JP6400468B2 - Manufacturing method of metal products - Google Patents

Description

  The present invention relates to a method for manufacturing a metal product.

  Japanese Patent Laying-Open No. 2013-60650 (Patent Document 1) shows that wet etching is used as a cutting method for cutting a mold from an electroformed product formed by an electroforming method.

  Japanese Patent Application Laid-Open No. 11-326376 (Patent Document 2) discloses that a fine structure is formed by an electroforming method.

JP2013-60650A JP-A-11-326376

  In manufacturing a metal product having a fine pattern, it is required to suppress deformation, accuracy reduction, and surface contamination. On the other hand, it is required to manufacture such metal products efficiently.

  The present invention has been made in view of the above problems, and an object of the present invention is to provide a method for manufacturing a metal product having a fine pattern with high quality and high efficiency.

The method for producing a metal product according to the present invention is a method for producing a metal product having a predetermined pattern, the step of forming a master having irregularities corresponding to a plurality of the predetermined patterns, and the irregularities of the master A step of forming a metal plate-like member provided with a plurality of the predetermined patterns using a mask, a step of forming a mask pattern on both surfaces of the metal plate-like member using photolithography, and the mask A process of forming individual metal products by etching using a pattern to form individual pieces, and a step of forming a mask pattern is a cutting portion in which a plate-like member is cut at the time of individualization The first mask pattern that is not formed on the first surface of the plate-like member on which the predetermined pattern is provided is formed using photolithography, and the first mask pattern is not formed on the cut portion during separation. Forming a second mask pattern on the second surface opposite to the first surface of the plate-like member using photolithography, and after the first mask pattern and the second mask pattern are formed, The plate-like member is immersed in an etching solution, and the plate-like member is melted from both sides of the first surface and the second surface at the cut portion, whereby the singulation is performed .

  In one embodiment, in the method for manufacturing a metal product, the step of forming the metal plate-shaped member includes forming a mold member to which the unevenness of the master is transferred by electroforming, Forming a metal plate-like member provided with a plurality of the predetermined patterns using the mold member to which the irregularities are transferred.

  In one embodiment, in the method for manufacturing a metal product, the plate-like member includes a first layer having a relatively high hardness on which the predetermined pattern is formed and a second layer having a relatively low hardness.

  In one embodiment, the unevenness | corrugation of the said original disk is formed by superprecision processing in the manufacturing method of the said metal product.

  According to the present invention, a metal product having a fine pattern can be manufactured with high quality and high efficiency.

It is a flowchart which shows each process of the manufacturing method of the metal product which concerns on one embodiment of this invention. It is a figure which shows the original disk in the manufacturing method of the metal product shown in FIG. It is a figure which shows the manufacturing process of the mold member in the manufacturing method of the metal product shown in FIG. It is a figure which shows the mold member in the manufacturing method of the metal product shown in FIG. It is a figure which shows the manufacturing process of the electroformed product in the manufacturing method of the metal product shown in FIG. It is a figure which shows the mold member and the electroformed product formed on it in the manufacturing method of the metal product shown in FIG. FIG. 3 is a diagram (No. 1) illustrating a process of dividing into pieces in the method for manufacturing the metal product illustrated in FIG. 1. FIG. 8 is a diagram (part 2) illustrating a process of dividing into pieces in the method for manufacturing the metal product illustrated in FIG. 1. It is an expanded sectional view of the cut part formed by the process of individualization shown in FIG. 7, FIG.

  Embodiments of the present invention will be described below. Note that the same or corresponding portions are denoted by the same reference numerals, and the description thereof may not be repeated.

  Note that in the embodiments described below, when referring to the number, amount, and the like, the scope of the present invention is not necessarily limited to the number, amount, and the like unless otherwise specified. In the following embodiments, each component is not necessarily essential for the present invention unless otherwise specified.

  FIG. 1 is a flowchart showing each step of the metal product manufacturing method according to the present embodiment. The metal product manufacturing method according to the present embodiment is a metal product manufacturing method having a predetermined pattern. Here, the “predetermined pattern” typically means a “fine pattern”. The “fine pattern” typically means a pattern having a pattern width of about 1 μm to 500 μm, a pattern pitch of about 10 μm to 1 mm, and a pattern depth of about 1 μm to 500 μm. In addition, the thickness of the metal product according to the present embodiment is typically about 1 mm or less. Examples of the shape of the fine pattern include a pyramid (triangular pyramid, quadrangular pyramid, etc.), a cone, a truncated pyramid, a truncated cone, a part of a spheroid (including a true sphere), a columnar body, and the like. The metal product according to the present embodiment is not limited to a specific application, and can be applied to functional metal parts in all fields such as optoelectronics, semiconductors, automobiles, medical care, and biotechnology. More specifically, for example, metal products are used for stampers, connector contacts, tip portions of indenters for measuring the hardness of minute portions, contact probe tips, and the like.

  Examples of the use of the metal product include the following in relation to the shape of the fine pattern. A metal product having a fine pattern of a cone and a pyramid can be used for the following purposes. First, it can be used as a contact probe for applying or detecting a minute signal. These shapes are useful when a minute signal is reliably applied or detected by breaking through an insulating layer (such as silicon oxide) that can be formed on the electrode surface. Secondly, it can be used as a part of a puncture device for collecting body fluids from living organisms (including humans) or supplying medicinal fluids to living organisms. Third, it can be used as a tip portion of an indenter for measuring the hardness of a minute portion. A fine pattern with a truncated cone, a truncated pyramid, or a columnar body can be used as a contact probe for electrical inspection by applying a high voltage or supplying a large current. These shapes contact the electrode in a large area by the tip surface, thus allowing a low contact resistance when performing electrical inspection.

  As shown in FIG. 1, the method of manufacturing a metal product according to the present embodiment includes a step (S10) of forming a “master” in which irregularities corresponding to a plurality (N) of the predetermined patterns are formed. A step (S21) of forming a “mold member” to which the unevenness of the master is transferred by electroforming, and a plurality (N) of the predetermined members using the “mold member” to which the unevenness of the “master” is transferred. A step (S22) of forming an “electroformed product” as a “metal plate-like member” provided with a pattern, a mask pattern is formed on both surfaces of the “electroformed product” using photolithography, and the mask Etching using the pattern into individual pieces to form individual metal products (S30) and a step of cleaning and inspecting the metal products (S40). In this specification, the step of forming the “mold member” (S21) and the step of forming the “electroformed product” (S22) may be collectively referred to as the step of forming the “electroformed product” (S20). is there.

  For example, when a convex pattern is formed on the master, the pattern transferred to the mold member is a concave pattern (inverted), and the pattern formed on the electroformed product is the same convex pattern as the master. As described above, the concavo-convex pattern may be formed on the electroformed product through one reversal, but the concavo-convex pattern may be formed on the electroformed product through two or more reversals.

  In the metal product manufacturing method, an “electroformed product” may be formed directly using a “master” without using a “mold member”. In this case, for example, if a concave pattern is formed on the “master”, an “electroformed product” having a convex pattern corresponding to the concave pattern is formed.

  FIG. 2 is a diagram showing the master. In S10, the concavo-convex pattern 10A of the master 10 is formed by, for example, a known ultraprecision machining. As the material of the master 10, for example, a metal such as stainless steel, a resin, silicon, a resist material, or the like is used.

  FIG. 3 is a diagram showing a production process of a mold member, and FIG. 4 is a diagram showing the produced mold member. In S21, the mold member 21 is formed by, for example, a known precision electroforming method. The concave / convex pattern 21A formed on the mold member 21 is obtained by accurately transferring the pattern formed on the master 10. As a material of the mold member 21, nickel, a nickel alloy, copper, or the like is used. Mechanical properties such as hardness are appropriately adjusted.

  As described above, the master 10 is formed by ultra-precise machining or the like, and its production takes a long time. By forming the mold member 21 by electroforming, it is possible to form a plurality of mold members to which the concave / convex pattern 10A of the master 10 is accurately transferred in a short time. As a result, the lead time for manufacturing the metal product can be shortened.

  FIG. 5 is a diagram showing a manufacturing process of an electroformed product. FIG. 6 is a view showing a mold member and an electroformed product formed thereon. In S22, the electroformed product 22 is formed by an electroforming method using the mold members 21 and 21B. As a material of the electroformed product 22, nickel, cobalt-nickel alloy, phosphorus alloy, or the like is used.

  Next, with reference to FIG. 7 and FIG. 8, an individualizing process of the electroformed product 22 in the present embodiment will be described.

  As shown in FIG. 7, a resist pattern R is formed on both surfaces of the electroformed product 22. The resist pattern R is formed using photolithography. As a mask used for photolithography, a glass mask or a film mask is used. As the resist pattern R, a film resist or a liquid resist is used. The positive type or the negative type is appropriately selected. The width (W) of the opening of the resist pattern R with respect to the cut part at the time of singulation is, for example, about 0.1 mm or more.

  The electroformed product 22 includes a first layer 22A (for example, Vickers hardness: HV600) having a relatively high hardness and a second layer 22B (for example, a Vickers hardness: HV300) having a relatively low hardness. The fine pattern 22C is formed on the first layer 22A.

  By immersing the electroformed product 22 shown in FIG. 7 in an etching solution (wet etching), as shown in FIG. 8, the electroformed product 22 is cut at the cutting portion 31 where the resist pattern R is not formed on both surfaces. The separated metal product 30 is formed. As the etching solution, a solution for melting metal (for example, ferric chloride solution) is used.

  FIG. 9 is an enlarged cross-sectional view of the cutting part 31. As shown in FIG. 9, since the resist pattern R is not formed on both surfaces of the electroformed product 22 in the cutting part 31 (see FIG. 7), the electroformed product 22 is electroplated from both sides by immersing it in the etching solution. The casting 22 is melted, and concave portions 32 are formed on both sides of the metal product.

  By using wet etching in the singulation process of the metal product 30, deformation such as strain is less likely to occur in the metal product 30 in the singulation process. Further, as shown in FIG. 7, since photolithography and wet etching are performed with the resist pattern R formed on the fine pattern 22C, the fine pattern 22C can be reliably protected from deformation, dirt, and the like. .

  The metal product manufacturing method according to the present embodiment is a combination of three steps of “ultra-precision fine processing (master)” + “precision electroforming method (mold member)” + “wet etching (separation)” Is one feature. Ultra-precision fine processing enables processing of fine patterns with high dimensional accuracy and position accuracy. The precision electroforming method enables efficient mass production processing. By wet etching, the singulation process in which the distortion of the metal product is suppressed can be performed in a short time.

  Although the embodiments of the present invention have been described above, the embodiments disclosed this time should be considered as illustrative in all points and not restrictive. The scope of the present invention is defined by the terms of the claims, and is intended to include any modifications within the scope and meaning equivalent to the terms of the claims.

  10 master, 10A uneven pattern, 21 mold member, 21A uneven pattern, 21B mold member, 22 electroformed product, 22A first layer, 22B second layer, 22C fine pattern, 30 metal product, 31 cut part, 32 recessed part, R Resist pattern.

Claims (4)

A method of manufacturing a metal product having a predetermined pattern in the shape of a pyramid, a cone, a truncated pyramid, or a truncated cone, and used as a contact probe ,
Forming a master on which irregularities corresponding to a plurality of the predetermined patterns are formed;
Forming a plurality of metal plate-like members provided with a plurality of the predetermined patterns using the irregularities of the master,
Forming a mask pattern using photolithography on both surfaces of the metal plate member;
Forming individual metal products by etching into pieces using the mask pattern,
In the step of forming the mask pattern, a first mask pattern that is not formed on a cutting portion where the plate-like member is cut during the singulation is provided with the predetermined pattern of the plate-like member. Forming on the predetermined pattern on one surface using photolithography, and forming a second mask pattern not formed on the cut portion where the plate-like member is cut during the singulation into the plate-like shape Forming on a second surface opposite to the first surface of the member using photolithography,
After the first mask pattern and the second mask pattern are formed, the plate member is immersed in an etching solution, and the plate member is exposed from both sides of the first surface and the second surface at the cutting portion. The metal product manufacturing method , wherein the individualization is performed by being melted, and the first mask pattern covers the predetermined pattern during the individualization . The step of forming the metal plate-shaped member includes
Forming a mold member to which the unevenness of the master is transferred by electroforming;
The metal plate manufacturing method according to claim 1, further comprising: forming a metal plate-like member provided with a plurality of the predetermined patterns using the mold member to which the unevenness of the master is transferred.   The metal plate manufacturing according to claim 1 or 2, wherein the plate-like member includes a first layer having a relatively high hardness on which the predetermined pattern is formed and a second layer having a relatively low hardness. Method.   The method for producing a metal product according to any one of claims 1 to 3, wherein the unevenness of the master is formed by ultra-precision machining.

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