JP6031677B2 - Observation device and component mounting machine - Google Patents

Description

  The present invention relates to an observation apparatus for observing a first target and a second target formed on an observation object, and a component mounter including the observation apparatus.

  In a component mounting machine that mounts electronic components on a board to produce a mounting board, there is a configuration in which the electronic component supplied to the component supply unit is taken out by a mounting head and mounted at a component mounting position set on the board. Commonly used. In such a component mounting machine, a pair of electrodes formed on the electronic component as an observation object held by the mounting head in order to prevent the electronic component from being mounted on the substrate in a state where the electronic component is displaced. There are some devices that are mounted on a substrate after incorporating the observation device for observing two targets, such as a mark and a recognition mark, and correcting the lowered position and mounting angle of the mounting head based on the observation result of each target using the device. .

  As an observation device, a pair of cameras whose optical axes are arranged in parallel with a line connecting two targets, a prism that reflects light from each target toward each camera by an inclined reflecting surface, and a prism For example, there is a device provided with an elevating mechanism for elevating each camera (for example, Patent Document 1). According to this, the interval of the observation visual field is changed by moving each camera up and down. Therefore, by raising and lowering each camera according to the distance between each target, it is possible to match each imaging field of view with the corresponding target, and as a result, it is possible to deal with electronic components of various sizes.

  Further, as another type of observation apparatus, a pair of cameras having the same configuration as that of Patent Document 1 described above, two prisms arranged so as to intersect an inclined reflecting surface in one direction, and the reflecting surface There is a device provided with an optical axis adjusting element composed of a plurality of mirrors that refracts the light from each target reflected by the light so as to enter the camera (for example, Patent Document 2). According to this, in addition to the effect similar to the observation apparatus of Patent Document 1, it is possible to solve the problem that the image becomes dark when the observation field interval of each camera is brought close to zero.

JP 2012-13802 A JP 2003-307768 A

  In the thing of patent document 1, in order to respond | correspond to a large component with a long distance between each target, it is necessary to prepare the large prism which has a wide inclined surface. However, there is a limit to the size of the prism that can be installed for the convenience of design including the size of the observation device and the balance with other components. I can't. In addition to the above-mentioned problem, Patent Document 2 has a problem that the apparatus configuration becomes complicated and the cost increases because it is necessary to provide an optical axis adjusting element.

  Therefore, an object of the present invention is to provide an observation apparatus capable of observing observation objects having a wide range of different distances between two targets with a simple configuration and a component mounting machine including the observation apparatus.

The present invention according to claim 1 is an observation device for observing the first target and the second target formed on the observation object, and reflects light from the first target in a predetermined direction. A first observation unit including a first reflection unit, a first camera that receives the light reflected in a predetermined direction by the first reflection unit, and observes the first target; and A second reflection unit that reflects light from the target in a predetermined direction, and a second camera that receives the light reflected in the predetermined direction by the second reflection unit and observes the second target a second observation means including, the first observation unit and the second observation hand stage of the first target and the second direction both along the line connecting the target is close to or away from synchronization and a moving means for moving the front When the first reflecting portion and the second reflecting portion are brought close to each other by moving means, the end portion closest to the second reflecting portion in the first reflecting portion and the second reflecting portion in the second reflecting portion. first as an end closest to the reflective portion does not interfere, the distance from the observation object to said first reflecting portion is smaller than the distance from the observation object to the second reflecting portion.

The present invention according to claim 7 is a component mounter for mounting on a substrate after observing the first target and the second target formed on a component as an observation object held by a mounting head with an observation apparatus. The observation apparatus receives the first reflection unit that reflects light from the first target in a predetermined direction, and the light reflected in the predetermined direction by the first reflection unit. A first observation unit including a first camera for observing one target; a second reflection unit configured to reflect light from the second target in a predetermined direction; and a predetermined value by the second reflection unit. a second observation means light reflected in the direction is incident comprises a second camera for observing the second target, the first observation unit and the second observation hand stage the first The target and the second target Along department lines and a moving means for moving in synchronism in the direction of both approaches or leaves, when brought into close proximity to said second reflecting portion and the first reflection portion by said moving means, said first In the reflection part, the end closest to the second reflection part and the end closest to the first reflection part in the second reflection part do not interfere with each other from the observation object. the distance to the reflecting portion is smaller than the distance from the observation object to the second reflecting portion.

  According to the present invention, when the first reflecting portion and the second reflecting portion are brought close to each other by the moving means, the end portion closest to the second reflecting portion and the second reflecting portion in the first reflecting portion. The distance from the observation object to the first reflection part and the distance from the observation object to the second reflection part are made different so that the end closest to the first reflection part does not interfere with the first reflection part. A wide range of observation objects with different distances between the two targets can be observed with a simple configuration.

The perspective view of the component mounting machine in one embodiment of this invention (A) Partial sectional view of a component mounting machine according to an embodiment of the present invention (b) Plan view of a lower surface of an electronic component according to an embodiment of the present invention The front view of the observation unit with which the component mounting machine in one embodiment of this invention was equipped (A) (b) The front view of the observation unit with which the component mounting machine in one embodiment of this invention was equipped The block diagram which shows the control system of the component mounting machine in one embodiment of this invention (A) (b) Partial sectional view of an observation unit according to another embodiment of the present invention

  First, with reference to FIG. 1, the component mounting machine in Embodiment 1 of this invention is demonstrated. The component mounting machine 1 has a function of mounting an electronic component 3 on a substrate 2 such as a display panel such as a liquid crystal panel or a plasma display by pressure bonding. The component mounter 1 includes a component supply unit 4, an intermediate stage 5, a backup unit 6, a board positioning unit 7, and a mounting unit 8 disposed above each unit. Hereinafter, the arrangement direction of the component supply unit 4, the intermediate stage 5, the backup unit 6, and the board positioning unit 7 is defined as the Y direction, the direction perpendicular to the Y direction in the horizontal plane is defined as the X direction, and the direction perpendicular to the XY plane is defined as the Z direction. .

  In FIG. 1, the component supply unit 4 supplies the electronic component 3 to a mounting head 18 provided in a mounting unit 8 described later, and includes a holding table 11 that holds a pallet 10 on which a tray 9 is placed. ing. In FIG. 2A, the tray 9 is formed with a plurality of recesses 9a in a lattice shape, and the electronic component 3 is accommodated in the recesses 9a. In FIG. 2B, a pair of recognition marks M1 and M2 are formed on the lower surface 3a of the electronic component 3. The recognition marks M1 and M2 are used for correcting the mounting position of the electronic component 3 described later.

  1 and 2A, the intermediate stage 5 is disposed between the component supply unit 4 and the backup unit 6, and has a horizontal plane on which the electronic component 3 taken out from the tray 9 is placed. Yes. A preliminary recognition camera 12 with an imaging field of view directed downward is disposed above the intermediate stage 5 and images the electronic component 3 placed on the intermediate stage 5 from above.

  In FIG. 1, the backup unit 6 is disposed between the intermediate stage 5 and the substrate positioning unit 7, and a transparent base member 14 is attached to a location where a substantially central portion 13 a of the portal frame member 13 is cut out. Configured. An observation unit (observation device) 15 is disposed at a position below the lower receiving member 14 (details will be described later). As shown in FIG. 2A, the frame member 13 can receive a load during crimping by supporting the edge of the substrate 2 from below with the upper surface of the receiving member 14.

  In FIG. 1, the substrate positioning unit 7 includes a substrate moving mechanism 16 (FIG. 5) formed by stacking an X-axis table 16X, a Y-axis table 16Y, and a Z-axis table 16Z. A substrate holding table 17 that holds the substrate 2 is mounted on the Z-axis table 16Z, and the substrate moving mechanism 16 has a rotation mechanism (not shown) that rotates the substrate holding table 17 about the Z direction as an axis. Is provided.

  The substrate moving mechanism 16 is driven and the substrate 2 on the substrate holding table 17 is moved in the XYZ directions or rotated by a predetermined angle Θ, so that the edge of the substrate 2 is set as shown in FIG. The substrate 2 can be positioned so that the mounting position of the electronic component 3 is supported from below by the receiving member 14.

  In FIG. 1, the mounting portion 8 includes a mounting head 18 in which a suction mechanism, a pressure mechanism, and a rotation mechanism are built, and a holding tool 21 is coupled to a rod 19 extending from below via a heat insulating member 20. ing. The holding tool 21 has a built-in heater, and heats the adhesive supplied in advance to the mounting position of the substrate 2 via the electronic component 3 held by the lower surface 21a of the holding tool 21 (FIG. 2A).

  A suction hole connected to the suction mechanism is formed on the lower surface 21a of the holding tool 21, and the electronic component 3 can be held through the suction hole by controlling the suction mechanism. Further, by controlling the pressurizing mechanism, the rod 19 moves up and down with respect to the mounting head 18, whereby the electronic component 3 can be crimped to the substrate 2. Further, by controlling the rotation mechanism, the holding tool 21 can be rotated by a predetermined angle around a rotation axis perpendicular to the lower surface 21a of the holding tool 21.

  In FIG. 1, the mounting portion 8 is provided with a Y-axis moving mechanism 22Y extending in the Y direction. The Y-axis moving mechanism 22Y has an X-axis moving mechanism 22X extending in the X direction movable in the Y direction. It is attached. A mounting head 18 is attached to the X-axis moving mechanism 22X so as to be movable in the X direction. By controlling the X-axis movement mechanism 22X and the Y-axis movement mechanism 22Y, the mounting head 18 can be moved above the component supply unit 4, the intermediate stage 5, the backup unit 6, and the board positioning unit 7. As described above, the X-axis moving mechanism 22X and the Y-axis moving mechanism 22Y are the head moving mechanism 22 (FIG. 5) that moves the mounting head 18.

  By controlling each mechanism built in the mounting head 18 and the head moving mechanism 22, the electronic component 3 is taken out from the tray 9 by the holding tool 21 and transferred to the intermediate stage 5 as shown in FIG. (Arrow a), the electronic component 3 on the intermediate stage 5 can be taken out by the holding tool 21 and the holding tool 21 can be lowered from above the receiving member 14 to press-bond the electronic component 3 to the substrate 2 (Arrow b). . In a state in which the mounting head 18 is moved above the receiving member 14, the electronic component 3 has a lower surface 3a directed downward and a line connecting the pair of recognition marks M1, M2 (hereinafter referred to as “mark line” ML). (See FIG. 2B) is held by the holding tool 21 in a posture along the X direction.

  Next, the observation unit 15 will be described with reference to FIGS. 3 and 4. The observation unit 15 is for observing the recognition marks M1 and M2 formed on the electronic component 3 as the observation object held by the mounting head 18 and a pair of recognition marks formed on the substrate. In the following embodiment, the description will be focused on observing the recognition marks M1 and M2.

  The observation unit 15 is configured by arranging a first observation unit 30, a second observation unit 40, and an observation unit moving mechanism 50 in a unit base 15a having an open upper surface. The first observation unit 30 and the second observation unit 40 are arranged in parallel in the X direction in the unit base 15a. The first observation unit 30 observes one of the pair of recognition marks M1, M2 as the first target. The second observation unit 40 observes the recognition marks M1 and M2 that are not the observation target of the first observation unit 30 as the second target. In the present embodiment, the first observation unit 30 sets the recognition mark M1 as an observation target, and the second observation unit 40 sets the recognition mark M2 as an observation target.

  The first observation unit 30 includes a first camera 31 having an observation surface directed in the X direction (hereinafter referred to as “X1 direction”) on the side where the second observation unit 40 is disposed. The first camera 31 is provided with a first lens barrel 32 that surrounds the optical axis c1 and extends in the X direction, and the wall portion 32a formed on the most X1 side of the first lens barrel 32 is in a horizontal plane. In contrast, the angle α1 is inclined (45 degrees in the present embodiment). That is, the outer side surface 32b on the X1 side of the wall portion 32a is inclined toward the X2 side from the upper end portion 32c toward the lower end portion 32d, and in the first observation unit 30, the upper end portion 32c is located closest to the X1 side.

  The first mirror 33 is held on the inner side surface of the wall portion 32a in a state where the angle α1 (45 degrees) is inclined from the horizontal plane following the inclination. A window portion 32 e is formed at a position above the first mirror 33 in the first lens barrel 32. The light d1 from the electronic component 3 that has entered the first mirror 33 through the window 32e is reflected by the first camera 31. Accordingly, the recognition mark M1 is observed by the first camera 31.

  Thus, the first mirror 33 and the first lens barrel 32 that holds the first mirror 33 serve as a first reflecting portion that reflects light from the first target in a predetermined direction. The first observation unit 30 includes a first reflection unit and a first camera 31 that receives the light reflected in a predetermined direction by the first reflection unit and observes the first target. 1 observation means.

  Below the first lens barrel 32, an illumination unit 34 having a light source for irradiating illumination light e1 upward is attached. A window portion 32f is formed at a position of the first lens barrel 32 where the illumination light e1 is incident, and is located inside the first lens barrel 32 at a position where the illumination light e1 is incident through the window portion 32f. A beam splitter 35 is provided. The beam splitter 35 refracts the illumination light e1 to the first mirror 33. The illumination light e1 incident on the first mirror 33 is reflected upward, thereby illuminating the recognition mark M1.

  The first lens barrel 32 is fixed above the inverted L-shaped moving table 36. A holding block 38 that holds a slider 37 inside is coupled to the lower side of the moving table 36. The slider 37 and the holding block 38 are connected to the observation unit moving mechanism 50.

  The second observation unit 40 includes a second camera 41 having an observation surface directed in the X2 direction (a direction opposite to the X1 direction) in which the first observation unit 30 is disposed. That is, the first camera 31 and the second camera 41 are arranged with their imaging surfaces facing each other.

  The second camera 41 is provided with a second lens barrel 42 that surrounds the optical axis c2 and extends in the X direction. The wall portion 42a on the X2 side of the second lens barrel 42 has an angle α2 with respect to the horizontal plane. (45 degrees in this embodiment) is inclined. That is, the outer side surface 42b on the X2 side of the wall portion 42a is inclined toward the X1 side from the upper end portion 42c toward the lower end portion 42d, and in the second observation unit 30, the upper end portion 42c is located closest to the X2 side.

  A second mirror 43 is attached to the inner side surface of the wall portion 42a so as to be inclined at a predetermined angle α2 (45 degrees) from the horizontal plane following the inclination. The first mirror 33 and the second mirror 43 are respectively held by the first lens barrel 32 and the second lens barrel 42 in a mirror surface posture with their reflecting surfaces facing in opposite directions, and the lower receiving member 14. Is disposed below.

  A window portion 42 e is formed at a position above the second mirror 43 in the second lens barrel 42. The light d2 from the electronic component 3 that has entered the second mirror 43 through the window 42e is reflected by the second camera 41. Thereby, the recognition mark M2 is observed by the second camera 41.

  As described above, the second mirror 43 and the second lens barrel 42 that holds the second mirror 43 serve as a second reflecting portion that reflects light from the second target in a predetermined direction. The second observation unit 40 includes a second reflection unit and a second camera 41 that receives the light reflected in a predetermined direction by the second reflection unit and observes the second target. 2 observation means.

  An illumination unit 44 including a light source that irradiates illumination light e <b> 2 upward is attached below the second lens barrel 42. A window part 42f is formed at the position of the second lens barrel 42 where the illumination light e2 is incident, and is located inside the second lens barrel 42 at a position where the illumination light e2 is incident via the window part 42f. Is provided with a beam splitter 45. The beam splitter 45 refracts the illumination light e <b> 2 to the second mirror 43. The illumination light e2 incident on the second mirror 43 is reflected upward, thereby illuminating the recognition mark M2.

  The second lens barrel 42 is fixed above the L-shaped moving table 46, and a holding block 48 that holds a slider 47 inside is coupled to the lower side of the moving table 46. The fixed position of the second lens barrel 42 with respect to the moving base 46 is set below the first lens barrel 32.

  Therefore, the distance S1 until the light d1 from the electronic component 3 (recognition mark M1) is incident on the first mirror 33 constituting the first reflecting portion is equal to the light d2 from the electronic component 3 (recognition mark M2). The distance S2 is smaller than the distance S2 until the light enters the second mirror 43 constituting the second reflecting portion. Thus, in this Embodiment, the distance from an observation target object to a 1st reflection part and the distance from an observation target object to a 2nd reflection part are varied. Therefore, the width of the first lens barrel 32 in the X direction is set to be a predetermined length larger than the width of the second lens barrel 42 in the X direction, and light d1 from the electronic component 3 to each of the cameras 31, 41 is set. , D2 is adjusted.

  The observation unit moving mechanism 50 moves the first observation unit 30 and the second observation unit 40. That is, the observation part moving mechanism 50 includes a linear guide 51 as a guide part extending in the X direction, and sliders 37 and 47 are fitted to the linear guide 51 so as to be movable in the X direction. A feed screw 52 extending in the X direction is also provided below the linear guide 51, and a positive direction (arrow f) and a negative direction about an axis along the X direction by a motor 53 as a drive unit. Rotate (arrow g).

  The pitch of the thread groove formed in the feed screw 52 is reversed with the middle portion in the axial length direction as a boundary, and nuts 54a and 54b are screwed into each position where the pitch is different. The upper surfaces of the nuts 54a and 54b are coupled to the lower surfaces of the holding blocks 38 and 48, respectively. By rotating and driving the feed screw 52 by the motor 53, the first observation unit 30 and the second observation unit 40 move in synchronization with each other in the opposite direction while being guided in the X direction by the linear guide 51. At this time, the line (hereinafter referred to as “observation line” OL) along which each observation unit 30, 40 moves coincides with the mark line ML of the electronic component 3 held by the mounting head 18 above the receiving member 14. .

  The movement modes of the observation units 30 and 40 will be described separately in the rotation direction of the feed screw 52. As shown in FIG. 4A, when the feed screw 52 is rotationally driven in the positive direction (arrow f), the first observation unit 30 moves in the X1 direction and the second observation unit 40 moves in the X2 direction. To do. In other words, the 1st observation part 30 and the 2nd observation part 40 move to the direction which mutually approaches. At this time, since the second lens barrel 42 is located below the first lens barrel 32, they do not interfere with each other even if both approach.

  On the other hand, as shown in FIG. 4B, when the feed screw 52 is rotationally driven in the negative direction (arrow g), the first observation unit 30 moves in the X2 direction and the second observation unit 40 moves in the X1 direction. Move to. In other words, the first observation unit 30 and the second observation unit 40 move in directions away from each other.

  In the above configuration, the linear guide 51, the feed screw 52, the motor 53, and the nuts 54a and 54b are both connected to the first observation means and the second observation means along the line connecting the first target and the second target. It is a moving means for moving in the approaching or separating direction. The first reflecting portion and the second reflecting portion are moved in parallel along a line connecting the first target and the second target by the moving means.

  Next, the configuration of the control system will be described with reference to FIG. The control unit 60 provided in the component mounting machine 1 has an arithmetic processing function, and includes a storage unit 61, a mounting operation control unit 62, a camera control unit 63, an observation unit control unit 64, a preliminary recognition processing unit 65, a main recognition. A processing unit 66 and an alignment processing unit 67 are included. The controller 60 is connected to the preliminary recognition camera 12, the observation unit 15, the mounting head 18, the head moving mechanism 22, and the substrate moving mechanism 16.

  The storage unit 61 stores information relating to the board 2 such as a mounting program for mounting the electronic component 3 on the board 2, and the name of the type of the board 2 and the design mounting position coordinates set on the edge. In addition to the type and size of the electronic component 3, information about the electronic component 3 such as the distance between the recognition marks M1 and M2 (hereinafter referred to as “mark distance”) is also stored.

  The mounting operation control unit 62 executes various component mounting operations by controlling each mechanism of the mounting head 18, the head moving mechanism 22, and the board moving mechanism 16 based on the mounting program. The camera control unit 63 images the electronic component 3 on the intermediate stage 5 by controlling the preliminary recognition camera 12.

  The observation unit control unit 64 moves the first observation unit 30 and the second observation unit 40 by controlling the motor 53. Further, the recognition marks M1 and M2 are observed by controlling the first camera 31 and the second camera 41.

  The preliminary recognition processing unit 65 recognizes the position of the electronic component 3 placed on the intermediate stage 5 by performing recognition processing on the imaging data acquired by the preliminary recognition camera 12. The recognition processing unit 66 recognizes the position of the electronic component 3 held by the mounting head 18 by performing recognition processing on observation data acquired by the first camera 31 and the second camera 41. The alignment processing unit 67 corrects the lowered position or mounting angle of the holding tool 21 based on the recognition processing result by the recognition processing unit 66.

  The component mounter 1 in the present embodiment is configured as described above, and the operation will be described next. First, the electronic component 3 housed in the tray 9 is taken out by the mounting head 18 and transferred to the intermediate stage 5 (ST1: intermediate stage transfer step) (FIG. 2A). Next, the electronic component 3 on the intermediate stage 5 is imaged by the preliminary recognition camera 12, and the acquired image data is recognized by the preliminary recognition processing unit 65 to recognize the position of the electronic component 3 (ST2: preliminary recognition step). .

  Next, the electronic component 3 on the intermediate stage 5 is picked up by the mounting head 18 based on the recognition result by the preliminary recognition processing unit 65 (ST3: component picking step). Next, the mounting head 18 is moved to align the electronic component 3 above the receiving member 14 (ST4: mounting head positioning step). When the electronic component 3 is held by the holding tool 21 in a normal posture, the mark line ML and the observation line OL match.

  Next, observation of the recognition marks M1 and M2 by the observation unit 15 is executed (ST5: recognition mark observation step). That is, the observation unit controller 64 moves the first mirror 33 and the second mirror 43 below the recognition marks M1 and M2, and observes the recognition marks M1 and M2 using the first camera 31 and the second camera 41. To do. At this time, the observation unit control unit 64 reads the mark distance from the storage unit 61 and adjusts the interval between the first mirror 33 and the second mirror 43 according to the mark distance.

  Here, as shown in FIG. 4A, when a small electronic component 3A having a small mark distance is to be observed, it is necessary to bring the first lens barrel 32 and the second lens barrel 42 close to each other. Since the second lens barrel 42 moves horizontally below the first lens barrel 32, it does not interfere even if both are brought close to each other. Therefore, even when the minute electronic component 3A is an observation target, the first mirror 33 and the second mirror 43 can be positioned below the recognition marks M1 and M2 and observed.

  When a large electronic component 3B having a large mark distance is used as an observation target instead of the electronic component 3A (FIG. 4B), the first mirror 33 is moved in the X2 direction and the second mirror 43 is directed in the X1 direction. The first mirror 33 and the second mirror 43 are aligned below the recognition marks M1 and M2.

  That is, the observation unit 15 according to the present embodiment has a distance from the observation object to the first reflection unit so that the first reflection unit and the second reflection unit do not interfere when the first reflection unit and the second reflection unit are brought close to each other by the moving unit. The distance from the observation object to the second reflecting portion is varied. Thereby, it is possible to observe two targets formed on a wide range of observation objects. Further, since it is only necessary to move the first observation means and the second observation means in one direction, there is no need to provide a mechanism for raising and lowering each observation means, and a wide range of observation objects with a simple configuration. Can be observed.

  If the recognition marks M1 and M2 are observed, the substrate 2 is positioned so that the mounting position set on the edge of the substrate 2 is received by the receiving member 14 (ST6: substrate positioning step). Next, the holding tool 21 is lowered from above the receiving member 14 to crimp the electronic component 3 to the mounting position. Thereby, the electronic component 3 is mounted on the substrate 2 (ST7: electronic component mounting step).

  When mounting the electronic component 3, the position of the electronic component 3 held by the holding tool 21 is recognized by subjecting the observation data to recognition processing by the main recognition processing unit 66. Then, the electronic component 3 is mounted on the substrate 2 after correcting the lowered position or mounting angle of the holding tool 21 based on the recognition result by the recognition processing unit 66.

  The board 2 on which the electronic component 3 is mounted is transported to the downstream apparatus, and the work on the component mounting machine 1 is completed. As described above, the component mounter 1 has a function of mounting the first target and the second target formed on the electronic component 3 as the observation target held by the mounting head 18 on the substrate 2 after observing by the observation unit 15. Have

  By using the observation unit 15 described above, it is possible to cope with observation of the recognition marks M1 and M2 formed on the electronic component 3 having a wide size. Note that the first target and the second target are not limited to the recognition marks M1 and M2, but may be a pair of solder bumps or lead components formed on the electronic component 3. Various objects other than the electronic component 3 may be the object of observation, and the observation unit 15 may be incorporated in an apparatus other than the component mounter 1.

  Next, other embodiments will be described with reference to FIGS. FIG. 6A shows an example in which the positional relationship between the first lens barrel 32 and the second lens barrel 42 is different from that of the present embodiment. That is, in this example, the distance S3 until the light d1 from the electronic component 3 enters the first mirror 33 is different from the distance S4 until the light d2 from the electronic component 3 enters the second mirror 43. When the first lens barrel 32 and the second lens barrel 42 are brought close to each other, the upper end portion 42c of the second lens barrel 42 comes into contact with the outer side surface 32b of the first lens barrel 32. A cylinder 32 and a second lens barrel 42 are provided.

  In this way, the upper end portion 32c, which is the tip portion on the X1 side of the first lens barrel 32, and the upper end portion 42c, which is the tip portion on the X2 side of the second lens barrel 42, are made different from each other. Compared with the case where 32c and 42c are in the same height, the 1st lens barrel 32 and the 2nd lens barrel 42 can be brought closer. As a result, the interval T between the observation visual field by the first camera 31 and the observation visual field by the second camera 41 can be reduced.

  That is, when the first reflecting portion and the second reflecting portion are brought close to each other by the moving means, the end portion (upper end portion 32c) closest to the second reflecting portion and the second reflecting portion in the first reflecting portion. The distance from the observation object to the first reflection part and the distance from the observation object to the second reflection part are made different so that the end part (upper end part 42c) closest to the first reflection part does not interfere with each other. . Thereby, while preventing the interference of the edge part of the 1st reflective part and the edge part of the 2nd reflective part which adjoins most, the 1st reflective part and the 2nd reflective part can be brought closer, It can respond to observation of the 1st target and 2nd target which were formed in the observation object of a wide size.

  FIG. 6B shows an example in which the outer side surface 32b of the first lens barrel 32 and the outer side surface 42b of the second lens barrel 42 in the present embodiment have different shapes. That is, the outer side surface 32g on the X1 side of the first lens barrel 32A and the outer side surface 42g on the X2 side of the second lens barrel 42A both have a shape extending in the vertical direction. In such a case, the outer side surface 32g is the end closest to the second reflecting portion, and the outer side 42g is the end closest to the first reflecting portion.

  Also in this example, an end portion (external side surface 32g) that is closest to the second reflective portion in the first reflective portion and an end portion (external side surface 42g) that is closest to the first reflective portion in the second reflective portion. To prevent interference, the distance between the object to be observed and the first reflecting part is different from the distance from the object to be observed to the second reflecting part, thereby preventing interference between the first reflecting part and the second reflecting part. Thus, it is possible to cope with observation of a wide range of observation objects.

  The present invention is not limited to the embodiments described so far. For example, the reflection direction of light by the first and second reflection units is not limited to the first and second cameras. That is, a third reflection unit is separately provided in the first observation unit, and light from the observation object incident on the first reflection unit is reflected toward the third reflection unit and incident on the third reflection unit. The observed object may be observed by reflecting the reflected light toward the first camera. The same applies to the second observation unit.

  The observation apparatus may be configured to move only one of the first observation unit and the second observation unit. In such a case, the distance between the first reflecting portion and the second reflecting portion is adjusted by moving the movable observation means closer to or away from the non-movable observation means. In addition, the first reflecting portion and the second reflecting portion are moved up and down so that light incident horizontally from the first target and the second target formed on the observation target is reflected on the first reflecting portion and the second reflecting portion. You may apply this invention to the observation apparatus of the structure made to inject into a 1st camera and a 2nd camera via 2 reflection parts.

  In the present embodiment, a component mounting machine configured to crimp an electronic component to a substrate has been described as an example. However, the present invention is applied to a component mounting machine configured to mount an electronic component on an electrode of a substrate regardless of crimping. An apparatus may be applied.

  According to the present invention, it is possible to observe a wide range of observation objects with different distances between two targets with a simple configuration, which is useful in the electronic component mounting field in which an electronic component is mounted on a substrate to produce a mounting substrate. It is.

1 Component mounter 2 Substrate 3 Electronic component (observation object)
3A, 3B Electronic component M1 recognition mark (first target)
M2 recognition mark (second target)
15 Observation unit (observation device)
18 Mounting head 31 1st camera 32 1st lens-barrel (1st reflection part)
32b, 42b, 32g, 42g External side surfaces 32c, 42c Upper end portion 33 First mirror (first reflecting portion)
41 2nd camera 42 2nd lens-barrel 43 2nd mirror (2nd reflection part)
51 Linear guide (moving means)
52 Lead screw (moving means)
53 Motor (moving means)
54a, 54b Nut (moving means)
ML mark line

Claims (12)

An observation device for observing a first target and a second target formed on an observation object,
A first reflecting portion for reflecting light from the first target in a predetermined direction; and light reflected in a predetermined direction by the first reflecting portion is incident to observe the first target. First observation means including one camera;
A second reflecting section for reflecting light from the second target in a predetermined direction; and light reflected in a predetermined direction by the second reflecting section is incident to observe the second target. A second observation means including two cameras;
And a moving means for moving in synchronization with the first observation means and the second observation side direction both the stage along a line connecting said second target and said first target is close to or away from ,
When the first reflecting portion and the second reflecting portion are brought closer to each other by the moving means, the end portion closest to the second reflecting portion in the first reflecting portion and the second reflecting portion as the end closest to the first reflecting portion does not interfere, the distance from the observation object to said first reflecting portion is smaller than the distance from the observation object to the second reflecting portion An observation apparatus characterized by that. The said 1st reflection part and the said 2nd reflection part are moved in parallel along the line which ties the said 1st target and a 2nd target by the said moving means. Observation device. The observation apparatus according to claim 1, wherein a distance from the first reflection unit to the first camera is larger than a distance from the second reflection unit to the second camera. . The first observation means includes a first illumination unit that irradiates illumination light upward, and a first beam that refracts illumination light emitted from the first illumination unit toward the first reflection unit. A splitter, and illuminating the first target with illumination light emitted from the first illumination unit;
The second observation unit includes a second illumination unit that irradiates illumination light upward, and a second beam that refracts illumination light emitted from the second illumination unit toward the second reflection unit. The observation apparatus according to claim 1, further comprising a splitter, wherein the second target is illuminated with illumination light emitted from the second illumination unit. The observation according to any one of claims 1 to 4, wherein the first reflecting portion is inclined at a first angle from a horizontal plane, and the second reflecting portion is inclined at a second angle from the horizontal plane. apparatus. The first observation means further includes a first lens barrel that extends to the first camera while holding the first reflecting portion therein.
The said 2nd observation means further contains the 2nd lens-barrel extended to the said 2nd camera holding the said 2nd reflection part in the inside, The any one of Claim 1 to 5 characterized by the above-mentioned. The observation apparatus described in 1. A component mounter for mounting on a substrate after observing a first target and a second target formed on a component as an observation object held by a mounting head with an observation device,
The observation device includes:
A first reflecting portion for reflecting light from the first target in a predetermined direction; and light reflected in a predetermined direction by the first reflecting portion is incident to observe the first target. First observation means including one camera;
A second reflecting section for reflecting light from the second target in a predetermined direction; and light reflected in a predetermined direction by the second reflecting section is incident to observe the second target. A second observation means including two cameras;
And a moving means for moving in synchronization with the first observation means and the second observation side direction both the stage along a line connecting said second target and said first target is close to or away from ,
When the first reflecting portion and the second reflecting portion are brought closer to each other by the moving means, the end portion closest to the second reflecting portion in the first reflecting portion and the second reflecting portion as the end closest to the first reflecting portion does not interfere, the distance from the observation object to said first reflecting portion is smaller than the distance from the observation object to the second reflecting portion A component mounting machine characterized by that. The said 1st reflection part and the said 2nd reflection part are moved in parallel along the line which connects the said 1st target and a 2nd target by the said moving means, The said 7th aspect is characterized by the above-mentioned. Component mounter. The component mounting according to claim 7 or 8, wherein a distance from the first reflection unit to the first camera is larger than a distance from the second reflection unit to the second camera. Machine. The first observation means includes a first illumination unit that irradiates illumination light upward, and a first beam that refracts illumination light emitted from the first illumination unit toward the first reflection unit. A splitter, and illuminating the first target with illumination light emitted from the first illumination unit;
The second observation unit includes a second illumination unit that irradiates illumination light upward, and a second beam that refracts illumination light emitted from the second illumination unit toward the second reflection unit. The component mounting machine according to claim 7, further comprising a splitter, and illuminating the second target with illumination light emitted from the second illumination unit. The component according to any one of claims 7 to 10, wherein the first reflecting portion is inclined at a first angle from a horizontal plane, and the second reflecting portion is inclined at a second angle from the horizontal plane. Mounting machine. The first observation means further includes a first lens barrel that extends to the first camera while holding the first reflecting portion therein.
The second observation unit further includes a second lens barrel that extends to the second camera while holding the second reflecting portion therein. The component mounting machine described in 1.

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