CN104395695B - 改进的振动陀螺仪 - Google Patents

改进的振动陀螺仪 Download PDF

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Publication number
CN104395695B
CN104395695B CN201380031839.5A CN201380031839A CN104395695B CN 104395695 B CN104395695 B CN 104395695B CN 201380031839 A CN201380031839 A CN 201380031839A CN 104395695 B CN104395695 B CN 104395695B
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China
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mechanical resonator
transducer
resonator
electrical signal
mechanical
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CN201380031839.5A
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Chinese (zh)
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CN104395695A (zh
Inventor
安斯·布卢姆奎斯特
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Murata Manufacturing Co Ltd
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Murata Manufacturing Co Ltd
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
    • G01C19/5733—Structural details or topology
    • G01C19/5755—Structural details or topology the devices having a single sensing mass
    • G01C19/5762—Structural details or topology the devices having a single sensing mass the sensing mass being connected to a driving mass, e.g. driving frames
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
    • G01C19/5726—Signal processing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
    • B81B7/008—MEMS characterised by an electronic circuit specially adapted for controlling or driving the same
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5776—Signal processing not specific to any of the devices covered by groups G01C19/5607 - G01C19/5719
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C25/00—Manufacturing, calibrating, cleaning, or repairing instruments or devices referred to in the other groups of this subclass
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Signal Processing (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Gyroscopes (AREA)
CN201380031839.5A 2012-06-29 2013-06-27 改进的振动陀螺仪 Active CN104395695B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
FI20125758 2012-06-29
FI20125758A FI125238B (en) 2012-06-29 2012-06-29 Improved vibration gyroscope
PCT/FI2013/050712 WO2014001646A1 (en) 2012-06-29 2013-06-27 Improved vibratory gyroscope

Publications (2)

Publication Number Publication Date
CN104395695A CN104395695A (zh) 2015-03-04
CN104395695B true CN104395695B (zh) 2017-03-15

Family

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CN201380031839.5A Active CN104395695B (zh) 2012-06-29 2013-06-27 改进的振动陀螺仪

Country Status (7)

Country Link
US (1) US9958270B2 (enExample)
EP (2) EP2867613B1 (enExample)
JP (1) JP6172272B2 (enExample)
CN (1) CN104395695B (enExample)
FI (1) FI125238B (enExample)
TW (1) TWI591316B (enExample)
WO (1) WO2014001646A1 (enExample)

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US10309782B2 (en) 2015-04-07 2019-06-04 Analog Devices, Inc. Quality factor estimation for resonators
FI127203B (en) * 2015-05-15 2018-01-31 Murata Manufacturing Co Vibrating micromechanical sensor of the angular velocity
CN104897150B (zh) * 2015-06-16 2017-08-25 中北大学 一种提升硅微机械陀螺仪带宽全温性能的方法
US10571267B1 (en) 2015-09-01 2020-02-25 Hrl Laboratories, Llc High stability angular sensor
US10060943B2 (en) * 2016-03-18 2018-08-28 Rosemount Aerospace Inc. Symmetric MEMS piezoelectric accelerometer for lateral noise
ITUA20162172A1 (it) * 2016-03-31 2017-10-01 St Microelectronics Srl Sensore accelerometrico realizzato in tecnologia mems avente elevata accuratezza e ridotta sensibilita' nei confronti della temperatura e dell'invecchiamento
US10247600B2 (en) * 2016-11-10 2019-04-02 Analog Devices, Inc. Mode-matching of MEMS resonators
US10852136B2 (en) * 2017-08-30 2020-12-01 Analog Devices, Inc. Frequency mismatch detection method for mode matching in gyroscopes
US10578435B2 (en) 2018-01-12 2020-03-03 Analog Devices, Inc. Quality factor compensation in microelectromechanical system (MEMS) gyroscopes
US11041722B2 (en) 2018-07-23 2021-06-22 Analog Devices, Inc. Systems and methods for sensing angular motion in the presence of low-frequency noise
IT201900009582A1 (it) * 2019-06-20 2020-12-20 St Microelectronics Srl Giroscopio mems con calibrazione del fattore di scala in tempo reale e relativo metodo di calibrazione
IT201900017546A1 (it) 2019-09-30 2021-03-30 St Microelectronics Srl Dispositivo a pulsante mems resistente all'acqua, dispositivo di ingresso comprendente il dispositivo a pulsante mems e apparecchio elettronico
DE102021202134A1 (de) * 2020-03-25 2021-09-30 Robert Bosch Gesellschaft mit beschränkter Haftung Verfahren zur Bestimmung, Messung und/oder Überwachung von Eigenschaften eines Sensorsystems
FR3108897B1 (fr) * 2020-04-03 2022-04-08 Commissariat Energie Atomique Procédé de commande d’un capteur
EP3913327B1 (en) * 2020-05-22 2023-05-17 Murata Manufacturing Co., Ltd. Gyroscope with self-test
DE102020210121A1 (de) * 2020-08-11 2022-02-17 Robert Bosch Gesellschaft mit beschränkter Haftung Mikromechanisches System, Verfahren zum Betreiben eines mikromechanischen Systems
FR3114146B1 (fr) * 2020-09-17 2022-08-12 Safran Electronics & Defense capteur vibrant avec unité d’hybridation
JP2024002472A (ja) * 2022-06-24 2024-01-11 セイコーエプソン株式会社 物理量センサーおよび電子機器
JP2024002473A (ja) * 2022-06-24 2024-01-11 セイコーエプソン株式会社 物理量センサーおよび電子機器
CN115371777A (zh) * 2022-08-26 2022-11-22 国家石油天然气管网集团有限公司 科氏流量计的监测预警方法、装置、系统、设备及介质
CN117647237B (zh) * 2024-01-30 2024-04-09 中国人民解放军国防科技大学 一种环形微机电陀螺及其模态匹配修调方法

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CN1211725A (zh) * 1997-09-12 1999-03-24 株式会社村田制作所 振动陀螺仪
CN1571915A (zh) * 2001-09-14 2005-01-26 Bae系统公共有限公司 振动陀螺速度传感器
KR20050082097A (ko) * 2004-02-17 2005-08-22 재단법인서울대학교산학협력재단 미세 각속도계 및 그의 큐 팩터를 튜닝하는 방법
CN102230800A (zh) * 2010-02-16 2011-11-02 意法半导体股份有限公司 带有激励力反转的微机电陀螺仪和激励微机电陀螺仪的方法
CN102498365A (zh) * 2009-08-04 2012-06-13 模拟设备公司 对于正交误差和微机械加工不准确性具有降低的敏感性的惯性传感器

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CN1211725A (zh) * 1997-09-12 1999-03-24 株式会社村田制作所 振动陀螺仪
CN1571915A (zh) * 2001-09-14 2005-01-26 Bae系统公共有限公司 振动陀螺速度传感器
KR20050082097A (ko) * 2004-02-17 2005-08-22 재단법인서울대학교산학협력재단 미세 각속도계 및 그의 큐 팩터를 튜닝하는 방법
CN102498365A (zh) * 2009-08-04 2012-06-13 模拟设备公司 对于正交误差和微机械加工不准确性具有降低的敏感性的惯性传感器
CN102230800A (zh) * 2010-02-16 2011-11-02 意法半导体股份有限公司 带有激励力反转的微机电陀螺仪和激励微机电陀螺仪的方法

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A Study on Resonant Frequency and Q Factor Tunings for MEMS Vibratory Gyroscopes;Jeong,C.et al;《Journal of Micromechanics and Microengineering》;20041130;第14卷(第11期);1530-1536 *

Also Published As

Publication number Publication date
EP2867613A4 (en) 2016-03-30
CN104395695A (zh) 2015-03-04
TW201408991A (zh) 2014-03-01
WO2014001646A1 (en) 2014-01-03
EP2867613B1 (en) 2017-08-23
EP3279608B1 (en) 2019-05-22
EP3279608A1 (en) 2018-02-07
JP6172272B2 (ja) 2017-08-02
US9958270B2 (en) 2018-05-01
EP2867613A1 (en) 2015-05-06
TWI591316B (zh) 2017-07-11
US20140000366A1 (en) 2014-01-02
FI125238B (en) 2015-07-31
JP2015525872A (ja) 2015-09-07

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