JP6303284B2 - Linear motor - Google Patents

Description

The present invention relates to linear motors.

  For example, in the field of manufacturing semiconductor manufacturing devices and liquid crystal display devices, there is a feeding device that can linearly move an object to be processed such as a large-area substrate at a high speed and accurately position the object at an appropriate moving position. is necessary. This type of feeding device is generally realized by converting the rotational motion of a motor as a drive source into a linear motion by a motion conversion mechanism such as a ball screw mechanism, but since a motion conversion mechanism is interposed, There is a limit to increasing the moving speed. There is also a problem that positioning accuracy is insufficient due to the presence of mechanical errors in the motion conversion mechanism.

  In order to cope with this problem, in recent years, a feeding device using a linear motor capable of directly taking out a linear motion output as a drive source has been used. The linear motor includes a linear stator and a mover that moves along the stator. In the above-described feeding device, a moving coil type linear motor (a moving coil type linear motor) in which a large number of plate-like permanent magnets are arranged in parallel at regular intervals to constitute a stator, and an armature having magnetic pole teeth and energizing coils is used as a mover. For example, Patent Document 1) is used.

JP-A-3-139160

In a moving coil type linear motor, since magnets are arranged on the stator, the amount of magnets to be used increases as the total length of the linear motor increases (the moving distance of the mover increases). In recent years, with the increase in the price of rare earths, an increase in the amount of magnets used has caused an increase in cost. In order to solve such a problem, the present inventors have proposed a linear motor having a coil and a magnet in a mover.
On the other hand, in a linear motor, a magnetic flux loop is constituted by a mover and a stator. Many of the magnetic materials forming the mover and the stator are conductive metals. Therefore, an eddy current is generated with the flow of magnetic flux. Since the eddy current is the source of the reaction force, the thrust of the linear motor may be reduced.

The present invention has been made in view of the above such circumstances, and an object thereof is to provide a linear motors to reduce the eddy currents.

In the linear motor according to the present invention, two magnets and three yokes each having a plate shape are alternately arranged in the coil along the moving direction, and the two magnets are magnetized along the moving direction. There Te has a mover magnetization direction that face each other, a plurality of magnetic pole teeth, and the magnetic pole teeth of said plurality of Yes and juxtaposed, the base including a pair of elongate members for a long face the arrangement direction In a linear motor including a stator, each of the magnetic pole teeth includes a plurality of metal plates that intersect in a parallel direction and are stacked in a direction perpendicular to the opposing direction of the base, and the magnet and the yoke include the magnetic pole teeth The opposing surfaces are substantially flush with each other.

  In the present invention, each of the magnetic pole teeth includes a plurality of metal plates that are stacked in a direction that intersects the juxtaposed direction and that is orthogonal to the opposing direction of the base. During operation of the linear motor, the magnetic flux flows in a direction parallel to each metal plate surface. The eddy current generated with the flow of the magnetic flux tends to flow in a direction to penetrate each metal plate. However, since the metal plates are laminated, the eddy current hardly flows through the metal plates. Thereby, the eddy current is reduced, and the eddy current loss of thrust can be reduced.

Linear motors according to the present invention, the metal plate is characterized in that at least a portion of the laminate surface are subjected to insulation treatment.

  In the present invention, since at least a part of the laminated surface of the metal plates constituting the magnetic pole teeth is subjected to insulation treatment, eddy currents hardly flow through the metal plates. Thereby, eddy current is reduced, and eddy current loss can be reduced.

Linear motors according to the present invention, each of the base characterized in that it comprises a plurality of metal plates laminated in the opposing direction.

  In the present invention, each base includes a plurality of metal plates stacked in the facing direction. During operation of the linear motor, the magnetic flux flows in a direction parallel to each metal plate surface. The eddy current generated with the flow of the magnetic flux tends to flow in a direction to penetrate each metal plate. However, since each metal plate is laminated, the eddy current hardly flows between the metal plates. Thereby, the eddy current is reduced, and the eddy current loss of thrust can be reduced.

Linear motors according to the present invention, the metal plate contained in the respective base, characterized in that at least a portion of the laminate surface are subjected to insulation treatment.

  In the present invention, since the metal plate constituting the base is subjected to insulation treatment on at least a part of the laminated surface, the eddy current hardly flows through the metal plates. Thereby, eddy current is reduced, and eddy current loss can be reduced.

Linear motors according to the present invention is characterized by having a connecting portion for connecting the two of the magnetic pole teeth each base adjacent a connecting portion connecting said connecting portions.

  In the present invention, each base has a connecting portion that connects between two adjacent magnetic pole teeth, and a connecting portion that connects the connecting portions. The base is separate from the magnetic pole teeth, and the metal plates can be stacked in the direction in which each magnetic flux flows, so that the eddy current can be cut.

Linear motors according to the present invention, each magnetic pole tooth has a flange portion protruding substantially extending direction of the base portion, the connecting portion is characterized by having a receiving portion for receiving the flange portion.

  In the present invention, since the hook portion protruding in the substantially extending direction of the base portion is provided on each magnetic pole tooth, it is possible to prevent the magnetic pole teeth attracted by the stator from falling off during the linear motor operation. .

Linear motors according to the present invention includes a coupling portion for coupling the respective base, the binding unit is perpendicular to the arrangement direction of the magnetic pole teeth, and a plurality of metal plates laminated in a direction orthogonal to the opposing direction It is characterized by including.

  In the present invention, the coupling portion for coupling the base portion includes a plurality of metal plates stacked in a direction perpendicular to the parallel arrangement direction of the magnetic pole teeth and perpendicular to the opposing direction. During operation of the linear motor, the magnetic flux flows in a direction parallel to each metal plate surface. The eddy current generated by the flow of magnetic flux tends to flow in the direction of penetrating each metal plate, but since the metal plates are stacked, the eddy current is difficult to flow through between the metal plates. . Thereby, the eddy current is reduced, and the eddy current loss of thrust can be reduced.

Linear motors according to the present invention, the metal plate contained in the binding unit is characterized in that at least a portion of the laminate surface are insulated is subjected.

  In the present invention, since at least a part of the metal plate is insulated, the eddy current hardly flows through the metal plates. Thereby, eddy current is reduced, and eddy current loss can be reduced.

Linear motors according to the present invention, the coupling unit is characterized by having a main body portion further overlaps the plurality of metal plates.

  In the present invention, since the coupling portion is composed of the laminated metal plate and the main body portion, the strength of the coupling portion can be increased.

Linear motors according to the present invention, the base is characterized by having a reinforcing section which covers the opposite surface of the opposing surfaces.

  In the present invention, the base portion includes the metallic reinforcing portion that covers the opposite surface of the opposing surface, so that the rigidity of the base portion formed of the metal plate can be improved.

Linear motors according to the present invention, the reinforcing portion is characterized by having a pressing pawl that presses the base in the stacking direction continuous to opposing surfaces from a side of the base.

  In the present invention, since the base is pressed in the stacking direction by the pressing claw, it is possible to prevent the metal plates constituting the base from being separated from each other.

Linear motors according to the present invention, each of the magnetic pole teeth is characterized by having a cavity extending through in the stacking direction.

  In the present invention, each magnetic pole tooth includes a hollow portion that penetrates in the stacking direction, so that the weight of each magnetic pole tooth can be reduced. Further, when the magnetic pole teeth are manufactured, it is possible to accurately position and stack the metal plates by passing a jig through the through holes of the respective metal plates constituting the cavity.

Linear motors according to the present invention, the other magnetic pole teeth of one of the magnetic pole teeth and the base of said base portion is characterized in that there as a staggered arrangement direction.

  In the present invention, since the magnetic pole teeth are arranged in a staggered manner, it is possible to cause a magnetic flux to flow in the moving direction in the mover during operation. Thereby, in the stator, since the magnetic flux mainly flows in a direction intersecting the moving direction, the end effect can be reduced.

Linear motors according to the present invention, the magnetic pole teeth are rectangular parallelepiped shape, the two short sides opposite the plane parallel to the base of the magnetic pole teeth and being inclined with respect to the extending direction of the base portion To do.

  In the present invention, since the magnetic pole teeth are arranged in a so-called skew, the detent force is reduced, and it is possible to reduce thrust unevenness due to the difference in the relative positions of the stator and the mover.

Linear motors according to the present invention, the inclination direction of the two short sides of the magnetic pole teeth inclination direction of the two short sides of the magnetic pole teeth, and the other of said base portion having the one having the base, opposite to each other It is a direction.

  In the present invention, since the magnetic pole teeth included in one of the base portions and the magnetic pole teeth included in the other base portion are opposite to each other, the twist caused by the mover tilting left and right with respect to the moving direction is prevented. It becomes possible to suppress.

  In the present invention, at least a part of the laminated surface of the metal plate is insulated, that is, not only a part of the laminated surface of the metal plate is insulated, but further, the laminated surface is not insulated. This includes the case where a metal plate and a metal plate subjected to insulation treatment are laminated.

  In the present invention, each magnetic pole tooth includes a plurality of metal plates stacked in a direction orthogonal to the juxtaposed direction and orthogonal to the opposing direction of the base. As a result, the eddy current generated during the operation of the linear motor is less likely to flow through between the metal plates, so that the eddy current can be reduced and the eddy current loss of thrust can be reduced.

4 is a perspective view showing an example of a stator according to Embodiment 1. FIG. It is a perspective view which shows the structural example of a 1st laminated board. It is explanatory drawing for demonstrating the lamination | stacking method by crimping. It is a perspective view which shows the structural example of a stator tooth. It is a disassembled perspective view of a 1st plate-shaped part. It is explanatory drawing for demonstrating the method to fix a stator tooth | gear to a 1st laminated board. It is a disassembled perspective view of a stator. It is a disassembled perspective view which shows an example of a stator at the time of providing an outer shell part on the outer side. It is a perspective view which shows an example of the stator at the time of providing an outer shell part on the outer side. 4 is a perspective view showing an example of a mover used in combination with the stator according to Embodiment 1. FIG. FIG. 3 is a perspective view of a linear motor in which a mover is arranged on the stator according to the first embodiment. It is explanatory drawing which shows the flow of the magnetic flux at the time of linear motor operation | movement. It is explanatory drawing which shows the flow of the magnetic flux at the time of linear motor operation | movement. It is explanatory drawing about reduction of the eddy current in a coupling part. It is explanatory drawing for showing the skew direction of a stator tooth. 10 is an explanatory diagram for illustrating a skew direction of a stator tooth according to Embodiment 2. FIG.

Hereinafter, the present invention will be specifically described with reference to the drawings showing embodiments thereof.
Embodiment 1
FIG. 1 is a perspective view showing an example of a stator 1001 according to the first embodiment. The stator 1001 includes a first plate-like portion 1, a second plate-like portion 2, and a coupling portion 3. The first plate-like portion 1 (base portion) includes a plurality of stator teeth 11 (magnetic pole teeth) and a first laminated plate 12 to which the stator teeth 11 are fixed, and has a rectangular plate shape as a whole. Similarly, the second plate-like portion 2 (base portion) includes a plurality of stator teeth 21 and a second laminated plate 22 to which the stator teeth 21 (magnetic pole teeth) are fixed, and has a rectangular plate shape as a whole. Each of the coupling portions 3 includes a rectangular laminated third laminated plate 31 and a main body portion 32.

  FIG. 2 is a perspective view illustrating a configuration example of the first laminated plate 12. The first laminated plate 12 is obtained by laminating a first plate piece 121 (metal plate) and a second plate piece 122 (metal plate). The first plate piece 121 and the second plate piece 122 are comb-shaped thin plates. The first plate piece 121 includes a long plate portion 121a that is a root portion of a comb tooth, and a comb tooth portion 121b that extends from a long side portion of the long plate portion 121a. A bolt insertion hole 121c is provided in the long plate portion 121a. Similarly, the second plate piece 122 includes a long plate portion 122a that is a root portion of the comb teeth, and a comb tooth portion 122b that extends from the long side portion of the long side portion 122a. A bolt insertion hole (not shown in the figure) is provided in the long plate portion 122a.

  The long plate portion 121a of the first plate piece 121 and the long plate portion 122a of the second plate piece 122 have substantially the same shape. The comb teeth 121 b of the first plate piece 121 is thinner than the comb teeth 122 b of the second plate piece 122. That is, the lengths of the comb teeth 121b and the comb teeth 122b are substantially the same, but the width of the comb teeth 121b is narrower than the width of the comb teeth 122b in the short direction. When the positions of the long plate portion 121 a and the long plate portion 122 a are aligned and the first plate piece 121 is stacked on the second plate piece 122, the bolt insertion hole of the second plate piece 122 is inserted into the bolt of the first plate piece 121. It is provided at a position communicating with the hole 121c. The positions of the comb teeth 121b and the comb teeth 122b in the short direction are centered, and a step with the comb teeth 122b is formed on both sides of the comb teeth 121b in the short direction.

The first plate piece 121 and the second plate piece 122 are formed of silicon steel thin plates having soft magnetism. The surface is subjected to an insulation treatment such as forming a coating of an insulating material. In FIG. 2, two first plate pieces 121 and ten second plate pieces 122 are depicted, but this is only an example. What is necessary is just to design suitably the number of the 1st board piece 121 and the 2nd board piece 122 to overlap according to a specification. Further, the plate thickness may be appropriately designed according to the specifications. The eddy current loss is reduced as the plate thickness is reduced, that is, the number of laminated layers is increased. However, in consideration of the strength and the labor during assembly, about 0.2 to 0.5 mm is desirable.
In the present invention, the insulation treatment on the surface of the plate piece is not necessarily essential. By laminating plate pieces to make a plate-like part, the electrical resistance increases due to the effect of the gap between the plate-like part surfaces and the oxide film formed on the surface. The eddy current can be reduced as compared with the case of the block.

The first plate piece 121 and the second plate piece 122 are fixed by heat welding or caulking. In the case of heat welding, for example, a paste adhesive is applied to the surfaces of the first plate piece 121 and the second plate piece 122. After the first plate piece 121 and the second plate piece 122 are overlaid, pressure is applied to the plate surface to heat it. Adhesion is completed by heating.
Moreover, you may use what attached the heat-welding coating film to the board piece beforehand. Such a coating film also has a function as an insulating coating.

  When fixing by caulking, for example, it is performed as follows. FIG. 3 is an explanatory view for explaining a laminating method by caulking. FIG. 3 shows a state in which the second plate pieces 122 are fixed to each other. However, when the first plate pieces 121 and the second plate pieces 122 are fixed, the same applies to the case where the first plate pieces 121 are fixed to each other. FIG. 3A shows a caulking method using a nail. A tongue piece 122 d is formed on a part of the upper second plate piece 122. The tongue piece 122d has, for example, a triangular shape or a rectangular shape in plan view. In the case of a rectangle, only one short side is left, and the remaining three sides are separated from the second plate piece 122. The tongue piece 122d is provided in the lower first plate piece 121 at the same position in plan view. The lowermost second plate piece 122 has a tongue piece 122d cut out and provided with a through hole 122f having substantially the same dimensions as the tongue piece 122d. Each tongue piece 122d is bent downward. When each tongue piece 122d is bent, the upper tongue piece 122d enters the space to be formed, so that the two second plate pieces 122 in contact with each other are fixed.

  FIG. 3B shows a method of fixing by the protrusion 122h. The lowermost second plate piece 122 has a through hole 122f as described above. Each second plate piece 122 is press-molded to provide a protrusion 122h on one surface and a recess 122g on the other surface. When the second plate pieces 122 are stacked, the protrusions 122h of the second plate pieces 122 that are stacked from above enter the recesses 122g of the second plate pieces 122 positioned on the lower side, so that the two pieces in contact with each other The two plate pieces 122 are fixed to each other.

  FIG. 3C shows a case where the cross-sectional shape of the protrusion 122h is V-shaped. Since the fixing method is the same as in the case of FIG. In addition to the method described above, the second plate piece 122 may be fixed by rivets or laser welding. In the above description, only the first laminated plate 12 has been described, but the same applies to the second laminated plate 22, and thus the description thereof is omitted. Note that when the second plate pieces 122 are fixed to each other by the above-described tongue piece 122d or the protrusion 122h, the tongue piece 122d or the protrusion is formed even if the plate surface of the second plate piece 122 is insulated. By processing the portion 122d, the insulating coating is peeled off. If it does so, it will become easy to electrically conduct between the 2nd board pieces 122, and an eddy current will flow between the 2nd board pieces 122. FIG. In order to reduce the eddy current flowing between the second plate pieces 122, the surface area of the tongue piece 122d or the protrusion 122h is desirably as small as possible. When fixing with rivets, it is preferable that the electrical resistance is large and the volume is small.

FIG. 4 is a perspective view showing a configuration example of the stator teeth 11 and 21. Since the configuration of the stator teeth 11 and the stator teeth 21 is the same, only the stator teeth 11 will be described below. The stator teeth 11 are configured by laminating tooth plate pieces 111 (metal plates). The tooth plate piece 111 is a thin plate provided with two ear portions 111a protruding in the longitudinal direction from one edge of a rectangular plate shape. The tooth plate piece 111 is formed of a silicon steel plate having soft magnetic properties. The plate thickness is about 0.2 to 0.5 mm. The surface of the tooth plate piece 111 is subjected to insulation treatment. A through hole 111 b is provided near the center of the plate surface of the tooth plate piece 111. The through hole 111b is a hole through which a jig passes when a plurality of tooth plate pieces 111 are stacked. By using the through-hole 111b, it is possible to position and stack a plurality of tooth plate pieces 111 with high accuracy. Moreover, it will also contribute to the weight reduction of the stator tooth | gear 11. FIG.
In addition, in this invention, the insulation process of the tooth plate piece 111 surface is not necessarily essential. By making the tooth plate pieces 111 by laminating the tooth plate pieces 111, the electric resistance increases due to the influence of the gaps between the surfaces of the tooth plate pieces 111 and the oxide film formed on the surfaces thereof. The eddy current can be reduced as compared with the case where is made of a soft magnetic block.

The stator teeth 11 are formed by laminating a plurality of tooth plate pieces 111 and fixed by heat welding or caulking. About the method of heat welding and caulking, it is the same as that of the method mentioned above. What is necessary is just to design suitably the number of sheets which the tooth plate piece 111 is laminated | stacked about one stator tooth | gear 11, and the plate | board thickness of the tooth plate piece 111 according to a specification.
Moreover, what attached the heat-weldable coating film beforehand to the board piece may be used. Such a coating film also has a function as an insulating coating.

  FIG. 5 is an exploded perspective view of the first plate-like portion 1. FIG. 6 is an explanatory diagram for explaining a method of fixing the stator teeth 11 to the first laminated plate 12. The stator teeth 11 are fixed between the comb tooth portions 12 b of the first laminated plate 12. The fixing method is light press-fitting or adhesion. In the case of light press-fitting, the ear portion 11a of the stator tooth 11 is fixed by being press-fitted into the step portion 12d (receiving portion) formed in the first laminated plate 12. W1 is slightly longer than W2 where W1 is the lateral width of the ear portion 11a and W2 is the width between the stepped portions 12d formed in the adjacent comb tooth portions 12b. By inserting the stator teeth 11 between the adjacent comb teeth portions 12b and applying pressure from the upper surface including the ear portions 11a, the ear portions 11a are elastically deformed and enter the stepped portions 12d, and the stator teeth 11 are fixed. . The tips of the stator teeth 11 protrude from the first laminated plate 12.

  The stator teeth 11 are juxtaposed along the first plate-like portion 1 at a predetermined interval. Similarly, the stator teeth 21 are juxtaposed along the second plate-like portion 2 at a predetermined interval. Stator teeth 11 and stator teeth 21 are arranged in a staggered manner along the juxtaposed direction. The staggered arrangement means that the stator teeth 11 and the stator teeth 21 are alternately arranged when the stator teeth 11 and the stator teeth 21 are viewed from the distal direction. The parallel surfaces of the first plate portion 1 and the second plate portion 2 of the stator teeth 11 and the stator teeth 21 are rectangular. Two opposite sides of the rectangle are inclined with respect to the longitudinal direction of the first plate-like portion 1 and the second plate-like portion 2. This is a so-called skew arrangement. The skew angle is about several degrees.

  When fixing the stator teeth 11 to the first laminate 12 by bonding, the portion where the first laminate 12 and the stator teeth 11 are in contact, that is, the step 12 d of the first laminate 12 and the stator teeth 11. Adhesive is applied to the part that contacts the ear 11a. The stator teeth 11 are fixed to the first laminated plate 12 by inserting the stator teeth 11 between the comb teeth portions 12b and curing the applied adhesive. Not only the above-mentioned method of fixing the stator teeth 11 to the first laminated plate 12 but also other methods, for example, welding may be used. The stator teeth 11 are pulled in the direction of the second laminated plate 22 by the magnetic force generated when the linear motor is operated. However, since the fixing strength is ensured by providing the ear portions 11a, the stator teeth 11 are moved from the first laminated plate 12 to the stator. It is possible to prevent the teeth 11 from falling off.

FIG. 7 is an exploded perspective view of the stator 1001. The coupling part 3 includes a third laminated plate 31 and a main body part 32. The third laminated plate 31 has a rectangular plate shape, and is formed by laminating soft magnetic silicon steel plates (metal plates). The thickness of the silicon steel plate is 0.2 to 0.5 mm. The fixing method of the plurality of silicon steel plates is performed by caulking or heat welding in the same manner as described above. The surface of the silicon steel plate is subjected to insulation treatment. The main body 32 is made of a metal such as aluminum. The main body portion 32 is thicker than the third laminated plate 31 in order to ensure the strength of the coupling portion 3. The body portion 32 is provided with a bolt insertion hole 32c. The third laminated plate 31 and the main body 32 are fixed by adhesion or welding.
Moreover, you may use the 3rd laminated board 31 which attached the heat-weldable coating film previously. Such a coating film also has a function as an insulating coating.
In the present invention, the insulation treatment of each surface of the third laminated plate 31 is not necessarily essential. By laminating silicon steel plates, the electrical resistance increases due to the effect of gaps between the silicon steel plate surfaces and the oxide film formed on the surfaces, so eddy currents are compared to those composed of soft magnetic blocks. Can be reduced.

  The first laminated plate 12 is provided with a bolt insertion hole 12c, and the second laminated plate 22 is provided with a bolt insertion hole 22c. The coupling portion 3 is sandwiched between the first plate-like portion 1 and the second plate-like portion 2, bolts are passed through the bolt insertion holes 12 c, the bolt insertion holes 22 c, and the bolt insertion holes 32 c, and each is fixed with a nut. The The fixed state is shown in FIG. In FIG. 1, illustrations of fixing bolts and nuts are omitted.

  The first plate portion 1 and the second plate portion 2 are fixed to the coupling portion 3 so as to be parallel to each other. The first plate-like portion 1 and the second plate so that the tip of the stator tooth 21 and the first plate-like portion 1 face each other so that the tip of the stator tooth 11 and the second plate-like portion 2 face each other. The shaped part 2 is fixed to the coupling part 3. The first laminated plate 12 and the second laminated plate 22 are fixed to the main body 32 in a cantilever structure. Therefore, in order to keep the first plate-like portion 1 and the second plate-like portion 2 parallel to each other, the main body portion 32 of the coupling portion 3 is made thicker, and the first plate-like portion 1 or the second plate-like portion 1 or 2. The contact area between the plate-like portion 2 and the main body portion 32 is increased.

  FIG. 8 is an exploded perspective view showing an example of the stator 1001 when the outer shell portion 4 is provided outside. The outer shell 4 (reinforcing part) is formed of SPCC (cold rolled steel sheet). The outer shell portion 4 covers the outside of the first plate-like portion 1 or the second plate-like portion 2. The outer shell 4 has a substantially L-shaped cross section. The outer shell portion 4 includes a wide plate portion 41 that covers the outer surface of the first plate-like portion 1 or the second plate-like portion 2, and a long plate portion 42 that covers the tip surface of the first plate-like portion 1 or the second plate-like portion 2. including. The wide plate portion 41 is provided with a bolt insertion hole 41c. A plurality of claw portions 42 a (pressing claws) are formed at the end of the long plate portion 42. The claw portions 42 a are provided at a predetermined interval, and when the outer shell portion 4 is fixed to the first plate-like portion 1 or the second plate-like portion 2, between the two stator teeth 11 or the two stator teeth 21. It is formed to be located.

  FIG. 9 is a perspective view showing an example of the stator 1001 when the outer shell portion 4 is provided on the outside. Two outer shell portions 4 shown in FIG. 8 are fixed to the first plate-like portion 1 and the second plate-like portion 2, respectively. The outer shell 4 is fixed by bolts and nuts. A bolt is passed through a bolt insertion hole 41 c provided in one outer shell portion 4, and a tip of a bolt passing through the bolt insertion hole provided in the other outer shell portion 4 is fixed with a nut. In FIG. 9, the description of bolts and nuts is omitted. In addition to bolting, the claw portion 42a provided on the long plate portion 42 of the outer shell portion 4 is parallel to the plate surfaces of the first plate-like portion 1 and the second plate-like portion 2 as shown in FIG. By bending the first plate-like portion 1 and the second plate-like portion 2, the tips of the first plate-like portion 1 and the second plate-like portion 2 are sandwiched.

  By providing the outer shell portion 4 on the stator 1001, the strength of the first plate-like portion 1 and the second plate-like portion 2 is ensured. Further, the ear portion 11 a of the stator tooth 11 and the ear portion 21 a of the stator tooth 21 are pressed against the first plate-like portion 1 and the second plate-like portion 2 by the outer shell portion 4, respectively. Accordingly, the stator teeth 11 are less likely to be detached from the first plate-like portion 1 and the stator teeth 21 are less likely to be detached from the second plate-like portion 2. The claw portion 42a provided in the outer shell portion 4 can prevent the first plate piece 121 and the second plate piece 122 constituting the first laminated plate 12 of the first plate-like portion from peeling off.

FIG. 10 is a perspective view showing an example of the mover 1002 used in combination with the stator 1001 according to the first embodiment. The mover 1002 includes three armature yokes 5a, 5a, 5b, two permanent magnets 6a, 6b, two auxiliary plates 7a, 7b, and a coil 8. Each of the armature yokes 5a, 5a, 5b has a rectangular parallelepiped shape. The armature yokes 5a, 5a and 5b are formed by laminating soft magnetic silicon steel plates whose surfaces are insulated. The permanent magnets 6a and 6b have a rectangular parallelepiped shape. The length of the permanent magnets 6a and 6b is substantially the same as that of the armature yokes 5a, 5a and 5b. The permanent magnets 6a and 6b are neodymium magnets mainly composed of neodymium (Nd), iron (Fe), and boron (B). In addition to neodymium magnets, alnico magnets, ferrite magnets, samarium cobalt magnets, and the like may be used. The auxiliary plates 7a and 7b have a rectangular plate shape. The auxiliary plates 7a and 7b are made of non-magnetic and non-conductive material such as engineering plastic (polyamide, polycarbonate) or non-magnetic ceramic.
In the present invention, the insulation treatment of the surfaces of the silicon steel plates constituting the armature yokes 5a and 5b is not always essential. The eddy current can be reduced by stacking as compared with the case of the soft magnetic block.

  As shown in FIG. 10, the mover 1002 has an armature yoke 5a, a permanent magnet 6a, an armature yoke 5b, a permanent magnet 6b, and an armature yoke 5a arranged in order, and auxiliary plates are arranged at both ends in the longitudinal direction. These are configured so that the coil 8 surrounds them. The white arrow shown in FIG. 10 has shown the magnetization direction of each magnet which comprises the permanent magnets 6a and 6b. The end point of the white arrow indicates the N pole, and the start point indicates the S pole. The permanent magnets 6a and 6b are magnetized along the short direction of the mover 1, and the magnetization directions are opposed to each other.

FIG. 11 is a perspective view of a linear motor in which a mover 1002 is arranged on a stator 1001 according to the first embodiment. In FIG. 11, the description of the outer shell portion 4 is omitted for convenience of explanation. The mover 1002 is disposed between the first plate-like portion 1 and the second plate-like portion 2. When the armature yoke 5 b faces the stator teeth 11, the armature yokes 5 a and 5 a face the stator teeth 21.
One stator tooth 11 and one stator tooth 21 are provided for each magnetic period. The stator teeth 11 and the stator teeth 21 are provided at positions that differ by 180 degrees in electrical angle (positions shifted by 1/2 magnetic period).
As shown in FIGS. 10 and 11, the permanent magnets 6 a and 6 b and the armature yoke 5 b have substantially the same length in the normal direction of the opposing surfaces of the first laminated plate 12 and the second laminated plate 22. . The surfaces of the permanent magnets 6a and 6b and the armature yoke 5b that face the stator teeth 11 or the stator teeth 21 are substantially flush.

FIG. 12 is an explanatory diagram showing the flow of magnetic flux when the linear motor operates. In FIG. 12, portions along the moving direction (left and right direction of the paper) of the mover 1002 are omitted for convenience of explanation, and only a cross section of a portion orthogonal to the moving direction is shown. Also, the outer shell 4 is not shown. An alternating current is passed through the coil 8 of the mover 1002. The black circle mark shown in the coil 8 in FIG. 12 indicates the energization from the back to the front of the paper, and the cross indicates the energization from the front to the back of the paper (shows the direction of the current at a certain point when an alternating current is applied). ) When the coil 8 is energized, a magnetic flux flow as shown by the dotted line in FIG. 12 is generated. That is, as shown in FIG. 12, the magnetic flux flowing from the stator teeth 21 flows into the armature yokes 5 a at both ends, gathers in the armature yoke 5 b in the center after passing through the permanent magnets 6 a and 6 b, and reaches the stator teeth 11. Go through. Further, the loop flows from the stator teeth 11 to the comb teeth 12 b of the first laminated plate 12, passes through the side teeth 3 b and the comb teeth 22 b of the second laminated plate 22, and returns to the stator teeth 21. The width of the armature yoke 5b is twice the width of the other two armature yokes 5a and 5a. As shown in FIG. 12, the armature yokes 5a and 5a are in contact with one permanent magnet 6a or 6b, and a magnetic flux corresponding to one permanent magnet flows. On the other hand, the armature yoke 5b is in contact with the two permanent magnets 6a and 6b, and the magnetic flux corresponding to the two permanent magnets flows. Therefore, the armature yoke 5b has a width twice that of the other two armature yokes 5a and 5a, thereby making the armature yoke 5b difficult to cause magnetic saturation.
One stator tooth 11 and two stator teeth 21 are magnetized by the flow of magnetic flux as shown in FIG. An attractive force and a repulsive force are generated between the magnetized fixed teeth 11 and fixed teeth 21 and the permanent magnets 6 a and 6 b of the mover 1002. The generated suction force and repulsive force are the driving force of the mover 1002. The mover 1002 moves in the left-right direction in FIG.

  With reference to FIG. 11, the interruption of eddy current in the stator teeth 12 and the second laminated plate 22 will be described. In FIG. 11, the flow of magnetic flux is indicated by a dotted line arrow, and the direction of eddy current flow is indicated by a solid line arrow. As shown in FIG. 11, the magnetic flux flows in the stator teeth 11 in a direction parallel to the plate surface of the tooth plate pieces 111 constituting the stator teeth 11. The eddy current tends to flow in a direction that prevents a change in magnetic flux on a plane perpendicular to the direction in which the magnetic flux flows. When the first laminated plate 12 is viewed from the outside, the first laminated plate 12 tends to flow clockwise around the direction in which the magnetic flux flows. The direction of the eddy current is a direction in which the plate surface of the tooth plate piece 111 constituting the stator tooth 11 is to penetrate. However, since the tooth plate pieces 111 are stacked and the stator teeth 11 are formed, the eddy current can be reduced. Further, when the plate surface is subjected to insulation treatment, it is possible to further reduce eddy current between the tooth plate pieces 111.

  On the other hand, in the first laminated plate 12, the magnetic flux flows from the stator teeth 11 to the comb teeth portion 12b as shown in FIG. 11, and then flows in the root direction from the tips of the comb teeth portions 12b. The eddy current tends to flow in a direction in which the change of the magnetic flux is prevented on a plane perpendicular to the direction in which the magnetic flux flows. When the first laminated plate 12 is viewed from the tip, the first laminated plate 12 tends to flow clockwise around the direction in which the magnetic flux flows. The direction of the eddy current is a direction that tries to penetrate the plate surfaces of the first plate piece 121 and the second plate piece 122 constituting the first laminated plate 12. However, since the first laminated plate 12 is formed by laminating the first plate piece 121 and the second plate piece 122, the eddy current can be reduced. Further, when the plate surface is subjected to insulation treatment, it is possible to further reduce eddy current between the first plate piece 121 and the second plate piece 122.

  FIG. 13 is an explanatory diagram showing the flow of magnetic flux when the linear motor operates. As in FIG. 11, the outer shell 4 is not shown. As shown in FIG. 13, also in the second laminated plate 22, the eddy current is reduced similarly to the first laminated plate 12. Since the principle of eddy current reduction in the stator teeth 21 and the second laminated plate 22 is the same as that of the stator teeth 11 and the first laminated plate 12 described above, the description thereof is omitted.

FIG. 14 is an explanatory diagram for reducing the eddy current in the coupling portion 3. In FIG. 14, as in FIGS. 12 and 13, the description of the outer shell portion 4 is omitted for convenience of explanation. In FIG. 14, the flow of magnetic flux is indicated by a dotted line arrow, and the direction of eddy current flow is indicated by a solid line arrow. As shown in FIG. 12, the magnetic flux that flows from the stator teeth 11 passes through the comb teeth portion 12 b of the first laminated plate 12 and flows into the coupling portion 3. The magnetic flux that has flowed through the coupling portion 3 flows in the direction of the second laminated plate 22 and flows into the comb tooth portions 22 b of the second laminated plate 22. The flow of magnetic flux in the coupling part 3 is from the top to the bottom of the page, as shown in FIG. The eddy current tends to flow in a direction in which the change of the magnetic flux is prevented on a plane perpendicular to the direction in which the magnetic flux flows. When the coupling portion 3 is viewed in the direction from the first laminated plate 12 toward the second laminated plate 22 (from the top to the bottom of the page), the eddy current tends to flow clockwise about the direction in which the magnetic flux flows. The direction of the eddy current is a direction that tries to penetrate the plate surface of the third laminated plate 31. However, since the third laminated plate 31 is formed by laminating silicon steel plates, eddy current can be reduced. Furthermore, when an insulating process is performed on the plate surface, it is possible to reduce eddy currents between the silicon steel plates. The magnetic flux flowing through the coupling portion 3 may flow not only through the third laminated plate 31 but also through the main body portion 32. However, since the magnetic flux tends to flow through the shortest path, the magnetic flux flowing through the main body 32 is very small unless the third laminated plate 31 is saturated.
Further, when the auxiliary plates 7a and 7b included in the mover 1002 are made of non-magnetic and non-conductive material, the flow path of eddy current flowing through the armature yokes 5a and 5b is partially cut off as in the principle described above. be able to.

As described above, the linear motor stator according to the first embodiment has the following effects. The stator teeth 11, 21, the first laminated plate 12, and the second laminated plate 22 are configured by laminating silicon steel plates whose plate surfaces are insulated. Since the silicon steel plates are laminated so that the magnetic flux flows in a direction parallel to the plate surface of each plate, the direction of the eddy current generated by the flow of the magnetic flux is a direction to penetrate the plate surface. However, since the silicon steel plates are laminated, eddy current can be reduced. Furthermore, when an insulation process is performed on the plate surface, it is possible to further reduce eddy currents between the silicon steel plates. Moreover, the 3rd laminated board 31 which comprises the coupling | bond part 3 can also reduce an eddy current similarly between silicon steel plates. As a result, eddy current flowing during linear motor operation can be reduced, and eddy current loss can be reduced.
In addition, the insulation process of a silicon steel plate is not necessarily essential here, and it is possible to reduce an eddy current by laminating | stacking a steel plate.
The reason why the eddy current can be reduced when the stator teeth 11, 21, the first laminated plate 12, the second laminated plate 22, and the third laminated plate 31 are made of laminated steel plates instead of blocks is considered as follows. It is done.
When plates such as silicon steel plates are laminated, the plate surfaces have electrical resistance such as contact resistance. This is caused by unevenness of the plate surface, slight oxidation or oil for rust prevention, or slight distortion during caulking or rivet fixing.
Therefore, in the case where the steel plates are laminated as compared with the case where the blocks are formed, the eddy current is less likely to flow through between the steel plates, and the eddy current can be reduced.
Furthermore, the eddy current reduction effect is enhanced by positively insulating the plate surface, but this may be set in consideration of specifications and costs required for the linear motor.
The insulation treatment may be performed only on a part of the laminated surface of the silicon steel plates. Moreover, not all the silicon steel plates may be subjected to insulation treatment, but a silicon steel plate subjected to insulation treatment and a silicon steel plate not subjected to insulation treatment may be laminated.

  Since the stator teeth 11 are provided with ears 11a to secure the fixing strength to the first laminated plate 12, the stator teeth 11 are moved in the direction of the second laminated plate 22 by the magnetic force generated during the linear motor operation. Even if it is pulled, it is possible to prevent the stator teeth 11 from falling off from the first laminated plate 12. The stator teeth 21 are the same as the stator teeth 11.

  Since the 1st laminated board 12 and the 2nd laminated board 22 are covered with the outer shell part 4, it becomes possible to ensure the intensity | strength of the 1st laminated board 12 and the 2nd laminated board 22. FIG. Thereby, when the first laminated plate 12 and the second laminated plate 22 are deformed, the stator teeth 11 are dropped from the first laminated plate 12 and the stator teeth 22 are dropped from the second laminated plate 22. Can be prevented.

  The outer shell portion 4 is provided with a claw portion 42a, and the first laminated plate 12 and the second laminated plate 22 are sandwiched between the wide plate portion 41 and the claw portion 42a of the outer shell portion 4, so that the first laminated plate 12 and It is possible to prevent the first plate piece 121 and the second plate piece 122 constituting the second laminated plate 22 from being separated.

  Further, by providing the claw portion 42a, the fixing strength by caulking can be reduced even when the first plate piece 121 and the second plate piece 122 to be stacked are fixed by caulking. If the caulking claw (tongue piece 122d) is reduced, the contact area between the plate pieces is reduced, and the electrical resistance between the plate pieces can be increased. Accordingly, it is possible to reduce eddy current flowing between the plate pieces.

  The stator teeth 11 are provided with through holes (cavities). By passing a jig through the through hole 111b (hollow part) of the tooth plate piece 111 to be laminated when the stator teeth 11 are manufactured, the tooth plate piece 111 can be accurately positioned and laminated. Further, by providing the through hole, the stator tooth 11 can be reduced in weight. The stator teeth 21 are the same as the stator teeth 11. By reducing the weight of the stator teeth 11 and the stator teeth 21, it is possible to further reduce the weight of the entire stator 1001. Note that the position and size of the through hole 111b may be determined by simulation so as not to hinder the flow of magnetic flux.

Since the stator teeth 11 and the stator teeth 21 are in a so-called skew arrangement, it is possible to reduce 12th-order or higher harmonic components of the detent force.
The stator teeth 11 and the stator teeth 21 are formed separately from the first laminated plate 12 and the second laminated plate 22, respectively. Thereby, even if the stator teeth 11 and the stator teeth 21 are rectangular parallelepiped, the stator teeth 11 and the comb teeth portion 12b to which the stator teeth 21 are attached are inclined to form the stator teeth. 11. It is possible to arrange the stator teeth 21 in a skewed manner. FIG. 15 is an explanatory diagram showing the skew directions of the stator teeth 11 and 12. FIG. 15 schematically shows the inclination of the stator teeth 11 and 21. The short cross-sections E1 and E2 are inclined with respect to the moving direction of the mover.

  Instead of skewing the stator teeth 11 and the stator teeth 21, the armature yokes 5a and 5b and the permanent magnets 6a and 6b of the mover 1002 may be skewed. Further, it is not an essential requirement that the stator 1001 be installed in the orientation shown in FIG. It can be used in any orientation that can be installed. You may install so that the 1st plate-shaped part 1 may become a lower side or a left-right side.

  The thicknesses of the silicon steel plates constituting the first laminated plate 12, the second laminated plate 22, and the third laminated plate 31 may not be uniform. The inner side of the stator 1001 may be about 0.2 to 0.5 mm capable of effectively preventing eddy currents, and the outer side may be about 1 mm thick for the purpose of improving rigidity.

Embodiment 2
In the first embodiment, the inclination directions of the stator teeth 11 and the stator teeth 21 with respect to the extending direction of the stator 1001 are the same, but in the second embodiment, the directions are opposite. FIG. 16 is an explanatory diagram for illustrating a skew direction of the stator teeth 11 and 12 according to the second embodiment. FIG. 16 schematically shows the inclination of the stator teeth 11 and 12.
It is the cross-sectional view which cut | disconnected the stator 1001 of the linear motor along the moving direction. The stator teeth 11 included in the first plate-shaped portion 1 and the stator teeth 21 included in the second plate-shaped portion 2 are arranged in a skew manner. That is, the stator teeth 11 and the stator teeth 21 of the stator 1001 are arranged so as to be inclined with respect to the moving direction of the mover 1002 (the extending direction of the stator 1001). Since the mover 1002 is the same as that in the first embodiment, description thereof is omitted.

  In the second embodiment, the direction of the inclination of the short side of the cross section is reversed between the stator teeth 11 provided in the first plate-like portion 1 and the stator teeth 21 provided in the second plate-like portion 2. As shown in FIG. 16, the short cross-sections E1 and E2 of the stator teeth 11 and the end face short sides E3 and E4 of the stator teeth 21 are inclined with respect to the moving direction of the mover 1002. This is the same as in the first embodiment. In the second embodiment, the direction in which the stator teeth portion 11 and the stator teeth 21 are inclined is reversed. In other words, the inclination directions of the short cross-sections E1 and E2 of the stator teeth 11 and the end face short sides E3 and E4 of the stator teeth 21 are opposite to each other. This is intended to suppress twisting due to the skew arrangement. By arranging the stator teeth 11 and the stator teeth 21 in a skew manner, the thrust generated in the linear motor is generated in a direction inclined by the skew angle from the moving direction, so that the entire mover 1002 may be tilted. By reversing the inclination directions of the stator teeth 11 and the stator teeth 22, the thrust component in the direction perpendicular to the moving direction (lateral direction) generated by the stator teeth portion 11 and the stator teeth 21 is reversed. . Therefore, the thrust components in the lateral direction cancel each other and can be prevented from being twisted.

  As described above, the second embodiment has the following effects in addition to the effects of the linear motor according to the first embodiment. By arranging the stator teeth 11 and the stator teeth 21 of the stator 1001 in a skew manner, the armature yokes 5a and 5b and the permanent magnets 6a and 6b of the mover 1002 do not have to be skewed so that the detent force is 12th order or higher. Harmonic components can be reduced. Further, by making the direction in which the stator teeth 11 and the stator teeth 22 are inclined in the opposite direction, an effect of preventing twisting is obtained.

Embodiment 3
In the first embodiment and the second embodiment, the single-phase linear motor (unit for single phase) has been described. However, it is not limited to this.
For example, a single-phase unit can be arranged in the moving direction of the mover to constitute a three-phase linear motor.

  In the present embodiment, in addition to the effects of the linear motor according to the first or second embodiment, the following effects are achieved. By connecting a plurality of stators 1001, the stroke of the linear motor can be lengthened. In addition, since the mover is formed by connecting three single-phase units, a large thrust can be obtained as compared with the case of one single-phase unit.

The technical features (components) described in each embodiment can be combined with each other, and new technical features can be formed by combining them.
The embodiments disclosed herein are illustrative in all respects and should not be considered as restrictive. The scope of the present invention is defined not by the above-mentioned meaning but by the scope of the claims, and is intended to include all modifications within the meaning and scope equivalent to the scope of the claims.

1001 Stator 1 First plate-like part (base part)
11 Stator teeth (magnetic pole teeth)
11a Ear (buttock)
111 tooth plate (metal plate)
111a Ear (buttock)
111b Through hole (cavity)
12 1st laminated board 12a Long plate part (connection part)
12b Comb tooth part (connection part)
12c Bolt insertion hole 12d Stepped portion 121 First plate piece (metal plate)
121a Long plate portion 121b Comb tooth portion 121c Bolt insertion hole 122 Second plate piece (metal plate)
122a Long plate portion 122b Comb tooth portion 122c Bolt insertion hole 2 Second plate-like portion (base portion)
21 Stator teeth (magnetic pole teeth)
211 Tooth plate pieces (metal plate)
211a Ear (buttock)
211b Through hole (cavity)
22 2nd laminated board 22b Comb tooth part (connection part)
22c Bolt insertion hole 22d Step part (receiving part)
3 Bonding portion 31 Third laminated plate 32 Body portion 4 Outer shell portion (reinforcing portion)
41 Wide plate portion 41c Bolt insertion hole 42 Long plate portion 42a Claw portion (pressing claw)
1002 Movable element 5a, 5b Armature yoke 6a, 6b Permanent magnet 7a, 7b Auxiliary plate
8 coils

Claims (15)

Inside the coil, two magnets each having a plate shape and three yokes are alternately arranged along the moving direction,
The two magnets are magnetized along the moving direction, and the movers are opposed to each other in the magnetization direction;
A linear motor comprising: a plurality of magnetic pole teeth; and a stator having a base including a pair of long members facing each other long in the parallel arrangement direction.
Each of the magnetic pole teeth includes a plurality of metal plates that are stacked in a direction that intersects the juxtaposed direction and is orthogonal to the opposing direction of the base,
The linear motor according to claim 1, wherein the magnet and the yoke are substantially flush with a surface facing the magnetic pole teeth. Linear motors according to claim 1, wherein the metal plate, characterized in that at least a portion of the laminate surface are subjected to insulation treatment. Linear motors according to claim 1 wherein each base portion, characterized in that it comprises a plurality of metal plates laminated in the opposing direction. Linear motors according to claim 3 metal plates included in the respective base, characterized in that at least a portion of the laminate surface are subjected to insulation treatment. Each of the base portions is a connection portion that connects between two adjacent magnetic pole teeth;
Linear motors as claimed in any one of claims 1 to 4, characterized in that it comprises a connecting portion for connecting the connecting portions. Each of the magnetic pole teeth has a flange that protrudes in the substantially extending direction of the base,
Linear motor according to 請 Motomeko 5 you, characterized in that said connection portion having a receiving portion for receiving the flange portion. A coupling portion for coupling the base portions;
The coupling portion includes a plurality of metal plates stacked in a direction perpendicular to the parallel arrangement direction of the magnetic pole teeth and perpendicular to the facing direction. linear motors described. Linear motors according to claim 7 wherein the metal plate included in the coupling portion, characterized in that at least a portion of the laminate surface are subjected to insulation treatment. Linear motors according to claim 7 or claim 8 wherein the coupling unit is characterized by having a main body portion further overlaps the plurality of metal plates. Linear motors as claimed in any one of claims 1 to claim 9 wherein the base, characterized in that it comprises a reinforcing section which covers the opposite surface of the opposing surfaces. Linear motors according to claim 10 wherein the reinforcing portion is characterized in that it comprises a pressing pawl that presses the base in the stacking direction continuous to opposing surfaces from a side of the base. The linear motors as claimed in any one of claims 1 to 11 each magnetic pole tooth, characterized in that it comprises a cavity extending through in the stacking direction. Linear motors as claimed in any one of claims 1 to 12 other magnetic pole teeth of one of the magnetic pole teeth and the base of said base, characterized in that a staggered arrangement direction. The magnetic pole teeth have a rectangular parallelepiped shape,
14. The linear motor according to claim 1, wherein two short sides facing each other in a plane parallel to the base portion of the magnetic pole tooth are inclined with respect to an extending direction of the base portion. Ta. Inclination direction of the two short sides of the magnetic pole teeth inclination direction of the two short sides of the magnetic pole teeth, and the other of said base portion having the one having the base, characterized in that opposite to each other linear motors according to claim 14.

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