JP6213664B2 - Suction head and sheet handling device - Google Patents

Description

  The present invention relates to a suction head, and more particularly to a suction head having a suction surface for holding a ceramic green sheet.

  The present invention also relates to a sheet handling apparatus, and in particular, a ceramic having a base having a mounting surface on which a carrier sheet (carrier film) holding a ceramic green sheet is mounted, and a suction surface facing the mounting surface. The present invention relates to a sheet handling apparatus including a suction head that sucks a green sheet.

  When manufacturing a multilayer ceramic electronic component such as a multilayer ceramic capacitor, a ceramic green sheet formed in a carrier sheet shape is prepared, and a ceramic green sheet having a predetermined dimension is cut out and then peeled off from the carrier sheet. And the ceramic green sheet peeled from the carrier sheet is laminated | stacked. An example of a suction head and a sheet handling apparatus that can be used in this step is disclosed in Patent Document 1. According to Patent Document 1, in order to improve the peelability of the carrier sheet, the suction head is connected to a specific one of the suction holes, and an opening larger than the diameter of the suction holes is positioned on the suction surface. The suction grooves are provided so as to be intermittently distributed in the portion corresponding to the peripheral portion of the ceramic green sheet. By forming such suction grooves, it is said that the ceramic green sheet can be reliably and easily peeled off from the carrier film.

JP 2002-254421 A

  However, when the ceramic green sheet is thin, there is a problem that if the opening of the suction groove is larger than the diameter of the suction hole, the ceramic green sheet is damaged.

  Therefore, a main object of the present invention is to provide a suction head and a sheet handling apparatus capable of reliably and easily peeling a ceramic green sheet from a carrier film while suppressing sheet damage due to suction.

A suction head according to the present invention (14: reference numeral corresponding to the embodiment; the same applies hereinafter) is a suction head (14) having a suction surface for holding a ceramic green sheet (20), and the suction surface includes a plurality of suction surfaces. Suction holes (HL, HL,...) And a plurality of grooves (GR, GR,...), The plurality of grooves on at least one side of the end region in the suction surface and on the outer periphery of the suction surface. A suction hole provided in a direction along the suction hole and disposed in an end region of the suction surface among the plurality of suction holes is provided so as to pass through the groove. The groove provided on the outer periphery is provided on the outer side of the outermost suction hole arranged on the outermost side among the plurality of suction holes, and is provided so as to be in contact with the outer periphery of the outermost suction hole . .

  Preferably, the groove width of the groove is smaller than the diameter of the suction hole arranged in the end region in the suction surface.

  Preferably, the distance between the groove provided on the outermost periphery of the suction surface and the end of the suction surface among the plurality of grooves is adjusted by adjusting the groove width of the groove provided on the outermost periphery. Yes.

  Preferably, a connecting groove for connecting the plurality of grooves is further provided.

  Preferably, each of the plurality of grooves has a width direction end portion that is chamfered.

  Preferably, each edge of the plurality of suction holes is chamfered.

A sheet handling apparatus (10) according to the present invention includes a substrate (12) having a mounting surface on which a carrier sheet (18) holding a ceramic green sheet (20) is mounted, and a suction surface facing the mounting surface. And a suction head (14) for sucking the ceramic green sheet, wherein the suction surface includes a plurality of suction holes (HL, HL, ...) and a plurality of grooves (GR, GR, The plurality of grooves are provided on at least one side of the end region in the suction surface in a direction along the outer periphery of the suction surface, and the end in the suction surface among the plurality of suction holes. The suction hole disposed in the partial area is provided so as to pass through the groove, and the groove provided on the outermost periphery of the suction surface among the plurality of grooves is disposed on the outermost side among the plurality of suction holes. Provided outside the outermost suction hole, and on the outer periphery of the outermost suction hole. It is provided to touch .

  ADVANTAGE OF THE INVENTION According to this invention, the suction head and sheet | seat handling apparatus which can peel a ceramic green sheet reliably and easily from a carrier film can be provided, suppressing the sheet | seat damage by suction | attraction.

  The above object, other objects, features and advantages of the present invention will become more apparent from the following detailed description of embodiments with reference to the drawings.

FIG. 1 is a perspective view showing a part of the sheet handling apparatus of the present invention. FIG. 2 is a view of the sheet handling apparatus shown in FIG. 1 when viewed in the Y-axis direction, and shows an example of a state in which a carrier sheet having a ceramic green sheet formed on the upper surface is disposed under the suction head. FIG. FIG. 3 is an illustrative view showing an example of a state in which a ceramic green sheet on a carrier sheet is cut with a cutting blade. FIG. 4 is an illustrative view showing an example of a state in which the cut sheet piece is sucked by the suction head and peeled off from the carrier sheet. FIG. 5A is an enlarged perspective view showing a part of an example of the shape of the suction head, and FIG. 5B is an enlarged view showing a part of a groove and a suction hole provided on the suction surface of the suction head. FIG. 6A is an enlarged plan view showing a part of the suction surface of the suction head. 6B is a cross-sectional view taken along the line AA in FIG. 6A, and FIG. 6C is a cross-sectional view taken along the line BB in FIG. 6A. FIGS. 7A and 7B are cross-sectional views taken along arrows BB in FIG. 6A of the modified groove shape. FIG. 8 is a cross-sectional view of a modification of the groove shape. 8A is an arrow cross-sectional view at a position corresponding to AA in FIG. 6A, and FIG. 8B is a cross-sectional view at a position corresponding to BB in FIG. 6A. FIG. FIG. 9A and FIG. 9B are enlarged plan views showing a part of the suction surface of the suction head of another example. FIG. 10A is an enlarged view showing a part of a groove and a suction hole provided on the suction surface of another example of the suction head. FIG. 10B is an enlarged plan view showing a part of the suction surface of the suction head. FIG. 11 is an enlarged plan view showing a part of the suction surface of the suction head of still another example.

  With reference to FIG. 1, a sheet handling apparatus 10 of this embodiment includes a rectangular parallelepiped base 12. Hereinafter, the X axis, the Y axis, and the Z axis are assigned to the length direction, the width direction, and the height direction of the rectangular parallelepiped forming the base 12.

  A carrier sheet 18 is placed on the upper surface of the substrate 12 (= the surface facing the positive side in the Z-axis direction: hereinafter referred to as “mounting surface”). The carrier sheet 18 has a width corresponding to the width of the base 12 and an arbitrary length, and is intermittently conveyed from the negative side to the positive side in the X-axis direction by a conveyance roller (not shown). A ceramic green sheet 20 is entirely formed on the upper surface of the carrier sheet 18. Hereinafter, the ceramic green sheet 20 is referred to as “green sheet 20”.

  A rectangular parallelepiped suction head 14 is disposed above the base 12. The length direction, the width direction, and the height direction of the rectangular parallelepiped forming the suction head 14 are along the X axis, the Y axis, and the Z axis, respectively.

  The suction head 14 has four side surfaces, and a cutting blade 16 is provided on each side surface. The blade length of the cutting blade 16 coincides with the length or width dimension of the suction head 14. In FIG. 1, only the cutting blade 16 provided on the negative side surface in the X-axis direction of the suction head 14 is illustrated for easy explanation.

  When viewed from the negative side in the X-axis direction, the tip portion of the cutting blade 16 is in the Z-axis direction from the lower surface of the suction head 14 (= surface facing the negative side in the Z-axis direction: hereinafter referred to as “suction surface”) Projects to the negative side of When viewed from the Y-axis direction, the tip of the cutting blade 16 forms an acute angle.

  As described above, the carrier sheet 18 is intermittently conveyed from the negative side to the positive side in the X-axis direction. When one transfer is completed, a downward suction force is generated on the mounting surface of the base 12, and then the suction head 14 is lowered. The green sheet 20 formed on the upper surface of the carrier sheet 18 is cut by a cutting blade when the suction head 14 is lowered (see FIGS. 2 to 3). The size of the main surface of the sheet piece 22 obtained by cutting matches the size of the suction surface of the suction head 14.

  When the cutting of the green sheet 20 is completed, the sheet piece 22 is held on the suction surface by the suction force generated in the suction head 14. The downward suction force generated on the mounting surface of the base 12 is released after the sheet piece 22 is held on the suction surface.

  Thereafter, the suction head 14 is raised to the original position before being lowered. The sheet piece 22 held on the suction surface is peeled off from the carrier sheet 18 and rises as the suction head 14 rises (see FIG. 4). The sheet piece 22 thus peeled off is transferred to another process (= lamination process). The suction force generated in the suction head 14 is released when the sheet piece 22 is moved to another process.

  Referring to FIG. 5, a plurality of suction holes HL and a plurality of grooves GR are formed on the suction surface of suction head 14. The plurality of suction holes HL are connected to a vacuum source (not shown). The plurality of grooves GR are provided in the end region in the suction surface in a direction along the outer periphery of the suction surface. In the figure, the groove GR is provided along the outer periphery of each side in the suction surface and is connected at the four corners, but it may be provided at least on one side. Of the plurality of suction holes HL, suction holes arranged in the end region within the suction surface are provided so as to pass through the groove GR.

  As shown in FIGS. 1 to 4, when the carrier sheet 18 is conveyed in the X-axis direction, the groove GR is preferably provided in the Y-axis direction. When the cut sheet piece 22 is peeled, the sheet piece 22 is gradually peeled from the vicinity of the outer periphery toward the center with respect to the carrier film 18. At this time, since the groove GR is continuously formed on at least one side of the end region of the suction surface, one end of the sheet piece 22 can be fixed over the entire side, and the sheet piece 22 is fixed to the carrier sheet. It becomes possible to peel from 18 stably.

  The opening shape of the suction hole HL is circular, and the groove width of the groove GR is preferably smaller than the diameter of the suction hole HL disposed in the end region in the suction surface. The diameter of the suction hole disposed in the end region is preferably in the range of 0.1 mm to 1 mm. The groove width is preferably in the range of 0.05 mm to 0.5 mm. If the groove GR occupies the same area on the suction surface, for example, it is more difficult to provide a large number of narrow grooves than a few wide grooves, so that the green sheet is less likely to penetrate into the groove during suction. It is preferable because the deformation of the green sheet can be suppressed.

  FIG. 6A is an enlarged plan view showing a part of the suction surface of the suction head shown in FIG. 6B is a cross-sectional view taken along the line AA in FIG. 6A, and FIG. 6C is a cross-sectional view taken along the line BB in FIG. 6A. The depth of the groove GR is preferably in the range of 0.01 mm to 0.5 mm. By providing such a groove, the green sheet can be held by the suction head in a wide (long) region, and the green sheet can be reliably and easily peeled from the carrier film. Further, if a large number of suction holes HL are to be formed in the end region of the suction head, processing is difficult and troublesome, but the grooves can be formed very easily.

  In the present embodiment, the cross-sectional shape of the groove GR in the width direction is a rectangular shape, but as shown in FIG. 7A, the cross-sectional shape may be an arc shape (R shape). It may be V-shaped as shown in 7 (b). It is preferable that the corner portion of the groove has an R shape because the green sheet 20 can be hardly damaged even if the green sheet 20 is deformed so as to be in close contact with the inner surface of the groove GR in the local peeling step.

  Moreover, it is preferable that the both ends of the width direction of the groove GR are chamfered. In the chamfering process, the corners forming the ends are dropped and a curved surface finish is applied. Moreover, it is preferable that each edge of the plurality of suction holes HL is chamfered. When chamfering is performed on the groove GR and the suction hole HL, an arrow cross-sectional view at a position corresponding to AA in FIG. 6A is, for example, in a position corresponding to BB in FIG. For example, as shown in FIG. 8B, the cross-sectional view taken along the arrow shows that the width direction end of the groove GR and the edge of the suction hole HL form a curved surface. By chamfering the edge in the width direction of the groove GR and the edge of the suction hole HL, the force applied to the green sheet is reduced when the green sheet is sucked. This is preferable because sheet damage due to suction can be suppressed.

  When the suction head 14 holds the green sheet 20 as close as possible to the peeling start point of the sheet piece 22, the peeling ability can be improved. Therefore, it is preferable to suck the sheet piece at a position as close as possible to the end of the suction head 14. However, as described above, it is difficult to process the suction hole HL close to the end. Therefore, in order to hold the green sheet 20 (sheet piece 22) closer to the end of the suction surface of the suction head 14, as shown in FIG. 9A, even if the position of the suction hole HL is not changed, The groove GRO provided on the outermost periphery can be provided further outside the outermost suction hole HLO disposed on the outermost side of the suction surface so as to be in contact with the outer periphery of the outermost suction hole HLO. When the outermost peripheral groove GRO is provided in this manner, the sheet piece 22 can be held at the end even though the suction hole arrangement is the same as that in FIG. The position of the groove GRO provided on the outermost periphery of the suction surface is preferably closer to the end of the suction surface. When the groove GRO is near the end of the suction surface, the green sheet can be held as close as possible to the peeling start point, and the peeling ability can be improved.

  Alternatively, as shown in FIG. 9B, the distance between the groove GRO provided on the outermost periphery and the end of the suction surface can be adjusted by adjusting the groove width of the groove GRO provided on the outermost periphery. . Also in this case, similarly to the case of FIG. 9A, the sheet piece 22 can be held at the end portion even though the suction hole arrangement is the same as that in FIG.

  FIG. 10 is a view showing another example of the suction head of the present invention. FIG. 10A is an enlarged view showing a part of a groove and a suction hole provided on the suction surface of the suction head of this example. FIG. 10B is an enlarged plan view showing a part of the suction surface of the suction head. In the end region of the suction surface of this example, a connecting groove GR ′ that connects the plurality of grooves GL is further provided. In FIG. 10, the connecting groove GR ′ is provided in a direction orthogonal to the groove GR, but the shape and direction are not limited to this as long as the grooves GL are connected to each other. By providing the connecting groove GR ′ for connecting the grooves GL in this way, it is possible to provide the groove GR1 that can suck and hold the green sheet 20 (sheet piece 22) without passing through the suction hole. Therefore, by providing the connecting groove GR ', it is possible to adjust the interval and number of grooves regardless of the number and position of the suction holes.

  FIG. 11 is an enlarged plan view showing a part of a suction surface of a suction head of still another example of the suction head of the present invention. As shown in FIG. 11, by providing the connection groove GR ′, the green sheet 20 (sheet piece 22) is sucked and held also in the region at the extreme end of the suction surface where it is difficult to form a suction hole. It is possible to provide a groove GR2 that can be used.

  Thus, since the plurality of grooves GR are provided on the suction surface in the direction along the outer periphery of the suction surface on at least one side of the end region, the ceramic green sheet is suppressed while suppressing sheet damage due to suction. Can be reliably and easily peeled off from the carrier film. For example, when the suction pressure is −60 kPa, a green sheet having a thickness of about 1 to 3 μm can be peeled well, and even a thinner green sheet can be handled by adjusting the suction pressure or the like. is there. This makes it possible to develop thin-layer large-capacity capacitors and the like, and because the processable range in the process prior to the lamination process can be expanded, sheet composition, sheet manufacturing method, sheet characteristics, printing method, electrode By extending the variation of the composition and so on, it became possible to short-circuit the finished product and improve its characteristics.

  Furthermore, since suction area becomes large when it attracts | sucks by the groove | channel GR, even if the number of the suction holes HL is small, a desired suction force can be ensured. Thereby, the cost for processing the suction head 14 can be suppressed.

  In other words, in order to deal with thinner green sheets, a lot of fine suction holes are required to reduce sheet damage. If a large number of fine suction holes are machined, processing time increases and costs increase. Lead time also becomes longer and productivity is lowered. By forming the grooves as in the present invention, the number of suction holes can be suppressed, and the productivity of a thin green sheet can be increased.

DESCRIPTION OF SYMBOLS 10 ... Sheet handling apparatus 12 ... Base 14 ... Suction head 16 ... Cut blade 18 ... Carrier sheet 20 ... Ceramic green sheet (green sheet)
22 ... sheet piece GR, GR1, GR2 ... groove HL ... suction hole GRO outermost peripheral groove HLO outermost suction hole GR '... connection groove

Claims (7)

A suction head having a suction surface for holding a ceramic green sheet,
The suction surface has a plurality of suction holes and a plurality of grooves,
The plurality of grooves are provided on at least one side of the end region in the suction surface in a direction along the outer periphery of the suction surface;
Among the plurality of suction holes, a suction hole disposed in an end region within the suction surface is provided to pass through the groove ,
Of the plurality of grooves, the groove provided on the outermost periphery of the suction surface is provided on the outer side of the outermost suction hole arranged on the outermost side among the plurality of suction holes, and the outermost A suction head provided to contact the outer periphery of the suction hole .   The suction head according to claim 1, wherein a groove width of the groove is smaller than a diameter of a suction hole arranged in an end region in the suction surface. The distance between the groove provided on the outermost periphery of the suction surface and the end portion of the suction surface among the plurality of grooves is adjusted by adjusting the groove width of the groove provided on the outermost periphery. Item 3. The suction head according to Item 1 or 2 . Further, the plurality of coupling grooves for coupling the grooves with each other are provided, the suction head according to any one of claims 1 to 3. Wherein the plurality of grooves, each width direction end portion that has been subjected to chamfering has, the suction head according to any one of claims 1 to 4. The suction head according to any one of claims 1 to 5 , wherein each edge of the plurality of suction holes is chamfered. A sheet handling apparatus comprising a substrate having a mounting surface on which a carrier sheet holding a ceramic green sheet is mounted, and a suction head having a suction surface facing the mounting surface and sucking the ceramic green sheet. And
The suction surface has a plurality of suction holes and a plurality of grooves,
The plurality of grooves are provided in a direction along an outer periphery of the suction surface in at least a part of an end region in the suction surface;
Among the plurality of suction holes, a suction hole disposed in an end region within the suction surface is provided to pass through the groove ,
Of the plurality of grooves, the groove provided on the outermost periphery of the suction surface is provided on the outer side of the outermost suction hole arranged on the outermost side among the plurality of suction holes, and the outermost A sheet handling device provided to contact the outer periphery of the suction hole .

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