JP6155687B2 - Substrate transfer apparatus and substrate transfer processing system - Google Patents

Description

  The present invention relates to a substrate transport apparatus for transporting a substrate such as a sheet-shaped glass substrate or a plastic substrate in the transport direction, and to transport the sheet-shaped substrate in the transport direction and etching the substrate, PVD process, CVD process, etc. The present invention relates to a substrate transfer processing system that performs the above process.

  Substrate transport devices used in the field of clean transport are a roller drive type that rotates a plurality of transport rollers that support a substrate at intervals in the transport direction, and an endless transport belt that continuously supports a substrate in the transport direction. Can be broadly classified into a belt drive type that circulates the belt. In recent years, development of a belt-driven type substrate transport apparatus capable of reducing vibration of a substrate being transported has been actively performed as compared with a roller-driven type substrate transport apparatus. The general configuration of the belt driving type substrate transport apparatus will be described as follows.

  The belt-driven type substrate transport apparatus includes an apparatus base, and a pair of support members extending in the transport direction are provided on the apparatus base so as to be separated from each other in the transport width direction perpendicular to the transport direction. . Each support member is provided with a plurality of rollers (belt wheels) so as to be rotatable around an axis parallel to the conveyance width direction. Each of the plurality of rollers is wound with an endless conveyance belt that can circulate and supports an end portion (one end portion or the other end portion) in the width direction of the substrate. The upper part) extends in the transport direction. Furthermore, a traveling motor that circulates a pair of conveying belts synchronously is provided at an appropriate position on the apparatus base.

  In addition, there exist some which are shown to patent document 1 and patent document 2 as a prior art relevant to this invention.

JP 2011-157199 A JP 2006-306593 A

  By the way, in order to sufficiently reduce the vibration of the substrate being transported and prevent the substrate from being damaged, a belt guide provided at a position corresponding to each transport belt is used, and the support surface of each belt guide is used to support the transport belt. It is necessary to guide and support the upper part in the conveying direction to suppress the slack of the upper part of each conveying belt. On the other hand, if an attempt is made to guide and support the upper portion of the transport belt by the support surface of each belt guide, dust (dust) is generated due to wear of the transport belt or the belt guide, and the cleanliness of the clean environment is reduced.

  That is, there is a problem that it is not easy to prevent damage to the substrate being transported while suppressing a decrease in cleanliness in a clean environment.

  Therefore, an object of the present invention is to provide a substrate transport apparatus having a novel configuration that can solve the above-described problems.

According to a first aspect of the present invention, in a substrate transport apparatus (belt drive type substrate transport apparatus) that transports a sheet-like substrate in the transport direction, the apparatus base is separated from the apparatus base in a transport width direction orthogonal to the transport direction. A pair of support members provided, a plurality of rollers (belt wheels) provided on each support member so as to be rotatable about an axis parallel to the conveyance width direction, and wound on each of the plurality of rollers, at least on the upper side portion (the portion located on the upper side) extends into the conveying direction, the end portion in the width direction of the substrate and the conveyor belt (one end or the other end) circulating drivable endless supporting the, for each conveyor belt provided at a position corresponding to the upper portion, said extending in the conveying direction, has a concave support surface for supporting the said conveying direction an upper portion in a state of being projected upward of the conveyor belt, clean the interior Cha containing gas Bar is formed, said chamber has become connectable to a gas supply source for supplying a clean gas, the nozzle hole for injecting clean gas toward the upper portion of the conveyor belt to the support surface is formed, the nozzle a belt guide hole communicates with the said chamber, a travel motor for circulating running synchronously a pair of said conveyor belt, Ru der that provided with the.

  Here, in the specification and claims of the present application, “sheet-like substrate” includes a plate-like substrate and a belt-like substrate. Further, “standing” means not only that it is set up directly, but also that it is set up indirectly via another member. In addition to being provided, it is intended to include being provided indirectly through another member. Furthermore, “clean gas” means clean air, clean nitrogen gas, clean argon gas, and the like.

According to the first aspect , after the sheet-like substrate is supported on the upper portions of the pair of transport belts, the gas supply source is operated to move the nozzle holes of the belt guides toward the upper portions of the transport belts. A clean gas is spouted out. Accordingly, a clean gas layer is generated between the support surface of each belt guide and the upper portion of the conveyor belt, and the upper portion of the conveyor belt is non-contacted (non-contacted) by the support surface of each belt guide. It can be guided and supported in the transport direction in a close state). In addition, before supporting a board | substrate to the upper part of a pair of said conveyance belt, you may make it eject a clean gas from the said nozzle hole of each belt guide.

  Then, in a state where the upper portion of the transport belt is guided and supported in the transport direction in a non-contact manner by the support surface of each belt guide, the pair of transport belts are circulated and synchronized by driving the travel motor. Thereby, a board | substrate can be conveyed in the said conveyance direction.

According to a second aspect of the present invention, in a substrate transfer processing system that transfers a sheet-like substrate in the transfer direction and processes the substrate, the substrate processing apparatus that processes the substrate, and the substrate processing apparatus Ru der that anda substrate transfer apparatus comprising a first feature disposed respectively upstream and downstream of the transport direction.

  Here, in the specification and claims of the present application, “processing” means an etching process, a CVD process, a PVD process, and the like. Further, “arranged” means not only directly disposed but also indirectly disposed through another member.

In addition, according to the 2nd aspect, there exists an effect | action similar to the effect | action by a 1st aspect .

  According to the present invention, since the upper portion of the transport belt is guided and supported in the transport direction in a non-contact manner by the support surface of each belt guide during transport of the substrate, the transport belt or the belt guide is worn. It becomes difficult to generate dust (dust) due to the above, and it is possible to suppress the looseness of each conveyor belt and sufficiently reduce the vibration of the substrate being conveyed. Therefore, it is possible to sufficiently prevent damage to the substrate being transported while suppressing a decrease in cleanliness of the clean environment.

1A is a diagram along IA-IA in FIG. 5, and FIG. 1B is a diagram showing a state in which the upper support member is lowered from the state shown in FIG. In 1 (a) and (b), the substrate is omitted. FIG. 2 is a cross-sectional view of the periphery of the lower belt guide and the upper belt guide according to the first embodiment of the present invention. FIG. 3 is an enlarged cross-sectional view taken along line III-III in FIG. FIG. 4A is a front view of the substrate transfer apparatus according to the first embodiment of the present invention, and FIG. 4B is a view showing a state in which the upper support member is lowered from the state shown in FIG. In FIGS. 4A and 4B, the substrate is omitted. FIG. 5 is a cross-sectional view taken along the line V-V in FIG. FIG. 6 is an enlarged view of the arrow VI in FIG. 7 is a cross-sectional view taken along line VII-VII in FIG. FIG. 8 is a schematic front view of the substrate transfer processing system according to the first embodiment of the present invention. FIG. 9 is a diagram illustrating a lower conveyor belt, an upper conveyor belt, a lower belt guide, an upper belt guide, and the like according to a modification of the embodiment of the present invention, and corresponds to FIG. FIG. 10 is a front view of the substrate transfer apparatus according to the second embodiment of the present invention, and the substrate is omitted in FIG. FIG. 11 is an enlarged cross-sectional view along the line XI-XI in FIG.

(First embodiment of the present invention)
A first embodiment of the present invention will be described with reference to FIGS. As shown in the drawing, “FF” is the forward direction, “FR” is the backward direction, “R” is the right direction, and “L” is the left direction.

  As shown in FIG. 8, the substrate transfer processing system 1 according to the first embodiment of the present invention is configured to transfer a substrate W such as a belt-shaped glass substrate sent out from the sending roll 3 in the transfer direction (in the first embodiment of the present invention). In this case, the substrate W is transported in the right direction) and the substrate W is subjected to processing such as etching, and the processed substrate W is wound on the winding roll 5. The outline of the overall configuration of the substrate transfer processing system 1 is as follows.

  The substrate transfer processing system 1 includes a delivery roll support member 7 that supports the delivery roll 3 so as to be rotatable and detachable about its axis (axial center of the delivery roll 3). A delivery motor 9 that rotates the delivery roll 3 is provided at an appropriate position. Further, at a position separated from the delivery roll support member 7 in the conveying direction, the take-up roll support that supports the take-up roll 5 so as to be rotatable and detachable around its axis (axis of the take-up roll 5). A member 11 is provided, and a take-up motor 13 that rotates the take-up roll 5 is provided at an appropriate position of the take-up roll support member 11. In addition, from the viewpoint of protecting the surface of the substrate W, a band-shaped buffer material (not shown) is used. When the substrate W is delivered from the delivery roll 3, the cushion material is separated from the substrate W and is processed by the winding roll 5. It is desirable that the buffer material is superimposed on the processed substrate W when the processed substrate W is wound up.

  Between the delivery roll support member 7 and the take-up roll support member 11, a substrate processing apparatus 15 that performs processing such as etching processing on the substrate W is disposed. Instead of providing one substrate processing apparatus 15, a plurality of substrate processing apparatuses (not shown) that perform a plurality of processes may be provided along the transport direction.

  Between the substrate processing apparatus 15 and the delivery roll support member 7, in other words, on the upstream side (left side) of the substrate processing apparatus 15 in the transport direction, the upstream substrate transport apparatus (belt) that transports the substrate W in the transport direction. A drive type substrate transfer device) 17 is provided. Further, downstream substrate transport for transporting the substrate W in the transport direction between the substrate processing apparatus 15 and the take-up roll support member 11, in other words, on the downstream side (right side) of the substrate processing apparatus 15 in the transport direction. An apparatus (belt drive type substrate transfer apparatus) 19 is provided.

  A slack absorbing mechanism (not shown) that absorbs the slack of the substrate W is disposed between the substrate transport device 19 on the downstream side and the take-up roll support member 11. Further, an upstream guide mechanism (not shown) such as an upstream guide roller for guiding and supporting the substrate W is disposed between the delivery roll support member 7 and the upstream substrate transport device 17 to support the take-up roll. A downstream guide mechanism (not shown) such as a downstream guide roller for guiding and supporting the processed substrate W is disposed between the member 11 and the downstream substrate transport device 19.

  Then, the detail of a structure of the board | substrate conveyance apparatus 17 (19) of embodiment of this invention is demonstrated.

  As shown in FIGS. 1A and 1B and FIGS. 4A and 4B to FIG. 7, the substrate transfer device 17 (19) includes a disk-shaped device base 21. Is extended in the transport direction and the transport width direction orthogonal to the transport direction (the front-rear direction in the first embodiment of the present invention). In addition, a pair of lower support members 23 extending in the transport direction are provided on the apparatus base 21 so as to be separated from each other in the transport width direction. Further, on the upper side of each lower support member 23, an upper support member 25 extending in the transport direction is provided so as to be movable up and down (movable in the vertical direction).

  Between each lower support member 23 and the corresponding upper support member 25 (between each lower support member 23 and the corresponding upper support member 25), a first connection link 27 is provided so as to be connected. Each first connection link 27 can swing in the vertical direction. Further, the lower end portion (base end portion) of each first connection link 27 has a bearing 29 around an axis parallel to the lower support member 23 in the conveyance width direction (rotation center of the lower end portion of the first connection link 27). It is connected via a rotation. Further, the upper end portion (tip end portion) of each first connection link 27 is provided via a bearing 31 around an axis parallel to the upper support member 25 in the conveyance width direction (rotation center of the upper end portion of the first connection link 27). And are rotatably connected.

  Between each lower support member 23 and the corresponding upper support member 25, a second connection link 33 is provided so as to be connected, and each second connection link 33 is swingable in the vertical direction. The first connection link 27 is moved in parallel (parallel swinging). In addition, the lower end portion of each second connection link 33 is provided with a bearing (not shown) around an axis parallel to the lower support member 23 in the conveyance width direction (rotation axis at the lower end portion of the second connection link 33). It is connected rotatably. Further, the upper end portion of each second connection link 33 is provided with a bearing (not shown) around an axis parallel to the upper support member 25 in the conveying width direction (rotation center of the upper end portion of the second connection link 33). It is connected rotatably.

  That is, the upper support member 25 is provided on the upper side of each lower support member 23 via the first connection link 27 and the second connection link 33, and each upper support member 25 corresponds to the corresponding lower support member 23. Can be moved up and down while maintaining a parallel state.

  As shown in FIGS. 1 (a), (b), 4 (a), (b), and FIG. 7, a first elevating air cylinder 35 swings through a bracket 37 on the right side of each lower support member 23. The tip part (upper end part) of the piston rod 39 of each first elevating air cylinder 35 is rotatably connected to an appropriate position of the corresponding upper support member 25. Further, on the left side of each upper support member 25, a second lift air cylinder 41 that lifts and lowers the upper support member 25 in cooperation with the first lift air cylinder is swingably provided via a bracket 43. The tip end (lower end) of the piston rod 45 of each second elevating air cylinder 41 is rotatably connected to an appropriate position of each lower support member 23.

  As shown in FIGS. 1A, 1B, 3, 5, and 6, each lower support member 23 has a plurality of (four in the first embodiment of the present invention) lower rollers. A (lower belt wheel) 47 is provided so as to be rotatable through a bearing 49 around an axis parallel to the conveyance width direction (axis of the rotation shaft 47s of the lower roller 47). Each of the plurality of lower rollers 47 is wound around an endless lower conveyance belt 51 that can circulate and support an end (one end or the other end) in the width direction of the substrate W from below. The upper part (the part located on the upper side) of each lower transport belt 51 extends in the transport direction. Here, in the first embodiment of the present invention, a round belt made of resin is used as each lower transport belt 51.

  Similarly, in each upper support member 25, a plurality of (two in the first embodiment of the present invention) upper rollers 53 are axially parallel to the conveyance width direction (the axis of the rotation shaft 53s of the upper roller 53). It is provided to be rotatable through a bearing 55 around the center). Further, each of the plurality of upper rollers (upper belt wheels) 53 cooperates with the lower transport belt 51 to endlessly move the end portion in the width direction of the substrate W from the up and down direction and can circulate and run the endless upper transport belt 57. Are wound, and the upper part (the part located on the upper side) and the lower part of each upper transport belt 57 extend in the transport direction. Here, in the first embodiment of the present invention, as each upper conveyance belt 57, a round belt made of resin is used as in the case of the lower conveyance belt 51.

  As shown in FIGS. 4 to 7, the rotation shafts 47 </ b> Ds of the driving lower roller 47 </ b> D among the plurality of lower rollers 47 (a plurality of lower rollers 47 located on both sides in the conveyance width direction) are arranged in the conveyance width direction. The extended lower connecting shaft 59 and the pair of couplings 61 are interlocked and connected. Of the plurality of lower rollers 47, the rotation shaft 53Ds of the driving upper roller 53D among the plurality of upper rollers 53 corresponding to the rotation shaft 47Ds of the driving lower roller 47D includes two timing pulleys 63 and an endless timing. The belt 65 is interlocked and connected. In other words, among the plurality of lower rollers 47, the rotation shafts 47Ds of the driving lower roller 47D and the plurality of upper rollers 53 (a plurality of upper rollers 53 positioned on both sides in the conveyance width direction) are used for driving. The rotation shafts 53 </ b> Ds of the upper roller 53 </ b> D are linked and connected via a lower connection shaft 59, a pair of couplings 61, four timing pulleys 63, and two timing belts 65.

  Here, among the plurality of lower rollers 47, the axis (rotation axis) of the rotation shaft 47 </ b> Ds of the driving lower roller 47 </ b> D is located concentrically with the rotation axis of the lower end portion of the first connection link 27. . Further, among the plurality of upper rollers 53, the axis of the rotation shaft 53 </ b> Ds of the driving upper roller 53 </ b> D is located concentrically with the rotation axis of the upper end portion of the first connection link 27.

  In the vicinity of the one lower support member 23 in the apparatus base 21, a common travel motor 67 that circulates the pair of lower transport belts 51 and the pair of upper transport belts 57 is provided. Further, the output shaft 67s of the common travel motor 67 is linked to the rotation shaft 47Ds of the driving lower roller 47D among the plurality of lower rollers 47 via the speed reducer 69 and the coupling 71. Instead of the common travel motor 67, a lower transport belt travel motor (not shown) for circulating the pair of lower transport belts 51 and an upper transport belt travel motor (not shown) for circulating the pair of upper transport belts 57 are shown. (Omitted) may be used. In this case, the output shaft of the lower transport belt travel motor is interlocked with the rotation shaft 47Ds of the lower drive roller 47D among the plurality of lower rollers 47, and the output shaft of the upper transport belt travel motor is connected to one of the lower rollers 47D. Of the plurality of upper rollers 53, the rotating shaft 53Ds of the upper driving roller 53D is linked and connected.

  As shown in FIGS. 1B, 2, and 3, a lower belt guide 73 extending in the conveyance direction is L-shaped at a position corresponding to the upper portion of the lower conveyance belt 51 in each lower support member 23. Each lower belt guide 73 has a semicircular lower support surface 73f that guides and supports the upper portion (portion located on the upper side) of the lower transport belt 51 in the transport direction. doing. In addition, a plurality of (two in the first embodiment of the present invention) lower chambers 77 for containing clean air (an example of clean gas) are formed inside each lower belt guide 73, The lower chamber 77 can be connected to a common air supply source (an example of a gas supply source) 79 such as a blower with a filter that supplies clean air. Furthermore, a plurality of lower nozzle holes 81 for injecting air toward the upper portion of the lower transport belt 51 are formed in the lower support surface 73f of each lower belt guide 73 at intervals in the transport direction. Each lower nozzle hole 81 of each lower belt guide 73 communicates with a corresponding lower chamber 77 and can be connected to a common air supply source 79 via the corresponding lower chamber 77.

  Similarly, an upper belt guide 83 extending in the conveying direction is provided via a support bar 85 having an L-shaped cross section at a position corresponding to the lower portion of the upper conveying belt 57 in each upper support member 25. The upper belt guide 83 has a semicircular upper support surface 83f that guides and supports the lower portion (portion located on the lower side) of the upper conveyance belt 57 in the conveyance direction. Each upper belt guide 83 is formed with a plurality of (two in the first embodiment of the present invention) upper chambers 87 for containing clean air. A supply source 79 can be connected. Further, a plurality of upper nozzle holes 89 for injecting air toward the lower portion of the upper transport belt 57 are formed in the upper support surface 83f of each upper belt guide 83 at intervals in the transport direction. Each upper nozzle hole 89 of each upper belt guide 83 communicates with a corresponding upper chamber 87 and can be connected to a common air supply source 79 via the corresponding upper chamber 87.

  Based on the configuration of the substrate transfer processing system 1 described above, the operation and effect of the embodiment of the present invention will be described.

  The widthwise end of the belt-like substrate W sent from the sending roll 3 is supported on the upper part of the pair of lower transport belts 51 in each substrate transport device 17 (19), and the front end of the substrate W is taken up by the take-up roll 5. Install to. Accordingly, the substrate W can be set on the substrate transfer processing system 1 and the operation of the substrate transfer processing system 1 can be started.

  After the operation of the substrate transfer processing system 1 is started, first, the upper support members 25 are lowered by driving the first lift air cylinders 35 and the second lift air cylinders 41 in each substrate transfer device 17 (19). Thereby, the edge part of the width direction of the board | substrate W is clamped from an up-down direction with a pair of upper conveying belt 57 and a pair of lower conveying belt 51 in each board | substrate conveying apparatus 17 (19).

  Next, clean air is supplied to the plurality of lower chambers 77 of each lower belt guide 73 in each substrate transport device 17 (19) by the operation of the common air supply source 79, and the plurality of lower nozzles of each lower belt guide 73. Clean air is ejected from the hole 81 toward the upper portion of the lower conveyance belt 51. As a result, a clean air layer (an example of a clean gas layer, not shown) is generated between the lower support surface 73 f of each lower belt guide 73 and the upper portion of the lower transport belt 51, and the lower portion of each lower belt guide 73. The upper surface portion of the lower conveyance belt 51 can be guided and supported in the conveyance direction in a non-contact manner (including a state close to non-contact) by the support surface 73f. Similarly, by operating the common air supply source 79, clean air is supplied to the plurality of upper chambers 87 of each upper belt guide 83 in each substrate transport device 17 (19), so that the plurality of upper nozzles of each upper belt guide 83 are supplied. Clean air is ejected from the hole 89 toward the lower portion of the upper conveyor belt 57. As a result, a clean air layer (not shown) is generated between the upper support surface 83 f of each upper belt guide 83 and the lower portion of the upper conveyor belt 57, and the upper support surface 83 f of each upper belt guide 83 is The lower part of the conveyance belt 57 can be guided and supported in the conveyance direction in a non-contact manner (including a state close to non-contact). Note that the plurality of lower nozzle holes 81 and the upper belt guides of the lower belt guides 73 are arranged before the end portions in the width direction of the substrate W are vertically clamped by the pair of upper transport belts 57 and the pair of lower transport belts 51. The clean air may be ejected from the plurality of 83 upper nozzle holes 89.

  The lower support surface 73f of each lower belt guide 73 guides the upper part of the lower transport belt 51 and the lower support part 83f of each upper belt guide 83 to guide the lower part of the upper transport belt 57 in the transport direction without contact. In the supported state, each lower carrier belt 51 and each upper carrier belt 57 are circulated and run synchronously as drive belts by driving a common running motor 67 in each substrate carrying device 17 (19). Further, in synchronization with the driving of the common traveling motor 67, the feeding roll 3 is rotated by driving the feeding motor 9 and the winding roll 5 is rotated by driving the winding motor 13. Thereby, the substrate W delivered from the delivery roll 3 can be transported in the transport direction, and a predetermined portion of the substrate W can be positioned with respect to the substrate processing apparatus 15. Here, the traveling speed of the lower transport belt 51 and the traveling speed of the upper transport belt 57 in each substrate transport device 17 (19) are the same, and the lower transport belt 51 (upper transport belt) in each substrate transport device 17 (19). 57) is the transport speed of each substrate transport device 17 (19). Further, the transport speed of the downstream substrate transport device 19 is set so that a predetermined tension in the transport direction can be applied to the substrate W between the upstream substrate transport device 17 and the downstream substrate transport device 19. It is set higher than the transfer speed of the substrate transfer device 17 on the side.

  After positioning a predetermined part of the substrate W with respect to the substrate processing apparatus 15, the substrate processing apparatus 15 performs an appropriate process on the predetermined part of the substrate W.

  Furthermore, the processed substrate W is wound around the take-up roll 5 by alternately and repeatedly executing the transfer of the substrate W by the substrate transfer devices 17 (19) and the processing of the substrate W by the substrate processing device 15. Can be taken.

  Therefore, according to the first embodiment of the present invention, during the transport of the substrate W, the lower support surface 73f of each lower belt guide 73 causes the upper portion of the lower transport belt 51 and the upper support surface 83f of each upper belt guide 83 to move. Since the lower portions of the upper conveying belt 57 are guided and supported in the conveying direction without contact with each other, dust (dust) due to wear of the lower conveying belt 51, the upper conveying belt 57, the lower belt guide 73, or the upper belt guide 83 is provided. ) Is less likely to occur, and the slack of each lower transport belt 51 is suppressed, and the vibration of the substrate W being transported can be sufficiently reduced. Therefore, it is possible to sufficiently prevent the substrate W being transported from being damaged while suppressing a decrease in cleanliness of the clean environment.

(Modification of the first embodiment)
A modification of the first embodiment of the present invention will be described with reference to FIG. As shown in the drawing, “FF” is the forward direction, “FR” is the backward direction, “R” is the right direction, and “L” is the left direction.

  As shown in FIG. 9, in the modification of the first embodiment of the present invention, as each lower transport belt 51, most of the lower conveyor belts 51 are made of resin and are on the outer peripheral side instead of round belts made of resin. Further, a flat belt with ribs having endless ribs 91 and including reinforcing fibers 93 such as aramid fibers is used. Similarly, as each upper conveyance belt 57, instead of a round belt made of resin, most of them are made of resin and have endless ribs 95 on the outer peripheral side, and include reinforcing fibers 97 such as aramid fibers. The ribbed flat belt is used. The cross-sectional shapes of the lower support surface 73f of each lower belt guide 73 and the upper support surface 83f of each upper belt guide 83 are U-shaped.

  And also in the modification of 1st Embodiment of this invention, there exists an effect similar to the effect | action and effect of 1st Embodiment of this invention.

(Second embodiment of the present invention)
A second embodiment of the present invention will be described with reference to FIGS. As shown in the drawing, “FF” is the forward direction, “FR” is the backward direction, “R” is the right direction, and “L” is the left direction.

  As shown in FIGS. 10 and 11, the substrate transport apparatus 99 according to the second embodiment of the present invention transfers the substrate W in the transport direction in the same manner as the substrate transport apparatus 17 (19) according to the first embodiment of the present invention. This is a device for transferring in the right direction (in the second embodiment of the present invention), and is used in the substrate transfer processing system 1 (see FIG. 8). The substrate transfer device 99 according to the second embodiment of the present invention has the same configuration as the substrate transfer device 17 (19) according to the first embodiment of the present invention. Hereinafter, only parts of the configuration of the substrate transfer apparatus 99 that are different from the configuration of the substrate transfer apparatus 17 (19) will be briefly described. Of the plurality of constituent elements in the substrate transport apparatus 99, those corresponding to the constituent elements in the substrate transport apparatus 17 (19) are given the same numbers in the drawing.

  As each lower conveyance belt 51 and each upper conveyance belt 57, a V belt made of resin is used. The cross-sectional shapes of the lower support surface 73f of each lower belt guide 73 and the upper support surface 83f of each upper belt guide 83 are U-shaped.

  A plurality of lower auxiliary rollers (lower auxiliary belt wheels) 101 are parallel to the conveyance width direction (the front-rear direction in the second embodiment of the present invention) inside the lower conveyance belt 51 in each lower support member 23. It is rotatably provided around a core via a bearing (not shown). Further, an endless lower metal belt 103 that circulates as the lower conveyance belt 51 circulates is wound around the plurality of lower auxiliary rollers 101, and each lower metal belt 103 is made of a stainless steel plate or a steel plate. It is comprised with metal plates, such as. Further, the upper portion (portion located on the upper side) of the lower metal belt 103 extends in the conveyance direction so as to be positioned between the upper portion of the lower conveyance belt 51 and the lower support surface 73 f of the lower belt guide 73. The plurality of lower nozzle holes 81 of each lower belt guide 73 injects clean air toward the upper part of the lower metal belt 103 (upper part of the lower conveyance belt 51). Here, when clean air is ejected from the plurality of lower nozzle holes 81 of each lower belt guide 73, a clean air layer (illustrated) is formed between the lower support surface 73f of each lower belt guide 73 and the upper portion of the lower metal belt 103. (Omitted) will be generated.

  Similarly, inside the upper conveyance belt 57 in each upper support member 25, a plurality of upper auxiliary rollers (upper auxiliary belt wheels) 105 rotate about bearings (not shown) around an axis parallel to the conveyance width direction. It is provided as possible. Further, an endless upper metal belt 107 that circulates as the upper conveying belt 57 circulates is wound around the plurality of upper auxiliary rollers 105, and each upper metal belt 107 is made of a stainless steel plate or a steel plate. It is comprised with metal plates, such as. Further, the lower portion (portion located on the lower side) of the upper metal belt 107 extends in the conveyance direction so as to be positioned between the lower portion of the upper conveyance belt 57 and the upper support surface 83 f of the upper belt guide 83. Yes. The plurality of upper nozzle holes 89 of each upper belt guide 83 inject clean air toward the lower portion of the upper metal belt 107. Here, when clean air is ejected from the plurality of upper nozzle holes 89 of each upper belt guide 83, a clean air layer (between the upper support surface 83f of each upper belt guide 83 and the lower portion of the upper metal belt 107). (Not shown) is generated.

  And in 2nd Embodiment of this invention, there exists the following effect | action and effect other than having the effect | action and effect similar to embodiment of the above-mentioned this invention.

  Since each lower metal belt 103 is made of a metal plate such as a stainless steel plate, the inner surface (inner peripheral surface) of each lower metal belt 103 is compared with the surface roughness of the resin belt made of resin. The surface roughness can be reduced. Thereby, even if the thickness of the clean air layer generated between the lower support surface 73 f of each lower belt guide 73 and the upper portion of the lower metal belt 103 is reduced, the lower support surface 73 f of each lower belt guide 73. Thus, the upper portion of the lower conveyance belt 51 can be guided and supported in the conveyance direction in a non-contact manner via the upper portion of the lower metal belt 103.

  Similarly, since each upper metal belt 107 is made of a metal plate such as a stainless steel plate, the surface roughness of the inner surface of each upper metal belt 107 can be made smaller than the surface roughness of the resin belt. . Thereby, even if the thickness of the clean air layer generated between the upper support surface 83f of each upper belt guide 83 and the lower portion of the upper metal belt 107 is reduced, the upper support surface of each upper belt guide 83 is reduced. By 83f, the lower part of the upper conveying belt 57 can be guided and supported in the conveying direction in a non-contact manner via the upper metal belt 107.

  Therefore, according to the second embodiment of the present invention, the consumption flow rate of clean air for guiding and supporting the upper portion of the lower transport belt 51 in the transport direction without contact, and the lower portion of the upper transport belt 57 without contact. The flow rate of clean air for guiding and supporting in the transport direction can be reduced, and the running cost of the substrate transport device 99, in other words, the running cost of the substrate transport processing system 1 using the substrate transport device 99 can be reduced. Can be planned.

  In addition, this invention is not restricted to description of the above-mentioned embodiment, It can implement in a various aspect. Further, the scope of rights encompassed by the present invention is not limited to these embodiments.

DESCRIPTION OF SYMBOLS 1 Substrate transfer processing system 15 Substrate processing apparatus 17 Upstream substrate transfer apparatus 19 Downstream substrate transfer apparatus 21 Apparatus base 23 Lower support member 25 Upper support member 27 First connection link 33 Second connection link 47 Lower roller 51 Lower transfer Belt 53 Upper roller 57 Upper conveyor belt 67 Common traveling motor 73 Lower belt guide 73f Lower support surface of lower belt guide 77 Lower chamber 79 Air supply source 81 Lower nozzle hole 83 Upper belt guide 83f Upper support surface of upper belt guide 87 Upper Chamber 89 Upper nozzle hole 91 Rib 93 Reinforcing fiber 95 Rib 97 Reinforcing fiber 99 Substrate transport device 101 Lower auxiliary roller 103 Lower metal belt 105 Upper auxiliary roller 107 Upper metal belt

Claims (7)

In a substrate transfer device that transfers a sheet-like substrate in the transfer direction,
A pair of support members provided upright apart from each other in the conveyance width direction orthogonal to the conveyance direction on the apparatus base;
A plurality of rollers provided on each support member so as to be rotatable about an axis parallel to the conveyance width direction;
An endless conveyor belt that is wound around each of the plurality of rollers, has at least an upper portion extending in the conveyance direction, and supports the end in the width direction of the substrate and can circulate;
Provided at a position corresponding to the upper part of each conveyor belt, the extending in the conveying direction, has a concave support surface for supporting the said conveying direction an upper portion in a state of being projected upward of the conveyor belt A chamber for containing a clean gas is formed therein, and the chamber is connectable to a gas supply source for supplying the clean gas, and the clean gas is jetted onto the support surface toward the upper portion of the conveyor belt. A belt guide in which a nozzle hole is formed and the nozzle hole communicates with the chamber ;
A substrate transport device , comprising: a travel motor that circulates and synchronizes the pair of transport belts. A plurality of auxiliary rollers provided on each support member so as to be rotatable about an axis parallel to the conveyance width direction;
Each of the plurality of auxiliary rollers is wound and configured by a metal plate, and the upper portion extends in the conveyance direction so as to be positioned between the upper portion of the conveyance belt and the support surface of the belt guide, and the conveyance an endless metal belt which circulates traveling with the circulating movement of the belt, equipped with a substrate transport apparatus of claim 1. As each conveyor belt, round belt, or on the outer peripheral side has an endless rib and with ribbed flat belt containing therein a reinforcing fiber, a substrate transport apparatus of claim 1. The support member, the roller, the transport belt, the support surface, the chamber, the nozzle hole, the belt guide, and the travel motor are respectively a lower support member, a lower roller, a lower transport belt, a lower support surface, a lower chamber, lower nozzle holes, Ri Oh the lower belt guide, and the travel motor for a lower conveyor belt,
An upper support member provided on the upper side of each lower support member so as to be movable up and down;
A plurality of upper rollers provided on each upper support member so as to be rotatable around an axis parallel to the conveyance width direction;
Wound on the plurality of upper rollers at least the lower portion and extends to the transport direction, the lower transport belt in cooperation with circulating drivable endless for clamping the end portion in the width direction of the substrate from above and below The upper conveyor belt,
Provided at a position corresponding to the lower portion of each of the upper conveyor belt, the extending in the conveying direction, concave upper supporting a lower portion of the upper conveyor belt to the conveying direction while protruding downward An upper chamber having a support surface and containing clean gas is formed therein, and the upper chamber can be connected to the gas supply source. The upper support surface faces the lower portion of the upper conveyor belt. upper nozzle hole for injecting clean gas Te is formed, the upper belt guide the upper nozzle hole is in communication with the said upper chamber,
The substrate transfer apparatus according to claim 1 , further comprising: an upper transfer belt travel motor that circulates the pair of upper transfer belts. A plurality of lower auxiliary rollers provided on each lower support member so as to be rotatable around an axis parallel to the conveyance width direction;
It is wound around each of the plurality of lower auxiliary rollers and is made of a metal plate. The upper portion extends in the conveying direction so as to be positioned between the upper portion of the lower conveying belt and the lower support surface of the lower belt guide. cage, a lower metal endless belt which circulates traveling with the circulating running of the lower conveyor belt,
A plurality of upper auxiliary rollers provided on each upper support member so as to be rotatable around an axis parallel to the conveyance width direction;
It is wound around each of the plurality of upper auxiliary rollers and is made of a metal plate, and the lower portion is located in the conveying direction so as to be positioned between the lower portion of the upper conveying belt and the upper support surface of the upper belt guide. The substrate transfer apparatus according to claim 4 , further comprising an endless upper metal belt that extends and circulates along with the circulation of the upper conveyance belt. 6. The substrate transport according to claim 4 , wherein each of the lower transport belt and each upper transport belt is a round belt or a flat belt with ribs having endless ribs on the outer peripheral side and including reinforcing fibers. apparatus. In a substrate transfer processing system for transferring a sheet-like substrate in the transfer direction and processing the substrate,
A substrate processing apparatus for processing a substrate;
Equipped with a, and the substrate transport apparatus of claim of any one of claims 6 wherein the upstream and downstream in the transport direction from claim 1 which is arranged each of the substrate processing apparatus, the substrate Transport processing system.

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