JP6430307B2 - 曲率測定装置及び曲率測定方法 - Google Patents

曲率測定装置及び曲率測定方法 Download PDF

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JP6430307B2
JP6430307B2 JP2015057144A JP2015057144A JP6430307B2 JP 6430307 B2 JP6430307 B2 JP 6430307B2 JP 2015057144 A JP2015057144 A JP 2015057144A JP 2015057144 A JP2015057144 A JP 2015057144A JP 6430307 B2 JP6430307 B2 JP 6430307B2
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laser light
laser
light
laser beam
reflected
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Japanese (ja)
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JP2016075659A (ja
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秋田　征人
征人 秋田
家近　泰
泰 家近
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Nuflare Technology Inc
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Nuflare Technology Inc
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Priority to CN201510137132.3A priority Critical patent/CN104949631B/zh
Priority to US14/670,897 priority patent/US9453721B2/en
Priority to TW105111575A priority patent/TWI632341B/zh
Priority to KR1020150043159A priority patent/KR101682914B1/ko
Priority to TW104109865A priority patent/TWI535995B/zh
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  • Length Measuring Devices By Optical Means (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Chemical Vapour Deposition (AREA)
JP2015057144A 2014-03-27 2015-03-20 曲率測定装置及び曲率測定方法 Active JP6430307B2 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
CN201510137132.3A CN104949631B (zh) 2014-03-27 2015-03-26 曲率测定装置以及曲率测定方法
US14/670,897 US9453721B2 (en) 2014-03-27 2015-03-27 Curvature measurement apparatus and method
TW105111575A TWI632341B (zh) 2014-03-27 2015-03-27 曲率測量裝置以及曲率測量方法
KR1020150043159A KR101682914B1 (ko) 2014-03-27 2015-03-27 곡률 측정 장치 및 곡률 측정 방법
TW104109865A TWI535995B (zh) 2014-03-27 2015-03-27 曲率測量裝置以及曲率測量方法

Applications Claiming Priority (4)

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JP2014065372 2014-03-27
JP2014065372 2014-03-27
JP2014218948 2014-10-28
JP2014218948 2014-10-28

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JP2018196856A Division JP6625711B2 (ja) 2014-03-27 2018-10-18 曲率測定装置及び曲率測定方法

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JP2016075659A JP2016075659A (ja) 2016-05-12
JP6430307B2 true JP6430307B2 (ja) 2018-11-28

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JP2018196856A Active JP6625711B2 (ja) 2014-03-27 2018-10-18 曲率測定装置及び曲率測定方法

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Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2018107156A (ja) * 2016-12-22 2018-07-05 株式会社ニューフレアテクノロジー 気相成長装置及び気相成長方法
JP6945367B2 (ja) * 2017-07-05 2021-10-06 東京エレクトロン株式会社 基板反り監視装置及びこれを用いた基板処理装置、並びに基板反り監視方法
CN113758451B (zh) * 2020-06-04 2023-09-22 拓荆科技股份有限公司 平行板反应器中相对位置及平行状态的检测装置及方法

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05180643A (ja) * 1992-01-06 1993-07-23 Mitsubishi Electric Corp 表面形状測定装置
US5232547A (en) * 1992-07-01 1993-08-03 Motorola, Inc. Simultaneously measuring thickness and composition of a film
ATE222349T1 (de) * 1995-02-11 2002-08-15 Roke Manor Research Verbesserungen an oberflächenkrümmungsmessungen
TW426152U (en) * 2000-04-25 2001-03-11 Chunghwa Telecomlaboratories Apparatus using laser beam reflection to measure the outer shape of moving object
JP2001330416A (ja) * 2000-05-19 2001-11-30 Canon Inc 形状測定装置
JP5504068B2 (ja) * 2010-06-23 2014-05-28 Ｄｍｇ森精機株式会社 変位検出装置
US20120057172A1 (en) * 2010-09-08 2012-03-08 Andrei Brunfeld Optical measuring system with illumination provided through a void in a collecting lens
TW201425863A (zh) * 2012-12-21 2014-07-01 Ind Tech Res Inst 曲率量測系統及其方法

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JP2016075659A (ja) 2016-05-12
JP2019053070A (ja) 2019-04-04
TWI632341B (zh) 2018-08-11
JP6625711B2 (ja) 2019-12-25
TW201627632A (zh) 2016-08-01

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