JP6188354B2 - 液体吐出ヘッドの製造方法 - Google Patents

液体吐出ヘッドの製造方法 Download PDF

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Publication number
JP6188354B2
JP6188354B2 JP2013044068A JP2013044068A JP6188354B2 JP 6188354 B2 JP6188354 B2 JP 6188354B2 JP 2013044068 A JP2013044068 A JP 2013044068A JP 2013044068 A JP2013044068 A JP 2013044068A JP 6188354 B2 JP6188354 B2 JP 6188354B2
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JP
Japan
Prior art keywords
silicon substrate
supply port
region
liquid supply
surface side
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2013044068A
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English (en)
Japanese (ja)
Other versions
JP2014172202A5 (enExample
JP2014172202A (ja
Inventor
圭介 岸本
圭介 岸本
太地 米本
太地 米本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP2013044068A priority Critical patent/JP6188354B2/ja
Priority to US14/198,356 priority patent/US8993357B2/en
Publication of JP2014172202A publication Critical patent/JP2014172202A/ja
Publication of JP2014172202A5 publication Critical patent/JP2014172202A5/ja
Application granted granted Critical
Publication of JP6188354B2 publication Critical patent/JP6188354B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1628—Manufacturing processes etching dry etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1601—Production of bubble jet print heads
    • B41J2/1603—Production of bubble jet print heads of the front shooter type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1607—Production of print heads with piezoelectric elements
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1629—Manufacturing processes etching wet etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1632—Manufacturing processes machining
    • B41J2/1634—Manufacturing processes machining laser machining
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1637—Manufacturing processes molding
    • B41J2/1639—Manufacturing processes molding sacrificial molding

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
JP2013044068A 2013-03-06 2013-03-06 液体吐出ヘッドの製造方法 Expired - Fee Related JP6188354B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2013044068A JP6188354B2 (ja) 2013-03-06 2013-03-06 液体吐出ヘッドの製造方法
US14/198,356 US8993357B2 (en) 2013-03-06 2014-03-05 Method for manufacturing liquid discharge head

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2013044068A JP6188354B2 (ja) 2013-03-06 2013-03-06 液体吐出ヘッドの製造方法

Publications (3)

Publication Number Publication Date
JP2014172202A JP2014172202A (ja) 2014-09-22
JP2014172202A5 JP2014172202A5 (enExample) 2016-04-14
JP6188354B2 true JP6188354B2 (ja) 2017-08-30

Family

ID=51488298

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2013044068A Expired - Fee Related JP6188354B2 (ja) 2013-03-06 2013-03-06 液体吐出ヘッドの製造方法

Country Status (2)

Country Link
US (1) US8993357B2 (enExample)
JP (1) JP6188354B2 (enExample)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD729808S1 (en) * 2013-03-13 2015-05-19 Nagrastar Llc Smart card interface
USD758372S1 (en) 2013-03-13 2016-06-07 Nagrastar Llc Smart card interface
USD759022S1 (en) * 2013-03-13 2016-06-14 Nagrastar Llc Smart card interface
USD780763S1 (en) * 2015-03-20 2017-03-07 Nagrastar Llc Smart card interface
USD864968S1 (en) 2015-04-30 2019-10-29 Echostar Technologies L.L.C. Smart card interface
JP6504939B2 (ja) * 2015-06-26 2019-04-24 キヤノン株式会社 シリコン基板の加工方法及び液体吐出ヘッド用基板の製造方法

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6672712B1 (en) 2002-10-31 2004-01-06 Hewlett-Packard Development Company, L.P. Slotted substrates and methods and systems for forming same
KR20080086306A (ko) * 2007-03-22 2008-09-25 삼성전자주식회사 잉크젯 프린트헤드의 제조방법
JP2009061667A (ja) * 2007-09-06 2009-03-26 Canon Inc シリコン基板の加工方法、及び液体吐出ヘッドの製造方法
JP4480182B2 (ja) * 2007-09-06 2010-06-16 キヤノン株式会社 インクジェット記録ヘッド用基板及びインクジェット記録ヘッドの製造方法
JP5020748B2 (ja) * 2007-09-06 2012-09-05 キヤノン株式会社 シリコン基板の加工方法、及び液体吐出ヘッドの製造方法
JP5448581B2 (ja) * 2008-06-19 2014-03-19 キヤノン株式会社 液体吐出ヘッド用基板の製造方法及び基板の加工方法
JP5455461B2 (ja) * 2009-06-17 2014-03-26 キヤノン株式会社 シリコン基板の加工方法及び液体吐出ヘッド用基板の製造方法
JP5539046B2 (ja) * 2010-06-10 2014-07-02 キヤノン株式会社 液体吐出ヘッド及び液体吐出ヘッドの製造方法
JP5915850B2 (ja) * 2012-03-05 2016-05-11 セイコーエプソン株式会社 圧電素子の製造方法、液体噴射ヘッドの製造方法、液体噴射装置の製造方法、超音波デバイスの製造方法及びセンサーの製造方法
JP2013220614A (ja) * 2012-04-18 2013-10-28 Seiko Epson Corp 液滴吐出ヘッド、液滴吐出ヘッドの製造方法、および液滴吐出装置

Also Published As

Publication number Publication date
US20140256069A1 (en) 2014-09-11
US8993357B2 (en) 2015-03-31
JP2014172202A (ja) 2014-09-22

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