JP6173007B2 - 半導体集積回路 - Google Patents
半導体集積回路 Download PDFInfo
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- JP6173007B2 JP6173007B2 JP2013090234A JP2013090234A JP6173007B2 JP 6173007 B2 JP6173007 B2 JP 6173007B2 JP 2013090234 A JP2013090234 A JP 2013090234A JP 2013090234 A JP2013090234 A JP 2013090234A JP 6173007 B2 JP6173007 B2 JP 6173007B2
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- 239000004065 semiconductor Substances 0.000 title claims description 116
- 239000010703 silicon Substances 0.000 claims description 11
- 229910052710 silicon Inorganic materials 0.000 claims description 11
- 239000010410 layer Substances 0.000 description 208
- 239000011701 zinc Substances 0.000 description 34
- 239000013078 crystal Substances 0.000 description 30
- 239000011229 interlayer Substances 0.000 description 14
- 229910052751 metal Inorganic materials 0.000 description 12
- 230000015572 biosynthetic process Effects 0.000 description 11
- 239000002184 metal Substances 0.000 description 11
- 238000010586 diagram Methods 0.000 description 10
- 239000000463 material Substances 0.000 description 8
- 238000000034 method Methods 0.000 description 8
- 230000006870 function Effects 0.000 description 6
- 229910052733 gallium Inorganic materials 0.000 description 5
- 229910052738 indium Inorganic materials 0.000 description 5
- 230000000694 effects Effects 0.000 description 4
- 229910052725 zinc Inorganic materials 0.000 description 4
- 229910020994 Sn-Zn Inorganic materials 0.000 description 3
- 229910009069 Sn—Zn Inorganic materials 0.000 description 3
- 230000007547 defect Effects 0.000 description 3
- 239000012535 impurity Substances 0.000 description 3
- 239000003381 stabilizer Substances 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- 229910018137 Al-Zn Inorganic materials 0.000 description 2
- 229910018573 Al—Zn Inorganic materials 0.000 description 2
- 229910020868 Sn-Ga-Zn Inorganic materials 0.000 description 2
- 238000004458 analytical method Methods 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 230000001788 irregular Effects 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 229910018120 Al-Ga-Zn Inorganic materials 0.000 description 1
- 229910052684 Cerium Inorganic materials 0.000 description 1
- 229910052692 Dysprosium Inorganic materials 0.000 description 1
- 229910052691 Erbium Inorganic materials 0.000 description 1
- 229910052693 Europium Inorganic materials 0.000 description 1
- 229910052688 Gadolinium Inorganic materials 0.000 description 1
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 1
- 229910052689 Holmium Inorganic materials 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 229910052765 Lutetium Inorganic materials 0.000 description 1
- 229910052779 Neodymium Inorganic materials 0.000 description 1
- 229910052777 Praseodymium Inorganic materials 0.000 description 1
- 229910052772 Samarium Inorganic materials 0.000 description 1
- 229910020833 Sn-Al-Zn Inorganic materials 0.000 description 1
- 229910020944 Sn-Mg Inorganic materials 0.000 description 1
- 229910052771 Terbium Inorganic materials 0.000 description 1
- 229910052775 Thulium Inorganic materials 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- 238000002441 X-ray diffraction Methods 0.000 description 1
- 229910052769 Ytterbium Inorganic materials 0.000 description 1
- 229910009369 Zn Mg Inorganic materials 0.000 description 1
- 229910007573 Zn-Mg Inorganic materials 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- GWXLDORMOJMVQZ-UHFFFAOYSA-N cerium Chemical compound [Ce] GWXLDORMOJMVQZ-UHFFFAOYSA-N 0.000 description 1
- 238000002425 crystallisation Methods 0.000 description 1
- 230000008025 crystallization Effects 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- KBQHZAAAGSGFKK-UHFFFAOYSA-N dysprosium atom Chemical compound [Dy] KBQHZAAAGSGFKK-UHFFFAOYSA-N 0.000 description 1
- UYAHIZSMUZPPFV-UHFFFAOYSA-N erbium Chemical compound [Er] UYAHIZSMUZPPFV-UHFFFAOYSA-N 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- OGPBJKLSAFTDLK-UHFFFAOYSA-N europium atom Chemical compound [Eu] OGPBJKLSAFTDLK-UHFFFAOYSA-N 0.000 description 1
- 230000005669 field effect Effects 0.000 description 1
- UIWYJDYFSGRHKR-UHFFFAOYSA-N gadolinium atom Chemical compound [Gd] UIWYJDYFSGRHKR-UHFFFAOYSA-N 0.000 description 1
- 229910052735 hafnium Inorganic materials 0.000 description 1
- VBJZVLUMGGDVMO-UHFFFAOYSA-N hafnium atom Chemical compound [Hf] VBJZVLUMGGDVMO-UHFFFAOYSA-N 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- KJZYNXUDTRRSPN-UHFFFAOYSA-N holmium atom Chemical compound [Ho] KJZYNXUDTRRSPN-UHFFFAOYSA-N 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 125000002887 hydroxy group Chemical group [H]O* 0.000 description 1
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 229910052747 lanthanoid Inorganic materials 0.000 description 1
- 150000002602 lanthanoids Chemical class 0.000 description 1
- 229910052746 lanthanum Inorganic materials 0.000 description 1
- FZLIPJUXYLNCLC-UHFFFAOYSA-N lanthanum atom Chemical compound [La] FZLIPJUXYLNCLC-UHFFFAOYSA-N 0.000 description 1
- OHSVLFRHMCKCQY-UHFFFAOYSA-N lutetium atom Chemical compound [Lu] OHSVLFRHMCKCQY-UHFFFAOYSA-N 0.000 description 1
- 229910052748 manganese Inorganic materials 0.000 description 1
- 239000013081 microcrystal Substances 0.000 description 1
- 239000002159 nanocrystal Substances 0.000 description 1
- QEFYFXOXNSNQGX-UHFFFAOYSA-N neodymium atom Chemical compound [Nd] QEFYFXOXNSNQGX-UHFFFAOYSA-N 0.000 description 1
- PUDIUYLPXJFUGB-UHFFFAOYSA-N praseodymium atom Chemical compound [Pr] PUDIUYLPXJFUGB-UHFFFAOYSA-N 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- KZUNJOHGWZRPMI-UHFFFAOYSA-N samarium atom Chemical compound [Sm] KZUNJOHGWZRPMI-UHFFFAOYSA-N 0.000 description 1
- VSZWPYCFIRKVQL-UHFFFAOYSA-N selanylidenegallium;selenium Chemical compound [Se].[Se]=[Ga].[Se]=[Ga] VSZWPYCFIRKVQL-UHFFFAOYSA-N 0.000 description 1
- 238000012916 structural analysis Methods 0.000 description 1
- 238000003786 synthesis reaction Methods 0.000 description 1
- 230000002194 synthesizing effect Effects 0.000 description 1
- JBQYATWDVHIOAR-UHFFFAOYSA-N tellanylidenegermanium Chemical compound [Te]=[Ge] JBQYATWDVHIOAR-UHFFFAOYSA-N 0.000 description 1
- GZCRRIHWUXGPOV-UHFFFAOYSA-N terbium atom Chemical compound [Tb] GZCRRIHWUXGPOV-UHFFFAOYSA-N 0.000 description 1
- FRNOGLGSGLTDKL-UHFFFAOYSA-N thulium atom Chemical compound [Tm] FRNOGLGSGLTDKL-UHFFFAOYSA-N 0.000 description 1
- NAWDYIZEMPQZHO-UHFFFAOYSA-N ytterbium Chemical compound [Yb] NAWDYIZEMPQZHO-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/786—Thin film transistors, i.e. transistors with a channel being at least partly a thin film
- H01L29/7869—Thin film transistors, i.e. transistors with a channel being at least partly a thin film having a semiconductor body comprising an oxide semiconductor material, e.g. zinc oxide, copper aluminium oxide, cadmium stannate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/0203—Particular design considerations for integrated circuits
- H01L27/0207—Geometrical layout of the components, e.g. computer aided design; custom LSI, semi-custom LSI, standard cell technique
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body
- H01L27/10—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including a plurality of individual components in a repetitive configuration
- H01L27/118—Masterslice integrated circuits
- H01L27/11803—Masterslice integrated circuits using field effect technology
- H01L27/11807—CMOS gate arrays
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body
- H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
- H01L27/1222—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs with a particular composition, shape or crystalline structure of the active layer
- H01L27/1225—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs with a particular composition, shape or crystalline structure of the active layer with semiconductor materials not belonging to the group IV of the periodic table, e.g. InGaZnO
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- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Computer Hardware Design (AREA)
- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Physics & Mathematics (AREA)
- General Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Ceramic Engineering (AREA)
- Semiconductor Integrated Circuits (AREA)
- Design And Manufacture Of Integrated Circuits (AREA)
- Thin Film Transistor (AREA)
Description
半導体集積回路100は、図1(A)に示すように、シリコンを半導体層に用いたトランジスタ及び酸化物半導体を半導体層に用いたトランジスタを含む第1のスタンダードセル101と、シリコンを半導体層に用いたトランジスタを含む第2のスタンダードセル102と、を有する。
本実施の形態では、実施の形態1で説明した第1のスタンダードセル及び第2のスタンダードセルの、半導体集積回路内で配置配線する構成について図面を用いて説明する。
101 第1のスタンダードセル
102 第2のスタンダードセル
103 第1の電源線
104 第2の電源線
105 第3の電源線
111 第1のスタンダードセル
112 第2のスタンダードセル
113 第1のトランジスタ部
114 第2のトランジスタ部
115 第1の電極部
116 第2の電極部
117 第1の電源線
118 第2の電源線
119 第3の電源線
121 第1の配線層
122 第2の配線層
123 第3の配線層
131 基板
132 層間絶縁層
133 層間絶縁層
134 層間絶縁層
201 素子層
202 素子層
203 第1のトランジスタ部
204 第1のトランジスタ
205 第2のトランジスタ部
206 第2のトランジスタ
207 第1のトランジスタ部
208 第1のトランジスタ
211 第1の配線層
212 第2の配線層
213 第3の配線層
221 第1の配線層
222 第2の配線層
223 第3の配線層
300 半導体集積回路
301 第1のスタンダードセル
302 第2のスタンダードセル
303 第1の電源線
304 第2の電源線
305 第3の電源線
306 セル行
307 セル行
400 半導体集積回路
401 セル行
402 半導体集積回路
403 セル行
Claims (5)
- 第1の配線層は、第1の電源線、第2の電源線、及び複数の第1のトランジスタを有し、
前記第1の配線層上に第2の配線層を有し、
前記第2の配線層は、第3の電源線、及び第1の電極部を有し、
前記第2の配線層上に第3の配線層を有し、
前記第3の配線層は、第2のトランジスタ、及び第2の電極部を有し、
複数の第1のスタンダードセルの各々は、前記第1の電源線、前記第2の電源線、前記複数の第1のトランジスタの一つ、前記第3の電源線、及び前記第2のトランジスタからなり、
複数の第2のスタンダードセルの各々は、前記第1の電源線、前記第2の電源線、前記複数の第1のトランジスタの一つ、前記第1の電極部、及び前記第2の電極部からなり、
前記複数の第1のスタンダードセルの各々の前記複数の第1のトランジスタの一つと、前記複数の第2のスタンダードセルの各々の前記複数の第1のトランジスタの一つとは、異なるトランジスタからなり、
前記複数の第1のスタンダードセルは、第1のセル行に設けられ、
前記複数の第2のスタンダードセルは、第2のセル行に設けられることを特徴とする半導体集積回路。 - 第1の配線層は、第1の電源線、第2の電源線、及び複数の第1のトランジスタを有し、
前記第1の配線層上に第2の配線層を有し、
前記第2の配線層は、第3の電源線、及び第1の電極部を有し、
前記第2の配線層上に第3の配線層を有し、
前記第3の配線層は、第2のトランジスタ、及び第2の電極部を有し、
複数の第1のスタンダードセルの各々は、前記第1の電源線、前記第2の電源線、前記複数の第1のトランジスタの一、前記第3の電源線、及び前記第2のトランジスタからなり、
複数の第2のスタンダードセルの各々は、前記第1の電源線、前記第2の電源線、前記複数の第1のトランジスタの一、前記第1の電極部、及び前記第2の電極部からなり、
前記複数の第1のスタンダードセルの各々の前記複数の第1のトランジスタの一つと、前記複数の第2のスタンダードセルの各々の前記複数の第1のトランジスタの一つとは、異なるトランジスタからなり、
前記複数の第1のスタンダードセルは、第1のセル行に設けられ、
前記複数の第2のスタンダードセルは、第2のセル行に設けられ、
前記第3の電源線は、前記第2のトランジスタのバックチャネル側に印加する電圧が供給される電源線であり、且つ前記第1の電源線と重畳して配置されていることを特徴とする半導体集積回路。 - 請求項1または請求項2において、
前記第3の電源線の線幅は、前記第1の電源線の線幅より小さいことを特徴とする半導体集積回路。 - 請求項1乃至請求項3のいずれか一において、
前記第1の電源線は高電源電位が供給される電源線であり、前記第2の電源線はグラウンド電位が供給される電源線であることを特徴とする半導体集積回路。 - 請求項1乃至請求項4のいずれか一において、
前記複数の第1のトランジスタの半導体層はシリコンであり、前記第2のトランジスタの半導体層は酸化物半導体であることを特徴とする半導体集積回路。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2013090234A JP6173007B2 (ja) | 2012-04-27 | 2013-04-23 | 半導体集積回路 |
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2012102166 | 2012-04-27 | ||
JP2012102166 | 2012-04-27 | ||
JP2013090234A JP6173007B2 (ja) | 2012-04-27 | 2013-04-23 | 半導体集積回路 |
Publications (2)
Publication Number | Publication Date |
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JP2013243351A JP2013243351A (ja) | 2013-12-05 |
JP6173007B2 true JP6173007B2 (ja) | 2017-08-02 |
Family
ID=49476512
Family Applications (1)
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JP2013090234A Expired - Fee Related JP6173007B2 (ja) | 2012-04-27 | 2013-04-23 | 半導体集積回路 |
Country Status (2)
Country | Link |
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US (1) | US20130285049A1 (ja) |
JP (1) | JP6173007B2 (ja) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10074576B2 (en) | 2014-02-28 | 2018-09-11 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor memory device |
WO2016128853A1 (en) | 2015-02-09 | 2016-08-18 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, electronic component, and electronic device |
US10565341B2 (en) * | 2017-05-15 | 2020-02-18 | Taiwan Semiconductor Manufacturing Co., Ltd. | Constrained cell placement |
US11011545B2 (en) | 2017-11-14 | 2021-05-18 | Taiwan Semiconductor Manufacturing Co., Ltd. | Semiconductor device including standard cells |
WO2022084800A1 (ja) * | 2020-10-20 | 2022-04-28 | 株式会社半導体エネルギー研究所 | 半導体装置、及び電子機器 |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
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US5191405A (en) * | 1988-12-23 | 1993-03-02 | Matsushita Electric Industrial Co., Ltd. | Three-dimensional stacked lsi |
JPH04139765A (ja) * | 1990-09-29 | 1992-05-13 | Toshiba Corp | 半導体装置 |
JP2006228954A (ja) * | 2005-02-17 | 2006-08-31 | Matsushita Electric Ind Co Ltd | 半導体装置とそのレイアウト設計方法 |
JP5105462B2 (ja) * | 2005-12-27 | 2012-12-26 | ルネサスエレクトロニクス株式会社 | 半導体集積回路 |
KR101969279B1 (ko) * | 2009-10-29 | 2019-04-15 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치 |
CN102656683B (zh) * | 2009-12-11 | 2015-02-11 | 株式会社半导体能源研究所 | 半导体装置 |
FR2961016B1 (fr) * | 2010-06-07 | 2013-06-07 | Commissariat Energie Atomique | Circuit integre a dispositif de type fet sans jonction et a depletion |
TWI580189B (zh) * | 2011-12-23 | 2017-04-21 | 半導體能源研究所股份有限公司 | 位準位移電路及半導體積體電路 |
-
2013
- 2013-04-23 US US13/868,270 patent/US20130285049A1/en not_active Abandoned
- 2013-04-23 JP JP2013090234A patent/JP6173007B2/ja not_active Expired - Fee Related
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JP2013243351A (ja) | 2013-12-05 |
US20130285049A1 (en) | 2013-10-31 |
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