JP6164623B1 - Electronic component moving device and electronic component conveying device - Google Patents

Abstract

An electronic component moving apparatus is provided that can detect a dropout or delivery failure of an electronic component from a conveyance path without stopping a suction nozzle. A component detection sensor is provided in a non-stop section of a suction nozzle. The suction nozzle 2 has a light guide opening, a translucent body, and a light guide body. The light guide port is the rear end opening 25 or the side opening 28 of the suction nozzle 2 and communicates the inside and outside of the suction nozzle 2. The translucent body is the triangular prism 24 or the glass body 26, and blocks communication between the inside and outside of the nozzle. The light guide is a triangular prism 24 or a reflecting plate 27, etc., and bends light entering through the light guide opening and guides it into the suction nozzle 2. The component detection sensor 5 has the light projecting unit 51 and the light receiving unit 52 divided into positions facing the suction hole 21 and the light guide of the suction nozzle 2 passing through one point 61 of the non-stop section 6. [Selection] Figure 2

Description

  The present invention relates to an electronic component moving device that moves an electronic component by turning, and an electronic component conveying device that includes the electronic component moving device and performs various processes while aligning and conveying the electronic components.

  The electronic parts are subjected to processing such as quality confirmation and packaging in a later process. For example, the quality of electronic components is confirmed by electrical characteristics and appearance inspection, engraved by laser marking, classified by quality, and packed in various containers. In order to receive these processes, the electronic component moves along the transport path around the processing unit. In addition, in order to respond to the container used in the next process equipment or to meet the customer's request, the electronic component is not specially processed, and is replaced along the transport path in order to repack the container instead of reprocessing. In some cases, electronic parts may be transported.

  The electronic component transport path is formed by connecting a single or a plurality of electronic component moving devices (see, for example, Patent Document 1). A series of devices that connect electronic component moving devices is called a handler. When there is a predetermined restriction such as the distance between the transport path and the unit that supplies the electronic component, an electronic component moving device is inserted between the unit that supplies the electronic component and the transport path, and the electronic component is relayed. This electronic component moving device for relaying electronic components is called a pickup unit or a relay unit.

  The electronic component moving device moves the electronic component by moving a holding unit that holds the electronic component. Examples of the electronic component holding means include a suction nozzle that sucks the electronic component with a negative pressure.

JP, 2015-112456, A

  In the format in which such electronic component moving devices are connected to form a transport path and the format in which electronic components are relayed by the electronic component moving device, there is a risk that delivery of the electronic components between the electronic component moving devices may fail. In the case of delivery failure, the suction nozzle scheduled to be delivered moves without holding the electronic component. There is also a risk that the electronic component may fall off in the middle due to the negative pressure drop of the suction nozzle.

  Conventionally, the delivery failure or dropout of an electronic component can be confirmed by imaging the electronic component with a camera for detecting the displacement of the electronic component and performing image processing. However, it was necessary to temporarily stop the electronic component at the position of the camera unit. The production speed of electronic parts has a great influence on the cost of electronic parts. For this reason, temporarily stopping the electronic component in order to confirm whether the electronic component has failed to be delivered or has dropped out leads to an increase in the cost of the electronic component.

  In order to confirm a delivery failure or dropout without temporarily stopping the electronic component, the following method has also been proposed. That is, the side surface of the electronic component is irradiated with a laser parallel to the movement locus of the electronic component. However, although the electronic component is held at the tip of the holding part such as the suction nozzle, the entire length of the holding part changes due to wear, and the height along which the electronic component moves is changed. Adjustment is required. The thickness of the electronic component has been reduced to, for example, 50 to 60 μm, and it is very difficult to adjust the irradiation position in which the laser is directed to the side surface position of the electronic component whose height has changed. Then, with this method, the laser cannot be accurately applied to the side surface of the electronic component, and there is a possibility that erroneous detection frequently occurs. For this reason, it has not been realistic to detect a delivery failure or dropout during movement of the electronic component.

  In particular, the electronic component moving device for relaying the electronic component is small for convenience because it is located between the conveyance path and the supply unit, and the electronic component is stopped between the conveyance path and the supply unit. It was difficult to secure the electronic components, and it was not possible to detect a failure or dropout of the electronic parts.

  The present invention has been proposed to solve the above-described problems, and an object of the present invention is to provide an electronic component moving apparatus that can detect a dropout or a delivery failure of an electronic component without having to stop a suction nozzle.

  An electronic component moving device according to the present invention has a cylindrical shape in which an adsorption hole is opened at one end, and is installed in an adsorption nozzle that moves while holding the electronic component in the adsorption hole, and a non-stop section of the adsorption nozzle. A sensor for detecting the presence or absence of the electronic component held by the suction nozzle, and the suction nozzle has a negative pressure supply port that opens to a side of the body and supplies a negative pressure to the inside of the suction nozzle. And provided at a position farther from the suction hole than the negative pressure supply port, and is provided between a light guide port that communicates the inside and outside of the suction nozzle, and between the negative pressure supply port and the light guide port, A translucent body that blocks communication between the inside and outside of the suction nozzle, and a light guide body that bends light through the light guide port and guides the light into the suction nozzle, and the sensor is not stopped. The suction hole of the suction nozzle passing through one point of the section and the light guide A light-receiving element and a light-emitting element that are separately installed at positions facing each other. If the suction nozzle holds the electronic component, the light-receiving element is shielded from light by the electronic component. If the detection light does not reach and the suction nozzle does not hold the electronic component, the detection light emitted from the suction hole reaches.

  The light guide port is opened at a tube end opposite to the suction hole of the suction nozzle, and the suction nozzle is fixed by closing the light guide port, and the transparent body sealing the light guide port. You may make it have a triangular prism which serves as the said light guide which guides the said detection light inside the said suction nozzle.

  The light guide opening opens to a body side portion of the suction nozzle, the light guide is a reflecting plate obliquely facing the light guide opening, and the light transmitting body is the light guide opening or the negative pressure. You may make it interpose between a supply port and the said reflecting plate.

  The light guide port opens to a body side portion of the suction nozzle, and the suction nozzle is disposed inside the nozzle so as to face the light guide port, and includes a triangular prism that serves as the light transmitting body and the light guide body. You may do it.

  Moreover, the electronic component conveying apparatus according to the present invention includes an electronic component moving apparatus. The electronic component transport apparatus includes a supply unit that accommodates the electronic components subjected to the various processes, a handler that aligns and transports the electronic components of the supply unit along an annular transport path, and the transport path. Various processing units arranged, and a housing unit that houses the electronic component that has been transported by the handler, and the electronic component moving device picks up the electronic component of the supply unit, and It may be arranged between the supply unit and the handler.

  In addition, the electronic component transport apparatus includes a supply unit that accommodates the electronic components subjected to the various processes, a handler that aligns and transports the electronic components of the supply unit along an annular transport path, and a transport path. Various processing units arranged along with the housing unit for housing the electronic components that have been transported by the transport means, and the electronic component moving device may be disposed as the handler. .

  According to the present invention, it is possible to determine whether an electronic component has dropped out or has failed to be received without stopping the suction nozzle, and the production speed of the electronic component is improved.

It is a schematic perspective view of an electronic component moving apparatus. It is a block diagram which shows the 1st example of a suction nozzle, and a component detection sensor, and shows the state which the electronic component fell out or received. It is a block diagram which shows the 1st example of a suction nozzle and a component detection sensor, and shows the state holding an electronic component. It is a block diagram which shows the 2nd example of a suction nozzle. It is a block diagram which shows the 3rd example of a suction nozzle. It is a block diagram which shows the 4th example of a suction nozzle. It is a top view of the electronic component conveying apparatus which concerns on a 1st application example. It is side surface sectional drawing of the electronic component conveying apparatus which concerns on a 1st application example. It is a front view which shows the relay unit of the electronic component conveying apparatus which concerns on a 1st application example, and shows the state in which the suction nozzle is moving in the non-stop area. It is a top view which shows the relay unit of the electronic component conveying apparatus which concerns on a 1st application example, and shows the state which the suction nozzle has stopped right above and right below. It is a side view which shows the other example of the relay unit of the electronic component conveying apparatus which concerns on a 1st application example. It is a side view of the electronic component conveying apparatus which concerns on a 2nd application example. It is a side view which shows the rotary table with which the handler of the electronic component conveying apparatus which concerns on a 2nd application example is provided. It is a top view which shows the rotary table with which the handler of the electronic component conveying apparatus which concerns on a 2nd application example is provided.

  Hereinafter, an embodiment of an electronic component moving device according to the present invention and an application example thereof will be described in detail with reference to the drawings. As shown in FIG. 1, the electronic component moving device 1 is a device that turns the electronic component D from one point 62 to another point 63. The electronic component moving device 1 includes a suction nozzle 2, a rotary table 3, and a motor 4.

  The suction nozzle 2 has a cylindrical shape having a suction hole 21 at one end, and sucks and holds the electronic component D on the suction hole 21. The rotary table 3 is pivotally supported by the rotation shaft of the motor 4, supports the suction nozzle 2 at a position spaced from the rotation shaft of the motor 4, and moves the suction nozzle 2 in a circular or arc shape. The motor 4 is a direct drive motor or the like, and is a power source that moves the suction nozzle 2 via the rotary table 3.

  The electronic component moving device 1 includes two suction nozzles 2. The rotary table 3 is two arms extending in a direction opposite to the rotation axis of the motor 4 by 180 degrees. However, the electronic component moving apparatus 1 may include one suction nozzle 2 or three or more. When one suction nozzle 2 is provided, the rotary table 3 is a single arm whose one end is pivotally supported by the rotating shaft of the motor 4 and the suction nozzle 2 is installed at the other end. When the three or more suction nozzles 2 are provided, the rotary table 3 has a star shape or a disk shape in which the arms are radially extended at circumferentially equidistant positions, and the radial center is pivotally supported by the rotation shaft of the motor 4. The suction nozzle 2 is installed at the tip of each arm or the outer periphery of the disk.

  The motor 4 rotates the rotary table 3 intermittently. When the electronic component moving apparatus 1 includes two suction nozzles 2, the motor 4 rotates the rotary table 3 back and forth 180 degrees or in a circular shape in one direction, and temporarily stops at the 0 degree position and the 180 degree position. In the case where one suction nozzle 2 is provided, it is rotated every 180 degrees by reciprocating 180 degrees or rotating circularly in one direction. When the electronic component moving apparatus 1 includes three or more suction nozzles 2, the motor 4 rotates the rotary table 3 in one direction at equal angular intervals with the arrangement angle intervals of the suction nozzles 2, thereby arranging the suction nozzles 2. Pause at every angular interval.

  The suction nozzle 2 has a cylindrical axis extending in the radial direction of the rotary table 3 and protruding in the radial direction of the rotary table 3, and directs the suction hole 21 to the outside of the rotary table 3. The suction nozzle 2 is supplied with negative pressure from the outside, and holds the electronic component D by suction in the suction hole 21. That is, the diameter of the suction hole 21 is smaller than the suction surface of the electronic component D.

  As shown in FIG. 2, the suction nozzle 2 has a cylindrical nozzle portion 22 having a hollow inside, and has both ends open. An opening on the outer side in the radial direction of the rotary table 3 is the suction hole 21, and an opening on the center side of the rotary table 3 is the rear end opening 25. A negative pressure supply port 23 is formed in the body side portion of the nozzle portion 22. The negative pressure supply port 23 communicates with the inside and outside of the nozzle portion 22 and is connected to a negative pressure generating device such as a vacuum pump or an ejector separate from the electronic component moving device 1, and supplies negative pressure to the nozzle portion 22. .

  A right-angle prism 24 is fixed to the nozzle portion 22. The right-angle prism 24 is a triangular prism having a right-angle triangle surface, and is a right-angle triangle together with two first and second rectangle surfaces 241 and 242, which are connected at a right angle, and the first and second rectangle surfaces 241 and 242. And a triangular surface connected to the first rectangular surface 241, the second rectangular surface 242, and the inclined surface 243, respectively.

  The right-angle prism 24 seals the rear end opening 25 with a first rectangular surface 241. That is, the first square surface 242 has an area that includes the rear end opening 25. The right-angle prism 24 is fixed so that the first square surface 241 is orthogonal to the cylinder axis of the nozzle portion 22. Such a right-angle prism 24 reflects incident light incident at a right angle with respect to the second quadrangular surface 242 in the direction of 90 degrees by the inclined surface 243 and emits the light from the first quadrangular surface 241, thereby allowing the light to the nozzle portion 22. The light is guided to the inside of the nozzle, and the light travels along the cylinder axis of the nozzle portion 22.

  As shown in FIGS. 1 and 2, the electronic component moving device 1 further includes a component detection sensor 5 in the moving path of the suction nozzle 2. The component detection sensor 5 detects the presence or absence of the electronic component D held by the suction nozzle 2 that passes through the sensor. The component detection sensor 5 is, for example, a laser sensor, a fiber sensor, or a photo interrupter, and includes a light projecting unit 51 such as a semiconductor laser or a light emitting diode and a light receiving unit 52 such as a phototransistor.

  The light receiving unit 52 is installed at one point 61 in the non-stop section 6 that extends between the stop positions of the suction nozzle 2, and faces the suction hole 21 of the suction nozzle 2 that passes through the one point 61 of the non-stop section 6. In other words, the light receiving unit 52 is positioned on the cylinder axis extension line of the suction nozzle 2 that passes through one point 61 of the non-stop section 6. The light projecting unit 51 is disposed on a virtual orthogonal line perpendicular to the second quadrangular surface 242 of the prism 24 provided in the suction nozzle 2 located at one point 61 of the non-stop section 6, facing the second quadrangular surface 242. The detection light of the optical path which enters the second rectangular surface 242 at a right angle is emitted.

  In this component detection sensor 5, if the suction nozzle 2 moving in one point 61 of the non-stop section 6 does not hold the electronic component D, the detection light of the light projecting unit 51 is transmitted to the light receiving unit 52 via the triangular prism 24. reach. On the other hand, as shown in FIG. 3, in this component detection sensor 5, if the suction nozzle 2 moving in one point 61 of the non-stop section 6 holds the electronic component D, the component detection sensor 5 emits the prism from the light projection unit 51. The detection light reflected by 24 is blocked by the electronic component D that closes the suction hole 21 and does not reach the light receiving portion 52, and the light receiving portion 52 cannot sense the detection light.

  The component detection sensor 5 samples the amount of light received by the light receiving unit 52 at the timing when the suction nozzle 2 passes through one point 61 of the non-stop section 6, and if it reaches the amount of light received indicating the arrival of detection light, the electronic component D It can be determined that it is missing. That is, the component detection sensor 5 includes a determination unit including a microcomputer or a computer that determines dropout using the amount of light received by the light receiving unit 52 as a parameter, and performs dropout determination by comparison with a threshold stored in advance. The determination unit may be included in the electronic component moving device 1 or may be a microcomputer or a computer for a multifunction device including the electronic component moving device 1 as one module to integrally control each module.

  As described above, the rear end opening 25 of the nozzle portion 22 is a light guide opening of the detection light into the nozzle portion 22. The triangular prism 24 is a translucent body that seals the light guide opening while allowing detection light to pass therethrough, and is also a light guide that refracts or reflects the detection light toward the nozzle portion 22 of the detection light.

  As long as it has a light transmitting function, a sealing function, and a light guiding function, not only the triangular prism 24 but also various optical components can be applied. It is not necessary to satisfy the light transmitting function, the sealing function, and the light guiding function with one optical component. The light guide port is formed so as to be farther from the suction hole 21 than the negative pressure supply port 23 and in contact with the inside of the nozzle portion 22 because it does not have to reduce or inhibit the negative pressure reaching the suction hole 21. In other words, if it is an opening that communicates the inside and outside of the nozzle part 22, it does not need to be formed at the rear end of the nozzle part 22. Further, if the light guide is also closer to the light guide port than the negative pressure supply port 23, it includes the position of the light guide port, such as the inside of the nozzle portion 22, the position in contact with the inside of the nozzle portion 22, and the like. May be. The translucent body also does not have to reduce or inhibit the negative pressure applied to the suction hole 21, so if it is farther from the suction hole 21 than the negative pressure supply port 23, the inside of the nozzle part 22, or the nozzle part It may be arranged at any position such as a position in contact with the inside of 22.

  Typically, as shown in FIGS. 4 and 5, a glass plate 26 is arranged as a translucent body instead of the first quadrangular surface 241 of the triangular prism 24, and the light guide formed by the inclined surface 243 of the triangular prism 24 is used. Instead, the reflecting plate 27 may be arranged as a light guide. The transparent body may be a transparent acrylic plate.

  Further, as shown in FIG. 4, a side opening 28 is provided as a light guide port in the body portion on the rear end side of the negative pressure supply port 23 of the nozzle portion 22, and the inside of the nozzle portion 22 A glass plate 26 is disposed between the side opening 28 and the negative pressure supply port 23, and a reflecting plate 27 is disposed between the side opening 28 and the glass plate 26 and facing the side opening 28. You may be made to do. Further, as shown in FIG. 5, a glass plate 26 is disposed so as to close the side opening 28, and is reflected between the glass plate 26 and the negative pressure supply port 23 at a position facing the side opening 28. A plate 27 may be arranged.

  In the case where the glass plate 26 and the reflection plate 27 are disposed, the aspect in which the side opening 28 is provided is suitable because the reflection plate 27 can be supported by the inner wall of the nozzle portion 22. Further, as shown in FIG. 6, the triangular prism 24 may be arranged so as to face the side opening 28 inside the nozzle portion 22.

  Further, the light receiving unit 52 and the light projecting unit 51 are configured so that the installation positions are switched if the detection light of the light projecting unit 51 passes through the nozzle unit 22 and reaches the light receiving unit 52. Also good. That is, when the suction nozzle 2 passes through one point 61 of the non-stop section 6, the suction hole 21 and the light projecting unit 51 are opposed to each other, and the second square surface 242 of the triangular prism 24 and the light receiving unit 52 are opposed to each other. You may do it.

  An application example of the electronic component moving apparatus 1 will be shown. The electronic component moving apparatus 1 according to the first application example is mounted on the electronic component conveying apparatus 100 shown in FIGS. 7 and 8. The electronic component transport apparatus 100 places the electronic component D on the transport path 101, moves the electronic component D along the transport path 101, and performs various processes on the electronic component D on the transport path 101. The electronic component transport apparatus 100 includes various processing units 110 arranged along the transport path 101, a handler 120 that forms the transport path 101, a relay unit 130 that supplies an electronic component D to the transport path 101, A supply unit 140 for supplying the electronic component D for processing and a storage unit 150 for storing the electronic component D that has undergone various processes and has finished the conveyance path 101 are provided. The electronic component transport apparatus 100 includes the electronic component moving apparatus 1 as a relay unit 130.

  The handler 120 forms an annular conveyance path 101. That is, the handler 120 includes a turret table 121 serving as a rotating system base, a direct drive motor 122 serving as a rotational power source for the turret table 121, and a suction nozzle that is attached to the turret table 121 and sucks and holds the electronic component D with negative pressure. 123, and an advancing / retreating drive device 124 that is attached directly above the specific type of processing unit 110 with the turret table 121 interposed therebetween and moves the suction nozzle 123 to the processing unit 110 side.

  The direct drive motor 122 is installed on the upper surface of the base 102. The turret table 121 has a star shape or a disk shape in which arms are arranged in a radial shape, and the center of the circle is supported by the rotation shaft of the direct drive motor 122 and extends horizontally at a position higher than the upper surface of the base 102. The motor 122 is intermittently rotated by a certain angle in the circumferential direction.

  A plurality of suction nozzles 123 are attached to the outer peripheral edge equidistant from the center of the circle of the turret table 121 at equal circumferential positions. A sleeve whose axial direction is orthogonal to the upper surface of the base 102 is provided on the outer peripheral edge of the turret table 121. The suction nozzle 123 is slidably fitted into the sleeve, and the nozzle tip is placed on the upper surface of the gantry base 102. The electronic component D is held at the nozzle tip.

  The advance / retreat drive device 124 includes an electric motor 124a and a rod 124b. The rod 124b is moved forward in a direction perpendicular to the upper surface of the gantry 102 by electric operation, and the rod 124b is brought into contact with the rear end of the suction nozzle 123 that has reached the processing unit 110. Further, the suction nozzle 123 is pushed toward the processing unit 110 by the rod 124b.

  According to the handler 120, the suction nozzle 123 holding the electronic component D moves along a common locus and stops at each common stop position. That is, the common trajectory along which the suction nozzle 123 holding the electronic component D moves becomes the annular transport path 101. The processing unit 110 is disposed immediately below each stop position where the suction nozzle 123 stops. The handler 120 pushes down the suction nozzle 23 holding the electronic component D toward the processing unit 110 by the advance / retreat driving device 124, and delivers the electronic component D to the processing unit 110.

  The processing unit 110 is arranged to perform necessary processing contents according to the electronic component D. The electronic component D is a component used in an electrical product, and is a discrete semiconductor such as a transistor, a diode, a capacitor, or a resistor, or a packaged semiconductor element such as an integrated circuit. The processing content performed on such an electronic component D is inspection, processing, posture correction, classification, or a plurality of types of these. The inspection content is an appearance inspection, an electrical characteristic inspection, a light quantity inspection, or the like. Processing contents include bending of lead terminals, laser marking, solder application, and the like. Posture correction is correction of the position, orientation, or both of the electronic component. The classification is a classification for each rank of non-defective products and non-defective products or good products.

  The processing unit 110 that executes these processing contents includes, for example, a camera unit that detects an orientation shift of the electronic component D, an XYθ moving unit that corrects the orientation of the electronic component D, and an electrical test unit that inspects the electrical characteristics of the electronic component D. In addition, a camera unit for inspecting the appearance of the electronic component D and a laser marking unit for marking the non-defective electronic component D as a result of the inspection are arranged.

  The supply unit 140 and the storage unit 150 are arranged at stop positions at both ends sandwiching all the processing units 110. Examples of the supply unit 140 and the accommodation unit 150 include a wafer ring holder, a taping unit, a tray shift device, and a parts feeder. When classification is included as the processing content, the electronic component transport apparatus 100 is provided with two storage units 150 for the non-defective product and the non-defective product, and the electronic component D is stored in the processing unit 150 according to the rank of the non-defective product. The

  The wafer ring holder uses a wafer ring formed by sticking a wafer to the ring as a container and moves the wafer ring in a plane. The taping unit transports the carrier tape in the longitudinal direction using a carrier tape having pockets arranged in the longitudinal direction as a container. The tray shift device moves the tray in a plane using the tray as a container. The parts feeder moves the electronic component D from the bowl to the head of the linear rail by vibrating the bowl and the linear rail connected to the bowl using the bowl-shaped bowl as a container.

  The relay unit 130 is disposed between the supply unit 140, the accommodation unit 150, or both and the handler 120 in order to cope with predetermined restrictions. That is, the relay unit 130 has the suction nozzle 123 far from the supply unit 140, the storage unit 150, or both, and the supply unit 140, the storage unit 150, or both and the handler 120 cannot directly transfer the electronic component D. Placed in case. Alternatively, in the relay unit 130, the direction of the suction nozzle 123 is different from the direction of the supply unit 140, the storage unit 150, or both, and if the direction of the electronic component D is not changed, the supply unit 140, the storage unit 150, or both And the handler 120 are arranged when the electronic component D cannot be delivered.

  For example, the relay unit 130 is disposed between the supply unit 140 and the handler 120 which is a wafer ring horizontally placed with the wafer ring surface facing the suction port side of the suction nozzle 123. This relay unit 130 is the electronic component moving device 1, and has a pair of suction nozzles 2 and 2 that receive the electronic component D from the supply unit 140 and pass it to the handler 120, and two arms that extend in the opposite direction by 180 degrees. The rotary table 3 having the suction nozzles 2 and 2 facing 180 degrees opposite to each other at the extension of the arm, and the rotary table 3 is pivotally supported by the base end portions of the two arms, and the suction nozzles 2 and 2 are supplied to the supply unit 140. And the handler 120 in order, and a component detection sensor 5 that detects whether or not the electronic component D is held.

  Both of the axial extension lines of the suction nozzles 2 and 2 pass through the center of the rotary table 3, and the suction nozzles 2 and 2 are located radially outward from the center of the rotary table 3 at the base end. Sticks out. The total length of the suction nozzles 2 and 2 is the same. That is, the tips of the suction nozzles 2 and 2 are located on the same orbit concentric with the rotary table 3.

  The rotary table 3 repeats forward rotation and reverse rotation intermittently by 180 degrees by the motor 4 around the center of the table orthogonal to the table plane. The rotary table 3 has a plane orthogonal to the plane in which the conveyance path 101 and the supply unit 140 that is a wafer ring holder extend. That is, the rotary table 3 including the suction nozzles 2 and 2 is placed vertically.

  The positions of the suction nozzles 2 and 2 are intermittently switched, and the suction nozzles 2 and 2 are stopped at a first stop point facing right above and a second stop point facing right below. Between the first stop point and the second stop point is a non-stop section 6 in which the suction nozzles 2 and 2 move without stopping. The suction nozzle 2 facing directly below faces the push-up pin of the supply unit 140 with the electronic component D of the wafer ring interposed therebetween, and picks up and holds the electronic component D pushed up by the push-up pin. The suction nozzle 2 facing directly upward faces one point on the transport path 101 formed by the handler 120 and passes the electronic component D picked up from the supply unit 140 to the handler 120.

  When the electronic component D is picked up by the supply unit 140 and when the electronic component D is transferred to the handler 120, the suction nozzles 2 and 2 advance toward the outside of the rotary table 3 in the radial direction. Further, after picking up the electronic component D from the suction unit 140 and passing the electronic component D to the handler 120, the suction nozzles 2, 2 are retracted toward the center of the rotary table 3. The relay unit 130 includes an advance / retreat driving device 131 that advances and retracts the suction nozzles 2 and 2 along the radial direction.

  As shown in FIGS. 9 and 10, the advancing / retreating drive device 131 includes a rotation motor 132 that serves as a drive source for advancing the suction nozzle 2, a cylindrical cam 133 that converts the rotation motion of the rotation motor 132 into a linear motion, a cam follower 134, and a cam follower 134. And a slide pusher 135 that linearly moves, a sleeve 136a that can slide the suction nozzle 2 in the cylinder axis direction, and a protrusion 137 that protrudes from the suction nozzles 2 and 2 onto the movement path of the slide pusher 135, The suction nozzle 2 is advanced. Further, the advancing / retreating drive device 131 has a compression spring 138 that accumulates an urging force that retracts the suction nozzle 2 as the suction nozzle 2 advances, and an urging force that causes the slide pusher 135 to retract as the slide pusher 135 advances. A tension spring 139 for storing energy is provided, and the suction nozzle 2 is moved backward.

  Such an advancing / retracting drive device 131 mounts only the compression spring 138 for retreating the suction nozzles 2 and 2 on the revolving rotary table 3 side, and includes the other rotary motor 132a, the cylindrical cam 133 and the cam follower 134, and the slide pusher 135a. It is installed on the motor flange 132b side.

  The rotary motor 132a is installed with the cylinder axis of the suction nozzles 2 and 2 facing right above and right below and the motor shaft orthogonal to each other. The relay unit 130 includes a plate-like motor flange 132 b extending in parallel with the rotary unit 3 between the motor 4 and the rotary unit 3, and the rotary motor 132 a is a front surface facing the rotary unit 3. It is attached to the motor flange 132b from the opposite back surface and penetrates the motor shaft through the front surface. The cylindrical cam 133 has an oval shape with a part of the outer periphery gently bulging, and is supported by the motor shaft of the rotary motor 132a.

  A rail 135b is laid on the front surface of the motor flange 132b along the cylinder axis of the suction nozzles 2 and 2 facing directly above and below. The slide pusher 135a is slidably fitted to the rail 135b, and is installed between the rotary table 3 and the motor flange 132b. The cam follower 134 is a cylindrical body, and is fixed to the slide pusher 135a. The tension spring 139 is installed on the motor flange 132b along the axis of the rail 135b. The tension spring 139 fixes the slide pusher 135a at one end on the radially outer side of the rotary table 3 and The slide pusher 135a is pulled toward the center of the rotary table 3 by being urged so as to shrink.

  The protruding portion 137 protrudes in the direction of the motor flange 132b from the side surface of the cylindrical body of the suction nozzles 2 and 2 beyond the rotary table 3. When the suction nozzles 2 and 2 are positioned directly above and below, the protrusion 137 includes a last retracted position where the tip of the slide pusher 135a is most retracted, and a most advanced position where the tip of the slide pusher 135a is most advanced. Projects on the imaginary line connecting

  The tip of the slide pusher 135a is the radially outer end of the rotary table 3. The last retracted position is the position of the front end of the slide pusher 135a when the cam follower 134 is closest to the center of the cylindrical cam 133 and the slide pusher 135a is pulled toward the center of the rotary table 3 by the tension spring 139. . The most advanced position is the slide pusher 135a when the cam follower 134 is farthest from the center of the cylindrical cam 133 and the slide pusher 135a is advanced radially outward of the rotary table 3 against the biasing force of the tension spring 139. Is the position of the tip.

  The compression spring 138 is fitted into the nozzle portion 22 of the suction nozzles 2 and 2. In the nozzle portion 22, a flange 136 b extends from the side surface of the cylinder body. The flange 136b extends from the center side of the rotary table 3 with respect to the sleeve 136a. The compression spring 138 is installed with the flange 136b and the sleeve 136a as spring seats, and is biased in a direction to separate the flange 136b from the sleeve 136a. That is, the suction nozzles 2 and 2 are pushed toward the center of the rotary table 3.

  As shown in FIG. 9, when the flange 136b is extended from the rear ends of the suction nozzles 2, 2, the light transmitting body and the light guide body such as the triangular prism 24 or the glass body 26 and the reflection plate 27 are It is desirable that a light guide opening be provided on the side of the cylindrical body of the nozzle portion 22. On the other hand, as shown in FIG. 11, when the flange 136 b is extended from the middle of the cylinder body of the suction nozzles 2 and 2, the triangular prism 24 can be fixed to the rear end opening 25.

  In such an electronic component transport apparatus 1, in the relay unit 130, the motor is driven, the rotary table 3 is rotated 180 degrees, and one of the suction nozzles 2 is stopped directly below the one point 62 of the stop position. . In the advancing / retracting drive 131, the rotary motor 132a is driven, the cylindrical cam 133 moves the cam follower 134 in the direction away from the center, and the slide pusher 135a resists the urging force of the tension spring 139 along the rail 135b. Move to. The slide pusher 135a pushes the protrusion 137 existing in the advance direction downward, and the suction nozzle 2 including the protrusion 137 moves downward against the urging force of the compression spring 138.

  The suction nozzle 2 that has moved directly downward takes out the electronic component D from the supply unit 140 by negative pressure and holds it in the suction hole 21. In the advancing / retreating drive 131, when the suction nozzle 2 holds the electronic component D, the rotary motor 132a is driven, and the cylindrical cam 133 brings the cam follower 134 closer to the center. The slide pusher 135a that has lost the propulsive force by the cylindrical cam 133 and the cam follower 134 is retracted in the upward direction along the rail 135b by the biasing force of the tension spring 139. By the retraction of the slide pusher 135 a, the protrusion 137 and the slide pusher 135 a are separated from each other, and the suction nozzle 2 holding the electronic component D returns to the upward direction by the urging force of the compression spring 138.

  When the suction nozzle 2 holds the electronic component D and returns to the center side of the rotary table 3, the motor 4 of the relay unit 130 is driven to rotate the rotary table 3 by 180 degrees. At this time, the rotary table 3 is lightweight because only the suction nozzle 2 and the compression spring 138 are mounted, facilitating acceleration / deceleration, and the suction nozzle 2 moves at high speed by the weight reduction.

  During the rotation of the rotary table 3 by 180 degrees, the suction nozzle 2 holding the electronic component D passes through one point 61 of the non-stop section 6. At this time, the light projecting unit 51 of the component detection sensor 5 irradiates the right-angle prism 24 with the detection light, and the right-angle prism 24 reflects the detection light on the inclined surface 243 toward the inside of the nozzle unit 22. If the suction nozzle 2 holds the electronic component D, the detection light passing through the inside of the nozzle portion 22 is shielded by the electronic component D, and the suction nozzle 2 does not emit. Therefore, the light receiving unit 52 does not receive the detection light, and the component detection sensor 5 determines that the electronic component D is not dropped because the light receiving unit 52 does not receive the detection light.

  On the other hand, the detection light passing through the inside of the nozzle portion 22 is emitted from the suction hole 21 and reaches the light receiving portion 52 if the electronic component D is dropped from the suction nozzle 2. The light receiving unit 52 receives the detection light, and the component detection sensor 5 determines that the electronic component D is dropped because the light receiving unit 52 receives the detection light.

  The electronic component transport apparatus 6 includes a computer that integrally controls the processing unit 110, the handler 120, the relay unit 130, the component detection sensor 5, the supply unit 140, and the storage unit 150 in the base 102. The determination of omission is performed by this computer.

  When the suction nozzle 2 holding the electronic component D stops facing upward, the advance / retreat driving device 131 that moves the suction nozzle 2 facing upward moves the suction nozzle 2 holding the electronic component D in the upward direction. . The suction nozzle 123 of the handler 120 picks up the electronic component D from the suction nozzle 2 that has advanced while holding the electronic component D. When the electronic component D is delivered, the suction nozzle 2 of the relay unit 130 is moved backward by the advance / retreat drive device 131, moves downward, and returns to the routine for picking up the electronic component D from the supply unit 140.

  The handler 120 that has received the electronic component D from the relay unit 130 intermittently moves the electronic component D along the transport path 101, and each processing unit 110 processes the electronic component D. The electronic component D that goes around each processing unit 110 is finally accommodated in the accommodation knit 150.

  In such an electronic component transport apparatus 100, when the component detection sensor 5 determines that the electronic component D has dropped, the suction nozzle 123 of the handler 120 that should have received the electronic component D does not hold the electronic component D. Therefore, even when the suction nozzle 123 reaches each processing unit 110, the electronic component transport apparatus 100 keeps the advance / retreat driving device 124 and the processing unit 110 stationary. For example, when the storage unit 150 is a tray shift device, the storage unit 150 faces the empty pocket to the suction nozzle 123 even if the suction nozzle 123 that does not hold the electronic component D reaches the storage unit 150. Do not perform tray shift operation. Note that, when the component detection sensor 5 determines that the electronic component has dropped out, the operation of the electronic component transport apparatus 100 may be stopped.

  As shown in FIG. 12, the electronic component transport apparatus 100 according to the second application example includes a processing unit 110, a handler 120, and a supply unit 140. The handler 120 is the electronic component moving device 1 and includes two vertically mounted rotary tables 3 connected to each other. The supply unit 140 is arranged around one rotary table 3, the accommodation unit 150 is arranged around the other rotary table 3, and various processing units 110 are distributed around the two rotary tables 3. .

  As shown in FIGS. 13 and 14, each rotary table 3 has a star shape or a disk shape in which arms are arranged radially, and the center of the circle is pivotally supported by the rotation shaft of the motor 4. It rotates intermittently. The rotary table 3 is vertically arranged so that the plane on which the rotary table 3 expands and the plane on which the base 102 expands are orthogonal to each other. In other words, the rotary table 3 is vertically arranged so that the motor shaft of the motor 4 and the base 102 extend in parallel.

  The suction nozzle 2 is installed at a circumferentially equidistant position on the tip of each arm or on the outer periphery of the disk. The suction nozzle 2 extends along the cylinder axis in the radial direction of the rotary table 3, protrudes outward in the radial direction of the rotary table 3, and directs the suction hole 21 outward of the rotary table 3. The tip of each suction nozzle 2 is located on the same orbit concentric with the rotary table 3. Moreover, the rotation angle per pitch of the rotary table 3 by the motor 4 is the same as the angular interval of the suction nozzles 2, and each suction nozzle 2 stops at the same stop position. Each suction nozzle 2 is adjusted to stop at the closest position of both rotary tables 3.

  Between each stop position of the suction nozzle 2, there is a non-stop section 6. The handler 120 includes the component detection sensor 5 at one point 61 in at least one of the non-stop sections 6. When the electronic component D is received from the supply unit 140 by one rotary table 3, the electronic component D is transferred from both rotary tables 3, and the electronic component D is transferred to the accommodation unit 150 by the other rotary table 3, the electronic component D There is a high risk of falling off.

  Therefore, the first non-stop section 6 starting from the supply unit 140, the first non-stop section 6 after the electronic table D is received by the rotary table 3 to which the electronic component D is received, and the last non-stop section 6 ending at the receiving unit 150. It is preferable to install the component detection sensor 5 at one point 61 of each.

  A motor flange 132 b extends between the rotary table 3 and the motor 4. At the stop position of the suction nozzle 2, a rotation motor 132a, a cylindrical cam 133 and a cam follower 134, a rail 135b, a slide pusher 135a, and a tension spring 139 in the advance / retreat driving device 131 are installed. Each suction nozzle 2 is provided with a compression spring 138 of the advance / retreat driving device 131.

  In the stop position of the suction nozzle 2, the advance / retreat drive device 131 is not installed at a place where the processing unit 110 that makes the suction nozzle 2 advance / retreat unnecessary is installed. The processing unit 110 is, for example, a camera unit that captures an image of the electronic component D and detects a positional shift. However, in the handler 120 having two rotary tables 3, the processing unit 110 is not placed at the closest point of the adjacent rotary tables 3 in order to advance or retract one of the suction nozzles 2 facing the other. Although it is installation, the advancing / retreating drive device 131 is provided.

  In the electronic component transport apparatus 100 according to the second application example, one rotary pickup 3 is rotated by the motor 4, and one suction nozzle 2 faces the supply unit 140. The advancing / retreating drive device 131 disposed at the stop position of the suction nozzle 2 advances the suction nozzle 2 to the supply unit 140, and the suction nozzle 2 receives the electronic component D from the supply unit 140.

  When the suction nozzle 2 receives the electronic component D, the rotary table 3 rotates using the motor 4 as a drive source, and the suction nozzle 2 holding the electronic component D moves in the non-stop section 6 where the component detection sensor 5 is disposed. , It passes through one point 61 of the non-stop section 6. At this time, the component detection sensor 5 determines whether the electronic component D has fallen off from the suction nozzle 2 or has failed to be received. If the electronic component D has dropped off or has failed to be received, the electronic component transport apparatus 100 operates assuming that the suction nozzle 2 does not hold the electronic component D.

  When the suction nozzle 2 holding the electronic component D is positioned at the closest point of both rotary tables 3 via each processing unit 110, one of the suction nozzles 2 facing the rotary tables 3 is moved forward and backward. 131 advances toward the other suction nozzle 2 to deliver the electronic component D. The electronic component D moves to the rotary table 3 on the housing unit 150 side, and the component detection sensor 5 is arranged at one point 61 of the first non-stop section 6.

  When the suction nozzle 2 that has received the electronic component D from the rotary table 3 on the supply unit 140 side passes through one point 61 of the non-stop section 6, the component detection sensor 5 determines whether the electronic component D has dropped out or has failed to be received. If the electronic component D has dropped off or has failed to be received, the electronic component transport apparatus 100 operates assuming that the suction nozzle 2 does not hold the electronic component D. Alternatively, if the electronic component D has dropped off or has failed to be received, the operation of the electronic component transport apparatus 100 is stopped.

  Further, when the suction nozzle 2 holding the electronic component D reaches a position facing the storage unit 150 via each processing unit 110, the advance / retreat drive device 131 disposed at the stop position of the suction nozzle 2 moves the suction nozzle 2. The suction nozzle 2 passes the electronic component D to the storage unit 150.

  In such an electronic component conveying apparatus 100, the handler 120 can be composed of one or more rotary tables 3. Each rotary table 3 can be arranged vertically or horizontally. One handler 120 may be provided with the vertical rotary table 3 and the horizontal rotary table 3 connected to each other.

  As described above, in the electronic component moving device 1, the removal of the electronic component D from the suction nozzle 2 or the delivery failure is detected in the non-stop section 6 of the suction nozzle 2 that moves while holding the electronic component D in the suction hole 21. A component detection sensor 5 is provided. The suction nozzle 2 has a light guide opening, a translucent body, and a light guide body.

  The light guide port is the rear end opening 25 or the side opening 28 of the suction nozzle 2 and is provided at a position farther from the suction hole 21 than the negative pressure supply port 23 of the suction nozzle 2, and communicates with the inside and outside of the suction nozzle 2. Let The translucent body is a triangular prism 24, a glass body 26, or the like, which is provided between the negative pressure supply port 23 and the light guide port and blocks communication between the inside and outside of the nozzle. The light guide is a triangular prism 24 or a reflecting plate 27, etc., and bends light entering through the light guide opening and guides it into the suction nozzle 2. The component detection sensor 5 has the light projecting unit 51 and the light receiving unit 52 divided into positions facing the suction hole 21 and the light guide of the suction nozzle 2 passing through one point 61 of the non-stop section 6.

  As a result, if the suction nozzle 2 holds the electronic component D in the light receiving unit 52, the electronic component D is shielded and the detection light does not reach. On the other hand, if the electronic component D has dropped or failed to be received from the suction nozzle 2, the detection light emitted from the suction hole 21 reaches the light receiving unit 52. In addition, in this method, since the detection light is passed through the suction nozzle 2, the detection light is reliably transmitted to the electronic component D without being affected by the height change of the movement locus of the electronic component D due to wear of the suction nozzle 2. Irradiated. Therefore, the complicated position adjustment of the component detection sensor 5 is not required, and the presence / absence of holding of the electronic component D can be detected with high accuracy.

  Therefore, the electronic component moving apparatus 1 can confirm whether the electronic component D is held with respect to the suction nozzle 2 without effectively stopping the suction nozzle 2, and moves the electronic component D from one point 62 to another point 63. Travel time can be shortened.

  For this reason, by applying the electronic component moving apparatus 1 to the handler 120, the relay unit 130, or both of the electronic component transport apparatus 100, it is not necessary to stop the electronic component D in order to determine whether the electronic component D is dropped or failed to be delivered. The production speed of the part D is improved. Further, since the processing unit 110 for determining whether the electronic component D is dropped or failed to be delivered can be excluded from the stop position, there is a margin in the stop position of the suction nozzle 2, and a large number of processing units 110 can be arranged in a limited space. The electronic component transport apparatus 100 can be multi-functionalized.

  The light guide port opens at the end of the tube opposite to the suction hole 21 of the suction nozzle 2, and the suction nozzle 2 is fixed by closing the light guide port, and the transparent body and the suction nozzle 2 sealing the light guide port. Is provided with a triangular prism 24 that also serves as a light guide for guiding detection light. That is, light transmission, sealing, and light guiding functions can be combined with one optical component, the number of components can be reduced, and the production cost of the electronic component moving apparatus 1 can be suppressed.

  The light guide port opens to the body side of the suction nozzle 2, the light guide body is a reflecting plate 27 diagonally facing the light guide port, and the translucent body reflects from the light guide port or the negative pressure supply port 23. It was made to intervene between the plate 27. Thereby, the increase in the whole length of the suction nozzle 2 by an optical component can be prevented, and the enlargement of the rotary body containing the rotary table 3 can be prevented. Therefore, the situation where the weight of the rotary table 3 increases and the acceleration / deceleration becomes slow can be prevented, and the production speed of the electronic component D can be maintained.

  The light guide port opens to the body side of the suction nozzle 2, and the suction nozzle 2 has a triangular prism 26 that is installed inside the nozzle portion 22 so as to face the light guide port and serves as a light transmitting body and a light guide body. You can also Thereby, the increase suppression of the number of optical components and the enlargement prevention of the rotary table 3 can be made compatible.

(Other embodiments)
Each embodiment of the present invention has been described above, but various omissions, replacements, and changes can be made without departing from the scope of the invention. These embodiments and modifications thereof are included in the scope and gist of the invention, and are included in the invention described in the claims and the equivalents thereof.

DESCRIPTION OF SYMBOLS 1 Electronic component moving apparatus 2 Suction nozzle 21 Suction hole 22 Nozzle part 23 Negative pressure supply port 24 Right angle prism 241 1st square surface 242 2nd square surface 243 Slope 25 Rear end opening 26 Glass plate 27 Reflecting plate 28 Side part opening 3 Rotary Table 4 Motor 5 Component detection sensor 51 Emitting unit 52 Light receiving unit 6 Non-stop section 61 One point 62 One point 63 Other point 100 Electronic component conveying device 101 Conveying path 102 Base 110 Processing unit 120 Handler 121 Turret table 122 Direct drive motor 123 Adsorption Nozzle 124 advance / retreat drive device 124a motor 124b rod 130 relay unit 131 advance / retreat drive device 132a rotation motor 132b motor flange 133 cylindrical cam 134 cam follower 135a slide pusher 135b rail 136a sleeve 1 6b flange 137 protruding portions 138 a compression spring 139 tension spring 140 supplies knit 150 accommodating unit D electronic component

Claims (5)

A suction nozzle that has a cylindrical shape with an opening at one end and moves while holding an electronic component in the suction hole;
A sensor that is installed in a non-stop section of the suction nozzle and detects the presence or absence of the electronic component held by the suction nozzle;
With
The suction nozzle is
Open to the fuselage side, and has a negative pressure supply port for supplying negative pressure inside the suction nozzle,
A light guide port provided at a position farther from the suction hole than the negative pressure supply port, and communicating between the inside and outside of the suction nozzle;
A translucent body provided between the negative pressure supply port and the light guide port and blocking communication between the inside and outside of the suction nozzle;
A light guide that bends light through the light guide opening and guides the light into the suction nozzle;
Have
The sensor is
A light-receiving element and a light-emitting element that are installed separately at each position facing the suction hole of the suction nozzle passing through one point of the non-stop section and the light guide;
Have
The light receiving element is installed in a non-stop section in the movement path directly facing the suction hole of the suction nozzle passing therethrough,
The light guide opening opens at a cylindrical end opposite to the suction hole of the suction nozzle,
The suction nozzle is fixed by closing a light guide opening, the light transmissive body sealing the light guide opening, and the light guide body guiding the detection light emitted from the light emitting element inside the suction nozzle; Has a prism that doubles as
In the light receiving element, if the suction nozzle holds the electronic component, the electronic component is shielded from light, the detection light does not reach, and the suction nozzle does not hold the electronic component, The detection light exiting the suction hole reaches,
An electronic component moving device. A suction nozzle that has a cylindrical shape with an opening at one end and moves while holding an electronic component in the suction hole;
A sensor that is installed in a non-stop section of the suction nozzle and detects the presence or absence of the electronic component held by the suction nozzle;
With
The suction nozzle is
Open to the fuselage side, and has a negative pressure supply port for supplying negative pressure inside the suction nozzle,
A light guide port provided at a position farther from the suction hole than the negative pressure supply port, and communicating between the inside and outside of the suction nozzle;
A translucent body provided between the negative pressure supply port and the light guide port and blocking communication between the inside and outside of the suction nozzle;
A light guide that bends light through the light guide opening and guides the light into the suction nozzle;
Have
The sensor is
A light-receiving element and a light-emitting element that are installed separately at each position facing the suction hole of the suction nozzle passing through one point of the non-stop section and the light guide;
Have
The light receiving element is installed in a non-stop section in the movement path directly facing the suction hole of the suction nozzle passing therethrough,
The light guide opening opens to the body side of the suction nozzle,
The suction nozzle is installed inside the nozzle facing the light guide opening, and has a prism that serves as the light transmitting body and the light guiding body.
In the light receiving element, if the suction nozzle holds the electronic component, the electronic component is shielded from light, and the detection light emitted from the light emitting element does not reach, and the suction nozzle holds the electronic component. If not, the detection light that has exited the suction hole reaches,
An electronic component moving device. Comprising an electronic component movement device according to claim 1 or 2, the electronic component transporting apparatus performs various processing while aligning conveying the electronic components. A supply unit for housing the electronic component subjected to the various processes;
A handler for aligning and transporting the electronic components of the supply unit along an annular transport path;
Various processing units arranged along the transport path;
A housing unit for housing the electronic component transported by the handler;
With
The electronic component moving device is disposed between the supply unit and the handler as a relay unit that picks up the electronic component of the supply unit and passes it to the transport path ;
The electronic component conveying apparatus according to claim 3 . A supply unit for housing the electronic component subjected to the various processes;
A handler for aligning and transporting the electronic components of the supply unit along an annular transport path;
Various processing units arranged along the transport path;
A housing unit for housing the electronic component transported by the handler;
With
The electronic component moving device is arranged as the handler;
The electronic component conveying apparatus according to claim 3 .

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