JP6362683B2 - シリコンを含有する耐熱性基材用の環境バリア - Google Patents
シリコンを含有する耐熱性基材用の環境バリア Download PDFInfo
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- 239000000758 substrate Substances 0.000 title claims description 44
- 230000004888 barrier function Effects 0.000 title claims description 35
- 230000007613 environmental effect Effects 0.000 title claims description 34
- 229910052710 silicon Inorganic materials 0.000 title claims description 27
- 239000010703 silicon Substances 0.000 title claims description 27
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 26
- 239000000203 mixture Substances 0.000 claims description 23
- 229910052761 rare earth metal Inorganic materials 0.000 claims description 22
- 239000007791 liquid phase Substances 0.000 claims description 20
- 229910052863 mullite Inorganic materials 0.000 claims description 17
- 239000000463 material Substances 0.000 claims description 15
- -1 rare earth silicate Chemical class 0.000 claims description 15
- 238000000034 method Methods 0.000 claims description 14
- KZHJGOXRZJKJNY-UHFFFAOYSA-N dioxosilane;oxo(oxoalumanyloxy)alumane Chemical compound O=[Si]=O.O=[Si]=O.O=[Al]O[Al]=O.O=[Al]O[Al]=O.O=[Al]O[Al]=O KZHJGOXRZJKJNY-UHFFFAOYSA-N 0.000 claims description 13
- 239000011248 coating agent Substances 0.000 claims description 11
- 238000000576 coating method Methods 0.000 claims description 11
- AMWRITDGCCNYAT-UHFFFAOYSA-L hydroxy(oxo)manganese;manganese Chemical compound [Mn].O[Mn]=O.O[Mn]=O AMWRITDGCCNYAT-UHFFFAOYSA-L 0.000 claims description 8
- 229910005191 Ga 2 O 3 Inorganic materials 0.000 claims description 7
- 239000011819 refractory material Substances 0.000 claims description 7
- 229910004298 SiO 2 Inorganic materials 0.000 claims description 6
- 239000007790 solid phase Substances 0.000 claims description 6
- 229910052727 yttrium Inorganic materials 0.000 claims description 6
- 229910052691 Erbium Inorganic materials 0.000 claims description 5
- 229910052769 Ytterbium Inorganic materials 0.000 claims description 5
- 229910052706 scandium Inorganic materials 0.000 claims description 5
- 230000005496 eutectics Effects 0.000 claims description 4
- VWQVUPCCIRVNHF-UHFFFAOYSA-N yttrium atom Chemical compound [Y] VWQVUPCCIRVNHF-UHFFFAOYSA-N 0.000 claims description 4
- UYAHIZSMUZPPFV-UHFFFAOYSA-N erbium Chemical compound [Er] UYAHIZSMUZPPFV-UHFFFAOYSA-N 0.000 claims description 3
- 239000003779 heat-resistant material Substances 0.000 claims description 3
- 230000001590 oxidative effect Effects 0.000 claims description 3
- SIXSYDAISGFNSX-UHFFFAOYSA-N scandium atom Chemical compound [Sc] SIXSYDAISGFNSX-UHFFFAOYSA-N 0.000 claims description 3
- NAWDYIZEMPQZHO-UHFFFAOYSA-N ytterbium Chemical group [Yb] NAWDYIZEMPQZHO-UHFFFAOYSA-N 0.000 claims description 3
- 239000000306 component Substances 0.000 claims 1
- 238000010187 selection method Methods 0.000 claims 1
- 239000000835 fiber Substances 0.000 description 17
- 239000011159 matrix material Substances 0.000 description 15
- 239000000843 powder Substances 0.000 description 14
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 14
- 229910010271 silicon carbide Inorganic materials 0.000 description 13
- 239000012071 phase Substances 0.000 description 12
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 11
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 8
- 229910052799 carbon Inorganic materials 0.000 description 7
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 6
- 239000000919 ceramic Substances 0.000 description 6
- 239000011787 zinc oxide Substances 0.000 description 6
- 238000010438 heat treatment Methods 0.000 description 4
- 239000002296 pyrolytic carbon Substances 0.000 description 4
- 150000002910 rare earth metals Chemical class 0.000 description 4
- 239000000377 silicon dioxide Substances 0.000 description 4
- 238000005229 chemical vapour deposition Methods 0.000 description 3
- 239000002131 composite material Substances 0.000 description 3
- 229910052747 lanthanoid Inorganic materials 0.000 description 3
- 150000002602 lanthanoids Chemical class 0.000 description 3
- 238000005240 physical vapour deposition Methods 0.000 description 3
- 238000007750 plasma spraying Methods 0.000 description 3
- 239000007787 solid Substances 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 238000007664 blowing Methods 0.000 description 2
- 229910052796 boron Inorganic materials 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- IJKVHSBPTUYDLN-UHFFFAOYSA-N dihydroxy(oxo)silane Chemical compound O[Si](O)=O IJKVHSBPTUYDLN-UHFFFAOYSA-N 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000003754 machining Methods 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 239000008188 pellet Substances 0.000 description 2
- 238000005498 polishing Methods 0.000 description 2
- 230000002787 reinforcement Effects 0.000 description 2
- 238000005245 sintering Methods 0.000 description 2
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- 229910052692 Dysprosium Inorganic materials 0.000 description 1
- YKTSYUJCYHOUJP-UHFFFAOYSA-N [O--].[Al+3].[Al+3].[O-][Si]([O-])([O-])[O-] Chemical compound [O--].[Al+3].[Al+3].[O-][Si]([O-])([O-])[O-] YKTSYUJCYHOUJP-UHFFFAOYSA-N 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- INAHAJYZKVIDIZ-UHFFFAOYSA-N boron carbide Chemical compound B12B3B4C32B41 INAHAJYZKVIDIZ-UHFFFAOYSA-N 0.000 description 1
- 239000011153 ceramic matrix composite Substances 0.000 description 1
- 238000002485 combustion reaction Methods 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- AJNVQOSZGJRYEI-UHFFFAOYSA-N digallium;oxygen(2-) Chemical group [O-2].[O-2].[O-2].[Ga+3].[Ga+3] AJNVQOSZGJRYEI-UHFFFAOYSA-N 0.000 description 1
- 238000001652 electrophoretic deposition Methods 0.000 description 1
- 230000001747 exhibiting effect Effects 0.000 description 1
- 229910001195 gallium oxide Inorganic materials 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 238000005470 impregnation Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 230000008595 infiltration Effects 0.000 description 1
- 238000001764 infiltration Methods 0.000 description 1
- 229910052746 lanthanum Inorganic materials 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000011823 monolithic refractory Substances 0.000 description 1
- 229910000484 niobium oxide Inorganic materials 0.000 description 1
- URLJKFSTXLNXLG-UHFFFAOYSA-N niobium(5+);oxygen(2-) Chemical group [O-2].[O-2].[O-2].[O-2].[O-2].[Nb+5].[Nb+5] URLJKFSTXLNXLG-UHFFFAOYSA-N 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910001404 rare earth metal oxide Inorganic materials 0.000 description 1
- 239000012783 reinforcing fiber Substances 0.000 description 1
- 239000012779 reinforcing material Substances 0.000 description 1
- 150000004760 silicates Chemical class 0.000 description 1
- 150000003377 silicon compounds Chemical class 0.000 description 1
- 239000002002 slurry Substances 0.000 description 1
- 238000002490 spark plasma sintering Methods 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000004381 surface treatment Methods 0.000 description 1
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Description
30モルパーセント(mol%)〜最大80mol%の少なくとも1種の希土類ケイ酸塩RE2Si2O7(REは希土類元素)と、少なくとも20mol%〜70mol%の酸化マンガンMnOとによって構成される系が少なくとも90mol%;
SiO2との共晶点が1595℃以下である、1種以上のMnO以外の酸化物が最大10mol%;の組成で形成され、
少なくとも1200℃〜1400℃の温度範囲内で、大部分の固相を維持しながら、自己修復機能を有する液相が存在する自己修復層である。
本質的に少なくとも1種の希土類ケイ酸塩RE2Si2O7によって構成される下地層;
基材上に形成されたシリコンコーティング上に堆積される、本質的に少なくとも1種の希土類ケイ酸塩RE2Si2O7によって構成される下地層;
本質的にムライトによって構成される下地層;
基材上に形成されたシリコンコーティング上に堆積される、本質的にムライトによって構成される下地層;および
基材近傍のシリコンから開始され、自己修復層近傍のムライトで終結するシリコン−ムライト組成勾配を本質的に有する下地層、から選択される。
C−SiC混合マトリックス(外側にSiCを有する);
SiC相と低い剛性の相、たとえば熱分解炭素(PyC)、窒化ホウ素(BN)、もしくはホウ素ドープ炭素(BC)のマトリックス相とを交互に有し、マトリックスの末端相がSiCからなる連続マトリックス;または
炭化ホウ素(B4C)もしくはSi−B−C三元系からなり、遊離炭素を任意に含む(B4C+C、Si−B−C+C)マトリックス相と、Si−B−CもしくはSiCの末端相とを有する自己修復性マトリックスである。
異なる温度で種々の組成物の自己修復可能性を評価するため、ペレットを調製し、それぞれY2Si2O7とMnO粉末との混合物から形成された層で覆われたイットリウムケイ酸塩Y2Si2O7の下地層を形成した。2つの層は、粉末をフラッシュ焼結することにより作製し、厚さは約1ミリメートル(mm)であった。次にペレットを空気中で50時間熱処理してから大気下で急冷した後、走査型電子顕微鏡(SEM)にて観察した。
MnOが酸化ガリウムGa2O3に置き換わったことを除いて、手順は実施例1と同様であった。ただし、ここでのY2Si2O7−Ga2O3混合物中のGa2O3モル含有量は、5%、10%、25%、および53%相当であり、熱処理温度は1300℃、1350℃、および1400℃であった。自己修復機能を実現できる液相の存在は観察されなかった。
MnOが酸化ニオビウムNb2O5に置き換わったことを除いて、手順は実施例1と同様であった。ただし、ここでのY2Si2O7−Nb2O5混合物中のNb2O5モル含有量は、5%、10%、25%、48%、60%、および85%相当であり、熱処理温度は1300℃、1350℃、および1400℃であった。自己修復機能を実現できる液相の存在は観察されなかった。
MnOが酸化亜鉛ZnOに置き換わったことを除いて、手順は実施例1と同様であった。ただし、ここでのY2Si2O7−ZnO混合物中のZnOモル含有量は、5%、10%、15%、50%、60%、および85%相当であり、熱処理温度は1200℃、1300℃、1350℃、および1400℃であった。自己修復機能を実現できる液相の存在は観察されなかった。
Claims (12)
- 表面に隣接した少なくとも一部分がシリコンを含有する耐熱性材料から作製されている基材と、基材の表面に形成され、希土類ケイ酸塩を含有する少なくとも自己修復層を有する環境バリアとを含む部品であって、該部品は、
前記自己修復層が、30mol%〜最大80mol%の少なくとも1種の希土類ケイ酸塩RE2Si2O7(REは希土類元素)と、少なくとも20mol%〜70mol%の酸化マンガンMnOとによって構成される系が少なくとも90mol%;
SiO2との共晶点が1595℃以下である、1種以上のMnO以外の酸化物が最大10mol%;の組成で形成され、前記1種以上の酸化物が、存在する場合には、Al 2 O 3 、Ga 2 O 3 、In 2 O 3 、Nb 2 O 5 、ZnO、Ta 2 O 5 から選択され、
前記自己修復層は、少なくとも1200℃〜1400℃の温度範囲内で、大部分の固相を維持しながら自己修復機能を有する液相が存在することを特徴とする部品。 - REがイットリウム、スカンジウム、ならびにランタニドから選択されることを特徴とする、請求項1に記載の部品。
- REがイッテルビウムおよびエルビウムから選択されることを特徴とする、請求項2に記載の部品。
- 環境バリアが、基材表面と自己修復層との間に置かれる下地層をさらに含み、該下地層が、本質的に少なくとも1種の希土類ケイ酸塩RE2Si2O7によって構成される下地層;
基材上に形成されたシリコンコーティング上に堆積される、少なくとも1種の希土類ケイ酸塩RE2Si2O7によって構成される下地層;
本質的にムライトによって構成される下地層;
基材上に形成されたシリコンコーティング上に堆積される、本質的にムライトによって構成される下地層;および
基材近傍のシリコンから開始され、自己修復層近傍のムライトで終結するシリコン−ムライト組成勾配を本質的に有する下地層
から選択されることを特徴とする、請求項1〜3のいずれか一項に記載の部品。 - 自己修復層が、基材と耐熱性材料である外層との間に置かれることを特徴とする、請求項1〜4のいずれか一項に記載の部品。
- 自己修復層が基材とアブレイダブル材料である外層との間に置かれることを特徴とする、請求項1〜4のいずれか一項に記載の部品。
- 表面に隣接する少なくとも一部分がシリコンを含有する耐熱性材料から作製されている基材を、基材が酸化媒体中にて高温下で使用される間、環境バリアを基材表面上に形成することにより保護する方法であって、該バリアが、希土類ケイ酸塩を含有する少なくとも自己修復層を有し、該自己修復層が、
30mol%〜最大80mol%の少なくとも1種の希土類ケイ酸塩RE2Si2O7(REは希土類元素)と、少なくとも20mol%〜70mol%の酸化マンガンMnOとによって構成される系が少なくとも90mol%;
SiO2との共晶点が1595℃以下である、1種以上のMnO以外の酸化物が最大10mol%;の組成で形成され、前記1種以上の酸化物が、存在する場合には、Al 2 O 3 、Ga 2 O 3 、In 2 O 3 、Nb 2 O 5 、ZnO、Ta 2 O 5 から選択され、
それにより、少なくとも1200℃〜1400℃の温度範囲内で、大部分の固相を維持しながら自己修復機能を有する液相が存在する自己修復層を得ること、を特徴とする方法。 - REがイットリウム、スカンジウム、ならびにランタニドから選択されることを特徴とする、請求項7に記載の方法。
- REがイッテルビウムおよびエルビウムから選択されることを特徴とする、請求項8に記載の方法。
- 環境バリアが、基材表面と自己修復層との間に置かれるサブ層も有して形成され、該サブ層が、
本質的に少なくとも1種の希土類ケイ酸塩RE2Si2O7によって構成される下地層;
基材上に形成されたシリコンコーティング上に堆積される、少なくとも1種の希土類ケイ酸塩RE2Si2O7によって構成される下地層;
本質的にムライトによって構成される下地層;
基材上に形成されたシリコンコーティング上に堆積される、本質的にムライトによって構成される下地層;および
基材近傍のシリコンから開始され、自己修復層近傍のムライトで終結するシリコン−ムライト組成勾配を本質的に有する下地層
から選択されることを特徴とする、請求項7〜9のいずれか一項に記載の方法。 - 耐熱性材料である外層が自己修復層上に形成されることを特徴とする、請求項7〜10のいずれか一項に記載の方法。
- アブレイダブル材料である外層が自己修復層上に形成されることを特徴とする、請求項7〜10のいずれか一項に記載の方法。
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