JP6168265B1 - 光デバイス - Google Patents
光デバイス Download PDFInfo
- Publication number
- JP6168265B1 JP6168265B1 JP2017519724A JP2017519724A JP6168265B1 JP 6168265 B1 JP6168265 B1 JP 6168265B1 JP 2017519724 A JP2017519724 A JP 2017519724A JP 2017519724 A JP2017519724 A JP 2017519724A JP 6168265 B1 JP6168265 B1 JP 6168265B1
- Authority
- JP
- Japan
- Prior art keywords
- electroabsorption
- regions
- optical device
- optical modulator
- optical
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 230000003287 optical effect Effects 0.000 title claims abstract description 84
- 230000008033 biological extinction Effects 0.000 claims abstract description 31
- 239000004065 semiconductor Substances 0.000 claims abstract description 16
- 230000031700 light absorption Effects 0.000 claims description 10
- 239000000758 substrate Substances 0.000 claims description 8
- 238000010521 absorption reaction Methods 0.000 claims description 6
- 238000010586 diagram Methods 0.000 description 18
- 238000000034 method Methods 0.000 description 18
- 238000004891 communication Methods 0.000 description 9
- 238000005253 cladding Methods 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 238000005530 etching Methods 0.000 description 3
- 238000010791 quenching Methods 0.000 description 3
- 230000000171 quenching effect Effects 0.000 description 3
- 230000004888 barrier function Effects 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000005684 electric field Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 239000013307 optical fiber Substances 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/02—Structural details or components not essential to laser action
- H01S5/026—Monolithically integrated components, e.g. waveguides, monitoring photo-detectors, drivers
- H01S5/0265—Intensity modulators
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/20—Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers
- H01S5/22—Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers having a ridge or stripe structure
- H01S5/2205—Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers having a ridge or stripe structure comprising special burying or current confinement layers
- H01S5/2222—Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers having a ridge or stripe structure comprising special burying or current confinement layers having special electric properties
- H01S5/2227—Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers having a ridge or stripe structure comprising special burying or current confinement layers having special electric properties special thin layer sequence
- H01S5/2228—Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers having a ridge or stripe structure comprising special burying or current confinement layers having special electric properties special thin layer sequence quantum wells
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04B—TRANSMISSION
- H04B10/00—Transmission systems employing electromagnetic waves other than radio-waves, e.g. infrared, visible or ultraviolet light, or employing corpuscular radiation, e.g. quantum communication
- H04B10/50—Transmitters
- H04B10/501—Structural aspects
- H04B10/503—Laser transmitters
- H04B10/505—Laser transmitters using external modulation
- H04B10/5051—Laser transmitters using external modulation using a series, i.e. cascade, combination of modulators
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/015—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on semiconductor elements having potential barriers, e.g. having a PN or PIN junction
- G02F1/0155—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on semiconductor elements having potential barriers, e.g. having a PN or PIN junction modulating the optical absorption
- G02F1/0157—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on semiconductor elements having potential barriers, e.g. having a PN or PIN junction modulating the optical absorption using electro-absorption effects, e.g. Franz-Keldysh [FK] effect or quantum confined stark effect [QCSE]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/005—Optical components external to the laser cavity, specially adapted therefor, e.g. for homogenisation or merging of the beams or for manipulating laser pulses, e.g. pulse shaping
- H01S5/0085—Optical components external to the laser cavity, specially adapted therefor, e.g. for homogenisation or merging of the beams or for manipulating laser pulses, e.g. pulse shaping for modulating the output, i.e. the laser beam is modulated outside the laser cavity
Landscapes
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Electromagnetism (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Computer Networks & Wireless Communication (AREA)
- Signal Processing (AREA)
- Geometry (AREA)
- Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
- Semiconductor Lasers (AREA)
Abstract
Description
図1は、本発明の実施の形態1に係る光デバイスを示す斜視図である。この光デバイスは、半導体レーザ1と電界吸収型光変調器2が単一のn型InP基板3に形成された電界吸収型光変調器集積レーザである。裏面のn電極4と表面の電極5に電圧が印加されることにより半導体レーザ1はレーザ光を出射する。n電極4とp電極6に変調電圧が印加されることにより電界吸収型光変調器2はレーザ光を変調する。
図8は、本発明の実施の形態2に係る光デバイスを示すブロック図である。1つの半導体レーザ1に対して3つの電界吸収領域2a,2b,2cが並列に接続されている。電界吸収領域2a,2b,2cはそれぞれレーザ光を変調し、電界吸収領域2a,2b,2cの出力が合成される。1つの共通端子11を介して3つの電界吸収領域2a,2b,2cに変調電圧が印加される。
図10は、本発明の実施の形態3に係る光デバイスを示すブロック図である。本実施の形態では、直列に接続された3つの電界吸収領域2a,2b,2cにそれぞれ給電端子11a,11b,11cを設け、別々に給電する。この場合、1つの電界吸収領域に対して1つのドライバが必要になる。各電界吸収領域が個々にドライバにより駆動されることで個別に駆動条件を調整することができる。また、個々の変調方式として、現行のイーサネット(登録商標)技術であるNRZ方式を用いることができる。
図13は、本発明の実施の形態4に係る3つの電界吸収領域を示す断面図である。本実施の形態では、通常の電界吸収型光変調器集積レーザの製造方法により光吸収層8を成長した後に、p型InPクラッド層9の代わりにi−InPクラッド層17を成長する。そして、フォトマスクとフォトレジストを使用したエッチングを2回行うことで、i−InPクラッド層17の厚みを変化させる。i−InPクラッド層17の厚みの異なる部分が3つの電界吸収領域2a,2b,2cに対応する。
Claims (8)
- レーザ光を出射する半導体レーザと、
前記レーザ光を変調する電界吸収型光変調器とを備え、
前記電界吸収型光変調器は、消光特性の異なる複数の電界吸収領域を有し、
前記電界吸収型光変調器の消光比曲線は複数の段差を有することを特徴とする光デバイス。 - 前記複数の電界吸収領域は直列に接続されて前記レーザ光を順に変調することを特徴とする請求項1に記載の光デバイス。
- 前記複数の電界吸収領域は並列に接続されてそれぞれ前記レーザ光を変調し、前記複数の電界吸収領域の出力が合成されることを特徴とする請求項1に記載の光デバイス。
- 前記複数の電界吸収領域は個々に駆動されることを特徴とする請求項1〜3の何れか1項に記載の光デバイス。
- 前記複数の電界吸収領域の光吸収層は多重量子井戸のパラメータが異なることを特徴とする請求項1〜4の何れか1項に記載の光デバイス。
- 前記複数の電界吸収領域の各々は、光吸収層と、前記光吸収層の上に形成されたアンドープ層を有し、
前記複数の電界吸収領域の前記アンドープ層は厚みが異なることを特徴とする請求項1〜4の何れか1項に記載の光デバイス。 - 前記複数の電界吸収領域の数は3であり、
前記電界吸収型光変調器は4値パルス振幅変調方式により駆動されることを特徴とする請求項1〜6の何れか1項に記載の光デバイス。 - 前記半導体レーザと前記電界吸収型光変調器が単一の半導体基板に形成された電界吸収型光変調器集積レーザであることを特徴とする請求項1〜7の何れか1項に記載の光デバイス。
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PCT/JP2016/085399 WO2018100634A1 (ja) | 2016-11-29 | 2016-11-29 | 光デバイス |
Publications (2)
Publication Number | Publication Date |
---|---|
JP6168265B1 true JP6168265B1 (ja) | 2017-07-26 |
JPWO2018100634A1 JPWO2018100634A1 (ja) | 2018-12-06 |
Family
ID=59384287
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2017519724A Active JP6168265B1 (ja) | 2016-11-29 | 2016-11-29 | 光デバイス |
Country Status (4)
Country | Link |
---|---|
US (1) | US10855052B2 (ja) |
JP (1) | JP6168265B1 (ja) |
CN (1) | CN109983639B (ja) |
WO (1) | WO2018100634A1 (ja) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US11838055B2 (en) * | 2021-01-22 | 2023-12-05 | Nokia Solutions And Networks Oy | Apparatus comprising serially connected electro-absorption modulators |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH06120616A (ja) * | 1991-06-07 | 1994-04-28 | Fujitsu Ltd | 半導体発光装置 |
JPH1056229A (ja) * | 1996-08-08 | 1998-02-24 | Fujitsu Ltd | 半導体光集積素子の製造方法 |
JP2001221985A (ja) * | 2000-02-09 | 2001-08-17 | Opnext Japan Inc | 半導体電界吸収光変調器集積型発光素子、発光素子モジュール、及び光伝送システム |
JP2005142230A (ja) * | 2003-11-04 | 2005-06-02 | Sumitomo Electric Ind Ltd | 変調器集積半導体レーザ、光変調システムおよび光変調方法 |
JP2015068918A (ja) * | 2013-09-27 | 2015-04-13 | 三菱電機株式会社 | 半導体光素子、光モジュールおよび半導体光素子の製造方法 |
Family Cites Families (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2746065B2 (ja) * | 1993-07-29 | 1998-04-28 | 日本電気株式会社 | 光半導体素子の製造方法 |
DE69414208T2 (de) * | 1993-08-31 | 1999-03-25 | Fujitsu Ltd | Optischer Halbleitervorrichtung und Herstellungsverfahren |
JP3755090B2 (ja) * | 1995-06-14 | 2006-03-15 | 三菱電機株式会社 | 半導体装置の製造方法,及び半導体装置 |
AU766362B2 (en) * | 1999-09-03 | 2003-10-16 | Regents Of The University Of California, The | Tunable laser source with integrated optical modulator |
US6678479B1 (en) | 2000-03-01 | 2004-01-13 | Opnext Japan, Inc. | Semiconductor electro-absorption optical modulator integrated light emission element light emission element module and optical transmission system |
EP1130708B1 (en) | 2000-03-02 | 2008-07-16 | OpNext Japan, Inc. | Semiconductor electro-absorption optical modulator integrated light emitting element and module, and optical transmission system |
GB0206226D0 (en) * | 2002-03-16 | 2002-05-01 | Intense Photonics Ltd | Electro-absorption modulator with broad optical bandwidth |
CN1258843C (zh) * | 2003-04-03 | 2006-06-07 | 中国科学院半导体研究所 | 高速电吸收调制器的制作方法 |
CN1272885C (zh) * | 2003-05-01 | 2006-08-30 | 清华大学 | 分布反馈半导体激光器与电吸收调制器集成光源及制法 |
JP4798338B2 (ja) | 2005-02-28 | 2011-10-19 | 独立行政法人情報通信研究機構 | 超高消光比変調方法 |
JP4789608B2 (ja) * | 2005-12-06 | 2011-10-12 | Okiセミコンダクタ株式会社 | 半導体光通信素子 |
JP5113456B2 (ja) | 2007-08-28 | 2013-01-09 | 株式会社アドバンテスト | 光変調装置および試験装置 |
JP5790481B2 (ja) * | 2011-12-22 | 2015-10-07 | 三菱電機株式会社 | 接続装置 |
JP2014085501A (ja) * | 2012-10-23 | 2014-05-12 | Mitsubishi Electric Corp | 半導体光変調器 |
JP2016092124A (ja) | 2014-10-31 | 2016-05-23 | 三菱電機株式会社 | 光変調器集積半導体レーザ |
JP6523060B2 (ja) * | 2015-06-09 | 2019-05-29 | 日本オクラロ株式会社 | 光信号生成装置 |
-
2016
- 2016-11-29 CN CN201680091128.0A patent/CN109983639B/zh active Active
- 2016-11-29 JP JP2017519724A patent/JP6168265B1/ja active Active
- 2016-11-29 US US16/346,911 patent/US10855052B2/en active Active
- 2016-11-29 WO PCT/JP2016/085399 patent/WO2018100634A1/ja active Application Filing
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH06120616A (ja) * | 1991-06-07 | 1994-04-28 | Fujitsu Ltd | 半導体発光装置 |
JPH1056229A (ja) * | 1996-08-08 | 1998-02-24 | Fujitsu Ltd | 半導体光集積素子の製造方法 |
JP2001221985A (ja) * | 2000-02-09 | 2001-08-17 | Opnext Japan Inc | 半導体電界吸収光変調器集積型発光素子、発光素子モジュール、及び光伝送システム |
JP2005142230A (ja) * | 2003-11-04 | 2005-06-02 | Sumitomo Electric Ind Ltd | 変調器集積半導体レーザ、光変調システムおよび光変調方法 |
JP2015068918A (ja) * | 2013-09-27 | 2015-04-13 | 三菱電機株式会社 | 半導体光素子、光モジュールおよび半導体光素子の製造方法 |
Also Published As
Publication number | Publication date |
---|---|
CN109983639B (zh) | 2022-03-22 |
US20200059065A1 (en) | 2020-02-20 |
JPWO2018100634A1 (ja) | 2018-12-06 |
US10855052B2 (en) | 2020-12-01 |
WO2018100634A1 (ja) | 2018-06-07 |
CN109983639A (zh) | 2019-07-05 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP6523060B2 (ja) | 光信号生成装置 | |
CN110168824B (zh) | 半导体光放大器及其制造方法、光相位调制器 | |
JP5144306B2 (ja) | 光半導体装置及びその製造方法 | |
US9709830B2 (en) | Phase modulation device and method of controlling the device | |
US20180287333A1 (en) | An Apparatus Comprising A Waveguide-Modulator And Laser-Diode And A Method Of Manufacture Thereof | |
JP2017157583A (ja) | 光送信モジュール | |
JP2018018947A (ja) | レーザ部品及びレーザ光発生装置 | |
JP6168265B1 (ja) | 光デバイス | |
US9838135B1 (en) | Differential electro-absorption modulator (EAM) driver | |
US11342724B2 (en) | Semiconductor optical integrated device | |
JP6939411B2 (ja) | 半導体光素子 | |
JP6931527B2 (ja) | 光送信モジュール | |
WO2019059066A1 (ja) | 半導体光集積素子 | |
US9088127B2 (en) | Methods of modulating a quantum dot laser and a multisection quantum dot laser | |
Simoyama et al. | 4-wavelength 25.8-Gbps directly modulated laser array of 1.3-μm AlGaInAs distributed-reflector lasers | |
JP7343807B2 (ja) | 光送信器 | |
EP3591863B1 (en) | Electro-modulated structures, transmitters and methods | |
JP2005135956A (ja) | 半導体光増幅器およびその製造方法ならびに光通信デバイス | |
WO2021059449A1 (ja) | 光送信器 | |
JP5034930B2 (ja) | 光波形整形装置 | |
JP2017219686A (ja) | 光送信機及び光送信機の制御信号生成方法 | |
JP2018060975A (ja) | 直接変調レーザ | |
Lü et al. | 4× 15 Gbit/s 850 nm Vertical Cavity Surface Emitting Laser Array | |
WO2019102604A1 (ja) | 半導体光送信器 | |
JPH1058749A (ja) | レーザ・プリンタ及びこれに適した光源 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A975 | Report on accelerated examination |
Free format text: JAPANESE INTERMEDIATE CODE: A971005 Effective date: 20170526 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20170530 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20170612 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 6168265 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |