JP6157396B2 - Link device - Google Patents

Description

  The present invention relates to a link device. In particular, the present invention relates to a link device that eliminates unstable operation at the dead point of the parallel link mechanism and enables high-precision positioning of the parallel link mechanism and, in turn, a member connected to the parallel link mechanism.

  2. Description of the Related Art Conventionally, substrate processing apparatuses that perform various types of processing such as plasma processing on semiconductor substrates are known. The substrate processing apparatus usually includes a transport device for transporting a substrate (see, for example, Patent Document 1).

In many cases, the transport apparatus includes a link mechanism such as a parallel link mechanism.
Here, it is known that the parallel link mechanism performs an unstable operation at a dead point where the four link members constituting the mechanism are aligned in a straight line in a plan view. Specifically, even if the link members facing each other among the four link members are in a parallel state before passing the dead center, the parallel state may be maintained after passing the dead point. In some cases, the parallel state may collapse. If the parallel state is broken, the desired operation is not performed, and therefore, the parallel link mechanism, and hence the members connected to the parallel link mechanism cannot be positioned with high accuracy.

In order to eliminate the unstable operation at the dead point as described above, for example, Patent Document 2 proposes a link device in which two parallel link mechanisms are combined to complement each other's dead point. Specifically, when one parallel link mechanism becomes dead point, the other parallel link mechanism does not become dead point so that the operation of the entire link mechanism does not become unstable. A link device has been proposed.
However, in the link device described in Patent Document 2, it is necessary to combine two parallel link mechanisms in order to perform an operation that should be originally performed by one parallel link mechanism in a stable state. There is a problem that it cannot be miniaturized.

Further, in order to eliminate unstable operation at the dead center, for example, in Patent Document 3, the length of one link member pair is not the total length of one link member pair adjacent to each other, instead of a complete parallel link mechanism. A link device using a quasi-parallel link mechanism set larger than the sum of the above has been proposed.
However, since the link device described in Patent Document 3 does not use a complete parallel link mechanism, the opposing link members do not move in parallel. For this reason, it is difficult to apply to the link apparatus used for the use which needs to perform highly accurate positioning of a board | substrate, such as the conveying apparatus of the substrate processing apparatus mentioned above.

JP 11-168129 A JP2012-152851A JP-A-9-77484

  The present invention has been made to solve such problems of the prior art, eliminates unstable operation at the dead point of the parallel link mechanism, and eliminates the problem of the members connected to the parallel link mechanism and thus the parallel link mechanism. It is an object of the present invention to provide a link device capable of highly accurate positioning.

In order to solve the above-mentioned problem, the present inventors first studied earnestly about the behavior of the unstable operation of the parallel link mechanism at the dead point.
FIG. 1 is a schematic diagram illustrating an unstable operation of the parallel link mechanism.
The parallel link mechanism shown in FIG. 1A includes a fixed link member 41, a drive link member 42 having one end portion 42 a rotatably attached around one end portion of the fixed link member 41, and the fixed link member 41. A driven link member 43 having one end 43a attached so as to be rotatable around the other end, and a connecting link member 44 for connecting the other end 42b of the drive link member 42 and the other end 43b of the driven link member 43. It comprises.
In the state shown in FIG. 1A, the opposing link members are parallel to each other, and the four link members form a parallelogram. That is, the drive link member 42 and the driven link member 43 are parallel, and the fixed link member 41 and the connection link member 44 are parallel. Therefore, the angle θ formed by the longitudinal direction of the drive link member 42 with respect to the longitudinal direction of the fixed link member 41 and the angle θ formed by the longitudinal direction of the driven link member 43 with respect to the longitudinal direction of the fixed link member 41 are the same. It is.
In the parallel link mechanism shown in FIG. 1A, the other end portion 43b of the driven link member 43 is located at a position farther from the intermediate point of the fixed link member 41 than the other end portion 42b of the drive link member 42. The link members 42 and 43 are in a state of rotating.

In the parallel link mechanism shown in FIG. 1A, when the drive link member 42 is rotated clockwise, the connecting link member 44 is moved thereby, and the driven link member 43 is also rotated clockwise. At this time, the driven link member 43 moves in parallel with the drive link member 42, and the connection link member 44 moves in parallel with the fixed link member 41. Then, as shown in FIG. 1B, the fixed link member 41, the drive link member 42, the driven link member 43, and the connecting link member 44 reach a dead center where they are aligned in a straight line.
Each link member 41 to 44 reaches the dead point when the drive link member 42 and the driven link member 43 rotate in different planes. That is, this is a case where the drive link member 42 and the driven link member 43 rotate in planes at different positions in the direction perpendicular to the paper surface of FIG.

Depending on the application of the parallel link mechanism, it may be necessary to further rotate the drive link member 42 beyond the dead point.
When the drive link member 42 further rotates clockwise after reaching the dead point shown in FIG. 1B, the link members facing each other maintain a parallel state as shown in FIG. 1C. the angle theta ₁ which the longitudinal direction forms a driving link member 42 relative to the longitudinal direction of the case (stationary link member 41 to transition to the longitudinal direction of the angle of the driven link member 43 relative to the longitudinal direction of the fixed link members 41 ₁ ), and when the parallel state of the link members facing each other collapses and transitions as shown in FIG. 1D (the direction of the drive link member 42 with respect to the longitudinal direction of the fixed link member 41). The angle θ ₂ formed by the longitudinal direction is different from the angle θ ₃ formed by the longitudinal direction of the driven link member 43 with respect to the longitudinal direction of the fixed link member 41. It is understood that both θ ₃ > θ ₂ ) exist. It was.
The state shown in FIG. 1D is a state in which the driven link member 43 rotates faster than the drive link member 42 after reaching the dead point.

From the above examination results, the present inventors have rotated the driven link member 43 quickly when the parallel state of the link members facing each other collapses after reaching the dead point (FIG. 1D). I found out that this is the cause.
Based on this result, the present inventors have further studied earnestly, and in the direction opposite to the rotation direction (in the example shown in FIG. 1, the counterclockwise direction) in the vicinity of the dead center with respect to the driven link member 43. If the resistance force is applied, the driven link member 43 becomes difficult to rotate, so that the drive link member 42 and the driven link member 43 are maintained in a parallel state, and thus the link members facing each other are maintained in a parallel state. It was found that a transition occurs (FIG. 1 (c)).

The present invention has been completed based on the findings of the inventors.
That is, in order to solve the above-mentioned problem, the present invention provides a fixed link member, a drive link member having one end portion attached so as to be rotatable in the horizontal direction around one end portion of the fixed link member, and the fixed link member. A follower link member having one end attached to the other end of the drive link member so as to be rotatable in a horizontal direction, and a link member connecting the other end of the drive link member and the other end of the follower link member. A parallel link mechanism in which the driven link member moves in parallel with the drive link member, and the connecting link member moves in parallel with the fixed link member; The drive link member and the driven link member based on the dead point where the fixed link member, the drive link member, the driven link member, and the connecting link member are aligned in a straight line in plan view In the rotational direction before and after the vicinity, with respect to the driven link member, providing a link device, characterized in that it comprises a resistance imparting mechanism that imparts resistance in the direction opposite to the rotation direction of the driven link member.

  According to the link device of the present invention, the driven link member is rotated with respect to the driven link member in the vicinity of the rotation direction of the driven link member and the driven link member with reference to the dead point by the resistance applying mechanism. Resistance is applied in the direction opposite to the direction. For this reason, the driven link member becomes difficult to rotate, and as a result, the drive link member and the driven link member transition so as to maintain a parallel state, and thus the link members facing each other of the parallel link mechanism maintain a parallel state. Accordingly, the unstable operation at the dead point of the parallel link mechanism is resolved, and the parallel link mechanism and, consequently, the member connected to the parallel link mechanism can be positioned with high accuracy.

  Preferably, the resistance applying mechanism is a roller attached to the driven link member so as to be vertically displaceable, a guide member that is disposed at a position facing the roller, and the roller rolls, and the dead center. And a guide member having a convex portion projecting toward the driven link member in the vicinity of the front and rear of the driven link member with respect to the rotation direction.

According to such a preferable configuration, since the guide member has the convex portion protruding toward the driven link member in the vicinity of the rotation direction of the driven link member with respect to the dead point, the roller rolls on this convex portion. At that time (when riding on the convex portion and moving in the vertical direction), a resistance force is applied in a direction opposite to the rotation direction of the driven link member.
Accordingly, it is possible to apply a resistance force in a direction opposite to the rotation direction of the driven link member with a relatively simple configuration.

Moreover, in order to solve the said subject, the present inventors examined earnestly, and after reaching a dead center, in order not to collapse the parallel state of mutually opposing link members, it was based on the dead center. Adopting a configuration that regulates the rotation paths of the drive link member and the driven link member so that the drive link member and the driven link member move in parallel with each other in the vicinity of the rotation direction of the drive link member and the driven link member. I found out that it may be.
That is, in order to solve the above-mentioned problem, the present invention provides a fixed link member, a drive link member having one end portion attached so as to be rotatable in the horizontal direction around one end portion of the fixed link member, and the fixed link member. A follower link member having one end attached to the other end of the drive link member so as to be rotatable in a horizontal direction, and a link member connecting the other end of the drive link member and the other end of the follower link member. A parallel link mechanism in which the driven link member moves in parallel with the drive link member, and the connecting link member moves in parallel with the fixed link member; fixing the link member, the driving link member, the driven link member and the driving link member and the driven link member relative to the dead center of the connecting link members are aligned on a straight line in plan view A rotation path regulating mechanism that regulates the rotation path of the drive link member and the driven link member so that the drive link member and the driven link member move in parallel with each other in the vicinity of the rotation direction. It is provided also as a link device characterized by comprising.

  According to the link device of the present invention, the drive link member and the driven link member are parallel to each other in the vicinity of the front and rear in the rotation direction of the drive link member and the driven link member with reference to the dead point by the rotation path restriction mechanism. The rotation path of the drive link member and the driven link member is restricted so as to move. For this reason, even after reaching the dead point, the drive link member and the driven link member are maintained in a parallel state, and the parallel state is not broken and does not change. Accordingly, the unstable operation at the dead point of the parallel link mechanism is resolved, and the parallel link mechanism and, consequently, the member connected to the parallel link mechanism can be positioned with high accuracy.

  Preferably, the rotation path restriction mechanism faces either one of the drive link member and the driven link member in one of the drive link member and the driven link member. A groove provided on the surface side and extending in a direction perpendicular to the longitudinal direction of the one link member, and attached to the surface side of the other link member facing the one link member, is rolled in the groove. And a moving roller.

According to such a preferable configuration, in the vicinity of the front and rear of the driving link member and the driven link member with respect to the dead center, the roller attached to the other link member is provided in the concave groove provided in the one link member. Therefore, the rotation paths of both link members are restricted. Since the groove extends in a direction perpendicular to the longitudinal direction of the one link member, the other link member to which the roller is attached moves in parallel with the one link member provided with the groove. Become.
Accordingly, the drive link member and the driven link member can move in parallel with each other with a relatively simple configuration.

  As described above, according to the present invention, the unstable operation at the dead point of the parallel link mechanism can be eliminated, and the parallel link mechanism, and hence the members connected to the parallel link mechanism can be positioned with high accuracy.

FIG. 1 is a schematic diagram illustrating an unstable operation of the parallel link mechanism. FIG. 2 is a diagram illustrating a configuration of a substrate transfer apparatus to which a link mechanism according to an embodiment of the present invention is applied. FIG. 3 is a diagram illustrating a substrate transport apparatus in a state where the drive link member and the driven link member illustrated in FIG. 2 are rotated before the dead center and a specific configuration example of the resistance force applying mechanism. FIG. 4 is an enlarged view showing a specific configuration example of the rotation path regulating mechanism.

Hereinafter, an embodiment of the present invention will be described with reference to the accompanying drawings.
FIG. 2 is a diagram illustrating a configuration of a substrate transfer device to which the link device according to an embodiment of the present invention is applied. FIG. 2A is a plan view, and FIG. 2B is a front view. In FIG. 2A, the guide member 22 described later is illustrated as transparent from the viewpoint of visibility.
As shown in FIG. 2, the substrate transport apparatus 100 of the present embodiment includes a first gear mechanism 10, a second gear mechanism 20, a rotation base 30, a first parallel link device 40, a second parallel link device 50, and a substrate. A holding base 60 and a fixed base 70 are provided. The rotation base 30 is fitted to the fixed base 70 so as to be rotatable.
The substrate transfer apparatus 100 is an apparatus for transferring a semiconductor substrate in a substrate processing apparatus (not shown). A substrate holding jig (not shown) for mounting and holding the substrate is attached to the substrate holding base 60, and the rotation of the rotation base 30, the first parallel link device 40, and the second parallel link. The substrate holding jig operating integrally with the substrate holding base 60 is controlled to move to a predetermined position by the parallel movement of the parallel link mechanism provided in the apparatus 50.

The first parallel link device 40 corresponds to a link device according to an embodiment of the present invention. The first parallel link device 40 includes a parallel link mechanism 1 and a resistance force applying mechanism 2.
The parallel link mechanism 1 includes a fixed link member 41, a drive link member 42, a driven link member 43, and a connecting ring member 44.
In the present embodiment, the rotation base 30 functions as the fixed link member 41. That is, one end portion of the drive link member 42 is attached to the rotation base 30, and the drive link member 42 can rotate around the rotation axis AX <b> 1 with respect to the rotation base 30. Further, one end of the driven link member 43 is attached to the rotation base 30, and the driven link member 43 is around the rotation axis that is at the same position as the rotation axis AX <b> 1 in front view with respect to the rotation base 30. It can be rotated. The positions of the rotation axis AX1 of the drive link member 42 and the rotation axis of the driven link member 43 in the rotation base 30 do not change even when the drive link member 42 rotates. Accordingly, the portion of the rotation base 30 between the rotation axis AX1 of the drive link member 42 and the rotation axis of the driven link member 43 functions as the fixed link member 41.

  The connecting link member 44 connects the other end of the drive link member 42 and the other end of the driven link member 43. The drive link member 42 and the driven link member 43 can be rotated around a predetermined rotation axis at the other end with respect to the connection link member 44.

  As shown in FIG. 2B, the drive link member 42 is attached at a position vertically above the driven link member 43, and therefore the drive link member 42 rotates as will be described later. Thus, the fixed link member 41, the drive link member 42, the driven link member 43, and the connecting link member 44 reach a dead center where they are aligned on a straight line in plan view.

  In the parallel link mechanism 1 having the above configuration, when the drive link member 42 is rotated about the rotation axis AX1 by a drive source (not shown) such as a motor, the driven link member 43 is parallel to the drive link member 42. The connecting link member 44 moves in parallel with the fixed link member 41 (the rotation base 30).

FIG. 3 is a diagram illustrating the substrate transfer apparatus 100 in a state where the drive link member 42 and the driven link member 43 are rotated until they are located before the dead center, and a specific configuration example of the resistance applying mechanism 2. FIG. 3A is a plan view of the substrate transfer apparatus 100 in a state in which the drive link member 42 and the driven link member 43 are rotated clockwise from the state shown in FIG. is there. FIG. 3B is an enlarged cross-sectional view illustrating a specific configuration example of the resistance applying mechanism 2. Specifically, FIG. 3B is an enlarged cross-sectional view along the line AA shown in FIG.
The resistance applying mechanism 2 has a dead center where the fixed link member 41, the drive link member 42, the driven link member 43, and the connecting link member 44 are aligned on a straight line in a plan view (position along the straight line X shown in FIG. 3A). ), A resistance force is applied to the driven link member 43 in a direction opposite to the rotational direction of the driven link member 43 in the vicinity of the rotational direction of the driven link member 43 and the driven link member 43.
As shown in FIG. 3A, when the driven link member 43 rotates clockwise, the resistance force applying mechanism 2 applies resistance force counterclockwise. When the driven link member 43 passes through the dead point (straight line X) and then rotates counterclockwise toward the dead point, the resistance applying mechanism 2 applies the resistance in the clockwise direction.

As shown in FIG. 3B, the resistance applying mechanism 2 of the present embodiment includes a roller 21 attached to the driven link member 43 by an elastic member 23 such as a spring so as to be vertically displaced, and a position facing the roller 21. (In this embodiment, it is disposed below), and the roller 21 includes a guide member 22 that rolls on the surface thereof. The guide member 22 is fixed to the rotary base 30. The roller 21 can rotate at least along the rotation direction of the driven link member 43.
The guide member 22 has a protruding portion 221 protruding toward the driven link member 42 in the vicinity of the rotation direction of the driven link member 43 with respect to the dead point X (the direction of the solid arrow shown in FIG. 3B). Have. The surface of the convex portion 221 of the present embodiment includes an inclined surface 221a located near the rear side of the dead point X (the rear side in the rotational direction of the driven link member 43) and the front side of the dead point X (the rotation of the driven link member 43). It is composed of an inclined surface 221b located in the vicinity of the front side in the moving direction and a horizontal flat surface 221c that connects both the inclined surfaces 221a and 221b.

According to the first parallel link device 40 according to the present embodiment, the driven link member 43 is located near the front and rear in the rotational direction of the drive link member 42 and the driven link member 43 with respect to the dead point X by the resistance applying mechanism 2. On the other hand, a resistance force is applied in the direction opposite to the rotation direction of the driven link member 43.
That is, since the guide member 22 provided in the resistance applying mechanism 2 has the convex portion 221 protruding toward the driven link member 43, the roller 21 provided in the resistance applying mechanism 2 rolls the convex portion 221. (Specifically, when it rides on the rear inclined surface 221a of the convex portion 221 and is displaced upward), the direction opposite to the rotational direction of the driven link member 43 (in the example shown in FIG. 3, the counterclockwise direction). ) Will be given resistance. In addition, when the driven link member 43 rotates clockwise and passes through the dead point (straight line X) and then rotates counterclockwise toward the dead point, the roller 21 is on the front side of the convex portion 221. When riding on the inclined surface 221b and moving upward, a resistance force is applied clockwise.
As a result, the driven link member 43 becomes difficult to rotate, so that the drive link member 42 and the driven link member 43 are parallel to each other as shown in FIG. Transition is performed so that the link members to be maintained maintain a parallel state.
Accordingly, the unstable operation at the dead point X of the parallel link mechanism 1 is eliminated, and the parallel link mechanism 1 and, in turn, the members connected to the parallel link mechanism 1 can be positioned with high accuracy.

  In the present embodiment, the configuration including the roller 21 and the guide member 22 (the guide member 22 having the convex portion 221) on which the roller 21 rolls as an example is illustrated as the resistance applying mechanism 2. However, the present invention is not limited to this, and the rotation of the driven link member 43 with respect to the driven link member 43 in the vicinity of the driving link member 42 and the driven link member 43 in the vicinity of the rotation direction with respect to the dead point X. As long as resistance can be applied in the direction opposite to the direction, various forms can be adopted.

  Note that, instead of the resistance applying mechanism 2 of the present embodiment, the drive link member 42 and the driven link member 43 are mutually connected in the vicinity of the rotation direction of the drive link member 42 and the driven link member 43 based on the dead point. It is also possible to provide a rotation path restriction mechanism that restricts the rotation paths of the drive link member 42 and the driven link member 43 so as to move in parallel.

FIG. 4 is an enlarged view showing a specific configuration example of the rotation path regulating mechanism. Specifically, FIG. 4 is an enlarged view in a state where the drive link member 42 and the driven link member 43 are rotated until they are positioned in front of the dead point X. 4A is a partial plan view, and FIG. 4B is a cross-sectional view taken along the line BB shown in FIG. 4B.
As shown in FIG. 4, the rotation path regulation mechanism 3 of the present embodiment is configured such that in any one of the drive link member 42 and the driven link member 43 (the driven link member 43 in the example shown in FIG. 4), The driven link member 42 and the driven link member 43 are provided on the side (the upper surface in the example shown in FIG. 4) facing the other link member (the drive link member 42 in the example shown in FIG. 4). A groove 31 extending in a direction orthogonal to the longitudinal direction of 43 (the vertical direction of the paper surface of FIG. 4) and the surface of the drive link member 42 facing the driven link member 43 (the lower surface in the example shown in FIG. 4) are attached. And a roller 32 that rolls in the groove 31.

  In the present embodiment, two rollers 32 (32 a and 32 b) are provided along a direction orthogonal to the longitudinal direction of the drive link member 42. Further, the rotation path regulating mechanism 3 of the present embodiment is attached to the lower surface side of the drive link member 42 and extends in the longitudinal direction of the drive link member 42, and the longitudinal direction of the drive link member 42 along the shaft 33. And a slidable stage 34. The roller 32 is attached to the stage 34 so as to be rotatable around a predetermined axis in the vertical direction, that is, to be rotatable in a direction indicated by a dotted arrow in FIG.

According to the rotation path restriction mechanism 3 of the present embodiment, the drive link member 42 and the driven link member 43 are in the vicinity of the drive link member 42 and the driven link member 43 around the dead point X in the vicinity of the rotation direction. The rotation paths of the drive link member 42 and the driven link member 43 are restricted so as to move in parallel.
That is, the rollers 32 attached to the drive link member 42 pass through the concave groove 31 provided in the driven link member 43 in the vicinity of the front and rear of the rotation direction of the drive link member 42 and the driven link member 43 with respect to the dead center X. Since it rolls, the rotation path | route of both the link members 42 and 43 is controlled by this. Since the groove 31 extends in a direction perpendicular to the longitudinal direction of the driven link member 43, the drive link member 42 to which the roller 32 is attached moves in parallel to the driven link member 43 provided with the groove 31. Will do.
For this reason, even after reaching the dead center X, the driving link member 42 and the driven link member 43 are maintained in a parallel state, and the parallel state is not broken and does not change. Accordingly, the unstable operation at the dead point X of the parallel link mechanism 1 is eliminated, and the parallel link mechanism 1 and, in turn, the members connected to the parallel link mechanism 1 can be positioned with high accuracy.
Since the roller 32 is attached to a stage 34 that can slide in the longitudinal direction of the drive link member 42, when the roller 32 rolls in the concave groove 31, the roller 32 and the drive link member 42 in the longitudinal direction. Can be moved to. For this reason, the roller 32 can roll in the concave groove 31 smoothly.

In the present embodiment, the configuration in which the roller 32 is attached to the drive link member 42 and the concave groove 31 is provided in the driven link member 43 is illustrated. However, the present invention is not limited to this, and it is of course possible to adopt a configuration in which the roller 32 is attached to the driven link member 43 and the concave groove 31 is provided in the drive link member 42.
Further, the drive link member 42 and the driven link member 43 are moved in parallel with each other in the vicinity of the front and rear in the rotation direction of the drive link member 42 and the driven link member 43 with respect to the dead center X. As long as the rotation path of the driven link member 43 can be regulated, various forms can be adopted.

Moreover, in this embodiment, although illustrated about the structure which each link member 41-44 actually rotates in a horizontal direction (it rotates in a predetermined horizontal surface), the parallel link mechanism with which the link apparatus which concerns on this invention comprises is provided. Is not necessarily limited to this.
That is, as long as each link member 41 to 44 included in the parallel link mechanism can be rotated in the horizontal direction, the parallel link mechanism as a whole can be used as the resistance applying mechanism 2 or the rotation path restriction when actually used. For example, the link members 41 to 44 can be rotated in the vertical direction by rotating by 90 ° together with the mechanism 3.
In this case, the dead point is a state in which the link members 41 to 44 are aligned in a straight line when viewed from a direction (that is, a horizontal direction) orthogonal to a surface (vertical surface) on which the link members 41 to 44 rotate. It is. Further, the roller 32 of the resistance applying mechanism 2 is displaced in the horizontal direction.

DESCRIPTION OF SYMBOLS 1 ... Parallel link mechanism 2 ... Resistance-applying mechanism 21 ... Roller 22 ... Guide member 40 ... Link apparatus (1st parallel link apparatus)
42... Drive link member 43... Followed link member 221.

Claims (4)

A fixed link member, a drive link member attached to one end of the fixed link member so as to be rotatable in the horizontal direction, and a rotatable link in the horizontal direction around the other end of the fixed link member A driven link member having one end attached thereto, a connecting link member connecting the other end of the drive link member and the other end of the driven link member, and the drive link member rotating. A parallel link mechanism in which the driven link member moves in parallel with the drive link member, and the connecting link member moves in parallel with the fixed link member;
In the vicinity of the driving link member and the driven link member before and after the rotation direction based on the dead point where the fixed link member, the driving link member, the driven link member and the connecting link member are aligned in a straight line in plan view, A resistance force applying mechanism that applies a resistance force to the driven link member in a direction opposite to the rotation direction of the driven link member;
A link device comprising: The resistance applying mechanism is
A roller attached to the driven link member so as to be vertically displaceable;
A guide member that is disposed at a position facing the roller and on which the roller rolls, and that protrudes toward the driven link member in the vicinity of the front and rear of the driven link member with respect to the dead center. A guide member having a portion;
The link device according to claim 1, further comprising: A fixed link member, a drive link member attached to one end of the fixed link member so as to be rotatable in the horizontal direction, and a rotatable link in the horizontal direction around the other end of the fixed link member A driven link member having one end attached thereto, a connecting link member connecting the other end of the drive link member and the other end of the driven link member, and the drive link member rotating. A parallel link mechanism in which the driven link member moves in parallel with the drive link member, and the connecting link member moves in parallel with the fixed link member;
In the vicinity of the driving link member and the driven link member before and after the rotation direction based on the dead point where the fixed link member, the driving link member, the driven link member, and the connecting link member are aligned in a straight line in plan view, A rotation path regulating mechanism that regulates a rotation path of the drive link member and the driven link member so that the drive link member and the driven link member move in parallel with each other;
A link device comprising: The rotation path restriction mechanism is
In one of the drive link member and the driven link member, the one link member is provided on the surface facing the other link member of the drive link member and the driven link member. A groove extending in a direction perpendicular to the longitudinal direction of
A roller attached to the surface of the other link member facing the one link member and rolling in the groove;
The link device according to claim 3, further comprising:

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