JP6099828B2 - Microwave heating irradiation device - Google Patents

Description

  The present invention relates to a microwave heating irradiation apparatus that heats a sample by irradiating it with microwaves.

  In the field of microwave transmission technology, for example, various technologies related to high-efficiency transmission technology and beam control technology using an active phased array antenna (APAA) toward the realization of a solar power satellite (SPS). R & D is underway.

There is also a trend to apply these microwave transmission technologies to industrial applications. For example, Patent Documents 1 and 2 disclose an iron making system that manufactures molten pig iron by irradiating and heating a raw material with microwaves. Non-Patent Documents 1 and 2 disclose a technique for configuring a microwave radiation source with a phased array antenna in an iron-making system using microwaves. Furthermore, recently, a technique for shortening a chemical reaction time by applying a microwave to a chemical reaction is also attracting attention.
At present, microwave transmission technology is often applied to small-scale devices. However, development of large-scale and high-power devices such as an iron manufacturing system is also demanded.

International Publication No. 2010/087464, “Vertical Microwave Iron Furnace” JP2013-11384A "Microwave Heating Furnace"

Sato, Nagata, Shinohara, Mitani, Kashimura, “Conceptual design of industrial microwave applicator using phased array antenna”, 5th Japan Electromagnetic Energy Application Society Symposium, Proceedings 2B07 (2011) Sasakawa, Honma, Sasaki, Inazawa, Konishi, "A Study on Application of Microwave Transmission Technology to Microwave Steel Systems", 2013 IEICE General Conference, Abstracts B-1-13 (2013)

  In the conventional microwave heating systems disclosed in Patent Documents 1 and 2 and Non-Patent Documents 1 and 2, microwave radiation sources are arranged circumferentially around a reaction furnace. For this reason, of the microwaves radiated from a specific microwave radiation source (hereinafter referred to as “first microwave radiation source”), the microwaves that are not absorbed by the sample to be heated are reflected by this sample and reacted. A microwave radiation source (hereinafter referred to as a “second microwave radiation source”) facing the first microwave radiation source is irradiated through a furnace. Thereby, there was a problem that a failure of the second microwave radiation source occurred. Moreover, since the state of the sample to be input varies depending on the product such as solid, liquid, gas, and powder, there is a problem that the sample leaks out of the reaction furnace when the reaction furnace has no cover.

  The present invention has been made to solve the above-described problems, and an object thereof is to provide a microwave heating irradiation apparatus capable of confining a microwave and a sample in a reaction furnace.

A microwave heating irradiation apparatus according to the present invention includes a reaction furnace that heats a sample contained therein by being irradiated with microwaves, a lid that is provided in the reaction furnace, and that has one hole; One microwave irradiation source that is arranged outside and irradiates microwaves, and a rotation that is arranged above the reaction furnace and reflects the microwaves irradiated by the microwave irradiation source to the reaction furnace through the holes in the lid It is provided with a secondary curved surface mirror and a concavo-convex portion that is provided at a location other than the hole on the surface of the lid facing the inside of the reaction furnace and diffuses the microwaves .

  According to this invention, since it comprised as mentioned above, a microwave and a sample can be confined in a reaction furnace.

It is a figure which shows the structure of the microwave heating irradiation apparatus which concerns on Embodiment 1 of this invention, (a) It is a top view, (b) It is a sectional side view. It is a top view which shows the structure of the lid | cover in Embodiment 1 of this invention. It is a figure which shows the structure of the microwave heating irradiation apparatus which concerns on Embodiment 2 of this invention, (a) It is a top view, (b) It is a sectional side view. It is a figure which shows the structure of the microwave heating irradiation apparatus which concerns on Embodiment 3 of this invention, (a) It is a top view, (b) It is a sectional side view. It is a top view which shows the structure of the cover in Embodiment 3 of this invention. It is a sectional side view which shows the structure of the microwave heating irradiation apparatus which concerns on Embodiment 4 of this invention. It is a sectional side view which shows the structure of the microwave heating irradiation apparatus which concerns on Embodiment 5 of this invention. It is a sectional side view which shows the structure of the microwave heating irradiation apparatus which concerns on Embodiment 6 of this invention. It is a sectional side view which shows the structure of the microwave heating irradiation apparatus which concerns on Embodiment 7 of this invention. It is a top view which shows the structure of the lid | cover in Embodiment 7 of this invention. It is a sectional side view which shows the structure of the microwave heating irradiation apparatus which concerns on Embodiment 8 of this invention. It is a sectional side view which shows the structure of the microwave heating irradiation apparatus which concerns on Embodiment 9 of this invention.

Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.
Embodiment 1 FIG.
FIG. 1 is a diagram showing a configuration of a microwave heating irradiation apparatus according to Embodiment 1 of the present invention.
As shown in FIG. 1, the microwave heating irradiation apparatus includes a reaction furnace 1, a lid 2, a microwave radiation source 3, and a rotating quadratic curved mirror 4.

  The reaction furnace 1 is a case that reacts and heats the sample 50 accommodated therein by being irradiated with microwaves, and is a casing having an opening on the upper side (the rotating secondary curved mirror 4 side). The shape of the reaction furnace 1 may be appropriately selected depending on the form and characteristics of the sample 50 to be reacted. Moreover, in the example shown in FIG. 1, although the shape of the reactor 1 is made into the rectangle, it is not limited to this, For example, arbitrary shapes, such as a circle, may be sufficient.

  The lid 2 is provided in the reaction furnace 1 and has a hole 21. In the first embodiment, as shown in FIGS. 1 and 2, a case where one hole 21 is formed in the lid 2 is shown. In FIG. 1, the path of microwave radiation is geometrically optically shown. However, since an actual microwave has a wave effect, even in the vicinity of the focal point, the wave has a wave spread called a beam waist. Become. Therefore, the shape and size of the hole 21 provided in the lid 2 may be appropriately selected because the beam waist varies depending on the shape and arrangement of the rotating quadric curved mirror 4. In the example shown in FIG. 1, the shape of the hole 21 is circular. However, the shape is not limited to this, and may be an arbitrary shape such as a rectangle.

  The microwave radiation source 3 is disposed outside the reaction furnace 1 and irradiates a microwave for causing the sample 50 to react. In Embodiment 1 shown in FIG. 1, the case where one microwave irradiation source is provided is shown. Note that the type of the microwave radiation source 3, the frequency of the microwave to be irradiated, and the like may be appropriately selected. The radiation direction of the microwave radiation source 3 is the direction of the rotating quadric mirror 4.

The rotating quadric curved mirror 4 is disposed above the reaction furnace 1 and reflects the microwave irradiated by the microwave radiation source 3 to the reaction furnace 1 through the hole 21 of the lid 2. Here, the microwave radiated from the microwave radiation source 3 (the first focal point 101) is incident on the rotating quadric mirror 4 like the incident wave 102. After that, the microwave reflected by the rotating quadric curved mirror 4 is focused at the hole 21 (second focal point 104) of the lid 2 like the incident wave 103. That is, the rotating quadratic curved mirror 4 has the first and second focal points 101 and 104 at the positions of the microwave radiation source 3 and the hole 21 of the lid 2, respectively. In FIG. 1, it is illustrated as a spheroid mirror.
In addition, you may select suitably the constituent material of the reaction furnace 1, the lid | cover 2, and the rotation quadratic curved mirror 4. FIG.

Next, the operation of the microwave heating irradiation apparatus configured as described above will be described.
When microwaves are irradiated from the microwave radiation source 3, the microwaves are once focused on the position of the hole 21 of the lid 2 through the rotating quadric curved mirror 4 and directed toward the sample 50 in the reaction furnace 1. Irradiates while diverging. A part of the microwave irradiated to the sample 50 is absorbed as heat by the reaction in the sample 50. On the other hand, the microwave that has not been absorbed becomes the reflected wave 105 and is reflected in the direction opposite to the direction of incidence on the sample 50.

  Here, in this invention, since the lid | cover 2 is arrange | positioned above the reaction furnace 1, a microwave is reflected by this lid | cover 2, and the sample 50 is irradiated again. Thereby, the sample 50 can be heated efficiently. The microwave leaking from the hole 21 of the lid 2 is very small, and even if it leaks, it is small considering the propagation loss in the apparatus, and the microwave radiation source 3 is not broken. . Furthermore, by providing the lid 2 on the reaction furnace 1, there is no fear that the sample 50 goes out of the reaction furnace 1.

  As described above, according to the first embodiment, since the rotating secondary curved mirror 4 is used and the lid 2 having the holes 21 is provided in the reaction furnace 1, the microwave and the sample 50 are placed in the reaction furnace 1. Can be confined. As a result, failure of the microwave radiation source 3 can be prevented and leakage of the sample 50 can be prevented. Furthermore, since the microwave can be confined in the reaction furnace 1, the microwave reflected from the sample 50 can be effectively used in the reaction furnace 1, and can be irradiated again to the sample 50, thereby improving energy efficiency. An effect is obtained.

Embodiment 2. FIG.
FIG. 3 is a diagram showing a configuration of a microwave heating irradiation apparatus according to Embodiment 2 of the present invention. The microwave heating irradiation apparatus according to Embodiment 2 shown in FIG. 3 is provided with two systems of the microwave radiation source 3 and the rotating quadratic curved mirror 4 of the microwave heating irradiation apparatus according to Embodiment 1 shown in FIG. The second focus 104 of each system is set at the position of one hole 21 of the lid 2. In the figure, in order to distinguish each system, suffixes (a, b) are added to the reference numerals of the respective components. Other configurations are the same, and the same reference numerals are given and description thereof is omitted.

  Here, the first focal point 101 is set to the position of the microwave radiation source 3 of each system, and the second focal point 104 is set to the position of one hole 21 of the lid 2 so as to be set to the position of the microwave radiation source 3 and the rotation source 2. The next curved mirror 4 is arranged. Although the example shown in FIG. 3 shows the case where two systems of the microwave radiation source 3 and the rotating quadratic curved mirror 4 are provided, three or more systems may be provided, and the number is not limited.

  As described above, according to the second embodiment, the microwave radiation source 3 and the rotating secondary curved mirror 4 are provided in a plurality of systems, and the second focal point 104 of each system is placed at the position of one hole 21 in the lid 2. Even if it is configured to set, the same effect as in the first embodiment can be obtained.

Embodiment 3 FIG.
4 is a diagram showing the configuration of the microwave heating irradiation apparatus according to the third embodiment of the present invention, and FIG. 5 is a top view showing the configuration of the lid 10. The microwave heating irradiation apparatus according to the third embodiment shown in FIGS. 4 and 5 includes four systems of the microwave radiation source 3 and the rotating quadratic curved mirror 4 of the microwave heating irradiation apparatus according to the first embodiment shown in FIG. And four holes 21 are provided in the lid 2, and the second focal points 104 of the respective systems are set at different positions of the holes 21. In the drawing, in order to distinguish each system, suffixes (a to d) are added to the reference numerals of the respective components. Other configurations are the same, and the same reference numerals are given and description thereof is omitted.

  Here, the first focal point 101 is set to the position of the microwave radiation source 3 of each system, and the second focal point 104 is set to the position of the different hole 21 of the lid 2 so that the microwave radiation source 3 and the rotating secondary source are set. A curved mirror 4 is arranged. In the example shown in FIG. 4, four microwave radiation sources 3 and rotating quadric curved mirrors 4 are provided, and four holes 21 are provided in the lid 2. A corresponding number of holes 21 may be provided, and the number is not limited.

  As described above, according to the third embodiment, the microwave radiation source 3 and the rotating secondary curved mirror 4 are provided in a plurality of systems, the number of holes 21 corresponding to the lid 2 is provided, and the second focus of each system is provided. Even if the configuration is such that 104 is set at the position of the hole 21 which is different from each other in the lid 2, the same effect as in the first and second embodiments can be obtained.

Embodiment 4 FIG.
FIG. 6 is a diagram showing the configuration of a microwave heating irradiation apparatus according to Embodiment 4 of the present invention.
The microwave heating irradiation apparatus according to the fourth embodiment shown in FIG. 6 is uneven on the back surface (the surface facing the inner side of the reaction furnace 1) of the lid 2 of the microwave heating irradiation apparatus according to the first embodiment shown in FIG. A portion 22 is provided. Other configurations are the same, and the same reference numerals are given and description thereof is omitted.

  The concavo-convex portion 22 is provided on the back surface of the lid 2 and diffuses the microwave reflected in the reaction furnace 1. The material, shape, and type of the uneven portion 22 may be appropriately selected. By providing the uneven portion 22, the reflected wave 105 of the microwave from the sample 50 is more complicatedly reflected in the reaction furnace 1 than the configuration of the first embodiment shown in FIG. The effect of reducing the microwave leaking from 21 is obtained.

  As described above, according to the fourth embodiment, by providing the concavo-convex portion 22 on the back surface of the lid 2, a more efficient heating effect on the sample 50 than the effect of the first embodiment, and the microwave An effect of further reducing leakage from the hole 21 is obtained.

  In addition, although the case where the uneven | corrugated | grooved part 22 was applied with respect to the structure of Embodiment 1 shown in FIG. 1 was shown above, it is applied similarly to the structure of Embodiment 2 and 3 shown to FIGS. It is possible and the same effect can be obtained.

Embodiment 5. FIG.
FIG. 7 is a diagram showing a configuration of a microwave heating irradiation apparatus according to Embodiment 5 of the present invention.
The microwave heating irradiation apparatus according to the fifth embodiment shown in FIG. 7 is provided with an uneven portion 11 on the inner side wall of the reaction furnace 1 of the microwave heating irradiation apparatus according to the first embodiment shown in FIG. . Other configurations are the same, and the same reference numerals are given and description thereof is omitted.

  The concavo-convex portion 11 is provided on the inner side wall of the reaction furnace 1 to diffusely reflect the microwave reflected in the reaction furnace 1. The material, shape, and type of the uneven portion 11 may be selected as appropriate. By providing the concavo-convex portion 11, the reflected wave 105 of the microwave from the sample 50 is more complicatedly reflected in the reaction furnace 1 than the configuration of the first embodiment shown in FIG. The effect of reducing the microwave leaking from 21 is obtained.

  As described above, according to the fifth embodiment, by providing the concavo-convex portion 11 on the inner side wall of the reaction furnace 1, a more efficient heating effect on the sample 50 than the effect of the first embodiment can be achieved. An effect of further reducing leakage from the microwave hole 21 can be obtained.

  In addition, although the case where the uneven | corrugated | grooved part 11 was applied with respect to the structure of Embodiment 1 shown in FIG. 1 was shown above, it is applied similarly to the structure of Embodiment 2 and 3 shown to FIGS. It is possible and the same effect can be obtained.

Embodiment 6 FIG.
FIG. 8 is a diagram showing a configuration of a microwave heating irradiation apparatus according to Embodiment 6 of the present invention.
The microwave heating irradiation apparatus according to the sixth embodiment shown in FIG. 8 is uneven on the back surface (the surface facing the inner side of the reaction furnace 1) of the lid 2 of the microwave heating irradiation apparatus according to the first embodiment shown in FIG. The portion 22 is provided, and the uneven portion 11 is provided on the inner side wall of the reaction furnace 1. Other configurations are the same, and the same reference numerals are given and description thereof is omitted.

  The concavo-convex portion 22 is provided on the back surface of the lid 2 and diffuses the microwave reflected in the reaction furnace 1. Further, the concavo-convex portion 11 is provided on the inner side wall of the reaction furnace 1 to diffusely reflect the microwave reflected in the reaction furnace 1. You may select suitably the material, shape, and kind of these uneven | corrugated | grooved parts 11 and 22. FIG. By providing the uneven portions 11 and 22, the reflected wave 105 of the microwave from the sample 50 is more complicatedly reflected in the reaction furnace 1 than the configuration of the first embodiment shown in FIG. The effect of reducing the microwave leaking from the hole 21 is obtained.

  As described above, according to the sixth embodiment, the concave and convex portion 22 is provided on the back surface of the lid 2 and the concave and convex portion 11 is provided on the inner side wall of the reaction furnace 1. A more efficient heating effect on the sample 50 and an effect of further reducing leakage from the microwave hole 21 can be obtained.

  In addition, although the case where the uneven | corrugated | grooved parts 11 and 22 were applied with respect to the structure of Embodiment 1 shown in FIG. 1 was shown above, it is the same also about the structure of Embodiment 2 and 3 shown to FIGS. The same effect can be obtained.

  In the fourth to sixth embodiments, the concavo-convex portions 11 and 22 may have a surface shape in which triangular prisms are arranged, for example, or may have a surface shape in which triangular pyramids, quadrangular pyramids, and hemispheres are arranged (that is, Any shape that can achieve the effect of diffuse reflection is acceptable.

Embodiment 7 FIG.
FIG. 9 is a diagram showing the configuration of the microwave heating irradiation apparatus according to the seventh embodiment of the present invention, and FIG. 10 is a top view showing the configuration of the lid 10. The microwave heating irradiation apparatus according to Embodiment 7 shown in FIGS. 9 and 10 is provided with a cover 5 in the hole 21 of the lid 2 of the microwave heating irradiation apparatus according to Embodiment 1 shown in FIG. Other configurations are the same, and the same reference numerals are given and description thereof is omitted.

  The cover 5 is provided in the hole 21 of the lid 2 and allows microwaves to pass therethrough. As long as the cover 5 can pass microwaves, the type of the material may be appropriately selected. Thus, the sample 50 can be confined in the reaction furnace 1 by closing the hole 21 of the lid 2 with the cover 5.

  As described above, according to the seventh embodiment, by providing the cover 5 in the portion of the hole 21 of the lid 2, the effect of further reducing leakage from the hole 21 of the sample 50 in addition to the effect of the first embodiment. Is obtained.

  In addition, although the case where the cover 5 was applied with respect to the structure of Embodiment 1 shown in FIG. 1 was shown above, it is applicable similarly to the structure of Embodiments 2-6 shown in FIGS. Thus, the same effect can be obtained.

Embodiment 8 FIG.
FIG. 11 is a diagram showing the configuration of the microwave heating irradiation apparatus according to the eighth embodiment of the present invention.
The microwave heating irradiation apparatus according to the eighth embodiment shown in FIG. 11 is obtained by providing a heating unit 6 to the microwave heating irradiation apparatus according to the first embodiment shown in FIG. Other configurations are the same, and the same reference numerals are given and description thereof is omitted.

  The heating unit 6 is provided outside the reaction furnace 1 and heats the reaction furnace 1. You may select the method of this heating part 6, and the kind of apparatus suitably. Thus, in addition to heating the sample 50 with microwaves, heating the reaction furnace 1 itself with the heating unit 6 increases the temperature in the reaction furnace 1 and increases the reaction rate of the sample 50. it can.

  As described above, according to the eighth embodiment, by providing the heating unit 6 for applying heat to the reaction furnace 1, a more efficient heating effect on the sample 50 can be obtained compared to the effect of the first embodiment. It is done.

  In addition, although the case where the heating part 6 was applied with respect to the structure of Embodiment 1 shown in FIG. 1 was shown above, it is applied similarly to the structure of Embodiments 2-7 shown in FIGS. It is possible and the same effect can be obtained.

Embodiment 9 FIG.
FIG. 12 is a diagram showing a configuration of a microwave heating irradiation apparatus according to Embodiment 9 of the present invention.
The microwave heating irradiation apparatus according to Embodiment 9 shown in FIG. 12 is an active phased array antenna 7 as the microwave radiation source 3 of the microwave heating irradiation apparatus according to Embodiment 1 shown in FIG. Other configurations are the same, and the same reference numerals are given and description thereof is omitted.

  The active phased array antenna 7 is provided with an amplifier and a phase shifter for each antenna element or for each sub-array antenna composed of a plurality of antenna elements. Then, by optimizing each amplification amount and phase amount, it is possible to flexibly control the irradiation distribution of the microwave irradiated to the sample 50. In order to achieve the target irradiation distribution, the adjustment of the amplification amount and the phase amount may be appropriately selected.

  As described above, according to the ninth embodiment, since the active phased array antenna 7 capable of adjusting the amplitude and phase of the radiated microwave is used as the microwave radiation source 3, the effect of the first embodiment is achieved. On the other hand, the effect that the irradiation distribution to the sample 50 can be controlled flexibly is obtained.

  In addition, although the case where the active phased array antenna 7 was applied to the structure of Embodiment 1 shown in FIG. 1 was shown above, it is applied similarly to the structure of Embodiments 2-8 shown in FIGS. It is possible and the same effect can be obtained.

  In the first to ninth embodiments, the position of the second focal point 104 may not be strictly matched with the position of the hole 21 of the lid 2. That is, even if the position of the second focal point 104 is above or below the hole 21 of the lid 2, the heating effect does not change greatly. However, if the second focal point 104 is aligned with the position of the hole 21 in the lid 2, the diameter (size) of the hole 21 can be reduced (even if the beam waist is taken into consideration), and the leakage of the sample 50 can be effectively suppressed. (Although depending on the amount of the sample 50, a larger heating effect can be expected when the surface of the sample 50 is focused).

  Moreover, in Embodiment 1-9, although the lid | cover 2 was shown as a plane, it is not restricted to this, For example, a curved surface may be sufficient.

  In the present invention, within the scope of the invention, any combination of the embodiments, or any modification of any component in each embodiment, or omission of any component in each embodiment is possible. .

  A microwave heating irradiation apparatus according to the present invention includes a reaction furnace that heats a sample contained therein by being irradiated with microwaves, a lid that is provided in the reaction furnace, and that has one hole; One microwave irradiation source that is arranged outside and irradiates microwaves, and a rotation that is arranged above the reaction furnace and reflects the microwaves irradiated by the microwave irradiation source to the reaction furnace through the holes in the lid By providing the quadric curved mirror, the microwave and the sample can be confined in the reaction furnace, which is suitable for heating the sample.

  DESCRIPTION OF SYMBOLS 1 Reactor, 2 lid | cover, 3,3a-3d Microwave radiation source, 4,4a-4d Rotating quadratic curved mirror, 5 cover, 6 heating part, 7 Active phased array antenna, 11 Irregularity part, 21,21a-21d Hole, 22 Concavity and convexity, 50 Sample, 101, 101a, 101b First focus, 102, 102a, 102b Incident wave, 103, 103a, 103b Incident wave, 104, 104a, 104b Second focus, 105 Reflected wave.

Claims (15)

A reactor that heats a sample stored inside by being irradiated with microwaves,
A lid provided in the reactor and having one hole;
One microwave radiation source disposed outside the reactor and radiating microwaves;
A rotating quadric mirror that is disposed above the reactor and that reflects the microwave irradiated by the microwave radiation source to the reactor through the hole in the lid ;
The microwave heating irradiation apparatus provided with the uneven | corrugated | grooved part which is provided in locations other than the said hole of the surface facing the inside of the said reaction furnace of the said lid, and irregularly reflects the said microwave . A reactor that heats a sample stored inside by being irradiated with microwaves,
A lid provided in the reactor and having one hole;
A plurality of microwave radiation sources disposed outside the reactor and radiating microwaves;
A plurality of microwaves disposed above the reaction furnace corresponding to the plurality of microwave radiation sources, and rotating to reflect the microwaves irradiated by the corresponding microwave radiation sources to the reaction furnace through the holes of the lid A quadric curved mirror ,
The microwave heating irradiation apparatus provided with the uneven | corrugated | grooved part which is provided in locations other than the said hole of the surface facing the inside of the said reaction furnace of the said lid, and irregularly reflects the said microwave . A reactor that heats a sample stored inside by being irradiated with microwaves,
A lid provided in the reactor and having a plurality of holes;
A plurality of microwave radiation sources disposed outside the reactor and radiating microwaves;
A plurality of microwaves disposed above the reaction furnace corresponding to the plurality of microwave radiation sources, and the microwaves irradiated by the corresponding microwave radiation sources are reflected to the reaction furnace through different holes of the lid. A plurality of rotating quadric mirrors ,
The microwave heating irradiation apparatus provided with the uneven | corrugated | grooved part which is provided in locations other than the said several hole of the surface facing the inner side of the said reaction furnace of the said lid, and irregularly reflects the said microwave . The microwave heating irradiation apparatus according to claim 1, further comprising a concavo-convex portion that is provided on an inner side wall of the reaction furnace and diffuses and reflects microwaves. The microwave heating irradiation apparatus according to claim 2, further comprising a concavo-convex portion that is provided on an inner side wall of the reaction furnace and diffuses and reflects microwaves. The microwave heating irradiation apparatus according to claim 3, further comprising a concavo-convex portion that is provided on an inner side wall of the reactor and diffuses and reflects microwaves. The microwave heating irradiation apparatus according to claim 1, further comprising a cover that is provided in the hole of the lid and allows microwaves to pass therethrough. The microwave heating irradiation apparatus according to claim 2, further comprising a cover that is provided in the hole of the lid and allows microwaves to pass therethrough. The microwave heating irradiation apparatus according to claim 3, further comprising a cover that is provided in the hole of the lid and allows microwaves to pass therethrough. The microwave heating irradiation apparatus according to claim 1, further comprising a heating unit that is provided outside the reaction furnace and heats the reaction furnace. The microwave heating irradiation apparatus according to claim 2, further comprising a heating unit that is provided outside the reaction furnace and heats the reaction furnace. The microwave heating irradiation apparatus according to claim 3, further comprising a heating unit that is provided outside the reaction furnace and heats the reaction furnace. The microwave heating irradiation apparatus according to claim 1, wherein the microwave radiation source is an active phased array antenna capable of adjusting an amplitude and a phase of a microwave to be radiated. The microwave heating irradiation apparatus according to claim 2, wherein the microwave radiation source is an active phased array antenna capable of adjusting an amplitude and a phase of a microwave to be radiated. The microwave heating irradiation apparatus according to claim 3, wherein the microwave radiation source is an active phased array antenna capable of adjusting an amplitude and a phase of a microwave to be radiated.

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