JP4244616B2 - Processing method of ceramic green sheet - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a method for processing a ceramic green sheet when manufacturing a multilayer electronic component such as a multilayer ceramic capacitor or a multilayer LC filter.
[0002]
[Prior art and issues]
Conventionally, in an electronic component such as a multilayer ceramic capacitor, as shown in FIG. 3, a ceramic green sheet 2 is formed on the surface of a cut table 10 provided with a suction hole 11 and having a suction holding function. In the state where the carrier film 1 is fed and the carrier film 1 is sucked and held, the cutting head 20 composed of the cutting blade 21 and the suction plate 22 is lowered to punch out the ceramic green sheet 2 into a predetermined shape, and the punched ceramic green After the sheet 2 is sucked and held by the suction disk 22 and peeled off from the carrier film 1, it is transported to the stacking stage which is the next process.
[0003]
By the way, in recent years, with the reduction in size and capacity of multilayer electronic components, further reduction in the thickness of ceramic green sheets has been demanded, and it has become difficult to peel off from a carrier film after cutting on a cut table. ing. In particular, as shown in FIG. 3, when the carrier film 1 is sucked and held directly on the hard cut table 10, the cutting edge of the cutting blade 21 bites into the carrier film 1, and the cut end of the ceramic green sheet 2 becomes the carrier film. It is difficult to obtain a trigger for peeling from 1, and peeling may not be performed smoothly.
[0004]
Furthermore, since the table surface (conveying surface) is hard in the conventional cut table and the peeling table, if the parallelism is misaligned between the table surface and the suction plate, the suction plate will touch the sheet. In addition, the sheet may be damaged. This means that the adjustment of the parallelism between the table surface and the suction disk and the position adjustment of the cutting blade are delicate and complicated.
[0005]
[Patent Document 1]
JP-A-10-284346 (in particular, FIG. 7, paragraphs 0021 and 0032)
[0006]
In Patent Document 1, as a pre-process for laminating ceramic green sheets, an elastic material such as rubber or an elastomer material is used for a part that receives a horizontal cutting blade of a peeling table in a process of cutting a ceramic green sheet on a carrier film. Is disclosed.
[0007]
However, Patent Document 1 does not elucidate the causal relationship between embedding a resilient material such as rubber in the portion that receives the cutting blade and the ease of peeling of the cut ceramic green sheet.
[0008]
Then, the objective of this invention is providing the processing method of the ceramic green sheet which improved the peeling performance from a carrier film after cutting. It is another object of the present invention to provide a method for processing a ceramic green sheet that has good transportability of a carrier film on a cut table and does not cause a shift of a cut position. It is another object of the present invention to provide a method for processing a ceramic green sheet that allows easy adjustment of the position of the conveying surface of the cut table and the suction disk or the cutting blade.
[0009]
[Means and Actions for Solving the Problems]
In order to achieve the above object, the present invention provides a ceramic film which has a ceramic green sheet formed on the surface thereof to a predetermined thickness, transports the carrier film on a cutting table, holds the carrier film, and lowers the cutting blade to lower the ceramic green sheet. was cut into a predetermined shape, in the processing method of a ceramic green sheet is peeled from the carrier film of the ceramic green sheet was cut with suction held by suction cups, the table surface of the cutting table, the elastic material having air permeability Tona is, have a 2-5 times the thickness of the carrier film and the dynamic friction coefficient with respect to the carrier film is arranged underlay sheet 0.2, to convey the carrier film to the lower laying on the sheet And sucking and holding the carrier film through the underlying sheet Characterized by cutting the sheet.
[0010]
In the processing method according to the present invention, when the ceramic blade is cut by lowering the cutting blade, the tip of the cutting blade bites into the underlying sheet through the carrier film, and the underlying sheet and the carrier film are locally small and curved. To do. At the time of this small curve, a slip (slip) occurs between the carrier film and the ceramic green sheet, which triggers peeling. As a result, when the cut ceramic green sheet is sucked and held by the suction disk, the peelability of the sheet from the carrier film is good.
[0011]
Moreover, since the underlay sheet made of an elastic material is arranged on the table surface, the positional relationship between the table surface and the suction disk or the cutting blade is not so strict as compared with the case where the sheet is processed on the hard table surface. Therefore, it is easy to adjust these positions.
[0012]
Further, since the underlay sheet has air permeability, the suction holding function of the cut table is not impaired, the set position of the positioning detection mark is not likely to vary, and the accuracy of the stacking position is reduced in advance. Can be prevented.
[0013]
In the processing method according to the present invention, the underlay sheet is dynamic friction coefficient to the carrier film is 0.2 or less elastic material for constituting the conveying surface of the low friction, the film was good conveyance of the carrier film The tension acting on the sensor does not vary, and the positioning detection mark is not distorted. Therefore, the sheet can be accurately positioned.
[0014]
Moreover, it is preferable to use a porous sheet as the underlay sheet, and the porosity is preferably about 15 to 50%, and the thickness is preferably about 100 to 500 μm.
[0015]
DETAILED DESCRIPTION OF THE INVENTION
Embodiments of a method for processing a ceramic green sheet according to the present invention will be described below with reference to the accompanying drawings.
[0016]
In the method for processing a ceramic green sheet according to the present invention, first, a ceramic slurry is applied to the surface of the carrier film 1 shown in FIG. Internal electrodes (not shown) are formed in a predetermined pattern on the sheet 2. A positioning detection mark (not shown) is also provided on the sheet 2.
[0017]
In addition, in order to make it easy to peel the ceramic green sheet 2 from the carrier film 1 after the cutting process described below, a release agent or the like is applied in advance to the surface of the film 1 before forming the sheet 2. It is preferable to keep it.
[0018]
The carrier film 1 has a thickness of 30 to 50 μm, and a polyester (PE) film, a polypropylene (PP) film, a polyethylene terephthalate (PET) film, or the like is used. The ceramic green sheet 2 is applied by a doctor blade method, a die coater method, a gravure printing method, or the like, and has a thickness of 1 to 30 μm.
[0019]
The carrier film 1 provided with the sheet 2 is conveyed as shown by an arrow A in FIG. The cut table 10 has a large number of suction holes 11 opened on the table surface, and an underlay sheet 12 is disposed on the table surface over the entire area where the carrier film 1 is conveyed on the table surface.
[0020]
The underlay sheet 12 is made of an elastic material having a low friction coefficient having air permeability, for example, a high-molecular polyethylene resin, and has a thickness of 100 to 500 μm, preferably 2 to 5 times the thickness of the carrier film 1 and a porosity of 15 to 50. %, A coefficient of dynamic friction with respect to the carrier film 1 of 0.2 or less is preferably used. In order to fix the underlay sheet 12 to the table surface, a spray glue or the like is used, or a plate-like fixing jig (not shown) is used.
[0021]
Exemplifying the characteristics of the underlay sheet 12 used in this embodiment, the dynamic friction coefficient at 20 to 100 ° C. is 0.05 to 0.2, and the tensile strength is 1.5 to 3.5 kg / 25 mm width. Furthermore, the dynamic friction coefficient when the underlay sheet 12 is in contact with a flat surface and the carrier film 1 is spherical is 0.05 to 0.1. The dynamic friction coefficient when the underlay sheet 12 is in contact with the spherical surface and the carrier film 1 is in contact with the plane is 0.1 to 0.2.
[0022]
A cutting head 20 including a cutting blade 21 and a suction board 22 is installed directly above the cutting table 10 so as to be movable up and down. The cutting blade 21 is for cutting (punching) the ceramic green sheet 2 on the carrier film 1 into a predetermined rectangular shape, and is disposed around the suction plate 22. The suction disk 22 has a large number of suction holes 23 opened on its suction surface (lower surface), and sucks the cut sheet 2 'and conveys it to the stacking table as the next process as described below.
[0023]
The carrier film 1 provided with the sheet 2 is fed onto the cut table 10 as indicated by an arrow A and is conveyed on the underlay sheet 12. And the position detection mark attached | subjected on the sheet | seat 2 is fixed to the predetermined position with respect to the cutting blade 21 by detecting with the figure identification device which is not shown in figure. This fixing is performed by sucking and holding the carrier film 1 via the underlying sheet 12 by operating the suction function of the cut table 10.
[0024]
With respect to the ceramic green sheet 2 fixed as described above, the cutting blade 21 and the suction disk 22 are lowered, the sheet 2 is cut into a predetermined rectangular shape by the cutting blade 21, and the cut sheet 2 'is sucked. Adsorbed by the board 22 and peeled off from the carrier film 1.
[0025]
When the cutting blade 21 is lowered to cut the ceramic green sheet 2, as shown in FIG. 2, the leading edge of the cutting blade 21 bites into the underlying sheet 12 via the carrier film 1, and the underlying sheet 12 and the carrier film 1 are Locally small curvature. At the time of this small curve, a shift (slip) occurs between the carrier film 1 and the ceramic green sheet 2 and causes peeling. As a result, when the cut sheet 2 ′ is sucked and held by the suction disk 22, the sheet 2 ′ is easily peeled from the carrier film 1.
[0026]
In this embodiment, since the underlay sheet 12 made of an elastic material is arranged on the table surface, the table surface, the suction plate 22 and the cutting blade 21 are compared with the case where the sheet is processed on the hard table surface. The positional relationship is not required to be so strict, and the position adjustment is easy.
[0027]
Further, since the underlay sheet 12 is made of a material having a low coefficient of friction and constitutes a conveyance surface, the conveyance property of the carrier film 1 is good and the tension acting on the film 1 does not vary and positioning is performed. The sheet 2 can be positioned accurately without distortion of the detection mark.
[0028]
Furthermore, since the underlay sheet 12 has air permeability, the suction holding function of the cut table 10 is not impaired, the set position of the positioning detection mark may not be varied, and the cut sheet 2 ′ is eventually broken. The accuracy of the stacking position is not lowered.
[0029]
(Other embodiments)
In addition, the processing method of the ceramic green sheet which concerns on this invention is not limited to the said embodiment, It can change variously within the range of the summary.
[0030]
In particular, the present invention can be applied to a wide variety of manufacturing processes for multilayer electronic components such as multilayer inductors, multilayer LC filters, multilayer noise filters, and multilayer substrates, in addition to the multilayer ceramic capacitor manufacturing process. Can do. Of course, the electronic component manufactured using a single ceramic green sheet may be sufficient. Further, a plain ceramic green sheet on which no internal electrode is formed may be handled.
[0031]
【The invention's effect】
As is apparent from the above description, according to the present invention, the ceramic green sheet on the carrier film is provided because the underlay sheet made of an air-permeable elastic material is arranged on the table surface of the cut table having the suction holding function. Can be cut with good releasability. In addition, since the ceramic green sheet is cut not on the hard table surface but on the elastic underlay sheet, a high degree of strictness is required for the parallelism between the table surface and the suction plate and the positional relationship between the cutting blades. This makes it easy to adjust these positions.
[0032]
Further, since the underlay sheet has air permeability, the suction holding function of the cut table is not impaired, the setting position of the positioning detection mark is not likely to vary, and the accuracy of the stacked position of the cut sheets is reduced. Can be prevented.
[0033]
Also, if an underlay sheet made of an elastic material with a low coefficient of friction is used, the carrier film can be transported well, the tension acting on the film during transportation will not vary, and the positioning detection mark will be distorted. Therefore, the ceramic green sheet can be accurately positioned.
[Brief description of the drawings]
FIG. 1 is a cross-sectional view showing an embodiment of a method for processing a ceramic green sheet according to the present invention.
FIG. 2 is an explanatory diagram when cutting a ceramic green sheet in the processing method shown in FIG. 1;
FIG. 3 is an explanatory diagram when cutting a ceramic green sheet in a conventional processing method.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 ... Carrier film 2 ... Ceramic green sheet 2 '... Cut ceramic green sheet 10 ... Cut table 11 ... Suction hole 12 ... Underlay sheet 20 ... Cutting head 21 ... Cut blade 22 ... Suction board A ... Conveying direction

Claims (4)

A carrier film having a ceramic green sheet with a predetermined thickness on the surface is transported onto a cutting table and sucked and held, and the cutting blade is lowered to cut the ceramic green sheet into a predetermined shape. In the processing method of the ceramic green sheet where the green sheet is adsorbed and held by the suction disk and peeled off from the carrier film,
The table surface of the cutting table, Ri Do an elastic material having air permeability, have a 2-5 times the thickness of the carrier film, and the underlay sheet dynamic friction coefficient of 0.2 or less with respect to the carrier film Arranging and conveying the carrier film on the underlay sheet, and suctioning and holding the carrier film through the underlay sheet to cut the ceramic green sheet;
A method for processing a ceramic green sheet. The method for processing a ceramic green sheet according to claim 1 , wherein a porous sheet is used as the underlay sheet. The method of processing a ceramic green sheet according to claim 1 or 2 , wherein the underlying sheet has a porosity of 15 to 50%. The method of processing a ceramic green sheet according to claim 1, 2 or 3 , wherein the underlying sheet has a thickness of 100 to 500 µm.

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