JP6347105B2 - 蒸着マスクの製造方法、金属フレーム付き蒸着マスクの製造方法、及び有機半導体素子の製造方法 - Google Patents

蒸着マスクの製造方法、金属フレーム付き蒸着マスクの製造方法、及び有機半導体素子の製造方法 Download PDF

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JP6347105B2
JP6347105B2 JP2013272846A JP2013272846A JP6347105B2 JP 6347105 B2 JP6347105 B2 JP 6347105B2 JP 2013272846 A JP2013272846 A JP 2013272846A JP 2013272846 A JP2013272846 A JP 2013272846A JP 6347105 B2 JP6347105 B2 JP 6347105B2
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resin plate
mask
vapor deposition
metal mask
metal
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JP2015028204A5 (enExample
JP2015028204A (ja
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小幡　勝也
勝也 小幡
武田　利彦
利彦 武田
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Dai Nippon Printing Co Ltd
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Dai Nippon Printing Co Ltd
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JP2013272846A 2013-06-28 2013-12-27 蒸着マスクの製造方法、金属フレーム付き蒸着マスクの製造方法、及び有機半導体素子の製造方法 Active JP6347105B2 (ja)

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JP2013272846A JP6347105B2 (ja) 2013-06-28 2013-12-27 蒸着マスクの製造方法、金属フレーム付き蒸着マスクの製造方法、及び有機半導体素子の製造方法

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JP2013136823 2013-06-28
JP2013272846A JP6347105B2 (ja) 2013-06-28 2013-12-27 蒸着マスクの製造方法、金属フレーム付き蒸着マスクの製造方法、及び有機半導体素子の製造方法

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JP2015028204A5 JP2015028204A5 (enExample) 2017-01-12
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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102658382B1 (ko) * 2019-04-01 2024-04-19 삼성디스플레이 주식회사 마스크 인장 용접 장치 및 이를 이용한 마스크 인장 용접 방법

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6527408B2 (ja) * 2015-07-02 2019-06-05 株式会社ブイ・テクノロジー 成膜マスクの製造方法及びその製造装置
CN105349947B (zh) * 2015-10-27 2018-01-12 深圳浚漪科技有限公司 高精度金属掩模板加工方法
JP6709534B2 (ja) * 2016-04-06 2020-06-17 大日本印刷株式会社 蒸着マスク及び蒸着マスクの製造方法
WO2018198302A1 (ja) * 2017-04-28 2018-11-01 シャープ株式会社 架張装置、蒸着マスク製造装置および蒸着マスク製造方法
KR102700135B1 (ko) * 2017-11-16 2024-08-29 엘지이노텍 주식회사 증착용 마스크 및 이의 제조 방법
KR102853706B1 (ko) * 2020-03-13 2025-09-02 삼성디스플레이 주식회사 마스크 제조방법 및 표시 장치의 제조방법
KR102492133B1 (ko) * 2020-12-29 2023-01-31 (주)세우인코퍼레이션 오픈 마스크 조립체의 제조 방법
CN115074664A (zh) * 2022-07-18 2022-09-20 重庆翰博显示科技研发中心有限公司 一种使用复合材料制作的精细掩模版
JP2024044142A (ja) * 2022-09-20 2024-04-02 キヤノントッキ株式会社 成膜装置及び成膜方法
JP2024044139A (ja) * 2022-09-20 2024-04-02 キヤノントッキ株式会社 マスク、成膜方法及び成膜装置
JP2024160514A (ja) * 2023-05-01 2024-11-14 株式会社ブイ・イー・ティー 蒸着マスクのためのマスクフレーム

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4671680B2 (ja) * 2004-12-16 2011-04-20 大日本印刷株式会社 メタルマスクのフレーム取付方法及び装置
KR100700838B1 (ko) * 2005-01-05 2007-03-27 삼성에스디아이 주식회사 섀도우마스크 패턴 형성방법
US20070137568A1 (en) * 2005-12-16 2007-06-21 Schreiber Brian E Reciprocating aperture mask system and method
JP5899585B2 (ja) * 2011-11-04 2016-04-06 株式会社ブイ・テクノロジー マスクの製造方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102658382B1 (ko) * 2019-04-01 2024-04-19 삼성디스플레이 주식회사 마스크 인장 용접 장치 및 이를 이용한 마스크 인장 용접 방법

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