JP6314416B2 - 半導体装置 - Google Patents
半導体装置 Download PDFInfo
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- JP6314416B2 JP6314416B2 JP2013216505A JP2013216505A JP6314416B2 JP 6314416 B2 JP6314416 B2 JP 6314416B2 JP 2013216505 A JP2013216505 A JP 2013216505A JP 2013216505 A JP2013216505 A JP 2013216505A JP 6314416 B2 JP6314416 B2 JP 6314416B2
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- 239000004065 semiconductor Substances 0.000 title claims description 76
- 239000000463 material Substances 0.000 claims description 93
- 239000011248 coating agent Substances 0.000 claims description 87
- 238000000576 coating method Methods 0.000 claims description 87
- 239000000758 substrate Substances 0.000 claims description 30
- 229920005989 resin Polymers 0.000 claims description 26
- 239000011347 resin Substances 0.000 claims description 26
- 229910052751 metal Inorganic materials 0.000 claims description 22
- 239000002184 metal Substances 0.000 claims description 22
- 229920002614 Polyether block amide Polymers 0.000 claims description 4
- 239000004642 Polyimide Substances 0.000 claims description 4
- 239000003822 epoxy resin Substances 0.000 claims description 4
- 229920000647 polyepoxide Polymers 0.000 claims description 4
- 229920001721 polyimide Polymers 0.000 claims description 4
- 239000004962 Polyamide-imide Substances 0.000 claims description 2
- 239000004697 Polyetherimide Substances 0.000 claims description 2
- 229920002312 polyamide-imide Polymers 0.000 claims description 2
- 229920001601 polyetherimide Polymers 0.000 claims description 2
- 238000005187 foaming Methods 0.000 description 14
- 238000010586 diagram Methods 0.000 description 8
- 239000010949 copper Substances 0.000 description 7
- 229910052802 copper Inorganic materials 0.000 description 6
- 238000004519 manufacturing process Methods 0.000 description 6
- 238000007789 sealing Methods 0.000 description 6
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 5
- 229910000881 Cu alloy Inorganic materials 0.000 description 4
- 239000004033 plastic Substances 0.000 description 4
- 229920003023 plastic Polymers 0.000 description 4
- 238000012545 processing Methods 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 3
- 230000007797 corrosion Effects 0.000 description 3
- 238000005260 corrosion Methods 0.000 description 3
- 230000005489 elastic deformation Effects 0.000 description 3
- 229910000679 solder Inorganic materials 0.000 description 3
- 239000002904 solvent Substances 0.000 description 3
- 239000004734 Polyphenylene sulfide Substances 0.000 description 2
- 229920000122 acrylonitrile butadiene styrene Polymers 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 239000000470 constituent Substances 0.000 description 2
- 238000002474 experimental method Methods 0.000 description 2
- 230000009477 glass transition Effects 0.000 description 2
- 229920001707 polybutylene terephthalate Polymers 0.000 description 2
- 229920000069 polyphenylene sulfide Polymers 0.000 description 2
- 238000001721 transfer moulding Methods 0.000 description 2
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- XECAHXYUAAWDEL-UHFFFAOYSA-N acrylonitrile butadiene styrene Chemical compound C=CC=C.C=CC#N.C=CC1=CC=CC=C1 XECAHXYUAAWDEL-UHFFFAOYSA-N 0.000 description 1
- 239000004676 acrylonitrile butadiene styrene Substances 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 239000011368 organic material Substances 0.000 description 1
- 229920006122 polyamide resin Polymers 0.000 description 1
- -1 polybutylene terephthalate Polymers 0.000 description 1
- 230000007261 regionalization Effects 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 229920002050 silicone resin Polymers 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 229920002803 thermoplastic polyurethane Polymers 0.000 description 1
- 230000008016 vaporization Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L24/31—Structure, shape, material or disposition of the layer connectors after the connecting process
- H01L24/32—Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/4805—Shape
- H01L2224/4809—Loop shape
- H01L2224/48091—Arched
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/481—Disposition
- H01L2224/48135—Connecting between different semiconductor or solid-state bodies, i.e. chip-to-chip
- H01L2224/48137—Connecting between different semiconductor or solid-state bodies, i.e. chip-to-chip the bodies being arranged next to each other, e.g. on a common substrate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/481—Disposition
- H01L2224/48151—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/48221—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/48245—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
- H01L2224/48247—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic connecting the wire to a bond pad of the item
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/73—Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
- H01L2224/732—Location after the connecting process
- H01L2224/73251—Location after the connecting process on different surfaces
- H01L2224/73265—Layer and wire connectors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L2224/85—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a wire connector
- H01L2224/85909—Post-treatment of the connector or wire bonding area
- H01L2224/8592—Applying permanent coating, e.g. protective coating
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/11—Device type
- H01L2924/13—Discrete devices, e.g. 3 terminal devices
- H01L2924/1304—Transistor
- H01L2924/1305—Bipolar Junction Transistor [BJT]
- H01L2924/13055—Insulated gate bipolar transistor [IGBT]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/11—Device type
- H01L2924/13—Discrete devices, e.g. 3 terminal devices
- H01L2924/1304—Transistor
- H01L2924/1306—Field-effect transistor [FET]
- H01L2924/13091—Metal-Oxide-Semiconductor Field-Effect Transistor [MOSFET]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/181—Encapsulation
Landscapes
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Structures Or Materials For Encapsulating Or Coating Semiconductor Devices Or Solid State Devices (AREA)
Description
実施の形態を通して共通の構成には同一の符号を付すものとし、重複する説明は省略する。
[実施例1]
図1は、この発明の実施例1に係る樹脂封止型の半導体装置50の構成図であり、同図(a)は上面図、同図(b)はI−I’断面図である。
コーティング材3は、半導体チップ1の耐湿性を確保することを目的として、半導体チップ1の表面および側面を覆うように配置されている。コーティング材3は、例えば、ポリイミド、ポリエーテルアミド、ポリエーテルイミド、ポリアミドイミドなどの有機材料で構成されている。
まず銅や銅合金で構成された金属板を所定形状のリードフレームに加工して、金属基板2や図示しない外部端子を形成し、はんだなどの接合材7を用いて金属基板2上に半導体チップ1を固定する。さらに必要に応じて、半導体チップ1と外部端子との間に図示しないボンディングワイヤを接合する(図2(a))。
[実施例2]
実施例2に関して、本実施例に係る半導体装置の構成自体は実施例1と同様である。
[実施例3]
図5は、この発明の実施例3に係る樹脂封止型の半導体装置60の要部断面図である。
まず銅や銅合金で構成された金属板を所定形状のリードフレームに加工して外部端子6を形成し、
あらかじめ準備した絶縁回路基板8と共に所定の金型に投入して、トランスファーモールド成形により樹脂ケース13を形成する(図6(a))。樹脂ケース13は、例えばポリフェニレンサルファイド樹脂(PPS樹脂)、ポリブチレンテレフタレート樹脂(PBT樹脂)、ポリアミド樹脂(PA樹脂)又はアクリロニトリルブタジエンスチレン樹脂(ABS樹脂)などで構成されている。また樹脂ケース13の成形後に、リードフレームの不要部分が切除される。
また本実施例では、図5で示すように制御チップ12の表面はコーティング材3で保護されていない。これは制御チップ12は半導体チップ3に比べ、動作時に高温が発生しないためである。しかしながら、高い信頼性を確保する目的で、制御チップ12にも今回適用したコーティング材を適用してもよい。
2 金属基板
3 コーティング材
4 封止樹脂
5 ボンディングワイヤ
6 外部端子
7 接合材
8 絶縁回路基板
9 金属パターン層
10 絶縁層
11 下部金属層
12 制御チップ
13 樹脂ケース
50、60 半導体装置
Claims (6)
- 基板と、
前記基板の主面に載置されている半導体チップと、
前記基板に載置された前記半導体チップを覆うように配置されているコーティング材と 、
前記コーティング材を覆うように配置されている樹脂と、
を備え、
前記コーティング材は260℃以下の損失弾性率(1Hz)が1.1MPa以上10M Pa以下であることを特徴とする半導体装置。 - 基板と、
前記基板の主面に載置されている半導体チップと、
前記基板に載置された前記半導体チップを覆うように配置されているコーティング材と 、
前記コーティング材を覆うように配置されている樹脂と、
を備え、
前記コーティング材は260℃以下の貯蔵弾性率(1Hz)が50MPa以上1000 MPa以下であり、
前記コーティング材は260℃以下の損失弾性率(1Hz)が1.1MPa以上10M Pa以下であることを特徴とする半導体装置。 - 前記コーティング材は、ポリイミド、ポリエーテルアミド、ポリエーテルイミドおよび ポリアミドイミドよりなる群から選ばれる少なくとも1種類により構成されることを特 徴とする請求項1又は2に記載の半導体装置。
- 前記基板は、金属基板もしくは絶縁回路基板であることを特徴とする請求項1又は2に 記載の半導体装置。
- 前記樹脂は、エポキシ樹脂で構成されていることを特徴とする請求項1又は2に記載の 半導体装置。
- 前記半導体チップは、縦型パワー半導体素子であることを特徴とする請求項1又は2に 記載の半導体装置。
Priority Applications (1)
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JP2013216505A JP6314416B2 (ja) | 2013-10-17 | 2013-10-17 | 半導体装置 |
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JP2013216505A JP6314416B2 (ja) | 2013-10-17 | 2013-10-17 | 半導体装置 |
Publications (2)
Publication Number | Publication Date |
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JP2015079874A JP2015079874A (ja) | 2015-04-23 |
JP6314416B2 true JP6314416B2 (ja) | 2018-04-25 |
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Family Cites Families (2)
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KR20100074296A (ko) * | 2007-12-04 | 2010-07-01 | 히다치 가세고교 가부시끼가이샤 | 감광성 접착제 |
JP6051630B2 (ja) * | 2011-07-13 | 2016-12-27 | 味の素株式会社 | 半導体パッケージ |
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