JP6159426B2 - 高度の回転性を有するmemsヒンジ - Google Patents
高度の回転性を有するmemsヒンジ Download PDFInfo
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Description
その弾性の高さゆえに
結晶性シリコンをMEMSデバイスに用いて、優れたヒンジ及びその他の種のバネを製造することができる。かかるヒンジは、例えば、上述のように走査ミラーを支持するために好適である。動作の範囲及びヒンジ軸周りのミラーの回転の共振周波数は、シリコンヒンジのねじり特性によって決定される。
図1は、本発明の一実施形態に係る、MEMS走査ミラーアセンブリの模式図である。この図面では簡略化のために単一の走査軸を有するミラーを示すが、実施形態の原理は、上述の米国特許出願公開第2013/0207970号に記載されるもの等、多軸ジンバルミラーにも同様に適用されてもよい。便宜上、走査軸は図面においてZ軸として同定されており、Z軸周りの回転角度はφとして同定されている。
図6A〜図6Fは、本発明の実施形態に係る、高分子充填材料によって強化されたシリコンヒンジの作製プロセスにおける、ウェハを通した模式断面図である。この例では、ヒンジは絶縁体シリコン(SOI)ウェハ内に作製され、ウェハの中で絶縁基板34上に結晶性シリコン層32が重ねられている(図6A)が、MEMS技術において知られるとおり、他の種の基板を代替的に使用することもできる。
上述の実施形態は特に走査ミラーに関するものであるが、本発明の原理は他の種類のデバイス、特に(排他的ではないが)MEMSデバイスにも同様に適用されてもよい。以下の図に幾つかの例を示す。
Claims (20)
- 機械デバイスであって、
所定の長さ及び横断寸法を有する強固且つ弾性の材料からなる細長い要素と、
前記要素の少なくとも一端を固定するように構成される強固なフレームであって、前記要素は前記フレームに取り付けられており、且つ前記要素は、前記フレームに対して前記要素の長手方向軸の周りを回転するヒンジとして構成され、前記要素の長さ及び横断寸法によって決まる初期ねじりバネ定数K φ で前記要素がギャップ内で自由に動けるように、前記要素と前記フレームとの間で前記要素に沿って長手方向に設けられた前記ギャップを画定するように構成される強固フレームと、
前記強固且つ弾性の材料よりも柔らかい固形充填材料であって、前記要素と前記フレームとの間の前記ギャップの少なくとも一部を充填し、前記ギャップ内での前記長手方向軸の周りの前記要素の回転モードの動作を許可する一方で、前記要素の横断変形を抑制し、前記初期ねじりバネ定数K φ に対して20%以内で、ねじりバネ定数を増加させるように加えられる、固形充填材料と、
を備えることを特徴とする、機械デバイス。 - 前記細長い要素はビームを含むことを特徴とする、請求項1に記載のデバイス。
- 前記ビームは、前記ヒンジよりも幅広く、前記ヒンジを前記フレームに接続するアンカーを含むことを特徴とする、請求項2に記載のデバイス。
- ミラーを備え、前記ビームの第1の端は前記フレームに取り付けられ、一方で前記ビームの第2の端は前記ミラーに取り付けられて、前記ミラーが前記フレームに対して前記ヒンジ上で回転することを特徴とする、請求項2に記載のデバイス。
- 前記フレームと前記ヒンジとの間の相対的な回転を感知するように構成されるセンサを備えることを特徴とする、請求項2に記載のデバイス。
- 前記センサは、前記相対的な回転に反応して前記デバイスの加速を感知するように構成されることを特徴とする、請求項5に記載のデバイス。
- コイル軸に沿って並進するように構成された永久磁石を備え、前記フレームと前記ヒンジとの間の相対的な回転によって生成されるエネルギーを取り入れるように連結されるエネルギーハーベスティングアセンブリを備えることを特徴とする、請求項2に記載のデバイス。
- 前記細長い要素はぜんまいバネとして構成されることを特徴とする、請求項1に記載のデバイス。
- 前記フレーム及び前記細長い要素は半導体ウェハの一部分を含み、前記ギャップは、前記フレームと前記細長い要素との間でエッチングされたものであることを特徴とする、請求項1〜8のいずれか1項に記載のデバイス。
- 前記充填材料は、前記細長い要素のものよりも少なくとも50%高いポアソン比、及び前記細長い要素のものより少なくとも50%少ないヤング係数を有することを特徴とする、請求項1〜8のいずれか1項に記載のデバイス。
- 前記充填材料は、ポリマー及び接着剤からなる材料の群から選択されることを特徴とする、請求項10に記載のデバイス。
- 前記充填材料は、ナノチューブのアレイを含むことを特徴とする、請求項1〜8のいずれか1項に記載のデバイス。
- 機械デバイスを製造する方法であって、
強固且つ弾性のある材料から、所定の長さ及び横断寸法を有し、少なくともその一端が強固フレームに取り付けられる細長い要素を、前記要素と前記フレームとの間で前記要素に沿って長手方向に設けられたギャップを有するように形成することであって、前記要素が、前記フレームに対して前記要素の長手方向軸の周りを回転するヒンジとして構成され、前記要素の長さ及び横断寸法によって決まる初期ねじりバネ定数K φ で前記ギャップ内で自由に動作可能であるように形成することと、
前記ギャップの少なくとも一部を、前記強固且つ弾性のある材料よりも柔らかい固形充填材料で充填することであって、前記ギャップ内での前記長手方向軸の周りの前記要素の回転動作モードを許可する一方で、前記要素の横断変形を抑制し、前記初期ねじりバネ定数K φ に対して20%以内で、ねじりバネ定数を増加させるように前記固形充填材料が加えられることと、
を含むことを特徴とする、機械デバイスを製造する方法。 - 前記細長い要素はビームを含むことを特徴とする、請求項13に記載の機械デバイスを製造する方法。
- 前記ビームの第1の端は前記フレームに取り付けられ、前記方法は、前記ビームの第2の端にミラーを取り付けることを含み、前記ミラーが前記フレームに対して前記ヒンジ上で回転するように取り付けることを特徴とする、請求項14に記載の機械デバイスを製造する方法。
- 前記充填材料は、前記細長い要素のものよりも少なくとも50%高いポアソン比、及び前記細長い要素のものより少なくとも50%少ないヤング係数を有することを特徴とする、請求項13〜15のいずれか1項に記載の機械デバイスを製造する方法。
- 前記充填材料は、ポリマー及び接着剤からなる材料の群から選択されることを特徴とする、請求項16に記載の機械デバイスを製造する方法。
- 前記強固且つ弾性の材料は半導体ウェハを含み、前記細長い要素を形成することは、前記半導体ウェハを、前記ギャップを前記フレームと前記細長い要素との間に有して、前記フレームと前記細長い要素の両方を画定するようにエッチングすることを含むことを特徴とする、請求項13〜15のいずれか1項に記載の機械デバイスを製造する方法。
- 前記ギャップの少なくとも一部を充填することは、前記ギャップをエッチングした後に、前記充填材料が前記ギャップを充填するように前記ウェハを前記充填材料でコーティングして、次に前記充填材料の過剰分を前記ギャップの外に除去することを含むことを特徴とする、請求項18に記載の機械デバイスを製造する方法。
- 前記充填材料は、ナノチューブのアレイを備えることを特徴とする、請求項13〜15のいずれか一項に記載の機械デバイスを製造する方法。
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