JP6045043B2 - 焼入れ可能及び焼入れ不可能な透明ナノコンポジット層 - Google Patents
焼入れ可能及び焼入れ不可能な透明ナノコンポジット層 Download PDFInfo
- Publication number
- JP6045043B2 JP6045043B2 JP2014517710A JP2014517710A JP6045043B2 JP 6045043 B2 JP6045043 B2 JP 6045043B2 JP 2014517710 A JP2014517710 A JP 2014517710A JP 2014517710 A JP2014517710 A JP 2014517710A JP 6045043 B2 JP6045043 B2 JP 6045043B2
- Authority
- JP
- Japan
- Prior art keywords
- layer
- gas
- vacuum chamber
- coating
- magnetron sputtering
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/0021—Reactive sputtering or evaporation
- C23C14/0036—Reactive sputtering
- C23C14/0057—Reactive sputtering using reactive gases other than O2, H2O, N2, NH3 or CH4
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/006—Surface treatment of glass, not in the form of fibres or filaments, by coating with materials of composite character
- C03C17/007—Surface treatment of glass, not in the form of fibres or filaments, by coating with materials of composite character containing a dispersed phase, e.g. particles, fibres or flakes, in a continuous phase
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
- C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
- C03C17/3657—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer the multilayer coating having optical properties
- C03C17/366—Low-emissivity or solar control coatings
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/0021—Reactive sputtering or evaporation
- C23C14/0036—Reactive sputtering
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2217/00—Coatings on glass
- C03C2217/40—Coatings comprising at least one inhomogeneous layer
- C03C2217/43—Coatings comprising at least one inhomogeneous layer consisting of a dispersed phase in a continuous phase
- C03C2217/44—Coatings comprising at least one inhomogeneous layer consisting of a dispersed phase in a continuous phase characterized by the composition of the continuous phase
- C03C2217/45—Inorganic continuous phases
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2217/00—Coatings on glass
- C03C2217/40—Coatings comprising at least one inhomogeneous layer
- C03C2217/43—Coatings comprising at least one inhomogeneous layer consisting of a dispersed phase in a continuous phase
- C03C2217/46—Coatings comprising at least one inhomogeneous layer consisting of a dispersed phase in a continuous phase characterized by the dispersed phase
- C03C2217/47—Coatings comprising at least one inhomogeneous layer consisting of a dispersed phase in a continuous phase characterized by the dispersed phase consisting of a specific material
- C03C2217/475—Inorganic materials
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2218/00—Methods for coating glass
- C03C2218/10—Deposition methods
- C03C2218/15—Deposition methods from the vapour phase
- C03C2218/154—Deposition methods from the vapour phase by sputtering
- C03C2218/156—Deposition methods from the vapour phase by sputtering by magnetron sputtering
Description
として規定され、Δは焼入れ前後の測定の差を意味する。層はまた、その下にある被覆の熱抵抗に負の影響を持たないことが好ましい。かかる負の影響は、望ましくない曇りまたは欠陥の増加をもたらすことがある。
− マグネトロン手段を持ちかつ第一材料を含むマグネトロンスパッタリングターゲットを持つ真空室を準備すること、
− 前記源から離れた前記真空室内に基板を配置するための手段を準備すること、
− 酸素、窒素、及び炭素の少なくとも一つを含む第一反応性スパッタリングガスを真空室中に向けること、
− 金属及びメタロイドからなる群から選ばれる第二材料を含む第二ガスを真空室中に向けること、及び
− 第一材料、第二材料、並びに酸素、窒素、及び炭素の少なくとも一つを含む被覆を形成すること
を含む。
Claims (6)
- マグネトロンスパッタリング装置を使用して基板上に薄膜被覆を蒸着する方法であって、
− マグネトロン手段を持ちかつAl,Sn,Ta,Ti,Zn,Zr及びそれらの混合物からなる群から選択される第一材料を含むマグネトロンスパッタリングターゲットを持つ真空室を準備すること、
− 前記源から離れた前記真空室内に基板を配置するための手段を準備すること、
− 酸素、窒素、及び炭素の少なくとも一つを含む第一反応性スパッタリングガスを真空室中に向けること、
− 第二材料としての珪素を含む第二ガスを真空室中に向けること、及び
− 第二材料としての珪素、並びに酸素、窒素、及び炭素の少なくとも一つを含むマトリックス中に第一材料を含むナノ粒子を含むナノコンポジット被覆を形成すること
を含むことを特徴とする方法。 - 真空室内にアルゴンを与えることをさらに含むことを特徴とする請求項1に記載の方法。
- 第二ガスがシランであることを特徴とする請求項1または2に記載の方法。
- マグネトロンスパッタリングターゲットがZrまたはAl金属ターゲットであることを特徴とする請求項1〜3のいずれかに記載の方法。
- 第一反応性スパッタリングガスが、30〜70sccmの範囲の流速で真空室内に向けられることを特徴とする請求項1〜4のいずれかに記載の方法。
- 第二ガスが、2〜10sccmの範囲の流速で真空室内に向けられることを特徴とする請求項1〜5のいずれかに記載の方法。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP11172135 | 2011-06-30 | ||
EP11172135.3 | 2011-06-30 | ||
PCT/EP2012/062606 WO2013001023A1 (en) | 2011-06-30 | 2012-06-28 | Temperable and non-temperable transparent nanocomposite layers |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2014523390A JP2014523390A (ja) | 2014-09-11 |
JP6045043B2 true JP6045043B2 (ja) | 2016-12-14 |
Family
ID=44971137
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2014517710A Expired - Fee Related JP6045043B2 (ja) | 2011-06-30 | 2012-06-28 | 焼入れ可能及び焼入れ不可能な透明ナノコンポジット層 |
Country Status (7)
Country | Link |
---|---|
US (1) | US20140090974A1 (ja) |
EP (1) | EP2726427A1 (ja) |
JP (1) | JP6045043B2 (ja) |
CN (1) | CN103619771A (ja) |
BR (1) | BR112013033726A2 (ja) |
EA (1) | EA201490183A1 (ja) |
WO (1) | WO2013001023A1 (ja) |
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US9110230B2 (en) | 2013-05-07 | 2015-08-18 | Corning Incorporated | Scratch-resistant articles with retained optical properties |
US9366784B2 (en) | 2013-05-07 | 2016-06-14 | Corning Incorporated | Low-color scratch-resistant articles with a multilayer optical film |
US9359261B2 (en) | 2013-05-07 | 2016-06-07 | Corning Incorporated | Low-color scratch-resistant articles with a multilayer optical film |
US9703011B2 (en) | 2013-05-07 | 2017-07-11 | Corning Incorporated | Scratch-resistant articles with a gradient layer |
US9684097B2 (en) | 2013-05-07 | 2017-06-20 | Corning Incorporated | Scratch-resistant articles with retained optical properties |
DE102014104799B4 (de) * | 2014-04-03 | 2021-03-18 | Schott Ag | Substrat mit einer Beschichtung zur Erhöhung der Kratzfestigkeit, Verfahren zu dessen Herstellung und dessen Verwendung |
US9335444B2 (en) | 2014-05-12 | 2016-05-10 | Corning Incorporated | Durable and scratch-resistant anti-reflective articles |
US11267973B2 (en) | 2014-05-12 | 2022-03-08 | Corning Incorporated | Durable anti-reflective articles |
US9790593B2 (en) * | 2014-08-01 | 2017-10-17 | Corning Incorporated | Scratch-resistant materials and articles including the same |
WO2017048700A1 (en) | 2015-09-14 | 2017-03-23 | Corning Incorporated | High light transmission and scratch-resistant anti-reflective articles |
US20210087404A1 (en) * | 2017-12-19 | 2021-03-25 | Nisshin Engineering Inc. | Composite particles and method for producing composite particles |
WO2019147495A1 (en) * | 2018-01-29 | 2019-08-01 | Applied Materials, Inc. | Wetting layers for optical device enhancement |
JP7228028B2 (ja) | 2018-08-17 | 2023-02-22 | コーニング インコーポレイテッド | 薄い耐久性の反射防止構造を有する無機酸化物物品 |
CN110129745A (zh) * | 2019-05-20 | 2019-08-16 | 信利光电股份有限公司 | 折射率可变的介质膜的镀膜方法及含有该介质膜的颜色膜 |
CN116685707A (zh) * | 2021-01-13 | 2023-09-01 | 公益财团法人电磁材料研究所 | 磁光材料及其制造方法 |
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-
2012
- 2012-06-28 US US14/123,661 patent/US20140090974A1/en not_active Abandoned
- 2012-06-28 JP JP2014517710A patent/JP6045043B2/ja not_active Expired - Fee Related
- 2012-06-28 BR BR112013033726A patent/BR112013033726A2/pt not_active IP Right Cessation
- 2012-06-28 EA EA201490183A patent/EA201490183A1/ru unknown
- 2012-06-28 EP EP12730546.4A patent/EP2726427A1/en not_active Withdrawn
- 2012-06-28 CN CN201280031785.8A patent/CN103619771A/zh active Pending
- 2012-06-28 WO PCT/EP2012/062606 patent/WO2013001023A1/en active Application Filing
Also Published As
Publication number | Publication date |
---|---|
CN103619771A (zh) | 2014-03-05 |
EA201490183A1 (ru) | 2014-06-30 |
US20140090974A1 (en) | 2014-04-03 |
WO2013001023A1 (en) | 2013-01-03 |
EP2726427A1 (en) | 2014-05-07 |
JP2014523390A (ja) | 2014-09-11 |
BR112013033726A2 (pt) | 2017-01-31 |
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