JP6243674B2 - マイクロエレクトロメカニカルシステム（ｍｅｍｓ）スイッチを作動させるためのゲート回路を含むスイッチング装置 - Google Patents

マイクロエレクトロメカニカルシステム（ｍｅｍｓ）スイッチを作動させるためのゲート回路を含むスイッチング装置 Download PDF

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JP6243674B2
JP6243674B2 JP2013194762A JP2013194762A JP6243674B2 JP 6243674 B2 JP6243674 B2 JP 6243674B2 JP 2013194762 A JP2013194762 A JP 2013194762A JP 2013194762 A JP2013194762 A JP 2013194762A JP 6243674 B2 JP6243674 B2 JP 6243674B2
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switch
circuit
gate
switching
voltage
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JP2014072191A (ja
JP2014072191A5 (enExample
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グレン・クレイドン
クリストファー・フレッド・ケイメル
ジョン・ノートン・パーク
ボー・リ
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General Electric Co
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General Electric Co
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics

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  • Micromachines (AREA)
JP2013194762A 2012-09-28 2013-09-20 マイクロエレクトロメカニカルシステム（ｍｅｍｓ）スイッチを作動させるためのゲート回路を含むスイッチング装置 Active JP6243674B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US13/630,122 US8659326B1 (en) 2012-09-28 2012-09-28 Switching apparatus including gating circuitry for actuating micro-electromechanical system (MEMS) switches
US13/630,122 2012-09-28

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JP2014072191A JP2014072191A (ja) 2014-04-21
JP2014072191A5 JP2014072191A5 (enExample) 2016-10-27
JP6243674B2 true JP6243674B2 (ja) 2017-12-06

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JP2013194762A Active JP6243674B2 (ja) 2012-09-28 2013-09-20 マイクロエレクトロメカニカルシステム（ｍｅｍｓ）スイッチを作動させるためのゲート回路を含むスイッチング装置

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US (1) US8659326B1 (enExample)
EP (1) EP2713379B1 (enExample)
JP (1) JP6243674B2 (enExample)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9362608B1 (en) * 2014-12-03 2016-06-07 General Electric Company Multichannel relay assembly with in line MEMS switches
US9997317B2 (en) * 2015-10-22 2018-06-12 General Electric Company Isolated control circuit and driver for micro-electromechanical system switch
US10218397B1 (en) * 2016-07-21 2019-02-26 Lockheed Martin Corporation Sensitivity radio frequency (RF) receiver front-end using MEMS switches, RF communications device and method
CN112392699B (zh) * 2019-08-19 2023-01-24 研能科技股份有限公司 微型压电泵模块
TWI712258B (zh) * 2019-08-19 2020-12-01 研能科技股份有限公司 微型壓電泵模組
EP3979291A1 (de) * 2020-09-30 2022-04-06 Siemens Aktiengesellschaft Elektronikmodul und anlage
DE102021107464A1 (de) * 2021-03-25 2022-09-29 Rheinisch-Westfälische Technische Hochschule (Rwth) Aachen Isolierte Gate-Treiberschaltung und Verfahren zum Betreiben der isolierten Gate-Treiberschaltung
US20250149266A1 (en) * 2023-11-07 2025-05-08 Menlo Microsystems, Inc. MEMS Switch With High Off State Voltage Standoff Rating
WO2025133012A1 (en) * 2023-12-22 2025-06-26 Analog Devices International Unlimited Company Circuit breaker circuitry with micro-electromechanical systems switch

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US4723187A (en) 1986-11-10 1988-02-02 General Electric Company Current commutation circuit
SE0101184D0 (sv) 2001-04-02 2001-04-02 Ericsson Telefon Ab L M Micro electromechanical switches
US7321275B2 (en) 2005-06-23 2008-01-22 Intel Corporation Ultra-low voltage capable zipper switch
US7876538B2 (en) 2005-12-20 2011-01-25 General Electric Company Micro-electromechanical system based arc-less switching with circuitry for absorbing electrical energy during a fault condition
US7332835B1 (en) 2006-11-28 2008-02-19 General Electric Company Micro-electromechanical system based switching module serially stackable with other such modules to meet a voltage rating
US9076607B2 (en) * 2007-01-10 2015-07-07 General Electric Company System with circuitry for suppressing arc formation in micro-electromechanical system based switch
US20080211347A1 (en) 2007-03-02 2008-09-04 Joshua Isaac Wright Circuit System With Supply Voltage For Driving An Electromechanical Switch
US7554222B2 (en) * 2007-11-01 2009-06-30 General Electric Company Micro-electromechanical system based switching
US7839611B2 (en) 2007-11-14 2010-11-23 General Electric Company Programmable logic controller having micro-electromechanical system based switching
US7859360B2 (en) * 2007-12-13 2010-12-28 Broadcom Corporation Method and system for controlling MEMS switches in an integrated circuit package
US8610519B2 (en) * 2007-12-20 2013-12-17 General Electric Company MEMS microswitch having a dual actuator and shared gate
US8582254B2 (en) 2009-05-29 2013-11-12 General Electric Company Switching array having circuitry to adjust a temporal distribution of a gating signal applied to the array
US8102637B2 (en) * 2009-07-22 2012-01-24 Analog Devices, Inc. Control techniques for electrostatic microelectromechanical (MEM) structure
US8576029B2 (en) 2010-06-17 2013-11-05 General Electric Company MEMS switching array having a substrate arranged to conduct switching current
WO2012001554A1 (en) * 2010-06-29 2012-01-05 International Business Machines Corporation Electromechanical switch device and method of operating the same
US8350509B2 (en) * 2011-01-04 2013-01-08 General Electric Company Power switching system including a micro-electromechanical system (MEMS) array

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Publication number Publication date
US8659326B1 (en) 2014-02-25
EP2713379A1 (en) 2014-04-02
JP2014072191A (ja) 2014-04-21
EP2713379B1 (en) 2017-12-20

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