JP2002199515A - Distribution board unit and distribution board constructed by same - Google Patents

Abstract

PROBLEM TO BE SOLVED: To allow easily carrying-in as well as setting in a tight clean room and easily applying to expansion of a manufacturing facility, in a distribution board unit supplying an electric power to a manufacturing facility and a distribution board comprised by the same. SOLUTION: A primary wiring cable 12 introduced into a cable box 10 is connected to a relay terminal 11. A power supply cable 14 derived from the relay terminal 11 is connected to circuit breakers 3 and 4, and the power supply cable 14 from the circuit breakers 3 and 4 is sent to a manufacturing facility through a cable box 9.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a distribution board unit for supplying power to a predetermined number of production facilities and a distribution board composed of a plurality of distribution board units.

[0002]

2. Description of the Related Art FIG. 7 is a perspective view showing an example of a conventional distribution board. Normally, semiconductor production facilities include various production facilities apart from the power supply capacity. To supply power to these production facilities, low-voltage power lines from substations were introduced into distribution boards,
This low-voltage wire was branched into a plurality of low-voltage wires, and low-voltage power was supplied to each production facility.

As a typical example, as shown in FIG. 7, a primary wiring cable which is a low-voltage electric wire is introduced, and an overcurrent interruption in which the primary wiring cable is connected via a primary terminal block 31 is provided. A plurality of small-capacity overcurrent circuit breakers for supplying power to each production facility by introducing a board body attached to the board surface to a main breaker 32 as a container and each wiring cable from the main breaker 32. And a board to which a wiring cable from each branch breaker 33 is connected and a secondary terminal block 34 for distribution to each production facility is mounted.

[0004]

However, in production equipment for semiconductor manufacturing, new production equipment is often added after the equipment is installed.
In many cases, a car is added in advance or a main breaker having a larger capacity than necessary is attached. As a result, the board itself becomes large, and there is a problem that the board cannot be installed with a limited clean room floor space. Also, usually
There is also a problem that the entrance to the clean room is narrow and the distribution board itself cannot be carried in.

[0005] On the other hand, when adding production equipment, the extension work must be performed while operating other production equipment based on the production plan. However, there is a problem in that there is a danger because there is an exposed charged portion in the operating distribution board. In addition, when a production facility with a large power supply capacity is added, the power supply wiring cable becomes thicker, and the wiring cable cannot be bent because the wiring cable is pulled out from the narrow duct on the back to the front panel. There is a problem that a mechanical stress is applied to the cable itself and the wiring cable is overheated.

[0006] Even a clean room may be flooded from above the floor. In this case, there is a problem that water enters the panel and rusts the electric parts.

SUMMARY OF THE INVENTION Accordingly, an object of the present invention is to provide a distribution board unit which can be installed even in a narrow clean room and can be easily carried in, and which can easily cope with an increase in production facilities, and a distribution board comprising the same. Is to provide.

[0008]

SUMMARY OF THE INVENTION The present invention is characterized in that an input side cable box for accommodating a power cable and an output side for accommodating a plurality of power supply cables for supplying power to each production facility. A cable box is arranged on both sides, a relay terminal for introducing the power cable into the panel and branching into a plurality of power supply cables, and each of the branched power supply cables serving as an input terminal. Multiple circuit breakers to be connected
And a means for connecting the power supply cable to an output terminal of the circuit breaker and leading the power supply cable to the output side cable box.

It is desirable that the input side cable duct and the output side duct have a structure that can be attached to and detached from the panel body. Further, it is preferable that the relay terminal is attached to a side surface of the board on the output side cable box side, and the power cable is bent downward and its end is connected to the relay terminal. And
If necessary, the plurality of circuit breakers may be arranged horizontally. More preferably, the plurality of circuit breakers are arranged on the board surface in two vertical rows and any one of the circuit breakers.
A wiring cable having a car row higher than the other circuit breaker rows and a lower output circuit terminal of the circuit breaker row derived from the output terminals of the circuit breaker row so as to crawl down the board surface; and the power supply. It is desirable to have a connection terminal block for connecting to a cable.

On the other hand, it is desirable to provide a transparent resin plate for covering the charged portion exposed by the circuit breaker.
Preferably, an eave is provided to cover a gap between the board and a door that closes an opening of the board.

Another feature of the present invention is a distribution board configured by arranging a plurality of distribution board units, which are the above-described features, in one direction in accordance with a production facility for supplying electric power.

[0012]

Next, the present invention will be described with reference to the drawings.

FIG. 1 is a front view of a distribution board unit without a door according to an embodiment of the present invention. As shown in FIG. 1, the distribution board unit includes an input-side cable box 10 for accommodating a primary-side wiring cable 12, which is a power supply cable, and a plurality of power supply cables for supplying power to each production facility. An output side cable box 9 for accommodating a secondary side wiring cable 13 which is a power supply cable is arranged on both sides, and the primary side wiring cable 12 is introduced into the panel to supply a plurality of power supplies. A plurality of circuit breakers -3, 4 connected to the input terminal of the relay terminal 11 for branching to the cable 14, each of the branched power supply cables 14 connected to the input terminal, and a circuit breaker. The power supply cable 14 is connected to the output terminals of the cables 3 and 4, and the board body 1 having an opening for leading out to the cable box 9 on the output side is provided.

FIGS. 2 (a) and 2 (b) are diagrams showing extracted portions A and B of FIG. A, B, C of the power supply cable 14 drawn from the lower terminal block 8 and the power supply cable 14 drawn from the upper terminal block 7 in FIG.
As shown in FIG. 2 (a), the cable hangs downward and is led out of the cable box 9 through the opening 15 of the cable box 9 and sent to each production facility.

On the other hand, the primary wiring cable from the substation passes through the opening 16 of the cable box as shown in FIG. 2 (b) and curves greatly downward as shown in FIG. The end is connected to the relay terminal 11. In this manner, if the cable is routed with a large R, no mechanical stress is applied to the primary wiring cable 12. Also,
Since the distance between the relay terminal 11 and the opening 16 of the cable box 10 can be increased, a large-capacity and thick wiring cable can be used.

Further, since the distribution board unit can be separated from the board body 1 and the cable boxes 9 and 10 on both sides, the distribution board unit can be easily carried in even at a narrow entrance. Furthermore, there is no cable box on the back side as in the conventional case, and the cable boxes are arranged on both sides, so that there is an advantage that the depth dimension can be reduced.

FIG. 3 is a view taken in the direction of the arrow CC in FIG. Primary wiring cable 12 introduced from cable box 10
As shown in FIG. 3, one end of the power supply cable 14 connected to the primary side of the relay terminal 11 is connected to the primary side of the relay terminal 11 as shown in FIG. And a bus bar 18 which is an input terminal connected to the circuit breaker 3.
And the other busbar connected to the circuit breaker-4.
7 is connected.

FIG. 4 is a view taken in the direction of the arrow DD in FIG. In this switchboard unit, as shown in FIG. 1, circuit breakers 3 and 4 are arranged in two rows. The circuit breakers -3 and 4 are mounted in these two rows as shown in FIG.
The circuit breakers 4 in the lower row from the board 2 are mounted on the upper side, and the circuit breakers 3 on the mounting table 5 from the board 2 are mounted on the circuit breaker 4 and the lower terminal block 8. It is high enough to allow the connecting relay cable to pass. As a result, the relay cable 19 can be connected without bending and can be easily wired.

The bus bar 17 connected to the power supply cable 14 described with reference to FIG. 3 is extended along the circuit breaker-4. Each input terminal of the circuit breakers 4 arranged in a line is connected to the bus bar 17. On the other hand, the circuit breakers 3 arranged in a line are similarly connected to the bus bar 18. The power supply cable 14 is connected to the output terminal of the circuit breaker 4 and the secondary terminal of the lower terminal block 8 connected via the relay cable 19.

Also, as shown in FIG.
A transparent resin plate, for example,
It is desirable to cover with a protection plate 6 which is a polycarbonate resin plate. This is to prevent an electric shock accident when performing maintenance work or the like.

FIG. 5 is an external view of the distribution board unit of FIG. As described above, by eliminating the board of the main circuit breaker which has been conventionally arranged, the distribution board unit becomes a narrow board as shown in FIG. In addition,
Since there is a gap between the door 21 and the board 1, it is desirable to provide the eaves 20. Even for clean rooms, it is necessary to prevent water leakage from the floor.

FIG. 6 is a front view illustrating a distribution board according to an embodiment of the present invention. This distribution board is shown in FIG.
As shown in FIG. 1, the distribution board units 22a, 22b,
22c and 22d are arranged in one direction. In this case, one distribution board unit can supply electric power to 10 production facilities, and thus can supply electric power to 40 production facilities.

Further, when there are 30 existing production facilities and the power is supplied by operating the distribution board units 22a, 22b and 22c, the production facilities are increased by 8 to increase production.
When it is desired to increase the number of units, the distribution board unit 22d can be added to cope with the added production equipment. In addition, wiring work is performed by shutting off the outdoor main circuit breaker only in the additional distribution board unit, and the existing production equipment is divided into the distribution board unit 2
2a, 22b and 22c are operated to secure the production amount.

[0024]

As described above, according to the present invention, the distribution board is divided into distribution board units for supplying power only to a predetermined number of production facilities, and the number of distribution board units is divided according to the required number of production facilities. With such a configuration, there is an effect that the floor surface can be used efficiently because the device can be arranged in a narrow clean room.

Further, since the cable box can be detached from the distribution board unit main body, there is also an effect that it is possible to carry the cable box even at a narrow entrance and exit and the installation work can be performed at low cost.

Further, even when the production equipment is added, it is only necessary to add a new distribution board unit to the existing distribution board unit, and the production equipment can be installed while the existing production equipment is operating. There is an effect that the operation rate of the production equipment is improved.

On the other hand, the power cable is subjected to mechanical stress by connecting the end of the power cable on the primary side having a large current capacity introduced from the cable box to a relay terminal which is far away. It is possible to maintain a natural bending state without any risk of heat generation or fire accident due to heat generation.

[Brief description of the drawings]

FIG. 1 is a front view of a distribution board unit according to an embodiment of the present invention, excluding a door.

FIG. 2 is a diagram extracting and showing a part A and a part B of FIG. 1;

FIG. 3 is a view taken in the direction of the arrow CC in FIG. 1;

FIG. 4 is a view taken in the direction of the arrow DD in FIG. 1;

FIG. 5 is an external view of the distribution board unit of FIG. 1;

FIG. 6 is a front view illustrating a distribution board according to an embodiment of the present invention.

FIG. 7 is a perspective view showing an example of a conventional distribution board.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Board body 2 Board surface 3, 4 Circuit breaker 5 Mounting stand 6 Protective plate 7 Upper terminal block 8 Lower terminal block 9, 10 Cable box 11 Relay terminal 12 Primary wiring cable 14 Power supply cable -Cable 15, 16 Opening 17, 18 Bus bar 19 Relay cable 20 Eave 21 Door 22a, 22b, 22c, 22d Distribution board unit

Claims (9)

[Claims] An input-side cable box for storing a power cable and an output-side cable box for storing a plurality of power supply cables for supplying power to each production facility are arranged on both sides. A relay terminal for introducing the power cable into the panel and branching into a plurality of power supply cables; and a plurality of circuit breakers for connecting each of the branched power supply cables to an input terminal. And a means for connecting the power supply cable to the output terminal of the circuit breaker and leading the power supply cable to the output side cable box. . 2. The distribution board unit according to claim 1, wherein the input side cable duct and the output side duct have a structure that can be attached to and detached from the panel body. 3. The power supply cable, wherein the relay terminal is attached to a side surface of the panel body on the output side cable box side.
The distribution board unit according to claim 1 or 2, wherein the cable is bent downward and an end thereof is connected to the relay terminal. 4. The circuit breaker according to claim 1, wherein the plurality of circuit breakers are arranged in a horizontal direction.
The distribution board unit according to claim 2 or 3. 5. A plurality of said circuit breakers are arranged in two rows on the board surface, and one of the circuit breaker rows is higher than the other circuit breaker rows. The distribution board unit according to claim 4, characterized in that: 6. A wiring cable derived from a low output terminal of the circuit breaker row so as to crawl downward on the board surface.
The distribution board unit according to claim 5, further comprising a connection terminal block for connecting the power supply cable to the power supply cable. 7. The distribution board unit according to claim 1, further comprising a transparent resin plate that covers a charged portion exposed by the circuit breaker. 8. An eaves cover for covering a gap between the board and a door closing an opening of the board.
The distribution board unit according to claim 3, 4, 5, 6, or 7. 9. A distribution board comprising a plurality of distribution board units according to claim 1 arranged in one direction in accordance with a production facility for supplying electric power.