JP6239263B2

JP6239263B2 - Substrate mounting board

Info

Publication number: JP6239263B2
Application number: JP2013101276A
Authority: JP
Inventors: 茂裕河浦; 寛小路; 悠史三田
Original assignee: Nippon Carbide Industries Co Inc
Current assignee: Nippon Carbide Industries Co Inc
Priority date: 2013-05-13
Filing date: 2013-05-13
Publication date: 2017-11-29
Anticipated expiration: 2033-05-13
Also published as: JP2014222814A

Description

本発明は、底面の小面積化、低背化を可能としつつ強度を向上させることができる振動子搭載用基板、及び、それを用いた振動子デバイスに関する。 The present invention relates to a vibrator mounting substrate capable of improving strength while enabling a reduction in area and height of a bottom surface, and a vibrator device using the same.

振動子が振動子搭載用基板上に搭載されて、パッケージ化されている振動子デバイスが知られている。この振動子デバイスとして、振動子搭載用基板の振動子が固定される領域が基板底面に対して傾斜して形成された振動子デバイスが知られている。下記特許文献１には、このような振動子デバイスが記載されている。この振動子デバイスでは、矩形状の振動子の端部が、振動子搭載用基板に形成された傾斜面上に固定されている。下記特許文献１によれば、このような構成とすることにより、振動子デバイスを小型・低背化することができるとされている。 A vibrator device in which a vibrator is mounted on a vibrator mounting substrate and packaged is known. As this vibrator device, there is known a vibrator device in which a region where a vibrator of a vibrator mounting substrate is fixed is formed to be inclined with respect to the bottom surface of the board. Patent Document 1 listed below describes such a vibrator device. In this vibrator device, the end of the rectangular vibrator is fixed on an inclined surface formed on the vibrator mounting substrate. According to the following Patent Document 1, it is said that the vibrator device can be reduced in size and height by adopting such a configuration.

特開平１１− ５５０６０号公報Japanese Patent Laid-Open No. 11-55060

上記特許文献１に記載の振動子搭載用基板では、振動子が固定される部位が傾斜面であるため、振動子を振動子搭載用基板の底面に対して傾斜して配置することができる。このように振動子が傾斜して配置されることにより、振動子搭載用基板の底面の面積を小さくすることができ、回路基板上における振動子搭載用基板が占有する面積を小さくすることができる。しかし、低背化を維持しつつ振動子を傾斜して配置するには、振動子搭載用基板を薄く形成しなければならず、振動子搭載用基板の強度が低下する虞が生じてしまう。 In the vibrator mounting substrate described in Patent Document 1, since the portion to which the vibrator is fixed is an inclined surface, the vibrator can be arranged to be inclined with respect to the bottom surface of the vibrator mounting substrate. By arranging the vibrator in an inclined manner in this way, the area of the bottom surface of the vibrator mounting board can be reduced, and the area occupied by the vibrator mounting board on the circuit board can be reduced. . However, in order to arrange the vibrator in an inclined manner while maintaining a low profile, the vibrator mounting substrate must be formed thin, which may reduce the strength of the vibrator mounting substrate.

そこで、本発明は、底面の小面積化、低背化を可能としつつ強度を向上させることができる振動子搭載用基板、及び、それを用いた振動子デバイスを提供することを目的とする。 SUMMARY OF THE INVENTION An object of the present invention is to provide a vibrator mounting substrate capable of improving strength while enabling a reduction in area and height of a bottom surface, and a vibrator device using the same.

上記課題を達成するため、本発明の振動子搭載用基板は、平面状の底面を有する基体部と、前記基体部の前記底面と対向する面における所定領域を囲むように前記基体部上に設けられると共に、前記基体部側と反対側が開口する枠体部と、前記枠体部の内周面の一部であって、前記基体部側から前記開口側に進むにつれて外側に開くように傾斜し、振動子の一端部が固定される部位となる振動子固定領域と、前記基体部の前記所定領域上に突出し、前記底面からの高さが前記振動子固定領域の前記底面からの高さよりも低くなるように設けられる突出部と、を備え、前記振動子が固定される場合に前記開口側から前記突出部を平面視する場合において、前記突出部は、前記振動子の前記一端部と対向する他端部よりも前記振動子固定領域側に位置することを特徴とするものである。 In order to achieve the above object, the vibrator mounting substrate of the present invention is provided on the base portion so as to surround a base portion having a flat bottom surface and a predetermined region on the surface of the base portion facing the bottom surface. And a part of the inner peripheral surface of the frame part that is open on the side opposite to the base part side, and is inclined so as to open outward as it proceeds from the base part side to the opening side. A vibrator fixing region serving as a portion to which one end of the vibrator is fixed; and a protrusion from the bottom surface of the base portion, the height from the bottom surface being higher than the height from the bottom surface of the vibrator fixing region. A protrusion provided to be lowered, and when the vibrator is fixed, when the protrusion is viewed in plan from the opening side, the protrusion faces the one end of the vibrator. Closer to the transducer fixing region than the other end It is characterized in that location.

このような振動子搭載用基板によれば、傾斜している枠体部の内周面に沿って振動子を配置することができるため、基体部の底面と平行に振動子を配置する場合と比べて、振動子搭載用基板の底面の面積を小さくすることができる。また、低背化するために基体部を薄くする場合であっても、突出部が基体部の強度を補填するため、振動子搭載用基板の強度を向上させることができる。しかも、この突出部は振動子固定領域より低いので、振動子を傾斜して配置することを阻害しない。そして、振動子を傾斜して配置したことにより生じた空間である振動子の他端部よりも振動子固定領域側の空間に突出部が設けられるため、突出部を設ける領域を新たに設ける必要がない。そのため、振動子搭載用基板の底面の小面積化を阻害しない。このように本発明の振動子搭載用基板によれば、底面の小面積化、低背化を可能としつつ強度を向上させることができる。 According to such a vibrator mounting substrate, since the vibrator can be arranged along the inner peripheral surface of the inclined frame body portion, the vibrator is arranged in parallel to the bottom surface of the base portion. In comparison, the area of the bottom surface of the vibrator mounting substrate can be reduced. Further, even when the base portion is made thin in order to reduce the height, the protrusions compensate for the strength of the base portion, so that the strength of the vibrator mounting substrate can be improved. In addition, since the protrusion is lower than the vibrator fixing region, it does not hinder the placement of the vibrator at an inclination. Since the protrusion is provided in the space on the side of the vibrator fixing region with respect to the other end portion of the vibrator, which is a space generated by arranging the vibrator at an inclination, it is necessary to newly provide a region for providing the protrusion. There is no. Therefore, the area reduction of the bottom surface of the vibrator mounting substrate is not hindered. As described above, according to the vibrator mounting substrate of the present invention, the strength can be improved while the bottom area can be reduced and the height can be reduced.

また、前記基体部及び前記枠体部及び前記突出部は互いに一体成型されたセラミック焼結体から成ることが好ましい。ここでいう一体成型とは、単層のセラミックグリーンシートがプレス成型等されることにより、基体部と枠体部と突出部とが一体成型されたのち焼成されても良く、基体部を形成するセラミックグリーンシートと枠体部を形成するセラミックグリーンシートと突出部を形成するセラミックグリーンシートとを積層したのち焼成することで一体成型しても良い。このような振動子搭載用基板によれば、より強度を向上させることができる。 Moreover, it is preferable that the base body part, the frame body part, and the projecting part are made of a ceramic sintered body integrally molded with each other. The term “integrated molding” as used herein means that a single-layer ceramic green sheet is press-molded or the like, and the base portion, the frame portion, and the protruding portion may be integrally molded and then fired to form the base portion. The ceramic green sheet, the ceramic green sheet that forms the frame portion, and the ceramic green sheet that forms the protrusion may be laminated and then fired and then integrally molded. According to such a vibrator mounting substrate, the strength can be further improved.

また、前記突出部は、前記振動子の前記一端部側から前記他端部側に向かう方向と直交する方向に、前記所定領域を横断し、前記枠体の内周面に接続していることが好ましい。突出部が所定領域を横断して枠体部に接続することで、基体部に加わる応力が枠体部に分散される。よって、振動子搭載用基板の強度をより向上させることができる。 Further, the projecting portion crosses the predetermined region in a direction orthogonal to a direction from the one end portion side to the other end portion side of the vibrator and is connected to an inner peripheral surface of the frame body. Is preferred. When the protruding portion crosses the predetermined region and connects to the frame body portion, the stress applied to the base body portion is dispersed in the frame body portion. Therefore, the strength of the vibrator mounting substrate can be further improved.

また、前記突出部は、前記振動子の前記他端部側から前記一端部側に向かう方向に、前記枠体部の内周面まで延在していることが好ましい。このような構成とすることで、開口側から突出部を平面視する場合の突出部の面積を大きくすることができる。つまり、基体部と突出部とが接続されている部分の面積をより大きく確保することができる。よって、振動子搭載用基板の強度をより向上させることができる。 Moreover, it is preferable that the said protrusion part is extended to the internal peripheral surface of the said frame part in the direction which goes to the said one end part side from the said other end part side of the said vibrator | oscillator. By setting it as such a structure, the area of a protrusion part in the case of planarly viewing a protrusion part from the opening side can be enlarged. That is, it is possible to secure a larger area of the portion where the base portion and the protruding portion are connected. Therefore, the strength of the vibrator mounting substrate can be further improved.

また、本発明の振動子デバイスは、平面状の底面を有する基体部と、前記基体部の前記底面と対向する面における所定領域を囲むように前記基体部上に設けられると共に、前記基体部側と反対側が開口する枠体部と、前記枠体部の内周面の一部であって、前記基体部側から前記開口側に進むにつれて外側に開くように傾斜し、前記振動子の一端部が固定される振動子固定領域と、前記基体部の前記所定領域上に突出し、前記底面からの高さが前記振動子固定領域の前記底面からの高さよりも低くなるように設けられる突出部と、前記振動子固定領域に前記一端部が固定され、前記一端部と対向する他端部が、前記一端部よりも前記底面に近くなるように配置される振動子と、を備え、前記開口側から前記突出部を平面視する場合において、前記突出部は、前記振動子の前記他端部よりも前記振動子固定領域側に位置することを特徴とするものである。 In addition, the vibrator device of the present invention is provided on the base portion so as to surround a base portion having a flat bottom surface and a predetermined region of the base portion facing the bottom surface, and on the base portion side. And a part of the inner peripheral surface of the frame part that is open to the side opposite to the base part, and is inclined so as to open outward as it proceeds from the base part side to the opening side, and one end part of the vibrator And a protruding portion provided so that a height from the bottom surface is lower than a height from the bottom surface of the transducer fixing region. A vibrator in which the one end is fixed to the vibrator fixing region, and the other end facing the one end is arranged closer to the bottom surface than the one end, and the opening side When the projection is viewed in plan from Protrusions are characterized in that located in the vibrator fixing region side of the other end portion of the vibrator.

このような振動子デバイスは、上記のように底面の小面積化と低背化を可能としつつ強度を向上させることができる振動子搭載用基板を用いるため、小型化させつつ破損し難くすることができる。 Such a vibrator device uses a vibrator mounting substrate that can improve the strength while enabling a reduction in area and height of the bottom surface as described above, so that it is difficult to break down while miniaturizing. Can do.

以上のように、本発明によれば、底面の小面積化と低背化を可能としつつ強度を向上させることができる振動子搭載用基板、及び、それを用いた振動子デバイスが提供される。 As described above, according to the present invention, it is possible to provide a vibrator mounting substrate capable of improving strength while enabling a reduction in the area and height of a bottom surface, and a vibrator device using the same. .

本発明の第１実施形態にかかる振動子デバイスを示す図である。1 is a diagram showing a vibrator device according to a first embodiment of the present invention. 図１で示す振動子デバイスの断面図である。FIG. 2 is a cross-sectional view of the vibrator device shown in FIG. 1. 本発明の第２実施形態にかかる振動子デバイスを図２と同様にして示す断面図である。FIG. 6 is a cross-sectional view showing a vibrator device according to a second embodiment of the present invention in the same manner as in FIG. 2. 本発明の第３実施形態にかかる振動子デバイスを図２と同様にして示す断面図である。FIG. 6 is a cross-sectional view showing a vibrator device according to a third embodiment of the present invention in the same manner as in FIG. 2.

以下、本発明にかかる振動子搭載用基板、及び、振動子デバイスの好適な実施形態について図面を参照しながら詳細に説明する。なお、理解の容易のため、それぞれの図のスケールと、以下の説明に記載のスケールとが異なる場合がある。 Hereinafter, preferred embodiments of a vibrator mounting substrate and a vibrator device according to the present invention will be described in detail with reference to the drawings. For ease of understanding, the scale of each figure may be different from the scale described in the following description.

（第１実施形態）
図１は、本発明の第１実施形態にかかる振動子デバイスを示す図であり、図２は、図１で示す振動子デバイスの断面図である。なお、図１は、理解の容易のため分解斜視図で振動子デバイスを示している。図１、図２に示すように、本実施形態の振動子デバイス１は、振動子搭載用基板５と、振動子搭載用基板５に搭載される振動子６と、振動子６を振動子搭載用基板５に封止するための蓋体７とを主な構成として備える。 (First embodiment)
FIG. 1 is a view showing the vibrator device according to the first embodiment of the present invention, and FIG. 2 is a cross-sectional view of the vibrator device shown in FIG. FIG. 1 shows the vibrator device in an exploded perspective view for easy understanding. As shown in FIGS. 1 and 2, the vibrator device 1 according to the present embodiment includes a vibrator mounting board 5, a vibrator 6 mounted on the vibrator mounting board 5, and the vibrator 6. The main body 5 is provided with a lid 7 for sealing the substrate 5.

振動子搭載用基板５は、基体部１０と、基体部１０上に設けられる枠体部２０と、基体部１０上に設けられる突出部３０とから成る。本実施形態では、振動子搭載用基板５基体部１０及び枠体部２０及び突出部３０は、単層のセラミックグリーンシートがプレス成型等された後に焼成され、互いに一体成型されたセラミック焼結体から成る。 The vibrator mounting substrate 5 includes a base portion 10, a frame body portion 20 provided on the base portion 10, and a protruding portion 30 provided on the base portion 10. In the present embodiment, the vibrator mounting substrate 5 base portion 10, the frame portion 20, and the protruding portion 30 are sintered ceramic bodies that are fired after a single layer ceramic green sheet is press-molded or the like, and are integrally molded with each other. Consists of.

基体部１０は、仮に振動子搭載用基板５を基体部１０と枠体部２０と突出部３０とに分解する場合、図２に示すように平板状の形状をした部位であり、セラミック焼結体から成る。この基体部１０の底面１１は平面状の形状をしており、底面１１と対向する面である上面の所定領域１２は、後述する開口５１側から当該上面を平面視する場合に振動子６が配置される領域とされる。この所定領域１２は本実施形態では平面状とされるが、振動子６を配置することができる領域である限りにおいて特に制限はない。 The base portion 10 is a portion having a flat plate shape as shown in FIG. 2 when the vibrator mounting substrate 5 is disassembled into the base portion 10, the frame body portion 20, and the protruding portion 30. Consists of the body. The bottom surface 11 of the base portion 10 has a planar shape, and the predetermined region 12 on the upper surface, which is a surface facing the bottom surface 11, is formed by the vibrator 6 when the upper surface is viewed in plan from the opening 51 side described later. The area to be arranged. The predetermined region 12 is planar in this embodiment, but is not particularly limited as long as it is a region where the vibrator 6 can be disposed.

なお、基体部１０の大きさは、振動子６の大きさ等により変わるため特に限定されないが、例えば、２．５ｍｍ（縦幅）×３．２ｍｍ（横幅）×０．３ｍｍ（厚さ）とされる。 The size of the base portion 10 is not particularly limited because it varies depending on the size of the vibrator 6. For example, 2.5 mm (vertical width) × 3.2 mm (horizontal width) × 0.3 mm (thickness). Is done.

枠体部２０は、基体部１０の所定領域１２を取り囲んで基体部１０上に設けられるセラミック焼結体から成る環状の部位である。上記のように本実施形態では枠体部２０は基体部１０と一体成型されているため、基体部１０と枠体部２０との間に物理的な境界はないが、便宜上図１、図２において基体部１０と枠体部２０との境界が破線にて示されている。枠体部２０の基体部１０側と反対側の面である上面は平坦状とされており、枠体部２０の外周側の側面の形状は基体部１０の側面の形状と同様とされている。また、枠体部２０は、上述のように環状に形成された部位であるため、枠体部２０が基体部１０上に設けられた状態で、振動子搭載用基板５としてみると、基体部１０側と反対側に開口５１が形成されている。本実施形態において開口５１は四角形の形状とされている。 The frame body portion 20 is an annular portion made of a ceramic sintered body that surrounds the predetermined region 12 of the base body portion 10 and is provided on the base body portion 10. As described above, in the present embodiment, since the frame body portion 20 is integrally formed with the base body portion 10, there is no physical boundary between the base body portion 10 and the frame body portion 20, but for convenience, FIG. The boundary between the base body 10 and the frame body 20 is indicated by a broken line. The upper surface which is the surface opposite to the base body 10 side of the frame body portion 20 is flat, and the shape of the side surface on the outer peripheral side of the frame body portion 20 is the same as the shape of the side surface of the base body portion 10. . In addition, since the frame body portion 20 is a portion formed in an annular shape as described above, when the frame body portion 20 is provided on the base body portion 10, when viewed as the vibrator mounting substrate 5, the base body portion An opening 51 is formed on the side opposite to the 10 side. In the present embodiment, the opening 51 has a quadrangular shape.

また、枠体部２０の内周面２１のうち、一部は基体部１０側から開口５１側に進むにつれて外側に開くように傾斜しており、ここに一対の電極４１、４２が形成されている。この一対の電極４１，４２を含む傾斜面の一部は、後述のように振動子６が固定される振動子固定領域２２とされる。 Further, a part of the inner peripheral surface 21 of the frame body part 20 is inclined so as to open outward as it proceeds from the base part 10 side to the opening 51 side, and a pair of electrodes 41 and 42 are formed here. Yes. A part of the inclined surface including the pair of electrodes 41 and 42 serves as a vibrator fixing region 22 to which the vibrator 6 is fixed as described later.

それぞれの電極４１，４２は、振動子固定領域２２から、枠体部２０の上面と枠体部２０及び基体部１０の側面とを介して、基体部１０の底面１１まで延在されており、電極４１，４２の底面１１上の部位が回路基板上に配置される際の振動子デバイス１の電極とされる。 Each of the electrodes 41 and 42 extends from the vibrator fixing region 22 to the bottom surface 11 of the base body portion 10 through the upper surface of the frame body portion 20 and the side surfaces of the frame body portion 20 and the base body portion 10. The portions on the bottom surface 11 of the electrodes 41 and 42 are used as the electrodes of the vibrator device 1 when being arranged on the circuit board.

なお、枠体部２０のサイズは、特に限定されないが、例えば２．５ｍｍ（縦幅）×３．２ｍｍ（横幅）×０．２ｍｍ（厚さ）とされ、開口のサイズは、例えば１．８ｍｍ（縦幅）×２．５ｍｍ（横幅）とされる。また、本実施形態では、傾斜面である振動子固定領域２２の傾斜角度は、枠体部２０の上面に対して、例えば１０°とされる。 The size of the frame portion 20 is not particularly limited, but is, for example, 2.5 mm (vertical width) × 3.2 mm (horizontal width) × 0.2 mm (thickness), and the size of the opening is, for example, 1.8 mm. (Vertical width) × 2.5 mm (Horizontal width). In the present embodiment, the inclination angle of the transducer fixing region 22 that is an inclined surface is set to, for example, 10 ° with respect to the upper surface of the frame body portion 20.

突出部３０は、基体部１０の所定領域１２上に設けられ、セラミック焼結体から成る基体部１０から突出した部位である。上記のように、本実施形態では突出部３０は基体部１０と一体成型されているため、基体部１０と突出部３０との間に物理的な境界はないが、便宜上図２において基体部１０と突出部３０との境界が破線にて示されている。また、突出部３０は、開口５１側から突出部３０を平面視する場合に、振動子固定領域２２が傾斜する方向における枠体部２０の対向する内周面２１から離間して設けられる共に、前記傾斜する方向と垂直な方向における枠体部２０の対向するそれぞれの内周面２１と接続されるように所定領域１２を横断して設けられる。また、突出部３０の前記横断する方向に垂直な断面は、台形状に形成されている。つまり、突出部３０は畦状に形成されている。また、突出部３０の基体部底面１１からの高さは、振動子固定領域２２の底面１１からの高さよりも低くされている。つまり、突出部３０の上面３１は、振動子固定領域２２よりも基体部１０側に位置している。 The protruding portion 30 is a portion that is provided on the predetermined region 12 of the base portion 10 and protrudes from the base portion 10 made of a ceramic sintered body. As described above, in the present embodiment, since the protruding portion 30 is integrally formed with the base portion 10, there is no physical boundary between the base portion 10 and the protruding portion 30, but for convenience, the base portion 10 in FIG. The boundary between the protrusion 30 and the protrusion 30 is indicated by a broken line. Further, the protrusion 30 is provided apart from the opposed inner peripheral surface 21 of the frame body part 20 in the direction in which the vibrator fixing region 22 is inclined when the protrusion 30 is viewed in plan from the opening 51 side. It is provided across the predetermined region 12 so as to be connected to the respective inner peripheral surfaces 21 facing the frame body portion 20 in the direction perpendicular to the inclined direction. Moreover, the cross section perpendicular | vertical to the said crossing direction of the protrusion part 30 is formed in trapezoid shape. That is, the protrusion 30 is formed in a bowl shape. Further, the height of the protrusion 30 from the base portion bottom surface 11 is set lower than the height from the bottom surface 11 of the transducer fixing region 22. That is, the upper surface 31 of the protrusion 30 is located closer to the base body 10 than the vibrator fixing region 22.

振動子６は、平板状の形状をしており、振動子６を平面視する場合に略矩形状の外形とされる。また、振動子６には一端部６１に沿って図示しない一対の電極が並んで形成されており、これらの電極の位置は、振動子固定領域２２に設けられている電極４１，４２と対応している。そして、振動子６は、一端部６１が振動子固定領域２２上に位置されると共に、一端部６１と対向する他端部６２が突出部３０よりも振動子固定領域２２側と反対側に位置して、基体部１０側の主面が突出部３０に接するように配置される。そして、振動子６のそれぞれの電極が振動子固定領域２２の電極４１，４２に導電ペースト６５により固定される。なお、振動子６のそれぞれの電極が振動子固定領域２２に固定された状態において、振動子６は、突出部３０に接していても突出部３０から僅かに浮いていても良い。 The vibrator 6 has a flat plate shape, and has a substantially rectangular outer shape when the vibrator 6 is viewed in plan view. Further, a pair of electrodes (not shown) are formed side by side along the one end portion 61 of the vibrator 6, and the positions of these electrodes correspond to the electrodes 41 and 42 provided in the vibrator fixing region 22. ing. In the vibrator 6, one end 61 is positioned on the vibrator fixing region 22, and the other end 62 facing the one end 61 is located on the opposite side of the protrusion 30 from the transducer fixing region 22 side. Then, the main surface on the base body 10 side is arranged so as to contact the protrusion 30. Then, the respective electrodes of the vibrator 6 are fixed to the electrodes 41 and 42 of the vibrator fixing region 22 by the conductive paste 65. Note that, in a state where the respective electrodes of the vibrator 6 are fixed to the vibrator fixing region 22, the vibrator 6 may be in contact with the protruding portion 30 or may be slightly lifted from the protruding portion 30.

上記のように突出部３０の上面３１は振動子固定領域２２よりも基体部１０側であるため、一端部６１よりも他端部６２の方が、基体部１０の底面１１に近くなるように配置される。つまり、振動子６は、傾斜した状態で振動子搭載用基板５に固定されている。 As described above, since the upper surface 31 of the protruding portion 30 is closer to the base body 10 than the vibrator fixing region 22, the other end 62 is closer to the bottom surface 11 of the base 10 than the one end 61. Be placed. That is, the vibrator 6 is fixed to the vibrator mounting substrate 5 in an inclined state.

なお、振動子６が振動子固定領域２２に固定された状態において、開口５１側から突出部３０を平面視すると、突出部３０は、振動子固定領域２２に固定される振動子６の他端部６２よりも振動子固定領域２２側に設けられることになる。さらに、突出部３０が所定領域１２を横断する方向は、振動子固定領域２２に固定される一端部６１側から一端部６１と対向する他端部６２側に向かう方向と直交する方向となる。 When the protrusion 30 is viewed from the opening 51 side in a state where the vibrator 6 is fixed to the vibrator fixing region 22, the protrusion 30 is the other end of the vibrator 6 fixed to the vibrator fixing region 22. It is provided closer to the transducer fixing region 22 than the portion 62. Furthermore, the direction in which the protruding portion 30 crosses the predetermined region 12 is a direction orthogonal to the direction from the one end portion 61 side fixed to the transducer fixing region 22 toward the other end portion 62 side facing the one end portion 61.

なお、本実施形態では、突出部３０の振動子６と最も近い位置となる部位は、振動子６の中心Ｃよりも、他端部６２側に位置している。 In the present embodiment, the portion of the protrusion 30 that is closest to the vibrator 6 is located closer to the other end 62 than the center C of the vibrator 6.

蓋体７は矩形状の平板から成り、振動子６が上記のように固定された状態で、枠体部２０の上面上に接着剤７１で固定されている。こうして振動子６が枠体部２０で囲まれるように封止されている。 The lid body 7 is formed of a rectangular flat plate, and is fixed on the upper surface of the frame body portion 20 with an adhesive 71 in a state where the vibrator 6 is fixed as described above. Thus, the vibrator 6 is sealed so as to be surrounded by the frame body portion 20.

このような振動子デバイス１は、一対の電極４１，４２に、例えば交番電圧が印加されることにより、振動子６の図示しない電極にこの電圧が印加され、振動子６が振動する。 In such a vibrator device 1, for example, when an alternating voltage is applied to the pair of electrodes 41 and 42, this voltage is applied to an electrode (not shown) of the vibrator 6, and the vibrator 6 vibrates.

以上のように振動子搭載用基板５によれば、振動子固定領域２２が傾斜しているため、振動子６を基体部１０の底面１１に対して傾斜して配置することができる。従って、基体部１０の底面１１と平行に振動子６を配置する場合と比べて、当該底面１１の面積を小さくすることができる。また、低背化するために基体部１０を薄くする場合であっても、突出部３０が基体部１０の強度を補填するため振動子搭載用基板５の強度を向上させることができる。しかも、この突出部３０は振動子固定領域２２より低いので、振動子６を傾斜して配置することを阻害していない。そして、振動子６を傾斜して配置したことにより生じた空間である、振動子の他端部６２よりも振動子固定領域２２側の空間に、突出部が設けられているため、突出部を設ける領域を新たに設ける必要がない。そのため、振動子搭載用基板５の底面１１の面積を小さくすることを阻害していない。さらに、突出部３０が所定領域１２を横断して枠体部２０と結合していることで、基体部１０に加わる応力は枠体部２０に分散されるので、振動子搭載用基板５の強度がより向上する。このように本発明の振動子搭載用基板５によれば、底面１１を小面積化、低背化しつつ強度を向上させることができる。 As described above, according to the vibrator mounting substrate 5, the vibrator fixing region 22 is inclined, so that the vibrator 6 can be disposed to be inclined with respect to the bottom surface 11 of the base portion 10. Therefore, the area of the bottom surface 11 can be reduced as compared with the case where the vibrator 6 is arranged in parallel with the bottom surface 11 of the base portion 10. Further, even when the base portion 10 is thinned to reduce the height, the protruding portion 30 compensates for the strength of the base portion 10, so that the strength of the vibrator mounting substrate 5 can be improved. In addition, since the protruding portion 30 is lower than the vibrator fixing region 22, it does not hinder the vibrator 6 from being disposed at an inclination. Since the protrusion is provided in the space closer to the vibrator fixing region 22 than the other end 62 of the vibrator, which is a space generated by arranging the vibrator 6 at an inclination, the protrusion is There is no need to provide a new area. Therefore, it is not hindered to reduce the area of the bottom surface 11 of the vibrator mounting substrate 5. Furthermore, since the projecting portion 30 crosses the predetermined region 12 and is coupled to the frame body portion 20, the stress applied to the base body portion 10 is dispersed in the frame body portion 20, so that the strength of the vibrator mounting substrate 5 is increased. Will be improved. Thus, according to the vibrator mounting substrate 5 of the present invention, the strength can be improved while the bottom surface 11 is reduced in area and height.

（第２実施形態）
次に、本発明の第２実施形態について図３を参照して詳細に説明する。なお、第１実施形態と同一又は同等の構成要素については、特に説明する場合を除き、同一の参照符号を付して重複する説明は省略する。 (Second Embodiment)
Next, a second embodiment of the present invention will be described in detail with reference to FIG. In addition, about the component which is the same as that of 1st Embodiment, or equivalent, except the case where it demonstrates especially, the same referential mark is attached | subjected and the overlapping description is abbreviate | omitted.

図３は、本発明の第２実施形態にかかる振動子デバイスを図２と同様にして示す断面図である。図３に示すように、本実施形態の振動子デバイス１ａは、基体部１０上に設けられる突出部が第１実施形態の突出部３０と異なる形状である点において、第１実施形態の振動子デバイス１と異なる。具体的には、本実施形態の振動子搭載用基板５ａにおける突出部３０ａは、第１実施形態の突出部３０が、振動子６の他端部６２側から一端部６１側に向かう方向に、振動子固定領域２２側の枠体部２０の内周面２１まで延在している形状であり、他の点について突出部３０と同様である。なお、本実施形態では、枠体部２０の一部と突出部３０ａとの間に物理的な境界はないが、便宜上図３において枠体部２０と突出部３０ａとの境界が破線にて示されている。 FIG. 3 is a cross-sectional view showing the resonator device according to the second embodiment of the present invention in the same manner as FIG. As shown in FIG. 3, the vibrator device 1 a according to the present embodiment is different from that according to the first embodiment in that the protrusion provided on the base 10 has a different shape from the protrusion 30 of the first embodiment. Different from device 1. Specifically, the protrusion 30a of the vibrator mounting substrate 5a of the present embodiment is such that the protrusion 30 of the first embodiment is directed from the other end 62 side of the vibrator 6 toward the one end 61 side. The shape extends to the inner peripheral surface 21 of the frame body portion 20 on the transducer fixing region 22 side, and is the same as the protruding portion 30 in other points. In this embodiment, there is no physical boundary between a part of the frame body part 20 and the protruding part 30a. However, for convenience, the boundary between the frame body part 20 and the protruding part 30a is indicated by a broken line in FIG. Has been.

本実施形態の振動子搭載用基板５ａによれば、突出部３０ａの上面３１は振動子６よりも基体部１０側に位置するため、振動子６が傾斜して配置されることを阻害せずに、開口５１側から突出部３０ａを平面視する場合の突出部３０ａの面積を大きくすることができる。別言すれば、基体部１０と突出部３０ａとを合わせた厚みが大きい部分をより大きく確保することができる。従って、振動子搭載用基板５ａは、第１実施形態の振動子搭載用基板５よりも強度を向上させることができる。 According to the vibrator mounting substrate 5a of the present embodiment, since the upper surface 31 of the protrusion 30a is located closer to the base body 10 than the vibrator 6, it does not hinder the vibrator 6 from being disposed at an inclination. Furthermore, the area of the protrusion 30a when the protrusion 30a is viewed in plan from the opening 51 side can be increased. In other words, it is possible to secure a larger portion having a large thickness including the base portion 10 and the protruding portion 30a. Therefore, the strength of the vibrator mounting substrate 5a can be improved as compared with the vibrator mounting substrate 5 of the first embodiment.

（第３実施形態）
次に、本発明の第３実施形態について図４を参照して詳細に説明する。なお、第１実施形態と同一又は同等の構成要素については、特に説明する場合を除き、同一の参照符号を付して重複する説明は省略する。 (Third embodiment)
Next, a third embodiment of the present invention will be described in detail with reference to FIG. In addition, about the component which is the same as that of 1st Embodiment, or equivalent, except the case where it demonstrates especially, the same referential mark is attached | subjected and the overlapping description is abbreviate | omitted.

図４は、本発明の第３実施形態にかかる振動子デバイスを図２と同様にして示す断面図である。図４に示すように、本実施形態の振動子デバイス１ｂは、枠体部が第１実施形態の枠体部２０と一部異なる形状とされる点において、第１実施形態の振動子デバイス１と異なる。 FIG. 4 is a cross-sectional view showing the resonator device according to the third embodiment of the present invention in the same manner as FIG. As shown in FIG. 4, the vibrator device 1 b according to the present embodiment has the vibrator device 1 according to the first embodiment in that the frame body part has a partly different shape from the frame body part 20 according to the first embodiment. And different.

具体的には、本実施形態の振動子搭載用基板５ｂにおいて、枠体部２０ｂの内周面２１のうち振動子固定領域２２を有する面２１ｂは、枠体部２０ｂの上部から基体部１０まで面一に傾斜されている点において、第１実施形態の枠体部２０と異なり、他の点について枠体部２０と同様の構成とされる。 Specifically, in the vibrator mounting substrate 5b of the present embodiment, the surface 21b having the vibrator fixing region 22 in the inner peripheral surface 21 of the frame body portion 20b extends from the upper portion of the frame body portion 20b to the base body portion 10. Unlike the frame body part 20 of the first embodiment, the other parts are the same as the frame body part 20 in that they are inclined to be flush with each other.

本実施形態の振動子搭載用基板５ｂによれば、枠体部２０ｂの内周面２１の一部２１ｂが振動子固定領域２２と面一に形成されることで、振動子６が傾斜して配置されることを阻害せずに、振動子搭載用基板５ｂの強度を向上させることができる。つまり、振動子６が傾斜して配置されることを阻害しない限りにおいて、枠体が形成される範囲を大きくして、枠体によっても振動子搭載用基板５ｂの強度を向上させるのである。 According to the vibrator mounting substrate 5b of the present embodiment, the vibrator 6 is inclined by forming a part 21b of the inner peripheral surface 21 of the frame body portion 20b flush with the vibrator fixing region 22. The strength of the vibrator mounting substrate 5b can be improved without hindering the arrangement. That is, as long as the tilting of the vibrator 6 is not hindered, the range in which the frame is formed is increased, and the strength of the vibrator mounting substrate 5b is also improved by the frame.

以上、本発明について、第１〜第３実施形態を例に説明したが、本発明はこれらに限定されるものではない。 Although the present invention has been described above by taking the first to third embodiments as examples, the present invention is not limited to these.

例えば、上記実施形態では、振動子搭載用基板５，５ａ，５ｂの基体部１０と枠体部２０，２０ｂと突出部３０，３０ａとが単層のセラミックグリーンシートがプレス成型等された後に焼成され、互いに一体成型されたセラミック焼結体から成るものとされた。しかし、基体部１０を形成するセラミックグリーンシートと枠体部２０，２０ｂを形成するセラミックグリーンシートと突出部３０，３０ａを形成するセラミックグリーンシートとを積層したのち焼成することで一体成型しても良い。ただし、上記のように単層のセラミックグリーンシートがプレス成型等された後に焼成されることで、振動子搭載用基板５，５ａ，５ｂの基体部１０と枠体部２０，２０ｂと突出部３０，３０ａが一体とされる場合、物理的な継ぎ目がなく一体であるため、継ぎ目がある場合に比べて、振動子搭載用基板５，５ａ，５ｂの強度をより向上させることができる。或いは、基体部１０と枠体部２０，２０ｂと突出部３０，３０ａとをそれぞれ別体に形成して、基体部１０上に枠体部２０，２０ｂと突出部３０，３０ａとを設置しても良い。 For example, in the above-described embodiment, the base body portion 10, the frame body portions 20, 20b, and the projecting portions 30, 30a of the vibrator mounting substrates 5, 5a, 5b are fired after a single layer ceramic green sheet is press-molded or the like. And made of sintered ceramics integrally molded with each other. However, the ceramic green sheet that forms the base portion 10, the ceramic green sheet that forms the frame portions 20 and 20 b, and the ceramic green sheet that forms the protruding portions 30 and 30 a are laminated and then fired and then integrally molded. good. However, by firing the single-layer ceramic green sheet after being press-molded or the like as described above, the base body portion 10, the frame body portions 20 and 20 b, and the projecting portion 30 of the vibrator mounting substrates 5, 5 a and 5 b. , 30a are integrated with no physical seam, the strength of the vibrator mounting substrates 5, 5a, 5b can be further improved as compared with the case where there is a seam. Alternatively, the base body portion 10, the frame body portions 20, 20b, and the protrusion portions 30, 30a are formed separately, and the frame body portions 20, 20b and the protrusion portions 30, 30a are installed on the base portion 10. Also good.

また、上記実施形態の突出部３０、３０ａの上面３１は平坦で無くても良い。 Moreover, the upper surface 31 of the protrusions 30 and 30a of the above embodiment may not be flat.

また、第２実施形態のように形成された突出部３０ａと、第３実施形態のように形成された枠体部２０ｂとがそれぞれ基体部１０上に設けられても良い。 Moreover, the protrusion part 30a formed like 2nd Embodiment and the frame part 20b formed like 3rd Embodiment may be provided on the base | substrate part 10, respectively.

以上説明したように、本発明によれば、底面の小面積化、低背化を可能としつつ強度を向上させることができる振動子搭載用基板、及び、それを用いた振動子デバイスが提供され、電子回路に利用することが期待される。
As described above, according to the present invention, there are provided a vibrator mounting substrate capable of improving strength while enabling a reduction in area and height of a bottom surface, and a vibrator device using the same. It is expected to be used in electronic circuits.

１，１ａ，１ｂ・・・振動子デバイス
５，５ａ，５ｂ・・・振動子搭載用基板
６・・・振動子
７・・・蓋体
１０・・・基体部
１１・・・底面
１２・・・所定領域
２０，２０ｂ・・・枠体部
２１・・・内周面
２１ｂ・・・内周面の一部
２２・・・振動子固定領域
３０，３０ａ・・・突出部
３１・・・突出部の上面
４１，４２・・・電極
５１・・・開口
６１・・・振動子の一端部
６２・・・振動子の他端部
６５・・・導電ペースト
７１・・・接着剤 DESCRIPTION OF SYMBOLS 1,1a, 1b ... Vibrator device 5,5a, 5b ... Vibrator mounting substrate 6 ... Vibrator 7 ... Lid body 10 ... Base part 11 ... Bottom 12 ... -Predetermined areas 20, 20b ... Frame body part 21 ... Inner peripheral surface 21b ... Part of inner peripheral surface 22 ... Vibrator fixing area 30, 30a ... Protruding part 31 ... Protruding part Upper surface 41, 42 ... Electrode 51 ... Opening 61 ... One end of vibrator 62 ... Other end of vibrator 65 ... Conductive paste 71 ... Adhesive

Claims

A base portion having a planar bottom surface;
A frame body portion that is provided on the base portion so as to surround a predetermined region on a surface facing the bottom surface of the base portion, and that is open on a side opposite to the base portion side;
A vibrator fixing region that is a part of the inner peripheral surface of the frame body portion and is inclined so as to open outward as it advances from the base portion side to the opening side, and is a part to which one end portion of the vibrator is fixed When,
A protruding portion that protrudes above the predetermined region of the base portion and is provided such that a height from the bottom surface is lower than a height from the bottom surface of the vibrator fixing region;
With
When the projection is viewed in plan from the opening side when the vibrator is fixed,
The projecting portion is located closer to the transducer fixing region than the other end facing the one end of the transducer ,
The projecting portion crosses the predetermined region in a direction orthogonal to a direction from the one end side to the other end side of the vibrator and is connected to an inner peripheral surface of the frame body portion. A vibrator mounting substrate characterized by the above.

Of the inner peripheral surface of the frame body portion, the surface having the vibrator fixing region is inclined in the same plane from the upper portion of the frame body portion to the base body portion.
The vibrator mounting substrate according to claim 1.

3. The vibrator mounting substrate according to claim 1, wherein the base body part, the frame body part, and the projecting part are made of a ceramic sintered body that is integrally molded with each other.

The said protrusion part is extended to the internal peripheral surface of the said frame part in the direction which goes to the said one end part side from the said other end part side of the said vibrator. The vibrator mounting substrate according to claim 1.

A cross section perpendicular to the transverse direction of the protrusion is formed in a trapezoidal shape.
The vibrator mounting substrate according to any one of claims 1 to 3, wherein the vibrator mounting board is provided.

A base portion having a planar bottom surface;
A frame body portion that is provided on the base portion so as to surround a predetermined region on a surface facing the bottom surface of the base portion, and that is open on a side opposite to the base portion side;
A part of the inner peripheral surface of the frame portion, and inclined to open outwardly as from the base portion side advances to the opening side, a vibrator fixing region one end of the vibration Doko is fixed,
A protruding portion that protrudes above the predetermined region of the base portion and is provided such that a height from the bottom surface is lower than a height from the bottom surface of the vibrator fixing region;
The vibrator is disposed such that the one end is fixed to the vibrator fixing region and the other end facing the one end is closer to the bottom surface than the one end.
With
In the case of viewing the protrusion from the opening side in plan view,
The transducer device, wherein the protruding portion is located closer to the transducer fixing region than the other end of the transducer.