CN108747805A - A kind of jig for grinding - Google Patents
A kind of jig for grinding Download PDFInfo
- Publication number
- CN108747805A CN108747805A CN201810855696.4A CN201810855696A CN108747805A CN 108747805 A CN108747805 A CN 108747805A CN 201810855696 A CN201810855696 A CN 201810855696A CN 108747805 A CN108747805 A CN 108747805A
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- CN
- China
- Prior art keywords
- jig
- screw
- grinding
- sample
- groove
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000227 grinding Methods 0.000 title claims abstract description 87
- 239000004677 Nylon Substances 0.000 claims description 17
- 229920001778 nylon Polymers 0.000 claims description 17
- 238000000034 method Methods 0.000 description 8
- 238000004458 analytical method Methods 0.000 description 6
- 230000000694 effects Effects 0.000 description 4
- 239000004831 Hot glue Substances 0.000 description 3
- 244000137852 Petrea volubilis Species 0.000 description 3
- 230000001066 destructive effect Effects 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 3
- 239000012188 paraffin wax Substances 0.000 description 3
- 239000011347 resin Substances 0.000 description 3
- 229920005989 resin Polymers 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 238000012546 transfer Methods 0.000 description 2
- 238000005299 abrasion Methods 0.000 description 1
- 230000001276 controlling effect Effects 0.000 description 1
- 230000002596 correlated effect Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000002224 dissection Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000004452 microanalysis Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 230000008092 positive effect Effects 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/27—Work carriers
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Sampling And Sample Adjustment (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Abstract
The present invention provides a kind of jig for grinding, it supports to grind the multi-panel of electronic component products, electronic component products can be observed in grinding, its is simple in structure, it is at low cost, it is easy to use, it is applied widely, the front of the jig body is divided into a left side by the front of the jig body equipped with straight slot, right gripping block, the left side, the lower end of right gripping block is respectively equipped with groove, sample, which sticks seat, can be embedded in the groove, the groove extends to the left side, the leading flank that the front side of right gripping block enables the sample to stick seat exposes from the groove, lock screw laterally penetrates the left side, right gripping block, it rotates the lock screw and enables to the left side, right gripping block clamps the sample and sticks seat, the upper end of the jig body is provided with universal horizontal instrument.
Description
Technical field
The present invention relates to the FAILURE ANALYSIS TECHNOLOGY field of electronic component manufacturing more particularly to a kind of jig for grinding.
Background technology
Electronic component easily destroys in equipment running process, therefore about the destructive physics of electronic component
It has a very important role in terms of analyzing operation and maintenance for relevant device, and the matter for improving electronic component
Amount and using effect also have a highly important positive effect, the Destructive Physical Analysis of electronic component refer to component into
Row dissection, analyzes inner structure element, to evaluate component in design aspect, structure combination, with material to verify
Whether meet relevant criterion in terms of material and sales volume effect, if reached scheduled using effect and correlated quality requirement.
There is following equipment to can be used for Destructive Physical Analysis in the prior art：
（1）Resin embedding cross section is ground, and this method ensures that sample is fixed in resin, very stable in process of lapping, still
The grinding of single side can only be carried out, and it is difficult to further take out that sample, which is fixed in resin rear,.
（2）Ion polishing grinding machine, this method are the grinding analysis of full-automatic cross section, and after completing grinding, sample is transversal
Face is smooth, can be observed under high power electron microscope；But grinding size is limited, cannot carry out seeing in grinding
It examines, and sample preparation is complicated, be easy to cause the inclination of sample abradant surface.
（3）FIB equipment, this method are similarly cross-sectional cut post analysis, and cross section picture is very smooth, are suitble to high power electricity
Sub- microscope is observed, and can accurately cut orientation；But grinding size is limited, is suitble to micro-analysis, while uncomfortable
Close the more analysis case of sample size.
Invention content
In view of the above-mentioned problems, the present invention provides a kind of jig for grinding, support to grind the multi-panel of electronic component products,
Electronic component products can be observed in grinding, it is simple in structure, it is at low cost, it is easy to use, it is applied widely.
Its technical solution is such：A kind of jig for grinding, including jig body, it is characterised in that：The jig body
Front the front of the jig body is divided into left and right gripping block equipped with straight slot, the lower end of the left and right gripping block is set respectively
Fluted, sample, which sticks seat, can be embedded in the groove, and the front side that the groove extends to the left and right gripping block makes institute
Stating sample and sticking the leading flank of seat can expose from the groove, and lock screw laterally penetrates the left and right gripping block, rotation
Turning the lock screw enables to the left and right gripping block clamping sample to stick seat, and the upper end of the jig body is set
It is equipped with universal horizontal instrument.
Further, the both ends of the rear side of the jig body are respectively equipped with screw fixed part, on the screw fixed part
Equipped with height adjusting screw, the height adjusting screw includes setting female balance adjustment screw and equipped with externally threaded Buddhist nun
Imperial screw, the screw fixed part are equipped with threaded hole, the nylon screw and the threaded hole screw-thread fit and the nylon
The lower end of screw is exposed from the lower end of the screw fixed part, and the balance adjustment screw is equipped with the nylon screw
The upper end of the screw fixed part.
Further, the sample, which sticks, is evenly equipped with the in the same size of undulate setting on the lower surface and leading flank of seat
Protrusion.
Further, the jig body is equipped with threaded hole, further includes weightening block, and the weightening block is equipped with and the spiral shell
The threaded joints that groove matches, the weightening block are mounted on by the threaded joints and the threaded hole screw-thread fit
In the jig body.
Further, the sample sticks the side of the leading flank of seat equipped with sample positive stop strip.
Further, the straight slot of the jig body is equipped with vertically arranged thread groove, is provided in the thread groove
Hexagon socket head cap screw.
Further, further include the jig grinding table fixed frame being arranged in circular ring shape, the jig grinding table fixed frame
Lower end has been screwed jig fixed block, and jig fixed block lower end is equipped with the jig to match with the jig body
Embedding groove, the jig embedding groove extend to the lower face of the jig fixed block, and the upper surface of the screw fixed part is less than
The upper surface of the jig body, the jig body are embedded in the jig embedding groove and make the lower end of the jig embedding groove
The upper surface that face corresponds to the screw fixed part offsets.
Further, it is equipped with extension in the lower end of the jig fixed block and positioned at the rear side of the jig embedding groove,
The extension and the rear end face of the jig body and the screw fixed part lean.
Further, the lower end of the jig grinding table fixed frame corresponds to each jig and is additionally provided with height adjusting screw.
Further, it is equipped with cross connection structure in the annulus of the jig grinding table fixed frame.
Sample can be fixed on sample by heating paraffin wax, hot melt adhesive and sticked on seat by the present invention so that sample can be anti-
It is multiple fixed and unclamp for coordinating grinding machine to be ground, it pastes and sticks a bottom in sample plane lapping and glutinous may be implemented
Be attached to sample stick a leading flank may be implemented cross section grinding, can grinding when observing samples, be easy to find failpoint, can
To adjust levelness when grinding, height is adjusted by turning two nylon screws, by Universal level-metre so that nylon screw
Lower face and being attached on stick the bottom of the sample on seat in sample and be located at same level, it is ensured that the levelness of grinding,
Its low cost replaces simplicity after nylon screw abrasion, simple in structure, at low cost, easy to use, for sample volume without spy
It is different to require, it is applied widely, in addition, jig for grinding can coordinate jig grinding table fixed frame, it is fixed on grinder station, carries out
Weightening block can be arranged in semi-automatic grinding, can adjust sample grinding rate.
Description of the drawings
Fig. 1 is the overlooking structure diagram of the jig for grinding of the present invention；
Fig. 2 is the left view structural representation of the jig for grinding of the present invention；
Fig. 3 is the backsight structural representation of the jig for grinding of the present invention；
Fig. 4 is the stereogram of the part-structure of the jig for grinding of the present invention；
Fig. 5 is the main structure diagram of the part-structure of the jig for grinding of the present invention；
Fig. 6 is the vertical view of jig grinding table fixed frame and jig for grinding cooperation；
Fig. 7 is the side view of jig grinding table fixed frame and jig for grinding cooperation.
Specific implementation mode
See Fig. 1, Fig. 2, Fig. 3, Fig. 4, Fig. 5, a kind of jig for grinding of the invention, including jig body 1, jig body 1
Front is equipped with straight slot 2 and the front of jig body is divided into left gripping block 3, right gripping block 4, under left gripping block 3, right gripping block 4
End is respectively equipped with groove 5, and sample, which sticks seat 6, can be embedded in groove 5, before groove 5 extends to left gripping block 3, right gripping block 4
The leading flank 61 that side enables sample to stick seat 6 exposes from groove 5, and lock screw 7 laterally penetrates left gripping block 3, the right side
Gripping block 4, rotation lock screw 7 enable to left gripping block 3, right gripping block 4 to clamp sample to stick seat 6, jig body 1 it is upper
End is provided with universal horizontal instrument 8.
The both ends of the rear side of jig body 1 are respectively equipped with screw fixed part 9, and screw fixed part 9 is equipped with height and adjusts spiral shell
Silk 10, height adjusting screw include setting female balance adjustment screw 101 and equipped with externally threaded nylon screw 102, spiral shell
Silk fixed part 9 is equipped with threaded hole, and nylon screw 102 is solid from screw with the lower end of threaded hole screw-thread fit and nylon screw 102
The lower end for determining portion 9 is exposed, and balance adjustment screw 101 is equipped with nylon screw 102 in the upper end of screw fixed part 9.
Sample, which sticks, is evenly equipped with of the same size raised the 11 of undulate setting on the lower surface and leading flank of seat 6, tool
There is sticking surface and can accommodating more hot melt adhesive/paraffin for protrusion 11, preferably fixed sample prevents from occurring in process of lapping
The phenomenon that sample falls off.
Jig body 1 is equipped with threaded hole, further includes weightening block 12, and weightening block 12 is equipped with the screw thread to match with thread groove
Interconnecting piece, weightening block 12 are connected through a screw thread portion and are mounted in jig body 1 with threaded hole screw-thread fit, and jig body 1 is led to
Slot 2 is equipped with vertically arranged thread groove, is provided with hexagon socket head cap screw 20 in thread groove, hexagon socket head cap screw 20 withstands on specimen holder
On, when needing to adjust horizontal, height adjusting screw 10 can be adjusted incessantly, can also be adjusted by hexagon socket head cap screw 20
, or think to stretch out again a bit after sample is worn away sometimes, can also turn hexagon socket head cap screw 20 sample is pushed to stick seat and be adjusted
Section.
The side that sample sticks the leading flank of seat 6 is equipped with sample positive stop strip 13, and the sample volume that some needs are ground compares
Greatly, both sides can hinder pasting for sample if having sample positive stop strip 13；The edge of common product is all smooth vertical and horizontal, sample
The effect of positive stop strip 13 is to aid in operator and ensures that abradant surface can be horizontal as possible.
Above-mentioned jig for grinding can be used for underhand polish, when needing to grind for a long time, see Fig. 6, Fig. 7, can be by controlling
Tool grinding table fixed frame 14 fixes multiple jig for grinding and carries out simultaneous grinding comprising the jig grinding table in circular ring shape setting is solid
Determine frame 14, is equipped with cross connection structure 15 in the annulus of jig grinding table fixed frame 14, cross connection structure 15 can add
The stability of strong jig grinding table fixed frame 14, the lower end of jig grinding table fixed frame 14 has been screwed jig fixed block
16,16 lower end of jig fixed block is equipped with the jig embedding groove 17 to match with jig body 1, and jig embedding groove 17 extends to jig
The lower face of fixed block 16, the upper surface of screw fixed part 9 are less than the upper surface of jig body 1, and jig body 1 is embedded in jig edge
Caulking groove 17 and the lower face of jig embedding groove 17 is made to correspond to the upper surface of screw fixed part 9 and offset, in jig fixed block 16
Lower end and it is equipped with extension 18 positioned at the rear side of jig embedding groove 17, extension 18 and jig body 1 and screw fixed part 9
Rear end face leans, and jig is pressed on grinding device by jig grinding table fixed frame 14 and is ground, is ground by jig
Platform fixed frame realizes semi-automatic grinding.
The lower end of jig grinding table fixed frame 14 corresponds to each jig and is additionally provided with height adjusting screw 19, height adjusting screw
19 are supported on support base cooperation on support base, by turning height adjusting screw 19, utilize 19 screw thread of height adjusting screw
Stroke adjusts height, ensures 14 levelness of jig grinding table fixed frame.
The process for the work of the jig for grinding using the present invention being ground is described below：By pasting mode, use
Sample is fixed on sample and sticked on seat by heating paraffin wax, hot melt adhesive, and what is ground as needed is cross section either plane lapping
Selection pastes sample to stick a leading flank in sample or paste sticks a bottom in sample, and sample is adjusted by Universal level-metre
For product lapped face to level, regulative mode is to turn two nylon screws to adjust height so that the lower face of nylon screw with it is glutinous
It is attached to and sticks the bottom of the sample on seat in sample and be located at same level, the sample at two on nylon screw and specimen holder is
It is in direct contact sand paper；
Grinder tool there are one the turntable that rotates in one direction, grind by the sand paper realization that different roughness can be pasted on turntable
Mill carries out underhand polish when grinding target closely from sample surfaces, holds jig for grinding and carries out micro grinding, side mill
It observes on side；
When grinding target has from sample surfaces with a distance from quite, jig is fixed on jig grinding table fixed frame, adjusting is passed through
Height screw ensures that fixed frame is put to after grinding machine and is horizontal, and confirms and jig is pressed on grinding machine, allows and grinds
Mill platform fixed frame can push down jig, allow it to be not forced tilting in process of lapping, as long as jig for grinding be placed on sand paper to
Giving prevents fixture transfer and tilting, and there are four jig fixed blocks on grinding table fixed frame as described in Figure, can be equipped with four
A jig for grinding can entangle the upside protrusion of jig for grinding to prevent transfer, while pushing down jig for grinding to prevent jig for grinding
It tilts, semi-automatic grinding is realized by jig grinding table fixed frame；
When it is desirable that accelerating grinding rate, weightening block can be increased on jig for grinding, it can be more according to the needs of grinding rate
It is arranged several, the position of the block that increases weight, can be to avoid the offset of weightening rear center at the center of entire jig；When it is desirable that changing grinding side
Xiang Shi, heating sample stick seat, and grinding can be re-started by removing sample and changing direction；Sample can be directly anchored to after grinding
Micro-examination is carried out on SME&FIB pedestals.
Above example only expresses the one of which embodiment of the present invention, the description thereof is more specific and detailed, but simultaneously
It cannot therefore be construed as limiting the scope of the patent.It should be pointed out that coming for those of ordinary skill in the art
It says, without departing from the inventive concept of the premise, various modifications and improvements can be made, these belong to the protection of the present invention
Range.Therefore, the protection domain of patent of the present invention should be determined by the appended claims.
Claims (10)
1. a kind of jig for grinding, including jig body, it is characterised in that：It is controlled described equipped with straight slot the front of the jig body
The front of tool ontology is divided into left and right gripping block, and the lower end of the left and right gripping block is respectively equipped with groove, and sample sticks seat can
In the embedded groove, the front side that the groove extends to the left and right gripping block makes the sample stick the leading flank of seat
It can expose from the groove, lock screw laterally penetrates the left and right gripping block, and rotating the lock screw can make
It obtains the left and right gripping block clamping sample and sticks seat, the upper end of the jig body is provided with universal horizontal instrument.
2. a kind of jig for grinding according to claim 1, it is characterised in that：Distinguish at the both ends of the rear side of the jig body
Equipped with screw fixed part, the screw fixed part is equipped with height adjusting screw, and the height adjusting screw includes being equipped with interior spiral shell
The balance adjustment screw of line and be equipped with externally threaded nylon screw, the screw fixed part be equipped with threaded hole, the nylon spiral shell
Silk exposes with the lower end of the threaded hole screw-thread fit and the nylon screw from the lower end of the screw fixed part, the balance
Adjusting screw is equipped with the nylon screw in the upper end of the screw fixed part.
3. a kind of jig for grinding according to claim 1, it is characterised in that：The sample sticks the lower surface and front side of seat
The protrusion of the same size of undulate setting is evenly equipped on face.
4. a kind of jig for grinding according to claim 1, it is characterised in that：The jig body is equipped with threaded hole, also
Including the block that increases weight, the weightening block is equipped with the threaded joints to match with the thread groove, and the weightening block passes through the spiral shell
Line interconnecting piece is mounted on the threaded hole screw-thread fit in the jig body.
5. a kind of jig for grinding according to claim 1, it is characterised in that：The sample sticks the side of the leading flank of seat
Equipped with sample positive stop strip.
6. a kind of jig for grinding according to claim 1, it is characterised in that：It further include the jig grinding in circular ring shape setting
Platform fixed frame, the lower end of the jig grinding table fixed frame have been screwed jig fixed block, under the jig fixed block
End is equipped with the jig embedding groove to match with the jig body, and the jig embedding groove extends under the jig fixed block
End face, the upper surface of the screw fixed part are less than the upper surface of the jig body, and the jig body is embedded in the jig
Embedding groove and the lower face of the jig embedding groove is made to correspond to the upper surface of the screw fixed part and offset.
7. a kind of jig for grinding according to claim 6, it is characterised in that：In the lower end of the jig fixed block and it is located at
After the rear side of the jig embedding groove is equipped with extension, the extension and the jig body and the screw fixed part
End face leans.
8. a kind of jig for grinding according to claim 6, it is characterised in that：The lower end pair of the jig grinding table fixed frame
Each jig is answered to be additionally provided with height adjusting screw.
9. a kind of jig for grinding according to claim 6, it is characterised in that：In the annulus of the jig grinding table fixed frame
Equipped with cross connection structure.
10. a kind of jig for grinding according to claim 6, it is characterised in that：The straight slot of the jig body is equipped with perpendicular
To the thread groove of setting, hexagon socket head cap screw is provided in the thread groove.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810855696.4A CN108747805A (en) | 2018-07-31 | 2018-07-31 | A kind of jig for grinding |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810855696.4A CN108747805A (en) | 2018-07-31 | 2018-07-31 | A kind of jig for grinding |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN108747805A true CN108747805A (en) | 2018-11-06 |
Family
ID=63968275
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810855696.4A Pending CN108747805A (en) | 2018-07-31 | 2018-07-31 | A kind of jig for grinding |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN108747805A (en) |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1796050A (en) * | 2004-12-27 | 2006-07-05 | 中芯国际集成电路制造(上海)有限公司 | Tools for grinding samples of detection for electron microscope |
| JP2007181860A (en) * | 2006-01-06 | 2007-07-19 | Fujifilm Corp | Sample rest for polishing and method for polishing |
| CN202572123U (en) * | 2012-05-18 | 2012-12-05 | 厦门大学 | Wafer bonder for grinding and polishing |
| CN102896579A (en) * | 2012-10-19 | 2013-01-30 | 深圳市泰科微光学有限公司 | Wear-resistant clamp for grinding optical fiber connector blanks |
| JP2013233641A (en) * | 2012-04-10 | 2013-11-21 | Sumitomo Electric Ind Ltd | Polishing jig |
| CN105563304A (en) * | 2015-07-14 | 2016-05-11 | 山东理工大学 | Improved sample fixing and adjusting device of precise grinding polisher |
| CN107350961A (en) * | 2016-12-20 | 2017-11-17 | 北京航空航天大学 | A kind of adjustable angle polarization maintaining fiber pigtail block grinding clamp |
| CN209036277U (en) * | 2018-07-31 | 2019-06-28 | 全讯射频科技(无锡)有限公司 | A kind of jig for grinding |
-
2018
- 2018-07-31 CN CN201810855696.4A patent/CN108747805A/en active Pending
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1796050A (en) * | 2004-12-27 | 2006-07-05 | 中芯国际集成电路制造(上海)有限公司 | Tools for grinding samples of detection for electron microscope |
| JP2007181860A (en) * | 2006-01-06 | 2007-07-19 | Fujifilm Corp | Sample rest for polishing and method for polishing |
| JP2013233641A (en) * | 2012-04-10 | 2013-11-21 | Sumitomo Electric Ind Ltd | Polishing jig |
| CN202572123U (en) * | 2012-05-18 | 2012-12-05 | 厦门大学 | Wafer bonder for grinding and polishing |
| CN102896579A (en) * | 2012-10-19 | 2013-01-30 | 深圳市泰科微光学有限公司 | Wear-resistant clamp for grinding optical fiber connector blanks |
| CN105563304A (en) * | 2015-07-14 | 2016-05-11 | 山东理工大学 | Improved sample fixing and adjusting device of precise grinding polisher |
| CN107350961A (en) * | 2016-12-20 | 2017-11-17 | 北京航空航天大学 | A kind of adjustable angle polarization maintaining fiber pigtail block grinding clamp |
| CN209036277U (en) * | 2018-07-31 | 2019-06-28 | 全讯射频科技(无锡)有限公司 | A kind of jig for grinding |
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