JP6020968B2 - Polishing jig - Google Patents

Description

  The present invention relates to a polishing jig for holding a sample when a sample for cross-sectional observation is polished by a polishing platen. In particular, the present invention relates to a polishing jig used when mechanical polishing is performed up to the vicinity of an observation portion of a sample as a pretreatment for etching a cross-section observation portion of the sample with an ion beam.

  In order to observe the internal structure of a sample, for example, to detect abnormalities or foreign matters near the surface of the sample, the cross section of the sample is observed with, for example, a scanning electron microscope. In cross-sectional observation, the cut sample is embedded in a resin, cut into a rectangular plate shape with a band saw or the like, and then the cross-section is polished and etched to produce a cross-sectional observation sample. For the etching, an ion milling apparatus (for example, a cross section polisher (CP) apparatus or a focused ion beam (FIB) apparatus) that performs etching by irradiating an ion beam is used. (See Patent Documents 1 to 4.)

  When the sample cross section is etched using an ion milling apparatus to expose the cross section observation portion, mechanical polishing is performed as a pretreatment to the vicinity of the observation portion of the sample. In mechanical polishing, a polishing jig that holds the sample and a polishing surface plate are used, the sample is attached to the polishing jig, the polishing jig is placed on the polishing surface plate, and the surface to be polished of the sample is polished by the polishing surface plate. Polish against the surface. In addition, when etching a sample cross section with an ion milling apparatus, since the processing depth is about several hundred μm to 1 mm, this polishing is performed not only on the cross section of the sample but also on the flat surface (surface) of the sample, The thickness of the resin on the surface is reduced.

JP 2009-244240 A JP 2009-74933 A JP 2005-26449 A Japanese Patent Laid-Open No. 11-251385

  As the polishing jig, a precision polishing jig (for example, “Kenma-kun” manufactured by ITES) or a parallel polishing jig is used.

  FIG. 17 is a diagram illustrating an example of a precision polishing jig. The polishing jig 100 includes a main body 110 and a pasting block 120 to which a sample is pasted, and a holding portion 115 that holds the pasting block 120 is provided at a tip corner of the main body 110. The sticking block 120 has a substantially rectangular parallelepiped shape, is housed in the holding portion 115 so that two orthogonal surfaces of the sticking block 120 are exposed, and is attached to the main body 110 (holding portion 115) with the mounting screw 125. In the state where the sticking block 120 is held by the holding portion 115, as shown in FIG. 18, one of the two orthogonal faces of the sticking block 120 (the lower face in the figure) is a polishing surface plate. The opposite surface 121 faces the polishing surface 151 of 150, and the other surface becomes an orthogonal surface 122 orthogonal to the polishing surface. Further, the main body 110 has a pair of legs 130 whose heights can be adjusted by the micrometer 131, and when the sample S is polished by the polishing surface plate 150, the tips of the both legs 130 are the polishing surfaces of the polishing surface plate 150. Contact 151. When the flat surface (surface) of the sample S is polished, as shown in FIG. 18A, the back surface of the sample S is attached to the facing surface 121 of the sticking block 120 with wax or the like, and the surface of the sample is covered. When the cross section of the sample S is polished as a polished surface, as shown in FIG. 18B, the back surface of the sample S is attached to the orthogonal surface 122 of the sticking block 120 with wax or the like, and the cross section of the sample S is covered. A polished surface. The polishing jig 100 is structured such that when the sample S is polished by the polishing surface plate 150, the sample S and the both leg portions 130 are supported at three points. By adjusting the height of each leg portion 130, the polishing is performed. It is possible to adjust the surface to be polished of the sample S parallel to the surface 151.

  FIG. 19 is a diagram illustrating an example of a parallel polishing jig. The polishing jig 200 includes a columnar main body 210, a cylindrical holder 220 that houses the main body 210 and holds it slidably, and a sticking block 120 to which a sample is attached. The tip of the main body 210 is formed in a flat surface, and the sticking block 120 is attached with an adhesive tape or the like. In addition, a flange portion 230 is provided on one end side of the holder 220. When the sample S is polished by the polishing surface plate 150 as shown in FIG. It is in contact with the polishing surface 151 and is formed parallel to the polishing surface 151. When polishing the flat surface (front surface) of the sample S, as shown in FIG. 20A, the back surface of the sample S is attached to the facing surface 121 of the sticking block 120 with wax or the like, and the surface of the sample is covered. When the cross section of the sample S is polished as a polished surface, as shown in FIG. 20B, the back surface of the sample S is attached to the orthogonal surface 122 of the sticking block 120 with wax or the like, and the cross section of the sample S is covered. A polished surface. In this polishing jig 200, the sample surface S with respect to the polishing surface 151 is formed by forming the attachment surface 215 at the tip of the main body 210 to which the sticking block 120 is attached and the lower surface 231 of the flange portion 230 of the holder 220 in parallel. It is possible to keep the surface to be polished in a parallel state.

  However, in the conventional polishing jig, when polishing the flat surface and the cross section of the sample, it is necessary to remove the sample from the sticking block and paste it again, which takes time and labor. Further, since this operation is performed manually, it is difficult to polish the sample so that the plane and the cross section of the sample are orthogonal, for example, the thickness of the wax is not uniform. When etching a sample cross section with an ion milling apparatus, it is desirable that the surface of the sample covered with the shielding plate and the cross section be substantially orthogonal.

  The present invention has been made in view of the above circumstances, and one of its purposes is to switch the polished surface of the sample between a flat surface and a cross section in a state where the sample is adhered to the sticking block. It is to provide a holding jig.

  The holding jig of the present invention holds a sample when the cross-section observation sample is polished by a polishing surface plate. The holding jig of the present invention includes a main body, a sticking block to which a sample is stuck, a rotating part, and a fixing part. The rotating part holds the sticking block and rotates around the rotation axis with respect to the main body. The fixing portion is connected to the rotating portion via the rotating shaft and is fixed to the main body. The rotating portion includes a first surface facing the polishing surface of the polishing surface plate, a second surface orthogonal to the surface, and a third surface facing the corners of the first surface and the second surface. And have. A holding portion for holding the pasting block is provided at a corner portion between the first surface and the second surface. The rotation axis intersects the third surface and is inclined by 45 ° with respect to the polishing surface. Then, the surface to be polished of the sample can be switched between a flat surface and a cross section by rotating the rotating portion by 180 °.

  According to the holding jig of the present invention, the surface to be polished of the sample can be switched between a flat surface and a cross section by rotating the rotating portion holding the sticking block by 180 ° about the rotation axis. Therefore, when polishing the flat surface and the cross section of the sample, there is no need to replace the sample, and labor and time can be saved. In addition, since the surface to be polished of the sample can be switched between a flat surface and a cross section in a state where the sample is attached to the sticking block, it is easy to polish the flat surface and the cross section of the sample to be orthogonal to each other. is there.

  As one form of the holding jig of the present invention, the fixed portion has a contact surface that contacts the third surface of the rotating portion, and the rotation axis is orthogonal to the third surface. .

  According to this configuration, when the third surface of the rotating part comes into contact with the contact surface of the fixed part, the rotating part comes into surface contact with the fixed part when the sample is polished by the polishing surface plate. It is possible to prevent rattling. Further, the rotating part can be rotated in a state where the third surface of the rotating part is in contact with the contact surface of the fixed part.

  As one form of the holding jig of the present invention, it is possible to include a stopper that fixes the rotating portion at a rotating position when the polished surface of the sample is a plane or a cross section.

  According to this configuration, the rotation of the rotating part can be prevented when the sample is polished by the polishing surface plate by fixing the rotation of the rotating part by the stopper.

  As one form of the holding jig of the present invention, the sticking block is a sample stage of an ion milling device.

  Conventionally, after polishing, a sample is removed from a sticking block of a polishing jig, the sample is attached to a sample stand of an ion milling device, and the sample stand is placed on a sample holder of the ion milling device. According to this configuration, it is possible to remove the sticking block from the holding jig after polishing and install the sticking block on the sample holder of the ion milling apparatus as it is, and perform polishing and etching continuously. Can do. Further, it is possible to etch the sample cross section with an ion milling apparatus while maintaining the sample polished so that the plane and the cross section are orthogonal to each other.

  As one form of the holding jig of the present invention, an integrated object of the rotating part and the fixed part can be attached to and detached from the main body.

  According to this configuration, since the integral part of the rotating part and the fixed part is detachable, the integral part can be reused or attached to another holding jig.

  As one form of the holding jig of the present invention, the stopper is configured to include a through hole, a positioning hole, and a fixing member. The through hole penetrates one of the rotating part and the fixed part toward the other. The positioning hole is provided in the other third surface or contact surface of the rotating portion and the fixed portion. The fixing member is disposed in the through hole, and the tip is screwed so as to be able to advance and retract with respect to the positioning hole. The positioning hole is provided at a position on the extension of the through hole and at a position 180.degree. Rotationally symmetric about the rotation axis with respect to the position on the extension.

  According to this structure, a stopper can be comprised with a through-hole, a positioning hole, and a fixing member, and rotation of a rotation part can be fixed in a predetermined position. Specifically, by screwing the fixing member and advancing the tip of the fixing member into the positioning hole, the rotation of the rotating part can be fixed, and conversely, the fixing member is rotated in the direction opposite to the screwing direction, The rotating portion can be rotated by retracting the tip of the fixing member from the front.

  As one form of the holding jig of the present invention, the fixing member has a cylindrical shape, a protrusion that can be projected and retracted from the tip portion at the tip portion of the fixing member, and an elastic material that urges the protrusion in the protruding direction, Have Moreover, it is mentioned that the positioning hole is formed in a conical shape. The protrusion has a spherical end surface. The elastic material is built in the fixing member.

  According to this configuration, when the rotating portion is rotated, when the distal end of the fixing member faces the positioning hole, the projection enters the positioning hole from the distal end portion of the fixing member due to the urging of the elastic material. In this state, when the fixing member is screwed and the tip of the fixing member is advanced into the positioning hole, the protrusion having a spherical shape on the tip surface is guided along the inner surface of the conical positioning hole to the center of the hole, and The center axis coincides with the center of the positioning hole. That is, positioning of the rotating part with respect to the fixed part is facilitated and positioning accuracy is also improved. In addition, when the rotating part is rotated with the tip of the fixing member retracted from the positioning hole, the spherical protrusion is pushed into the tip of the fixing member along the inner surface of the conical positioning hole. There is also little obstruction of the rotation. As the fixing member, for example, a ball plunger incorporating a spring can be used.

  As one form of the holding jig of the present invention, it is mentioned that a handle for screwing operation is provided at the rear end portion of the fixing member,

  According to this configuration, the fixing member can be manually screwed in by the handle without using a tool such as a screwdriver or a wrench. The shape of the handle is not particularly limited as long as it can be screwed, that is, rotated, and for example, a disc shape or a lever shape can be adopted.

  In the holding jig of the present invention, the surface to be polished of the sample can be switched between a flat surface and a cross section by rotating a rotating portion holding the sticking block by 180 ° about the rotation axis. Therefore, when polishing the flat surface and the cross section of the sample, there is no need to replace the sample, and labor and time can be saved.

FIG. 3 is an explanatory view showing a holding jig according to Example 1. It is explanatory drawing which shows the state which grind | polishes the plane of a sample using the holding jig which concerns on Example 1, (A) is a side view, (B) is a partial enlarged view. 6 is an explanatory view showing a state in which a cross section of a sample is polished using the holding jig according to Example 1. FIG. (A) is a side view and (B) is a partially enlarged view. 6 is an explanatory view showing a holding jig according to Embodiment 2. FIG. 6 is an explanatory view showing a state in which a flat surface of a sample is polished using a holding jig according to Example 2. FIG. 6 is an explanatory view showing a state in which a cross section of a sample is polished using a holding jig according to Example 2. FIG. 10 is an explanatory view showing a holding jig according to Embodiment 3. FIG. It is explanatory drawing which shows the structure of the rotation part and fixing | fixed part in the holding jig which concerns on Example 3, (A) is a side view, (B) is the figure seen from the arrow B in figure (A). It is. It is explanatory drawing which shows the fixing | fixed part shown in FIG. 8, (A) is a side view, (B) is the figure seen from arrow B in figure (A), (C) is in figure (A). It is the figure seen from arrow C. It is explanatory drawing which shows the rotation part shown in FIG. 8, (A) is a side view, (B) is the figure seen from arrow B in figure (A), (C) is in figure (A). It is the figure seen from arrow C. It is a figure explaining operation | movement of the fixing member which comprises the stopper in the holding jig which concerns on Example 3, (A) is a figure which shows the state in which a positioning hole is located on extension of a through-hole, (B) The figure which shows the state which the front-end | tip of the fixing member advanced to the positioning hole, (C) is a figure which shows the state where the positioning hole is not located on extension of a through-hole. FIG. 9 is an explanatory diagram illustrating a configuration of a holding unit in a holding jig according to a third embodiment. FIG. 10 is an explanatory diagram illustrating a configuration of a mounting screw in a holding jig according to a third embodiment. It is explanatory drawing which shows the structure of the holding plate in the holding jig which concerns on Example 3, (A) is a front view, (B) is sectional drawing which follows the BB line in figure (A), (C ) Is a cross-sectional view taken along line CC in FIG. It is explanatory drawing which shows the attachment screw in the holding jig which concerns on Example 3, and the attachment method of a presser plate. It is explanatory drawing which shows the example which provides a handle in a fixing member, (A) is a figure which shows the case where a disk-shaped handle is provided, (B) is a figure which shows the case where a lever-shaped handle is provided. It is explanatory drawing which shows an example of the conventional precision grinding | polishing jig | tool. It is explanatory drawing which shows the state which grind | polishes a sample using the grinding | polishing jig | tool shown in FIG. 17, (A) is the state which grind | polishes the plane of a sample, (B) shows the state which grind | polishes the cross section of a sample, respectively. . It is explanatory drawing which shows an example of the conventional parallel grinding | polishing jig | tool. It is explanatory drawing which shows the state which grind | polishes a sample using the grinding | polishing jig | tool shown in FIG. 19, (A) shows the state which grind | polishes the plane of a sample, (B) shows the state which grind | polishes the cross section of a sample, respectively. .

  Hereinafter, embodiments of the present invention will be described with reference to the drawings. The same reference numerals in the figure indicate the same names.

<Example 1>
With reference to FIGS. 1-3, the grinding | polishing jig | tool 1 which concerns on Example 1 is demonstrated. The polishing jig 1 is the same as the conventional precision polishing jig 100 described with reference to FIGS. 17 and 18 in that it includes a main body 110 and a sticking block 120. However, it differs from the conventional precision polishing jig 100 in that it includes a rotating part 10 that rotates about the rotating shaft 30 and a fixing part 20 that is fixed to the main body 110, and the sticking block 120 is attached to the rotating part 10. Is retained. The rotating part 10 and the fixed part 20 are connected via a rotating shaft 30, and the rotating part 10 can rotate around the rotating shaft 30 with respect to the main body 110 (fixed part 20). In this example, the sample block of the ion milling apparatus is used for the sticking block 120.

  As shown in FIG. 2, the rotating unit 10 includes a first surface 11 facing the polishing surface 151 of the polishing surface plate 150, a second surface 12 orthogonal to the surface, a first surface 11 and a second surface. And a third surface 13 opposite to the corner of the surface 12. Further, a holding portion 15 (see FIG. 1) for holding the sticking block 120 is provided at a corner portion between the first surface 11 and the second surface 12. In this example, a groove for storing the sticking block 120 is formed, and this groove is used as the holding portion 15. The sticking block 120 is housed in the holding part 15 and attached to the rotating part 10 (holding part 15) by means of mounting screws 25.

  On the other hand, as shown in FIG. 2, the fixed portion 20 has an abutment surface 23 that abuts on the third surface 13 of the rotating portion 10, and is provided at the tip corner of the main body 110. In this example, each of the rotating part 10 and the fixed part 20 is a triangular prism-like block having an end surface of a substantially right isosceles triangle, and an integrated object obtained by combining the rotating part 10 and the fixed part 20 has a substantially cubic shape. . The fixing unit 20 may be fixed to the main body 110 by welding or an adhesive, or may be detachably attached by an adhesive tape or screwing. In the latter case, the integral part of the rotating part 10 and the fixed part 20 can be easily attached and detached.

  The rotating shaft 30 is provided so as to intersect the third surface 13 of the rotating unit 10 and to be inclined by 45 ° with respect to the polishing surface 151 of the polishing surface plate 150 (see FIG. 2). In this example, the rotation shaft 30 is orthogonal to the third surface 13 (contact surface 23) and is provided at the center of the third surface 13 (contact surface 23).

  With such a configuration, the surface to be polished of the sample S can be switched between a flat surface and a cross section by rotating the rotating unit 10 by 180 °. Specifically, when the surface (surface) of the sample S is polished, the surface of the sample S is rotated so that the surface of the sample S faces the polishing surface 151 of the polishing surface plate 150 as shown in FIG. The part 10 is positioned on the first surface 11 side. The rotation position of the rotation unit 10 at this time is set as a reference position. On the other hand, when the cross section of the sample S is polished, the first surface 11 of the rotating unit 10 is orthogonal to the polishing surface 151 as shown in FIG. 3 by rotating the rotating unit 180 by 180 ° from the reference position. Thus, the cross section of the sample S is made to face the polishing surface 151.

  In this example, the rotating portion 10 is provided with a through hole 16 toward the fixed portion 20. Further, the fixing portion 20 has positioning holes 26 at positions corresponding to the through holes 16 when the rotating portion 10 is at the reference position and positions corresponding to the through holes 16 when the rotating portion 10 is rotated by 180 °. Is provided. Specifically, on the abutment surface 23 of the fixed portion 20, the positioning hole 26 is a position on the extension of the through hole 16 and a position rotationally symmetric about the rotation axis 30 with respect to the position on the extension. Are provided symmetrically. A fixing screw 27, which is a fixing member, is inserted into the through hole 16, and the tip of the fixing screw 27 is inserted into the positioning hole 26, thereby functioning as a stopper for fixing the rotation of the rotating portion 10. That is, by screwing the fixing screw 27, the tip of the fixing screw 27 advances into the positioning hole 26, and the rotation of the rotating portion 10 is fixed. On the other hand, when the fixing screw 27 is rotated in the direction opposite to the screwing direction, the tip of the fixing screw 27 is retracted from the positioning hole 26 and the rotating portion 10 can be rotated.

  Next, a usage example of the polishing jig 1 will be described. First, a sample for cross-sectional observation embedded in a resin and cut out into a rectangular plate shape is prepared. The sticking block is placed on a hot plate, wax is applied to the sticking block, and then the back surface of the sample is placed and stuck on the sticking block. And the block for sticking which stuck the sample is accommodated in the holding | maintenance part of a rotation part, and is attached.

  When observing a cross section at a specific position of the sample, as shown in FIG. 2, the rotation of the rotating unit 10 is fixed so that the surface of the sample S becomes a surface to be polished. Then, the polishing jig 1 is placed on the polishing surface plate 150, and the resin on the surface of the sample S is polished so that the surface of the sample S embedded in the resin can be seen through. As the polishing surface plate 150, a polishing surface plate 150 on which polishing paper (sand paper) or a diamond wrapping film is mounted can be used.

  Next, the rotating unit 10 is rotated 180 ° from the state of FIG. 2, and the surface to be polished of the sample S is switched to a cross section as shown in FIG. 3 to fix the rotation of the rotating unit 10. Then, while confirming the polishing portion of the sample S, the cross section of the sample S is polished to the vicinity of a specific position. More specifically, finishing is performed so as to leave a processing portion (for example, about 25 μm to 50 μm) that is finally etched by an ion beam.

  Finally, the rotating unit 10 is rotated 180 ° again from the state of FIG. 3, and the surface to be polished of the sample S is switched to a flat surface (surface) as shown in FIG. 2 to fix the rotation of the rotating unit 10. Then, the resin on the surface of the sample S is polished so that the thickness of the resin on the surface is reduced to a certain level (eg, 100 μm to 150 μm). By reducing the thickness of the resin on the surface, the processing depth can be ensured and the processing time can be shortened when etching is finally performed with an ion beam.

  After polishing, remove the sticking block 120 from the polishing jig 1 (rotating unit 10), place the sticking block 120 on the sample holder of the ion milling device, and etch the sample cross section to a specific position with the ion milling device. Observe with a scanning electron microscope.

<Example 2>
With reference to FIGS. 4-6, the grinding | polishing jig | tool 2 which concerns on Example 2 is demonstrated. The polishing jig 2 is the same as the conventional parallel polishing jig 200 described with reference to FIGS. 19 and 20, except that it includes a main body 210, a holder 220, and a pasting block 120. However, like the polishing jig 1 of the first embodiment described with reference to FIGS. 1 to 3, the rotating portion 10 and the fixed portion 20 are different from the conventional parallel polishing jig 200 in that the rotating portion 10 includes The sticking block 120 is held. In this example, the integral part of the rotating part 10 and the fixing part 20 described in the first embodiment is attached so that the fixing part 20 is fixed to the attachment surface 215 of the distal end part of the main body 210. Since the fixing unit 20 and the pasting block 120 are the same as those described in the first embodiment, description thereof is omitted.

  In this polishing jig 2, as in the polishing jig 1 of the first embodiment, the surface to be polished of the sample S can be switched between a flat surface and a cross section by rotating the rotating portion 10 by 180 °. Specifically, when polishing the flat surface (surface) of the sample S, the surface of the sample S is rotated so that the surface of the sample S faces the polishing surface 151 of the polishing surface plate 150 as shown in FIG. The part 10 is positioned on the first surface 11 side. On the other hand, when polishing the cross section of the sample S, the first surface 11 of the rotating unit 10 is perpendicular to the polishing surface 151 by rotating the rotating unit 10 by 180 °, as shown in FIG. The cross section of the sample S is opposed to the polishing surface 151.

  The use example of this polishing jig 2 is also substantially the same as the polishing jig 1 of Example 1, but it is difficult to polish the polishing jig 2 while confirming the polishing portion of the sample S. It may be used when the position accuracy of the observation location is not particularly questioned.

<Example 3>
With reference to FIGS. 7-15, the grinding | polishing jig | tool 3 which concerns on Example 3 is demonstrated. The polishing jig 3 has a basic configuration described with reference to FIGS. 1 to 3 in that the polishing jig 3 includes a rotating portion 10 that rotates about a rotating shaft 30 and a fixing portion 20 that is fixed to the main body 110. The same as the polishing jig 1 of Example 1. Below, it demonstrates centering on difference with the grinding | polishing jig | tool 1 of Example 1, and the overlapping description is abbreviate | omitted.

  As shown in FIG. 7, the polishing jig 3 is detachably attached to the main body 110 by a screw-like unitary body that is a combination of the rotating part 10 and the fixed part 20. Specifically, as shown in FIG. 8 (A), a mounting piece 21 is provided at the rear end of the fixing portion 20, and the mounting piece 21 is fitted into the holding portion 115 (see FIG. 17) of the main body 110 to be attached. The fixing portion 20 is attached to the main body 110 by screwing with the use screw 125. Further, in this example, the rotating portion 10 is a triangular prism block having an end surface of a substantially right isosceles triangle, and the fixing portion 20 has a substantially pentagonal end surface obtained by cutting a triangular prism (rotating portion 10) from a cube. It is a pentagonal block.

  In the polishing jig 1 according to the first embodiment, as shown in FIGS. 2 and 3, the through hole 16 of the rotating portion 10, the positioning hole 26 of the fixing portion 20, and the fixing screw 27 disposed in the through hole 16 are used. The example which comprises a stopper was shown. In the polishing jig 3, an example in which the through hole 16 is provided in the fixed portion 20 and the positioning hole 26 is provided in the rotating portion 10 will be described.

  As shown in FIG. 9, the fixed portion 20 is provided with a shaft hole 32 passing through the center of the contact surface 23 and orthogonal to the contact surface 23, and the rotation shaft 30 (see FIG. 8). (See (A)). Here, a recess 22 is formed at the corner between the upper surface 20 u located on the opposite side of the first surface 11 of the rotating part 10 and the back surface 20 b facing the main body 110. A shaft hole 32 is provided.

  The fixing portion 20 is provided with a through-hole 16 from the upper surface 20u toward the rotating portion 10, and a fixing member 40 (see FIG. 8A) is disposed in the through-hole 16. Here, the through hole 16 is provided in parallel with the shaft hole 32 (rotating shaft 30) and is orthogonal to the contact surface 23.

  On the other hand, as shown in FIG. 10, the rotating portion 10 is provided with a shaft hole 31 at the center of the third surface 13 so as to be orthogonal to the third surface 13. The tip of the rotary shaft 30 (see FIG. 8A) inserted through the shaft hole 32 of the portion 20 is fitted. That is, the rotation shaft 30 is fitted into the shaft hole 32 of the fixed portion 20 and the shaft hole 31 of the rotation portion 10, so that the rotation portion 10 and the fixed portion 20 are rotatably connected via the rotation shaft 30. . Further, the rotating shaft 30 is inclined by 45 ° with respect to the polishing surface 151 of the polishing surface plate 150 in the same manner as the polishing jig 1 of the first embodiment.

  Further, the rotating portion 10 has a through-hole of the fixing portion 20 on the third surface 13 when the first surface 11 shown in FIG. 8A is at a reference position facing the polishing surface 151 of the polishing surface plate 150. A positioning hole 26 is provided at a position on the extension of 16 and a position 180 degrees rotationally symmetric with respect to this position about the shaft hole 31 (rotating shaft 30) (see FIG. 10). Here, each positioning hole 26 is formed in a conical shape while being orthogonal to the third surface 13.

  The through hole 16, the positioning hole 26, and the fixing member 40 constituting the stopper for fixing the rotation of the rotating part 10 in the polishing jig 3 will be described in more detail with reference to FIG. A female screw is formed on the inner peripheral surface of the through hole 16, and a cylindrical fixing member 40 having a male screw formed on the outer peripheral surface is screwed into the through hole 16. The fixing member 40 has a structure in which a protrusion (ball) 41 that can be projected and retracted is disposed at the tip, and an elastic material (spring) 42 that urges the protrusion 41 in the protruding direction is built-in. The elastic member 42 can be retracted against the bias of the elastic member 42. A wrench hole is formed at the rear end of the fixing member 40. Here, a ball plunger is used for the fixing member 40.

  When the positioning hole 26 is positioned on the extension of the through hole 16, that is, when the distal end of the fixing member 40 faces the positioning hole 26, the protrusion 41 protrudes from the distal end portion of the fixing member 40 by the urging of the elastic material 42. (See FIG. 11A). In this state, when the fixing member 40 is screwed and the tip of the fixing member 40 is advanced into the positioning hole 26, the rotation of the rotating portion 10 is fixed (see FIG. 11B). At this time, the ball-shaped protrusion 41 is guided to the center of the positioning hole 26 along the conical inner surface of the positioning hole 26. Therefore, the center axis of the fixing member 40 (through hole 16) coincides with the center of the positioning hole 26, and the positioning accuracy of the rotating part 10 with respect to the fixing part 20 can be increased. When the fixing member 40 is rotated in the direction opposite to the screwing direction from the state in which the tip of the fixing member 40 has advanced into the positioning hole 26 (see FIG. 11B), the tip of the fixing member 40 protrudes from the positioning hole 26. The rotation unit 10 can be rotated. On the other hand, since the projection 41 can be retracted against the urging of the elastic member 42, the projection 41 is fixed to the fixing member 40 by the third surface 13 when the positioning hole 26 is not positioned on the extension of the through hole 16. It is pushed into the tip (see FIG. 11C). Further, when the rotating portion 10 is rotated from a state in which the positioning hole 26 is positioned on the extension of the through hole 16 (see FIG. 11A), the ball-shaped protrusion 41 is pressed against the inner surface of the conical surface of the positioning hole 26 and fixed. The protrusion 41 can be pulled out from the positioning hole 26 by being pushed into the member 40. In particular, since the protrusion 41 has a ball shape, the frictional resistance can be reduced.

  Next, the configuration of the holding portion 15 in the polishing jig 3 will be described in detail. FIG. 12 is a partial view of the polishing jig 3 as viewed from the first surface 11 side of the rotating unit 10. The holding unit 15 is configured by a groove formed in a corner portion between the first surface 11 and the second surface 12 of the rotating unit 10, and is inserted from the side surface of the rotating unit 10 toward the holding unit 15. Affixing block 120 is attached with mounting screw 25. A holding plate 50 is attached to the tip of the mounting screw 25 on the holding portion 15 side, and this holding plate 50 is disposed in the holding portion 15.

  As shown in FIG. 10, the rotating portion 10 is provided with an insertion hole 15h through which the mounting screw 25 is inserted, and a female screw is formed in the insertion hole 15h. As shown in FIG. 13, the mounting screw 25 has a male screw formed on the outer peripheral surface of the shaft portion 25t, and is screwed into the insertion hole 15h so as to advance and retreat. The distal end portion of the mounting screw 25 has a thin shaft portion 25n having a small diameter, and a large diameter portion 25d having a diameter larger than that of the thin shaft portion 25n is provided at the distal end. A wrench hole is formed in the rear end portion of the mounting screw 25.

  As shown in FIG. 14, the holding plate 50 has a groove 51 having a substantially T-shaped cross section extending from one end surface to the other end surface, and the other end surface side is closed. The holding plate 50 is attached to the mounting screw 25 by inserting the large diameter portion 25d provided at the tip of the mounting screw 25 into the wide portion of the T-shaped groove 51. Then, by screwing the mounting screw 25 into the insertion hole 15h of the rotating part 10 and moving the mounting screw 25 into the holding part 15, the presser plate 50 presses the sticking block 120 (see FIG. 12), The sticking block 120 can be held between the holding portions 15.

  In this example, as shown in FIG. 15, after attaching the holding plate 50 to the mounting screw 25, the mounting screw 25 and the holding plate are inserted by inserting the mounting screw 25 from the holding portion 15 side into the insertion hole 15h. 50 is attached to the rotating part 10. Further, the presser plate 50 is arranged on the holding part 15 so that the opening of the T-shaped groove 51 of the presser plate 50 faces the outside of the holding part 15, so that the presser board 50 is attached to the mounting screw 25 (holding part 15). To prevent falling off.

  In the polishing jig 3 according to the third embodiment described above, the case where the wrench hole is formed at the rear end portion of the fixing member 40 has been described as an example, but a + groove or a − groove may be formed instead of the wrench hole. In addition, a handle 45 for screwing operation may be provided at the rear end portion of the fixing member 40 as shown in FIG. Examples of the handle 45 include a disc-shaped handle as shown in FIG. 16A and a lever-shaped handle as shown in FIG. By providing such a handle 45 on the fixing member 40, the screwing operation of the fixing member 40 can be manually performed without using a tool such as a screwdriver or a wrench. Further, by adjusting the screw pitches of the male screw on the outer peripheral surface of the fixing member 40 and the female screw (see FIG. 11) on the inner peripheral surface of the through-hole 16, the tip of the fixing member 40 is adjusted to the extent that the fixing member 40 is rotated halfway. It is preferable that the portion can be advanced into the positioning hole 26. As a result, when the fixing member 40 is screwed in by using a wrench or a lever-like handle 45 (see FIG. 16B) provided on the fixing member 40, the rotation is performed by a half turn. The rotation of the part 10 can be fixed.

  In addition, this invention is not limited to embodiment mentioned above, It can change suitably in the range which does not deviate from the summary of this invention. For example, the configuration of the rotating unit 10 and the fixed unit 20 described in the third embodiment can be applied to the polishing jig 2 according to the second embodiment.

  The polishing jig of the present invention can be used when mechanical polishing is performed up to the vicinity of the observation position of the sample as a pretreatment for etching the cross-section observation position of the sample with an ion beam.

1,2,3 Polishing jig
10 Rotating part 20 Fixed part 30 Rotating shaft
11 First surface 12 Second surface 13 Third surface
15 Holding part 25 Mounting screw 23 Contact surface
16 Through hole 26 Positioning hole 27 Fixing screw
20u Top 20b Back
21 Mounting piece 22 Recess
31 Shaft hole 32 Shaft hole
40 Fixing member 41 Protrusion 42 Elastic material
45 Handle
15h insertion hole
25t Shaft part 25n Thin shaft part 25d Large diameter part
50 Presser plate 51 T-shaped groove
100 precision polishing jig
110 Body 120 Affixing block
115 Holding part 125 Mounting screw
121 Opposing surface 122 Orthogonal surface
130 Leg 131 Micrometer
150 Polishing surface plate 151 Polishing surface
200 Parallel polishing jig
210 Body 220 Holder 230 Flange
215 Mounting surface 231 Bottom surface
S sample

Claims (8)

A polishing jig for holding the sample when the sample for cross-sectional observation is polished by a polishing platen,
The body,
An affixing block to which the sample is affixed;
A rotating part that holds the sticking block and rotates about a rotation axis with respect to the main body;
A fixed portion connected to the rotating portion via the rotating shaft and fixed to the main body;
The rotating portion includes a first surface facing the polishing surface of the polishing platen, a second surface orthogonal to the surface, and a third surface facing the corner portion of the first surface and the second surface. And has a surface
A holding portion for holding the pasting block is provided at a corner portion between the first surface and the second surface,
The rotation axis intersects the third surface and is inclined by 45 ° with respect to the polishing surface;
A polishing jig capable of switching the polished surface of the sample between a flat surface and a cross section by rotating the rotating portion by 180 °. The fixed portion has a contact surface that contacts the third surface of the rotating portion;
The polishing jig according to claim 1, wherein the rotation axis is orthogonal to the third surface.   The polishing jig according to claim 1, further comprising a stopper that fixes the rotating portion at a rotation position when a surface to be polished of the sample is a plane or a cross section.   The polishing jig according to claim 1, wherein the sticking block is a sample stage of an ion milling device.   The polishing jig according to any one of claims 1 to 4, wherein the integral part of the rotating part and the fixed part is detachable from the main body. The stopper is
A through-hole penetrating toward one of the rotating part and the fixed part;
A positioning hole provided in the other third surface or contact surface of the rotating portion and the fixed portion;
A fixing member that is disposed in the through-hole and has a tip screwed to be movable back and forth with respect to the positioning hole.
4. The polishing jig according to claim 3, wherein the positioning hole is provided at a position on the extension of the through-hole and a position that is 180 ° rotationally symmetric about the rotation axis with respect to the position on the extension. . The fixing member is cylindrical,
At the distal end of the fixing member, the distal end surface has a spherical shape, and has a protrusion that can be projected and retracted from the distal end, and an elastic material that is built in the fixing member and biases the protrusion in the protruding direction,
The polishing jig according to claim 6, wherein the positioning hole is formed in a conical shape.   The polishing jig according to claim 6 or 7, wherein a handle for screwing operation is provided at a rear end portion of the fixing member.

Images