (not shown) such as a microcontroller. A part or all of the SLM driver 70 may be realized by a driving IC mounted on the spatial light modulator 20.

  The projector 100 according to this embodiment includes a beam shaping lens 40 and a projection magnification adjustment lens 50. The beam shaping lens 40 in this example has a concave lens 40a and a convex lens 40b. The illustrated lens is described as an element having an exemplary shape for the sake of clarity, and does not represent the actual shape and size of the lens. Although the projection magnification adjusting lens 50 is a single lens in the drawing, it may actually be a “combination lens” including one or a group of various lenses. Similarly, the beam shaping lens 40 may be another form of “combination lens” or a single lens.

  The projection magnification adjustment lens 50 adjusts the traveling direction of each light beam 300 to enlarge or reduce the arrangement interval of irradiation points (light beam spots) on the screen 200. Unlike the image formation by the projection lens optical system 550 shown in FIG. 7, this operation does not require a work for focusing on the screen 200.

  The screen 200 may be provided with irregularities that function as fine Fresnel lenses or lenticular lenses in order to increase the brightness of the projected image. The screen 200 may be formed from a highly reflective fabric (such as a silk screen), or may be formed from a highly diffuse reflective fabric (such as a mat screen). In the former case, the brightness of the projected image can be increased, and in the latter case, a wide viewing angle can be realized.

  As described with reference to FIG. 1, also in this embodiment, the laser light 30 emitted from the laser light source 10 is shaped by the beam shaping lens 40 including the concave lens 40 a and the convex lens 40 b as components, and the spatial light modulator. 20 is incident on the back side. Note that the term “beam shaping” in the present application means that at least one of the shape and size of a cross section perpendicular to the optical axis direction of the laser light 30 is changed. The shape of the cross section is defined by the intensity distribution in the cross section of the light beam 300. For example, the maximum intensity value at the center of the cross section may be used as a reference value, and the boundary of the cross section may be defined by a portion having half the intensity of the reference value.

  FIG. 10 is a cross-sectional view schematically showing an example of a schematic configuration of the spatial light modulator 20 in the present embodiment. The spatial light modulator 20 includes a pair of transparent substrates 23a and 23b in which a liquid crystal layer 21 is sealed, a plurality of pixel electrodes 24 arranged in a matrix on the transparent substrate 23a, and a counter electrode 25 on the transparent substrate 23b. And a liquid crystal panel. The transparent substrates 23a and 23b can be formed of glass or synthetic resin. Both the pixel electrode 24 and the counter electrode 25 are made of a transparent conductive material that transmits the laser beam 30. The surfaces of these electrodes 24 and 25 are covered with an alignment film (not shown), and the alignment of liquid crystal molecules in the liquid crystal layer 21 is regulated in a desired direction. The liquid crystal layer 21 is formed of, for example, nematic liquid crystal (TN liquid crystal) whose alignment is regulated so that twisted alignment occurs. Further, the spatial light modulator 20 may include a color filter array 26 as necessary. When irradiating the spatial light modulator 20 with a “white” laser beam 30 in which laser beams in respective wavelength ranges corresponding to the three primary colors of red (R), green (G), and blue (B) are multiplexed, a color filter array 26 can emit light beams 300 having different wavelengths for each pixel. For example, three adjacent openings in FIG. 2, such as openings 22a, 22b, and 22c, can be covered with red, green, and blue color filters, respectively. A black matrix having a light shielding property may be formed in a region other than the opening 22. Details of the color image display will be described later. First, for simplicity, an example of monochromatic light image display will be described.

  The spatial light modulator 20 shown in FIG. 10 includes a first polarizing film 28a provided on the light incident side of the transparent substrate 23a and a second polarizing film 28b provided on the light emitting side of the transparent substrate 23b. . In one embodiment, the polarization transmission axis of the first polarizing film 28a and the polarization transmission axis of the second polarizing film 28b are orthogonal to each other to form a crossed Nicols arrangement. Transistors and wiring (not shown) are formed on the transparent substrate 23a. The transistor is switched by the SLM driver 70, and the voltage applied to the liquid crystal layer 21 is controlled in units of pixel regions. According to this example, in a pixel to which no voltage is applied between the pixel electrode 24 and the counter electrode 25, the polarization direction is rotated (the polarization state changes) in the process in which the laser light 30 passes through the liquid crystal layer 21. It can be transmitted through the second polarizing film 28b (normally on operation). On the other hand, in the pixel to which a voltage is applied between the pixel electrode 24 and the counter electrode 25, the polarization direction is maintained in the process in which the laser light 30 passes through the liquid crystal layer 21. Will be. If the polarization transmission axis of the first polarizing film 28a and the polarization transmission axis of the second polarizing film 28b are parallel, the operation opposite to the above is performed (normally off operation). Thus, individual pixel regions function as individual openings 22 of the spatial light modulator 20. The light transmittance of each opening 22 can be adjusted in an analog manner by a voltage applied between each pixel electrode 24 and the counter electrode 25.

  Note that the laser light 30 emitted from the laser light source 10 is usually linearly polarized in a predetermined direction. For example, when an edge-emitting semiconductor laser element is used as the laser light source 10, it is generally polarized in a direction parallel to the active layer of the semiconductor laser element. Therefore, in order to avoid unnecessary dimming by the first polarizing film 28a, it is preferable to match the linear polarization direction of the laser light 30 with the polarization transmission axis of the first polarizing film 28a.

  Further, the first polarizing film 28a may be omitted by positively utilizing that the laser beam 30 is linearly polarized light. Even without the first polarizing film 28 a, the linearly polarized laser beam 30 can be incident on the spatial light modulator 20. By omitting the first polarizing film 28a, the absorption of the laser light 30 by the polarizing film 28a on the light incident side can be eliminated. Even when the polarization direction of the laser light and the polarization transmission axis of the polarizing film are matched, about 1 to 5% of the laser light is absorbed by the polarizing film, and thus the light is reduced. However, the first polarizing film By omitting 28a, the laser beam 30 can be used more efficiently. Further, by omitting the first polarizing film 28a, it is possible to reduce the cost of parts and manufacturing, and to contribute to the thinning of the spatial light modulation element 20. In particular, when a portable projector is manufactured using the miniaturized spatial light modulator 20, it is an important advantage that a polarizing film having a thickness of, for example, about 0.2 mm becomes unnecessary.

  In the spatial light modulator 20 realized by the liquid crystal panel using the TN liquid crystal, the polarization direction of the laser light 30 incident on the spatial light modulator 20 and the polarization transmission axis of the second polarizing film 28b on the light emission side are as follows. They are adjusted to be orthogonal or parallel to each other. However, from the viewpoint of the contrast of the display image, it is preferable that the polarization transmission axis of the second polarizing film 28b is orthogonal to the polarization direction of the laser light 30. By adopting such a configuration, a high-contrast image display without so-called black float can be realized.

  The structure of the spatial light modulator 20 is not limited to the above example. There are various types of liquid crystal panels such as an in-plane switching type and a vertical alignment type, and any type of liquid crystal panel can be adopted. Further, instead of the liquid crystal panel, a slide on which an image is drawn or a preparation on which a sample is fixed can be used as the spatial light modulator 20. Such a spatial light modulator 20 can be used when displaying a still image. By adopting a mechanism for holding the spatial light modulator 20 in a replaceable manner, it is possible to select a spatial light modulator 20 as necessary from a large number of spatial light modulators 20 and arrange it on the optical path. .

  FIG. 11 is a diagram illustrating a configuration example of a configuration in which an observer views the screen 200 from the direction of a white arrow, for example, a rear projection type TV set. The basic configuration is the same as projector 100 shown in FIG. In the example of FIG. 11, an image projected on the screen 200 is viewed by an observer located on the opposite side of the projector 100 from the screen 200. Although the screen 200 is not orthogonal to the optical axis (Z axis) of the projector 100 and is largely inclined, blurring due to defocus does not occur. However, a function of adjusting the direction of the optical axis of the light beam 300 may be added to the projection magnification adjustment lens 50 so that the distance between the light beam spots (pixels) on the screen 200 does not change according to the projection distance. Alternatively, the two-dimensional pattern formed on the spatial light modulator 20 may be deformed in advance so that the display image is not distorted even if the interval between the light beam spots (pixels) on the screen 200 changes. Such deformation can be performed by correcting an image signal supplied to the SLM driver 70 by a computer (not shown).

  A mirror may be disposed between the projector 100 and the screen 200. With such a mirror, the degree of freedom of the orientation of the projector 100 is increased, and a TV set having a more compact housing can be realized.

  FIG. 12 is a cross-sectional view illustrating a configuration example of a projector 100 according to still another embodiment. The projector 100 according to this embodiment includes a convex lens 50b disposed between the spatial light modulator 20 and the screen 200 as a projection magnification adjustment lens, and the convex lens 50b enlarges an image.

  FIG. 13 is a cross-sectional view illustrating a configuration example of a projector 100 according to still another embodiment. The projector 100 in this embodiment does not include a magnification magnifying lens between the spatial light modulator 20 and the screen 200. Instead, the image can be magnified using a concave lens 40 a disposed between the laser light source 10 and the spatial light modulator 20. In this embodiment, the laser light 30 transmitted through the concave lens 40a is incident on the spatial light modulator 20 in a spherical wave state instead of a plane wave, and the intensity is spatially modulated. The bundle of laser beams 300 emitted from the spatial light modulator 20 propagates through the space while spreading and enters the screen 200.

  FIG. 14 is a cross-sectional view illustrating a configuration example of a projector 100 according to still another embodiment. The difference between the projector 100 in this embodiment and the projector 100 in FIG. 13 is that in this embodiment, the lens disposed between the laser light source 10 and the spatial light modulator 20 is a convex lens 40b. The image can also be enlarged using the convex lens 40b.

  FIG. 15 is a cross-sectional view illustrating a configuration example of a projector 100 according to still another embodiment. The projector 100 in this embodiment does not include a magnification magnification lens between the spatial light modulator 20 and the screen 200, and does not include a lens disposed between the laser light source 10 and the spatial light modulator 20. In this embodiment, the laser light 30 emitted from the laser light source 10 expands without passing through a lens and enters the spatial light modulator 20. The bundle of laser beams 300 emitted from the spatial light modulator 20 also spreads and reaches the screen 200 as it is.

  The principle of expanding the laser light 30 emitted from the laser light source 10 without using a lens will be described later. Even when the configuration of FIG. 15 is adopted, optical elements such as lenses, mirrors, and diaphragms may be appropriately arranged on the optical path for the purpose of beam shaping or adjustment of light intensity distribution. Further, a mechanism for reducing speckle of laser light may be provided as appropriate. These modifications may be made in other embodiments as well.

  FIG. 16 is a cross-sectional view illustrating a configuration example of a projector 100 according to still another embodiment. In this embodiment, by arranging the mirror 80 on the optical path, the Z-axis direction of the projector 100 can be shortened.

  In each of the above embodiments, the projector 100 includes the single laser light source 10, but the projector 100 may include a plurality of laser elements as the laser light source 10. If a plurality of laser elements oscillate at different wavelengths and emit laser beams of different colors, a color still image or moving image can be displayed.

  In order to display a full color image, the following configuration may be employed.

Configuration (1) A liquid crystal panel including a color filter array is employed as a spatial light modulator, and the spatial light modulator is irradiated with red, green, and blue laser beams.
Configuration (2) A liquid crystal panel that does not include a color filter array is employed as a spatial light modulator, and the spatial light modulator is sequentially irradiated with red, green, and blue laser beams (field sequential method).
Configuration (3) Three liquid crystal panels not provided with a color filter array are employed as spatial light modulators, and each of the spatial light modulators is irradiated with red, green, and blue laser beams (three-plate type).

  First, an example of the configuration (1) will be described with reference to FIG.

The projector 100 having the configuration (1) includes, as a laser light source, a first laser element 10R that oscillates in a first wavelength range, a second laser element 10G that oscillates in a second wavelength range, and a third wavelength range. And a third laser element 10B that oscillates. Here, the first wavelength range, the second wavelength range, and the third wavelength range are R (red), G (green), and B (blue), respectively. The first laser element 10R, the second laser element 10G, and the third laser element 10B are, for example, a red semiconductor laser element having a wavelength of 650 nm, a green semiconductor laser element having a wavelength of 515 to 530 nm, and a blue semiconductor having a wavelength of 450 nm, respectively. It can be a laser element. As the red semiconductor laser element, for example, an AlGaInP laser diode is preferably used. As the green and blue semiconductor laser elements, GaN laser diodes having different compositions can be used. As the second laser element 10G, a DPSS (Diode Pumped Solid State) laser apparatus including a semiconductor laser element that emits infrared light and a wavelength conversion element may be used. A laser crystal such as an Nd: YVO ₄ crystal or a Yb: YAG crystal is excited by infrared light having a wavelength of 808 nm generated by an infrared light semiconductor laser element, and infrared laser light having a wavelength of 1064 nm, for example, is generated. When this infrared laser beam is incident on a nonlinear optical crystal such as a KTP (KTiOPO ₄ ) crystal, a green laser beam having a wavelength of 532 nm, which is the second harmonic, can be generated.

  The projector 100 in FIG. 17 includes a dichroic prism 82. The dichroic prism 82 has a red reflecting surface 82R that selectively reflects red light and a blue reflecting surface 82B that selectively reflects blue light. By using the dichroic prism 82, the red laser beam 30R and the blue laser beam 30B are reflected by the red reflecting surface 82R and the blue reflecting surface 82B, and the green laser beam 30G is transmitted as it is to synthesize the three color laser beams. Thus, white laser light 30 is obtained. Instead of using the dichroic prism 82, the red, blue, and green laser beams 30R, 30G, and 30B may be combined using a red reflecting dichroic mirror and a blue reflecting dichroic mirror.

  When the synthesized white laser light 30 enters the red filter in the color filter array of the spatial light modulator 20, only the red laser light can selectively pass through the red filter. Similarly, when entering the green filter, only the green laser light can selectively pass through the green filter, and when entering the blue filter, only the blue laser light can selectively pass through the blue filter. .

  Note that the color balance is performed so that the white laser light synthesized by the dichroic prism 82 exhibits a predetermined color temperature. The color balance can be realized by adjusting the light output power of each of the laser light sources 10R, 10G, and 10B by the laser driver 60. Or you may arrange | position the ND (neutral density) filter for dimming laser beam 30R, 30G, 30B on an optical path as needed. Further, as a method of adjusting the light output power of each of the laser light sources 10R, 10G, and 10B, pulse width modulation of laser oscillation may be performed to adjust the duty ratio for each color. When this method is adopted, strictly speaking, the laser light 30 that irradiates the spatial light modulator 20 is not always white, and any one of the red, green, and blue laser lights 30R, 30G, and 30B. There may be a period in which only one or two are incident on the spatial light modulator 20. The important point is that a full color image that is natural to the human eye is observed.

  Note that laser light is extremely excellent in monochromaticity unlike light emitted from an LED or a phosphor. Therefore, the “white” laser beam 30 formed by combining the red, blue, and green laser beams 30R, 30G, and 30B does not have a broad spectrum like the light emitted from the white LED. Shows sharp peaks at one wavelength. Since the color filters of the respective colors on which the “white” laser light 30 is incident selectively transmit the laser light having one of the three wavelengths, the light beam 300 emitted from the spatial light modulation element 20 is also provided. Has a sharp peak. Therefore, in the projector of the present disclosure, even if a liquid crystal panel having a color filter array is employed, the color gamut is expanded as compared with a conventional projector using a high-intensity discharge lamp or LED.

  Next, an example of the configuration (2) will be described with reference to FIGS. 18A, 18B, 18C, and 19. Configuration (2) implements a field sequential method.

  The basic configuration is the same as that of the projector 100 in FIG. One of the differences is that the spatial light modulator 20 in this configuration does not include a color filter array.

  First, refer to FIG. 18A. In the state shown in the figure, red laser light 30R is emitted from the first laser element 10R, but no laser light is emitted from the second and third laser elements 10G and 10B. The red laser light 30R emitted from the first laser element 10R is reflected by the red reflecting surface 82R of the dichroic prism 82 and irradiates the spatial light modulator 20. The red laser beam 30R is spatially modulated to form a bundle of red light beams 300R. A sub-frame image is formed by the bundle of red light beams 300R.

  Reference is now made to FIG. In the state shown in the drawing, the green laser light 30G is emitted from the second laser element 10G, but no laser light is emitted from the first and third laser elements 10R and 10B. The green laser light 30G emitted from the second laser element 10G passes through the red reflecting surface 82R and the blue reflecting surface 82B of the dichroic prism 82 and irradiates the spatial light modulator 20. The green laser beam 30G is spatially modulated to form a bundle of green light beams 300G. Another sub-frame image is formed by the bundle of green light beams 300G.

  Reference is now made to FIG. In the state shown in the drawing, the blue laser light 30B is emitted from the third laser element 10B, but the laser light is not emitted from the first and second laser elements 10R and 10G. The blue laser light 30 </ b> B emitted from the third laser element 10 </ b> B is reflected by the blue reflecting surface 82 </ b> B of the dichroic prism 82 and irradiates the spatial light modulator 20. The blue laser beam 30B is spatially modulated to form a bundle of blue light beams 300B. Still another sub-frame image is formed by the bundle of the blue light beams 300B.

  The above operations are repeated sequentially. FIG. 19 is a diagram schematically showing the lighting states of the laser light sources 10R, 10G, and 10B. In FIG. 19, rectangles enclosing the characters “R”, “G”, and “B” indicate periods in which the laser light sources 10R, 10G, and 10B oscillate and emit laser light. As shown in FIG. 19, each of the laser light sources 10R, 10G, and 10B periodically repeats a lighting state and a non-lighting state. A full-color image of one frame is composed of three sub-frames of red, green, and blue. The lighting times of the laser light sources 10R, 10G, and 10B may be different from each other.

  When the field sequential method is employed, different color laser beams are sequentially transmitted through each pixel region of the liquid crystal panel, so that it is not necessary to divide the pixels for each color. For this reason, in the field sequential type liquid crystal panel, the number of pixels (the number of openings) can be reduced to 1/3 as compared with the color filter array type. This greatly contributes to reducing the diffraction effect by enlarging individual pixel sizes and reducing the area of the liquid crystal panel. Further, since a process of forming a color filter array on the liquid crystal panel is not necessary, the manufacturing cost is reduced, and an inexpensive liquid crystal panel with high light transmittance can be employed.

  Next, an example of the configuration (3) will be described with reference to FIG. The projector 100 having the configuration (3) includes three spatial light modulators 20R, 20G, and 20B. The spatial light modulators 20R, 20G, and 20B do not include a color filter array. Each of the spatial light modulators 20R, 20G, and 20B is irradiated with laser beams having different wavelength ranges. Specifically, the spatial light modulator 20R is irradiated with the red laser light 30R emitted from the laser light source 10R. Similarly, the spatial light modulator 20G is irradiated with the green laser light 30G emitted from the laser light source 10G, and the spatial light modulator 20B is irradiated with the blue laser light 30B emitted from the laser light source 10B.

  In the projector 100 of FIG. 20, a bundle of laser beams emitted from the spatial light modulators 20R, 20G, and 20B is synthesized by the dichroic prism 82.

  As described above, a color image can be formed by using a plurality of laser elements having different oscillation wavelength ranges, but the color of laser light used for synthesis is not limited to the three primary colors of light. A laser having a wavelength corresponding to a color different from colors other than red, green, and blue may be added. The so-called multi-primary color can further expand the color gamut. Further, as described above, since laser light has extremely high monochromaticity, the color gamut is expanded as compared with a projector using a conventional light source, and the color reproducibility of a display image can be greatly improved.

  The basic configuration of projector 100 in FIG. 20 is the same as the basic configuration of projector 100 in FIG. 9, but the basic configuration in projector 100 in FIGS. 12 to 15 may be adopted. In particular, the basic configuration of the projector 100 of FIG. 15 is suitable for reducing the size and weight of the projector because a complicated optical lens system is unnecessary.

  Hereinafter, a configuration example and an operation principle of the laser light source 10 for realizing the projector 100 of FIG. 15 will be described. As such a laser light source 10, a semiconductor laser element is preferably used. This is because the laser light emitted from the semiconductor laser element has a property of expanding due to its own diffraction effect. Hereinafter, the diffraction effect of the semiconductor laser element will be described.

<Diffraction effect of semiconductor laser element>
FIG. 21 is a perspective view schematically showing a basic configuration of a typical semiconductor laser element. In the figure, coordinate axes composed of an x-axis, a y-axis, and a z-axis that are orthogonal to each other are described. This coordinate axis is a coordinate axis unique to the semiconductor laser element, and is different from a coordinate axis unique to the projector. For distinction, the former coordinate axes are represented by lowercase x, y, and z, and the latter coordinate axes are represented by uppercase X, Y, and Z.

  A semiconductor laser device 10D shown in FIG. 21 has a semiconductor multilayer structure 122 having an end face (facet) 126a including a light emitting region (emitter) 124 that emits laser light. The semiconductor laminated structure 122 in this example is supported on the semiconductor substrate 120 and includes a p-side cladding layer 122a, an active layer 122b, and an n-side cladding layer 122c. A striped p-side electrode 12 is provided on the upper surface 126 b of the semiconductor multilayer structure 122. An n-side electrode 16 is provided on the back surface of the semiconductor substrate 120. When a current exceeding the threshold value flows from the p-side electrode 12 to the n-side electrode 16 through a predetermined region of the active layer 122b, laser oscillation occurs. The end surface 126a of the semiconductor stacked structure 122 is covered with a reflection film (not shown). The laser light is emitted from the light emitting region 124 to the outside through the reflective film.

  The configuration shown in FIG. 21 is only a typical example of the configuration of the semiconductor laser device 10D, and is simplified for the sake of simplicity. The example of the simplified configuration does not limit the embodiment of the present disclosure described in detail later. In other drawings, description of components such as the n-side electrode 16 may be omitted for simplicity.

  In the semiconductor laser device 10D shown in FIG. 21, since the end face 126a of the semiconductor multilayer structure 122 is parallel to the xy plane, the laser light is emitted from the light emitting region 124 in the z-axis direction. The optical axis of the laser light is parallel to the z-axis direction. In the end face 126a, the light emitting region 124 has a size Ey in a direction parallel to the stacking direction (y-axis direction) of the semiconductor stacked structure 122 and a size Ex in a direction perpendicular to the stacking direction (x-axis direction). . In general, the relationship Ey <Ex is established.

  The y-axis direction size Ey of the light emitting region 124 is defined by the thickness of the active layer 122b. The thickness of the active layer 122b is usually about half of the laser oscillation wavelength or less. On the other hand, the x-axis direction size Ex of the light emitting region 124 is a structure in which current or light contributing to laser oscillation is confined in the horizontal lateral direction (x-axis direction), in the example of FIG. Can be defined by width. In general, the y-axis direction size Ey of the light emitting region 124 is around 0.1 μm or less, and the x-axis direction size Ex is larger than 1 μm. In order to increase the light output, it is effective to enlarge the size Ex of the light emitting region 124 in the x-axis direction, and the x-axis direction size Ex can be set to 50 μm or more, for example.

  In the present specification, Ex / Ey is referred to as “aspect ratio” of the light emitting region. The aspect ratio (Ex / Ey) in the high-power semiconductor laser device can be set to 50 or more, for example, or may be set to 100 or more. In the present specification, a semiconductor laser element having an aspect ratio (Ex / Ey) of 50 or more is referred to as a broad area type semiconductor laser element. In a broad area type semiconductor laser device, the horizontal and transverse modes often oscillate in a multimode rather than a single mode.

  FIG. 22A is a perspective view schematically showing how the laser beam 30 emitted from the light emitting region 124 of the semiconductor laser element 10D spreads (divergence). FIG. 22B is a side view schematically showing how the laser beam 30 spreads, and FIG. 22C is a top view schematically showing how the laser beam 30 spreads. On the right side of FIG. 22B, a front view of the semiconductor laser element 10D viewed from the positive direction of the z-axis is also shown for reference.

  The size in the y-axis direction in the cross section of the laser beam 30 is defined by the length Fy, and the size in the x-axis direction is defined by the length Fx. Fy is a full width at half maximum (FWHM) in the y-axis direction when the light intensity of the laser beam 30 on the optical axis is used as a reference in a plane intersecting the optical axis of the laser beam 30. Similarly, Fx is the full width at half maximum (FWHM) in the x-axis direction when the light intensity of the laser beam 30 on the optical axis is used as a reference in the plane.

  The spread of the laser beam 30 in the y-axis direction is defined by an angle θf, and the spread in the x-axis direction is defined by an angle θs. θf is a full width at half maximum in the yz plane when the light intensity of the laser beam 30 at the point where the spherical surface intersects the optical axis of the laser beam 30 on the spherical surface equidistant from the center of the light emitting region 124. . Similarly, θs is a half value in the xz plane when the light intensity of the laser beam 30 at the point where the spherical surface intersects the optical axis of the laser beam 30 on a spherical surface equidistant from the center of the light emitting region 124. Full-width.

  22D is a graph showing an example of the spread of the laser light 30 in the y-axis direction, and FIG. 22E is a graph showing an example of the spread of the laser light 30 in the x-axis direction. The vertical axis of the graph is the normalized light intensity, and the horizontal axis is the angle. The light intensity of the laser beam 30 has a peak value on the optical axis parallel to the z-axis. As can be seen from FIG. 22D, the light intensity in a plane parallel to the yz plane including the optical axis of the laser beam 30 roughly shows a Gaussian distribution. On the other hand, the light intensity in the plane parallel to the xz plane including the optical axis of the laser beam 30 shows a narrow distribution with a relatively flat top, as shown in FIG. 22E. This distribution often has a plurality of peaks due to multimode oscillation.

  The lengths Fy and Fx that define the cross-sectional size of the laser beam 30 and the angles θf and θs that define the spread of the laser beam 30 may be given definitions other than those described above.

  As shown in the figure, the way in which the laser beam 30 emitted from the light emitting region 124 spreads has anisotropy, and generally the relationship θf> θs is established. The reason why θf becomes large is that strong diffraction occurs in the y-axis direction because the y-axis direction size Ey of the light emitting region 124 is less than or equal to the wavelength of the laser beam 30. On the other hand, the x-axis direction size Ex of the light emitting region 124 is sufficiently longer than the wavelength of the laser light 30, and diffraction hardly occurs in the x-axis direction.

  FIG. 23 is a graph showing an example of the relationship between the y-axis direction size Fy and the x-axis direction size Fx of the cross section of the laser light 30 and the distance from the light emitting region 124 (position in the z-axis direction). As can be seen from FIG. 23, the cross section of the laser beam 30 shows a near-field pattern (NFP) that is relatively long in the x-axis direction in the vicinity of the light emitting region 124, but if it is sufficiently far from the light emitting region 124, y A far field pattern (FFP) extending in the axial direction is shown.

  As described above, the enlargement of the cross section of the laser beam 30 is “fast” in the y-axis direction and “slow” in the x-axis direction as the distance from the light emitting region 124 increases. Therefore, with the semiconductor laser element 10D as a coordinate reference, the y-axis direction is referred to as a fast axis direction and the x-axis direction is referred to as a slow axis direction.

  FIG. 24 is a perspective view illustrating a configuration example for realizing the projector 100 of FIG. 15 using the semiconductor laser element 10D. In this example, the semiconductor laser element 10D is mounted on a package 400. The package 400 includes a heat sink (not shown) to which the semiconductor laser element 10D is fixed, a metal wiring that supplies a driving current to the semiconductor laser element 10D, a stem that supports these, and the like, but is not shown because it is well known. To do. The direction of the package 400 is determined so that the semiconductor lamination direction (y-axis direction, that is, the fast axis direction) of the semiconductor laser element 10D is orthogonal to the vertical direction (Y-axis direction) in FIG. In FIG. 24, only a single semiconductor laser element 10D is shown, but when a plurality of semiconductor laser elements 10D are used, the semiconductor stacking direction of all the semiconductor laser elements 10D is the vertical direction (Y-axis direction). Matches.

  As shown in FIG. 24, the laser beam 30 emitted from the semiconductor laser element 10D has a size Fy in the fast axis (y axis) direction in the slow axis (x axis) direction in a cross section perpendicular to the optical axis (z axis). The spatial light modulator 20 is irradiated with the laser light 30 having a shape larger than the size Fx and having such an anisotropic shape.

  In the example shown in FIG. 24, the light modulation region (entire light transmission region) 20T of the laser light 30 on the spatial light modulator 20 has a first size TX in the X-axis direction (lateral direction) and the X-axis direction. Has a second size TY in the Y-axis direction (vertical direction) perpendicular to the first size TX, and the first size TX is larger than the second size TY. In this example, the semiconductor laser device 10 </ b> D is arranged so that the fast axis (y-axis) direction coincides with the X-axis direction of the light modulation region 20 </ b> T in the spatial light modulator 20. In other words, in the semiconductor laser device 10D, the semiconductor lamination direction (y direction or fast axis direction) is orthogonal to the minimum dimension direction (Ty direction, that is, Y axis direction) of the light modulation region 20T of the spatial light modulator 20. Is arranged. Then, the laser light 30 emitted from the semiconductor laser element 10D enters the light modulation region 20T of the spatial light modulator 20 while enlarging a cross section perpendicular to the optical axis (z axis), and the irradiation region of the laser light 30 is The entire light modulation region 20T is included. By adopting such a configuration, it is possible to effectively irradiate the light modulation region 20T of the spatial light modulator 20 using the natural spread of the laser light 30 emitted from the semiconductor laser element 10D. For this reason, it is possible to reduce the size and weight of the projector 100 and to reduce the manufacturing cost while reducing the loss of light amount due to the lens or the mirror.

  FIG. 25 is a perspective view schematically showing a configuration example in which three semiconductor laser elements 10D having different oscillation wavelengths are arranged in the housing of the projector 100. FIG. The laser beams 30 of different colors are combined by the dichroic prism 82 and irradiate the spatial light modulator 20. All the semiconductor laser elements 10D are arranged so that the semiconductor lamination direction (fast axis direction) is orthogonal to the minimum dimension direction (Ty direction, that is, Y-axis direction) of the light modulation region 20T of the spatial light modulator 20. . According to such a configuration, the entire light modulation region 20T of the spatial light modulator 20 can be effectively irradiated using the natural spread of the laser light 30 emitted from each semiconductor laser element 10D. In the configuration of FIG. 25, an optical element such as a mirror or a diaphragm (not shown) may be arranged in the projector 100.

  In applications where high light output is required, the chip area of the semiconductor laser element 10D is increasing. As shown in FIG. 25, by realizing an arrangement in which the semiconductor lamination direction of all the semiconductor laser elements 10D is parallel to the base 100C of the housing, the occupation area of the semiconductor laser element 10D on the base 100C is reduced. Thus, the projector 100 can be downsized.

  FIG. 25 does not illustrate a package that accommodates each semiconductor laser element 10D. As the chip area of each semiconductor laser element 10D increases, the package size may be relatively short in the semiconductor stacking direction of the semiconductor laser element 10D and relatively long in the direction perpendicular to the semiconductor stacking direction. For this reason, even when the semiconductor laser element 10D is housed in a package, the arrangement of FIG. 25 contributes to the reduction of the exclusive area.

  The laser beam 30 emitted from the normal semiconductor laser element 10D is linearly polarized in the slow axis (x axis) direction. When such a semiconductor laser element 10D is used, the light modulation region 20T of the spatial light modulator 20 is irradiated with laser light 30 linearly polarized in the Y-axis direction. When the spatial light modulator 20 is realized by the above-described TN liquid crystal panel, the polarization transmission axis of the polarizing film on the light exit side is the X-axis direction or the Y-axis direction according to the normally-on or normally-off operation. To match. As described above, from the viewpoint of the contrast of the display image, the polarization transmission axis of the polarizing film on the light output side is orthogonal to the polarization direction of the laser beam 30 when entering the spatial light modulator 20. preferable. In other words, the polarization transmission axis of the light emitting side polarizing film is preferably orthogonal to the minimum dimension direction (Ty direction, that is, Y-axis direction) of the light modulation region 20T. This is because high-contrast image display without so-called black floating can be realized.

  Between the spatial light modulator 20 and the semiconductor laser element 10D arranged as described above, a beam shaping lens such as a collimator lens or a diaphragm is arranged for the purpose of adjusting the cross-sectional shape or light intensity distribution of the laser light 30. May be. Further, even when the configurations of FIGS. 24 and 25 are employed, it is not excluded to provide a projection magnification adjusting lens on the light emitting side of the spatial light modulator 20.

  When the semiconductor laser element 10D is used as the laser light source 10, the light source size is extremely small, and the laser beam can be expanded by the diffraction effect exhibited by the semiconductor laser element 10D itself. Can be achieved. The semiconductor laser element 10D is generally commercialized by being loaded in a package having a diameter of 5.6 mm or 3.0 mm. The chip size of the semiconductor laser element 10D mounted therein is, for example, It is as small as 1.0 mm in the resonator length direction (z-axis direction), 0.3 mm in the lateral direction (x-axis direction) of the end face, and 0.05 mm in the thickness direction (y-axis direction). When such a small laser light source and a small liquid crystal panel are used, a portable small projector can be realized. In the case of performing color display, a liquid crystal panel having a size of, for example, 8 mm wide × 6 mm long can be used as long as the color filter array described above is provided. In addition, since the number of pixels necessary for display can be reduced to 1/3 with the field sequential method, for example, an ultra-small liquid crystal panel having a size of 4 mm wide × 3 mm long or smaller is employed. The projector can be further reduced in size. With such a projector, for example, by attaching it to the upper part of the display of a notebook personal computer, it becomes possible to project and display an image on the desktop or room wall surface in a focus-free manner. Such a configuration example can be easily realized by adopting a transmissive spatial light modulator instead of a reflective type.

  In the above example, an edge-emitting semiconductor laser element that emits laser light from the end face of the semiconductor multilayer structure is used as the semiconductor laser element 10D. However, the semiconductor laser element 10D that can be employed in the projector of the present disclosure is It is not limited to examples. A surface emitting semiconductor laser element may be used.

  The projector of the present disclosure can also be used for purposes other than the purpose of displaying a still image or a moving image that can be seen by human eyes on a screen.

  FIG. 26 shows an example of the configuration of an exposure apparatus that projects an image onto a workpiece 200b having an uneven surface or curved surface. Taking advantage of the focus-free characteristics, it becomes possible to expose a photosensitive resin provided on the surface of an object, which has been difficult with a conventional exposure apparatus, without a mask.

  FIG. 27 shows an example of a configuration in which a bundle of light beams 300 is incident on a light receiving surface of a light receiving element 200c such as an image sensor. The two-dimensional pattern formed by the spatial light modulator 20 is encoded so as to indicate information to be transmitted, for example. The encoded information is reflected in the spatial intensity distribution indicated by the bundle of light beams 300 emitted from the spatial light modulator 20. The light receiving element 200c detects a spatial intensity distribution indicated by the bundle of light beams 300. Based on the output of the light receiving element 200c, a computer (not shown) can decode the information. Thus, the projector according to the present disclosure can be applied to an information transmission device.

  In the examples shown in FIGS. 26 and 27, the wavelength of the laser beam may be out of the visible light range. Even laser light in the ultraviolet or infrared wavelength region can be used in the projector of the present disclosure. With the projector of the present disclosure, for example, it is possible to realize 3D printing by irradiating light of an appropriate wavelength to a desired position of the photosensitive resin. By increasing the output of the light beam, the temperature of the irradiation point on the object may be locally increased, and the object may be processed or surface-treated.

  From the viewpoint of reducing the size and weight of the apparatus, it is preferable to use a semiconductor laser element as the laser light source 10, but the present invention is not limited to such an example. Part or all of the laser light source 10 may be configured by a laser device other than the semiconductor laser element. A high-power laser device such as another solid-state laser device or a gas laser device having a high light output may be used. By using the high-power laser device, the projector can be used under a situation where the projection distance is long, such as outdoors. In addition, it is possible to realize information communication with a larger capacity and to perform processing or surface treatment on a wider area of the object at high speed.

  When a slide (positive film), a preparation sample, a paper cutout, or the like is used as the spatial light modulator, the shape and size of the “aperture” can be varied within one spatial light modulator, unlike a liquid crystal panel. .

  The projector according to the present disclosure can be widely used in various applications for projecting an image onto an inclined screen or an object having irregularities on the surface, taking advantage of the focus-free feature. The object on which the image is projected is not only a screen, but also a wall, glass, desktop, building, road, vehicle, body part (eg arm, palm, back, etc.) or whole body, a collection of water droplets or powder particles, fluid Widely includes translucent materials, photosensitive resins, image sensors and the like.

10 laser light source 10R first laser element 10G second laser element 10B third laser element 10D semiconductor laser element 12 p-side electrode 16 of semiconductor laser element n-side electrode 18 of semiconductor laser element incoherent light sources 20, 20R, 20G 20B Spatial light modulator 20T Spatial light modulator light modulation region 21 Liquid crystal layer 22 Opening (aperture)
23a, 23b Transparent substrate 24 Pixel electrode 25 Counter electrode 26 Color filter array 28a First polarizing film 28b Second polarizing film 29 Micro lens array 30, 30R, 30G, 30B Laser light 40 Beam shaping lens 40a Concave lens 40b Convex lens 50 Projection Magnification adjustment lens 50b Convex lens (Projection magnification adjustment lens)
60 Laser driver 70 SLM driver 80 Mirror 100 Projector 120 Semiconductor substrate 122 Semiconductor laminated structure 122a P-side cladding layer 122b Active layer 122c n-side cladding layer 124 Light emitting region (emitter)
126a End facet (facet)
126b Top surface 200 of semiconductor laminated structure Screen 200b Workpiece 200c Light receiving element 250 Liquid crystal panel 300, 300R, 300G, 300B Light beam 400 Package 550 Projection lens optical system

Claims (13)

A projector that projects an image onto an object in a focus-free manner,
A transmissive spatial light modulator that forms a two-dimensional pattern defining the image;
A laser light source for irradiating the spatial light modulator with laser light;
With
The spatial light modulator generates a bundle of a plurality of light beams having a spatial intensity distribution of the two-dimensional pattern from the laser light,
The laser light source has a plurality of laser elements including a first laser element that oscillates in a first wavelength range and a second laser element that oscillates in a second wavelength range, and the wavelength range of the laser light Includes the first wavelength range and the second wavelength range,
The spatial light modulator includes a color filter array that selectively transmits light in different wavelength ranges according to positions. A projector that projects an image onto an object in a focus-free manner,
A transmissive spatial light modulator that forms a two-dimensional pattern defining the image;
A laser light source for irradiating the spatial light modulator with laser light;
With
The spatial light modulator generates a bundle of a plurality of light beams having a spatial intensity distribution of the two-dimensional pattern from the laser light,
The laser light source has a plurality of laser elements including a first laser element that oscillates in a first wavelength range and a second laser element that oscillates in a second wavelength range,
The laser light source sequentially irradiates the spatial light modulator with laser beams having different wavelength ranges.   3. The plurality of light beams generated by the spatial light modulator are incident on the object, and an image is formed on the object with the irradiation points of the individual light beams on the object as pixels. Projector.   The projector according to claim 1, wherein the spatial light modulator has a plurality of openings through which the plurality of light beams respectively pass, and emits one light beam for each opening.   The projector according to claim 4, wherein the spatial light modulator changes a light transmittance of each aperture in response to a drive signal. The laser light emitted from the laser light source enters the spatial light modulator while enlarging a cross section perpendicular to the optical axis,
The projector according to claim 4 or 5, wherein an emission angle of a light beam emitted from each opening of the spatial light modulator is constant for each opening regardless of the two-dimensional pattern. The spatial light modulator includes a polarizing film only on the side from which the plurality of light beams are emitted,
The projector according to claim 1, wherein a polarization transmission axis of the polarizing film is orthogonal to a polarization direction of the laser light when entering the spatial light modulator .   The projector according to claim 1, wherein the plurality of laser elements include a third laser element that oscillates in a third wavelength region.   The projector according to any one of claims 1 to 8, further comprising a projection magnification adjusting lens disposed between the object and the spatial light modulator.   The projector according to claim 1, further comprising a microlens array disposed between the object and the spatial light modulator.   The projector according to claim 1, further comprising a beam shaping lens disposed between the spatial light modulator and the laser light source. A projector that projects an image onto an object in a focus-free manner,
A transmissive spatial light modulator that forms a two-dimensional pattern defining the image;
A laser light source for irradiating the spatial light modulator with laser light;
With
The spatial light modulator generates a bundle of a plurality of light beams having a spatial intensity distribution of the two-dimensional pattern from the laser light,
The laser light source includes a semiconductor laser element that emits the laser light, and the semiconductor laser element has a semiconductor stacked structure having an end surface including a light emitting region that emits the laser light, and the light emitting region includes The semiconductor multilayer structure has a fast axis size parallel to the stacking direction and a slow axis size perpendicular to the stacking direction,
The laser beam emitted from the semiconductor laser element has a shape whose size in the fast axis direction is larger than that in the slow axis direction in a cross section perpendicular to the optical axis, and the laser beam having the shape Irradiating the spatial light modulator with
The irradiation region of the laser light on the spatial light modulator has a first size in a first direction and a second size in a second direction perpendicular to the first direction, Is larger than the second size,
The projector, wherein the fast axis direction of the semiconductor laser element coincides with the first direction of the irradiation region. A projector that projects an image onto an object in a focus-free manner,
A plurality of transmissive spatial light modulators forming a two-dimensional pattern defining the image;
A plurality of laser light sources for irradiating the plurality of spatial light modulators with laser beams of different wavelength ranges,
With
Each of the plurality of spatial light modulators generates a bundle of a plurality of light beams having a spatial intensity distribution of the two-dimensional pattern from the laser light.

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