JP6172272B2 - 改良された振動ジャイロスコープ - Google Patents

改良された振動ジャイロスコープ Download PDF

Info

Publication number
JP6172272B2
JP6172272B2 JP2015519265A JP2015519265A JP6172272B2 JP 6172272 B2 JP6172272 B2 JP 6172272B2 JP 2015519265 A JP2015519265 A JP 2015519265A JP 2015519265 A JP2015519265 A JP 2015519265A JP 6172272 B2 JP6172272 B2 JP 6172272B2
Authority
JP
Japan
Prior art keywords
transducer
resonator
mechanical resonator
mechanical
electrical signal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2015519265A
Other languages
English (en)
Japanese (ja)
Other versions
JP2015525872A5 (enExample
JP2015525872A (ja
Inventor
ブロングヴィスト、アンシ
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Publication of JP2015525872A publication Critical patent/JP2015525872A/ja
Publication of JP2015525872A5 publication Critical patent/JP2015525872A5/ja
Application granted granted Critical
Publication of JP6172272B2 publication Critical patent/JP6172272B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
    • G01C19/5733—Structural details or topology
    • G01C19/5755—Structural details or topology the devices having a single sensing mass
    • G01C19/5762—Structural details or topology the devices having a single sensing mass the sensing mass being connected to a driving mass, e.g. driving frames
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
    • G01C19/5726—Signal processing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
    • B81B7/008—MEMS characterised by an electronic circuit specially adapted for controlling or driving the same
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5776—Signal processing not specific to any of the devices covered by groups G01C19/5607 - G01C19/5719
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C25/00—Manufacturing, calibrating, cleaning, or repairing instruments or devices referred to in the other groups of this subclass
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Signal Processing (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Gyroscopes (AREA)
JP2015519265A 2012-06-29 2013-06-27 改良された振動ジャイロスコープ Active JP6172272B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
FI20125758 2012-06-29
FI20125758A FI125238B (en) 2012-06-29 2012-06-29 Improved vibration gyroscope
PCT/FI2013/050712 WO2014001646A1 (en) 2012-06-29 2013-06-27 Improved vibratory gyroscope

Publications (3)

Publication Number Publication Date
JP2015525872A JP2015525872A (ja) 2015-09-07
JP2015525872A5 JP2015525872A5 (enExample) 2016-04-21
JP6172272B2 true JP6172272B2 (ja) 2017-08-02

Family

ID=49776763

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2015519265A Active JP6172272B2 (ja) 2012-06-29 2013-06-27 改良された振動ジャイロスコープ

Country Status (7)

Country Link
US (1) US9958270B2 (enExample)
EP (2) EP2867613B1 (enExample)
JP (1) JP6172272B2 (enExample)
CN (1) CN104395695B (enExample)
FI (1) FI125238B (enExample)
TW (1) TWI591316B (enExample)
WO (1) WO2014001646A1 (enExample)

Families Citing this family (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FI124794B (fi) * 2012-06-29 2015-01-30 Murata Manufacturing Co Parannettu resonaattori
FI20146153A (fi) 2014-12-29 2016-06-30 Murata Manufacturing Co Mikromekaaninen gyroskooppirakenne
GB2534562B (en) * 2015-01-26 2017-11-29 Atlantic Inertial Systems Ltd Gyroscope loop filter
US10309782B2 (en) 2015-04-07 2019-06-04 Analog Devices, Inc. Quality factor estimation for resonators
US9709400B2 (en) * 2015-04-07 2017-07-18 Analog Devices, Inc. System, apparatus, and method for resonator and coriolis axis control in vibratory gyroscopes
FI127203B (en) * 2015-05-15 2018-01-31 Murata Manufacturing Co Vibrating micromechanical sensor of the angular velocity
CN104897150B (zh) * 2015-06-16 2017-08-25 中北大学 一种提升硅微机械陀螺仪带宽全温性能的方法
US10571267B1 (en) 2015-09-01 2020-02-25 Hrl Laboratories, Llc High stability angular sensor
US10060943B2 (en) * 2016-03-18 2018-08-28 Rosemount Aerospace Inc. Symmetric MEMS piezoelectric accelerometer for lateral noise
ITUA20162172A1 (it) * 2016-03-31 2017-10-01 St Microelectronics Srl Sensore accelerometrico realizzato in tecnologia mems avente elevata accuratezza e ridotta sensibilita' nei confronti della temperatura e dell'invecchiamento
US10247600B2 (en) * 2016-11-10 2019-04-02 Analog Devices, Inc. Mode-matching of MEMS resonators
US10852136B2 (en) * 2017-08-30 2020-12-01 Analog Devices, Inc. Frequency mismatch detection method for mode matching in gyroscopes
US10578435B2 (en) 2018-01-12 2020-03-03 Analog Devices, Inc. Quality factor compensation in microelectromechanical system (MEMS) gyroscopes
US11041722B2 (en) 2018-07-23 2021-06-22 Analog Devices, Inc. Systems and methods for sensing angular motion in the presence of low-frequency noise
IT201900009582A1 (it) * 2019-06-20 2020-12-20 St Microelectronics Srl Giroscopio mems con calibrazione del fattore di scala in tempo reale e relativo metodo di calibrazione
IT201900017546A1 (it) 2019-09-30 2021-03-30 St Microelectronics Srl Dispositivo a pulsante mems resistente all'acqua, dispositivo di ingresso comprendente il dispositivo a pulsante mems e apparecchio elettronico
DE102021202132A1 (de) * 2020-03-25 2021-09-30 Robert Bosch Gesellschaft mit beschränkter Haftung Verfahren zur Bestimmung einer Detektionssensitivität eines Drehratensensors
FR3108897B1 (fr) * 2020-04-03 2022-04-08 Commissariat Energie Atomique Procédé de commande d’un capteur
EP3913327B1 (en) * 2020-05-22 2023-05-17 Murata Manufacturing Co., Ltd. Gyroscope with self-test
DE102020210121A1 (de) * 2020-08-11 2022-02-17 Robert Bosch Gesellschaft mit beschränkter Haftung Mikromechanisches System, Verfahren zum Betreiben eines mikromechanischen Systems
FR3114146B1 (fr) * 2020-09-17 2022-08-12 Safran Electronics & Defense capteur vibrant avec unité d’hybridation
JP2024002473A (ja) * 2022-06-24 2024-01-11 セイコーエプソン株式会社 物理量センサーおよび電子機器
JP2024002472A (ja) * 2022-06-24 2024-01-11 セイコーエプソン株式会社 物理量センサーおよび電子機器
CN115371777A (zh) * 2022-08-26 2022-11-22 国家石油天然气管网集团有限公司 科氏流量计的监测预警方法、装置、系统、设备及介质
CN117647237B (zh) * 2024-01-30 2024-04-09 中国人民解放军国防科技大学 一种环形微机电陀螺及其模态匹配修调方法

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4958519A (en) * 1982-01-25 1990-09-25 The Board Of Regents Of The University Of Nebraska Velocimeter
JPH1194557A (ja) 1997-09-12 1999-04-09 Murata Mfg Co Ltd 振動ジャイロ
GB0122252D0 (en) 2001-09-14 2001-11-07 Bae Systems Plc Vibratory gyroscopic rate sensor
KR100470590B1 (ko) 2002-10-12 2005-03-08 삼성전기주식회사 병진 가속에 의한 신호 검출을 방지하기 위한 마이크로자이로스코프
FR2849183B1 (fr) * 2002-12-20 2005-03-11 Thales Sa Gyrometre vibrant avec asservissement de la frequence de detection sur la frequence d'excitation
KR100585893B1 (ko) * 2004-02-17 2006-06-07 재단법인서울대학교산학협력재단 미세 각속도계 및 그의 큐 팩터를 튜닝하는 방법
JP2005249646A (ja) * 2004-03-05 2005-09-15 Matsushita Electric Ind Co Ltd 角速度センサ用音叉型振動子、この振動子を用いた角速度センサ及びこの角速度センサを用いた自動車
JP2006329637A (ja) * 2005-05-23 2006-12-07 Matsushita Electric Works Ltd 角速度検出装置
DE102006055589B4 (de) * 2006-11-24 2012-07-19 Infineon Technologies Ag Messvorrichtung und Messgrößensensor mit gekoppelter Verarbeitungs- und Anregungsfrequenz
US8183944B2 (en) * 2009-04-03 2012-05-22 Invensense, Inc. Method and system for using a MEMS structure as a timing source
TWI384198B (zh) 2009-07-09 2013-02-01 Univ Nat Chiao Tung Angle measurement gyroscope system and angle estimation method
US8266961B2 (en) 2009-08-04 2012-09-18 Analog Devices, Inc. Inertial sensors with reduced sensitivity to quadrature errors and micromachining inaccuracies
US8714012B2 (en) 2010-02-16 2014-05-06 Stmicroelectronics S.R.L. Microelectromechanical gyroscope with inversion of actuation forces, and method for actuating a microelectromechanical gyroscope
US8875578B2 (en) * 2011-10-26 2014-11-04 Silicon Laboratories Inc. Electronic damper circuit for MEMS sensors and resonators

Also Published As

Publication number Publication date
TWI591316B (zh) 2017-07-11
US20140000366A1 (en) 2014-01-02
CN104395695A (zh) 2015-03-04
EP2867613A4 (en) 2016-03-30
US9958270B2 (en) 2018-05-01
EP2867613A1 (en) 2015-05-06
EP2867613B1 (en) 2017-08-23
EP3279608A1 (en) 2018-02-07
WO2014001646A1 (en) 2014-01-03
CN104395695B (zh) 2017-03-15
EP3279608B1 (en) 2019-05-22
TW201408991A (zh) 2014-03-01
FI125238B (en) 2015-07-31
JP2015525872A (ja) 2015-09-07

Similar Documents

Publication Publication Date Title
JP6172272B2 (ja) 改良された振動ジャイロスコープ
CN105378430B (zh) 改进的振动式陀螺仪
JP6011725B2 (ja) 改良された共振器
US8875578B2 (en) Electronic damper circuit for MEMS sensors and resonators
JP2015525872A5 (enExample)
WO2002088631A2 (en) Non-resonant four degrees-of-freedom micromachined gyroscope
US9611139B2 (en) Resonator
CN107532902A (zh) 利用非线性模态相互作用的振动陀螺仪
GB2616713A (en) Vibratory sensor with electronic balancing
Shingare et al. Aspects of double mass on tuning fork MEMS gyroscope

Legal Events

Date Code Title Description
A529 Written submission of copy of amendment under article 34 pct

Free format text: JAPANESE INTERMEDIATE CODE: A529

Effective date: 20150226

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20160303

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20160303

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20170104

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20170306

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20170606

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20170619

R150 Certificate of patent or registration of utility model

Ref document number: 6172272

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150