JP6087097B2 - Distribution board for vacuum processing equipment - Google Patents
Distribution board for vacuum processing equipment Download PDFInfo
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- JP6087097B2 JP6087097B2 JP2012215452A JP2012215452A JP6087097B2 JP 6087097 B2 JP6087097 B2 JP 6087097B2 JP 2012215452 A JP2012215452 A JP 2012215452A JP 2012215452 A JP2012215452 A JP 2012215452A JP 6087097 B2 JP6087097 B2 JP 6087097B2
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Description
本発明は、真空処理装置用の分電盤に関するものである。
The present invention relates to a distribution board for a vacuum processing apparatus.
従来の真空処理装置用の分電盤は、例えば、特許文献１に記載のように、開口部を有する箱体と、操作部が開口部側になるように箱体に収納された配電用機器と、箱体に取付けられ箱体の開口部を開閉する第１の扉とを備えた分電盤において、第１の扉に窓を設けると共にこの窓を開閉する第２の扉を取付け、分電盤における扉の取付け部分の構造が複雑になることなく、組立作業性を良くしたものが知られている。
A conventional distribution board for a vacuum processing apparatus includes, for example, a box body having an opening and a distribution device housed in the box so that the operation section is on the opening side as described in Patent Document 1. And a first door that is attached to the box and opens and closes the opening of the box, the first door has a window and a second door that opens and closes the window. It is known that the assembly workability is improved without complicating the structure of the door mounting portion in the electrical panel.
上記従来技術では、半導体製造装置で用いられる規格に対応する充分な配慮がされていない。すなわち、従来技術の構成は表に操作電圧の記載がなく、５０ＶＡＣ若しくは、６０ＶＤＣ以上の操作電圧の場合、通電中は配電盤の扉が開けられないという規格に対応しておらず、従来技術の分電盤は扉の取付を容易にするために第２の扉を設けたものであって、第２の扉を開けても全てのブレーカが操作し得、実質的に扉を開けたのと同じであって、規格をクリアできない。
In the above prior art, sufficient consideration is not given to the standards used in semiconductor manufacturing equipment. That is, the configuration of the prior art has no description of the operating voltage in the table, and in the case of an operating voltage of 50 VAC or 60 VDC or higher, it does not correspond to the standard that the switchboard door cannot be opened during energization. The switchboard is provided with a second door to facilitate the installation of the door, and even if the second door is opened, all the breakers can be operated, which is substantially the same as opening the door. And the standard cannot be cleared.
真空処理装置においては、分電盤の主幹ブレーカから分岐ブレーカを介して種々の機器が接続されており、その中には、５０ＶＡＣ若しくは、６０ＶＤＣ未満の操作電圧のブレーカも接続されている。５０ＶＡＣ若しくは、６０ＶＤＣ未満の操作電圧機器のみを遮断したい場合でも、主幹ブレーカをＯＦＦしなければ、扉を開けることができず、真空排気装置のように電源を落とすことができない機器も遮断せざるを得ない。このため、５０ＶＡＣ若しくは、６０ＶＤＣ未満の操作電圧機器のブレーカは別の分電盤を設ける必要があった。
In the vacuum processing apparatus, various devices are connected from the main breaker of the distribution board via a branch breaker, and a breaker having an operation voltage of less than 50 VAC or 60 VDC is also connected. Even if you want to shut down only the operation voltage equipment of 50VAC or less than 60VDC, if you do not turn off the main breaker, you cannot open the door, and you must also shut down equipment that cannot be turned off, such as a vacuum exhaust device. I don't get it. For this reason, the breaker of the operating voltage apparatus of less than 50VAC or 60VDC needed to provide another distribution board.
本発明の目的は、余分な分電盤を設けることなく真空処理装置の機器点検を容易に行うことのできる真空処理装置用分電盤を提供することにある。
An object of the present invention is to provide a distribution board for a vacuum processing apparatus that can easily check the equipment of the vacuum processing apparatus without providing an extra distribution board.
上記本発明の目的は、分電盤の扉外部に当該扉内側に配置され真空処理装置に配線接続された主幹ブレーカを操作可能なハンドルを有し、前記分電盤の前記扉内側に配置され前記真空処理装置の通電条件が異なる機器に配線接続されて電力供給する分岐ブレーカが設けられ、前記分岐ブレーカに対応して前記扉に開閉可能な窓部材を設け、前記ハンドルが操作されて前記主幹ブレーカがオンのときに前記扉はロックされた状態で、オフにすることが必要とされる前記機器に接続された前記分岐ブレーカのオン・オフ操作を前記窓部材を介して可能としたことを特徴とする真空処理装置用分電盤により、達成される。
An object of the present invention is to have a handle for operating a main breaker arranged inside the door and connected to a vacuum processing apparatus outside the door of the distribution board, and arranged inside the door of the distribution board. A branch breaker that is connected to devices with different energization conditions of the vacuum processing device and supplies power is provided, and a window member that can be opened and closed is provided corresponding to the branch breaker, and the handle is operated to operate the main trunk. When the breaker is on, the door is locked, and the branch breaker connected to the device that needs to be turned off can be turned on / off via the window member. This is achieved by the vacuum distribution device distribution board .
本発明は、余分な分電盤を設けることなく、また主幹ブレーカをオフすることなく５０ＶＡＣ若しくは、６０ＶＤＣ未満の操作電圧機器に対応した分岐ブレーカをオフでき、機器の点検が容易に行える。
According to the present invention, it is possible to turn off the branch breaker corresponding to the operation voltage equipment of 50 VAC or less than 60 VDC without providing an extra distribution board and without turning off the main breaker, and the equipment can be easily inspected.
本実施の形態は、真空処理装置に用いる分電盤に主幹ブレーカと分電盤内に通電条件が種々異なる機器へ電力供給する５０ＶＡＣ若しくは、６０ＶＤＣ未満の操作電圧の分岐ブレーカとをまとめて配置し、扉の表側に設けた主幹ブレーカが通電中は分電盤の扉が開かないようにロックされ、一方、真空処理装置の、例えば、点検が必要とされる機器に対応する分岐ブレーカのみを電源オフさせることができるように、運転中でも電源オフが必要とされる分岐ブレーカに対応して扉に開閉窓を設けたものである。
In the present embodiment, a main breaker and a branch breaker having an operation voltage of less than 60 VDC for supplying power to devices having different energization conditions in the distribution board are arranged together on the distribution board used in the vacuum processing apparatus. When the main breaker provided on the front side of the door is energized, the door of the distribution board is locked so that it will not open. On the other hand, for example, only the branch breaker of the vacuum processing device corresponding to the equipment that requires inspection is powered In order to be able to turn off, the door is provided with an opening / closing window corresponding to the branch breaker that needs to be turned off even during operation.
以下、本発明の真空処理装置用分電盤の一実施例を図１乃至図５により説明する。
An embodiment of a distribution board for a vacuum processing apparatus according to the present invention will be described below with reference to FIGS.
図１は、本発明の実施例に係る真空処理装置用の分電盤の構成の概略を模式的に示す平面図である。本実施例の真空処理装置は、大気搬送ユニット２０とロック室２１と真空搬送室２２と真空処理室２４と中間室２５との組合せにより構成され、クリーンルーム内の２階部分に配置される。１階部分には、真空処理装置と連結されてこれに供給あるいはこれとの間で循環される流体の貯留部及びポンプ部や電源が配置されている。
FIG. 1 is a plan view schematically showing a schematic configuration of a distribution board for a vacuum processing apparatus according to an embodiment of the present invention. The vacuum processing apparatus of the present embodiment is configured by a combination of an atmospheric transfer unit 20, a lock chamber 21, a vacuum transfer chamber 22, a vacuum processing chamber 24, and an intermediate chamber 25, and is disposed on the second floor portion in the clean room. In the first floor portion, there are disposed a fluid storage section, a pump section, and a power source that are connected to the vacuum processing apparatus and supplied to or circulated between them.
大気搬送ユニット２０は内部の空間内に搬送ロボット（図示省略）が配置され、その内部を基板収納容器（図示省略）とロック室２１との間で半導体ウエハ等の試料である基板の搬送が行われる筐体である。大気搬送ユニット２０の背面側（図上右側）は、ロック室２１を挟んで所定の真空度の低圧に維持されている真空ブロックであり、当該ブロックはロック室２１、真空搬送室２２、真空処理室２４、中間室２５を備えている。
In the atmospheric transfer unit 20, a transfer robot (not shown) is arranged in an internal space, and a substrate, which is a sample such as a semiconductor wafer, is transferred between the substrate storage container (not shown) and the lock chamber 21. It is a case. The back side (the right side in the figure) of the atmospheric transfer unit 20 is a vacuum block maintained at a low pressure with a predetermined degree of vacuum across the lock chamber 21, and the block includes the lock chamber 21, the vacuum transfer chamber 22, and vacuum processing. A chamber 24 and an intermediate chamber 25 are provided.
複数の真空搬送室２２は各々が内部に基板の搬送用の空間を備えた平面形が略矩形状の真空容器であり、搬送用の空間に真空搬送ロボット２３を有している。真空搬送ロボット２３は、ロック室２１と複数の真空処理室２４と中間室２５との間、または中間室２５と真空処理室２４との間で、アーム先端部に基板を載置、保持して回転とアームの伸縮とを組み合わせて搬送を行う。
Each of the plurality of vacuum transfer chambers 22 is a vacuum container having a substantially rectangular shape with a substrate transfer space therein, and has a vacuum transfer robot 23 in the transfer space. The vacuum transfer robot 23 places and holds a substrate on the tip of the arm between the lock chamber 21 and the plurality of vacuum processing chambers 24 and the intermediate chamber 25 or between the intermediate chamber 25 and the vacuum processing chamber 24. Carries by combining rotation and expansion and contraction of the arm.
基板は搬送された真空処理室２４内部で試料台（図示せず）に保持されて処理される。この際、真空搬送室２２や真空処理室２４の内部は真空排気装置によって常に減圧排気される。また、真空処理室には図示を省略したチラーユニットによって温度制御された試料台が設けられており、該試料台に基板を配置して処理が行われる。基板の処理は、真空処理室内に、例えば、高周波電源からの電力を供給し真空処理室内に供給した処理ガスをプラズマ化して行われる。
The substrate is processed by being held on a sample table (not shown) inside the conveyed vacuum processing chamber 24. At this time, the insides of the vacuum transfer chamber 22 and the vacuum processing chamber 24 are always evacuated by a vacuum exhaust device. The vacuum processing chamber is provided with a sample stage whose temperature is controlled by a chiller unit (not shown), and a substrate is placed on the sample stage for processing. The processing of the substrate is performed, for example, by supplying power from a high-frequency power source into the vacuum processing chamber and converting the processing gas supplied into the vacuum processing chamber into plasma.
このような基板処理のために、各真空処理室２４の図示を省略した真空排気装置、搬送ロボット、高周波電源、チラーユニット等の運転に分電盤２から電力が供給される。このような真空処理装置では、真空の立上に時間を要するため真空排気装置は連続運転を必要とする。
For such substrate processing, power is supplied from the distribution board 2 to the operation of the vacuum exhaust chamber, the transfer robot, the high-frequency power source, the chiller unit, etc. (not shown) of each vacuum processing chamber 24. In such a vacuum processing apparatus, since it takes time to start up the vacuum, the vacuum exhaust apparatus requires continuous operation.
なお、通常は２階に配置する装置のフットプリントをできるだけ小さくするために、チラーユニットや配電盤はクリーンルームの１階に配置される。
Normally, the chiller unit and the switchboard are arranged on the first floor of the clean room in order to make the footprint of the apparatus arranged on the second floor as small as possible.
図２乃至４に分電盤の詳細を示す。分電盤２は、主幹ブレーカ５を操作する外部ハンドル１と、５０ＶＡＣ若しくは、６０ＶＤＣ未満の操作電圧の分岐ブレーカ３の操作面に開閉可能な窓６を有した扉４付の直方体またはこれと見倣せる程度に近似した直方体状の筐体を備えている。
The details of the distribution board are shown in FIGS. The distribution board 2 is a rectangular parallelepiped with a door 4 having an openable / closable window 6 on an operation surface of an external handle 1 for operating a main breaker 5 and a branch breaker 3 having an operation voltage of less than 50 VAC or 60 VDC. A rectangular parallelepiped housing approximate to the extent that can be copied is provided.
外部ハンドル１は、主幹ブレーカ５の操作部に接続された操作棒１ａを有し、外部から主幹ブレーカ５を操作できる。また、外部ハンドル１をＯＮ、すなわち主幹ブレーカ５をＯＮした場合は、扉４が開できないようインターロック機構を有している。
The external handle 1 has an operation rod 1a connected to the operation part of the main breaker 5, and can operate the main breaker 5 from the outside. In addition, an interlock mechanism is provided so that the door 4 cannot be opened when the external handle 1 is turned on, that is, when the main breaker 5 is turned on.
分岐ブレーカ３は、例えば開閉用スイッチなどの操作部３ａを有する配電用遮断器であり、この操作部３ａ であるスイッチが扉４の開閉可能な窓６側から操作できるように取付けられている。開閉可能な窓６を開いて、操作部３ａを操作する場合、他の充電部に手が入らないよう遮蔽板７を、扉４の内側に有している。
The branch breaker 3 is a power distribution breaker having an operation unit 3 a such as an open / close switch, for example, and is attached so that the switch as the operation unit 3 a can be operated from the side of the door 6 that can be opened and closed. When opening the openable / closable window 6 and operating the operation part 3a, the shielding board 7 is provided inside the door 4 so that a hand may not enter into another charging part.
遮蔽板７は、操作部３ａ に対応する位置に、操作部３ａ を貫通させるための開口部７ａが形成されており、開口部７ａを除く上下左右全てを遮蔽している。 このように構成された分電盤２には、図５に示す単線図のように各ユニット毎にまとめられているが、電源をオフすることのできない真空排気装置につながる分岐ブレーカ８もある。
The shielding plate 7 is formed with an opening 7a for penetrating the operation portion 3a at a position corresponding to the operation portion 3a, and shields all of the upper, lower, left and right except for the opening 7a. The distribution board 2 configured in this manner includes a branch breaker 8 that is grouped for each unit as shown in the single line diagram of FIG. 5 but that leads to a vacuum exhaust device that cannot be turned off.
次に、この実施の例の分電盤２の動作について説明する。本実施例の分電盤２では、図１に示すように、通電中は扉４、開閉可能な窓６は閉じられていて、外部ハンドル１をＯＮ、すなわち主幹ブレーカ５をＯＮしている。
Next, the operation of the distribution board 2 of this embodiment will be described. In the distribution board 2 of the present embodiment, as shown in FIG. 1, the door 4 and the openable / closable window 6 are closed during energization, and the external handle 1 is turned on, that is, the main breaker 5 is turned on.
この状態では、インターロックにより、扉４を開くことはできない。点検が必要とされる機器に対応する分岐ブレーカ３を操作する場合には、図２に示すように、扉４は閉じたまま開閉可能な窓６を開いて分岐ブレーカ３を操作することができる。
In this state, the door 4 cannot be opened due to the interlock. When operating the branch breaker 3 corresponding to a device that requires inspection, the branch breaker 3 can be operated by opening a window 6 that can be opened and closed with the door 4 closed as shown in FIG. .
これにより、真空排気装置のように電源を落とすことができない機器も遮断せずに、点検が必要な機器の操作ができる。また、分岐ブレーカ３操作時に、誤って他の充電部に触れることがないよう、分岐ブレーカ３の操作部３ａを遮蔽板７の開口部７ａを通して操作することができるため、安全に操作を行うことができる。
Thereby, it is possible to operate a device that needs to be inspected without shutting down a device that cannot be turned off, such as a vacuum exhaust device. Moreover, since the operation part 3a of the branch breaker 3 can be operated through the opening part 7a of the shielding board 7 so that it may not touch another charge part accidentally at the time of branch breaker 3 operation, it is operated safely. Can do.
以上の通り、本実施例によれば、外部ハンドル１をＯＮ、すなわち主幹ブレーカ５をＯＮしている時に扉を開くことなく任意の分岐ブレーカを操作することができる。
As described above, according to the present embodiment, any branch breaker can be operated without opening the door when the external handle 1 is turned on, that is, when the main breaker 5 is turned on.
１…外部ハンドル
１ａ…操作棒
２…分電盤
３…分岐ブレーカ
３ａ…操作部
４…扉
５…主幹ブレーカ
６…開閉可能な窓
７…遮蔽板
７ａ…開口部
８…分岐ブレーカ
２０…大気搬送ユニット
２１…ロック室
２２…真空搬送室
２３…真空搬送ロボット
２４…真空処理室
２５…中間室。
DESCRIPTION OF SYMBOLS 1 ... External handle 1a ... Operation rod 2 ... Distribution board 3 ... Branch breaker 3a ... Operation part 4 ... Door 5 ... Master breaker 6 ... Openable / closable window 7 ... Shielding plate 7a ... Opening part 8 ... Branch breaker 20 ... Atmospheric conveyance Unit 21 ... Lock chamber 22 ... Vacuum transfer chamber 23 ... Vacuum transfer robot 24 ... Vacuum processing chamber 25 ... Intermediate chamber.
Claims (2)
Panelboard door outside has an operable handle hardwired master breaker to be arranged on the door inside a vacuum processing apparatus, it is disposed on the door inside the distribution board energization conditions of the vacuum processing apparatus Is provided with a branch breaker that is wired to different devices and supplies power , and a window member that can be opened and closed is provided to the door corresponding to the branch breaker, and the handlebar is operated and the main breaker is turned on. For a vacuum processing apparatus characterized in that the door breaker enables the on / off operation of the branch breaker connected to the device that needs to be turned off through the window member . Distribution board.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2012215452A JP6087097B2 (en) | 2012-09-28 | 2012-09-28 | Distribution board for vacuum processing equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2012215452A JP6087097B2 (en) | 2012-09-28 | 2012-09-28 | Distribution board for vacuum processing equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2014072937A JP2014072937A (en) | 2014-04-21 |
| JP6087097B2 true JP6087097B2 (en) | 2017-03-01 |
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| JP2012215452A Active JP6087097B2 (en) | 2012-09-28 | 2012-09-28 | Distribution board for vacuum processing equipment |
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Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56102907U (en) * | 1979-12-31 | 1981-08-12 | ||
| JPH079522Y2 (en) * | 1987-07-09 | 1995-03-06 | 日新電機株式会社 | Low voltage switchboard |
| US5855681A (en) * | 1996-11-18 | 1999-01-05 | Applied Materials, Inc. | Ultra high throughput wafer vacuum processing system |
| DE19747987A1 (en) * | 1997-10-30 | 1999-05-06 | Asea Brown Boveri | Security door locking system for control cabinets |
| JP2000032619A (en) * | 1998-07-10 | 2000-01-28 | Yaskawa Electric Corp | Interlock apparatus of switchboard |
| JP2002199515A (en) * | 2000-12-25 | 2002-07-12 | Nec Kagoshima Ltd | Distribution board unit and distribution board constructed by same |
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