JP6232542B2 - Metal joining apparatus and joining method - Google Patents

Description

  The present invention relates to a metal bonding apparatus and a bonding method using the apparatus.

Conventionally, an intermetal bonding method is a method in which an oxide film layer is removed by argon ion milling in a high vacuum to activate the surface, and then the bonded portions are brought into contact with each other to apply high pressure to perform diffusion bonding, for example, surface activation. Surface activated bonding (SAB) is known.
Since oxide film, contamination (dirt), or particles (fine particles) are attached to the metal surface, this SAB method is polished to a nano level (2 nm) flatness by CMP (Chemical Mechanical Polishing). Then, it is put in a vacuum apparatus, the joining surfaces are individually argon-ion milled to remove dirt, the joining surfaces are superposed and pressurized in a vacuum, and diffusion bonding is performed. Thus, it is known that this SAB method can obtain a sufficient bonding strength.
Further, Patent Literature 1 and Patent Literature 2 are disclosed as similar joining methods.

Japanese Patent Laying-Open No. 2005-229005 (FIGS. 1 and 5) JP 2012-151183 A

  However, the SAB method is used for small parts such as semiconductors and electronic parts, but has not yet been widely used in industrial fields. The reason is that the bonding is performed in a vacuum apparatus in a vacuum, so that there is a problem that the productivity is low and the manufacturing / equipment cost is high.

  Therefore, an object of the present invention is to provide a bonding apparatus and a bonding method that can solve the problems of the SAB method, reduce manufacturing and equipment costs, and can be widely used in a wide range of industrial fields.

The invention of the bonding apparatus according to claim 1 is a metal bonding apparatus for bonding a bonding surface of one object to be bonded and a bonding surface of the other object to be bonded, the holding apparatus holding the one object to be bonded. A shaking table, a holding member that holds the bonding surface of the other object to be bonded in parallel with the excitation direction, and a first pressurizing unit and a second pressure member that pressurize via the holding member that holds the other object to be bonded. minute to provide a pressing means, said under pressure by the first pressurizing means, one of a vibration control means for Ru vibrating the shaker table for holding a object to be bonded, by the shaker table, the vibrations of small amplitude Vibration control means, and the whole surface is joined by further pressurization by the second pressurizing means while applying the vibration of the minute amplitude at atmospheric pressure and at room temperature without heating.

It invention according to claim 2, a joining device for metal according to claim 1, the vibration control means Ru by vibrating the shaker table is a Lissajous control means for performing a two-dimensional abrasive of insect point Lissajous It is characterized by.

  The invention according to claim 3 is the metal joining apparatus according to claim 1, wherein the vibration table is an XY table, and the lower surface of the X table of the vibration table and the lower surface of the Y table have an X axis. A V-V chevron convex portion serving as a guide and a Y-axis guide is formed, or a combination of V-flat serving as an X-axis guide and a Y-axis guide on the lower surface of the X table and the lower surface of the Y table of the vibration table. The at least one V-shaped convex portion is formed on at least one side, and the X-axis and Y-axis drives are linear motors.

  The invention according to claim 4 is the metal joining apparatus according to claim 1, wherein the first pressurizing means is pneumatically driven by a pneumatic cylinder.

  The invention according to claim 5 is the metal joining apparatus according to claim 1, wherein the second pressurizing means is hydraulically driven by a hydraulic cylinder.

The invention according to claim 6 is the metal joining apparatus according to claim 2 , wherein the two-dimensional polishing of the deathless Lissajous is based on synchronous control of the X table and the Y table.

The invention according to claim 7 is the metal joining apparatus according to claim 2 , wherein an amplitude of the two-dimensional polishing of the non-dead point Lissajous is in a range of ± 10 mm, and the fineness of the non-dead point Lissajous at the time of joining is small. The amplitude of vibration is in the range of ± 1 mm.

  The invention according to claim 8 is the metal joining apparatus according to claim 1, characterized in that a partition for covering is attached to the joint portion of the object to be joined.

  The invention according to claim 9 is a joining method using the metal joining apparatus according to claim 1, wherein the joining surface is activated by parallel couple polishing while applying a Lissajous sweep to the one object to be joined. A first step of a couple polishing method to be performed, and a second step of pressurizing at a stretch while applying a vibration with a minute amplitude at room temperature in an atmospheric pressure, and bonding the entire surface.

  The invention according to claim 10 is the bonding method according to claim 9, wherein as the pretreatment of the first step, the bonding surface is immersed in a surfactant and subjected to surface activation treatment by ultrasonic cleaning. A process is provided.

The invention according to an eleventh aspect is the joining method according to the tenth aspect, characterized in that as a pretreatment of the step B, an A step for performing shot peening on the joint surface is provided.

  The invention according to claim 12 is the joining method according to claim 9, characterized in that a C step of inserting a mediating material between the joining surfaces is provided as a pre-step of the first step. (No vacuum, room temperature without heating)

  The invention according to claim 13 is the joining method according to claim 9, wherein when the object to be joined is a cylinder block, a cylinder bore is overlaid on the cylinder head, and the joining surfaces of the cylinder bore and the cylinder head are joined together. It is characterized by that.

The invention according to claim 14 is the joining method according to claim 9, wherein the pressure applied by the first pressurizing means is 30 KPa ( 0.3 kgf / cm ² ) to 1 MPa (10 kgf / cm ² ). There, pressure by the second pressure means ^may be 1MPa (10kgf / cm 2) ~30MPa (300kgf / cm 2).

The invention according to claim 15 is the bonding method according to claim 9, wherein the Lissajous sweep is
The XY table slides while drawing a non-dead-point Lissajous figure by the Lissajous control means.

  The invention according to claim 16 is the joining method according to claim 9, wherein the parallelism of at least one of the joining surfaces of the objects to be joined is ± 0.010 mm with respect to the bottom surface or the top surface of the objects to be joined. It is characterized by being.

According to the metal bonding apparatus according to claim 1, the vibration table that holds one object to be bonded, the holding member that holds the bonding surface of the other object to be bonded in parallel with the vibration direction, and the other A first pressurizing unit and a second pressurizing unit that pressurize via a holding member that holds the object to be bonded, and a vibration table that holds one of the objects to be bonded in a pressurized state by the first pressurizing unit. a vibration control means for Ru by vibrating, by the shaker table, and the minute vibration control means for vibrating the small amplitude, comprises a, at atmospheric pressure, at room temperature without heating, while applying the vibration of the small amplitude, The second pressurizing means can provide a metal joining apparatus with reduced manufacturing costs.
In addition, the vacuum conditions required for conventional bonding equipment have been improved to atmospheric pressure, the heating conditions have been improved to room temperature to reduce the manufacturing costs of the joining equipment, and By adopting an extremely efficient couple polishing method in which activation is performed by parallel couple polishing, it is possible to provide a metal bonding apparatus that can be widely used in the industrial field.

According to the bonding apparatus of the metal according to claim 2, the vibration control means Ru vibrating the shaker table, by a Lissajous control means for performing a two-dimensional abrasive of insect point Lissajous, no insect point of (stop) the desired The Lissajous figure can be controlled to vibrate the vibration table and perform two-dimensional polishing.

According to the metal joining apparatus of the third aspect, the vibration table is an XY table, and the V-V that becomes the X-axis guide and the Y-axis guide on the lower surface of the X table and the lower surface of the Y table of the vibration table. Or a V-shaped convex portion on at least one of the V-flat combination as an X-axis guide and a Y-axis guide on the lower surface of the X table and the lower surface of the Y table of the shaking table. The X-axis guide on the lower surface of the X table of the vibration table is formed with a plurality of V grooves and V-shaped convex portions, and the X table and the Y-axis drive are linear motors. A plurality of V-grooves and V-shaped protrusions are formed on the Y-axis guide on the lower surface, and the X-axis and Y-axis drive are linear motors. Therefore, the rigidity of the XY table is high and the drive backlash is extremely small. Therefore, the accuracy is high, 2D polishing insect point Lissajous by linear motors can be easily,
Easy to join all over.

  According to the metal joining apparatus of the fourth aspect, the first pressurizing means is necessary for parallel polishing for activating the joining surface by moving the holding member downward by pneumatic driving by the pneumatic cylinder. A predetermined light load can be applied.

  According to the metal joining apparatus of the fifth aspect, the second pressurizing means can apply a predetermined heavy load pressure during the whole surface joining by hydraulic driving by the hydraulic cylinder.

  According to the metal joining apparatus of the sixth aspect, the two-dimensional polishing of the dead-point Lissajous can be performed so that high-precision flatness can be achieved over the entire surface by synchronous control of the X table and the Y table. .

  According to the metal bonding apparatus of the seventh aspect, since the amplitude of the two-dimensional polishing of the dead-point Lissajous is in the range of ± 10 mm, the polishing can be performed while suppressing the diffusion bonding. In addition, by setting the amplitude of the minute vibration of the dead-free Lissajous at the time of joining within a range of ± 1 mm, it is possible to join the whole surface with good sitting. The range where the amplitude is ± 10 mm means a range of amplitude of −10 to +10 in total 20 mm, and the range of ± 1 mm means the range of amplitude of −1 to +1 in total 2.0 mm.

According to the metal joining apparatus of the eighth aspect, the partition for covering is attached to the joint portion of the object to be joined, so that nitrogen gas or inert gas is supplied into the partition and oxygen gas is excluded. In addition, since the activation of the bonding surface can be maintained, the entire bonding surface can be bonded.
This is effective for Lissajous two-dimensional polishing using an XY table shaking table and for whole surface bonding.

  According to the joining method according to claim 9, the joining method using the metal joining device according to claim 1 is performed by couple polishing which is a two-dimensional polishing of the joining surface while applying a Lissajous sweep to one object to be joined. By a bonding method including a first step of a couple polishing method for activation, and a second step of bonding the entire surface by applying pressure at a stretch while applying vibration of a minute amplitude at room temperature in an atmospheric pressure without heating at room temperature in an atmospheric pressure, A joining method that can be widely used in the industrial field by reducing the manufacturing and equipment costs by improving the vacuum, which has been considered an essential requirement of the joining method, to atmospheric pressure and improving the heating conditions to room temperature. Can be provided. In addition, couple polishing can be performed very efficiently by the first step of the couple polishing method in which the objects to be joined are brought into contact with each other and activated by parallel couple polishing.

  According to the bonding method according to claim 10, as a pretreatment of the first step, by providing a B step of immersing the bonding surface in a surfactant and performing surface activation treatment by ultrasonic cleaning, Dirt (contamination) can be removed and the joint surface can be activated.

  According to the joining method according to claim 11, as a pretreatment of the B step, by providing the A step for performing shot peening on the joining surface, a compressive residual stress is generated on the joining surface and the strength of the material is increased. Can do. Further, for example, in the case of bonding between Al—Si materials, by performing shot peening on the bonding surface of the Al—Si material, a plastic fluidized layer is formed on the surface of the Al—Si material, which hinders polishing and bonding. Since Si is crushed and pushed from the surface to the back, high quality bonding with less voids at the bonding interface can be achieved.

According to the joining method according to claim 12, Si that inhibits couple / parallel polishing between Al—Si materials by providing a C step of inserting a mediator between the joining surfaces in the previous step of the first step. The entire surface can be easily joined by reducing the influence of the above.
Note that no intermediate material is required for the joint surface Wf subjected to the shot peeling process.

  According to the joining method of the thirteenth aspect, when the object to be joined is a cylinder block, the cylinder bore is overlapped on the cylinder head, and the joining surfaces of the cylinder bore and the cylinder head are joined together, so that the conventional bolt and bolt tightening operation are performed. Bolt seats, bolt through holes and screw holes can be eliminated. Further, since there is no deformation of the cylinder hole due to the fastening force of the bolt, the sliding resistance of the piston is reduced, and the fuel efficiency of the engine can be improved. Furthermore, since heat generation due to frictional heat can be reduced, engine cooling fins can be made unnecessary, and the weight of the engine cylinder block Wc can be further reduced.

According to the joining method according to claim 14, the pressure applied by the first pressurizing unit is 30 KPa ( 0.3 kgf / cm ² ) to 1 MPa (10 kgf / cm ² ), and the pressurizing force applied by the second pressurizing unit. ^is because it is 1MPa (10kgf / cm 2) ~30MPa (300kgf / cm 2), first pressure means is suitably pneumatic cylinder, second pressure means hydraulic cylinder is preferred. Further, since the pressure is lower than that of the conventional pressurizing force, the weight can be further reduced while the rigidity of the joining device is provided.

  According to the joining method of the fifteenth aspect, the Lissajous sweep can easily select the Lissajous figure and control the magnitude of the amplitude by the Lissajous control means for controlling the operation of the X table and the Y table of the XY table.

  According to the joining method of the sixteenth aspect, since the parallelism of the joining surface of at least one object to be joined is ± 0.010 mm with respect to the bottom surface or the top surface of the object to be joined, the polishing process of the Lissajous sweep is biased. This is performed over the entire surface of the joint without any gap, and the entire surface can be joined.

It is a front view of a joining apparatus. It is a side view of a joining apparatus. FIG. 4A is an explanatory diagram illustrating the installation of the partition, where FIG. 5A is an open state of the partition and FIG. 5B is a closed state of the partition. It is an expanded sectional view of the AA line shown in FIG. It is explanatory drawing which shows the conventional assembly method of the cylinder block which is an example of a workpiece | work. (A) is explanatory drawing which shows the assembly method of the cylinder block improved by the joining apparatus and joining method of this invention, (b) is a perspective view which shows the shape of a mediating material. It is a graph which shows the two-dimensional figure of Lissajous. The bonding method is shown, (a) is a block diagram of the bonding method of the present invention, and (b) is a block diagram in which the A process and the B process are added as the previous processes of the first process and the second process of the present invention. It is a block diagram of another joining method which inserts a mediator. It is a schematic diagram which shows the principle of a shot peening process.

Embodiments of the present invention will be described in detail with reference to the drawings.
FIG. 1 is a front view of a portal-shaped joining device, and FIG. 2 is a side view. As shown in FIGS. 1 and 2, in this embodiment, a workpiece W to be joined will be described by taking a cylinder bore Wa and a cylinder head Wb constituting a cylinder block Wc of a gasoline engine of an automobile as an example.
It should be noted that the cylinder head Wb is set downward because the joint surface Wf is disposed closer to the vibration table 14.

As shown in FIG. 1 and FIG. 2, the frame of the joining apparatus 10 includes a bed 1, posts 2, 2 with improved accuracy such as rigidity, flatness, and perpendicularity, and a beam 3 that connects the posts 2, 2. A shape is formed, and each connecting portion is fixed by welding and bolts. Further, the gate-shaped opening 2b is widely opened in preparation for replacement work of the cylinder block Wc and loading and unloading of the cylinder block Wc by the material hand robot. Further, a vibration table (XY table) 14 is disposed on the bed 1, and a first pressure unit 6 and a second pressure unit 7 are provided on the beam 3 directly above the vibration table (XY table) 14. Has been placed.
That is, in the joining device 10, the vibration table 14 that holds one cylinder head Wb is disposed on the upper surface of the bed 1. The slide head 4 as a holding member holds the other cylinder bore Wa . In addition, the first pressurizing unit 6 and the second pressurizing unit 7 that pressurize the joint portion We through the slide head 4, and the vibration table that holds the cylinder head Wb in a pressurized state by the first pressurizing unit 6. The vibration control means 8 that vibrates 14 and the minute vibration control means 9 that gives minute vibrations by the vibration table 14 are provided.

<Work W>
FIG. 5 is an explanatory view showing a method for assembling a cylinder block of a conventional automobile engine. As shown in FIG. 5, the conventional cylinder block Wγ employs a bolt fixing system in which a cylinder head Wβ is superposed on the upper surface of a cylinder bore Wα and fastened together with four bolts Wδ.
In addition, the automobile engine is made of aluminum (Al) for weight reduction, but pure aluminum is easy to wear, so silicon (Si) is mixed to improve wear resistance, and Al-Si alloy is used. Adopted. Therefore, the conventional cylinder block Wγ is an AL alloy casting. Further, the conventional cylinder block Wγ is provided with fins on the outer periphery for heat dissipation.
However, when the cylinder bore Wα and the cylinder head Wβ are fastened by the four bolts Wδ, the cylinder hole processed with high accuracy is deformed, and the roundness of the cylinder hole is lowered. As a result, fuel efficiency is lowered, and CO ₂ reduction of exhaust gas is also affected.

FIG. 6A is an explanatory view showing a cylinder block assembling method improved by the joining apparatus and joining method of the present invention.
As shown in FIG. 6A, the cylinder bore Wa and the cylinder head Wb, which are workpieces W, have no fins and no bolt through holes. The point that the four bolts Wδ themselves are unnecessary is greatly different from FIG.
Since the cylinder bore Wa and the cylinder head Wb are joined together by diffusion of atoms in the metal joint instead of fastening with the four bolts Wδ, the cylinder hole machined with high accuracy is not deformed. The roundness of the hole is maintained. As a result, the fuel efficiency is improved, and the effect of reducing exhaust gas CO ₂ is also exhibited. Further, since generation of frictional heat of the piston can be reduced, and air cooling fins can be made unnecessary, the weight of the cylinder block Wc can be reduced.
And the cylinder bore Wa lower stage shown in FIG. 6, the material of the cylinder head Wb of the upper stage, the same silicon is the Al-Si based alloy with each other are mixed, the entire surface bonding the two.
The cylinder bore Wa and the cylinder head Wb are fixed by a clip or the like (not shown) in a state where they are overlapped in phase, and are carried into the joining apparatus 10.
As shown in FIG. 1, the reason why the cylinder bore Wa and the cylinder head Wb are inverted in the vertical direction is that the thickness of the cylinder head Wb is smaller when the thicknesses of the cylinder bore Wa and the cylinder head Wb are compared. In view of the improvement in stability during parallel polishing, it is advantageous to bring the position of the vibration stress and the distance between the joint load portions as close as possible to bring the joint portion We close to the upper surface of the X table 14e of the vibration table 14. From this point, a thin cylinder head Wb is fixed to the lower stage, and a thick cylinder bore Wa is mounted to the upper stage.
Further, the end plate 6m is inserted into the hole of the cylinder bore Wa and receives the force of the hydraulic cylinder 7a.

<Excitation table 14>
As shown in FIG. 1, the horizontal shaking table 14 is mounted on the upper surface 1a of the bed 1 that forms the gate-shaped opening 2b. The vibration table 14 is an XY table.
The XY table 14 is a table having a size of 500 to 800 mm square, for example, and a size of 760 mm square is preferable here.
The XY table 14 includes a base 14a, a Y-axis linear motor 14b arranged on the base 14a, a Y table 14c movable in the Y-axis direction by the Y-axis linear motor 14b, and an X arranged on the Y table 14c. An axis linear motor 14d and an X table 14e movable in the X-axis direction by the X-axis linear motor 14d are configured.
Two rows of V-grooves 14f and V-shaped projections 14g are formed on the lower surfaces of the Y table 14c and the X table 14e, and constitute a rigid linear motion guide via a needle roller 14h.
A lower mounting jig 14i is disposed on the upper surface of the X table 14e, and the cylinder head Wb is fixed by the lower mounting jig 14i.
An upper mounting jig 4k that holds the cylinder bore Wa is disposed on the lower surface of the holding member (slide head) 4, and the cylinder bore Wa is clamped and fixed.
The parallelism of the X table 4e with respect to the base 14a of the vibration table 14 is preferably ± 5 μm, which is as close to zero (0) as possible.

As shown in FIG. 1, the Y-axis linear motor 14b includes a fixed part and a movable part in detail, and indicates the fixed part. The fixed part is a fixed magnet plate that generates a magnetic field, and the movable part is a movable slider in which the coil winding and its cooling part are integrated. In addition, a V-shaped guide for the V-groove 14f and V-shaped convex portion 14g for supporting the table, a linear scale (not shown) for detecting the position of the table, a cable carrier for supporting the motor and the movable cable to be connected ( Etc.), each of which is also provided for the X-axis linear motor 14d.
A feature of the Y-axis linear motor 14b and the X-axis linear motor 14d is that the motor itself generates thrust by magnetic attraction.
In addition, it is good also as a structure which provided the mountain-shaped convex part of V in at least one by the combination of V-flat, without being restricted to the mountain-shaped convex part of VV.
For example, the maximum thrust of a model Lis17000C3 / 2 manufactured by Sakai is 17,000 N and the magnetic attractive force is 51,000 N. The needle roller 14h disposed on both sides of the motor receives this magnetic attractive force. Model FTW10097ccb-500 has a basic dynamic fixed load 1.68MN and a basic fixed static load 6.18MN, and has a large load resistance. Further, the motor itself may be bent by the magnetic attractive force.
Therefore, by adopting a structure in which the bending due to the suction force of the Y table 14c and the X table 14e is canceled up and down, the upper and lower deflections are offset to minimize the influence of the suction force.

<Characteristics of XY table 14 employing linear motor>
As shown in FIG. 1, two rows of V-grooves 14f and V-shaped convex portions 14g are formed on the lower surface of the Y table 14c, and a needle roller 14h that is movably guided in the Y-axis (front-rear) direction is mounted. ing. With this needle roller 14h, the friction coefficient of the Y table 14c can be made 0.005 or less.
Similarly, the X table 14e can similarly have a friction coefficient of 0.005 or less.
Note that the Y-axis linear motor 14b and the X-axis linear motor 14d do not interfere with the posts 2 and 2 because there is no extreme protrusion of the motor unlike the servo motor.
Furthermore, since there is no ball screw or nut, the positioning accuracy is not adversely affected by these inertia forces, and the positioning accuracy can be improved. Further, since the ball screw is not used, the screw shaft is not twisted by the rotational torque. Also, backlash management between the ball screw and the nut can be eliminated.
As a result, the XY table 14 employing the linear motor can improve the response at the time of starting and stopping and increase the speed compared to the XY table employing the servo motor.
It should be noted that in the no-dead-center Lissajous vibration operation, the linear servos 14b and 14d have an important position that affects the bonding performance.

<Sliding head 4 of holding member>
As shown in FIG. 1, the slide head 4 is configured such that a guide nut 4 b is slidably fitted to guide rails 2 c arranged on posts 2 at both left and right ends, and is moved up and down by a central vertical movement device (Z axis) 5. Move in the direction.
The slide head 4 stands by above the opening 2b, and when the workpiece W is carried in, the cylinder bore Wa is fixed by an upper mounting jig 4k fixed through the plate 4a. Further, the joining surface Wf of the joining portion We with the cylinder head Wb is lightly pressed from the upper surface of the end plate 6m of the cylinder bore Wa with a predetermined pressure (first step). Further, the bonding surface Wf is strongly pressed with a predetermined pressure (second step).

<Vertical moving device 5>
FIG. 4 is an enlarged cross-sectional view taken along line AA shown in FIG. As shown in FIG. 4, the vertical movement device 5 controls the vertical movement of the slide head 4.
This vertical movement device 5 is composed of a pneumatic cylinder 6a of the first pressurizing means 6 arranged in the lower stage and a hydraulic cylinder 7a of the second pressurizing means 7 arranged in the upper stage, and is integrally formed. Yes.

<First pressurizing means 6>
The first pressurizing means 6 is a pneumatic cylinder 6a and operates during the first step.
As shown in FIG. 4, the first pressurizing means 6 includes a pneumatic cylinder 6a, a pneumatic piston 6b that is fitted to the pneumatic cylinder 6a and is movable up and down, and a pneumatic pressure coupled to the pneumatic piston 6b. It is mainly composed of a piston rod 6c, an end plate 6f that closes a lower portion of the pneumatic piston rod 6c, and a threaded portion 6d that extends to the slide head 4. A pusher 6g made of urethane rubber that is fixed to the slide head 4 that moves up and down by the threaded portion 6d and the nut 6n and that softens the impact is connected.
As a result, when predetermined high-pressure air is supplied from the air supply port of the hose joint c of the pneumatic cylinder 6a, the pneumatic piston rod 6c integrated with the pneumatic piston 6b and the slide head 4 integrated with the threaded portion 6d are moved downward. The upper surface of the cylinder bore Wa is lightly pressed with a predetermined pressure through the pusher 6g.

<Second pressurizing means 7>
The second pressurizing means 7 is a hydraulic cylinder 7a and operates at the time of joining in the second step.
As shown in FIG. 4, the second pressurizing means 7 includes a hydraulic cylinder 7a, a hydraulic piston 7b that is fitted to the hydraulic cylinder 7a and is movable up and down, a hydraulic piston rod 7c connected to the hydraulic piston 7b, It is mainly composed of an end plate 7d for closing the lower side of the hydraulic piston rod 7c, a fixing flange portion 7f, and an upper end plate 7e for closing the upper end portion of the hydraulic piston 7b.
As a result, when a predetermined high pressure hydraulic oil is supplied from the hydraulic oil supply port of the hose joint a of the hydraulic cylinder 7a, the hydraulic piston rod 7c integrated with the hydraulic piston 7b is instantaneously pushed downward, and the above-described pneumatic piston 6b is brought into contact with the pneumatic piston rod 6c, and the upper surface of the cylinder head Wb is strongly pressed with a predetermined pressure through the pusher 6g, and the joint surface Wf of the joint portion We of the cylinder head Wb and the cylinder bore Wa is strongly applied. Pressure, resulting in diffusion bonding.
For example, the hydraulic cylinder 7a can be adjusted within a range of 20 tons in the specification of the hydraulic pressure 7.5 MPa and 56 tons in the specification of the hydraulic pressure 21 MPa. Here, 20 ton is suitable.

<Vibration control means>
As shown in FIG. 1, the vibration control means 8 vibrates the vibration table 14.
<Lissajous control means>
As shown in FIG. 1, the Lissajous control means 8 is related to a vibration table (XY table) 14. The Lissajous control means 8 includes a vertical axis y = Bsin (bt + δ) by a Y-axis linear motor 14b of a back-and-forth movement means (Y-axis) 13 of a vibration table (XY table) 14 and a left-right movement means (X-axis) 12. This is synchronous control with the horizontal axis x = A cos (at) by the X-axis linear motor 14d.
<No dead center Lisajou>
FIG. 7 is a chart showing a two-dimensional figure of Lissajous. Lissajous figure can be drawn various figures by 2 type described above. A Lissajous figure is a figure of a locus of points obtained by two simple vibrations perpendicular to each other.
As shown in FIG. 7, the vertical axis represents a: b, and the horizontal axis represents phase difference (angle) δ, which shows five types of figures. For example, when a: b = 1: 1 and δ = 0, the locus of the point is a line inclined at 45 degrees. In this case, as in the case of δ = π, the movement is turned back at the end of the line, so that the line end is stopped (dead point). If there is a stop state (dead point), diffusion bonding is likely to occur at the stop position, so it is unsuitable for polishing sliding and cannot be employed.
The no-dead-point Lissajous refers to a figure without stopping, for example, a Lissajous figure with δ of π / 4 to 3π / 4. It is possible to adopt a dead-point Lissajous without a stop state (dead point).
The two-dimensional polishing by the two-dimensional figure of the dead-point Lissajous is in a stopped state with no dead point, so that diffusion bonding is difficult to occur, and is suitable for polishing sliding before bonding.

<Lissajous sweep>
In the Lissajous sweep, the XY table 14 is controlled by the Lissajous control means 8 in the chart showing the two-dimensional figure of Lissajous shown in FIG. 7, for example, at a ratio of 2: 3, δ = π / 4 or δ =
When 3π / 4, there is no stop state (dead point), and the Lissajous 2 is a more detailed figure.
This refers to an operation of pushing and pulling one of the objects to be joined Wb in accordance with the dimension figure.
That is, the Lissajous sweep is a pressurized state by the first pressurizing means 6, and one of the articles Wb to be joined.
The exciter (XY table) 14 holding the surface performs parallel polishing while drawing the two-dimensional figure of the dead-dead Lissajous by the Lissajous control means 8.
As shown in FIG. 1, the vibration table (XY table) 14 operates in such a manner that the amplitude of the two-dimensional polishing of the deathless Lissajous in the first step is within a range of ± 10 mm, and the dead point at the time of joining in the second step. The X table 14e and the Y table 14c are repeatedly moved within a range of ± 1 mm in the small amplitude vibration of Lissajous.
Joining of the joint surface Wf of the cylinder head Wb fixed to the lower mounting jig 14i disposed on the upper surface of the X table 4e and the cylinder bore Wa fixed to the upper mounting jig 4k of the lower surface of the holding member (slide head) 4 The parallelism of the surface Wf is ± 0.010 m. Like the accuracy of the vibration table 14, ± 5 μm, which is as close to zero (0) as possible, is suitable. The joining surface of the cylinder head Wb to be polished By maintaining a parallel state of Wf and the joint surface Wf of the cylinder bore Wa with respect to the shaking table 14, parallel polishing becomes possible, and the space (hole) formed on the tissue surface is eliminated, and the dirt is removed. It is possible to activate the joint surface Wf.
Furthermore, the merit of reducing the amount of movement of the X table 14e and the Y table 14c is that the pitching is suppressed, thereby advantageously operating in parallel polishing.

<Micro vibration control means 9>
The minute vibration control means 9 refers to a control means for making a Lissajous figure fine and vibrate. The amplitude is preferably 5 μm to 100 μm. These minute vibrations can be easily changed by a control program for the X-axis and Y-axis linear motors.
The minute vibration control means 9 gives a minute amplitude vibration to the cylinder head Wb by the minute vibration control means 9 for a few seconds immediately before pressurization by the second pressurizing means 7 for full-surface joining, and the joining surface Wf of the joining portion We with the cylinder bore Wa. In FIG. 5, a position where the atomic arrangement is satisfactorily found is found, and after a few seconds, pressurization is performed at a stretch by the second pressurizing means 7 to realize full-surface bonding.
Thereby, the assembly by the whole surface joining of the cylinder block Wc is completed.

<Partition 17>
The overall shape of the partition 17 is circular in plan view as shown in FIG. As shown in FIG. 1, the cross-sectional shape is a U-shape, and covers the joint portion We with a minimum space. The partition 17 is also called a purge belt for expelling oxygen.
FIGS. 3A and 3B show the installation of the partition 17, where FIG. 3A is an explanatory view showing an open state of the partition 17 and FIG. 3B is a closed state of the partition.
As shown in FIG. 3A, the partition 17 can be deformed by a rubber purge belt, and is connected by one. The partition 17 is provided with, for example, four supply ports e to h for supplying nitrogen gas, increasing supply efficiency, expelling air, filling the nitrogen gas, and preventing the joining surface Wf from being oxidized. .
As shown in FIG. 3B, the partition 17 is mounted in a circular shape so as to cover the joint portion We of the workpiece W in advance by pre-setting, and the handle 17b is fixed by a clip 17c. After mounting, the workpiece W is carried into the joining apparatus 10.
After carrying in to the joining apparatus 10, nitrogen gas is supplied to the chamber 17a formed by the partition 17 from the supply ports e to h, and the air in the chamber 17a is replaced with nitrogen gas, thereby forming an oxide film Drive out the oxygen (air) that becomes.
The partition 17 is formed in an arc shape in plan view and is divided into one.
As shown in FIG. 1, the partition 17 has a substantially U-shaped cross-section, but may have other cross-sectional shapes such as a semicircle, an ellipse, and a polygon. By covering the outer periphery of the joint with a minimum surface area, air can be replaced with, for example, nitrogen gas with a minimum amount of gas supply, so that an oxidation-prevention state is formed at a minimum cost, and the conditions for the entire surface bonding are reduced. I can arrange it.
The partition 17 may be divided into two. The arcuate partition 17 may be automatically opened and closed by connecting two arcuate shapes with hinges and utilizing the expansion and contraction operations of the cylinder rods of the two pneumatic cylinders.

Here, the joining method of the present invention will be described in detail.
<Join method of the first step and the second step>
FIG. 8A is a block diagram of the bonding method of the present invention.
As shown in FIG. 8A, the joining method using the metal joining apparatus 10 is as follows.
In the first step, a couple polishing method is performed in which the joining surface Wf is activated by parallel couple polishing while applying a Lissajous sweep to one workpiece Wb (S1).
In the second step, the whole surface is bonded by applying pressure by the second pressurizing unit 7 at a time while applying a minute vibration and activating the bonding surface at room temperature in an atmospheric pressure that is not in a vacuum state and at a room temperature without a heating device (S2). ).
That is, after the workpiece W is set in the bonding apparatus 10, the pressure is applied at a stretch while applying a minute amplitude vibration from the minute vibration control means 9 of the vibration table 14 in an atmospheric pressure that does not require a vacuum apparatus and at a room temperature that does not require a heating apparatus. , Join the whole surface.
In the first step and the second step, as shown in FIG. 3 in advance, a partition 17 that covers the joint portion We of the workpieces Wa and Wb is mounted, and the chamber 17a in which the partition 17 is mounted is mounted. Nitrogen gas is supplied, air containing oxygen gas is discharged, and it is quickly replaced.

In conventional diffusion bonding, a vacuum state is formed in a vacuum apparatus, the oxide film layer is removed by argon ion milling (Ar plasma treatment) in a high vacuum, the surface is activated, and then the bonding portions are bonded in vacuum. Are joined together, and are joined by diffusion bonding by applying pressure with a strong pressure. For example, surface activated diffusion bonding.
However, the present invention is, by providing the vibration of small amplitude from shaker table 14, the convex portion into fine recesses of the joint surface Wf, the minute projections improve sitting by written Ri or fitting recess you.
Thus, by giving the opportunity to find a good sitting position between the joint surfaces (microvibration in the first half of the second step), the conditions such as the vacuum state and the heating by the heating device, which were the essential conditions so far, are as follows: It turns out that everything can be made unnecessary.
For example, as has been experienced in crowded trains crowded every day, forcibly shake by accelerator or brake, etc., each person finds a good sitting position and finds a good sitting position To make space. This is similar to the phenomenon where gaps are created where there are no gaps, and the crowding of cramming changes completely, leaving room for room.
The purpose of the parallel polishing is to remove the space (holes) and dirt on the bonding interface, and to flatten and activate the bonding interface. In parallel polishing, in order to improve the adhesion between the activated interfaces at the time of bonding, it is a major purpose to adjust the environmental conditions of the bonding interface.
It should be noted that the bonding phenomenon during the parallel polishing is that if there is a stopped state (dead point) in the operation, partial bonding occurs and the joint interface is roughened. It is desirable to perform polishing and activation with pressure.
In this way, the environmental condition of the bonding interface is adjusted, and in order to realize high-quality bonding by the bonding interface, by applying vibration with a small amplitude in a pressurized state, the adhesion degree of the bonding interface is increased and high-quality bonding is achieved. Diffusion bonding can occur. This joining method is an unprecedented rational joining method and is one of the innovations of the present invention.

FIG. 8B is a block diagram of another bonding method.
The joining method of the present invention will be described in detail, and redundant description will be omitted.
<Surface activation treatment with surfactant and ultrasonic cleaning>
FIG. 8B is a block diagram in which a process A and a process B are added as a preceding process of the first process and the second process.
Step B is a pretreatment step of the first step, where the bonding surface Wf of the bonding portion We of the workpiece W is immersed in a surfactant provided in the container, and surface activation processing is performed by ultrasonic cleaning (S2).
In addition, B process is separately performed outside the apparatus before carrying the workpiece | work W in the joining apparatus 10. FIG.
Thus, you may add a pre-process.
In the case of a process that dislikes the use of liquid, Ar plasma may be selected. As a method not using a surfactant, there is an argon ion milling cleaning method at normal pressure, which may be replaced.

<Apply shot peening>
As shown in FIG. 8B, in step A, shot peening is performed on the joint surface Wf (S1). In addition, although A process is performed outside the apparatus of the joining apparatus 10 separately, you may add a previous process in this way.
For example, when the material of the workpiece W is an Al—Si material, the environment of the joint surface Wf can be changed by performing shot peening on the joint surface Wf.
That is, when the shot peening process is performed on the joint surface Wf, a plastic fluidized layer is formed on the surface of the Al—Si material, and Si that may interfere with the joint precipitates from the surface to the inside. Therefore, even if some unevenness is formed, the bonding can be performed at the contact portion of the bonding surface Wf. Furthermore, since compressive residual stress can be generated by shot peening, the strength of the material can be increased.

<Shot peening>
FIG. 10 is a schematic diagram showing the principle of shot peening.
As shown in FIG. 10, shot peening processing, mainly when projecting a small steel balls 15 called steel shot on the surface of the steel 16, work hardening layer 16a of the plastic flow layer by plastic deformation is formed, the surface stress The processing which aims at equalization and further imparting residual compressive stress. Here, instead of the steel 16, shot peening is performed on the joint surface Wf (see FIG. 1) of the cylinder block Wc cast with an Al-Si material.
Specifically, the shot steel ball 15 preferably has a diameter of 20 to 200 μm, a projection pressure of 0.8 MPa, and a projection density of 900 to 8100 kg · m ⁻² .
This is applied to, for example, a bonding surface of an Al—Si material.

<Insert mediator Wd between joint surfaces>
The joining method of the present invention will be described in detail, and redundant description will be omitted.
FIG. 9 is a block diagram of another joining method for inserting a mediator.
As shown in FIG. 9, the difference from the above-described FIG. 8A is that a new C process is added to the previous process of the first process, and the joining surface Wf of the one workpiece Wb and the other are joined. A C step of inserting the mediating material Wd between the bonding surface Wf of the workpieces Wa is provided (S1).
Specifically, the materials of the lower cylinder head Wb and the upper cylinder bore Wa are Al—Si alloys. A medium Wd (Media: see FIG. 6B), which is a thin plate made of Al, is inserted between the cylinder bore Wa and the cylinder head Wb.
The thickness of the Al foil is preferably 0.1 to 1.0 mm. The thickness of the Al foil is preferably 0.02 to 0.20 mm.
When a pure Al mediator Wd containing no Si is inserted into the joint surface between the Al—Si based alloys, it is as if Si has settled in and is similar to a structure not on the surface. Since it can be made into the structure | tissue which Si does not exist which may interfere with joining, Al-Si type alloys can be easily joined to the whole surface. You may do this.
In addition, when the shot peening process is performed, a mediating material is not necessary for block bonding between Al—Si materials. Another effect of the mediator is to supplement the flatness of the joint.
In other words, when polishing is performed between materials with high hardness of the Al-Si alloy, a mediating material that can fill the unevenness and can be polished and activated is effective.

<Operation of joining device>
(First step)
As shown in FIG. 8B, the workpiece W that has completed the A and B steps is carried into the joining apparatus 10.
As shown in FIG. 8A, the workpiece W is, for example, a cylinder block W composed of a lower cylinder head Wb and an upper cylinder bore Wa.
As shown in FIG. 3B, the partition 17 is attached to the joint portion We of the workpiece W, the handle 17 b is fixed by the clip 17 c, and the attached workpiece W is carried into the joining apparatus 10.
As shown in FIG. 1, a lower mounting jig 14i is disposed on the upper surface of an XY table (vibration table) 14 of the joining apparatus 10, that is, on the upper surface of the X table. The lower mounting jig 14i is, for example, a V block in plan view, and can be easily positioned by pressing the cylinder head Wb from the front to the back against the V block. Then, the front side of the cylinder head Wb is fixed with a holding plate (not shown).
The slide head (holding member) 4 stands by above the opening 2b, and when the workpiece W is carried in, the cylinder bore Wa is fixed by the upper mounting jig 4k. An end plate 6m is inserted into the hole of the cylinder bore Wa.
The upper mounting jig 4k is preferably an electromagnetic chuck, but may be a manual type or other fixing method.
Further, as shown in FIG. 4, when the pneumatic cylinder 6a, which is the first pressurizing means 6 of the vertical movement device 5 extending downward from the beam 3, is actuated, the pneumatic piston rod 6c is lowered, and the cylinder bore Wa is moved. Lightly press with a predetermined pressure downward from the upper surface of the end plate 6m.

  When nitrogen gas is supplied to the chamber 17a formed by the partition 17 and the air in the chamber 17a is expelled to the outside and replaced with nitrogen gas, the lower cylinder head Wb is immortalized by the Lissajous control means 8 of the XY table 14. Two-dimensional polishing is performed by the operation of a two-dimensional figure of point Lissajous.

(Second step)
The lower cylinder head Wb extends downward from the beam 3 while applying a minute amplitude vibration by the Lissajous control means 8 of the XY table 14 to the lower cylinder head Wb for several seconds at room temperature in atmospheric pressure without heating and without providing a vacuum state. When the hydraulic cylinder 7a, which is the second pressurizing means 7 of the vertical movement device 5, is actuated, the hydraulic piston rod 7c is lowered and the upper surface of the cylinder bore Wa is strongly pressed with a predetermined pressure via the end plate 6m. Pressurize to join the entire surface.

The metal joining apparatus and joining method of the present invention eliminates the problems of conventional equipment and enables joining with a simple equipment, thereby reducing manufacturing and equipment costs and widely spreading in the industrial field. And a joining method can be provided.
The present invention is expected as an innovation (technical innovation) that can solve problems such as weight reduction of automobiles, improvement of fuel consumption, and response to the global environment all at once. Here, research and development have been conducted targeting engine cylinder blocks, which are heavy parts of automobile parts, but in addition to this, it is possible to perform full-body joining instead of bolt fastening to multiple parts of automobiles. is there.

The present invention can be variously modified and changed within the scope of the technical idea.
Although the joining device of the present invention is a vertical joining device that stacks the workpieces W on top and bottom and pressurizes from the top and bottom, it is not limited to this, and can be a horizontal joining device that places the workpiece horizontally and pressurizes from the left and right. I do not care.
Further, for example, the vertical movement device 5 is a pneumatic cylinder 6a and a hydraulic cylinder 7a. However, instead of the pneumatic cylinder 6a, a vertical movement drive performed by a known moving mechanism of a servo motor (Z axis) and a ball screw. An apparatus may be employed. A linear motor may be used instead of the ball screw and the servo motor.

1 bed 1a upper surface 2 post 2a upper end 2b opening 2c guide rail 3 beam 3a seat 3b cover 4 slide head (holding member)
4a Plate 4b Guide nut 4k Upper mounting jig 5 Vertical movement device (Z axis)
6 1st pressurizing means 6a Pneumatic cylinder 6b Pneumatic piston 6c Pneumatic piston rod 6d Screw part 6e Lower cover 6f End plate 6g Pusher 6n Nut 6m End cap 7 Second pressurizing means 7a Hydraulic cylinder 7b Hydraulic piston 7c Hydraulic piston Rod 7d End plate 7e Upper end plate 7f Flange 8 Vibration control means (Lissajous control means)
9 Micro-vibration control means 10 Joining device 12 Left-right movement means (X axis)
13 Forward / backward moving means (Y axis)
14 Excitation table (XY table)
14a Base 14b Y-axis linear motor 14c Y-table 14d X-axis linear motor 14e X-table 14f V-groove 14g Mountain-shaped convex part 14h Needle roller 14i Lower mounting jig 15 Steel ball 16 Metal 16a Work hardening layer 17 Partition
17a Chamber 17b Handle 17c Clip W Object to be joined (workpiece)
Wa Cylinder bore Wb Cylinder head Wc Cylinder block (workpiece)
Wd Mediator
We Joint Wf Joint surface a, b Hydraulic hose joint (hydraulic oil supply port)
c, d Pneumatic hose coupling (air supply port)
eh gas hose fittings

Claims (16)

A metal joining device for joining a joining surface of one object to be joined and a joining surface of the other object to be joined,
A vibration table for holding the one object to be joined;
A holding member for holding the joining surface of the other object to be joined in parallel with the excitation direction;
A first pressurizing means and a second pressurizing means for pressurizing via the holding member for holding the other object to be joined;
Under pressure by the first pressure means, a vibration control means for Ru vibrating the shaker table for holding one object to be bonded,
Micro vibration control means for applying micro amplitude vibration by the vibration table;
With
A metal joining apparatus, wherein the whole surface is joined by further pressurization by the second pressurizing means while applying the vibration of the minute amplitude at room temperature without heating in an atmospheric pressure. The shaker table oscillation control means Ru vibrate the the metal bonding apparatus according to claim 1, characterized in that the Lissajous control means for performing a two-dimensional abrasive of steamed point Lissajous.   The shaking table is an XY table, and a V-V angle convex portion serving as an X-axis guide and a Y-axis guide is formed on the lower surface of the X table and the lower surface of the Y table. On the bottom surface of the X table of the shaking table and the bottom surface of the Y table, a V-shaped convex portion is formed on at least one of the V-flat combination as an X-axis guide and a Y-axis guide. The metal bonding apparatus according to claim 1, wherein:   The metal joining apparatus according to claim 1, wherein the first pressurizing unit is pneumatic driven by a pneumatic cylinder.   The metal joining apparatus according to claim 1, wherein the second pressurizing unit is hydraulically driven by a hydraulic cylinder. 3. The metal joining apparatus according to claim 2 , wherein the two-dimensional polishing of the deathless Lissajous is based on synchronous control of an X table and a Y table. The amplitude of the two-dimensional grinding of the insects point Lissajous is in the range of ± 10 mm, the amplitude of the minute vibration of the insect point Lissajous during bonding, according to claim 2, characterized in that in the range of ± 1mm Metal bonding equipment.   The metal joining apparatus according to claim 1, wherein a partition for covering is attached to a joint portion of the object to be joined. A bonding method using the metal bonding apparatus according to claim 1,
A first step of a couple polishing method for activating the bonded surface by parallel couple polishing while applying a Lissajous sweep to the one workpiece;
And a second step of pressurizing the entire surface at a room temperature in an atmospheric pressure while applying a vibration with a minute amplitude.   10. The bonding method according to claim 9, wherein as a pretreatment of the first step, a B step is provided in which the bonding surface is immersed in a surfactant and subjected to a surface activation treatment by ultrasonic cleaning. The bonding method according to claim 10 , wherein a process A for performing shot peening on the bonding surface is provided as a pretreatment of the process B.   The joining method according to claim 9, wherein a C step of inserting a mediating material between the joining surfaces is provided as a pre-step of the first step.   10. The joining method according to claim 9, wherein when the article to be joined is a cylinder block, a cylinder bore is overlapped on the cylinder head, and the joining surfaces of the cylinder bore and the cylinder head are joined together. The pressure applied by the first pressure ^{means, 30KPa (0.3 kgf / cm 2} ) is ~1MPa (10kgf / cm ^2), pressing force of the second pressing means, 1MPa (10kgf / ^cm 2) The bonding method according to claim 9 , wherein the bonding method is ˜30 MPa (300 kgf / cm ² ). The joining method according to claim 9, wherein the Lissajous sweep is performed by sliding the XY table while drawing a non-dead-point Lissajous figure by the Lissajous control means.   The joining method according to claim 9, wherein the parallelism of at least one of the joining surfaces of the objects to be joined is ± 0.010 mm with respect to the bottom surface or the top surface of the objects to be joined.