JP6422100B2 - Seam welding method and seam welding apparatus - Google Patents

Description

  The present invention relates to a seam welding method in which seam welding is performed by rolling a parallel gap roller electrode around the periphery of a cap mounted on each of a plurality of semiconductor packages, and a seam welding apparatus used directly in the implementation of this method. .

  A micro parallel seam welding method is widely used to weld a cap (lid, lid) to a package of various devices such as a semiconductor, a crystal device, a SAW device, a microwave device, an optical device, and a sensor and to hermetically seal them ( Patent Document 1). In this seam welding method, a semiconductor element or crystal resonator is placed inside a ceramic (or entirely metal) package in which a metal sealing frame is brazed to the upper surface of an outer peripheral wall of a box-shaped ceramic base with an open top surface. And the like, and the chip is electrically connected to a lead provided in advance in the package, and then the opening of the package is hermetically sealed with a metal cap made of Kovar or the like.

  In this method, a pair of tapered roller electrodes (parallel gap roller electrodes) constituting the welding head are lowered and welded in parallel on two opposite sides of the cap while the cap is held on the package. For example, a pair of roller electrodes are brought into contact with one end edge of two long sides under a certain pressure condition, and pulsation energization is simultaneously performed between both roller electrodes while the package is relatively moved in one direction (for example, 8V, 140 to 180A), and the package and the lid are seam welded while melting the long side by the Joule heat generated at this time.

  When the long side seam welding is completed, the short side seam welding is then performed. In this case, the package or roller electrode is rotated by 90 ° around the vertical axis, or the package is transported under another roller electrode arranged in the short side of the package and seam welding is performed in the same manner as described above to make the package airtight. Seal. Thus, there are a method using the same pair of roller electrodes and a method of providing roller electrodes separately. Such seam welding is normally hermetically sealed in a vacuum.

  In Patent Document 1 that discloses this known method, the packages are aligned in two rows and semi-fixed to the tape, the two opposite sides are seam welded, and then the other two sides remaining on the adjacent stage are removed. It is described that by performing seam welding in parallel, twice as many packages can be processed while maintaining the same tape feed speed as when the packages are arranged in one row.

  It is also known that a plurality of packages are supplied to the peripheral edge of a turntable that rotates intermittently, caps are supplied to these packages along with the intermittent rotation of the turntable, aligned, and seam welding is performed sequentially. (Patent Document 2). In this case, the package is supplied one by one to the table, and the first seam joining is performed by seam welding the cap supply portion, the cap alignment portion, the cap temporary attachment portion, and the two opposite sides of the cap in order along the periphery of the table. And a second seam joint for seam joining the two opposite sides, and a package discharging mechanism, and sequentially performing a predetermined process.

JP 2002-144048 A JP-A-10-166159

  The inventor of the present application supplies a plurality of packages described in Patent Document 1 side by side on a common tray (package holding plate), and performs seam welding simultaneously on two opposite sides of these packages. I have been studying, but in this case, I knew that there was the following problem. In other words, when processing packages with different dimensions, it is a matter of course to adjust the distance between the roller electrodes of each set that welds two sides of each package, but depending on the package dimensions, the distance between the packages held on the tray can be changed. For this reason, it may be necessary to change the interval between the plurality of sets of roller electrodes for seam welding each package (the interval between the sets). This is because when a plurality of packages are held in advance on a tray (package holding plate), the interval between the packages may change depending on the size of the tray or package used.

  In a normal roller electrode seam welding apparatus, a plurality of sets of roller electrodes are housed in an airtight housing, and the package is hermetically sealed in a vacuum. In this case, an external connection terminal is fixed to the side wall of the housing, and the roller electrode is connected to the external connection terminal via a power supply material (such as a belt-shaped power supply material) and a jumper conductor. The power supply material is a metal plate (copper plate, aluminum plate, etc.) having no flexibility. The jumper conductor is made up of a large number of flexible thin sheets of conductive material (copper plate, etc.) and is bent into an inverted U shape. Both ends of the jumper conductor are fixed with solder to provide flexibility in the vertical direction. It is possible to move.

  However, when the deformation amount (curvature) of the jumper conductor changes with the movement of the roller electrode interval in accordance with the change in the package interval, the elastic restoring force (reaction force, ie, the force in the electrode interval direction) of the jumper conductor with respect to the roller electrode Reaction force) changes, and when the roller electrodes come into contact with the cap, the distance between the roller electrodes and the contact pressure may become unstable, or the contact state with respect to the cap with which the roller electrodes come into contact may change. For this reason, it is thought that it becomes a cause of welding defect generation | occurrence | production and a cause of the reliability fall of a product.

  The present invention has been made in view of such circumstances, and when the distance between the roller electrodes is changed, the elastic restoring force of the jumper conductor on the roller electrode varies as the deformation amount of the jumper conductor changes. It is a first object of the present invention to provide a seam welding method capable of preventing the occurrence of poor welding and the deterioration of the welding reliability of the package. It is a second object of the present invention to provide a seam welding apparatus used for carrying out this method.

According to the present invention, a first object is to hold a plurality of semiconductor packages on a common tray upper surface, and to roll-contact a plurality of sets of parallel gap roller electrodes that can be raised and lowered to the periphery of a cap placed on the plurality of packages. A seam welding method for seam welding caps to a plurality of packages simultaneously,
While each of the roller electrodes is connected to an external connection terminal fixed to the side wall of the housing via a non-flexible power supply material and a flexible jumper conductor connected in series thereto,
Corresponding to the interval between the plurality of packages, the interval between the plurality of sets of roller electrodes is changed, the connection position of the jumper conductor to the external connection terminal is changed, and the interval between the plurality of sets of roller electrodes is changed. This is achieved by a seam welding method characterized in that the elastic restoring force of the jumper conductor can be made uniform.

A second object is to hold a plurality of semiconductor packages on a common tray upper surface, and to roll-contact a plurality of sets of roller electrodes that can be moved up and down on the periphery of the cap placed on the plurality of packages, thereby to cap the plurality of packages. A seam welding device for seam welding simultaneously,
A housing for housing the seam welding device;
A power supply material for connecting each of the roller electrodes to an external connection terminal fixed to the side wall of the housing so as to be energized,
A jumper conductor connected to the power supply material and having flexibility in the vertical direction of the roller electrode;
An elevating plate that holds the plurality of sets of roller electrodes so as to be changeable according to the intervals of the plurality of packages, and moves the plurality of sets of roller electrodes up and down integrally.
A long hole that is provided on the external connection terminal side and that is long in the direction of changing the interval between the roller electrodes;
With
The jumper conductor connection position to the external terminal side of the seam welding apparatus being characterized in that a probable and fixed mobile corresponding to the spacing change of the roller electrodes,
Is achieved.

  According to the invention for achieving the first object (first invention), when changing the interval between the plurality of sets of elevating roller electrodes, the connection position of the jumper conductor to the external connection terminal is changed. Therefore, the deformation amount (curvature) of the jumper conductor can be made constant. For this reason, when the roller electrode interval is changed, fluctuations in the elastic restoring force of the jumper conductor when the roller electrodes come into contact with the cap can be suppressed, and there is no possibility of causing seam welding failure or reducing reliability.

  According to the above invention (second invention) for achieving the second object, a thermal processing apparatus used for carrying out this method is obtained.

The perspective view which shows a part of seam welding apparatus which is one Example of this invention Exploded perspective view showing the outline of the main part in this device Arrangement schematic diagram showing a configuration example of a seam welding apparatus using the same apparatus

  A plurality of sets of roller electrodes are held on a lifting plate that can be moved up and down in the vertical direction, and one set of roller electrodes for changing the interval is fixed to the lifting plate in a horizontal direction, and another set of rollers The electrode can be fixed to the elevating plate in the horizontal direction (Claim 2). In this case, while moving the roller electrode for changing the distance in the horizontal direction, the external connection terminal side is moved so that the deformation of the jumper conductor is constant, and the roller electrode is at a position where the elastic restoring force of the jumper conductor is constant. Is fixed to the lifting plate and the jumper conductor side is fixed to the external connection terminal side, so that the adjustment is easy.

  The connection between the jumper conductor and the external connection terminal can be structured such that one of the jumper conductors is a horizontal slot and the other is bolted to the slot. For example, one end of the jumper conductor is fixed to the power supply material that is electrically connected to the roller electrode, and the other end is bolted to an elongated hole that is long in the direction of changing the interval of the roller electrode formed in the external connection terminal (horizontal direction). By making it possible, the interval between the roller electrodes may be changed in a state where the fixing position is variable on the external connection terminal side and the jumper conductor and the external connection terminal are slidable.

  When one end of the jumper conductor is connected to the external connection terminal via a non-flexible power supply material, the power supply material may be long. In such a case, it is preferable to support the intermediate portion of the power supply member on a support member fixed to the housing in a variable fixed position. By supporting the power supply material on the support member, the jumper conductor connected to the power supply material is prevented from shifting in the vertical and horizontal directions.

In this embodiment, as shown in FIG. 3, the four packages 10 (10 a to 10 d) are fixed to a common tray (package holding plate) 12. Note that a cap (cover plate, lid) is supplied and temporarily fixed to these packages 10 in advance. Reference numeral 14 denotes a housing that accommodates the entire seam welding apparatus, and the inside thereof can be decompressed to a vacuum state. A stage 16 is incorporated in the housing 14 so as to be movable in the X direction and the Y direction.
That is, the stage 16 can be moved in the X direction by a feed screw (not shown) arranged in the X direction, and the feed screw in the X axis direction and the stage 16 are in the Y direction (not shown). Can be moved in the Y direction. The stage 16 can be moved in the XY direction within the housing 14 by rotationally driving these feed screws by a motor (not shown) attached to the outside of the housing 14.

  The tray 12 is loaded into the housing 14 from a position 12A accommodated in a storage box (cartridge, not shown) disposed at the top of FIG. 3, and is previously moved to a position facing the loading position 12A and stands by. It is transferred to. The stage 16 is fed downward in FIG. 3 by a feed screw in the Y direction, and the four packages 10 are seam welded in the X direction by a seam welding device 18 in the X direction. Next, the stage 16 is sent in the X direction, and the four packages 10 are seam welded in the Y direction by the adjacent seam welding device 20 in the Y direction. After the four packages 10 are seam welded in the X direction and the Y direction by the seam welding devices 18 and 20, respectively, the stage 16 moves to the loading position of the casing 14, from which the tray 12 is moved out of the casing 14. It is discharged into the storage box that is on standby.

  Here, the X-direction seam welding device 18 is in contact with two sides in the X direction of the caps placed on the two packages 10a and 10d (or 10b and 10c) arranged vertically on the tray 12 (two directions). (Thus, a total of four) roller electrodes 22 (a set of 22a and 22b and a set of 22c and 22d) are provided and moved up and down integrally. The mechanism will be described later. Similarly, the seam welding device 20 has two sets of rollers (and thus a total of four) that are in rolling contact with two sides in the Y direction of the cap with respect to the package 10 seam welded in the X direction by the previous seam welding device 18. There are electrodes 32 (a set of 32a and 32b and a set of 32c and 32d), which are moved up and down integrally.

  In this embodiment, in the seam welding apparatus 18, a set of roller electrodes 22a and 22b (movable electrode set) is movable in the Y-axis direction in plan view (FIG. 3), and a set of roller electrodes 22c and 22d (fixed electrode set) ) Is fixed. Accordingly, the roller electrodes 22c and 22d of the fixed electrode set are external connection terminals 26 (26c and 26d) fixed to the casing 14 by strip-shaped power supply members 24 (24c and 24d) fixed to the casing 14 via an insulating material. It is connected to the. A jumper conductor 28 (28c, 28d) is interposed between each power supply member 24 (24c, 24d) and the external connection terminal 26 (26c, 26d), and the fixed electrodes of the roller electrodes 22c, 22d are moved up and down. Is possible.

The power supply members 24a and 24b of the roller electrodes 22a and 22b of the movable electrode set are connected to the external connection terminals 26a and 26b via the jumper conductors 28a and 28b, and the roller electrodes 22a and 22b are movable in the Y direction. is there. Here, the power supply members 24a, 24b and the external connection terminals 26a, 26b are formed by long holes (27a, 27b) and bolts (bolts similar to the bolts 46 shown in FIG. 2 ) provided in the external connection terminals 26a, 26b . The fixed position can be moved in the Y direction . That is, when the movable electrode sets 22a and 22b are moved in the Y direction, the feeding members 24a and 24b are moved in the same direction together with the movable electrode sets 22a and 22b. By moving and fixing, the deformation amount of the jumper conductors 28a and 28b is kept constant.

The jumper conductors 28a and 28b are preferably attached as close as possible to the roller electrodes 22a and 22b. This is because the load applied by the jumper conductors 28a and 28b and the power feeding members 23a and 23b applied to the roller electrodes 22a and 22b can be reduced, and the load balance between the roller electrodes 22a and 22b can be easily adjusted. However, if this is done, the distance from the jumper conductors 28a, 28b of the power supply members 24a, 24b to the external connection terminals 26a, 26b will be increased, and the jumper conductors connected to the power supply members will be displaced vertically and horizontally. . Therefore, an appropriate position near the intermediate portion of this portion is supported by an insulating support member 30 (30a, 30b). The support member 30 (30a, 30b) is provided with elongated holes 31a, 31b (FIG. 3) parallel to the elongated holes 27a, 27b of the external connection terminals 26a, 26b, and the fixing positions of the power supply members 24a, 24b are made variable. . As a result, the power supply members 24a and 24b are translated in the Y direction and fixed to the external connection terminals 26a and 26b by bolts 46 (FIG. 2), and can be fixed to the power supply members 24a and 24b by similar bolts. Yes. For this reason, the space | interval A (FIG. 3) of a fixed electrode group and a movable electrode group can be changed.

  In particular, when the roller electrode 22 is moved up and down in this state, the difference in height between the both ends of the jumper conductor 28 changes. However, the amount of deformation (bending amount) of each jumper conductor 28 is uniform. Therefore, the load in the horizontal direction (horizontal direction) applied to each roller electrode 22 becomes uniform, and seam welding can be performed in this state. For this reason, the lateral load fluctuation when each roller electrode 22 contacts the cap is suppressed, and welding can be stabilized and made uniform.

  The seam welding device 20 is substantially the same as the seam welding device 18 except that the roller electrodes 32c and 32d of the fixed electrode set and the roller electrodes 32a and 32b of the movable electrode set are arranged in the X-axis direction, and the movable electrode set The roller electrodes 32a and 32b move in the X-axis direction. Therefore, the same reference numerals are assigned to the power supply material and the jumper conductor corresponding to the power supply material 24 and the jumper conductor 28 of the seam welding apparatus 18 and the description thereof will not be repeated.

  Next, the configuration of the seam welding apparatus 20 will be described with reference to FIGS. The roller electrodes 32c and 32d of the fixed electrode set have substantially the same configuration as the roller electrodes 32a and 32b of the movable electrode set shown in FIG. 2 except that they do not move in the X direction. explain. The roller electrodes 32a and 32b of the movable electrode set are respectively attached to bearings 34 (34a and 34b), and these bearings 34 are fixed to the lower ends of the power supply blocks 36 (36a and 36b). Each power supply block 36 is further fixed to the lower end of a slider 38 (38a, 38b), and each slider 38 is fixed to a linear bearing 40 (40a, 40b) allowing vertical sliding through an insulating material (not shown). Has been. The linear bearings 40 (40a, 40b) are fixed to the slide plate 42. The distance between the pair of left and right sliders 38a and 38b corresponds to the distance between the left and right sides of the cap of the package 10. In order to adjust the distance between the roller electrodes 32a and 32b according to the change in the distance between the left and right sides, the sliders 38a and 38b. The fixed position can be adjusted to the left and right.

  The slide plate 42 is further fixed to a lifting plate 44 that can be lifted up and down. The elevating plate 44 is moved up and down by a cam mechanism (not shown). As a result, the roller electrodes 32a and 32b move up and down integrally. A weight (weight) (not shown) is placed on the upper ends of the sliders 38a and 38b standing above the roller electrodes 32a and 32b, and a contact pressure that presses the sides of the cap placed on the package by the roller electrodes 32a and 32b. It is set.

  The left and right slide plates 42 are fixed to the elevating plate 44 so as to be positioned left and right. That is, the left and right slide plates 42 are each provided with a total of four horizontally long slots 48 one above and below the left and right sides. Bolts 50 that pass through these slots 48 are provided in the lift plate 44 (not shown). It is fixed by screwing in. Accordingly, if the bolt 50 is loosened, the left and right slide plates 42 can be moved to the left and right with respect to the lift plate 44, and the roller electrodes 32a and 32b can be integrally positioned to the left and right. The positions of the roller electrodes 32a and 32b of the movable electrode set are determined so as to have an interval corresponding to the interval between the four packages 10 placed on the tray 12, and the bolts 50 are tightened and fixed. In this manner, the distance B between the fixed electrode set of the fixed roller electrodes 32c and 32d shown in FIG. 3 and the movable electrode set of the movable roller electrodes 32a and 32b can be changed.

  In FIG. 2, the holding structure for the right fixed electrode set is substantially the same as the holding structure for the movable electrode set described above, but the main difference is that the left and right slide plates 42 of the movable electrode set slide left and right in this fixed electrode set. Without being fixed to the lifting plate 44A. In the seam welding apparatus 20 configured as described above, the elevating plates 44, 44A are vertically moved up and down integrally by a cam mechanism (not shown), and the four roller electrodes 32a to 32d are arranged in the upper two packages 10a, Seam welding is performed by moving the stage 16 in the Y direction in a state where the cap is placed on two opposite sides in the Y direction of the cap placed on 10b.

  The seam welding device 18 has substantially the same configuration as the seam welding device 20 except that the roller electrode 22 (22a-d) is 90 ° in plan view from the position of the roller electrodes 32a-d of the seam welding device 20. The point is that the stage 16 is moved in the X-axis direction with respect to these roller electrodes 22 in the rotated position. Therefore, description of the configuration will not be repeated.

DESCRIPTION OF SYMBOLS 10 Package 12 Tray 14 Case 18, 20 Seam welding apparatus 22, 32 Roller electrode 24 Feed material 26 External connection terminal
27a, 27b Elongated hole 28 Jumper conductor
30 Support member
31a, 31b Slot 34 Bearing 36 Feed block 38 Slider 42 Left and right slide plate (electrode holding plate)
44 Lift plate
46 volts

Claims (5)

Multiple semiconductor packages are held on a common tray top surface, and a plurality of sets of parallel gap roller electrodes that can be raised and lowered to the periphery of the caps mounted on the plurality of packages are rolled from above, and the caps are seamed simultaneously to the plurality of packages. A seam welding method for welding,
While each of the roller electrodes is connected to an external connection terminal fixed to the side wall of the housing via a non-flexible power supply material and a flexible jumper conductor connected in series thereto,
Corresponding to the interval between the plurality of packages, the interval between the plurality of sets of roller electrodes is changed, the connection position of the jumper conductor to the external connection terminal is changed, and the interval between the plurality of sets of roller electrodes is changed. A seam welding method characterized in that the elastic restoring force of the jumper conductor accompanying the above can be made uniform.   The seam welding method according to claim 1, wherein one set of roller electrodes has a fixed position variable in a horizontal direction with respect to the lifting plate, and the other set of roller electrodes is fixed to the lifting plate.   One end of the jumper conductor is fixed to the power supply member electrically connected to the roller electrode, and the other end of the jumper conductor is fixed to the external connection terminal side in the direction of changing the interval between the roller electrodes. The seam welding method according to claim 1, wherein the interval between the roller electrodes is changed in a state where the other end is slidable. Seam welding that holds a plurality of semiconductor packages on a common tray and rolls and contacts a plurality of sets of roller electrodes that can be raised and lowered around the periphery of the caps placed on the plurality of packages, thereby simultaneously seam welding the caps to the plurality of packages. A device,
A housing for housing the seam welding device;
A power supply material for connecting each of the roller electrodes to an external connection terminal fixed to the side wall of the housing so as to be energized,
A jumper conductor connected to the power supply material and having flexibility in the vertical direction of the roller electrode;
An elevating plate that holds the plurality of sets of roller electrodes so as to be changeable according to the intervals of the plurality of packages, and moves the plurality of sets of roller electrodes up and down integrally.
A long hole that is provided on the external connection terminal side and is long in the direction of changing the interval between the roller electrodes;
With
The jumper conductor connection position to the external terminal side of the seam welding apparatus being characterized in that a probable and fixed mobile corresponding to the spacing change of the roller electrode. One end of the jumper conductor is connected to a long hole in the direction of changing the interval of the roller electrodes formed on the external connection terminal via a non-flexible power supply material, and is fixedly connected to the fixed position with a bolt. claims section is supported in a fixed position variable in the interval changing direction of the fixed to the housing and wherein the external connecting bolt to a support member to which the terminal is long hole parallel to the long hole formed in the formed roller electrode Item 4. The seam welding apparatus according to item 4.

Images