JP6114538B2 - 光電式絶対位置検出器、及び、その取付方法 - Google Patents
光電式絶対位置検出器、及び、その取付方法 Download PDFInfo
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- JP6114538B2 JP6114538B2 JP2012265802A JP2012265802A JP6114538B2 JP 6114538 B2 JP6114538 B2 JP 6114538B2 JP 2012265802 A JP2012265802 A JP 2012265802A JP 2012265802 A JP2012265802 A JP 2012265802A JP 6114538 B2 JP6114538 B2 JP 6114538B2
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- Prior art keywords
- light receiving
- detector
- receiving element
- scale
- absolute position
- Prior art date
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- 238000000034 method Methods 0.000 title claims description 9
- 238000003491 array Methods 0.000 claims description 13
- 238000006073 displacement reaction Methods 0.000 claims description 7
- 238000001514 detection method Methods 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 3
- 238000005259 measurement Methods 0.000 description 3
- 238000012545 processing Methods 0.000 description 3
- 238000003786 synthesis reaction Methods 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000012937 correction Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
- G01D5/34707—Scales; Discs, e.g. fixation, fabrication, compensation
- G01D5/34715—Scale reading or illumination devices
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/244—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains
- G01D5/24471—Error correction
- G01D5/24485—Error correction using other sensors
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
- G01D5/34776—Absolute encoders with analogue or digital scales
- G01D5/34792—Absolute encoders with analogue or digital scales with only digital scales or both digital and incremental scales
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optical Transform (AREA)
Description
Iamp=√{(Ia−Iab)2+(Ib−Ibb)2} …(1)
11、12、13…スケールトラック
20…検出器
21、22、23…受光素子アレイ
22’…追加した受光素子アレイ
Claims (3)
- ピッチが異なるパターンの複数のトラックを持つスケールと、
光源、及び、前記複数のトラックに対応した複数の受光素子アレイを含む受光素子を持つ検出器を備えた光電式絶対位置検出器において、
前記検出器の、前記複数の受光素子アレイの間の前記スケールの隣り合う粗いピッチと細かいピッチのパターンのトラックの境界に対応する位置に、前記複数の受光素子アレイと平行に、該複数の受光素子アレイのいずれか一つと同一の構成の受光素子アレイを追加配置し、
該追加した受光素子アレイの信号振幅から、前記検出器のスケールに対するラテラル方向の変位を検出することを特徴とする光電式絶対位置検出器。 - 前記追加した受光素子アレイ内の受光素子の配設ピッチが、前記スケールの粗いピッチ用の受光素子アレイ内の受光素子の配設ピッチと同一であることを特徴とする請求項1に記載の光電式絶対位置検出器。
- 請求項1又は2に記載の光電式絶対位置検出器の取付に際して、前記追加した受光素子アレイの信号振幅から検出される、前記検出器のスケールに対するラテラル方向のずれが解消されるように、前記スケールと検出器の位置合わせを行なうことを特徴とする光電式絶対位置検出器の取付方法。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2012265802A JP6114538B2 (ja) | 2012-12-04 | 2012-12-04 | 光電式絶対位置検出器、及び、その取付方法 |
EP13005547.8A EP2741057B1 (en) | 2012-12-04 | 2013-11-28 | Photoelectric absolute encoder and installation method therefor |
US14/093,744 US9121734B2 (en) | 2012-12-04 | 2013-12-02 | Photoelectric absolute encoder having a light receiving element array additionally arranged corresponding to a boundary between the track having a wide pitch pattern and a narrow pitch pattern and installation method therefor |
CN201310645853.6A CN103852091B (zh) | 2012-12-04 | 2013-12-04 | 光电式绝对位置检测器及其安装方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2012265802A JP6114538B2 (ja) | 2012-12-04 | 2012-12-04 | 光電式絶対位置検出器、及び、その取付方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2014109565A JP2014109565A (ja) | 2014-06-12 |
JP6114538B2 true JP6114538B2 (ja) | 2017-04-12 |
Family
ID=49679278
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2012265802A Expired - Fee Related JP6114538B2 (ja) | 2012-12-04 | 2012-12-04 | 光電式絶対位置検出器、及び、その取付方法 |
Country Status (4)
Country | Link |
---|---|
US (1) | US9121734B2 (ja) |
EP (1) | EP2741057B1 (ja) |
JP (1) | JP6114538B2 (ja) |
CN (1) | CN103852091B (ja) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6462248B2 (ja) * | 2014-06-30 | 2019-01-30 | シチズン時計株式会社 | 測長器、変位量算出手段及び測長器のスケール部とパターン読取部との位置合わせ方法 |
US10303270B2 (en) * | 2016-09-12 | 2019-05-28 | Microsoft Technology Licensing, Llc | Linear encoder force transducer |
WO2018071063A1 (en) * | 2016-10-14 | 2018-04-19 | Kla-Tencor Corporation | Diffraction-based focus metrology |
KR102574454B1 (ko) | 2016-12-16 | 2023-09-04 | 삼성전자 주식회사 | 반도체 장치 및 그 제조 방법 |
US11774270B2 (en) * | 2021-08-20 | 2023-10-03 | Mitutoyo Corporation | Encoder |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3678220A (en) * | 1971-05-26 | 1972-07-18 | Ibm | Angulated positioning marks for moving web |
DE3542514A1 (de) * | 1985-12-02 | 1987-06-04 | Zeiss Carl Fa | Wegmesseinrichtung |
JPH04295719A (ja) * | 1991-03-25 | 1992-10-20 | Nikon Corp | アブソリュ−ト・エンコ−ダ |
DE59201199D1 (de) | 1992-02-14 | 1995-02-23 | Heidenhain Gmbh Dr Johannes | Wegmesseinrichtung. |
JP4783698B2 (ja) | 2006-09-05 | 2011-09-28 | 株式会社ミツトヨ | 電磁誘導式エンコーダ |
JP4960133B2 (ja) * | 2007-04-11 | 2012-06-27 | 株式会社ミツトヨ | 絶対位置測長型エンコーダ |
JP5601876B2 (ja) * | 2010-05-07 | 2014-10-08 | 株式会社ミツトヨ | セパレート型エンコーダ、及び、その取付方法 |
US8309906B2 (en) * | 2010-06-10 | 2012-11-13 | Mitutoyo Corporation | Absolute optical encoder with long range intensity modulation on scale |
-
2012
- 2012-12-04 JP JP2012265802A patent/JP6114538B2/ja not_active Expired - Fee Related
-
2013
- 2013-11-28 EP EP13005547.8A patent/EP2741057B1/en active Active
- 2013-12-02 US US14/093,744 patent/US9121734B2/en not_active Expired - Fee Related
- 2013-12-04 CN CN201310645853.6A patent/CN103852091B/zh active Active
Also Published As
Publication number | Publication date |
---|---|
US20140151539A1 (en) | 2014-06-05 |
CN103852091B (zh) | 2018-01-23 |
US9121734B2 (en) | 2015-09-01 |
CN103852091A (zh) | 2014-06-11 |
EP2741057A3 (en) | 2014-08-20 |
EP2741057A2 (en) | 2014-06-11 |
EP2741057B1 (en) | 2017-07-05 |
JP2014109565A (ja) | 2014-06-12 |
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