JP6278180B2 - Optical scanning device, image display device, and moving body - Google Patents

Description

  The present invention relates to an optical scanning device, an image display device, and a moving body, and more specifically, an optical scanning device that scans a surface to be scanned with laser light, an image display device including the optical scanning device, and the image display device. Related to moving objects.

  Conventionally, light from a light beam generator is incident on a mirror on one side of an optical scanning actuator provided with mirrors on both sides, and the surface to be scanned is scanned by the reflected light, and the other side of the optical scanning actuator There is known an optical scanning device in which light from a light-emitting element is incident on a mirror and a reflected light is received by a light-receiving element (for example, see Patent Document 1).

  However, the optical scanning device disclosed in Patent Document 1 can achieve downsizing, but also causes a complicated configuration.

The present invention is an optical scanning device that scans a surface to be scanned with laser light, and includes a light source unit that emits laser light and an optical deflector that deflects laser light from the light source unit. A scanning optical system for guiding a part of the deflected laser light to the surface to be scanned, and a photodetector for detecting another part of the laser light deflected by the optical deflector, the optical deflector And the photodetector is held by the same holder, the holder being between the light deflector and the package in which the photodetector is mounted, and between the light source unit and the light deflector. A light transmission window member provided in the package so as to be positioned on the optical path of the laser light, and the light transmission window member directs the other part of the deflected laser light to the photodetector. A reflecting portion for reflecting the light, and the other part of the deflected laser beam is provided. Light is an optical scanning device characterized in that it is incident on a portion other than the edge of the reflective portion.

  According to the present invention, it is possible to reduce the size without complicating the configuration.

It is a figure which shows schematically the structure of the projector apparatus of one Embodiment. It is a figure for demonstrating schematically the structure and operation | movement of the optical device of FIG. It is a figure for demonstrating in detail the structure of an optical deflector. It is a figure for demonstrating the reflecting film provided in the light transmissive window member. It is a figure for demonstrating an effective reflection area | region. It is a figure for demonstrating an effective reflective area | region and an extended reflective area | region. It is a figure for demonstrating the reflective film of the modification 1. FIG. It is a figure for demonstrating the reflecting film of the modification 2. FIG. It is a figure for demonstrating the optical device of the modification 3. It is a figure for demonstrating an example of a head-up display apparatus.

  Hereinafter, an embodiment of the present invention will be described with reference to FIGS. FIG. 1 schematically shows a projector apparatus 1000 as an image display apparatus according to an embodiment.

  The projector device 1000 is used, for example, in a state where it is placed on the floor or installation table of a building, a state where it is suspended from the ceiling of the building, or a state where it is hung on the wall of the building. In the following description, an XYZ three-dimensional orthogonal coordinate system shown in FIG.

  As an example, the projector apparatus 1000 includes an optical scanning device 100, an image processing unit 200, and the like.

  The optical scanning device 100 includes, as an example, a light source device 5 (light source unit), an optical device 10 including an optical deflector 20 and a photodetector 30 (see FIG. 2), a controller 40, and an LD control unit 60. .

  The light source device 5 includes three laser diodes LD1 to LD3, three collimating lenses CR1 to CR3, and three dichroic mirrors DM1 to DM3.

  The laser diode LD1 is, for example, a red laser, and is disposed so as to emit red light (wavelength 640 nm) in the + Y direction.

  The laser diode LD2 is a blue laser as an example, and is disposed on the + X side of the laser diode LD1 so as to emit blue light (wavelength 450 nm) in the + Y direction.

  The laser diode LD3 is a green laser as an example, and is disposed on the + X side of the laser diode LD2 so as to emit green light (wavelength 520 nm) in the + Y direction.

  Each laser diode is controlled by the LD control unit 60.

  As an example, the collimator lens CR1 is disposed on the + Y side of the laser diode LD1, and the red light emitted from the laser diode LD1 is substantially parallel light.

  As an example, the collimator lens CR2 is disposed on the + Y side of the laser diode LD2, and the blue light emitted from the laser diode LD2 is substantially parallel light.

  As an example, the collimator lens CR3 is disposed on the + Y side of the laser diode LD3, and the green light emitted from the laser diode LD3 is made substantially parallel light.

  Each of the three dichroic mirrors DM1 to DM3 is made of a thin film such as a dielectric multilayer film, and reflects light of a specific wavelength and transmits light of other wavelengths.

  For example, the dichroic mirror DM1 is disposed on the + Y side of the collimating lens CR1 with an inclination of, for example, 45 ° with respect to the X axis and the Y axis, and reflects red light via the collimating lens CR1 in the + X direction.

  As an example, the dichroic mirror DM2 is disposed on the + X side of the dichroic mirror DM1 and the + Y side of the collimator lens CR2 at an inclination of, for example, 45 ° with respect to the X axis and the Y axis, and is red via the dichroic mirror DM1. Light is transmitted in the + X direction, and blue light via the collimating lens CR2 is reflected in the + X direction.

  Note that the red light that has passed through the dichroic mirror DM1 and the blue light that has passed through the collimator lens CR2 respectively enter the vicinity of the center of the dichroic mirror DM2.

  As an example, the dichroic mirror DM3 is disposed on the + X side of the dichroic mirror DM2 and the + Y side of the collimator lens CR3 with an inclination of, for example, 45 ° with respect to the X axis and the Y axis, and the red light passing through the dichroic mirror DM2 And blue light is transmitted in the + X direction, and green light via the collimating lens CR3 is reflected in the + X direction.

  Note that red light and blue light that have passed through the dichroic mirror DM2, and green light that has passed through the collimator lens CR3 respectively enter the vicinity of the center of the dichroic mirror DM3.

  Three lights (red light, blue light, and green light) that pass through the dichroic mirror DM3 are combined into one light. In this case, the color of the synthesized light is expressed by the balance of the emission intensity of the three laser diodes LD1 to LD3.

  As a result, the light source device 5 emits a laser beam formed by combining the three laser beams from the three laser diodes LD1 to LD3 in the + X direction, that is, toward the optical device 10. Hereinafter, the laser light emitted from the light source device 5 is also referred to as “emitted light”.

  Here, the image processing unit 200 performs predetermined processing (for example, distortion correction processing, image size change processing, resolution conversion processing, etc.) on image information from a host device such as a personal computer, and sends it to the LD control unit 60. .

  Based on the image information from the image processing unit 200, the LD control unit 60 modulates the intensity of the LD drive signal (pulse signal) and outputs it to each LD. Further, the LD control unit 60 determines the light emission timing of each LD (timing for supplying a drive signal to the LD) based on a synchronization signal described later from the controller 40. In place of the direct modulation method by the LD control unit 60, an external modulation method by an optical modulator may be adopted. In this case, the light modulator can be disposed on, for example, an optical path between the LD and the collimating lens, or on an optical path between the collimating lens and the dichroic mirror.

  As shown in FIG. 2, the optical device 10 includes a holder 70 that holds the optical deflector 20 and the photodetector 30 in addition to the optical deflector 20 and the photodetector 30 described above. FIG. 2 is a longitudinal sectional view of the optical device 10.

  The holding body 70 includes a package 70a and a cover glass 70b.

  The package 70a is, for example, a flat package made of an uncovered box-shaped member, and is arranged so that the opening thereof is located on the optical path of the emitted light. As a material of the package 70a, for example, ceramic, resin, aluminum or the like is used. Here, for example, two steps are formed on the inner bottom surface of the package 70a. The package 70a may be composed of a single member or a plurality of members. The package 70a is provided with a wiring member (not shown) for supplying electric power to driving means described later.

  The cover glass 70b is made of a transparent or translucent glass plate, and is joined to the opening end of the package 70a so as to cover the opening of the package 70a, that is, to seal the inside of the package 70a. That is, the cover glass 70b is disposed on the optical path of the emitted light and functions as a light transmission window member. Here, as an example, the cover glass 70b is disposed substantially parallel to the inner bottom surface of the package 70a. In addition, the deformation | transformation and birefringence at the time of joining with the package 70a can be suppressed by using the cover glass 70b which is a glass member as a light transmissive window member.

  As described above, the holding body 70 has a sealed internal space surrounded by the package 70a and the cover glass 70b.

  The optical deflector 20 includes a mirror 110 (here, a MEMS mirror), and is mounted on the inner bottom surface of the package 70a. That is, the optical deflector 20 is housed (sealed) in a sealed internal space of the holding body 70 and is protected from dust and moisture. Here, the internal space of the holder 70 is filled with an inert gas such as nitrogen, helium, argon, or neon, or is evacuated.

  In general, an optical deflector including a MEMS mirror deflects laser light by mechanically swinging a small MEMS mirror at high speed. In this case, in order to ensure long-term operation reliability of the MEMS mirror, it is required to seal the optical deflector in order to avoid malfunction due to adhesion of foreign matter or condensation on the MEMS mirror.

  In particular, in an optical deflector that vibrates a MEMS mirror using mechanical resonance due to torsion of a torsion bar at least around one axis, the MEMS mirror is vibrated at an ultra-high speed, so foreign matter in the air gradually adheres to the mirror. The mirror gets dirty.

  This contamination of the mirror causes a temporal change in the resonance frequency and a decrease in the reflectance of the mirror. For this reason, it is necessary to operate the optical deflector including the MEMS mirror in a clean environment in a sealed space.

  The mirror 110 is supported so as to be able to swing independently about the first axis and the second axis orthogonal to each other with respect to the package 70a so that the reflection surface is positioned on the optical path of the emitted light that has passed through the cover glass 70b. (See FIG. 3).

  The optical deflector 20 deflects the emitted light incident on the mirror 110 two-dimensionally by swinging the mirror 110 independently around the first axis and the second axis. That is, the optical deflector 20 constitutes a scanning optical system that guides the laser light from the light source device 5 to the surface to be scanned.

  Therefore, the optical scanning device 100 deflects the emitted light by the optical deflector 20 and effectively scans the surface to be scanned (for example, the surface of the screen S stretched parallel to the XZ plane) by the deflected laser light. The area (image forming area) is two-dimensionally scanned (see FIG. 4).

  Here, the cover glass 70b is provided with a double-sided non-reflective coating at least in a region where the laser beam directed to the effective scanning region is incident (an anti-reflection film is formed on both sides). For this reason, the light use efficiency can be improved.

  Further, the other part of the laser light (laser light not directed to the effective scanning region) deflected by the optical deflector 20 on the surface of the cover glass 70b facing the internal space of the package 70a (the inner surface of the cover glass 70b). The reflective film 120 is provided in the region on the optical path. The reflective film 120 may be provided on the outer surface of the cover glass 70b.

  That is, the optical scanning by the optical scanning device 100 is performed not only on the effective scanning area of the surface to be scanned but also on the outer area.

  The photodetector 30 is, for example, a photodetector such as a photodiode or a phototransistor, and is a laser beam reflected by the reflective film 120 that is a region different from the region where the optical deflector 20 is mounted on the inner bottom surface of the package 70a. It is mounted in the area on the optical path. That is, the photodetector 30 is sealed and protected from dust and moisture. As described above, the internal space of the holder 70 is filled with an inert gas or is evacuated. In this case, it is possible to prevent the photodetector 30 from condensing, and the photodetector 30 can function normally even when the optical device 10 is in a high humidity environment. When the light detector 30 is condensed, an accurate detection signal cannot be obtained, and there is a possibility that malfunction or image formation cannot be performed.

  The photodetector 30 detects the laser light reflected by the reflective film 120 and outputs a detection signal to the controller 40. Since the photodetector 30 receives the reflected light from the mirror 110 when the mirror 110 is located at a position within a predetermined range around the first axis and the second axis, the output signal from the photodetector 30 is output as the mirror 110. It can be used as a reference for detecting position information about the first axis and the second axis.

  Meanwhile, in optical scanning using an optical deflector including a MEMS mirror, it is necessary to appropriately maintain the position and size of an image formed on a surface to be scanned (for example, the surface of a screen).

  In such an optical deflector, the MEMS mirror is operated around at least one axis by utilizing mechanical resonance. This mechanical resonance is a method in which the MEMS mirror is oscillated by resonating using a twist generated in a torsion bar or the like that supports the MEMS mirror.

  In the optical scanning by the mechanical resonance, there is a problem that the size and position of the image change due to the environmental temperature and the change with time.

  Further, when one image is formed by reciprocating scanning (in the scanning forward path and the backward path), it is necessary to match the image positions formed in the forward path and the backward path. Similarly, in non-resonant optical scanning using a cantilever (beam), it is necessary to keep the image size and position constant with respect to environmental temperature and changes with time.

  Therefore, conventionally, in an optical scanning device including an optical deflector including a MEMS mirror, laser light deflected by the optical deflector is received by a photodiode installed in the vicinity of the surface to be scanned, and the light reception timing at the photodiode is set. Based on the rotation angle of the MEMS mirror and the light emission timing of a light source (for example, LD), the image position and size are made constant. Note that the deflection angle and phase of the MEMS mirror can be grasped by processing the timing of light received by the photodiode. This makes it possible to precisely control the image size and the light emission timing of the light source in the effective scanning area (image forming area) of the surface to be scanned even when the sensitivity fluctuation of the shake angle occurs due to temperature and aging. .

  In this case, since it is necessary to install a photodiode at a position outside the effective scanning area (image forming area) of the surface to be scanned, this becomes a factor in increasing the size of the apparatus.

  Therefore, in the optical scanning device 100 of the present embodiment, the optical detector 30 is held by the holding body 70 together with the optical deflector 20 as described above, thereby suppressing an increase in size of the device.

  In the optical scanning device 100, as described above, not only the optical deflector 20, but also the photodetector 30 are accommodated in the sealed internal space of the holding body 70. Therefore, it is possible to prevent the device from malfunctioning, and thus to prevent the device from malfunctioning.

  The controller 40 generates a mirror drive signal for periodically oscillating the mirror 110 at a desired deflection angle and outputs the mirror drive signal to the optical deflector 20 to drive the mirror 110, and based on the output signal from the photodetector 30. Then, the deflection angle of the mirror 110 is controlled (finely adjusted) by correcting the mirror drive signal. Further, the controller 40 outputs a synchronization signal for synchronizing the deflection angle of the mirror 110 and the light emission timing of the LD 10 to the LD control unit 60 based on the output signal from the photodetector 30.

  As shown in FIG. 2, the mirror drive signal is transmitted from the controller 40 to the optical deflector 20 through the flexible substrate 160 and the wires 170. The output signal from the photodetector 30 is also processed through the flexible substrate 160.

  Hereinafter, the optical deflector 20 will be described in detail.

  As shown in FIG. 3, the optical deflector 20 includes a mirror 110 whose surface on the + Y side is a reflecting surface, and a first driving the mirror 110 around a first axis (eg, Z axis) orthogonal to the X axis. The driving unit 150 includes a second driving unit 250 that drives the mirror 110 and the first driving unit 150 around a second axis parallel to the X axis.

  In the optical deflector 20, as an example, each component is integrally formed by a MEMS (Micro Electro Mechanical Systems) process. In short, the optical deflector 20 is created by forming a plurality of movable parts (elastically deforming parts) by cutting a single silicon substrate, and providing each movable part with a piezoelectric member. The reflecting surface of the mirror 110 is, for example, a metal thin film such as aluminum, gold, or silver formed on the surface on the + Y side of the silicon substrate.

  As an example, the first drive unit 150 has two torsion bars 105a and 105b that are individually connected to both ends in the first axial direction of the mirror 110 and extend in the first axial direction, and the two torsion bars 105a and 105b. The middle part is continuous with the other end in the first axial direction, the inner edges are continuous with the two beams 106a and 106b extending in the second axial direction, and both ends in the second axial direction of the two beams 106a and 106b. The first rectangular frame portion 107 and the two first piezoelectric members 15 and 16 individually provided on the + Y side surfaces of the one side portion and the other side portion sandwiching the first axis of each of the two beams 106a and 106b, ,have.

  Here, the center of the mirror 110 is located at the center of the first rectangular frame 107. The two torsion bars 105a and 105b have the same diameter and the same length. The two beams 106a and 106b have a rectangular plate shape with the second axis direction as the longitudinal direction. The two first piezoelectric members 15 and 16 have a rectangular plate shape having the same shape and the same second axis direction as the longitudinal direction.

  In the first driving unit 150, when a voltage (driving voltage) is applied in parallel to the two piezoelectric members 15 provided individually on the two beams 106 a and 106 b, the two piezoelectric members 15 are deformed, and 2 The two beams 106a and 106b bend, and the driving force around the first axis acts on the mirror 110 via the two torsion bars 105a and 105b, and the mirror 110 swings around the first axis. The first drive unit 150 is controlled by the controller 40.

  Further, in the first drive unit 150, when a voltage (drive voltage) is applied in parallel to the two piezoelectric members 16 provided individually on the two beams 106a and 106b, the two piezoelectric members 16 are deformed. The two beams 106a and 106b are bent, and the driving force around the first axis acts on the mirror 110 via the two torsion bars 105a and 105b, and the mirror 110 swings around the first axis.

  Accordingly, the controller 40 applies the sine wave voltages in opposite phases to the two piezoelectric members 15 and 16 provided on each beam of the first driving unit 150 in parallel (for example, simultaneously), so that the mirror 110 is It can be vibrated efficiently with the period of the sinusoidal voltage around one axis.

  Here, the frequency of the sine wave voltage is set to about 20 kHz (resonance frequency of each torsion bar), and the mirror 110 can be vibrated at about 20 kHz by utilizing mechanical resonance due to torsion of each torsion bar. The maximum deflection angle from the vibration center of the mirror 110 is about ± 15 °.

  For example, the second drive unit 250 has a meander including a plurality of (for example, eight) beams 108a, one end of which is continuous with the corner of the first rectangular frame 107 on the −Z side and the + X side and meanders. Part 210a, meandering part 210b including a plurality of (e.g., eight) beams 108b, one end of which is continuous with the corner of + Z side and -X side of first rectangular frame part 107 and meanders, and meandering part Eight second piezoelectric members individually provided on the + Y side surface of the eight beams 108a of 210a, and eight second piezoelectric members individually provided on the + Y side surface of the eight beams 108b of the meandering portion 210b And a second rectangular frame portion 109 having an inner edge portion continuous with the other end of each of the two meandering portions 210a and 210b.

  Here, the center of the mirror 110 is located at the center of the second rectangular frame 109. The eight beams of each meandering portion are rectangular plates having the same shape and the same first axial direction as the longitudinal direction. Each of the second piezoelectric members has a rectangular plate shape having the same shape and the same first axial direction as the longitudinal direction. The length of the second piezoelectric member in the first axial direction (longitudinal direction) is somewhat shorter than the length of the beam in which the second piezoelectric member is provided in the first axial direction.

  In the second driving unit 250, the eight piezoelectric members provided in each meandering portion are odd-numbered (first, third, fifth) from the second piezoelectric member at the end of the most + X side or the most -X side. When the voltage is applied in parallel to the four second piezoelectric members 11, the four second piezoelectric members 11 and the four beams provided with the four second piezoelectric members are in the second axis. The mirror 110 bends in the same direction around, and the mirror 110 swings around the second axis.

  Further, in the second driving unit 250, among the eight second piezoelectric members of each meandering portion, the even-numbered (second, fourth, sixth) from the second piezoelectric member at the end of the most + X side or the most −X side. When the voltage is applied to the four second piezoelectric members 12 in parallel, the four second piezoelectric members 12 and the four beams provided with the four second piezoelectric members 12 are in the second axis. The mirror 110 bends in the same direction around, and the mirror 110 swings around the second axis.

  Hereinafter, for convenience, the odd-numbered four second piezoelectric members 11 provided in each meandering portion are collectively referred to as a piezoelectric member group P1, and the even-numbered four second piezoelectric members 12 provided in the meandering portion are referred to as a piezoelectric member group P1. Also referred to as a piezoelectric member group P2.

  Therefore, by applying the sawtooth voltage and the inverse sawtooth voltage individually to the two piezoelectric member groups P1 and P2 provided in each meandering part in parallel (for example, simultaneously), two adjacent beams of the meandering part are provided. Is deflected in the opposite direction around the second axis and the amount of deflection of each beam is accumulated, so that the mirror 110 can be efficiently rotated at the period of the sawtooth voltage around the second axis (with a large deflection angle at a low voltage). Can be vibrated.

  Here, the “sawtooth voltage” means a voltage that gradually increases with time and rapidly decreases when a peak is reached. The “reverse sawtooth voltage” means a voltage that rapidly increases with time and gradually decreases when a peak is reached.

  As a result, a support unit including the first driving unit 150 and the second driving unit 250 and including a driving unit that independently drives the mirror 110 around the first axis and the second axis is configured. That is, the mirror 110 is supported by the support portion.

  As an example, each piezoelectric member of the first drive unit 150 and the second drive unit 250 is made of PZT (lead zirconate titanate) as a piezoelectric material. The piezoelectric member exhibits a so-called reverse piezoelectric effect in which when a voltage is applied in the polarization direction, distortion (stretching) proportional to the potential of the applied voltage occurs. In addition, when a force is applied, the piezoelectric member exhibits a so-called piezoelectric effect in which a voltage corresponding to the force is generated in the polarization direction.

  Here, the case where the piezoelectric member is provided only on one surface of the silicon substrate (for example, the surface on the + Y side) has been described as an example. However, in order to improve the flexibility in wiring layout and creation of the piezoelectric member, silicon is used. You may provide only in the other surface (for example, surface on the -Y side) of a board | substrate, and you may provide in both the one surface and other surface (for example, surface of + Y side and -Y side) of a silicon substrate. In any case, the formation of these piezoelectric members and electrodes is almost in accordance with the semiconductor process, and the cost can be reduced by mass production.

  Here, when light is incident on the mirror 110 that vibrates around the first axis, the reflected light is scanned (deflection scan) around the first axis. When light is incident on the mirror 110 that vibrates around the second axis, the reflected light is scanned (deflection scan) around the second axis. Therefore, in order to increase the definition and uniformity of the image formed on the surface to be scanned, the light incident on the mirror 110 is scanned linearly around the first axis, and the scanning line is moved to the second axis. Scanning around, i.e., raster scanning, can be performed.

  Specifically, the first drive unit 150 uses the mechanical resonance of each torsion bar to vibrate the mirror 110 at a high frequency with as little energy as possible, and the second drive unit 250 causes the mirror 110 to move at a low frequency (non-resonance). For example, raster scanning can be performed by oscillating at several tens of Hz.

  However, in this case, the displacement amount of each second piezoelectric member is smaller than the displacement amount of each first piezoelectric member.

  Therefore, as described above, the displacement amount can be earned by operating in parallel the eight second piezoelectric members individually provided on the eight beams of each meandering portion of the second driving unit 250.

  In this embodiment, in order to perform a raster scan, a sawtooth voltage and a reverse sawtooth voltage having the same period are used as drive voltages applied to the piezoelectric member groups P1 and P2 provided in each meandering portion.

  In the optical device 10 configured as described above, for example, a process of mounting the optical deflector 20 on the package 70a (a process according to the semiconductor manufacturing process), and a process of mounting the photodetector 30 on the package 70a. (Semiconductor manufacturing process) and the process (sealing process) of joining the cover glass 70b to the package 70a are performed in series.

  In the optical scanning device 100 configured as described above, the laser light (emitted light) from the light source device 5 enters the cover glass 70b, and the laser light transmitted through the cover glass 70b enters the reflecting surface of the mirror 110. . The laser light incident on the reflecting surface of the mirror 110 is reflected in a direction corresponding to the positions around the first axis and the second axis of the mirror 110. A part of the laser light reflected by the mirror 110 enters the cover glass 70b, and the laser light transmitted through the cover glass 70b is guided to the surface to be scanned (the surface of the screen S). On the other hand, another part of the laser light reflected by the mirror 110 enters the reflective film 120, and the laser light reflected by the reflective film 120 is received by the photodetector 30.

  At this time, as described above, the effective scanning area of the scanning surface can be two-dimensionally scanned by vibrating the mirror 110 at a high frequency around the first axis and at a low frequency around the second axis. That is, the scanning region is scanned one way at a low speed in the sub-scanning direction corresponding to the second axis while being reciprocated at a high speed in the main scanning direction corresponding to the scanning direction around the first axis. Raster scanning can be performed (see FIG. 4).

  Here, the effective scanning region has a main scanning direction (X-axis direction) corresponding to the scanning direction around the first axis as a longitudinal direction, and a sub-scanning direction (Z-axis direction) corresponding to the scanning direction around the second axis. ) In the short direction.

  The operation of projector apparatus 1000 configured as described above will be briefly described. First, image information from a host device such as a personal computer is input to the image processing unit 200, subjected to predetermined processing by the image processing unit 200, and sent to the LD control unit 60.

  The LD control unit 60 generates a drive signal (pulse signal) that is intensity-modulated based on the image information from the image processing unit 200 and converts the drive signal into a drive current. Based on the synchronization signal from the controller 40, the LD control unit 60 A light emission timing is determined, and a drive current is supplied at the light emission timing to drive the laser diode.

  The optical deflector 20 drives the mirror 110 based on the drive signal from the controller 40, deflects a part of the laser light (emitted light) from the light source device 5 toward the effective scanning area of the scanned surface, and The other part of the emitted light is deflected toward the reflective film 120.

  As a result, the effective scanning area is two-dimensionally scanned in the two-axis directions (here, the Z-axis direction and the X-axis direction) perpendicular to each other by the laser beam, and a two-dimensional full-color image is formed on the surface to be scanned.

  The photodetector 30 receives the laser light reflected by the reflective film 120 and outputs a light reception signal (detection signal) to the controller 40.

  The controller 40 corrects the mirror drive signal based on the output signal from the light detector 30 and outputs the corrected mirror drive signal to the optical deflector 20.

  Here, when an image is displayed on the screen S, for example, using the optical scanning device 100, the mirror 110 periodically vibrates according to the mirror drive signal from the controller 40. When an image is displayed on the screen S, the image position and size are preferably kept constant. However, even if a drive signal of a certain condition is given from the controller 40, the image position and size vary depending on the environmental temperature change and the change with time. This is because the phase difference of the mirror with respect to the mirror drive signal and the sensitivity of the deflection angle of the mirror 110 with respect to the mirror drive signal change due to environmental temperature changes and changes with time.

  Therefore, in the present embodiment, the optical deflector 20 and the LD control unit 60 are controlled using the photodetector 30.

  The photodetector 30 detects the laser beam deflected by the optical deflector 20 and reflected by the reflective film 120, and outputs a detection signal to the controller 40. The controller 40 calculates the scanning position and the scanning width of the laser beam based on the detection signal from the photodetector 30 and outputs it to the LD control unit 60. The LD control unit 60 controls the light emission timing of each LD based on the calculation result from the controller 40 at a timing synchronized with the actual mirror phase. Further, the controller 40 controls the drive signal to the mirror 110 so as to keep the scanning width constant based on the detection signal from the photodetector 30.

  As described above, the projector apparatus 1000 performs two-dimensional scanning on the surface to be scanned in the X-axis direction and the Z-axis direction with the laser beam (see FIG. 4). Specifically, sine wave drive is performed at a relatively high speed in the X-axis direction, and constant speed drive is performed at a relatively low speed in the Z-axis direction by a sawtooth wave and a reverse sawtooth wave.

  In the outermost rectangular frame in FIG. 4, an effective region 301 (here,) of the cover glass 70 b for emitting the emitted light into the package 70 a and emitting the laser light deflected by the optical deflector 20 to the outside of the package 70 a. Then, there is a region excluding the joint portion with the package 70a. Further, the cover glass 70 b has an optical scanning area 302 by the optical scanning device 100 in the effective area 301, and laser light directed to the image forming area (effective scanning area) enters the optical scanning area 302. There is an image forming area 303 which is an area.

  At least a part of the reflective film 120 is disposed outside the image forming region 303 and inside the optical scanning region 302.

  The laser light deflected toward the reflection film 120 by the optical deflector 20 is reflected by the reflection film 120 and received by the photodetector 30. Based on the presence / absence and timing of the light-receiving signal of the photodetector 30, it is possible to know the scanning angle at which optical scanning is actually performed, the phase difference with respect to the input signal (mirror drive signal), and the like. By grasping the accurate deflection angle and phase of the mirror in this way, it is possible to form a precise and constant image corresponding to the image information in the image forming area.

  Here, in FIG. 4, the area | region shown with the code | symbol 306 of the cover glass 70b is an incident area | region into which an emitted light injects. Here, the emitted light is incident on the cover glass 70b in an inclined state with respect to the inner bottom surface of the package 70a so that the optical path of the emitted light and the optical path of the deflected laser light do not intersect (see FIG. 2). ). In FIG. 4, the incident area of the cover glass 70 b where the emitted light is incident is on the −Z side, and the emitted area where the deflected laser light is emitted is on the + Z side.

  In FIG. 5, the time change of the optical scanning position in the Z-axis direction and the reflection region of the reflective film 120 to the photodetector 30, that is, the region of the reflective film 120 that reflects the laser beam received by the photodetector 30 In the following, the positional relationship in the Z-axis direction with respect to the reflective film 120 is also shown.

  FIG. 5 shows optical scanning with a sawtooth wave, and optical scanning is performed at a constant speed from the + Z side end of the surface to be scanned toward the −Z side end. Here, with respect to the optical scanning range in the Z-axis direction, the image forming range in the Z-axis direction excludes both ends in the Z-axis direction.

  By the way, in order for the light detector 30 to receive the laser light deflected by the light deflector 20, the LD is turned on even when the deflection direction (reflection direction) by the light deflector 20 is outside the image forming area. It is necessary to keep it. If the LD is always lit inside and outside the image forming area, the laser light deflected by the optical deflector 20 can be reliably received by the reflective film 120.

  However, when the LD is turned on within the optical scanning area and outside the image forming area, the laser light is transmitted through the area of the cover glass 70b where the reflective film 120 is not provided, and a light shielding material or the like is provided in the optical path of the laser light As long as there is not, it will be displayed as lighting outside the image forming area. That is, an unnecessary image is displayed.

  Further, laser light is scattered at the boundary between the area where the reflective film 120 is not provided on the cover glass 70b and the reflective film 120, and stray light to the image forming area is adversely affected. Further, when scattered light is incident on the photodetector 30, the detection accuracy is lowered.

  Therefore, as an example, the effective reflection region of the reflection film 120 is preferably set to an intermediate portion of the reflection film 120 in the Z-axis direction, that is, a region (part) other than the edge in the Z-axis direction. In this case, the laser light reflected by the intermediate portion of the reflective film 120 in the Z-axis direction is incident on the photodetector 30, and the laser light reflected by the edge of the reflective film 120 in the Z-axis direction is incident on the photodetector 30. Not incident. As a result, stray light at the edge of the reflective film 120 in the Z-axis direction can be prevented.

  In addition, as an example, the effective reflection region of the reflection film 120 is preferably set to an intermediate portion of the reflection film 120 in the X-axis direction, that is, a region (part) other than the edge in the X-axis direction. In this case, the laser beam reflected by the intermediate portion of the reflective film 120 in the X-axis direction enters the photodetector 30, and the laser beam reflected by the edge of the reflective film 120 in the X-axis direction enters the photodetector 30. Not incident. As a result, stray light at the edge of the reflective film 120 in the X-axis direction can be prevented.

  FIG. 6 shows another example of the effective reflection area of the reflection film 120. Here, the effective reflection region is a central portion of the reflective film 120, that is, a region (part) other than the peripheral portion. In this case, the laser beam reflected by the central portion of the reflective film 120 enters the photodetector 30, and the laser beam reflected by the outer edge (edge) of the peripheral portion of the effective reflection region does not enter the photodetector 30. . As a result, stray light at the edge in the X-axis direction and the edge in the Z-axis direction of the reflective film 120 can be prevented.

  The position of the photodetector 30 and the size of the light receiving surface, and the position of the reflective film 120 and the size of the effective reflection area are set so that the photodetector 30 receives only the laser light reflected by the effective reflection area. Has been.

  Here, an example of display processing of a two-dimensional image using the photodetector 30 will be described. First, each LD is turned on, the swing angle of the mirror 110 that swings independently around the first axis and the second axis is controlled, and the scanning angle is expanded until the laser light is incident on the reflection film 120.

  When the light detector 30 receives the laser light reflected by the reflective film 120, the light emission timing of each LD is controlled to draw a light receiving image on the light detector 30.

  Here, the light receiving image is drawn in a specified size. This specified size is different even if the positional relationship among the light deflector 20, the reflective film 120, and the light detector 30 is shifted due to environmental temperature change or temporal change. In order to allow the photodetector 30 to receive light with certainty, it is set to a large size in consideration of fluctuations. The size of the reflective film 120 is set to be equal to or larger than the specified size.

  That is, since the light receiving image is drawn in the extended reflection area that includes the effective reflection area at the center of the reflection film 120 and excludes the outer edge of the reflection film 120, even if there is a change in environmental temperature or a change with time. A part of the light receiving image can be reliably drawn in the effective reflection area.

  As a result, the photodetector 30 can stably and accurately grasp the light reception timing regardless of the environmental temperature change and the change with time, and can control the mirror 110 stably and accurately.

  The optical scanning device 100 of the present embodiment described above is an optical scanning device that scans a surface to be scanned with laser light, and the light source device 5 that emits laser light and the light that deflects the laser light from the light source device 5. A scanning optical system that includes a deflector 20 and guides a part of the laser light deflected by the optical deflector 20 to the surface to be scanned, and light for detecting another part of the laser light deflected by the optical deflector 20 And the optical deflector 20 and the optical detector 30 are held by the same holder.

  In this case, the light deflector 20 and the light detector 30 can be arranged close to each other with a simple configuration.

  As a result, it is possible to reduce the size without complicating the configuration.

  Further, since the light deflector 20 and the light detector 30 are held by the same holding body, they can be positioned easily and accurately.

  On the other hand, in Japanese Patent Laid-Open No. 2003-057577, downsizing of the optical scanning device is realized by the following method. Here, as a biaxial scanner having a MEMS mirror, an optical actuator having reflecting surfaces on both sides of the MEMS mirror is adopted, and the light beam from the light beam generator is incident on the surface (the reflecting surface on one side) for effective scanning. While scanning the range, the light beam from the light emitting element is incident on the back surface (the other reflecting surface), the light beam generator is controlled based on the output signal from the light receiving element, and the light beam emission and stop timing is set. I have control.

  However, since a light beam generating device and a light emitting element are required, the configuration of the device becomes complicated, and it takes time to assemble and adjust, resulting in an increase in cost. Moreover, since it is necessary to make both surfaces of a MEMS mirror into a reflective surface, a process also increases a manufacturing process and it becomes difficult to ensure the rigidity of a MEMS mirror. Normally, in the MEMS mirror, ribs are formed on the back surface for reinforcement in order to prevent deformation.

  Further, in the optical scanning device 100, the surface to be scanned can be stably and accurately scanned by controlling the light source device 5 and the optical deflector 20 based on the detection result from the photodetector 30.

  Further, since the light deflector 20 and the light detector 30 can be unitized (integrated via the holding body 70), the assembly is easier than in the case where the two are separate. As a result, the manufacturing cost can be reduced.

  Further, since the optical deflector 20 and the optical detector 30 are accommodated in a sealed internal space formed in the holding body 70, the operational reliability of both can be remarkably improved, and the surface to be scanned can be stabilized. Scanning with high accuracy.

  The holding body 70 is provided in the package 70 a so as to be positioned on the optical path of the laser light between the light source device 5 and the optical deflector 20 and the package 70 a in which the optical deflector 20 and the optical detector 30 are mounted. Cover glass 70b. In this case, a step of mounting the optical deflector 20 on the package 70a (for example, a process according to a semiconductor manufacturing step), a step of mounting the photodetector 30 on the package 70a (for example, a semiconductor manufacturing step), the package 70a and the cover glass 70b. The optical device 10 can be manufactured through a series of steps including a step of bonding (for example, a sealing step).

  The photodetector 30 is mounted on the package 70a, and the cover glass 70b is provided with a reflective film 120 that reflects the other part of the polarized laser light toward the photodetector 30. The laser beam can be reliably received by the photodetector 30.

  In addition, since the other part of the deflected laser light is incident on a portion other than the edge of the reflection film 120, stray light at the edge of the reflection film 120 can be prevented.

  In addition, since the projector apparatus 1000 includes the optical scanning apparatus 100, it is possible to stably display a high-quality image while reducing the size at a low cost.

  In the first modification shown in FIG. 7, as an example, the reflective film 220 is within the optical scanning region 802 and outside the image forming region 803, that is, the image forming region 803 in the optical scanning region 802. 7 is formed in an elongated rectangular shape having a longitudinal direction in the X-axis direction including a band-like region located on the + Z side (blacked portion in FIG. 7).

  The photodetector 30 is disposed on the optical path of the laser light reflected by the reflective film 220.

  The advantage of the first modification is that in the adjustment of the lighting timing of the light receiving image, it is not necessary to strictly adjust the optical scanning in the X-axis direction scanned at a relatively high speed. That is, when scanning at least one line in the X-axis direction, the laser light from the reflective film 220 does not come off the photodetector 30, so that it is possible to set a light receiving image with a relatively wide width. The tolerance for changes in environmental temperature and changes over time will increase.

  In the second modification shown in FIG. 8, the reflective film 320 is formed in substantially the entire area other than both the image forming area 903 and the incident area 906 on which the emitted light is incident on the inner surface of the cover glass 70b. ing. The photodetector 30 is disposed on the optical path of the laser light reflected by the reflective film 320.

  The advantage of the second modification is that it is possible to prevent unnecessary laser light other than the image forming laser light (scanning light) from entering the effective scanning region.

  Moreover, in the modification 2, the incident area | region 906 is formed in the magnitude | size and shape according to the magnitude | size and shape of the cross section of the emitted light.

  For example, by making the incident region 906 function as an aperture that shapes the emitted light (limits the beam diameter), the emitted light can be incident only on the mirror 110. In the case where the beam profile of the emitted light includes sidelobe light other than the ideal main lobe light, if the emitted light is shaped and the sidelobe light is not shielded, the portion other than the mirror 110 in the optical deflector 20 is also lasered. Light enters and scattered light is generated. This scattered light generates stray light, and when the stray light enters the surface to be scanned, the image quality deteriorates.

  In order to prevent the side lobe light from being reflected by the reflective film 320 and entering the light source device 5 and the image forming area, the laser light is absorbed at least in the peripheral portion of the incident area 906 on the outer surface of the cover glass 70b. It is preferable to provide an absorption film. In this case, it is possible to prevent the output fluctuation of the LD due to the return light to the LD and the generation of an unnecessary image in the image forming area.

  Further, since the reflective film 320 is also formed in the peripheral portion of the image forming region 903 on the inner surface of the cover glass 70b, even if the scattered light is generated, stray light can be shielded to some extent, and the output fluctuation of the LD And generation of unnecessary images in the image forming area can be suppressed.

  As a result, in the second modification, the laser light is prevented from being emitted from the optical device to the area other than the image forming area, so that it is possible to prevent the image quality from being deteriorated.

FIG. 9 shows an optical device 300 of Modification 3.
In the optical device 300 of Modification 3, the cover glass 70b is inclined by an angle θ with respect to the inner bottom surface of the package 70a.

  The angle θ is set so that the reflection direction of the laser light from the outer surface and the inner surface of the cover glass 70b in the emitted light is in a direction away from the image forming region. The angle θ is preferably 5 ° to 65 °, for example, and is 15 ° here. As a result, it is possible to prevent the laser light reflected by the cover glass 70b from being incident on the image forming area, and thus to prevent the image quality from being deteriorated.

  Even when anti-reflection films are formed on both surfaces of the cover glass 70b, reflection of 0 comma several percent occurs in manufacturing. In this case, the brightness (light quantity) of the laser light reflected by the antireflection film of the emitted light may be relatively larger than the brightness of the laser light deflected by the optical deflector 20. Therefore, it is effective to incline the cover glass 70b as described above.

  Also in the third modification, the reflective film 120 is disposed on the optical path of the laser light deflected by the optical deflector 20, and the photodetector 30 is disposed on the optical path of the laser light reflected by the reflective film 120. . Here, the cover glass 70b and the package 70a are joined via a cylindrical spacer asymmetric with respect to the axis.

  Note that the reflection portion provided on the cover glass may be provided on at least a part of the cover glass other than both the incident light incident area and the image forming area. For example, it may be provided in at least one of the + X side area, the −X side area, the + Z side area, and the −Z side area of the image forming area in the cover glass. When the reflective portion is provided in at least two of these four regions, they may be provided integrally with each other or provided separately. In addition, the size and shape of the reflecting portion provided in each region can be changed as appropriate.

  Moreover, in the said embodiment and each modification, although the reflecting film as a reflection part is formed in the cover glass 70b, it is not restricted to this, For example, on at least one of the outer surface and inner surface of the cover glass 70b A mirror finish may be applied, or a reflection mirror (reflection mirror) may be attached.

  Moreover, in the said embodiment and each modification, although the optical deflector 20 and the photodetector 30 are accommodated in the internal space of the holding body 70, it is not restricted to this, and the main point is hold | maintained at the same holding body. It should be. For example, the photodetector 30 may not be accommodated in the internal space of the holding body 70. Specifically, the photodetector 30 may be attached to a region on the optical path of the laser light deflected by the optical deflector 20 on the outer surface of the cover glass 70b. In this case, a reflection part (for example, reflection film) is unnecessary.

  Moreover, in the said embodiment and each modification, although the photodetector 30 is mounted in the package 70a, it replaces with this, for example, the laser beam deflected with the optical deflector 20 in the inner surface of the cover glass 70b, for example It may be attached to the area on the optical path. In this case, a reflection part (for example, reflection film) is unnecessary.

  Further, the inner space may not be formed in the holding body. For example, the holding body may be composed of only the package 70a or may be composed of a substrate.

Further, the internal space of the holding body may not be sealed. That is, the internal space of the holding body may communicate with the outside.
Moreover, the holding body should just be comprised by the at least 1 member.

  Moreover, in the said embodiment and each modification, although the sealed internal space of the holding body 70 is filled with the inert gas or evacuated, it is not restricted to this. For example, air may be contained.

  Moreover, in the said embodiment and each modification, although cover glass is used as a light transmissive window member, it is not restricted to this, What is necessary is just the member which permeate | transmits at least one part of a laser beam.

  In the above-described embodiment and each modification, an LD (laser diode), that is, an edge emitting laser is used as a light source of the optical scanning device. However, the present invention is not limited to this, and other devices such as a VCSEL (surface emitting laser) are used. A laser may be used.

  Further, in the above-described embodiment and each modification, the projector apparatus 1000 includes the image processing unit 200, but may not necessarily include the image processing unit 200.

  Moreover, in the said embodiment and each modification, although the photodetector 30 is mounted in the internal bottom face of the package 70a, it may replace with this and may be mounted in the inner wall face of the package 70a, for example.

  The configuration of the package 70a can be changed as appropriate. For example, the number of steps on the inner bottom surface may be one or three or more. Further, the stepped portion may not be formed on the inner bottom surface. That is, the inner bottom surface may be flat.

  In the above embodiment and each modified example, the scanning optical system that guides the emitted light to the surface to be scanned is configured by the optical deflector 20, but is not limited thereto. For example, reflection of, for example, a plane mirror, a concave mirror, or the like on at least one of the optical path of the laser beam between the light source device 5 and the optical deflector 20 and the optical path of the laser beam between the optical deflector 20 and the surface to be scanned. A mirror may be provided.

  Moreover, in the said embodiment and each modification, although the light source device 5 and the optical deflector 20 are controlled based on the detection result in the photodetector 30, not only this but the light source device 5 and the point are important. It is only necessary to control at least one of the optical deflectors 20. Further, the light amount of the laser beam deflected using the photodetector 30 may be monitored, and the light source device 5 may be controlled (APC control) based on the light amount.

  Moreover, the structure of the light source device 5 can be changed as appropriate. For example, at least one laser as a light source may be provided. Further, for example, a prism may be used instead of the dichroic mirror. Further, it is not necessary to provide a collimating lens. In addition, when there is one light source, a dichroic mirror and a prism are not essential.

  In the above-described embodiment and each modification, an example in which three LDs corresponding to three colors of RGB are used and a color image is displayed by two-dimensional scanning has been described. This is also applicable to an example of displaying a monochrome image.

  In the above-described embodiment and each modified example, an optical scanning device that scans a surface to be scanned two-dimensionally is employed. However, for example, a device that scans a surface to be scanned one-dimensionally may be employed. In this case, for example, a one-dimensional scanner including a MEMS mirror, a polygon mirror, a galvanometer mirror, or the like can be used as an optical deflector that deflects one-dimensionally.

  Further, the optical scanning device may be configured to two-dimensionally scan the surface to be scanned by combining a plurality of one-dimensionally deflecting optical deflectors such as a polygon mirror and a galvanometer mirror. In this case, at least one of the plurality of optical deflectors and the photodetector may be held by the same holder.

  In the above-described embodiment and each modification, the optical scanning device that scans the surface of the screen S as the surface to be scanned has been described. However, the present invention is not limited to this, and for example, an image carrier (for example, a photosensitive drum) ) Can also be applied to an optical scanning device that performs optical scanning. This optical scanning device can be used in an image display device such as a printer, a copying machine, or an optical plotter that forms a toner image on an image carrier and transfers the developed image to a recording medium for display. .

  In the above-described embodiment and each modification, the projector apparatus 1000 that displays an image on the screen surface as the scanning surface has been described as the image display apparatus. However, the present invention is not limited to this, and the surface of the diffusion plate or the microlens array is used. The present invention can also be applied to a head-up display device in which a surface to be scanned is used and a virtual image of an image formed on the surface to be scanned is visible through a semi-transmissive member. In this case, the same effect as the projector device 1000 can be obtained.

  FIG. 10 shows, as an example, a head-up display device 2000 that uses the surface of the microlens array as the surface to be scanned. The head-up display device 2000 is mounted on a moving body such as a vehicle, an aircraft, or a ship.

  More specifically, as shown in FIG. 10 as an example, the head-up display device 2000 includes a plurality of two-dimensionally arranged micro-arrays arranged on the optical path of laser light deflected by the optical deflector of the optical device 10. A microlens array including a lens, and a semi-transmissive member (for example, a combiner) disposed on the optical path of the laser light via the microlens array. In this case, the surface (scanned surface) of the microlens array is two-dimensionally scanned by the laser light along with the deflection operation of the laser light around the first axis and the second axis by the optical deflector 20, and an image is formed on the scanned surface. Is formed. Then, laser light that has passed through the microlens array enters the semi-transmissive member, and the laser light reflected by the semi-transparent member reaches the eyes of the observer. As a result, the observer can visually recognize the virtual image of the image formed on the scanned surface via the semi-transmissive member. At this time, since the laser light is diffused by the microlens array, so-called speckle noise can be reduced.

  Instead of the microlens array, a light transmitting member other than the microlens array (for example, a transmissive screen) may be used. Further, for example, a mirror such as a concave mirror or a plane mirror may be provided on the optical path between the light transmissive member such as a microlens array and a transmissive screen and the semi-transmissive member. Moreover, you may substitute a translucent member for example with the window glass of a moving body.

  As a result, it is possible to provide a moving body that is provided with a head-up display device and is operated by a driver who visually recognizes the virtual image.

  In addition, a head-mounted display device, an image display device for the purpose of visually recognizing a virtual image such as a prompter (original display device), and a moving body including the image display device, which have the same configuration as the head-up display device 2000, are provided. It can also be provided.

  DESCRIPTION OF SYMBOLS 5 ... Light source device (light source part), 20 ... Optical deflector, 70 ... Holding body, 70a ... Package, 70b ... Cover glass (light transmission window member), 100 ... Optical scanning device, 110 ... Mirror (MEMS mirror), 120 220, 320 ... reflective film (reflective portion), 1000 ... projector device (image display device), 2000 ... head-up display device (image display device).

JP 2003-57577 A

Claims (11)

An optical scanning device that scans a surface to be scanned with laser light,
A light source unit for emitting laser light;
A scanning optical system that includes an optical deflector that deflects the laser light from the light source unit, and guides a part of the laser light deflected by the optical deflector to the scanned surface;
A photodetector for detecting another part of the laser beam deflected by the optical deflector, and
The optical deflector and the photodetector are held by the same holder ,
The holder is light provided in the package so as to be positioned on a light path of a laser beam between the light source unit and the light deflector, and a package in which the light deflector and the light detector are mounted. A transparent window member,
The light transmission window member is provided with a reflecting portion that reflects the deflected other part of the laser light toward the photodetector,
The other part of the deflected laser light is incident on a part other than the edge of the reflection part . An optical scanning device that scans a surface to be scanned with laser light,
A light source unit for emitting laser light;
A scanning optical system that includes an optical deflector that deflects the laser light from the light source unit, and guides a part of the laser light deflected by the optical deflector to the scanned surface;
A photodetector for detecting another part of the laser beam deflected by the optical deflector, and
The optical deflector and the photodetector are held by the same holder ,
The holder is light provided in the package so as to be positioned on a light path of a laser beam between the light source unit and the light deflector, and a package in which the light deflector and the light detector are mounted. A transparent window member,
The light transmission window member is provided with a reflecting portion that reflects the deflected other part of the laser light toward the photodetector,
The reflection portion is provided in at least a part of the light transmission window member other than both a region where the laser beam from the light source unit is incident and a region where the deflected part of the laser beam is incident. An optical scanning device. An optical scanning device that scans a surface to be scanned with laser light,
A light source unit for emitting laser light;
A scanning optical system that includes an optical deflector that deflects the laser light from the light source unit, and guides a part of the laser light deflected by the optical deflector to the scanned surface;
A photodetector for detecting another part of the laser beam deflected by the optical deflector, and
The optical deflector and the photodetector are held by the same holder ,
The holder is light provided in the package so as to be positioned on a light path of a laser beam between the light source unit and the light deflector, and a package in which the light deflector and the light detector are mounted. A transparent window member,
The light transmission window member is inclined with respect to a surface of the package on which the light deflector is mounted by being provided on the package via a spacer.
The optical detector is mounted in a region closer to the spacer than a region in which the optical deflector is mounted in the package . It said optical deflector and said photodetector, the optical scanning apparatus according to any one of claims 1-3, characterized in that it is accommodated in an inner space formed in the holding member. The optical scanning device according to claim 4 , wherein the internal space is sealed. The optical scanning device according to claim 5 , wherein the internal space is filled with an inert gas or evacuated. Based on the detection result in the photodetector, the light source unit and the optical scanning device according to any one of claims 1 to 6, characterized in that for controlling at least one of said optical deflector. It said optical deflector, the optical scanning apparatus according to any one of claims 1 to 7, characterized in that a uniaxial or biaxial scanner including MEMS mirror. The optical scanning device according to any one of claims 1 to 8 , comprising:
Laser light from the light source is modulated according to image information,
An image display device that scans the surface to be scanned using the optical scanning device to display an image. The image display apparatus according to claim 9 , wherein the scanned surface is scanned to form an image, and a virtual image of the formed image is made visible through a semi-transmissive member. A moving body comprising the image display device according to claim 10 and steered by a driver who visually recognizes the virtual image.