JP6104691B2 - ナノインプリント方法及びそのための装置 - Google Patents

ナノインプリント方法及びそのための装置 Download PDF

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Publication number
JP6104691B2
JP6104691B2 JP2013093614A JP2013093614A JP6104691B2 JP 6104691 B2 JP6104691 B2 JP 6104691B2 JP 2013093614 A JP2013093614 A JP 2013093614A JP 2013093614 A JP2013093614 A JP 2013093614A JP 6104691 B2 JP6104691 B2 JP 6104691B2
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transferred
roller
stamper
nanoimprint
transfer
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JP2014213552A (ja
JP2014213552A5 (https=
Inventor
賢治 弓場
賢治 弓場
裕久 森
裕久 森
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Hitachi Industrial Equipment Systems Co Ltd
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Hitachi Industrial Equipment Systems Co Ltd
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  • Shaping Of Tube Ends By Bending Or Straightening (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
JP2013093614A 2013-04-26 2013-04-26 ナノインプリント方法及びそのための装置 Active JP6104691B2 (ja)

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JP2013093614A JP6104691B2 (ja) 2013-04-26 2013-04-26 ナノインプリント方法及びそのための装置

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JP2013093614A JP6104691B2 (ja) 2013-04-26 2013-04-26 ナノインプリント方法及びそのための装置

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JP2014213552A JP2014213552A (ja) 2014-11-17
JP2014213552A5 JP2014213552A5 (https=) 2016-04-14
JP6104691B2 true JP6104691B2 (ja) 2017-03-29

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102891560B1 (ko) * 2020-12-01 2025-11-26 주식회사 기가레인 나노 임프린트용 레플리카 몰드 제작 장치

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102448904B1 (ko) 2017-07-31 2022-09-29 삼성디스플레이 주식회사 임프린트 장치 및 임프린트 방법

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5104232B2 (ja) * 2007-11-09 2012-12-19 東レ株式会社 微細形状転写シートの成形装置
KR101727609B1 (ko) * 2010-05-28 2017-04-17 도레이 카부시키가이샤 미세 표면 구조를 갖는 필름의 제조방법 및 제조장치
JP5593190B2 (ja) * 2010-10-08 2014-09-17 東芝機械株式会社 モールド剥離装置
JPWO2012070546A1 (ja) * 2010-11-22 2014-05-19 旭硝子株式会社 転写装置及び樹脂パターン製造方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102891560B1 (ko) * 2020-12-01 2025-11-26 주식회사 기가레인 나노 임프린트용 레플리카 몰드 제작 장치

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