JP6042748B2 - Substrate recovery device - Google Patents

Description

  The present invention relates to a substrate recovery apparatus.

  Conventionally, a substrate to which a section of biological tissue is attached is bonded to an extensible sheet, the sheet and the section are divided by extending the sheet in the surface direction, and the divided substrate is stretched by a grip ring. An apparatus for punching and collecting with a needle in a fixed state is known (for example, see Patent Document 1). According to Patent Document 1, the substrate can be collected without contact with the section on the substrate.

International Publication No. 2011/149909

  However, in Patent Document 1, the tension of the sheet fixed in the extended state by the grip ring is relatively small at a position away from the grip ring and relatively large at a position close to the grip ring. In addition, the tension of the sheet varies depending on the passage of time after being fixed in the extended state by the grip ring and other conditions. Therefore, the optimum lowering amount of the needle when punching the substrate is different each time. As a result, the substrate does not fall from the sheet because the needle does not penetrate the sheet sufficiently, or the surrounding substrate is unintentionally dropped due to a large impact applied to the sheet because the needle penetration is too large. There is a disadvantage that a large through hole is formed in the sheet and the sheet becomes brittle.

  The present invention has been made in view of the above-described circumstances, and an object of the present invention is to provide a substrate recovery apparatus capable of punching and recovering a substrate with a needle under optimal conditions regardless of the state of the sheet. To do.

In order to achieve the above object, the present invention provides the following means.
The present invention provides a plurality of conductive substrates, an insulating sheet member to which the plurality of substrates are bonded to one surface, and the sheet members in a substantially horizontal direction with the plurality of substrates facing downward. Holding a stage, a plurality of needle members having conductivity and a needle point that can penetrate the sheet member, and holding the plurality of needle members with the needle point facing downward above the stage; A needle moving mechanism for moving the plurality of needle members in the longitudinal direction; and a conduction detecting unit for detecting conduction between the plurality of needle members , wherein the needle tips of the plurality of needle members intersect the longitudinal direction. The substrate recovery is arranged within a range narrower than the surface of one of the substrates bonded to the sheet member on a substantially same plane, and the needle moving mechanism holds the plurality of needle members in an insulated state. Providing equipment

  According to the present invention, the sheet member is held by the stage, and the needle member disposed with the sheet member sandwiched between the substrate and the needle member is lowered by the moving mechanism so that the needle point penetrates the sheet member. The pressed substrate is separated from the sheet member and falls. As a result, the plurality of substrates bonded to the sheet member can be collected from the sheet member one by one.

In this case, when a plurality of needle tips penetrating the sheet member come into contact with the substrate, the conduction between the plurality of needle members is detected by the conduction detecting unit. Therefore, by controlling the lowering amount of the needle member based on the position of the needle member at this time, the penetrating amount of the needle member penetrating the sheet can be appropriately adjusted regardless of the state of the sheet. The substrate can be punched and collected by the needle member under optimum conditions.

Further, the present invention is provided between the plurality of substrates and the sheet member, a plurality of substrates having insulation properties, a sheet member having insulation properties to which the plurality of substrates are bonded to one surface, and the plurality of substrates. A conductive layer; a stage that holds the sheet member in a substantially horizontal direction with the plurality of substrates facing downward; a plurality of needle members that have conductivity and a needle tip that can penetrate the sheet member; and the stage A needle moving mechanism that holds the plurality of needle members with the needle tips facing downward and moves the plurality of needle members in the longitudinal direction; and a conduction detection that detects conduction between the plurality of needle members. The needle tips of the plurality of needle members are arranged in a range narrower than the surface of one of the substrates that is bonded to the sheet member on substantially the same plane that intersects the longitudinal direction. The needle moving mechanism is Providing a substrate recovering apparatus for holding a serial plurality of needle members to each other in an insulated state.

According to the present invention, the continuity between the plurality of needle members is detected by the continuity detecting unit almost simultaneously with the contact between the plurality of needle tips penetrating the sheet member and the substrate. Therefore, by controlling the lowering amount of the needle member based on the position of the needle member at this time, the penetrating amount of the needle member penetrating the sheet can be appropriately adjusted regardless of the state of the sheet. The substrate can be punched and collected by the needle member under optimum conditions.

In the above invention, the conductive layer is provided on a surface of the substrate that is bonded to the sheet member, or is provided on a surface of the sheet member that is bonded to the substrate. May be.
By doing in this way, a conductive layer can be made into a structure integral with a board | substrate or a sheet | seat member, and can be set as a simple structure.

Moreover, in the said invention, the said board | substrate, the said sheet | seat member, and the said conductive layer may be transparent with respect to visible light.
By doing so, a sample such as a section of a substrate or a living tissue provided on the surface of the substrate can be clearly observed from the sheet member side by an upright optical microscope or the like.

In the above invention, the suction head provided around the plurality of needle members and having a suction port on a surface facing the sheet member held by the stage, and the suction head is moved in the longitudinal direction. And a head moving mechanism.
By doing so, a portion of the sheet member is sucked by the suction port around the substrate to be collected and the position is fixed, so that the tension acting on the sheet member in the range including the substrate to be collected is stabilized. As a result, the lowering amount of the needle member by the moving mechanism can be stabilized regardless of whether the sheet member is slack.

  According to the present invention, there is an effect that the substrate can be punched and collected by the needle under optimum conditions at all times regardless of the state of the sheet.

It is a whole lineblock diagram of a substrate recovery device concerning one embodiment of the present invention. It is a top view which shows the sheet | seat and board | substrate which are applied to the board | substrate collection | recovery apparatus of FIG. It is a figure which shows the sheet | seat fixed by the grip ring. It is a figure which shows an example of arrangement | positioning of the needle | hook with which the board | substrate collection | recovery apparatus of FIG. 1 is provided. It is a figure which shows another example of arrangement | positioning of the needle | hook with which the board | substrate collection | recovery apparatus of FIG. 1 is provided. It is a partial block diagram explaining operation | movement of the board | substrate collection | recovery apparatus of FIG. It is a partial block diagram explaining operation | movement of the board | substrate collection | recovery apparatus of FIG. It is a whole block diagram of the 1st modification of the board | substrate collection | recovery apparatus of FIG. It is a partial block diagram explaining operation | movement of the board | substrate collection | recovery apparatus of FIG. It is a partial block diagram explaining operation | movement of the board | substrate collection | recovery apparatus of FIG. It is a whole block diagram of the 2nd modification of the board | substrate collection | recovery apparatus of FIG. It is a partial block diagram explaining operation | movement of the board | substrate collection | recovery apparatus of FIG. It is a partial block diagram explaining operation | movement of the board | substrate collection | recovery apparatus of FIG. It is a whole block diagram of the 3rd modification of the board | substrate collection | recovery apparatus of FIG. It is a partial block diagram explaining operation | movement of the board | substrate collection | recovery apparatus of FIG. It is a partial block diagram explaining operation | movement of the board | substrate collection | recovery apparatus of FIG. It is a partial block diagram explaining operation | movement of the board | substrate collection | recovery apparatus of FIG.

Below, the board | substrate collection | recovery apparatus 1 which concerns on one Embodiment of this invention is demonstrated with reference to FIGS.
As shown in FIG. 1, the substrate recovery apparatus 1 according to the present embodiment includes a substrate 2, a sheet (sheet member) 3 to which the substrate 2 is bonded, and a stage 4 that supports the sheet 3 substantially horizontally. The needle moving mechanism 5 having a plurality of needles (needle members) 8 for punching the substrate 2 from the sheet 3 side, the conduction detecting unit 6 for detecting conduction between the plurality of needles 8, and the recovery disposed below the stage 4 Part 7.

  The substrate 2 is made of a conductive material. The conductive material may be any material that does not affect the use of the recovered substrate 2, for example, a metal such as aluminum, a metal oxide such as zinc oxide (ZnO), or silicon having an appropriate doping concentration. These semiconductors are used.

  As shown in FIG. 2, a plurality of substrates 2 are arranged on one surface of an insulating sheet 3 with a gap, and are bonded to the sheet 3 with an adhesive. The adhesive is an acrylic ultraviolet peelable adhesive, and the adhesive force between the substrate 2 and the sheet 3 is increased by irradiating the adhesive surface between the substrate 2 and the sheet 3 with ultraviolet rays from the sheet 3 side. The substrate 2 can be easily peeled off from the sheet 3 by lowering. A piece X ′ of the slice X cut out from the living tissue is attached to the surface of each substrate 2 opposite to the sheet 3.

  Such a board | substrate 2 can be produced with the following method as an example. First, an aluminum plate having a thickness of 500 μm is bonded to a dicing tape (UE-111AJ, manufactured by Nitto Denko Corporation) as a sheet 3, and then the dicing saw having a blade having a thickness of 0.08 mm. Is cut at a pitch of 0.5 mm. As a result, a substrate 2 of about 0.42 mm square can be obtained.

  Next, a slice X sliced to a thickness of several μm to several tens of μm using a cryostat (HYRAX C50, manufactured by Zeiss) is attached to the surface of the cut aluminum plate opposite to the dicing tape. wear. Next, the gap between the substrates 2 is expanded by extending the dicing tape in the surface direction using an expander for a semiconductor wafer. At this time, the section X is divided into a plurality of pieces X ′ along the outline of each substrate 2 as the gap between the substrates 2 increases. Next, the dicing tape in the extended state is fixed by the grip ring 11 as shown in FIG.

  The shape and dimensions of the substrate 2 can be appropriately designed according to the use of the recovered substrate 2. When the fragment X ′ of the biological tissue is collected together with the substrate 2 and the fragment X ′ is subjected to gene analysis as in this embodiment, the substrate 2 has a thickness dimension of 1 mm or less and 5 mm from the viewpoint of operability. A rectangular shape having the following side dimensions is preferable.

  The stage 4 has a window 4a penetrating in the vertical direction at the center, and is fixed in an extended state by the grip ring 11 so that the substrate 2 faces downward and the substrate 2 is positioned in the window 4a. The periphery of the sheet 3 is held. In FIG. 1, the grip ring 11 is not shown.

  The needle moving mechanism 5 includes a holder 9 that holds a plurality of needles 8 with the tip 8a at the tip thereof substantially vertically downward, and a drive unit 10 that moves the holder 9 at least in a substantially vertical direction.

  The holder 9 holds the plurality of needles 8 so that the plurality of needle tips 8a are arranged on the same plane within a range narrower than the surface of the substrate 2 bonded to the sheet 3. The plurality of needles 8 are made of a conductive material. On the other hand, the holder 9 is made of an insulating material and holds a plurality of needles 8 in an insulated state.

  The number of needles 8 may be at least two. It is preferable that three or more needles 8 in which the needle tips 8a are not arranged on the same straight line are provided so that a pressing force can be applied uniformly to the entire substrate 2. Further, as shown in FIG. 4, the needle tip 8 a comes into contact with the four corners and the approximate center of the substrate 2, or as shown in FIG. 5, with the approximate center and the approximate center of the four sides of the substrate 2. In addition, five needles 8 may be provided.

  The drive unit 10 lowers the holder 9 between a position where the needle tip 8 a is disposed above the sheet 3 and a position where the needle tip 8 a is disposed below the sheet 3 held by the stage 4. Raise. At this time, when the drive unit 10 receives a continuity detection signal (described later) from the continuity detection unit 6 while the holder 9 is being lowered, the drive unit 10 holds the holder 9 a predetermined distance from the position when the continuity detection signal is received. It is further lowered.

The continuity detecting unit 6 applies voltage between the plurality of needles 8 during operation of the driving unit 10 to monitor the continuity between the plurality of needles 8 and detects continuity between the plurality of needles 8. In addition, a conduction detection signal is transmitted to the drive unit 10.
The collection unit 7 is composed of a collection container such as a PCR tube, for example.

Next, the operation of the substrate recovery apparatus 1 configured as described above will be described.
In order to recover the substrate 2 from the sheet 3 using the substrate recovery apparatus 1 according to the present embodiment, the needle 8 and the stage 4 are placed horizontally so that the desired substrate 2 is disposed substantially vertically below the needle tip 8a. Adjust the relative position of the direction. This position adjustment is performed, for example, by moving the stage 4 or the holder 9 in a substantially horizontal direction while observing the needle tip 8a and the substrate 2 with an optical microscope (not shown). Next, the adhesive force between the desired substrate 2 and the sheet 3 is reduced by irradiating at least the desired substrate 2 with ultraviolet rays from the sheet 3 side.

  Next, the holder 9 is lowered substantially vertically downward by the drive unit 10. As shown in FIG. 6, the plurality of needle tips 8 a pass through the sheet 3 after the sheet 3 having slackness or elasticity is pushed down, and when the plurality of needle tips 8 a come into contact with the substrate 2, the conduction detection unit 6. Due to this, conduction between the plurality of needles 8 is detected. Thereafter, as shown in FIG. 7, the needle 8 is further lowered by a predetermined distance from the position when the conduction is detected. As a result, the substrate 2 is peeled off from the sheet 3 by the needle tip 8a and dropped, and the biological tissue fragment X ′ attached to the substrate 2 can be recovered in the recovery unit 7 in a non-contact manner.

  Here, the tension acting on the sheet 3 fixed in the extended state by the grip ring 11 varies depending on the distance from the grip ring 11. That is, at a position relatively close to the grip ring 11, the tension of the sheet 3 is relatively strong, and when the sheet 3 is pressed by the needle tip 8a, the needle tip 8a penetrates the sheet 3 with almost no extension. . On the other hand, at a position relatively far from the grip ring 11, the tension of the sheet 3 is relatively weak, and when the sheet 3 is pressed by the needle tip 8a, the needle tip 8a penetrates the sheet 3 after the sheet 3 is fully extended. To do. As described above, the amount by which the needle 8 descends from when the needle tip 8 a comes into contact with the sheet 3 until it penetrates differs depending on the position of the substrate 2 on the sheet 3.

  According to the present embodiment, it is detected based on the conduction between the needles 8 that the plurality of needle tips 8a have penetrated the sheet 3 and contacted the substrate 2, and the needles 8 are moved by a predetermined distance from the position where the contact is detected. Is further lowered. Thereby, regardless of the magnitude of the tension of the sheet 3, the needle 8 can be surely penetrated through the sheet 3 by an optimal predetermined amount, and the substrate 2 can be reliably punched and recovered under the optimal conditions. There is. Further, by controlling the penetrating amount of the needle 8 to a necessary and sufficient amount, the impact applied to the sheet 3 and the diameter of the through hole formed in the sheet 3 can be minimized. Therefore, there is an advantage that it is possible to prevent the disadvantage that the peripheral substrate 2 falls unintentionally or the sheet 3 becomes brittle.

Next, a modified example of the substrate recovery apparatus 1 according to this embodiment will be described.
(First modification)
As shown in FIG. 8, the substrate recovery apparatus 101 according to the first modification of the present embodiment covers the surface of the substrate 2 made of an insulating material and bonded to the sheet 3 of the substrate 2. The substrate collecting apparatus 1 is different in that the conductive layer 12 is provided.

The material of the substrate 2 is preferably a material transparent to visible light, such as glass or synthetic quartz.
The conductive layer 12 is formed using a film forming method such as a sputtering method. The material of the conductive layer 12 is preferably a material that is transparent to visible light, such as indium tin oxide (ITO) or ZnO. The thickness of the conductive layer 12 may be any thickness that allows a current to flow stably when in contact with the needle tip 8a, and is, for example, about several hundred nm. The conductive layer 12 may be composed of a conductive film attached to the substrate 2 instead of a film formed by sputtering or the like.

  According to the substrate recovery apparatus 1 according to this modification, as shown in FIG. 9, when the plurality of needle tips 8 a penetrate the sheet 3 and come into contact with the conductive layer 12, the plurality of needles are detected by the continuity detection unit 6. Conduction between 8 is detected. Thereafter, as shown in FIG. 10, the needle 8 further descends by a predetermined distance from the position at which conduction is detected. Since the effect of this modification is the same as that of the substrate recovery apparatus 1 described above, a description thereof will be omitted.

(Second modification)
In the substrate recovery apparatus 102 according to the second modification of the present embodiment, as shown in FIG. 11, the substrate 2 is made of an insulating material and covers the surface of the sheet 3 on the side to be bonded to the substrate 2. The substrate collecting apparatus 1 is different in that the conductive layer 12 is provided.

The material of the substrate 2 is preferably a material transparent to visible light, such as glass or synthetic quartz.
The sheet 3 is made of an insulating material in which the conductive layer 12 can be easily formed. For example, a PVC (polyvinyl chloride) sheet having a thickness of 0.1 mm is used. The conductive layer 12 is formed on one surface of the sheet 3 by using a film forming method such as a sputtering method. The material of the conductive layer 12 is preferably ITO or ZnO, and the thickness of the conductive layer 12 is sufficiently thin so that the needle tip 8a penetrates easily, for example, several tens of nm. An acrylic ultraviolet peelable adhesive is applied to the surface of the conductive layer 12 opposite to the sheet 3.

  According to the substrate recovery apparatus 1 according to this modification, as shown in FIG. 12, the conductive layer 12 penetrates almost simultaneously with the plurality of needle tips 8a penetrating the sheet 3, and the needle tips 8a are formed on the substrate 2. Almost simultaneously with the contact, the continuity detection unit 6 detects the continuity between the plurality of needles 8. Thereafter, as shown in FIG. 13, the needle 8 further descends by a predetermined distance from the position at which conduction is detected. Since the effect of this modification is the same as that of the substrate recovery apparatus 1 described above, a description thereof will be omitted.

(Third Modification)
As shown in FIG. 14, the substrate recovery apparatus 103 according to the third modification of the present embodiment includes a cylindrical suction head 13 provided around the needle 8. And different.
The substrate recovery apparatus 103 shown in FIG. 14 has a configuration based on the substrate recovery apparatus 1, but has a configuration based on the substrate recovery apparatuses 101 and 102 according to the first or second modification. Also good.

  The suction head 13 has a suction passage 13 b in which a suction port 13 a is opened on the lower surface facing the sheet 3. The lower surface of the suction head 13 is disposed on substantially the same plane as the needle tip 8 a or below the needle tip 8 a so that the needle tip 8 a does not protrude from the suction head 13.

  In this modification, a head moving mechanism 14 that moves the suction head 13 in a substantially vertical direction, a suction device 15 that depressurizes the suction passage 13b, and a suction detection unit 16 that detects the pressure in the suction passage 13b, Is further provided.

  The head moving mechanism 14 lowers the suction head 13 in conjunction with the lowering of the holder 9 by the driving unit 10. At this time, the suction detection unit 16 detects the pressure in the suction passage 13b decompressed by the suction device 15, and the head moving mechanism 14 detects the suction port based on the decrease in the pressure detected by the suction detection unit 16. When the contact of the sheet 13 with the sheet 13a is detected, the lowering of the suction head 13 is stopped. As a result, as shown in FIG. 15, the peripheral portion of the desired substrate 2 of the sheet 3 is fixed to the suction port 13a. The drive unit 10 continues to descend the holder 9 even after the suction head 13 is stopped as shown in FIG. 16, and from the position when conduction between the plurality of needles 8 is detected as shown in FIG. 17. Further, the holder 9 is lowered by a predetermined distance.

  According to this modification, in addition to the effect of the substrate recovery apparatus 1 described above, the peripheral portion of the desired substrate 2 of the sheet 3 is fixed by suction, thereby acting on the region including the desired substrate 2 of the sheet 3. The tension is substantially the same regardless of the position of the substrate 2 on the sheet 3, and the amount of elongation of the sheet 3 when pressed by the needle tip 8a is substantially constant. Thereby, there is an advantage that the amount of lowering of the needle 8 can be made substantially constant irrespective of the substrate 2 on the sheet 3, and the operation of the apparatus can be further stabilized.

1 substrate recovery device 2 substrate 3 sheet (sheet member)
4 Stage 5 Needle moving mechanism 6 Continuity detection unit 7 Collection unit 8 Needle (needle member)
DESCRIPTION OF SYMBOLS 9 Holder 10 Drive part 11 Grip ring 12 Conductive layer 13 Suction head 13a Suction port 13b Suction passage 14 Head moving mechanism 15 Suction device 16 Suction detection part

Claims (6)

A plurality of conductive substrates;
An insulating sheet member in which the plurality of substrates are bonded to one surface;
A stage for holding the sheet member in a substantially horizontal direction with the plurality of substrates facing downward;
A plurality of needle members that have conductivity and have needle tips that can penetrate the sheet member;
Above the stage, a needle moving mechanism that holds the plurality of needle members with the needle tips facing downward and moves the plurality of needle members in the longitudinal direction;
A conduction detecting unit for detecting conduction between the plurality of needle members,
The needle tips of the plurality of needle members are arranged within a range narrower than the surface of one of the substrates to be bonded to the sheet member on substantially the same plane intersecting the longitudinal direction,
The substrate recovery apparatus, wherein the needle moving mechanism holds the plurality of needle members in an insulated state. A plurality of insulating substrates;
An insulating sheet member in which the plurality of substrates are bonded to one surface;
A conductive layer provided between the plurality of substrates and the sheet member;
A stage for holding the sheet member in a substantially horizontal direction with the plurality of substrates facing downward;
A plurality of needle members that have conductivity and have needle tips that can penetrate the sheet member;
Above the stage, a needle moving mechanism that holds the plurality of needle members with the needle tips facing downward and moves the plurality of needle members in the longitudinal direction;
A conduction detecting unit for detecting conduction between the plurality of needle members,
The needle tips of the plurality of needle members are arranged within a range narrower than the surface of one of the substrates to be bonded to the sheet member on substantially the same plane intersecting the longitudinal direction,
The substrate recovery apparatus, wherein the needle moving mechanism holds the plurality of needle members in an insulated state.   The board | substrate collection | recovery apparatus of Claim 2 with which the said conductive layer is provided on the surface by the side of adhere | attaching the said sheet | seat member of the said board | substrate.   The substrate recovery apparatus according to claim 2, wherein the conductive layer is provided on a surface of the sheet member to which the substrate is bonded.   The substrate collection apparatus according to claim 2, wherein the substrate, the sheet member, and the conductive layer are transparent to visible light. A suction head provided around the plurality of needle members and having a suction port on a surface facing the sheet member held by the stage;
The substrate collection apparatus according to claim 1, further comprising a head moving mechanism that moves the suction head in the longitudinal direction.

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