JP6360010B2 - Conveying device used for film forming apparatus - Google Patents

Description

  The present invention relates to a transfer apparatus that carries in and out a substrate in a film forming apparatus.

  2. Description of the Related Art There is known a plasma film forming apparatus that forms a film by adsorbing metal ions generated by converting a raw material gas into plasma in a film forming chamber kept in a vacuum state on a substrate surface. For example, in the plasma film forming apparatus of Patent Document 1, a vacuum preliminary chamber is provided on the upper side in the vertical direction of the film forming chamber, and a transport mechanism that transports the substrate between the vacuum preliminary chamber and the film forming chamber. Is provided on the upper side in the vertical direction of the vacuum preliminary chamber. The transport mechanism includes a cylinder cylinder, a cylinder shaft, and a sliding portion. The cylinder shaft is slidably disposed in the cylinder tube along the vertical direction, and the lower end portion of the cylinder shaft projects into the vacuum prechamber. A valve body is provided at the lower end of the cylinder shaft to seal the transfer port connecting the film formation chamber and the vacuum preparatory chamber, and a substrate holding portion for holding the substrate is provided on the lower surface of the valve body. ing. Hereinafter, the valve body and the substrate holding part are also collectively referred to as “holding part”. A magnet is provided at the upper end of the cylinder shaft. The sliding portion is an annular slider that is reciprocally fitted on the outer periphery of the cylinder cylinder, and an electromagnet is provided on the inner peripheral surface of the sliding portion. The transport mechanism uses the magnetic force between the electromagnet of the sliding portion and the magnet of the cylinder shaft to reciprocate the cylinder shaft as the sliding portion reciprocates along the cylinder cylinder. The substrate is transferred between the preliminary chamber and the film forming chamber.

JP 2013-237485 A JP 2013-237484 A Japanese Patent Laid-Open No. 11-23344 Japanese Patent Laid-Open No. 11-029871 JP-A-10-253355

  However, in the conventional transport device, depending on the configuration of the drive mechanism that moves the sliding portion, smooth transport operation cannot be performed due to vibration such as rattling at the time of movement of the sliding portion, and malfunction is likely to occur. I found that there is a problem. Further, it has been found that the occurrence of vibration such as rattling causes a problem that the substrate falls due to the vibration of the substrate to be held and the operation sound increases.

  SUMMARY An advantage of some aspects of the invention is to solve at least a part of the problems described above, and the invention can be implemented as the following forms.

(1) According to one aspect of the present invention, there is provided a transfer device that is disposed on the upper side in the vertical direction of the film forming apparatus and carries in and out the substrate in the film forming apparatus. The transfer device includes: a holding unit that holds the substrate; a slide plate that is disposed along the horizontal direction and is movable in the vertical direction; a screw shaft that extends along the vertical direction; and a screw shaft that is inserted into the screw shaft. And at least one ball screw for moving the slide plate in the vertical direction; a cylinder cylinder extending along the vertical direction; and an outer peripheral surface of the cylinder cylinder A sliding portion that is attached to the slide plate and includes a first magnet that is slidably disposed along the cylinder, and a second magnet is fixed to the upper end portion of the cylinder barrel and the lower end portion is fixed to the lower end portion. A plurality of linear operation mechanisms each having a cylinder shaft to which a holding portion is fixed, and following the movement of the first magnet accompanying the movement of the slide plate, the second magnet and the cylinder By axis moves within the cylinder of the cylinder tube, and a plurality of linear actuating mechanism which moves the holding unit; comprises. In plan view, the plurality of linear operation mechanisms and the ball screw are arranged on a straight line along the longitudinal direction of the slide plate.
According to the transport device of this aspect, in the plan view, since the plurality of linear operation mechanisms and the ball screw are arranged in a straight line along the longitudinal direction of the slide plate, when the slide plate moves in the vertical direction, It is possible to suppress the occurrence of inclination between the slide plate portion to which the ball screw nut is attached and the slide plate portion to which the sliding portion is attached. As a result, it is possible to smoothly move the slide plate while suppressing the occurrence of malfunction due to vibration such as rattling when the slide plate is moved. Moreover, the fall of the board | substrate and the increase in an operating sound by the vibration of the board | substrate to hold | maintain can be suppressed.

(2) In the transport device according to the aspect described above, the plurality of linear operation mechanisms may be arranged at symmetrical positions around the position of the ball screw in the plan view.
In this configuration, since the plurality of linear operation mechanisms are arranged at symmetrical positions with respect to the position of the ball screw, when the slide plate is moved in the vertical direction, the portion of the slide plate to which the nut of the ball screw is attached And it can suppress more effectively that an inclination generate | occur | produces by the part of the slide plate to which the sliding part was attached. Accordingly, it is possible to more effectively suppress the occurrence of malfunction due to vibration such as rattling during the movement operation of the slide plate, and to smoothly move the cylinder shaft. Moreover, the fall of the board | substrate and the increase in an operation sound by the vibration of the board | substrate to hold | maintain can be suppressed more effectively.

(3) The transport apparatus according to the above aspect may include a pair of guide mechanisms that guide both end portions of the slide plate in the longitudinal direction so as to be movable along the vertical direction.
In this case, since the movement along the vertical direction of the slide plate can be guided by the pair of guide mechanisms, the inclination of the slide plate is further suppressed, while keeping the slide plate in a state along the horizontal direction, It can be moved stably along the vertical direction. Thereby, it is possible to further suppress the occurrence of malfunction due to vibration such as rattling during the movement operation of the slide plate, and to smoothly move the cylinder shaft. Moreover, the fall of the board | substrate and the increase in an operating sound by the vibration of the board | substrate to hold | maintain can further be suppressed.

(4) In the transport device according to the above aspect, an upper surface support plate and a bottom surface support plate along the horizontal direction, a first side surface support plate along the vertical direction provided between the bottom surface support plate and the upper surface support plate, and A frame having a rectangular parallelepiped frame structure having a second side support plate, and the screw shaft of the ball screw is supported at the upper end portion of the screw shaft by the upper surface support plate and at the lower end portion by the bottom surface support plate. Thus, the cylinder cylinder of the linear operation mechanism is supported in a state along the vertical direction, and the upper end portion of the cylinder cylinder is supported by the upper surface support plate and the lower end portion is supported by the bottom surface. By being supported by a plate, it is supported in a state along the vertical direction, and the guide mechanism is provided on each of the inner side surfaces of the first side surface support plate and the second side surface support plate. It may be used as is.
In this case, the frame of the rectangular parallelepiped frame structure can stably support the screw shaft of the ball screw and the cylinder cylinder of the linear operation mechanism in a state along the vertical direction, and the guide mechanism can be stabilized along the vertical direction. It can be supported in a state. Thereby, it is possible to further suppress the occurrence of malfunction due to vibration such as rattling during the movement operation of the slide plate, and to smoothly move the cylinder shaft. Moreover, the fall of the board | substrate and the increase in an operating sound by the vibration of the board | substrate to hold | maintain can further be suppressed.

(5) In the transport apparatus according to the above aspect, the plurality of linear operation mechanisms include a first linear operation mechanism and a second linear operation mechanism, and a lower end portion of the cylinder shaft of the first linear operation mechanism is configured to be the holding unit. The lower end portion of the cylinder shaft of the second linear operating mechanism is attached to the cylinder shaft of the holding portion with respect to the cylinder shaft. It may be attached to a horizontal slide mechanism that disables the displacement in the vertical direction and allows the displacement in the horizontal direction.
In this case, for example, even if the holding portion expands and contracts along the horizontal direction in response to a temperature change, the horizontal slide mechanism to which the lower end portion of the cylinder shaft of the second linear mechanism drive mechanism is attached causes the cylinder shaft to Since the horizontal position of the holding part can be displaced, the cylinder axis of each linear actuation mechanism must be kept in the vertical direction without displacing the position of the lower end of the cylinder axis of each linear actuation mechanism. Can do. Accordingly, it is possible to smoothly move the cylinder shaft while suppressing the occurrence of malfunction due to vibration such as rattling caused by the tilt of the cylinder shaft. Moreover, the fall of the board | substrate and the increase in an operating sound by the vibration of the board | substrate to hold | maintain can be suppressed.

(6) In the transport apparatus of the above aspect, a stopper may be provided that fixes the orientation of the holding unit in the longitudinal direction at the rising end position of the holding unit.
In this case, it is possible to improve the positional accuracy of the holding portion at the rising end position, and the substrate can be stably held by the holding portion.

(7) In the transport device according to the above aspect, a scraper that is fixed so as to cover an annular shape along the outer peripheral surface of the cylinder shaft and that removes dust adhering to the inner peripheral surface of the cylinder cylinder is provided. Also good.
In this case, since the dust adhering to the inner peripheral surface of the cylinder cylinder can be removed when the cylinder shaft moves, it is possible to smoothly move the cylinder shaft while suppressing rattling caused by the dust. . Moreover, the fall of the board | substrate and the increase in an operating sound by the vibration of the board | substrate to hold | maintain can be suppressed.

  Note that the present invention can be realized in various modes. For example, it can be realized in the form of a transfer device, a film forming apparatus including the transfer device, or the like.

It is the schematic which shows the structure of the plasma film-forming apparatus as one Embodiment of this invention. It is explanatory drawing which shows the structure of a conveying apparatus. It is the schematic which expands and shows the cross section of the part of the sliding part of a 1st linear action | operation mechanism. It is explanatory drawing which shows the conveying apparatus of the state which conveyed the board | substrate to the film-forming chamber. It is the schematic which expands and shows an example of the valve body support part comprised with the horizontal slide mechanism. It is the schematic which looked at one valve body rotation stopper of a pair of valve body rotation stopper from the valve body stopper side. It is the schematic which shows the conveying apparatus as a comparative example. It is the schematic shown in the state which planarly viewed the slide board of the conveying apparatus of a comparative example.

  FIG. 1 is a schematic diagram showing a configuration of a plasma film forming apparatus 10 as an embodiment of the present invention. FIG. 1 illustrates three directions x, y, and z that are orthogonal to each other. The y direction indicates a vertically downward direction, and the x direction and the z direction indicate horizontal directions. The same applies to the directions x, y, and z drawn in the drawings after FIG.

  The plasma film forming apparatus 10 forms a carbon thin film on the entire surface of a substrate WP that is a film forming target by so-called plasma CVD (plasma CVD; plasma-enhanced chemical vapor deposition). An example of the substrate WP is a separator plate used in a fuel cell. In addition, as a structure of the carbon thin film formed into a film, it may be an amorphous structure or a graphite structure, and may be another kind of structure. Note that the plasma film forming apparatus 10 is not limited to the one that forms a carbon thin film on the substrate WP, and other types of thin films other than the carbon thin film may be formed on the outer surface of the substrate WP. . For example, the plasma film forming apparatus 10 may form a thin film of a metal element such as gold, platinum, or tantalum. The substrate WP is not limited to the separator plate used in the fuel cell, and may be various substrates used for other purposes.

  The plasma film forming apparatus 10 includes a film forming chamber 20, a vacuum preliminary chamber 30, and a transfer device 40. The vacuum preliminary chamber 30 is disposed above the film forming chamber 20 in the vertical direction (y direction), and the transfer device 40 is disposed above the vacuum preliminary chamber 30 in the vertical direction. However, a portion of the transfer device 40 that actually transports the substrate WP between the vacuum preliminary chamber 30 and the film forming chamber 20 (not shown in FIG. 1) is disposed in the interior 31 of the vacuum preliminary chamber 30. Has been.

  In the plasma film forming apparatus 10, the film forming process is generally performed on the substrate WP as described below. First, the introduction lid 33 that seals the substrate introduction port 32 of the vacuum preliminary chamber 30 is opened, and the substrate WP is introduced into the inside 31 of the vacuum preliminary chamber 30 by a substrate introduction device (not shown). After being held, the introduction lid 33 is closed, and the interior 31 of the vacuum preliminary chamber 30 is evacuated by a vacuum pump (not shown). On the other hand, the film forming chamber 20 is maintained in a vacuum state by another vacuum pump. Then, the gate valve 22 for sealing the communication hole 21 communicating the vacuum preliminary chamber 30 and the film forming chamber 20 on the film forming chamber 20 side is opened, so that the vacuum film forming chamber 20 and the vacuum preliminary chamber 30 communicate with each other. Then, the substrate WP is carried into the inside 23 of the film forming chamber 20 by the transfer device 40, and the communication hole 21 is sealed on the vacuum preliminary chamber 30 side by a holding portion of the transfer device 40 as will be described later. . The film forming chamber 20 includes devices (not shown) for film formation, such as a vacuum pump, a plasma generator, a source gas supply device, an exhaust gas treatment device, and the like. In the film forming chamber 20, a film forming process is performed on the loaded substrate WP. Then, the substrate WP after the film forming process is carried out from the film forming chamber 20 to the vacuum preparatory chamber 30 by the transfer device 40, the gate valve 22 is closed and the film forming chamber 20 is sealed, and then the vacuum in the vacuum preparatory chamber 30 is removed. The state is opened, the introduction lid 33 is opened, and the substrate is introduced from the vacuum preliminary chamber 30 by the substrate introduction apparatus. As described above, in the plasma film forming apparatus 10, the film forming process is performed on the substrate WP. Note that such operation of the plasma film forming apparatus 10 is described in the above-mentioned prior art document 1 (Japanese Patent Laid-Open No. 2013-237885), and the disclosure content thereof is incorporated by reference.

  2A shows a state in which the transport device 40 is viewed from the front, and FIG. 2B shows a state in which the slide plate 400 is viewed in plan.

  The conveying device 40 includes a cuboid frame 100, a ball screw 200, a pair of linear operation mechanisms 300A and 300B, a slide plate 400, a holding unit 500, a ball screw driving unit 600, and a pair of linear guides 700A and 700B. .

  The rectangular parallelepiped frame 100 includes a bottom support plate 120 parallel to the xz plane fixed on the upper lid 34 of the vacuum preliminary chamber 30, a first side portion 131 parallel to the yz plane, and a second side portion parallel to the yx plane. The first side surface support plate 130A and the second side surface support plate 130B each configured in an L shape at 132, and the upper surface parallel to the xz plane fixed to the upper ends of the first side surface support plate 130A and the second side surface support plate 130B And a support plate 140. The rectangular frame structure frame 100 is formed by adjoining surfaces by fixing the bottom surface support plate 120, the first side surface support plate 130A and the second side surface support plate 130B, and the top surface support plate 140 to each other with bolts or the like. The angle is a right angle and the opposing surfaces are parallel to each other. The rectangular parallelepiped frame 100 is preferably covered with a dustproof cover (not shown) for protecting the ball screw 200, the linear operation mechanisms 300A and 300B, and the linear guides 700A and 700B from dust and the like.

  The ball screw 200 includes a screw shaft 210 and a nut 220 fitted to the screw shaft 210. The screw shaft 210 has an upper end fixed to the upper surface support plate 140 via the upper support 230 and a lower end fixed to the pedestal portion 112 provided on the upper surface side of the bottom surface support plate 120 via the lower support 240. ing. Each of the upper support 230 and the lower support 240 has a bearing, and supports the screw shaft 210 rotatably. The ball screw 200 is supported by the rectangular parallelepiped frame 100 in a state where the central axis CY0 of the screw shaft 210 is along the vertical direction (y direction).

  The lower end portion of the screw shaft 210 is connected to a ball screw driving unit 600 disposed in the internal space of the pedestal portion 112, and the screw shaft 210 rotates according to power (rotational force) output from the ball screw driving unit 600. . The structure of the ball screw drive unit 600 is not particularly limited, and the structure in which the rotational force of the motor is directly transmitted to the screw shaft 210 or the rotational force of the motor is indirectly transmitted to the screw shaft 210 via a gear, a belt, or the like. Various structures such as a structure can be employed.

  A nut 220 fitted to the screw shaft 210 is attached to the upper surface of a substantially rectangular slide plate 400 parallel to the xz plane (also referred to as “horizontal plane”) and having a longitudinal direction along the x direction. It moves along the vertical direction according to the rotation of. Thereby, the ball screw 200 can move the slide plate 400 to which the nut 220 is attached along the vertical direction as the screw shaft 210 rotates.

  A pair of linear operation mechanisms 300A and 300B (hereinafter also referred to as “first linear operation mechanism 300A” and “second linear operation mechanism 300B”) are inserted into cylinder cylinder 310 and cylinder cylinder 310, respectively. A cylinder shaft 320 and a sliding portion 330 provided to be slidable along the outer peripheral surface of the cylinder cylinder 310 are provided.

  The first linear actuating mechanism 300A fixes the upper end portion of the cylinder tube 310 to the upper surface support plate 140 by the cylinder guide 340 and fixes the lower end portion of the cylinder tube 310 to the pedestal portion 112 by the flange 350, thereby 100, the center axis CY1a of the cylinder tube 310 is supported in a state along the vertical direction. Similarly, the second linear operation mechanism 300B is also supported in a state where the central axis CY1b of the cylinder cylinder 310 is along the vertical direction (y direction). The sliding portions 330 of the linear operation mechanisms 300A and 300B are respectively attached to the upper surface of the slide plate 400. As will be described later, the slide portions 330 are respectively attached to the cylinder cylinders 310 according to the vertical movement of the slide plate 400. The cylinder shaft 320 is moved up and down.

  As shown in FIG. 2B, the ball screw 200 and the pair of linear operation mechanisms 300A and 300B are arranged along the longitudinal direction (x direction) of the slide plate 400 when the slide plate 400 is viewed from above in the vertical direction. It is arranged on a straight line so as to be aligned on the straight line CX. In the present embodiment, the pair of linear operation mechanisms 300 </ b> A and 300 </ b> B are disposed at symmetrical positions around the ball screw 200.

  As shown in FIG. 2A, the lower end portions of the cylinder shafts 320 of the linear operation mechanisms 300A and 300B are respectively passed through through holes in the base portion 112, the bottom surface support plate 120, and the upper cover 34 of the vacuum preliminary chamber 30. It protrudes into the interior 31 of the vacuum preliminary chamber 30 and is attached to the holding unit 500.

  The holding unit 500 includes a valve body 510, valve body support portions 520A and 520B, and a plurality of substrate holding portions 530 that hold the substrate WP. The valve body support portions 520A and 520B are fixed to the upper part of the valve body 510. The lower end portion of the cylinder shaft 320 of the first linear operation mechanism 300A is attached to the first valve body support portion 520A, and the cylinder shaft of the second linear operation mechanism 300B is attached to the second valve body support portion 520B. The lower end of 320 is attached. The plurality of substrate holding portions 530 are provided on the lower surface of the valve body 510, and the substrate WP is suspended and held by a hook 532 provided at the lower end portion. In the present embodiment, two substrate holders 530 are provided. In addition, a positioning pin 512 and an O-ring 514 are provided below the valve body 510. In addition, the structure of valve body support part 520A, 520B is mentioned later.

  FIG. 3 is an enlarged schematic view showing a section of the sliding portion 330 of the first linear operating mechanism 300A. The sliding portion 330 is a cylindrical cover 332 fixed to the slide plate 400 and an annular first cover fixed to the inner peripheral surface of the cover 332 and slidably disposed along the outer peripheral surface of the cylinder tube 310. 1 magnet 334. As the first magnet 334, a permanent magnet magnetized along the vertical direction (y direction) is used. In the example of FIG. 3, the upper side in the vertical direction is the S pole and the lower side is the N pole. In the example of FIG. 3, one row of first magnets 334 is provided along the vertical direction.

  An annular second magnet 336 fixed along the outer peripheral surface of the cylinder shaft 320 is provided at the upper end portion of the cylinder shaft 320 inserted into the cylinder tube 310. The second magnet 336 is provided with a row of second magnets corresponding to the row of first magnets 334. The second magnet 336 is magnetized along the vertical direction in the same manner as the first magnet 334 in order to improve the followability to the movement of the first magnet 334 by the magnetic force acting between the first magnet 334 described later. Two permanent magnets 336a and 336b are combined so that different polarities are in contact with each other.

  When the sliding portion 330 moves along with the movement of the slide plate 400 along the vertical direction (indicated by an arrow in the figure), the first magnetic 334 and the second magnet 336 act to generate magnetic force (attraction and repulsion). Following the movement of the first magnet 334, the second magnet 336 slides and moves in the cylinder tube 310, and the cylinder shaft 320 moves along the vertical direction. Although not shown and described, the same applies to the second linear operation mechanism 300B. Therefore, the linear operating mechanisms 300A and 300B are portions of the cylinder shaft 320 that protrude into the interior 31 of the vacuum preliminary chamber 30 as the sliding portions 330 attached to the slide plate 400 slide along the vertical direction. The length of (see FIG. 2A) can be changed. In addition, the structure of the 1st magnet 334 and the 2nd magnet 336 is an illustration, and various structures other than this are employable. Further, at least one of the two magnets 334 and 336 may be an electromagnet.

  An annular scraper 337 for removing dust adhering to the inner peripheral surface of the cylinder tube 310 is provided on the upper and lower portions on the outer peripheral surface of the cylinder shaft 320. In addition, annular scrapers 338 for removing dust adhering to the outer peripheral surface of the cylinder tube 310 are also provided on the inner peripheral surface of the cover 332 at two locations, upper and lower.

  FIG. 4 is an explanatory diagram showing the transfer device 40 in a state where the substrate WP is transferred to the film forming chamber 20. When the slide plate 400 is slid to the lower end position defined by the lower end positioning portion 114 provided on the pedestal portion 112, the respective cylinder shafts 320 of the linear operation mechanisms 300A and 300B are directed downward in the vertical direction as described above. Can be moved. Thereby, the holding part 500 attached to the cylinder shaft 320 can be moved in the interior 31 of the vacuum preliminary chamber 30 until the valve body 510 comes into contact with the upper cover 24 of the film forming chamber 20 on the lower side in the vertical direction. Then, the substrate WP held by the substrate holding unit 530 of the holding unit 500 can be carried into the inside 23 of the film forming chamber 20 through the communication hole 21 between the vacuum preliminary chamber 30 and the film forming chamber 20. it can. At this time, a positioning pin 512 and an O-ring 514 are provided on the lower surface of the valve body 510 of the holding portion 500, the positioning pin 512 is fitted into the positioning hole 26 outside the communication hole 21, and the O-ring 514 is By covering the outer periphery of the communication hole 21 in close contact with the upper cover 24 of the film forming chamber 20, the inside 23 of the film forming chamber 20 is sealed with respect to the vacuum preliminary chamber 30, and the inside of the film forming chamber 20 is kept in a vacuum state. be able to.

  Also, by sliding the slide plate 400 vertically upward from the lower end position (FIG. 4), the cylinder shafts 320 of the linear operation mechanisms 300A and 300B can be moved vertically upward, as shown in FIG. In addition, the holding unit 500 can be moved to the rising end position. As a result, the substrate WP held by the substrate holding unit 530 of the holding unit 500 is transferred from the inside 23 of the film forming chamber 20 to the vacuum preliminary chamber via the communication hole 21 between the vacuum preliminary chamber 30 and the film forming chamber 20. It can be carried out to the inside 31 of 30. The rising end position is a valve body stopper 550 provided at a central position on the lower surface side (inside 31 side) of the upper lid 34 of the vacuum preliminary chamber 30 and a pair of valves provided on both sides of the valve body stopper 550. It is defined by body rotation stoppers 560A and 560B. The configuration of the valve body rotation stoppers 560A and 560B will be described later.

  2 and 4, of the pair of linear guides 700A and 700B, the right side linear guide 700A is provided on the first side surface portion 131 of the first side surface support plate 130A, and the left side linear guide 700B is the second linear guide 700B. It is provided on the first side surface portion 131 of the side surface support plate 130B. The linear guides 700A and 700B include a linear rail 710 extending along the vertical direction (y direction) and a linear block 720 that slides on the linear rail 710. The linear guides 700A and 700B are straight lines in which the slide block 400 attached to each linear block 720 moves along the direction (vertical direction) of the linear rail when the linear block 720 slides on the linear rail 710. It is a guide mechanism that guides movement. Thus, when the slide plate 400 moves along the vertical direction by the ball screw 200, the horizontal direction along the xz plane (horizontal plane) is maintained by the pair of left and right linear guides 700A and 700B along the vertical direction. Guided so as to achieve smooth movement (linear motion).

  The valve body support portion 520A to which the cylinder shaft 320 of the first linear operation mechanism 300A is attached disables the displacement of the holding portion 500 with respect to the cylinder shaft 320 in the x, z direction (horizontal direction) and y direction (vertical direction). Thus, it is comprised by the fixing mechanism which fixes the lower end part of the cylinder shaft 320. FIG. The structure of the fixing mechanism is not limited as long as the lower end of the cylinder shaft 320 can be fixed. On the other hand, the valve body support portion 520B (FIGS. 2 and 4) to which the cylinder shaft 320 of the second linear operation mechanism 300B is attached has a y-direction of the holding portion 500 with respect to the cylinder shaft 320 (described below). It is composed of a mechanism (hereinafter also referred to as “horizontal slide mechanism”) that disables displacement in the vertical direction) and allows displacement in the x direction (horizontal direction).

  FIG. 5 is an enlarged schematic view showing an example of the valve body support portion 520B (FIGS. 2 and 4) configured with a horizontal slide mechanism. 5A shows a cross section of the valve body support 520B cut along a plane including the central axis CYL of the cylinder shaft 320 along the xy plane, and FIG. 5B is attached to the valve body support 520B. A portion of the cylinder shaft 320 thus extracted is shown. As shown in FIG. 5A, the valve body support portion 520B is provided with a cylinder shaft insertion groove 521 having an inner diameter larger than the outer diameter of the cylinder shaft 320 along the y direction (vertical direction). Engagement holes 522a and 522b into which the engagement rods 523 are inserted along the x direction (horizontal direction) are provided in the valve body support portion 520B outside the shaft insertion groove 521. Further, as shown in FIG. 5B, the cylinder shaft 320 is also provided with an engagement hole 321 that penetrates along the x direction and into which the engagement rod 523 is inserted. As shown in FIG. 5A, the engagement rod 523 has an engagement hole 522a on the left side in the x direction of the valve body support portion 520B, an engagement hole 321 on the cylinder shaft 320, and a right side in the x direction of the valve body support portion 520B. The engagement holes 522b are inserted in this order, and are fixed to the valve body support portion 520B by the fixing pins 524 so as not to fall out of the engagement holes 522a and 522b.

  With the above structure, the cylinder shaft 320 is fixed (restrained) by the engagement rod 523 so that it cannot move in the y direction (vertical direction). In contrast, the inner diameter of the cylinder shaft insertion groove 521 into which the cylinder shaft 320 is inserted is larger than the outer diameter of the cylinder shaft 320, and a gap is provided along the x direction (horizontal direction). The valve body 510 can move (slide) in the x direction (horizontal direction) along the engagement rod 523.

  Here, the valve body 510 is likely to change in volume according to the change in temperature in the vacuum preliminary chamber 30, and the following problem occurs due to the dimensional change in the x direction (horizontal direction) that occurs along with this. there is a possibility. When both the cylinder shaft 320 of the second linear operation mechanism 300B and the cylinder shaft 320 of the first linear operation mechanism 300A are fixed by the valve body support portion of the fixing mechanism, the dimension of the valve body 510 in the x direction varies. Accordingly, the lower end portion of the cylinder shaft 320 is pulled in the direction of dimensional variation, and the cylinder shaft 320 is tilted from the state along the vertical direction (y direction). When the cylinder shaft 320 is tilted from the state along the vertical direction, the cylinder shaft 320 is tilted with respect to the cylinder tube 310. Therefore, vibration such as rattling occurs when the cylinder shaft 320 moves up and down, and smooth. Movement may be difficult.

  On the other hand, as shown in FIG. 5, in the valve body support portion 520 </ b> B, the lower end portion of the cylinder shaft 320 extends along the engagement rod 523 in the x direction even if the dimension in the x direction of the valve body 510 varies. Since the cylinder shaft 320 can slide in the (horizontal direction), the cylinder shaft 320 can maintain a state along the y direction (vertical direction), and can maintain a smooth movement operation. In addition, the inner diameter dimension of the cylinder shaft insertion groove 521 is set to a size that can absorb the dimensional variation in the x direction due to the temperature change of the valve body 510. However, when the inclination of the cylinder shaft 320 due to temperature fluctuation or the like is not a problem, the valve body support portion 520B may not be provided with a horizontal slide mechanism.

  FIG. 6 is a schematic view of one valve body rotation stopper 560B of the pair of valve body rotation stoppers 560A and 560B (FIGS. 2 and 4) viewed from the side from the valve body stopper 550 side. FIG. 6 shows the upper lid 34 of the vacuum preliminary chamber 30 and the valve body 510 of the holding unit 500 in a schematic cross section (hatching), omitting unnecessary members for explanation. The valve body rotation stopper 560B includes a fixed guide 562 that holds and fixes the valve body support portion 520B. Although not shown, the other valve body rotation stopper 560A is the same as the one valve body rotation stopper 560B. The two valve body rotation stoppers 560A and 560B fix the valve body support portions 520A and 520B of the valve body 510 to thereby change the position of the valve body 510, particularly the longitudinal direction, at the rising end position of the holding portion 500. It can be fixed along the direction (FIG. 2).

  The transport apparatus 40 having the structure described above moves the slide plate 400 by the ball screw 200 along the vertical direction while maintaining the horizontal state by the guides by the pair of linear guides 700A and 700B. By operating the operation mechanisms 300 </ b> A and 300 </ b> B, the substrate WP held by the substrate holding unit 530 of the holding unit 500 can be carried into and out of the film forming chamber 20.

  FIG. 7 is a schematic diagram illustrating a transfer device 40R as a comparative example. FIG. 7A is a front view corresponding to FIG. 2A, and FIG. 7B is a left side view of FIG. 7A. FIG. 8 is a schematic view showing the slide plate 400R of the transport apparatus 40R in a plan view. The transfer device 40R of the comparative example includes a ball screw 200, a linear operation mechanism 300, a pair of support mechanisms 800A and 800B, a holding unit 500, and a ball screw driving unit 600.

  In the linear operating mechanism 300, the lower end portion of the cylinder tube 310 is installed on the upper surface of the upper lid 34 of the vacuum preliminary chamber 30 via the support base 370, and the upper end portion is fixed to the connecting plate 170 via the cylinder guide 340. Yes. The cylinder cylinder 310 of the linear operation mechanism 300 is supported by the connecting plate 170, the upper cylinder guide 340, the upper lid 34, and the support base 370 so that the central axis CY1 is in a state along the vertical direction.

  As shown in FIGS. 7B and 8, the ball screw 200 is positioned at a position shifted in the z direction with respect to the linear operation mechanism 300, and the lower end portion of the screw shaft 210 is connected to the ball screw support plate 160 via the lower support 240. The upper end portion of the screw shaft 210 is fixed to the connecting plate 170 via the upper support 230. The screw shaft 210 of the ball screw 200 is supported by the connecting plate 170, the upper support 230, the ball screw support plate 160, and the lower support 240 so that the center axis CY0 is in a state along the vertical direction.

  Of the pair of support mechanisms 800A and 800B, the first support mechanism 800A has a lower end portion of the support bar 810 installed on the upper surface of the upper cover 34 of the vacuum preliminary chamber 30 via a flange 830. The part is fixed to the connecting plate 170. The same applies to the second support mechanism 800B. In the support mechanisms 800A and 800B, the support bars 810 are supported by the connecting plate 170, the upper lid 34, and the flange 830 so that the central axes CY2a and CY2b are in a state along the vertical direction (y direction). Yes.

  The nut 220 of the ball screw 200, the sliding portion 330 of the linear operation mechanism 300, and the sliding bearing 820 of the support mechanisms 800A and 800B are attached to the slide plate 400R. As the screw shaft 210 of the ball screw 200 rotates, the nut 220 moves in the vertical direction, and the slide plate 400R moves accordingly. At this time, the sliding bearing 820 attached to the slide plate 400R slides and moves on the support bar 810, thereby supporting the movement of the slide plate 400R along the vertical direction.

  The transport device 40R of the comparative example described above has the following problems. As shown in FIG. 8, the arrangement position of the screw shaft 210 of the ball screw 200 is shifted in the z direction with respect to the cylinder cylinder 310 of the linear operation mechanism 300 (also referred to as “offset arrangement”). Therefore, the slide plate 400R to which the nut 220 of the ball screw 200 and the sliding portion 330 of the linear operation mechanism 300 are attached moves in the z direction as indicated by the arrow Y400R in FIG. An event that is inclined with respect to (horizontal direction) is likely to occur. For example, when the slide plate 400R is raised, the nut 220 side is high and the sliding portion 330 side is inclined low, and when the slide plate 400R is lowered, the nut 220 side is low and the sliding portion 330 side is inclined high. When the slide plate 400R is inclined as described above, vibration such as rattling occurs when sliding along the cylinder tube 310 of the sliding portion 330 of the linear operation mechanism 300, and smooth operation may be difficult. In addition, vibrations such as rattling may increase the operation sound of the apparatus.

  Further, the support bar 810 of the support mechanisms 800A and 800B is supported so that substantially only the lower end thereof is fixed on the upper cover 34 of the vacuum preliminary chamber 30 via the flange 830 and is in a state along the vertical direction. It has only been done. Therefore, the support bar 810 of the first support mechanism 800A and the support bar 810 of the second support mechanism 800B are respectively in the x direction and the z direction as shown by arrows XZ800A and XZ800B in FIG. In some cases, tilting occurs and parallelism along the vertical direction cannot be ensured. For this reason, smooth movement of the sliding bearing 820 is suppressed, vibration such as rattling occurs in the operation of the slide plate 400R, and smooth operation may be difficult.

  Further, the cylinder cylinder 310 of the linear operation mechanism 300 is also supported so that only its lower end is fixed on the upper cover 34 of the vacuum preliminary chamber 30 via the support base 370 and is in a state along the vertical direction. It has only been done. For this reason, as shown by the arrow XZ300 in FIG. 7A, the cylinder cylinder 310 of the linear operation mechanism 300 is inclined with respect to the x direction and the z direction, and the parallelism along the vertical direction cannot be secured. Etc. occur. For this reason, vibration such as rattling occurs in the vertical movement operation of the slide plate 400 by sliding along the cylinder cylinder 310 of the sliding portion 330, and smooth operation may be difficult.

  In addition, since the holding unit 500 is supported by the cylinder shaft 320 of the linear operation mechanism 300 at the center position in the longitudinal direction (x direction) of the holding unit 500, the position of the holding unit 500 (particularly, the longitudinal direction) varies. Is likely to occur. In particular, when a variation occurs in the position of the holding unit 500 at the rising end position (FIG. 7A), there is a problem that the substrate cannot be held by the substrate holding unit and dropped. To do. In addition, when the holding unit 500 is raised or lowered by the linear operation mechanism 300, rotational vibration about the cylinder shaft 320 is likely to occur in the holding unit 500, and this vibration causes the substrate to move to the wall surface of the vacuum preliminary chamber 30 or the like. There is also a possibility that the substrate may fall due to contact.

  On the other hand, in the transport apparatus 40 (FIGS. 2 to 4) of the embodiment, as described above, the slide plate 400 is obtained when the ball screw 200 and the pair of linear operation mechanisms 300A and 300B are viewed from above in the vertical direction. Are arranged in a straight line along the longitudinal direction (x direction). More specifically, the pair of linear operation mechanisms 300A and 300B are arranged at symmetrical positions along the longitudinal direction (x direction) of the slide plate 400 with the ball screw 200 as the center. Thereby, the inclination at the time of the movement of the slide plate 400 along the vertical direction (y direction) can be suppressed, and vibration such as rattling at the time of movement of the slide plate 400 can be suppressed to achieve a smooth operation. it can.

  Further, by supporting the ball screw 200 and the linear operation mechanisms 300A and 300B with the upper surface support plate 140 and the bottom surface support plate 120 (including the pedestal 112) of the cuboid frame structure frame 100, the screw shaft 210 and the linear operation mechanism 300A of the ball screw 200 are supported. , 300B can be stably installed in a state along the vertical direction and in a state parallel to each other. Thereby, it is possible to suppress a vibration such as rattling during the movement of the slide plate 400 and to achieve a smooth operation.

  Further, when the slide plate 400 is moved along the vertical direction by the linear guides 700A and 700B provided on the side surfaces on both sides of the cuboid frame structure frame 100, the horizontal state along the xz plane of the slide plate 400 can be easily obtained. Can be maintained. Thereby, when the slide plate 400 is inclined with respect to the x direction and the z direction and the sliding portion 330 of the linear operation mechanism 300A, 300B slides along the cylinder tube 310, vibration such as rattling occurs. This can be suppressed and a smooth operation can be achieved.

  In addition, by removing dust adhering to the cylinder tube 310 by the scrapers 337 and 338, it is possible to suppress the occurrence of vibrations such as rattling in the sliding operation of the sliding portions 330A and 330B and the moving operation of the cylinder shaft 320 associated therewith. And smooth operation can be achieved.

  Further, even if the dimension of the valve body 510 in the x direction varies due to the valve body support portion 520B configured by a slide mechanism, the lower end portion of the cylinder shaft 320 of the second linear operation mechanism 300B is moved along the engagement rod 523 x. Since it can be slid in the direction (horizontal direction), the cylinder shaft 320 can maintain the state along the y direction (vertical direction), suppress the occurrence of vibration such as rattling, and move smoothly. Can be maintained.

  Further, as described above, if the occurrence of vibration such as rattling is suppressed, an increase in the operation sound of the apparatus can also be suppressed. The fall of the substrate WP held by the substrate holding unit 530 of the holding unit 500 can be suppressed.

  In addition, since the valve element 510 of the holding portion 500 is held by the cylinder shaft 320 of the linear operation mechanism 300A, 300B arranged at a symmetrical position along the x direction with respect to the ball screw 200 arranged at the center, The degree of freedom of rotation of the valve body 510 in the horizontal direction can be suppressed. Thereby, it is possible to suppress the substrate WP held by the substrate holding unit 530 of the holding unit 500 from falling in contact with the wall surface or the like in the vacuum preliminary chamber 30.

  Further, at the rising end position of the holding part 500, the longitudinal direction along the horizontal direction of the valve body 510 of the holding part 500 is regulated by the valve body rotation stoppers 560A and 560B so as to be along the x direction. Can do. In addition, the positional accuracy of the substrate holder 530 of the holder 500 can be improved, and the substrate WP can be stably held by the substrate holder 530.

  The present invention is not limited to the above-described embodiments, examples, and modifications, and can be realized with various configurations without departing from the spirit thereof. For example, the technical features in the embodiments, examples, and modifications corresponding to the technical features in each embodiment described in the summary section of the invention are to solve some or all of the above-described problems, or In order to achieve part or all of the above-described effects, replacement or combination can be performed as appropriate. Further, if the technical feature is not described as essential in the present specification, it can be deleted as appropriate.

(1) In the conveyance device 40 of the above-described embodiment, a configuration including one ball screw 200 and a pair of linear operation mechanisms 300A and 300B symmetrically arranged around the ball screw 200 has been described as an example. It is not a thing. For example, one ball screw and a pair of linear operation mechanisms may be used as one set of mechanisms, and a plurality of sets of mechanisms may be provided. Moreover, it is good also as a structure provided with several sets of mechanisms by using one linear actuating mechanism and one ball screw as one set of mechanisms. However, it is preferable that the conveying device 40 includes one or more ball screws 200 and a plurality of linear operation mechanisms 300, which are arranged in a straight line along the longitudinal direction of the slide plate 400 in a plan view.

(2) In the above embodiment, the case where the screw shaft 210 of the ball screw 200 is rotated by the ball screw driving unit 600 has been described as an example, but the nut 220 may be rotated by the ball screw driving unit.

(3) In the above embodiment, the sliding portion 330 is provided with one row of first magnets 334, and the cylinder shaft 320 is provided with one row of second magnets 336 corresponding to the one row of first magnets 334. However, a plurality of rows of the first magnet 334 and the second magnet 336 may be provided along the vertical direction (y direction).

(4) In the above embodiment, the dust attached to the cylinder cylinder 310 is removed by the scrapers 337 and 338, whereby the sliding operation of the sliding portions 330A and 330B and the accompanying movement operation of the cylinder shaft 320, etc. However, the present invention is not limited to this. For example, when dust does not adhere to the cylinder 310 or when the amount of dust that adheres does not affect the generation of vibrations such as rattling, such as when the amount of dust that adheres is very small, the scraper It is also possible to omit 337 and 338.

(5) In the above embodiment, the guide mechanism that guides the slide plate 400 movably along the vertical direction on the inner side surfaces of the first side support plate 130A and the second side support plate 130B of the cuboid frame 100, respectively. As an example, the linear guides 700A and 700B are provided. However, the linear guides 700A and 700B can be omitted.

(6) In the above embodiment, the structure is described in which the rectangular parallelepiped frame 100 supports the screw shaft 210 of the ball screw 200 and the cylinder cylinders 310 of the linear operation mechanisms 300A and 300B along the vertical direction. However, the present invention is not limited to this, and any structure can be used as long as the screw shaft 210 of the ball screw 200 and the cylinder cylinders 310 of the linear operation mechanisms 300A and 300B are supported along the vertical direction. May be.

(7) In the above embodiment, the plasma film forming apparatus 10 including the film forming chamber 20 and the vacuum preliminary chamber 30 has been described as an example in which the transfer device 40 is provided above the vacuum preliminary chamber 30 in the vertical direction. However, the present invention is not limited to this. For example, a film forming apparatus having a structure that is not divided into a film forming chamber and a vacuum preliminary chamber may be used. That is, the transfer apparatus of the present invention can be applied as a transfer apparatus disposed on the upper side in the vertical direction of film forming apparatuses having various configurations.

DESCRIPTION OF SYMBOLS 10 ... Plasma film-forming apparatus 20 ... Film-forming chamber 21 ... Communication hole 22 ... Gate valve 23 ... Inside 24 ... Upper lid 26 ... Positioning hole 30 ... Vacuum preliminary chamber 31 ... Inside 32 ... Substrate introduction port 33 ... Introduction lid 34 ... Upper lid 40 ... Conveying device 40R ... Conveying device 100 ... Rectangular frame structure frame 112 ... Pedestal part 120 ... Bottom support plate 130A, 130B ... Side support plate 131,132 ... Side portion 140 ... Top support plate 160 ... Ball screw support plate 170 ... Connecting plate 200 ... Ball screw 210 ... Screw shaft 220 ... Nut 230 ... Upper support 240 ... Lower support 300 ... Linear operation mechanism 300A, 300B ... Linear operation mechanism 310 ... Cylinder cylinder 320 ... Cylinder shaft 321 ... Engagement hole 330 ... Sliding part 332 ... Cover 334 ... 1st magnet 336 ... 2nd magnet 336a, 336b ... Permanent Stone 337, 338 ... Scraper 340 ... Cylinder guide 350 ... Flange 370 ... Support base 400 ... Slide plate 500 ... Holding part 510 ... Valve body 512 ... Positioning pin 514 ... O-ring 520A, 520B ... Valve body support part 530 ... Substrate holding part 521 ... Cylinder shaft insertion groove 522 ... Engagement hole 523 ... Engagement rod 524 ... Fixing pin 550 ... Valve body stopper 560A, 560B ... Valve body rotation stopper 570 ... Valve body fixing part 600 ... Ball screw drive part 700A, 700B ... Linear guide 710 ... Linear rail 720 ... Linear block 800A, 800B ... Support mechanism 810 ... Support bar 820 ... Sliding bearing

Claims (7)

A transfer device that is arranged above the film forming apparatus in the vertical direction and carries in and out the substrate in the film forming apparatus,
The transfer device
A holding unit for holding the substrate;
A slide plate arranged along the horizontal direction and movable in the vertical direction;
A screw shaft extending along the vertical direction; and a nut inserted into the screw shaft and attached to the slide plate; and one or more ball screws that move the slide plate in the vertical direction;
A cylinder that extends along the vertical direction; a sliding portion that includes a first magnet that is slidably disposed along an outer peripheral surface of the cylinder; and that is attached to the slide plate; A plurality of linear operation mechanisms each having a second magnet fixed to an upper end portion and a cylinder shaft having the holding portion fixed to a lower end portion. Following the movement of the magnet, a plurality of linear actuation mechanisms that move the holding portion by moving the second magnet and the cylinder shaft in the cylinder tube;
With
The transport apparatus in which the plurality of linear operation mechanisms and the ball screw are arranged in a straight line along a longitudinal direction of the slide plate in a plan view. It is a conveying apparatus of Claim 1, Comprising:
The plurality of linear operation mechanisms are arranged in a symmetrical position with respect to the position of the ball screw in the plan view. The transport apparatus according to claim 1 or 2, further comprising:
A conveying apparatus comprising a pair of guide mechanisms that guide both end portions of the slide plate in the longitudinal direction so as to be movable along the vertical direction. The transfer device according to claim 3, further comprising:
A rectangular parallelepiped having a top surface support plate and a bottom surface support plate along the horizontal direction, and a first side surface support plate and a second side surface support plate along the vertical direction provided between the bottom surface support plate and the top surface support plate. With a frame of frame structure,
The screw shaft of the ball screw is supported in a state along the vertical direction, with the upper end portion of the screw shaft being supported by the upper surface support plate and the lower end portion being supported by the bottom surface support plate. ,
The cylinder cylinder of the linear operation mechanism is supported in a state along the vertical direction by supporting an upper end portion of the cylinder cylinder with the upper surface support plate and a lower end portion with the bottom surface support plate. And
The conveying apparatus in which the said guide mechanism is provided in the inner surface of the said 1st side surface support plate and the said 2nd side surface support plate, respectively. It is a conveying apparatus as described in any one of Claim 1- Claim 4, Comprising:
The plurality of linear operation mechanisms have a first linear operation mechanism and a second linear operation mechanism,
The lower end portion of the cylinder shaft of the first linear operating mechanism is attached to a fixing mechanism that disables displacement of the holding portion in the vertical direction and the horizontal direction with respect to the cylinder shaft,
The lower end portion of the cylinder shaft of the second linear operation mechanism is attached to a horizontal slide mechanism that disables the vertical displacement of the holding portion relative to the cylinder shaft and allows the horizontal displacement. , Conveying device. It is a conveying apparatus as described in any one of Claim 1- Claim 5, Comprising:
A transport device comprising a stopper for fixing a longitudinal direction of the holding portion at a rising end position of the holding portion. It is a conveyance apparatus as described in any one of Claim 1- Claim 6, Comprising:
Each of the plurality of linear operation mechanisms includes a scraper that is fixed so as to be annularly covered along the outer peripheral surface of the cylinder shaft and includes a scraper for removing dust adhering to the inner peripheral surface of the cylinder cylinder. .

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