JP6084402B2 - 流量制御弁 - Google Patents
流量制御弁 Download PDFInfo
- Publication number
- JP6084402B2 JP6084402B2 JP2012189980A JP2012189980A JP6084402B2 JP 6084402 B2 JP6084402 B2 JP 6084402B2 JP 2012189980 A JP2012189980 A JP 2012189980A JP 2012189980 A JP2012189980 A JP 2012189980A JP 6084402 B2 JP6084402 B2 JP 6084402B2
- Authority
- JP
- Japan
- Prior art keywords
- diaphragm
- piezoelectric element
- pressurizing
- control valve
- fixed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
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- 239000002184 metal Substances 0.000 description 54
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 12
- 230000002093 peripheral effect Effects 0.000 description 5
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 3
- 239000012530 fluid Substances 0.000 description 2
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 2
- 238000012423 maintenance Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000003566 sealing material Substances 0.000 description 2
- 229910001220 stainless steel Inorganic materials 0.000 description 2
- 239000010935 stainless steel Substances 0.000 description 2
- 238000010276 construction Methods 0.000 description 1
- 230000001276 controlling effect Effects 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 230000002040 relaxant effect Effects 0.000 description 1
Images
Landscapes
- Electrically Driven Valve-Operating Means (AREA)
Description
圧電素子を封入する金属ケースについて部品を共通化しコストダウンが図られ、金属ケースの外径寸法が小さくなるので小型軽量化を図ることができる。
2 金属パイプ
3 ダイヤフラム
4 連結球
5 台座
7 金属ケース封入型圧電アクチュエータ
8 筒状金属ケース
11 金属板
12 金属蓋部材
13 22 第1のダイヤフラム
15 流路
21 端子
23 32 第2のダイヤフラム
25 流路開口部
31 リード線
41 封止材
42 バネ材
52 バネ止め
3a、13a、23a 32a 加圧部
3b、13b、23b 可動部
3c、13c、23c 固定部
13d 嵌着部
Claims (1)
- 加圧部および可動部を各々有する第1及び第2のダイヤフラム構造体と圧電素子を備え、前記第1のダイヤフラム構造体に前記第2のダイヤフラム構造体を重着し、一端が固定された前記圧電素子を、連結球を介して前記第1のダイヤフラム構造体の加圧部に接続し、前記第1及び第2のダイヤフラム構造体の加圧部を前記圧電素子の駆動力によって駆動させて流量を制御し、前記第1及び第2のダイヤフラム構造体の各々における前記可動部が固定される固定部と前記加圧部との間に前記可動部と平行に設けた架設部によって前記加圧部の駆動方向に対する垂直方向への傾きを規制することを特徴とする流量制御弁。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2012189980A JP6084402B2 (ja) | 2012-08-30 | 2012-08-30 | 流量制御弁 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2012189980A JP6084402B2 (ja) | 2012-08-30 | 2012-08-30 | 流量制御弁 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2014047821A JP2014047821A (ja) | 2014-03-17 |
JP6084402B2 true JP6084402B2 (ja) | 2017-02-22 |
Family
ID=50607722
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2012189980A Active JP6084402B2 (ja) | 2012-08-30 | 2012-08-30 | 流量制御弁 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP6084402B2 (ja) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2018074208A1 (ja) * | 2016-10-21 | 2018-04-26 | 株式会社堀場エステック | 流体制御弁、流体制御装置、及び駆動機構 |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2561050Y2 (ja) * | 1991-10-11 | 1998-01-28 | 大倉電気株式会社 | 流量拡大制御弁 |
JP2000197374A (ja) * | 1998-12-25 | 2000-07-14 | Stec Inc | ピエゾアクチュエ―タ並びにこれを用いた制御弁 |
-
2012
- 2012-08-30 JP JP2012189980A patent/JP6084402B2/ja active Active
Also Published As
Publication number | Publication date |
---|---|
JP2014047821A (ja) | 2014-03-17 |
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