JP6150326B2 - Mounting head, nozzle unit, mounting apparatus, and substrate manufacturing method - Google Patents

Description

  The present technology relates to a technology such as a mounting head for mounting various electronic components such as resistors, capacitors, and inductors on a substrate.

  2. Description of the Related Art Conventionally, a component mounter including a rotatable rotary head is known (see, for example, Patent Document 1 below). In the rotary head of Patent Document 1, a plurality of suction nozzles are mounted on the rotary circumference of the rotary head so as to be movable in the vertical direction. The rotary head is fixed to the lower side of the base shaft that is disposed obliquely. When the base shaft is rotated, the rotary head is rotated, and a plurality of suction nozzles attached to the rotary head are rotated together with the rotation of the rotary head.

  The suction nozzle is configured to face the vertical axis direction only when it is positioned at one specific position among a plurality of positions that the suction nozzle can take. Among the plurality of suction nozzles, an electronic component is picked up or mounted by the suction nozzle positioned at this specific position.

  The base shaft is disposed inside a rotating cylinder that rotatably holds the base shaft. The rotating cylinder is rotatable independently of the base shaft, and a rotating disk is provided at the lower end thereof. The suction nozzle has a friction ring at a position corresponding to the rotating disk. When the rotating disk rotates, a rotational force is applied to the suction nozzle through the friction ring. As a result, the suction nozzle rotates, and the orientation of the parts sucked by the suction nozzle is corrected.

Japanese Patent No. 3750170

  In order to improve the productivity of the substrate, it is considered effective to increase the number of suction nozzles. Further, in order to improve the productivity of the substrate, it is considered effective to improve the moving speed of the mounting head by reducing the size and weight of the mounting head. However, there is a contradictory relationship between increasing the number of suction nozzles and reducing the mounting head, and if the number of suction nozzles is increased, it is difficult to reduce the size of the mounting head.

  In view of the circumstances as described above, an object of the present technology is to provide a technology capable of downsizing a mounting head without reducing the number of nozzle units.

The mounting head according to the present technology includes a head unit and a plurality of nozzle units.
The head unit has a plurality of through holes.
The plurality of nozzle units each have a nozzle shaft, a first holder, and a second holder.
The first holder is inserted through the through hole, is rotatable with respect to the head unit, and holds the nozzle shaft movably in the axial direction therein.
The second holder has an outer diameter larger than the diameter of the through-hole, and is connected to the first holder, in which the nozzle shaft can be moved in the axial direction and cannot be rotated in the rotational direction. Hold.

  In the present technology, the holder that holds the nozzle shaft is configured to be separated into a first holder and a second holder. The first holder holds the nozzle shaft movably in the axial direction, and the second holder holds the nozzle shaft movable in the axial direction and non-rotatable in the rotation direction. The second holder has an outer diameter larger than the diameter of the through hole of the head unit through which the first holder is inserted. That is, the outer diameter of the second holder is larger than the outer diameter of the first holder (because the second holder must hold the nozzle shaft in a non-rotatable manner). In the present technology, a first holder having an outer diameter smaller than that of the second holder is inserted through the through hole of the head unit. Thereby, the diameter of the through hole provided in the head unit can be reduced. As a result, the mounting head can be reduced in size without reducing the number of nozzle units.

In the mounting head, each of the plurality of nozzle units may further include a connecting member.
The connecting member is interposed between the first holder and the second holder in the axial direction, and connects the first holder and the second holder.

  By using such a connecting member, for example, the nozzle unit can be reduced in size compared to the case where the first holder and the second holder are connected by other methods such as screwing.

In the mounting head, the first holder may have a first engagement groove along the axial direction.
In this case, the connecting member may have a first engagement portion that engages with the first engagement groove.

  In the mounting head, the first engagement portion may be larger than the first engagement groove.

  Thereby, since a 1st engaging part fits in a 1st engaging groove with a strong force, the connection force between a 1st holder and a connection member can be improved.

In the mounting head, the second holder may have a second engagement groove along the axial direction.
In this case, the connecting member may have a second engagement portion that engages with the second engagement groove.

  In the mounting head, the second engagement portion may be larger than the second engagement groove.

  Thereby, since a 2nd engaging part fits in a 2nd engaging groove with a strong force, the connection force between a 2nd holder and a connection member can be improved.

  In the mounting head, the connecting member may be formed of resin.

  By using resin as the material of the connecting member, the first holder and the second holder can be appropriately connected.

In the mounting head, the head unit may be rotatable about a rotation axis.
In this case, the plurality of through holes may be formed around the rotation shaft.

The mounting head may further include a drive rotation unit.
The drive rotation unit is disposed coaxially with the head unit, and is rotatable independently of the head unit.
In this case, each of the plurality of nozzle units may further include a transmission unit.
The transmission unit is fixed to the outer periphery of the first holder, and transmits the rotation of the drive rotation unit to the nozzle unit.

  When the drive rotation unit is rotated, the rotation is transmitted to the first holder via the transmission unit. Since the 1st holder and the 2nd holder are connected, the 1st holder and the 2nd holder rotate in one. Since the second holder holds the nozzle shaft so as not to rotate, the nozzle shaft does not rotate inside the first holder and the second holder. That is, the nozzle shaft rotates integrally with the first holder and the second holder.

The nozzle unit according to the present technology includes a nozzle shaft, a first holder, and a second holder.
The first holder is inserted into a through hole provided in the head unit, is rotatable with respect to the head unit, and holds the nozzle shaft movably in the axial direction therein.
The second holder has an outer diameter larger than the diameter of the through-hole, and is connected to the first holder, in which the nozzle shaft can be moved in the axial direction and cannot be rotated in the rotational direction. Hold.

A mounting apparatus according to the present technology includes a mounting head.
The mounting head includes a head unit and a plurality of nozzle units.
The head unit has a plurality of through holes.
The plurality of nozzle units each have a nozzle shaft, a first holder, and a second holder.
The first holder is inserted through the through hole, is rotatable with respect to the head unit, and holds the nozzle shaft movably in the axial direction therein.
The second holder has an outer diameter larger than the diameter of the through-hole, and is connected to the first holder, in which the nozzle shaft can be moved in the axial direction and cannot be rotated in the rotational direction. Hold.

The substrate manufacturing method according to the present technology includes a head unit having a plurality of through-holes, a nozzle shaft, and is inserted into the through-hole and is rotatable with respect to the head unit. A first holder that is movably held in a direction, and has an outer diameter larger than the diameter of the through hole, and is connected to the first holder, in which the nozzle shaft is movable in the axial direction; A step of holding the electronic component by the nozzle shaft of the mounting head including a plurality of nozzle units each having a second holder that is non-rotatable in the rotation direction.
An electronic component held on the nozzle shaft is mounted on the substrate.

  As described above, according to the present technology, it is possible to provide a technology capable of downsizing the mounting head without reducing the number of nozzle units.

It is a front view which shows a mounting apparatus. It is a top view which shows a mounting apparatus. It is a side view which shows a mounting apparatus. It is a side sectional view showing the configuration of the mounting head. It is a perspective view which shows a mounting head. It is sectional drawing which looked at the mounting head from the upper part. It is side sectional drawing which shows a nozzle unit. It is side sectional drawing which shows a nozzle unit. It is a partially expanded sectional view of a nozzle unit. It is a partial exploded perspective view of a nozzle unit. It is a plane sectional view showing the 2nd holder and a nozzle axis.

Hereinafter, embodiments according to the present technology will be described with reference to the drawings.
<< Overall configuration of mounting device and configuration of each part >>

  FIG. 1 is a front view illustrating a mounting apparatus 100 according to an embodiment of the present technology. 2 is a plan view of the mounting apparatus 100 shown in FIG. 1, and FIG. 3 is a side view of the mounting apparatus 100.

  As shown in these drawings, the mounting apparatus 100 includes a frame structure 10, a transport unit 15 that transports the substrate 1, a tape feeder mounting unit 20 on which a tape feeder 21 that supplies electronic components 2 is mounted, and an electronic device. And a mounting head 30 for mounting the component 2 on the substrate 1. Although illustration is omitted, the mounting apparatus 100 also includes a control unit that comprehensively controls each unit of the mounting apparatus 100 and a storage unit that stores various programs necessary for processing of the control unit. Yes.

  The frame structure 10 includes a base 11 provided at the bottom and a plurality of support columns 12 fixed to the base 11. Two X-axis beams 13 are bridged over the plurality of support columns 12 along the X-axis. Between the two X-axis beams 13, one Y-axis beam 14 is bridged along the Y-axis at a position below the two X-axis beams 13. A mounting head 30 is attached to the Y-axis beam 14.

  The X-axis beam 13 has an X-axis moving mechanism configured by a ball screw driving mechanism or the like. By driving the X-axis drive mechanism, the Y-axis beam 14 and the mounting head 30 attached to the Y-axis beam 14 are integrally moved along the X-axis direction. Similarly, the Y-axis beam 14 is provided with a Y-axis drive mechanism, and the mounting head 30 is moved along the Y-axis by driving the Y-axis beam 14.

  The tape feeder mounting unit 20 is disposed on both the front side and the rear side of the mounting apparatus 100. A plurality of tape feeders 21 are mounted on the tape feeder mounting portion 20 along the X-axis direction. The tape feeder 21 may be provided only on one of the front side and the rear side.

  The tape feeder 21 has a reel around which a carrier tape is wound, a feed mechanism that feeds the carrier tape by step feed, and the like. The carrier tape houses a large number of electronic components 2 of the same type. The electronic component 2 housed in the carrier tape is, for example, a capacitor, a resistor, an LED (Light Emitting Diode), an IC (Integrated Circuit) package, or the like. A supply window 22 is formed on the upper surface on the front end side of the tape feeder 21, and the electronic component 2 is supplied through the supply window 22.

  The transport unit 15 includes two guide rails 16 disposed along the X-axis direction, and a conveyor belt 17 disposed on each of the two guide rails 16 along the X-axis direction. The transport unit 15 can transport the substrate 1 to the mounting position by driving the conveyor belt 17 and can discharge the substrate 1 on which mounting of the electronic component 2 is completed.

  One of the two guide rails 16 is movable along the Y-axis direction. When the substrate 1 is conveyed to the mounting position by the conveyor belt 17, one guide is moved in the Y-axis direction, and the substrate 1 is sandwiched from both sides by the two guides. Thereby, the position of the board | substrate 1 is fixed in a mounting position. In this state, the electronic component 2 is mounted on the substrate by the mounting head 30.

[Configuration of Mounting Head 30]
The mounting head 30 includes a support 31 connected to the Y-axis moving mechanism of the Y-axis beam 14, a base shaft 35 supported by the support 31, and a head unit 50 attached to the lower end portion of the base shaft 35. . The mounting head 30 includes a plurality of nozzle units 60 connected to the outer periphery of the head unit 50. The number of nozzle units 60 is, for example, about 10 to 20, but is not limited thereto.

  The base shaft 35 is inclined with respect to the Z-axis direction. The base shaft 35 and the head unit 50 are integrally rotatable with the base shaft 35 as a rotation axis. The head unit 50 has a plurality of through holes 51 (see FIGS. 7 and 8 described later) penetrating the head unit 50 in the vertical direction around the rotation axis. A plurality of nozzle units 60 are set in the plurality of through holes 51. The plurality of nozzle units 60 can rotate on a track around the rotation axis in accordance with the rotation of the head unit 50.

  The plurality of nozzle units 60 are arranged with a predetermined angle with respect to the base shaft 35. The angle at which the base shaft 35 is tilted with respect to the Z-axis and the angle at which the plurality of nozzle units 60 are tilted with respect to the base shaft 35 are the same. The plurality of nozzle units 60 are arranged so that only one nozzle unit 60 located at a specific one position (the rightmost side in FIG. 1) among the plurality of nozzle units 60 faces the Z-axis direction.

  Hereinafter, the position of the nozzle unit 60 facing the Z axis is referred to as an operation position. By moving the nozzle unit 60 located at this operation position in the vertical direction, the electronic component 2 supplied from the supply window 22 is attracted to the nozzle unit 60, or the electronic component 2 attracted to the nozzle unit 60 is substrate. It is mounted on 1. The nozzle unit 60 located at the operation position can be sequentially switched by the rotation of the head unit 50.

  The mounting head 30 is movable along the X axis and the Y axis by driving the X axis beam 13 and the Y axis beam 14. The mounting head 30 repeats a suction process for sucking the electronic component 2 supplied from the supply window 22 of the tape feeder 21 and a mounting process for mounting the sucked electronic component 2 on the substrate 1. Thereby, the necessary electronic component 2 is mounted on the substrate 1, and the substrate 1 is manufactured.

  FIG. 4 is a side sectional view showing the configuration of the mounting head 30. FIG. 5 is a perspective view showing the mounting head 30. FIG. 6 is a cross-sectional view of the mounting head 30 as viewed from above. In FIG. 6, the valve 47 is omitted.

  With reference to FIG. 4, the mounting head 30 includes a support 31 connected to the Y-axis moving mechanism of the Y-axis beam 14 as described above. The support 31 includes an upper support portion 32 that rotatably supports the upper side of the base shaft 35 via a bearing 38, and a lower support portion 33 that rotatably supports the lower side of the base shaft 35 via a bearing 39. .

  A first negative pressure path 5 a that constitutes a part of the negative pressure path 5 is formed in the upper support portion 32. A decompressor (not shown) is connected to the first negative pressure path 5a, and the negative pressure path 5 is set to a negative pressure by driving the decompressor.

  On the other hand, the lower support portion 33 is formed with a first positive pressure path 6 a that constitutes a part of the positive pressure path 6. For example, a pressurizer (not shown) is connected to the first positive pressure path 6a, and the positive pressure path 6 is set to a positive pressure by driving the pressurizer.

  A through hole 35 a is formed inside the base shaft 35 along the axial direction. A cap 37 that seals the through hole 35 a is attached to the upper end of the base shaft 35. The through hole 35 a is separated into an upper second negative pressure path 5 b that constitutes a part of the negative pressure path 5 and a lower second positive pressure path 6 b that constitutes a part of the positive pressure path 6. The

  A cylindrical manifold 36 is interposed between the upper portion of the base shaft 35 and the upper support portion 32. A circumferential groove 36 a is formed on the outer periphery of the manifold 36 along the entire outer periphery, and a circumferential groove 36 b is formed on the inner periphery of the manifold 36 along the entire inner periphery. A double ring-shaped space centered on the base shaft 35 is formed in the manifold 36 by these two circumferential grooves 36a and 36b. The manifold 36 is formed with four openings 36c communicating with the manifold 36 in the radial direction at intervals of 90 ° in the circumferential direction. The four openings 36c allow the ring-shaped double space to communicate.

  Four openings 35b communicating with the base shaft 35 in the radial direction are formed at positions corresponding to the manifold 36 in the upper portion of the base shaft 35 at intervals of 90 ° in the circumferential direction. Via the four openings 36 c formed in the manifold 36 and the four openings 35 b provided in the base shaft 35, the first negative pressure path 5 a in the upper support portion 32 and the second negative pressure path in the base shaft 35 are provided. The pressure path 5b is communicated.

  A cylindrical body 45 is inserted into the base shaft 35 at a position below the through hole 35 a of the base shaft 35. The cylindrical body 45 separates the through hole 35a into the second negative pressure path 5b and the second positive pressure path 6b. The cylindrical body 45 is formed with an opening 45a that communicates the cylindrical body 45 in the radial direction at a position corresponding to the lower end of the second negative pressure path 5b. Further, the cylinder 45 is formed with an opening 45b communicating with the cylinder 45 in the radial direction at a position corresponding to the upper end portion of the second positive pressure path 6b. The base shaft 35 has openings 35 c and 35 d communicating with the base shaft 35 in the radial direction at positions corresponding to the openings 45 a and 45 b provided in the cylindrical body 45.

  Inside the head unit 50, a third negative pressure path 5 c constituting a part of the negative pressure path 5 and a third positive pressure path 6 c constituting a part of the positive pressure path 6 are formed. The third negative pressure path 5c and the third positive pressure path 6c penetrate from the inner peripheral surface of the head unit 50 to the outer peripheral surface. Further, a plurality of third negative pressure paths 5c and third positive pressure paths 6c are provided radially (as many as the number of nozzle units 60) as viewed from the axial direction of the base shaft 35.

  The second negative pressure path 5b in the base shaft 35 is connected to the third negative pressure path 5c in the head unit 50 via an opening 45a provided in the cylindrical body 45 and an opening 35c provided in the base shaft 35. Communicate. The second positive pressure path 6b in the base shaft 35 is connected to the third positive pressure path in the head unit 50 via an opening 45b provided in the cylindrical body 45 and an opening 35d provided in the base shaft 35. It communicates with 6c. The third negative pressure path 5 c and the third positive pressure path 6 c are connected to the valve 47.

  With reference to FIGS. 4 and 5, a plurality of valves 47 for switching the state of the negative pressure and the positive pressure of the gas supplied to the nozzle unit 60 are provided on the outer peripheral surface side of the head unit 50. One valve 47 is provided corresponding to one nozzle unit 60. That is, the number of nozzle units 60 and the number of valves 47 are the same.

  The valve 47 includes a caging 48 and a movable part 49 provided so as to be movable in the vertical direction with respect to the caging 48. The caging 48 is fixed to the outer peripheral surface of the head unit 50. The movable part 49 can move between the negative pressure state and the positive pressure state of the gas supplied to the nozzle unit 60 by moving in the vertical direction. The movable part 49 is moved in the vertical direction by a lifting mechanism (not shown). For example, the elevating mechanism is disposed at a position corresponding to the nozzle unit 60 located at the operation position (the rightmost side in FIG. 4).

  Referring to FIG. 4, an outer cylinder 40 is connected to the outer peripheral surface of the base shaft 35. The outer cylinder 40 is connected to the base shaft 35 via a bearing 43 and a bearing 44, and the outer cylinder 40 is rotatable with respect to the base shaft 35. A collar 46 that holds bearings 43 and 44 is disposed between the base shaft 35 and the outer cylinder 40. A rotation drive mechanism (not shown) including a pulley, a belt, and a motor is connected to the upper side of the outer cylinder 40. A rotation drive mechanism (not shown) including a pulley, a belt, and a motor is also connected to the upper side of the base shaft 35.

  A flange 40 a is formed at the lower end of the outer cylinder 40. The flange 40 a is connected via a bolt 41 to a drive gear 42 (drive rotation unit) arranged coaxially with the head unit 50. Thereby, the outer cylinder 40 and the drive gear 42 rotate integrally. The outer cylinder 40 and the drive gear 42 can be rotated independently of the base shaft 35 and the head unit 50.

  With reference to FIGS. 4 and 6, the drive gear 42 meshes with a gear part 80 (transmission part) formed near the upper part of the nozzle unit 60. Therefore, when the drive gear 42 rotates, the gear part 80 which meshes with the drive gear 42 rotates, and thereby each nozzle unit 60 rotates.

  The gear unit 80 is not provided at the same height with respect to all the nozzle units 60, and the gear unit 80 is arranged so that the height is different from the nozzle units 60 adjacent to each other. Typically, the gear portion 80 is arranged so as to be shifted in a zigzag manner in the vertical direction with respect to the nozzle units 60 adjacent to each other. Thereby, the arrangement density of the nozzle units 60 can be increased, and the mounting head 30 can be reduced in size.

[Configuration of Nozzle Unit 60]
Next, the configuration of the nozzle unit 60 according to the present embodiment will be described in detail. 7 and 8 are side sectional views showing the nozzle unit 60. FIG. FIG. 7 is a side sectional view showing a state when the nozzle unit 60 is located at a normal position, and FIG. 8 is a side sectional view showing a state when the nozzle unit 60 is lowered. FIG. 9 is a partially enlarged cross-sectional view of the nozzle unit 60. FIG. 10 is a partially exploded perspective view of the nozzle unit 60.

  As shown in these drawings, the nozzle unit 60 includes a nozzle shaft 61, a first holder 65 and a second holder 70 that cover the outer periphery of the nozzle shaft 61, and a first holder 65 and a second holder 70. And a connecting member 75 for connecting the two. The nozzle unit 60 includes a gear portion 80 fixed to the outer periphery of the first holder 65 together with the socket 81, and a spring member 85 interposed between the upper end portion of the nozzle shaft 61 and the second holder 70.

  The nozzle shaft 61 has a suction portion 62 that sucks the electronic component 2 at the tip portion, and has a flange 63 for fixing the spring member 85 to the upper end portion. A suction hole 61a is formed in the center of the suction portion 62 along the axial direction. A working chamber 61b that communicates with the suction hole 61a is formed in the lower region in the nozzle shaft 61 along the axial direction. In the vicinity of the upper end portion of the working chamber 61b, four openings 61c that communicate with the nozzle shaft 61 in the radial direction are formed at intervals of 90 ° in the circumferential direction (see FIG. 9).

  The first holder 65 is a cylindrical member, and the nozzle shaft 61 can be held therein so as to be movable in the axial direction. The first holder 65 is attached to the head unit 50 via a bearing 52 and a bearing 53 and is rotatable with respect to the head unit 50.

  The first holder 65 has a flange 66 at the lower end. The upper surface of the flange 66 abuts on the lower surface of the head unit 50, so that the first holder 65 is positioned with respect to the head unit 50 when the first holder 65 rotates with respect to the head unit 50.

  The first holder 65 has an inner circumferential groove 65a at the position near the center in the axial direction over the entire circumference of the inner circumferential surface (see FIG. 9). The inner circumferential groove 65 a is formed at a position corresponding to the opening 61 c formed in the nozzle shaft 61. A ring-shaped space 7 is formed between the nozzle shaft 61 and the first holder 65 by the inner circumferential groove 65 a formed in the first holder 65. Hereinafter, the ring-shaped space 7 is referred to as a first space 7. The first space 7 and the working chamber 61 b formed in the nozzle shaft 61 are communicated with each other through an opening 61 c formed in the nozzle shaft 61.

  The length of the first space 7 in the axial direction (that is, the length of the inner circumferential groove 65a) is set according to the movement distance of the nozzle shaft 61 in the vertical direction. That is, even when the nozzle shaft 61 is located at the normal position (FIG. 7) or when the nozzle shaft 61 is lowered (FIG. 8), the first space is formed through the opening 61c formed in the nozzle shaft 61. The length of the first space 7 in the axial direction is set so that the chamber 7 and the working chamber 61b can communicate with each other.

  Thereby, even when the nozzle shaft 61 is located at a normal position or when the nozzle shaft 61 is lowered, the working chamber 61b and the first space 7 are appropriately communicated with each other through the opening 61c of the nozzle shaft 61. Can be made. As a result, the pressure of the suction hole 61a provided at the tip of the nozzle shaft 61 can be appropriately controlled.

  Furthermore, the 1st holder 65 has the outer peripheral groove 65b over the perimeter of an outer peripheral surface in the position corresponding to the inner peripheral groove 65a. The first holder 65 has four openings 65c that communicate with the first holder 65 in the radial direction at intervals of 90 ° in the circumferential direction at positions corresponding to the inner circumferential groove 65a and the outer circumferential groove 65b. ing.

  The head unit 50 includes a cylindrical body 54 between the bearing 52 and the bearing 53. The first holder 65 is inserted into the cylindrical body 54 (that is, the first holder 65 is inserted into the through hole 51 provided in the head unit 50).

  The cylindrical body 54 has an inner circumferential groove 54 a over the entire inner circumference at a position corresponding to the outer circumferential groove 65 b of the first holder 65. A ring-shaped space 8 is formed between the first holder 65 and the cylindrical body 54 by the outer peripheral groove 65 b provided in the first holder 65 and the inner peripheral groove 54 a provided in the cylindrical body 54. . Hereinafter, this ring-shaped space 8 is referred to as a second space 8. The second space 8 and the first space 7 are communicated with each other through an opening 65 c provided in the first holder 65.

  By forming the ring-shaped second space 8 around the first holder 65, it is possible to secure a space for retaining the gas around the first holder 65. As a result, even when the first holder 65 rotates with respect to the head unit 50 and the position of the opening 65c formed in the first holder 65 changes, the first space 7 and the second space via the opening 65c are changed. The space 8 can be appropriately communicated. As a result, the pressure of the suction hole 61a provided at the tip of the nozzle shaft 61 can be appropriately controlled.

  In the cylindrical body 54, an opening 54 b that communicates the cylindrical body 54 in the radial direction is formed at a position on the outer peripheral side of the head unit 50. Further, the outer wall 55 of the head unit 50 is provided with an opening 55 a at a position corresponding to the opening 54 b formed in the cylinder body 54. An opening 55 a formed in the outer wall portion 55 of the head unit 50 is connected to a valve 47 attached to the outer periphery of the head unit 50.

  The opening 55a formed in the outer wall portion 55 of the head unit 50, the opening 54b formed in the cylindrical body 54, the second space 8, the opening 65c formed in the first holder 65, and the first space 7 and the opening 61c formed in the nozzle shaft 61, the working chamber 61b, and the suction hole 61a form a series of gas flow paths. This series of gas flow paths is switched to negative pressure or positive pressure in accordance with switching of the valve 47. Thereby, the electronic component 2 can be adsorbed to the tip portion of the nozzle shaft 61, the holding state of the adsorbed electronic component 2 can be maintained, or the adsorbed electronic component 2 can be detached.

  A part of the upper side of the first holder 65 protrudes upward from the head unit 50. That is, the first holder 65 is longer than the through hole 51 provided in the head unit 50. A socket 81 and a gear unit 80 are fixed to the outer peripheral surface of the upper portion of the first holder 65. The socket 81 is a cylindrical member, and the lower surface of the socket 81 is connected to the gear unit 80.

  The gear unit 80 transmits the rotation of the drive gear 42 to the nozzle unit 60. As described above, the gear portion 80 is arranged in a zigzag manner in the up-down direction with respect to the nozzle units 60 adjacent to each other. Therefore, there are two types of the gear part 80: a version with a high position and a version with a low position, depending on the position in the vertical direction. 7 and 8 show a version with a lower gear position.

  Referring to FIG. 10, first engaging grooves 67 are formed in the upper end portion of first holder 65 and the upper end portion of socket 81 along the axial direction. For example, two first engagement grooves 67 are formed at intervals of 180 ° in the circumferential direction.

  The connecting member 75 is interposed between the first holder 65 and the second holder 70 in the axial direction, and connects the first holder 65 and the second holder. The connecting member 75 includes a connecting member main body 76, a first engaging portion 77, a cover portion 78, and a second engaging portion 79. As a material of the connecting member 75, for example, a resin such as polyether ether ketone (PEEK) or polyoxymethylene (POM) is used. In addition, as a material of the connection member 75, other materials, such as a metal, can also be used.

  The connecting member main body 76 is a cylindrical member that is short in the axial direction, and the nozzle shaft 61 can be inserted into the connecting member main body 76. The first engaging portion 77 engages with the first engaging groove 67 provided in the first holder 65 and the socket 81. The first engaging portion 77 is formed so as to protrude downward from the connecting member main body 76 at a position corresponding to the first engaging groove 67. For example, two first engaging portions 77 are formed at intervals of 180 ° in the circumferential direction. The size of the first engaging portion 77 is set to be slightly larger than that of the first engaging groove 67. Thereby, since the 1st engaging part 77 fits in the 1st engaging groove 67 with strong force, the connection force between the 1st holder 65 and the connection member 75 can be improved.

  The cover portion 78 is formed on the outer peripheral side of the connecting member main body 76 so as to protrude downward from the connecting member main body 76. The cover portion 78 can cover the periphery of the socket 81 at the upper end of the socket 81.

  A second engagement groove 71 is formed in the lower end portion of the second holder 70 along the axial direction. For example, two second engagement grooves 71 are formed at intervals of 180 ° in the circumferential direction.

  The second engaging portion 79 of the connecting member 75 engages with the second engaging groove 71 formed in the second holder 70. The second engaging portion 79 is formed to protrude upward from the connecting member main body 76 at a position corresponding to the second engaging groove 71. For example, two second engaging portions 79 are formed at intervals of 180 ° in the circumferential direction. The size of the second engaging portion 79 is set to be slightly larger than that of the second engaging groove 71. Thereby, since the 2nd engaging part 79 fits in the 2nd engaging groove 71 with a strong force, the connection force between the 2nd holder 70 and the connection member 75 can be improved.

  In the example shown in the figure, the case where the first engaging portion 77 and the second engaging portion 79 have a rectangular shape when viewed from the outer peripheral side is shown. However, the shapes of the first engaging portion 77 and the second engaging portion 79 are not limited to this. For example, the first engaging portion 77 may be formed so that the width in the circumferential direction becomes wider toward the lower side. Similarly, the second engaging portion 79 may also be formed so that the circumferential width becomes wider toward the upper side. Thereby, the connection force by the connection member 75 can be improved.

  Further, in the example shown in the drawing, a case where the first engaging portion 77 and the second engaging portion 79 are arranged at linear positions in the axial direction is shown. However, the first engaging portion 77 and the second engaging portion 79 may be disposed at positions shifted in the axial direction.

  By using the connecting member 75 according to the present embodiment, for example, the outer diameter of the nozzle unit 60 can be reduced as compared with the case where screws or bolts are used. In particular, in the present embodiment, one of the purposes is to reduce the size of the mounting head 30 without reducing the number of nozzle units 60, and therefore the distance between the nozzle units 60 tends to be narrow. Accordingly, it is particularly effective to reduce the outer diameter of the nozzle unit 60 by the connecting member 75.

  The second holder 70 is capable of holding the nozzle shaft 61 in the axial direction and non-rotatable in the rotational direction. The second holder 70 is typically constituted by a ball spline nut.

  FIG. 11 is a plan sectional view showing the second holder 70 and the nozzle shaft 61. The nozzle shaft 61 has a groove 64 formed along the axial direction on the outer peripheral surface thereof. In the example shown in the figure, the number of grooves 64 is four, but the number of grooves 64 is not particularly limited. The nozzle shaft 61 does not have the groove 64 over the entire length direction, but has the groove 64 at a position corresponding to a portion held by the second holder 70. 7 and 8, the nozzle shaft 61 is movable in the axial direction with respect to the second holder 70. Therefore, the length of the groove 64 is set appropriately according to the movement of the nozzle shaft 61. Length is set.

  The second holder 70 has a ball 72 at a position corresponding to the groove 64 formed in the nozzle shaft 61 on the inner peripheral side thereof. The balls 72 are arranged along the axial direction on the inner peripheral side of the second holder 70. When the nozzle shaft 61 is moved in the axial direction, the ball 72 that fits into the groove 64 of the nozzle shaft 61 circulates in the second holder 70 while rotating. As a result, the nozzle shaft 61 can be moved in the axial direction while reducing friction. On the other hand, since the ball 72 is fitted in the groove 64 of the nozzle shaft 61, the rotation of the nozzle shaft 61 in the second holder 70 is restricted.

  With reference to FIGS. 7 and 8, a spring member 85 is interposed between the flange 63 formed at the upper end portion of the nozzle shaft 61 and the upper end portion of the second holder 70. As shown in FIG. 7, when the nozzle shaft 61 is located at the normal position, the spring member 85 biases the second holder 70 from above, whereby the second holder 70, the connecting member 75, the socket 81, and The gear unit 80 is pressed toward the first holder 65 side. As a result, the second holder 70, the connecting member 75, the socket 81, and the gear portion 80 are prevented from being detached from the first holder 65.

  Further, as shown in FIG. 8, when the nozzle shaft 61 is pushed down and then the pressed state of the nozzle shaft 61 is released, the spring member 85 moves the nozzle shaft 61 upward by its elastic force, and the nozzle The shaft 61 is returned to the normal position.

  Here, the outer periphery of the second holder 70 is made larger than the diameter of the through hole 51 of the head unit 50 through which the first holder 65 is inserted. That is, the outer periphery of the second holder 70 is larger than the outer periphery of the first holder 65. For example, the outer circumference of the second holder 70 is about 9 mm, and the outer circumference of the first holder 65 is about 6 mm. Further, the diameter of the through hole 51 of the head unit 50 is set to a size slightly larger than 6 mm. It should be noted that the numerical values given here are merely examples, and other values can of course be taken.

  As described above, the first holder 65 is a member that holds the nozzle shaft 61 so as to be movable in the axial direction. On the other hand, the second holder 70 is a member that holds the nozzle shaft 61 so as not to rotate in the rotation direction in addition to holding the nozzle shaft 61 movably in the axial direction. Therefore, the second holder 70 tends to be thicker than the first holder 65.

  Therefore, in the present embodiment, the portion that tends to be thick is used as the second holder 70, separated from the first holder 65, and the first holder 65 having an outer diameter smaller than that of the second holder 70 passes through the head unit 50. It is supposed to be inserted into the hole 51. Thereby, the diameter of the through hole 51 provided in the head unit 50 can be reduced. As a result, the mounting head 30 can be downsized without reducing the number of nozzle units 60. Alternatively, the number of nozzle units 60 can be increased without increasing the mounting head 30.

<Operation description>
Next, the operation of the nozzle unit 60 will be described.

  When there is a difference between the rotation amount by the base shaft 35 and the head unit 50 and the rotation amount by the outer cylinder 40 and the drive gear 42, the drive gear 42 rotates with respect to the head unit 50. When the drive gear 42 rotates, the rotational force of the drive gear 42 is transmitted to the gear unit 80 provided in the head unit 50, and the gear unit 80 rotates. Since the gear portion 80 is fixed to the outer periphery of the first holder 65, the first holder 65 is rotated by the rotation of the gear portion 80.

  Since the first holder 65 and the second holder 70 are connected via a connecting member 75, when the first holder 65 rotates, the first holder 65 and the second holder 70 are integrated. Rotate. When the connecting member 75 that connects the first holder 65 and the second holder 70 is made of a resin such as polyetheretherketone or polyoxymethylene, the first center 65 is appropriately held while the first center 65 is being held. The holder 65 and the second holder 70 can be rotated integrally.

  Since the second holder 70 holds the nozzle shaft 61 in a non-rotatable manner, when the second holder 70 rotates, the nozzle shaft 61 also rotates according to the rotation of the second holder 70. Thereby, each member which comprises the nozzle unit 60 rotates integrally.

  Since the drive gear 42 meshes with the gear portions 80 of all the nozzle units 60, all the nozzle units 60 rotate when the drive gear 42 rotates.

  When the nozzle shaft 61 receives a force from above, the nozzle shaft 61 is moved downward while being slid inside the first holder 65 and the second holder 70. When the pressing state of the nozzle shaft 61 is released, the nozzle shaft 61 is moved upward while being slid inside the first holder 65 and the second holder 70 by the elastic force of the spring member 85. As a result, the nozzle shaft 61 returns to the normal position.

  Since the axial center of the first holder 65 and the second holder 70 is maintained by the connecting member 75, the nozzle shaft appropriately moves in the vertical direction inside the first holder 65 and the second holder 70. It is possible.

《Action etc.》
As described above, in the present embodiment, the holder that holds the nozzle shaft 61 is separated into the first holder 65 having a relatively small outer diameter and the second holder 70 having a relatively large outer diameter. Configured. Then, the first holder 65 having an outer diameter smaller than that of the second holder 70 is inserted into the through hole 51 of the head unit 50. Thereby, the diameter of the through hole 51 provided in the head unit 50 can be reduced. Thereby, in this embodiment, the diameter of the through-hole 51 provided in the head unit 50 can be made small. As a result, the mounting head 30 can be downsized without reducing the number of nozzle units 60. Alternatively, the number of nozzle units 60 can be increased without increasing the mounting head 30.

  Furthermore, in this embodiment, a connecting member 75 having an engaging portion extending in the axial direction is used as the connecting member 75 that connects the first holder 65 and the second holder 70. Thereby, the outer diameter of the nozzle unit 60 can be reduced compared with the case where a screw, a volt | bolt, etc. are used, for example. In particular, in the present embodiment, one of the purposes is to reduce the size of the mounting head 30 without reducing the number of nozzle units 60, and therefore the distance between the nozzle units 60 tends to be narrow. Accordingly, it is particularly effective to reduce the outer diameter of the nozzle unit 60 by the connecting member 75.

  Further, when the connecting member 75 is made of a resin such as polyether ether ketone or polyoxymethylene, the first holder 65 and the second holder 70 are integrally rotated while the shaft center is appropriately held. be able to.

<Variations>
In the above description, the case where the second holder 70 is configured by a ball spline nut has been described. However, the second holder 70 is not limited to the ball spline nut as long as it can hold the nozzle shaft 61 in the axial direction and non-rotatable in the rotational direction. For example, instead of the ball 72 in the ball spline nut, a form in which a protrusion that engages with the groove 64 provided in the nozzle shaft 61 may be provided.

  In the above description, the drive gear 42 has been described as an example of the member that rotates the nozzle unit 60. However, instead of the drive gear 42, a rotating body (drive rotation unit) having a predetermined frictional force on the outer peripheral surface may be used. In this case, a friction ring (transmission portion) may be used instead of the gear portion 80 of the nozzle unit.

  In the above description, the form in which the head unit 50 is rotatable about the base shaft 35 as a central axis has been described. However, the head unit 50 is not necessarily rotatable. In this case, the head unit 50 has a plurality of through holes 51 arranged along the X-axis direction and / or the Y-axis direction. In the present technology, since the diameter of the through hole 51 can be reduced, the mounting head 30 can be downsized without reducing the number of nozzle units 60 even in such a case. Alternatively, the number of nozzle units 60 can be increased without increasing the mounting head 30.

In the present technology, the following configuration may be employed.
(1) a head unit having a plurality of through holes;
A nozzle shaft, a first holder that is inserted into the through-hole and is rotatable with respect to the head unit, and holds the nozzle shaft movably in the axial direction therein, and a diameter of the through-hole A plurality of nozzle units each having a large outer diameter and connected to the first holder, each having a second holder that holds the nozzle shaft in an axial direction and non-rotatable in the rotational direction. A mounting head comprising:
(2) The mounting head according to (1) above,
Each of the plurality of nozzle units further includes a connecting member that is interposed between the first holder and the second holder in the axial direction and connects the first holder and the second holder. head.
(3) The mounting head according to (2) above,
The first holder has a first engagement groove along the axial direction,
The connection member includes a first engagement portion that engages with the first engagement groove.
(4) The mounting head according to (3) above,
The first engagement portion is larger than the first engagement groove.
(5) The mounting head according to any one of (2) to (4) above,
The second holder has a second engagement groove along the axial direction,
The connection member has a second engagement portion that engages with the second engagement groove.
(6) The mounting head according to (5) above,
The second engagement portion is larger than the second engagement groove.
(7) The mounting head according to any one of (2) to (6) above,
The connecting member is a mounting head formed of resin.
(8) The mounting head according to any one of (1) to (7) above,
The head unit is rotatable around a rotation axis,
The plurality of through holes are formed around the rotation shaft.
(9) The mounting head according to (8) above,
It further includes a drive rotation unit that is arranged coaxially with the head unit and can rotate independently of the head unit,
Each of the plurality of nozzle units further includes a transmission unit that is fixed to an outer periphery of the first holder and that transmits the rotation of the drive rotation unit to the nozzle unit.
(10) a nozzle shaft;
A first holder that is inserted into a through-hole provided in the head unit, is rotatable with respect to the head unit, and holds the nozzle shaft movably in the axial direction therein;
A second holder having an outer diameter larger than the diameter of the through-hole, connected to the first holder, and holding the nozzle shaft in the axial direction and non-rotatable in the rotational direction; A nozzle unit comprising:
(11) a head unit having a plurality of through holes;
A nozzle shaft, a first holder that is inserted into the through-hole and is rotatable with respect to the head unit, and holds the nozzle shaft movably in the axial direction therein, and a diameter of the through-hole A plurality of nozzle units each having a large outer diameter and connected to the first holder, each having a second holder that holds the nozzle shaft in an axial direction and non-rotatable in the rotational direction. A mounting apparatus comprising a mounting head comprising:
(12) A head unit having a plurality of through holes, a nozzle shaft, inserted through the through holes, rotatable with respect to the head unit, and holding the nozzle shaft movably in the axial direction therein. The first holder has an outer diameter larger than the diameter of the through hole, is connected to the first holder, and holds the nozzle shaft in the axial direction and non-rotatable in the rotational direction. A plurality of nozzle units each having a second holder that holds the electronic component by the nozzle shaft of the mounting head,
A method for manufacturing a substrate, wherein the electronic component held by the nozzle shaft is mounted on the substrate.

DESCRIPTION OF SYMBOLS 1 ... Board | substrate 2 ... Electronic component 10 ... Frame structure 15 ... Conveyance part 20 ... Tape feeder mounting part 30 ... Mounting head 35 ... Base shaft 42 ... Drive gear 47 ... Valve 60 ... Nozzle unit 61 ... Nozzle shaft 61a ... Adsorption hole 65 ... 1st holder 67 ... 1st engagement groove 70 ... 2nd holder 71 ... 2nd engagement groove 75 ... Connecting member 77 ... 1st engagement part 79 ... 2nd engagement part 80 ... Gear part 81 ... Socket 85 ... Spring member 100 ... Mounting device

Claims (12)

A head unit having a plurality of through holes;
A nozzle shaft, a first holder that is inserted into the through-hole and is rotatable with respect to the head unit, and holds the nozzle shaft movably in the axial direction therein, and a diameter of the through-hole A plurality of nozzle units each having a large outer diameter and connected to the first holder, each having a second holder that holds the nozzle shaft in an axial direction and non-rotatable in the rotational direction. A mounting head comprising: The mounting head according to claim 1,
Each of the plurality of nozzle units further includes a connecting member that is interposed between the first holder and the second holder in the axial direction and connects the first holder and the second holder. head. The mounting head according to claim 2,
The first holder has a first engagement groove along the axial direction,
The connection member includes a first engagement portion that engages with the first engagement groove. The mounting head according to claim 3,
The first engagement portion is larger than the first engagement groove. The mounting head according to claim 2,
The second holder has a second engagement groove along the axial direction,
The connection member has a second engagement portion that engages with the second engagement groove. The mounting head according to claim 5,
The second engagement portion is larger than the second engagement groove. The mounting head according to claim 2,
The connecting member is a mounting head formed of resin. The mounting head according to claim 1,
The head unit is rotatable around a rotation axis,
The plurality of through holes are formed around the rotation shaft. The mounting head according to claim 8, wherein
It further includes a drive rotation unit that is arranged coaxially with the head unit and can rotate independently of the head unit,
Each of the plurality of nozzle units further includes a transmission unit that is fixed to an outer periphery of the first holder and that transmits the rotation of the drive rotation unit to the nozzle unit. A nozzle shaft;
A first holder that is inserted into a through-hole provided in the head unit, is rotatable with respect to the head unit, and holds the nozzle shaft movably in the axial direction therein;
A second holder having an outer diameter larger than the diameter of the through-hole, connected to the first holder, and holding the nozzle shaft in the axial direction and non-rotatable in the rotational direction; A nozzle unit comprising: A head unit having a plurality of through holes;
A nozzle shaft, a first holder that is inserted into the through-hole and is rotatable with respect to the head unit, and holds the nozzle shaft movably in the axial direction therein, and a diameter of the through-hole A plurality of nozzle units each having a large outer diameter and connected to the first holder, each having a second holder that holds the nozzle shaft in an axial direction and non-rotatable in the rotational direction. A mounting apparatus comprising a mounting head comprising: A head unit having a plurality of through holes, a nozzle shaft, and a first shaft that is inserted into the through hole, is rotatable with respect to the head unit, and holds the nozzle shaft movably in the axial direction therein. A second holder having an outer diameter larger than the diameter of the through-hole, coupled to the first holder, and holding the nozzle shaft movable in the axial direction and non-rotatable in the rotational direction therein; And holding the electronic component by the nozzle shaft of the mounting head comprising a plurality of nozzle units each having a holder,
A method for manufacturing a substrate, wherein the electronic component held by the nozzle shaft is mounted on the substrate.