JP6402499B2 - Peeling trigger manufacturing apparatus and method - Google Patents
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Description
本発明は、キャリアに全層ビルドアップ基板を形成したビルドアップ基板における全層ビルドアップ基板をキャリアから剥離する剥離きっかけ作製装置及び方法に関する。 The present invention relates to a peeling trigger manufacturing apparatus and method for peeling a full-layer buildup substrate from a carrier in a buildup substrate in which a full-layer buildup substrate is formed on a carrier.
近年、電子機器における高機能化及び軽薄短小化の要求からＩＣチップやＬＳＩ等の電子部品では高密度集積化が急速に進んでおり、これに伴い電子部品を搭載するパッケージ基板には、従来にも増して高密度配線化及び多端子化が求められている。最近では、このようなパッケージ基板として、コア基板を有さないコアレス配線基板が提案されている（例えば特許文献１参照）。コアレス配線基板は、樹脂材料（高分子材料）からなる誘電体層と導体層とが交互に形成された高密度配線化が可能なビルドアップ層を主体とし、コア基板を省略することで全体の配線長を短くして高周波用途に対応するものである。 In recent years, electronic components such as IC chips and LSIs have been rapidly integrated due to the demand for higher functionality and lighter, thinner and smaller electronic devices. Furthermore, higher density wiring and multi-terminals are required. Recently, a coreless wiring substrate having no core substrate has been proposed as such a package substrate (see, for example, Patent Document 1). The coreless wiring board mainly consists of a build-up layer that can be made into a high-density wiring in which dielectric layers and conductor layers made of resin materials (polymer materials) are alternately formed. The wiring length is shortened to support high frequency applications.
コア基板を備えないコアレス配線基板を安定的に製造する方法として、金属箔を表裏面に備えた補強基板を使用してコアレス基板を形成する方式が提案されている（例えば特許文献２参照）。 As a method for stably manufacturing a coreless wiring substrate that does not include a core substrate, a method of forming a coreless substrate using a reinforcing substrate having metal foils on the front and back surfaces has been proposed (see, for example, Patent Document 2).
この製造方法では、補強基板上の表面に剥離可能な金属箔が配置されてなる金属箔付き補強基板の上に、金属箔を覆い囲む形で樹脂シートを形成して配線基板の主面とし、さらに金属パターンと樹脂シートとを交互に積層して、配線基板となるべき配線積層部を形成した後、配線積層部と補強基板とを金属箔部分から剥離する。補強基板から剥離した配線積層部に付着している金属箔をエッチング等により除去することで、コアレス基板となる配線積層体が得られる。 In this manufacturing method, on the reinforcing substrate with a metal foil on which a peelable metal foil is arranged on the surface of the reinforcing substrate, a resin sheet is formed in a form surrounding the metal foil to be the main surface of the wiring substrate, Furthermore, after alternately laminating metal patterns and resin sheets to form a wiring laminated portion to be a wiring substrate, the wiring laminated portion and the reinforcing substrate are peeled from the metal foil portion. By removing the metal foil adhering to the wiring laminated portion peeled from the reinforcing substrate by etching or the like, a wiring laminated body to be a coreless substrate can be obtained.
ところで、従来、全層ビルドアップ基板である配線積層部を補強基板（以後キャリアと云う）から剥離することは、人手で行っていた。人が手作業で全層ビルドアップ基板をキャリアから剥離する工程では、基板剥離に必要な剥離きっかけ作製も人の手作業にて作製される。そして、人が手作業で剥離きっかけ作製をする際、剥離治具等を用いて剥離界面を探す。 By the way, conventionally, the wiring laminated portion, which is an all-layer build-up board, has been manually peeled off from a reinforcing board (hereinafter referred to as a carrier). In the process of manually peeling the all-layer build-up substrate from the carrier by a human, a peeling trigger necessary for peeling the substrate is also created manually. Then, when a person manually creates a peeling trigger, the peeling interface is searched using a peeling jig or the like.
人が手作業で剥離きっかけを作製する際は、手に伝わってきた感触を頼りに力加減を行い、剥離治具の操作をすることで基板へのダメージを抑えつつ剥離きっかけを作製することができる。しかしながら剥離きっかけを手作業で作製する場合、作業員毎に仕上がり具合や作業時間にバラツキ等が生じ生産性の低下要因となる。さらに、基板を手で取扱うことで曲げ、折れ等による配線積層部での断線や落下等による破損等の基板品質低下や不良品発生に繋がる。 When a person creates a peeling trigger by hand, it is possible to create a peeling trigger while suppressing damage to the substrate by operating the peeling jig, depending on the touch that has come to the hand. it can. However, when the peeling trigger is produced manually, the finishing condition and working time vary for each worker, resulting in a decrease in productivity. Furthermore, handling the substrate by hand leads to a decrease in substrate quality such as breakage due to disconnection or dropping at the wiring laminated portion due to bending, bending or the like, and generation of defective products.
本発明は、このような事情を考慮してなされたもので、キャリアに形成された全層ビル
ドアップ基板に変形、欠損、欠陥を発生させずにキャリアから全層ビルドアップ基板を剥離するための剥離きっかけを自動で作製することを課題とする。
The present invention has been made in consideration of such circumstances, and is for peeling off a full-layer buildup substrate from a carrier without causing deformation, defects, or defects in the full-layer buildup substrate formed on the carrier. An object is to automatically produce a peeling trigger.
本発明において上記課題を解決するために、まず請求項１の発明では、キャリアに全層ビルドアップ基板を形成したビルドアップ基板における全層ビルドアップ基板をキャリアから剥離するための剥離きっかけを作製する装置であって、
画像センサで全層ビルドアップ基板とキャリアとの剥離界面の位置座標を取得する手段と、
取得した剥離界面の位置座標にきっかけ刃を刺し込む手段とを有し、
取得した剥離界面の位置座標に刺し込んだきっかけ刃に加わる力をセンサで検知し、任意に指定された値以上の力が加わった場合、きっかけ刃を引き戻し再度画像センサで前記剥離界面の位置座標を取得した後、きっかけ刃を再度取得した剥離界面の位置座標へ刺し込む手段をさらに有することを特徴とする剥離きっかけ作製装置としたものである。
In order to solve the above-mentioned problems in the present invention, first, in the invention of claim 1, a peeling trigger for peeling a full-layer buildup substrate in a buildup substrate in which a full-layer buildup substrate is formed on a carrier is prepared. A device,
Means for acquiring the position coordinates of the peeling interface between the all-layer build-up substrate and the carrier with the image sensor;
It possesses the position coordinates of the obtained peeling boundary and means for plugging the opportunity blade,
The sensor detects the force applied to the trigger blade inserted into the acquired peeling interface position coordinate, and when a force greater than the specified value is applied, pull back the trigger blade and again the position coordinate of the peeling interface with the image sensor. after acquiring the is obtained by the peeling trigger production apparatus characterized in that it further have a means for plugging the position coordinates of the peeling boundary that has acquired the trigger blade again.
また請求項２の発明では、画像センサで全層ビルドアップ基板とキャリアとの剥離界面の位置座標を取得することが、画像センサが撮影した画像から前記位置座標を取得することであることを特徴とする請求項１に記載の剥離きっかけ作製装置としたものである。 According to a second aspect of the present invention, acquiring the position coordinates of the peeling interface between the all-layer buildup substrate and the carrier with an image sensor is acquiring the position coordinates from an image captured by the image sensor. it is obtained by the peeling trigger manufacturing apparatus according to claim 1,.
また請求項３の発明では、画像センサで全層ビルドアップ基板とキャリアとの剥離界面の位置座標を取得することが、画像センサでビルドアップ基板のエッジの位置座標を検出し、検出したエッジの位置座標と製品設計値とを用いて前記位置座標を算出して取得することであることを特徴とする請求項１に記載の剥離きっかけ作製装置としたものである。 In the invention of claim 3 , the position coordinate of the peeling interface between the all-layer buildup substrate and the carrier is acquired by the image sensor, the position coordinate of the edge of the buildup substrate is detected by the image sensor, and the detected edge 2. The peeling trigger manufacturing apparatus according to claim 1, wherein the position coordinates are calculated and acquired using position coordinates and product design values.
また請求項４の発明では、取得した剥離界面の位置座標にきっかけ刃を刺し込むことで形成した全層ビルドアップ基板とキャリアとの隙間に、圧縮空気を吐出する手段を有することを特徴とする請求項１〜３のいずれか１項に記載の剥離きっかけ作製装置としたものである。 The invention of claim 4 is characterized in that it has means for discharging compressed air into the gap between the all-layer buildup substrate formed by inserting the trigger blade into the position coordinates of the obtained peeling interface and the carrier. It is set as the peeling trigger production apparatus of any one of Claims 1-3 .
また請求項５の発明では、圧縮空気を吐出しつつ、きっかけ刃を刺し込んだ基板端と同じ辺のもう一方の端へ向かって平行移動する手段を有することを特徴とする請求項４に記載の剥離きっかけ作製装置としたものである。 The invention of claim 5, while ejecting the compressed air, according to claim 4, characterized in that it comprises means for translating toward the other end of the same side as the substrate end that pierces the trigger blade This is an apparatus for producing a peeling trigger.
また請求項６の発明では、キャリアに全層ビルドアップ基板を形成したビルドアップ基板における全層ビルドアップ基板をキャリアから剥離するための剥離きっかけを作製する方法であって、
画像センサで全層ビルドアップ基板とキャリアとの剥離界面の位置座標を取得する工程と、
取得した剥離界面の位置座標にきっかけ刃を刺し込む工程とを含み、
取得した剥離界面の位置座標に刺し込んだきっかけ刃に加わる力をセンサで検知し、任意に指定された値以上の力が加わった場合、きっかけ刃を引き戻し再度画像センサで前記剥離界面の位置座標を取得した後、きっかけ刃を再度取得した剥離界面の位置座標へ刺し込む工程をさらに含むことを特徴とする剥離きっかけ作製方法としたものである。
The invention of claim 6 is a method for producing a peeling trigger for peeling the full-layer buildup substrate from the carrier in the buildup substrate in which the full-layer buildup substrate is formed on the carrier,
The process of acquiring the position coordinates of the peeling interface between the all-layer buildup substrate and the carrier with the image sensor;
And a step of the position coordinates of the obtained peeling boundary plugging an opportunity blade saw including,
The sensor detects the force applied to the trigger blade inserted into the acquired peeling interface position coordinate, and when a force greater than the specified value is applied, pull back the trigger blade and again the position coordinate of the peeling interface with the image sensor. after acquiring the is obtained by peeling led manufacturing method characterized further including Mukoto the step of plugging the position coordinates of the peeling boundary that has acquired the trigger blade again.
また請求項７の発明では、画像センサで全層ビルドアップ基板とキャリアとの剥離界面の位置座標を取得することが、画像センサが撮影した画像から前記位置座標を取得することであることを特徴とする請求項６に記載の剥離きっかけ作製方法としたものである。 According to a seventh aspect of the present invention, obtaining the position coordinates of the peeling interface between the all-layer buildup substrate and the carrier with an image sensor is obtaining the position coordinates from an image taken by the image sensor. The peeling trigger manufacturing method according to claim 6 .
また請求項８の発明では、画像センサで全層ビルドアップ基板とキャリアとの剥離界面の位置座標を取得することが、画像センサでビルドアップ基板のエッジの位置座標を検出し、検出したエッジの位置座標と製品設計値とを用いて前記位置座標を算出して取得することであることを特徴とする請求項６に記載の剥離きっかけ作製方法としたものである。 In the invention of claim 8 , the position coordinate of the peeling interface between the all-layer buildup substrate and the carrier is acquired by the image sensor, the position coordinate of the edge of the buildup substrate is detected by the image sensor, and the detected edge The peeling trigger manufacturing method according to claim 6 , wherein the position coordinates are calculated and acquired using position coordinates and product design values.
また請求項９の発明では、取得した剥離界面の位置座標にきっかけ刃を刺し込むことで形成した全層ビルドアップ基板とキャリアとの隙間に、圧縮空気を吐出する工程を含むことを特徴とする請求項６〜８のいずれか１項に記載の剥離きっかけ作製方法としたものである。 The invention according to claim 9 further includes a step of discharging compressed air into the gap between the all-layer buildup substrate formed by inserting the trigger blade into the position coordinates of the obtained peeling interface and the carrier. It is set as the peeling trigger production method of any one of Claims 6-8 .
また請求項１０の発明では、圧縮空気を吐出しつつ、きっかけ刃を刺し込んだ基板端と同じ辺のもう一方の端へ向かって平行移動する工程を含むことを特徴とする請求項９に記載の剥離きっかけ作製方法としたものである。 The invention of claim 10, while discharging the compressed air, according to claim 9, characterized in that it comprises the step of moving in parallel towards the other end of the same side as the substrate end that pierces the trigger blade This is a method for producing a peeling trigger.
請求項１及び６に係る発明は、画像センサで全層ビルドアップ基板とキャリアとの剥離界面の位置座標を取得し、取得した剥離界面の位置座標にきっかけ刃を刺し込むので、全層ビルドアップ基板に変形、欠損、欠陥を発生させずにキャリアから全層ビルドアップ基板を剥離するための剥離きっかけを自動で作製することができる。 In the inventions according to claims 1 and 6 , since the position coordinates of the peeling interface between the all-layer buildup substrate and the carrier are acquired by the image sensor, and the trigger blade is inserted into the obtained position coordinates of the peeling interface, the all-layer buildup An exfoliation trigger for exfoliating the entire build-up substrate from the carrier can be automatically produced without causing deformation, deficiency, or defect in the substrate.
また、取得した剥離界面の位置座標に刺し込んだきっかけ刃に加わる力をセンサで検知し、任意に指定された値以上の力が加わった場合、きっかけ刃を引き戻し再度画像センサで前記剥離界面の位置座標を取得した後、きっかけ刃を再度取得した剥離界面の位置座標へ刺し込むので、剥離界面の位置座標の取得にエラーが生じて、間違った剥離界面の位置座標を取得した場合に、この間違いによる全層ビルドアップ基板に変形、欠損、欠陥の発生を防止し、剥離きっかけの作製をやり直すことができる。 In addition , the sensor detects the force applied to the trigger blade inserted into the acquired position coordinates of the peeling interface, and when a force greater than the specified value is applied, pull back the trigger blade and again use the image sensor to After acquiring the position coordinates, the trigger blade is inserted into the acquired position coordinates of the peel interface again, so if an error occurs in the acquisition of the position coordinates of the peel interface and the position coordinates of the wrong peel interface are acquired, this It is possible to prevent the occurrence of deformations, defects and defects in the all-layer build-up substrate due to mistakes, and redo the production of the peeling trigger.
請求項２及び７に係る発明は、画像センサが撮影した画像から全層ビルドアップ基板とキャリアとの剥離界面の位置座標を取得するので、製品設計値の情報がなくても、全層ビルドアップ基板とキャリアとの剥離界面の位置座標を正確に取得できる。 In the inventions according to claims 2 and 7 , since the position coordinates of the peeling interface between the all-layer build-up substrate and the carrier are acquired from the image taken by the image sensor, the all-layer build-up can be performed even if there is no product design value information. The position coordinates of the peeling interface between the substrate and the carrier can be obtained accurately.
請求項３及び８に係る発明は、画像センサでビルドアップ基板のエッジの位置座標を検出し、検出したエッジの位置座標と製品設計値とを用いて全層ビルドアップ基板とキャリアとの剥離界面の位置座標を算出して取得するので、この位置座標を極めて短時間に取得できる。 According to the third and eighth aspects of the present invention, the position coordinate of the edge of the buildup substrate is detected by the image sensor, and the peeling interface between the all-layer buildup substrate and the carrier is detected using the detected position coordinate of the edge and the product design value. Since the position coordinates are calculated and acquired, the position coordinates can be acquired in a very short time.
請求項４及び９に係る発明は、取得した剥離界面の位置座標にきっかけ刃を刺し込むことで形成した全層ビルドアップ基板とキャリアとの隙間に、圧縮空気を吐出するので、取得した剥離界面の位置座標から深くきっかけ刃を刺し込むことが容易に行うことができる。また、全層ビルドアップ基板とキャリアとの隙間の奥に向かって圧縮空気を吐出することで、きっかけ刃の刺し込み量が小さい場合であっても、深くきっかけ刃を刺し込んだのと同等の剥離きっかけを作ることができる。 Since the invention which concerns on Claim 4 and 9 discharges compressed air to the clearance gap between the all-layer buildup board | substrate formed by inserting the trigger blade in the position coordinate of the acquired peeling interface, and a carrier, the acquired peeling interface It is possible to easily insert the cutting edge deeply from the position coordinates. In addition, by discharging compressed air toward the back of the gap between the all-layer build-up board and the carrier, even if the amount of the trigger blade is small, it is equivalent to deeply inserting the trigger blade. It is possible to create a peeling trigger.
請求項５及び１０に係る発明は、圧縮空気を吐出しつつ、きっかけ刃を刺し込んだ基板端と同じ辺のもう一方の端へ向かって平行移動するので、ビルドアップ基板の一辺に亘って剥離きっかけを作製できる。 The inventions according to claims 5 and 10 are parallelly moved toward the other end of the same side as the end of the substrate into which the trigger blade is inserted while discharging compressed air. A chance can be made.
以上、本発明は、キャリアに形成された全層ビルドアップ基板に変形、欠損、欠陥を発生させずにキャリアから全層ビルドアップ基板を剥離するための剥離きっかけを自動で作製できるという効果がある。 As described above, the present invention has an effect that it is possible to automatically produce a peeling trigger for peeling the full-layer buildup substrate from the carrier without causing deformation, defects, or defects in the full-layer buildup substrate formed on the carrier. .
以下に、本発明の一実施形態を説明する。 Hereinafter, an embodiment of the present invention will be described.
先ず、本発明の剥離きっかけ作製装置を説明する。 First, the peeling trigger manufacturing apparatus of the present invention will be described.
本発明の剥離きっかけ作製装置は、図２に示すように、ステージ１８と、自動きっかけ作成機１３とを備える。 As shown in FIG. 2, the peeling trigger producing apparatus of the present invention includes a stage 18 and an automatic trigger creating machine 13.
自動きっかけ機１３は、図２に示すように、剥離具１４と力を検知するセンサ１７とを備える。 As shown in FIG. 2, the automatic trigger 13 includes a peeling tool 14 and a sensor 17 that detects force.
剥離具１４は、図１に示すように、圧縮空気１６の吐出口ときっかけ刃５とを固定する手段を有する。 As shown in FIG. 1, the peeling tool 14 has means for fixing the discharge port of the compressed air 16 and the hooking blade 5.
ステージ１８は、図２に示すように、ビルドアップ基板１を載置し、図２の左右に移動可能な手段を有する。ビルドアップ基板１は、キャリア３の表側の面に表側全層ビルドアップ基板２が形成され、キャリア３の裏側の面に裏側全層ビルドアップ基板３が形成されたものである。 As shown in FIG. 2, the stage 18 has means for placing the build-up substrate 1 and moving to the left and right in FIG. The build-up substrate 1 has a front-side full-layer build-up substrate 2 formed on the front-side surface of the carrier 3 and a back-side full-layer build-up substrate 3 formed on the back-side surface of the carrier 3.
ステージ１８は、ビルドアップ基板１をステージに固定するために、図２に示すように、基板押さえ１０と基板端押さえ１１とを有する。基板押さえ１０と基板端押さえ１１とを用いてビルドアップ基板１を固定する時、剥離きっかけを作製する辺はステージ１８から迫出した状態にするため、位置決めピン１２を設ける。 As shown in FIG. 2, the stage 18 has a substrate press 10 and a substrate end press 11 to fix the build-up substrate 1 to the stage. When the build-up substrate 1 is fixed using the substrate presser 10 and the substrate end presser 11, positioning pins 12 are provided so that the side where the peeling trigger is produced protrudes from the stage 18.
ビルドアップ基板１ときっかけ刃５とに対し、図３のように、ビルドアップ基板１の剥離きっかけを作製する部分ときっかけ刃５とを撮像する画像センサ１５を、図４に示すように設ける。 As shown in FIG. 3, an image sensor 15 that captures a part of the buildup substrate 1 and the hooking blade 5 for creating a peeling trigger of the buildup substrate 1 is provided as shown in FIG. 4.
画像センサ１５は、撮像画像からビルドアップ基板１やきっかけ刃５の状態が正常でな
い場合は、アラーム発報し、自動きっかけ作成機１３に停止指令を発信する手段を有する。
The image sensor 15 has means for issuing an alarm and transmitting a stop command to the automatic trigger creation machine 13 when the state of the build-up board 1 and the trigger blade 5 is not normal from the captured image.
自動きっかけ作成機１３は、撮像画像から表側全層ビルドアップ基板２及び裏側全層ビルドアップ基板４とキャリア３との剥離界面の位置座標、もしくはビルドアップ基板１のエッジの位置座標と、きっかけ刃５の位置座標とを取得する手段を有する。
また、エッジの位置座標と製品設計値を用いて剥離界面の位置座標の算出をする手段を有する。
The automatic trigger creation machine 13 determines the position coordinates of the peeling interface between the front-side full-layer buildup board 2 and the back-side full-layer buildup board 4 and the carrier 3 from the captured image, or the edge position coordinates of the buildup board 1 and the trigger blade. 5 means for acquiring position coordinates.
In addition, it has means for calculating the position coordinates of the peeling interface using the edge position coordinates and the product design value.
自動きっかけ作成機１３は、きっかけ刃５を剥離界面に刺し込む手段を有する。 The automatic trigger creation machine 13 has means for inserting the trigger blade 5 into the peeling interface.
次に、本発明の剥離きっかけ作製装置を用いて、キャリア３の表裏面に形成された全層ビルドアップ基板２、４に剥離きっかけを作製する方法について説明する。 Next, a description will be given of a method for producing a peeling trigger on the all-layer build-up substrates 2 and 4 formed on the front and back surfaces of the carrier 3 using the peeling trigger manufacturing apparatus of the present invention.
剥離きっかけは基板の４隅の１箇所または、４辺の１辺もしくは、基板全周に作製でも構わない。以下に、例として、４辺のうち１辺に剥離きっかけを作製した場合について説明する。 The peeling trigger may be produced at one of the four corners of the substrate, one of the four sides, or the entire periphery of the substrate. Hereinafter, as an example, a case where a peeling trigger is formed on one of the four sides will be described.
まず、図２のようにビルドアップ基板１をステージ１８に載せる。
ステージ１８に載せたビルドアップ基板１を基板端が５０ｍｍ程度ステージ１８から迫出した状態になるよう移動させる。
この時、ビルドアップ基板１を停止させる位置には昇降式の位置決めピン１２があり、この位置決めピン１２に接触するまでビルドアップ基板１を移動する。さらに、位置決めピン１２とビルドアップ基板１とを接触させることでアライメントを行う。
First, the build-up substrate 1 is placed on the stage 18 as shown in FIG.
The build-up substrate 1 placed on the stage 18 is moved so that the substrate end protrudes from the stage 18 by about 50 mm.
At this time, there is an elevating positioning pin 12 at a position where the build-up substrate 1 is stopped, and the build-up substrate 1 is moved until it comes into contact with the positioning pin 12. Furthermore, alignment is performed by bringing the positioning pins 12 and the buildup substrate 1 into contact with each other.
アライメントを施したビルドアップ基板１を基板押さえ１０と基板端押さえ１１で保持する。 The aligned build-up substrate 1 is held by the substrate holder 10 and the substrate edge holder 11.
きっかけ刃５を画像センサ１５の撮像位置へ移動させ図３のような状態にし、基板端ときっかけ刃５を撮像する。 The trigger blade 5 is moved to the imaging position of the image sensor 15 to obtain a state as shown in FIG. 3, and the substrate edge and the trigger blade 5 are imaged.
図３のような画像センサ１５の撮像画像から表側全層ビルドアップ基板２とキャリア３との剥離界面の位置座標を取得する。もしくは、ビルドアップ基板１のエッジの位置座標を検出し、検出したエッジの位置座標と製品設計値とを用いて剥離界面の位置座標を算出して取得する。取得した剥離界面の位置座標にきっかけ刃５を刺し込む。
但し、きっかけ刃５を剥離界面の位置座標に刺し込んだ際、力を検知するセンサ１７がきっかけ刃５に任意に指定した値以上の力が加わった場合、きっかけ刃５を引き戻し再度画像センサ５で撮像し剥離界面の位置座標を取得した後、きっかけ刃５を再度取得した剥離界面の位置座標へ刺し込む。
The position coordinates of the peeling interface between the front-side full-layer buildup substrate 2 and the carrier 3 are acquired from the captured image of the image sensor 15 as shown in FIG. Alternatively, the position coordinate of the edge of the build-up substrate 1 is detected, and the position coordinate of the peeling interface is calculated and acquired using the detected position coordinate of the edge and the product design value. The trigger blade 5 is inserted into the acquired position coordinate of the peeling interface.
However, when the trigger 17 is inserted into the position coordinate of the peeling interface and the force 17 is applied to the trigger blade 5 by a force greater than a specified value, the trigger blade 5 is pulled back and the image sensor 5 is again pulled. After capturing the image and acquiring the position coordinates of the peeling interface, the trigger blade 5 is inserted into the position coordinates of the peeling interface acquired again.
表側全層ビルドアップ基板２とキャリア３との剥離界面にきっかけ刃５を３ｍｍ程度挿入し、図１に示すように、きっかけ刃５を表側全層ビルドアップ基板２とキャリア３との剥離界面に挿入することで形成した表側全層ビルドアップ基板２とキャリア３との隙間に、圧縮空気１６を０．４ＭＰａ程度の圧力で吐出する。圧縮空気１６を隙間に吐出することで、剥離きっかけを基板端から基板中央方向に５０ｍｍ程度、表側全層ビルドアップ基板２が剥離された状態を作る。
この時、圧縮空気１６の吐出口とビルドアップ基板１とのクリアランスは１ｍｍ程度が好ましい。
About 3 mm of a trigger blade 5 is inserted into the peeling interface between the front-side full-layer buildup substrate 2 and the carrier 3, and the trigger blade 5 is inserted into the peeling interface between the front-side full-layer buildup substrate 2 and the carrier 3 as shown in FIG. Compressed air 16 is discharged at a pressure of about 0.4 MPa into the gap between the front-side full-layer buildup substrate 2 and the carrier 3 formed by insertion. By discharging the compressed air 16 into the gap, a state in which the peeling trigger is about 50 mm from the end of the substrate toward the center of the substrate and the front side all-layer buildup substrate 2 is peeled off is created.
At this time, the clearance between the discharge port of the compressed air 16 and the build-up substrate 1 is preferably about 1 mm.
図１のように圧縮空気１６を吐出しつつ、図４に示すように、きっかけ刃５を刺し込ん
だ基板端と同じ辺のもう一方の端へ向かって平行移動する。もう一方の基板端をきっかけ刃５が十分通過した位置で停止し、圧縮空気１６も停止する。これで表側全層ビルドアップ基板２への剥離きっかけ作製ができる。
While discharging the compressed air 16 as shown in FIG. 1, as shown in FIG. 4, it moves in parallel toward the other end of the same side as the substrate end where the trigger blade 5 is inserted. It stops at the position where the trigger blade 5 has sufficiently passed through the other substrate end, and the compressed air 16 also stops. This makes it possible to produce a peeling trigger on the front-side full-layer buildup substrate 2.
きっかけ刃５を再度画像センサ１５の撮像位置に移動させ、図５のように基板端ときっかけ刃５を撮像する。 The trigger blade 5 is moved again to the imaging position of the image sensor 15, and the substrate edge and the trigger blade 5 are imaged as shown in FIG.
図５のような撮像画像から裏側全層ビルドアップ基板４とキャリア３との剥離界面の位置座標を取得する。もしくは、ビルドアップ基板１のエッジの位置座標を検出し、検出したエッジの位置座標と製品設計値とを用いて裏側全層ビルドアップ基板４とキャリア３との剥離界面の位置座標を算出して取得する。取得した剥離界面の位置座標にきっかけ刃５を刺し込む。 The position coordinates of the peeling interface between the back side full-layer buildup substrate 4 and the carrier 3 are acquired from the captured image as shown in FIG. Alternatively, the position coordinate of the edge of the build-up substrate 1 is detected, and the position coordinate of the peeling interface between the back side all-layer build-up substrate 4 and the carrier 3 is calculated using the detected position coordinate of the edge and the product design value. get. The trigger blade 5 is inserted into the acquired position coordinate of the peeling interface.
裏側全層ビルドアップ基板４とキャリア３との剥離界面にきっかけ刃５を３ｍｍ程度挿入する。その時形成した裏側全層ビルドアップ基板４とキャリア３との隙間に圧縮空気１６を０．４ＭＰａ程度の圧力で吐出し、表側全層ビルドアップ基板２の時と同様にきっかけ刃５をもう一方の基板端に向かって水平移動し、十分通過した位置できっかけ刃５を停止し、圧縮空気１６の吐出も停止する。
これで、裏側全層ビルドアップ基板４への剥離きっかけ作製が完了する。
但し、きっかけ刃５を裏側全層ビルドアップ基板４とキャリア３との剥離界面の位置座標に刺し込んだ際、力を検知するセンサ１７がきっかけ刃５に任意に指定した値以上の力が加わった場合、きっかけ刃を引き戻し再度画像センサ１５で撮像し剥離界面の位置座標を取得した後、きっかけ刃５を再度取得した剥離界面の位置座標へ刺し込む。
About 3 mm of the cutting edge 5 is inserted into the peeling interface between the back side full-layer buildup substrate 4 and the carrier 3. Compressed air 16 is discharged at a pressure of about 0.4 MPa into the gap between the back-side full-layer buildup substrate 4 and the carrier 3 formed at that time, and the trigger blade 5 is moved to the other side in the same manner as the front-side full-layer buildup substrate 2. The hook blade 5 is stopped at a position where it has moved horizontally toward the substrate edge and passed sufficiently, and the discharge of the compressed air 16 is also stopped.
This completes the preparation for the separation trigger on the backside full-layer buildup substrate 4.
However, when the trigger blade 5 is inserted into the position coordinates of the peeling interface between the back side all-layer build-up substrate 4 and the carrier 3, the force 17 is applied to the trigger blade 5 with a force greater than the value arbitrarily specified. In this case, the trigger blade is pulled back and imaged again by the image sensor 15 to acquire the position coordinate of the peeling interface, and then the trigger blade 5 is inserted into the acquired position coordinate of the peeling interface again.
基板押さえ１０と基板端押さえ１１を解除し、ビルドアップ基板１を基板投入位置へ移動させ、基板を払い出し剥離きっかけ作製動作が完了する。 The substrate presser 10 and the substrate end presser 11 are released, the build-up substrate 1 is moved to the substrate loading position, the substrate is ejected, and the peeling trigger production operation is completed.
１…ビルドアップ基板
２…表側全層ビルドアップ基板
３…キャリア
４…裏側全層ビルドアップ基板
５…きっかけ刃
６…きっかけ刃先端
１０…基板押さえ
１１…基板端押さえ
１２…位置決めピン
１３…自動きっかけ作製機
１４…剥離具
１５…画像センサ
１６…圧縮空気
１７…力を検知するセンサ
１８…ステージ
DESCRIPTION OF SYMBOLS 1 ... Build-up board | substrate 2 ... Front side all-layer build-up board 3 ... Carrier 4 ... Back side all-layer build-up board 5 ... Trigger blade 6 ... Trigger blade tip 10 ... Substrate presser 11 ... Substrate end presser 12 ... Positioning pin 13 ... Automatic trigger Production machine 14 ... peeling tool 15 ... image sensor 16 ... compressed air 17 ... sensor 18 for detecting force ... stage
Claims (10)
画像センサで全層ビルドアップ基板とキャリアとの剥離界面の位置座標を取得する手段と、
取得した剥離界面の位置座標にきっかけ刃を刺し込む手段とを有し、
取得した剥離界面の位置座標に刺し込んだきっかけ刃に加わる力をセンサで検知し、任意に指定された値以上の力が加わった場合、きっかけ刃を引き戻し再度画像センサで前記剥離界面の位置座標を取得した後、きっかけ刃を再度取得した剥離界面の位置座標へ刺し込む手段をさらに有することを特徴とする剥離きっかけ作製装置。 An apparatus for producing a peeling trigger for peeling a full-layer buildup substrate from a carrier in a buildup substrate in which a full-layer buildup substrate is formed on a carrier,
Means for acquiring the position coordinates of the peeling interface between the all-layer build-up substrate and the carrier with the image sensor;
It possesses the position coordinates of the obtained peeling boundary and means for plugging the opportunity blade,
The sensor detects the force applied to the trigger blade inserted into the acquired peeling interface position coordinate, and when a force greater than the specified value is applied, pull back the trigger blade and again the position coordinate of the peeling interface with the image sensor. after obtaining the peeling chance manufacturing apparatus characterized in that it further have a means for plugging the position coordinates of the peeling boundary that has acquired the trigger blade again.
画像センサで全層ビルドアップ基板とキャリアとの剥離界面の位置座標を取得する工程と、
取得した剥離界面の位置座標にきっかけ刃を刺し込む工程とを含み、
取得した剥離界面の位置座標に刺し込んだきっかけ刃に加わる力をセンサで検知し、任意に指定された値以上の力が加わった場合、きっかけ刃を引き戻し再度画像センサで前記剥離界面の位置座標を取得した後、きっかけ刃を再度取得した剥離界面の位置座標へ刺し込む工程をさらに含むことを特徴とする剥離きっかけ作製方法。 A method of producing a peeling trigger for peeling a full-layer buildup substrate from a carrier in a buildup substrate in which a full-layer buildup substrate is formed on a carrier,
The process of acquiring the position coordinates of the peeling interface between the all-layer buildup substrate and the carrier with the image sensor;
And a step of the position coordinates of the obtained peeling boundary plugging an opportunity blade saw including,
The sensor detects the force applied to the trigger blade inserted into the acquired peeling interface position coordinate, and when a force greater than the specified value is applied, pull back the trigger blade and again the position coordinate of the peeling interface with the image sensor. after obtaining the peeling chance manufacturing method characterized by further including Mukoto the step of plugging the position coordinates of the peeling boundary that has acquired the trigger blade again.
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