JP6135082B2 - 誘導加熱炉 - Google Patents
誘導加熱炉 Download PDFInfo
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- JP6135082B2 JP6135082B2 JP2012213353A JP2012213353A JP6135082B2 JP 6135082 B2 JP6135082 B2 JP 6135082B2 JP 2012213353 A JP2012213353 A JP 2012213353A JP 2012213353 A JP2012213353 A JP 2012213353A JP 6135082 B2 JP6135082 B2 JP 6135082B2
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- Prior art keywords
- heat insulating
- insulating material
- heat
- slit
- heating
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- 238000010438 heat treatment Methods 0.000 title claims description 143
- 230000006698 induction Effects 0.000 title claims description 38
- 239000011810 insulating material Substances 0.000 claims description 132
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 47
- 239000000463 material Substances 0.000 claims description 37
- 229910002804 graphite Inorganic materials 0.000 claims description 35
- 239000010439 graphite Substances 0.000 claims description 35
- 239000003779 heat-resistant material Substances 0.000 claims description 26
- 239000003870 refractory metal Substances 0.000 claims description 22
- 230000002093 peripheral effect Effects 0.000 claims description 16
- 230000008018 melting Effects 0.000 claims description 14
- 238000002844 melting Methods 0.000 claims description 14
- 239000012212 insulator Substances 0.000 claims description 4
- 238000005452 bending Methods 0.000 claims description 3
- 238000000034 method Methods 0.000 description 26
- 238000013021 overheating Methods 0.000 description 24
- 230000008569 process Effects 0.000 description 20
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 20
- 229910010271 silicon carbide Inorganic materials 0.000 description 19
- 230000005855 radiation Effects 0.000 description 15
- 230000000630 rising effect Effects 0.000 description 15
- 239000007789 gas Substances 0.000 description 14
- 229910052799 carbon Inorganic materials 0.000 description 12
- 230000008859 change Effects 0.000 description 11
- 239000010409 thin film Substances 0.000 description 11
- 230000008020 evaporation Effects 0.000 description 6
- 238000001704 evaporation Methods 0.000 description 6
- 238000004519 manufacturing process Methods 0.000 description 6
- 239000004065 semiconductor Substances 0.000 description 6
- 230000009471 action Effects 0.000 description 3
- 239000000919 ceramic Substances 0.000 description 3
- 239000004020 conductor Substances 0.000 description 3
- 230000020169 heat generation Effects 0.000 description 3
- 238000009413 insulation Methods 0.000 description 3
- 239000007769 metal material Substances 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 239000000470 constituent Substances 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 230000003247 decreasing effect Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- 239000010408 film Substances 0.000 description 2
- 239000003365 glass fiber Substances 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 239000012774 insulation material Substances 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 239000010453 quartz Substances 0.000 description 2
- 239000002994 raw material Substances 0.000 description 2
- 238000004904 shortening Methods 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 229910052715 tantalum Inorganic materials 0.000 description 2
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 2
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 2
- 229910052721 tungsten Inorganic materials 0.000 description 2
- 239000010937 tungsten Substances 0.000 description 2
- 229920000049 Carbon (fiber) Polymers 0.000 description 1
- 240000006829 Ficus sundaica Species 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 239000004917 carbon fiber Substances 0.000 description 1
- 239000012159 carrier gas Substances 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 239000002826 coolant Substances 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005674 electromagnetic induction Effects 0.000 description 1
- 238000000407 epitaxy Methods 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 239000000155 melt Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 229910052758 niobium Inorganic materials 0.000 description 1
- 239000010955 niobium Substances 0.000 description 1
- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 description 1
- 238000012856 packing Methods 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 230000011218 segmentation Effects 0.000 description 1
- 238000004088 simulation Methods 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- RUDFQVOCFDJEEF-UHFFFAOYSA-N yttrium(III) oxide Inorganic materials [O-2].[O-2].[O-2].[Y+3].[Y+3] RUDFQVOCFDJEEF-UHFFFAOYSA-N 0.000 description 1
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- General Induction Heating (AREA)
Description
Vapor Deposition・化学気相成長)法が採用されており、これに用いるエピキシャル装置も開発されている(例えば特許文献1)。
このような断熱材を備えた誘導加熱炉であれば、コイルに電流を流して発熱体を所定の高温にまで昇温させる過程において、その熱量の増加に応じて断熱材も昇温するが、断熱材全体を周回して流れようとする渦電流を、スリットが存在しない場合に比べて小さな電流にすることができ、断熱材が発熱体よりも急激に昇温する自体を防止・抑制することができることを本発明者は確認した。
2…加熱室
3…発熱体
4…断熱材
5…真空容器
6…コイル
S…スリット
S1…屈曲部
T…耐熱材
W…ウェハ(加熱対象物)
Claims (1)
- 加熱対象物を内部に収容可能な加熱室と、
前記加熱室の外側を周回するように配置され且つ前記加熱対象物に対する加熱処理時の最高温度よりも融点が高い黒鉛又は高融点金属材料から形成した発熱体と、
前記発熱体の外側を周回するように配置される導電性の断熱材と、
前記断熱材の外側を周回するように配置される真空容器と、
前記真空容器の外側に巻回されるコイルとを備えた誘導加熱炉であって、
前記断熱材は、前記発熱体を構成する黒鉛又は高融点金属材料よりも固有抵抗が大きい素材から形成され且つスリットで周方向に分断されたものであり、
前記スリットは、所定部分を延伸方向に対して所定角度屈曲させた屈曲部と、当該屈曲部よりも前記断熱材の外周側の部分である外周側径方向延伸部分とを有するものであり、
前記屈曲部のうち前記外周側径方向延伸部分側に寄った所定領域から前記外周側径方向延伸部分に亘る部分の一部又は全部に、絶縁体として機能する耐熱材を詰めていることを特徴とする誘導加熱炉。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2012213353A JP6135082B2 (ja) | 2012-09-27 | 2012-09-27 | 誘導加熱炉 |
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JP2012213353A JP6135082B2 (ja) | 2012-09-27 | 2012-09-27 | 誘導加熱炉 |
Publications (2)
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JP2014067652A JP2014067652A (ja) | 2014-04-17 |
JP6135082B2 true JP6135082B2 (ja) | 2017-05-31 |
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JP2012213353A Active JP6135082B2 (ja) | 2012-09-27 | 2012-09-27 | 誘導加熱炉 |
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JP (1) | JP6135082B2 (ja) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN107937735A (zh) * | 2017-12-29 | 2018-04-20 | 山西大学 | 一种电磁感应加热高效镁还原罐 |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5828980A (ja) * | 1981-08-14 | 1983-02-21 | 東レ株式会社 | 誘導加熱炉 |
JPH06267652A (ja) * | 1993-03-12 | 1994-09-22 | Hitachi Medical Corp | 真空熱処理装置 |
JP2004047139A (ja) * | 2002-07-09 | 2004-02-12 | Sumitomo Electric Ind Ltd | ガラス物品の加熱装置 |
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2012
- 2012-09-27 JP JP2012213353A patent/JP6135082B2/ja active Active
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