JP6008078B2 - Piezoelectric motor, drive device, electronic component transport device, electronic component inspection device, printing device, robot hand, and robot - Google Patents

Description

  The present invention relates to a piezoelectric motor, a driving device, an electronic component conveying device, an electronic component inspection device, a printing device, a robot hand, and a robot.

  A piezoelectric motor that drives a target object by vibrating a vibrating body formed of a piezoelectric material is known. This piezoelectric motor is smaller than an electromagnetic motor that uses an electromagnetic force to rotate a rotor, but can obtain a large driving force, and can also position an object with high resolution. Has characteristics. For this reason, it is used as an actuator for various devices such as a camera drive mechanism.

  The piezoelectric motor operates on the following principle. First, a vibrating body (piezoelectric material) is formed in a substantially rectangular parallelepiped shape, and a convex portion is provided on an end face in the longitudinal direction. Then, by applying a voltage having a predetermined frequency to the vibrating body, a vibration in a mode in which the vibrating body expands and contracts and a vibration in a mode in which the vibrating body bends are simultaneously generated. Then, the end face of the vibrating body starts an elliptical motion that rotates in one direction. Then, if the convex part provided in the end surface is pressed against a target object, a target object can be moved to a fixed direction with the frictional force which acts between a convex part and a target object.

  From such an operating principle, the piezoelectric motor needs to be used in a state where the convex portion provided on the end face of the vibrating body is pressed against the object. In addition, it is necessary to hold the vibrating body so that the vibrating body does not escape due to the reaction force that the convex portion receives from the target when driving the target. Nevertheless, the vibration of the vibrating body must be allowed so that the convex part moves elliptically. Therefore, the vibrating body is stored in the storage case with the convex portion protruding, and in the storage case, both sides of the vibrating body are held via the elastic member from the bending direction, and the storage case together with the vibrating body is used as an object. There has been proposed a technique for energizing it (Patent Document 1).

JP 11-346486 A

  However, the proposed technique has a problem that it is difficult to efficiently use the mechanical energy generated by the vibrating body for driving the object. This is because both sides of the vibrating body are supported from the bending direction, so the vibration of the vibrating body is easily transmitted to the outside through the storage case, and the vibration transmitted to the outside can be used to drive the object. This is because it cannot be done.

  The present invention has been made to solve at least a part of the above-described problems of the conventional technology, and an object thereof is to provide a piezoelectric motor capable of efficiently driving an object.

In order to solve at least a part of the problems described above, the piezoelectric motor of the present invention employs the following configuration. That is,
A piezoelectric motor for moving the object by applying a voltage to a vibrating body including a piezoelectric material to generate a bending vibration and bringing a convex portion provided at an end of the vibrating body into contact with the object. ,
A first electric wire and a second electric wire for applying a voltage to the vibrating body, wherein an end portion of the vibrating body provided with the convex portion is connected to a surface facing a bending direction moving by the bending vibration; ,
A housing case in which the protrusion is projected to house the vibrating body, and the first electric wire and the second electric wire are drawn out;
A support portion that is provided between the vibrating body and the storage case and sandwiches both surfaces of the vibrating body from a direction intersecting a bending direction of the vibrating body;
With
On both sides in the bending direction of the vibrating body, a gap is provided between the storage case,
In the storage case, a first extraction hole and a second extraction hole are formed on an extension of each of the gaps on both sides of the vibrating body on the side opposite to the side on which the convex portion protrudes.
The gist of the invention is that the first electric wire is drawn out of the storage case through the first lead-out hole, and the second electric wire is drawn out of the storage case through the second lead-out hole.

  In such a piezoelectric motor of the present invention, the vibrating body housed in the housing case is sandwiched by the support portion not from the bending direction of the vibrating body but from the direction intersecting the bending direction. When this vibrating body is bent and vibrated, the support portion is deformed in the shearing direction, so that it is possible to suppress the vibration of the vibrating body from being transmitted to the storage case as compared with the case where the vibrating body is sandwiched from the bending direction. Also, the reaction force received by the convex part of the vibrating body when the object is driven is received by the rigidity when the support part is deformed in the shear direction, and the vibrating body is supported so that the vibrating body does not escape by the reaction force. Can do. As a result, the object can be driven efficiently. Furthermore, a gap is provided between both sides of the vibrating body in the bending direction and the storage case. On the extension of this gap, the first side of the storage case is opposite to the side from which the convex portion protrudes. A lead-out hole and a second lead-out hole are formed. For this reason, if the 1st electric wire and 2nd electric wire connected to the surface which faced the direction which cross | intersects the bending direction of a vibrating body are pulled out one by one from a 1st extraction hole and a 2nd extraction hole, naturally a 1st electric wire and Since the routing of the second electric wire is induced in the gap on both sides in the bending direction of the vibrating body, the first electric wire and the second electric wire are routed without interfering with the vibration of the vibrating body by using this gap as a wiring path. It becomes possible.

  In the above-described piezoelectric motor of the present invention, the first electric wire is joined to the vibrating body toward one side in the bending direction of the vibrating body, and the second electric wire is directed to the other side in the bending direction of the vibrating body. May be joined to the vibrating body.

  In this way, if the first electric wire and the second electric wire are joined toward the outside in the bending direction of the vibrating body (the side where the gap with the storage case is provided), the first electric wire and the second electric wire are routed. It can be guided to the gap on both sides in the bending direction of the vibrating body. Moreover, when the first electric wire and the second electric wire are bent toward the first extraction hole and the second extraction hole so that they can be accommodated in the storage case, the bent portion is lower than the unbent portion (original state). The elasticity acts to keep the first and second wires away from the vibrating body (closer to the storage case), so that the first and second wires are in contact with the vibrating body. Can be suppressed.

  In the above-described piezoelectric motor, the following may be performed. First, a pair of two electrodes that are diagonally positioned among the four electrodes provided on the surface that faces in the direction intersecting the bending direction of the vibrating body, and a node portion having a small amplitude of bending vibration of the vibrating body. Each set of electrodes is connected by a third electric wire and a fourth electric wire. Then, the first electric wire and the second electric wire are connected one by one to the two electrodes on the side farther from the first extraction hole and the second extraction hole among the four electrodes at the node portion.

  In this way, if the electrode and the wire are joined at the node where the amplitude of the bending vibration is small, the joining of the wire is less likely to hinder the bending vibration of the vibrating body, compared to the case where the bending vibration is performed at the abdomen. Moreover, it can suppress that the joining of an electric wire remove | deviates by the influence of the bending vibration of a vibrating body. Further, if the first electric wire and the second electric wire are joined to the electrodes far from the first drawing hole and the second drawing hole, the first electric wire and the second electric wire are moved to the gaps on both sides in the bending direction of the vibrating body. Even if it contacts the vibrating body in the middle of being routed, it can be contacted by the node portion, so that interference with the bending vibration of the vibrating body can be suppressed compared to the case of contacting the abdomen. And when the 1st electric wire and the 2nd electric wire contact the node part of a vibrating body, this contacted part will become a support and the direction of the 1st electric wire and the 2nd electric wire will be specified in the direction away from a vibrating body. Therefore, it can suppress that a 1st electric wire and a 2nd electric wire contact the abdominal part etc. of a vibrating body.

  Further, in such a piezoelectric motor, the first extraction hole and the second extraction hole are formed obliquely with respect to the extending direction of the gap on both sides of the vibrating body so that the distance between each other is smaller than the inner side of the storage case. You may keep it.

  When the first electric wire and the second electric wire are pulled out one by one from the first drawing hole and the second drawing hole formed obliquely in this way, the first electric wire and the second electric wire are directed inward in the bending direction of the vibrating body ( It will be bent in the direction of approaching each other. In this bent portion, the waist (elasticity to keep the original state) increases compared to the unbent portion, and this waist moves the first electric wire and the second electric wire away from the vibrating body (closer to the storage case). Therefore, the first electric wire and the second electric wire are suitable for suppressing contact with the vibrating body.

  In the above-described piezoelectric motor of the present invention, the passage portion is provided in the support portion that sandwiches the vibrating body, and the first electric wire and the second electric wire are allowed to pass therethrough, and the first electric wire and the second electric wire are routed (the routing route). ) May be specified.

  In this way, by passing the first electric wire and the second electric wire through the passage portion provided in the support portion, the first electric wire and the second electric wire are supported so as not to contact the vibrating body, and the first electric wire and the second electric wire. It is possible to appropriately guide the direction of routing. As a result, the first electric wire and the second electric wire can be routed in the storage case without hindering the bending vibration of the vibrating body.

  In the above-described piezoelectric motor of the present invention, the first electric wire and the second electric wire may be formed using a plastically deforming material, and the wiring shape in the storage case may be formed by bending.

  As described above, the first electric wire and the second electric wire are made of a plastically deformable material, and a wiring shape that does not come into contact with the vibrating body is appropriately formed in advance, so that the bending vibration of the vibrating body is not hindered. The first electric wire and the second electric wire can be routed in the case.

  Further, a driving device, a printing device, a robot hand, a robot, or the like may be configured using the above-described piezoelectric motor of the present invention.

  The piezoelectric motor of the present invention is small and can achieve high driving accuracy. Therefore, if a driving device, a printing device, a robot hand, a robot, or the like is configured using the piezoelectric motor of the present invention, a small, high-performance driving device, a printing device, a robot hand, a robot, or the like can be obtained.

  Moreover, you may comprise the following electronic component inspection apparatuses using the piezoelectric motor of this invention. That is, an electronic component inspection apparatus for inspecting the electrical characteristics of the electronic component by mounting the gripped electronic component on the inspection socket, and using any one of the above-described piezoelectric motors of the present invention, Parts may be aligned.

  As described above, since the piezoelectric motor of the present invention is small and can realize high driving accuracy, the electronic component can be aligned with high accuracy and a small electronic component inspection apparatus can be realized. Is possible.

Or the electronic component inspection apparatus of this invention can also be grasped | ascertained in the following aspects. That is,
An electronic component inspection device that inspects the electrical characteristics of the electronic component by mounting the gripped electronic component on an inspection socket,
A piezoelectric motor for aligning the electronic component with the inspection socket;
The piezoelectric motor is
A vibrating body that is formed to include a piezoelectric material and bends and vibrates when a voltage is applied;
A convex portion provided at an end of the vibrating body;
A first electric wire and a second electric wire for applying a voltage to the vibrating body, wherein an end portion of the vibrating body provided with the convex portion is connected to a surface facing a bending direction moving by the bending vibration; ,
A housing case in which the protrusion is projected to house the vibrating body, and the first electric wire and the second electric wire are drawn out;
A support portion that is provided between the vibrating body and the storage case and sandwiches both surfaces of the vibrating body from a direction intersecting a bending direction of the vibrating body;
With
On both sides in the bending direction of the vibrating body, a gap is provided between the storage case,
In the storage case, a first extraction hole and a second extraction hole are formed on an extension of each of the gaps on both sides of the vibrating body on the side opposite to the side on which the convex portion protrudes.
The first electric wire is drawn out of the storage case from the first lead-out hole, and the second electric wire is drawn out of the storage case from the second lead-out hole. It can also be understood in the form of an inspection device.

Furthermore, the electronic component inspection apparatus of the present invention described above has the following aspects,
An inspection socket in which an electronic component is mounted and the electrical characteristics of the electronic component are inspected;
A gripping device for gripping the electronic component;
A moving device that moves the gripping device in a total of three axial directions including a first axis and a second axis orthogonal to each other and a third axis orthogonal to the first axis and the second axis;
The electronic component provided on the first shaft or the second shaft as viewed from the inspection socket and mounted on the inspection socket, the position in the direction of the first shaft and the second shaft, and the An imaging device that detects an angle around a third axis as a posture of the electronic component;
An upstream stage for transporting the electronic component from the inspection socket to the predetermined position on the first axis or the second axis connecting the imaging device;
A downstream stage that conveys the electronic component from a predetermined position opposite to the side on which the imaging device is provided when viewed from the inspection socket;
A control device for controlling the operation of the mobile device;
An electronic component inspection apparatus comprising:
The control device includes:
A first control unit that moves the gripping device that grips the electronic component conveyed by the upstream stage to above the imaging device;
A second control unit for mounting the electronic component whose posture is confirmed by the imaging device to the inspection socket by moving the gripping device;
A third control unit configured to place the electronic component whose electrical characteristics have been inspected by the inspection socket on the downstream stage by moving the gripping device;
With
The gripping device includes a first piezoelectric motor that moves the electronic component in the first axial direction based on the attitude of the electronic component detected by the imaging device, and a second that moves the electronic component in the second axial direction. And a third piezoelectric motor that rotates around the third axis,
Said 1st thru | or 3rd piezoelectric motor is a piezoelectric motor as described in any one of Claim 1 thru | or 6. It can also grasp | ascertain in the aspect of the electronic component inspection apparatus characterized by the above-mentioned.

  The electronic component inspection apparatus having such a configuration can be mounted on the inspection socket after adjusting the posture of the electronic component using the first to third piezoelectric motors provided in the gripping device. Here, the piezoelectric motor of the present invention is particularly excellent as the first to third piezoelectric motors provided in the gripping device because it is small and can accurately drive the object.

  Furthermore, you may comprise the following electronic component conveyance apparatuses using the piezoelectric motor of this invention. In other words, the electronic component conveying apparatus conveys the gripped electronic component, and the electronic component may be aligned using any one of the above-described piezoelectric motors of the present invention.

  As described above, since the piezoelectric motor of the present invention is small and can realize high driving accuracy, it is possible to accurately align electronic components and to realize a small electronic component transport device. Can do.

Or the electronic component conveyance apparatus of this invention is the following aspects, namely,
An electronic component transport device for transporting a gripped electronic component,
A piezoelectric motor for aligning the electronic components;
The piezoelectric motor is
A vibrating body that is formed to include a piezoelectric material and bends and vibrates when a voltage is applied;
A convex portion provided at an end of the vibrating body;
A first electric wire and a second electric wire for applying a voltage to the vibrating body, wherein an end portion of the vibrating body provided with the convex portion is connected to a surface facing a bending direction moving by the bending vibration; ,
A housing case in which the protrusion is projected to house the vibrating body, and the first electric wire and the second electric wire are drawn out;
A support portion that is provided between the vibrating body and the storage case and sandwiches both surfaces of the vibrating body from a direction intersecting a bending direction of the vibrating body;
With
On both sides in the bending direction of the vibrating body, a gap is provided between the storage case,
In the storage case, a first extraction hole and a second extraction hole are formed on an extension of each of the gaps on both sides of the vibrating body on the side opposite to the side on which the convex portion protrudes.
The first electric wire is drawn out of the storage case from the first lead-out hole, and the second electric wire is drawn out of the storage case from the second lead-out hole. It can also be understood in the form of a transport device.

Furthermore, the electronic component conveying apparatus of the present invention described above has the following aspects, that is,
A gripping device for gripping electronic components;
A moving device for moving the gripping device in a total of three axial directions including a first axis and a second axis orthogonal to each other and a third axis orthogonal to the first axis and the second axis;
A control device for controlling the operation of the mobile device;
An electronic component transport device comprising:
The gripping device includes: a first piezoelectric motor that moves the electronic component in the first axis direction; a second piezoelectric motor that moves the electronic component in the second axis direction; and a third piezoelectric motor that rotates about the third axis. A piezoelectric motor,
Said 1st thru | or 3rd piezoelectric motor is a piezoelectric motor as described in any one of Claim 1 thru | or 6. It can also grasp | ascertain in the aspect of the electronic component conveyance apparatus characterized by the above-mentioned.

It is explanatory drawing which showed the rough structure of the piezoelectric motor of a present Example. It is an exploded view which shows the structure of the main-body part of a present Example. It is explanatory drawing which showed the electric wire joined in order to apply a voltage to a vibrating body. It is explanatory drawing which shows the operation principle of a piezoelectric motor. It is explanatory drawing which showed a mode that the external electric wire was drawn in the vibrating body case of a present Example by taking the cross section of a main-body part in a XZ plane. It is explanatory drawing which showed the node part of the vibrating body. It is explanatory drawing which showed the extraction hole provided in the vibrating body case of a 1st modification by taking the cross section of a main-body part in XY plane. It is explanatory drawing which showed a mode that the external electric wire was drawn around in the vibrating body case of the 2nd modification. It is explanatory drawing which showed the external electric wire connected to the surface electrode of the vibrating body of the 3rd modification. It is the perspective view which illustrated the electronic component inspection apparatus comprised incorporating the piezoelectric motor of a present Example. It is explanatory drawing about the fine adjustment mechanism incorporated in the holding | grip apparatus. It is the perspective view which illustrated the printing apparatus incorporating the piezoelectric motor of a present Example. It is explanatory drawing which illustrated the robot hand incorporating the piezoelectric motor of a present Example. It is explanatory drawing which illustrated the robot provided with the robot hand.

Hereinafter, in order to clarify the contents of the present invention described above, examples will be described in the following order.
A. Device configuration:
B. Principle of operation of piezoelectric motor:
C. External wire routing:
D. Variations:
D-1. First modification:
D-2. Second modification:
D-3. Third modification:
E. Application example:

A. Device configuration :
FIG. 1 is an explanatory diagram showing a rough configuration of the piezoelectric motor 10 of the present embodiment. FIG. 1 (a) shows an overall view of the piezoelectric motor 10 of this embodiment, and FIG. 1 (b) shows an exploded view. As shown in FIG. 1A, the piezoelectric motor 10 according to the present embodiment is roughly composed of a main body portion 100 and a base portion 200. The main body portion 100 is attached to the base portion 200 and is movable in one direction in that state. In the present specification, the moving direction of the main body 100 is referred to as the X direction. Further, as shown in the figure, directions orthogonal to the X direction are referred to as a Y direction and a Z direction, respectively.

  The main body portion 100 and the base portion 200 are each configured by combining a plurality of parts. For example, the base part 200 is configured by fastening the first side wall block 210 and the second side wall block 220 with set screws 240 on both sides of the upper surface of the substantially rectangular substrate 230 (FIG. 1B). )checking). When assembling the piezoelectric motor 10, the first side wall block 210 and the second side wall block 220 are attached to the substrate 230 from above the main body 100 using the set screw 240.

  In addition, the first side wall block 210 is formed with three concave portions of a front housing 212, a central housing 214, and a rear housing 216. When the first side wall block 210 is attached to the substrate 230, the front side pressure spring 212 s is accommodated in the front housing 212 and the rear side pressure spring 216 s is accommodated in the rear housing 216. As a result, the main body 100 is pressed against the second side wall block 220 by the front pressure spring 212s and the rear pressure spring 216s. A front roller 102r and a rear roller 106r are attached to the side of the main body 100 facing the second side wall block 220. Further, a pressure spring 222 s is provided on the side surface of the main body 100. The pressurizing spring 222s presses the main body 100 in the X direction at a location behind the front roller 102r.

  A pressing roller 104r is provided on the side surface of the main body 100 opposite to the side on which the front roller 102r and the rear roller 106r are provided in the Z direction (upward in the drawing). In a state where the first side wall block 210 is attached, the pressing roller 104r is housed in the central housing 214 of the first side wall block 210. A pressing spring 232 s is provided between the back surface side of the portion of the main body 100 where the pressing roller 104 r is provided and the substrate 230. For this reason, the pressing roller 104r is pressed against the inner surface of the central housing 214 in the Z direction (upward in the drawing).

  FIG. 2 is an exploded view showing the structure of the main body 100 of this embodiment. The main body 100 generally has a structure in which the vibration part 110 is housed in the vibration body case 120. The vibrating part 110 includes a vibrating body 112 formed in a rectangular parallelepiped shape by a piezoelectric material, a ceramic driving convex part 114 attached to an end face in the longitudinal direction (X direction) of the vibrating body 112, and the Z direction of the vibrating body 112. Is formed of four surface electrodes 116 and the like provided by dividing one surface facing the surface into four in a lattice shape. Although not shown in FIG. 2, a back electrode covering almost the entire surface is provided on the surface opposite to the side on which the four front electrodes 116 are provided, and this back electrode is grounded to the ground. ing. As will be described later, the vibrating body 112 has a property of vibrating when a voltage is applied. The driving convex portion 114 of this embodiment corresponds to the “convex portion” of the present invention.

  The vibration part 110 is accommodated in the vibration body case 120 in a state where the drive convex part 114 is protruded. The vibrating unit 110 housed in the vibrating body case 120 is supported by a resin support member 130 from both surfaces (both surfaces facing the Z direction in FIG. 2) of the vibrating body 112 provided with the front electrode 116 and the back electrode. It will be sandwiched. Further, the cover plate 140, the disc spring 142, and the presser plate 144 are stacked on the support member 130 on the front electrode 116 side, and the presser plate 144 is fastened to the vibrating body case 120 with a set screw 146. For this reason, the vibration unit 110 is vibrated in the vibrating body case 120 when the resin support member 130 is sheared and deformed while being pressed by the spring force of the disc spring 142 via the cover plate 140 and the support member 130. The body 112 is stored in a state where it can vibrate. The vibrating body case 120 and the cover plate 140 of this embodiment correspond to the “storage case” of the present invention.

  FIG. 3 is an explanatory diagram showing electric wires joined to apply a voltage to the vibrating body 112. As shown in the drawing, four surface electrodes 116 are provided in a lattice pattern on one surface of both surfaces of the vibrating body 112 facing in the Z direction (both surfaces on which the support member 130 is in contact). The two surface electrodes 116 located at the diagonal line are set as a set (a set of the table electrode 116a and the table electrode 116d and a set of the table electrode 116b and the table electrode 116c), and each set of the surface electrodes 116 is connected to the inter-electrode wires 300a and 300b. Connected by. The inter-electrode wires 300a and 300b that three-dimensionally intersect in the vertical direction (Z direction) are covered with an insulating material, and are joined to the front electrode 116 with solder 302. Further, the surface electrode 116 (the surface electrode 116a and the surface electrode 116b) on the side close to the driving convex portion 114 in each set of the surface electrodes 116 is connected to an external power source (not shown) by external electric wires 304a and 304b. The external electric wires 304a and 304b are also joined to the front electrode 116 with solder 302 using electric wires covered with an insulating material, like the inter-electrode electric wires 300a and 300b. As will be described later, the vibrating body case 120 in which the vibrating body 112 is housed has a lead-out hole formed on the side opposite to the side from which the drive projection 114 protrudes, and external wires 304a and 304b are formed from the lead-out holes. Is pulled out and connected to an external power source. In the present specification, the side of the vibrating body case 120 from which the drive projection 114 protrudes is referred to as “front side”, and the side opposite to the side from which the drive projection 114 protrudes is referred to as “rear side”. It shall be. Further, the external electric wire 304a and the external electric wire 304b of the present embodiment correspond to the “first electric wire” and the “second electric wire” of the present invention, respectively.

  In addition, as described above, a back electrode that covers almost the entire surface is provided on the surface of the vibrating body 112 opposite to the side on which the four front electrodes 116 are provided, and the back electrode is connected to the ground. A ground wire 306 for grounding is joined by solder 302.

B. Principle of operation of piezoelectric motor:
FIG. 4 is an explanatory diagram showing the operating principle of the piezoelectric motor 10. The piezoelectric motor 10 operates when the driving convex portion 114 of the vibration unit 110 moves elliptically when a voltage is applied to the surface electrode 116 of the vibration unit 110 at a constant period. The drive convex part 114 of the vibration part 110 moves elliptically for the following reason.

  First, as is well known, the vibrating body 112 has a property of expanding when a positive voltage is applied. Therefore, as shown in FIG. 4A, when applying a positive voltage to all four surface electrodes 116 and then releasing the applied voltage repeatedly, the vibrating body 112 expands and contracts in the longitudinal direction (X direction). Repeat the operation. The operation in which the vibrating body 112 repeatedly expands and contracts in the longitudinal direction (X direction) is referred to as “stretching vibration”. Further, when the frequency at which the positive voltage is applied is changed, the amount of expansion / contraction suddenly increases when a certain frequency is reached, and a kind of resonance phenomenon occurs. The frequency at which resonance occurs due to stretching vibration (resonance frequency) is determined by the physical properties of the vibrating body 112 and the dimensions (width W, length L, thickness T) of the vibrating body 112.

  Further, as shown in FIG. 4B or FIG. 4C, a pair of two front electrodes 116 that are diagonal to each other (a pair of the front electrode 116a and the front electrode 116d, or a front electrode 116b and a front electrode 116c). A positive voltage is applied at a constant cycle. Then, the vibrating body 112 repeats the operation in which the front end portion (the portion to which the driving convex portion 114 is attached) in the longitudinal direction (X direction) swings the head in the left-right direction (Y direction) on the drawing. For example, as shown in FIG. 4B, each time the positive voltage is applied to the set of the front electrode 116a and the front electrode 116d, the vibrating body 112 repeats the operation in which the longitudinal tip moves to the right. . Further, as illustrated in FIG. 4C, each time the positive voltage is applied to the set of the front electrode 116 b and the front electrode 116 c, the vibrating body 112 repeats the operation in which the longitudinal end portion moves to the left. . Such an operation of the vibrating body 112 is referred to as “bending vibration”. Also for such flexural vibration, there exists a resonance frequency determined by the physical properties of the vibrating body 112 and the dimensions (width W, length L, thickness T) of the vibrating body 112. Therefore, when a positive voltage is applied to the two front electrodes 116 that are diagonal to each other at the resonance frequency, the vibrating body 112 vibrates with a large swing in the right or left direction (Y direction).

  Here, both the resonance frequency of the stretching vibration shown in FIG. 4A and the resonance frequency of the bending vibration shown in FIG. 4B or FIG. It is determined by the dimensions (width W, length L, thickness T). Therefore, if the dimensions (width W, length L, thickness T) of the vibrating body 112 are appropriately selected, the two resonance frequencies can be matched. When a voltage in the form of bending vibration as shown in FIG. 4B or FIG. 4C is applied to such a vibrating body 112 at the resonance frequency, FIG. 4B or FIG. 4), the stretching vibration of FIG. 4A is also induced by resonance. As a result, when a voltage is applied to the set of the front electrode 116a and the front electrode 116d in the mode shown in FIG. 4B, the tip of the vibrating body 112 (the portion to which the drive convex portion 114 is attached) is on the drawing. Perform an action (ellipse motion) to draw an ellipse clockwise. When a voltage is applied to the set of the front electrode 116b and the front electrode 116c in the mode shown in FIG. 4C, the tip of the vibrating body 112 performs a counterclockwise elliptical motion on the drawing.

  The piezoelectric motor 10 drives an object using such elliptical motion. That is, the elliptical motion is generated in a state where the driving convex portion 114 of the vibrating body 112 is pressed against the object. Then, when the vibrating body 112 contracts, the driving convex portion 114 moves from the left to the right (or from the right to the left) while being pressed against the object when the vibrating body 112 extends. The operation of returning to the original position while being away from the object is repeated. As a result, the object is driven in one direction by the frictional force received from the drive convex portion 114. Further, since the driving force received by the object is equal to the frictional force generated between the driving convex part 114, the magnitude of the driving force is determined by the friction coefficient between the driving convex part 114 and the target object and the driving convex part. 114 is determined by the force pressed against the object.

  As is apparent from the operation principle of the piezoelectric motor 10 described above, the piezoelectric motor 10 needs to be used in a state where the drive convex portion 114 is pressed against the object. For this reason, in the piezoelectric motor 10 of the present embodiment, the main body portion 100 including the driving convex portion 114 is movable with respect to the base portion 200, and is provided between the main body portion 100 and the base portion 200. The drive spring 114 protruding from the main body 100 is pressed against the object by the pressing spring 222s (see FIG. 1).

  Further, when the object is driven, the driving convex portion 114 receives a reaction force from the object. This reaction force is transmitted to the main body 100. As described above, the main body 100 must be movable with respect to the base 200, but if the main body 100 escapes in a direction perpendicular to the moving direction due to the reaction force received during driving, Therefore, it becomes impossible to transmit a sufficient driving force. Further, when the main body portion 100 escapes, the amount of movement of the driving convex portion 114 decreases, so the driving amount of the object decreases. Furthermore, since the escape amount of the main body 100 is not always stable, the drive amount of the object becomes unstable. Therefore, as shown in FIG. 1, in the piezoelectric motor 10 of the present embodiment, the main body 100 is moved to the second side wall block 220 by the front pressure spring 212 s and the rear pressure spring 216 s from the direction orthogonal to the moving direction of the main body 100. It comes to push.

  Furthermore, the vibrating body 112 must be housed in the vibrating body case 120 in a state where the vibration of the vibrating body 112 (stretching vibration and bending vibration) is allowed so that the drive convex portion 114 moves elliptically. Therefore, as shown in FIG. 2, in the piezoelectric motor 10 of the present embodiment, the direction (Z direction) intersecting the bending direction of the vibrating body 112 (Y direction: the direction in which the end portion provided with the driving convex portion 114 moves). The vibrating body 112 is housed in the vibrating body case 120 in a state of being sandwiched by the support member 130 from the direction in which both the front electrode 116 and the back electrode of the vibrating body 112 are provided. When the vibrating body 112 vibrates due to the application of voltage, the vibration of the vibrating body 112 is allowed by the support member 130 being deformed in the shearing direction. it can. In addition, by holding the vibrating body 112 by the support member 130 from the direction intersecting the bending direction, energy loss due to the transmission of bending vibration to the vibrating body case 120 as compared with the case where the vibrating body 112 is held from the bending direction. And the object can be driven efficiently.

  Such a support member 130 is formed of a resin material such as polyimide, and as the thickness of the support member 130 increases, deformation in the shearing direction (shear deformation) becomes easier, and the allowable vibration body 112 of the vibration member 112 is. Amplitude (degree of freedom of vibration) increases. Then, the amount of movement of the drive convex portion 114 increases, and the drive amount and drive speed of the object are improved, so that it acts in an advantageous direction for driving the object. However, the support member 130 is rigid when deformed in the shear direction, and supports the reaction force that the driving convex portion 114 receives from the object. However, when the support member 130 is thick, shear deformation becomes easy. The rigidity for supporting the reaction force from the object is lowered, and the driving of the object is reduced. As described above, the support member 130 is set to an appropriate thickness so as to have an appropriate rigidity to support the reaction force that the drive convex portion 114 receives from the object while allowing the vibration body 112 to vibrate by shear deformation. There is a need. In the piezoelectric motor of this embodiment, the vibrating body 112 (width: 7.5 mm, length: 30.0 mm, thickness: 3.0 mm) is sandwiched from both sides by the support member 130 having a thickness of 1.0 mm. It has become.

  Here, as described above, the front electrode 116 and the back electrode are provided on both surfaces of the vibrating body 112 sandwiched by the support member 130 (both surfaces facing in the direction intersecting with the bending direction of the vibrating body 112). Various wires (interelectrode wires 300a and 300b, external wires 304a and 304b, and ground wires 306) for applying a voltage to the vibrating body 112 are joined to these electrodes by solder 302. Then, the external electric wires 304a and 304b are drawn around the vibrating body case 120, and are drawn out from a drawing hole provided on the side (rear side) opposite to the side from which the driving projection 114 of the vibrating body case 120 protrudes. . However, in the system in which the same surface as the surface of the vibrating body 112 on which the surface electrode 116 is provided is sandwiched between the support members 130, the external electric wires 304 a and 304 b are passed between the surface electrode 116 of the vibrating body 112 and the lid plate 140. In other words, the support member 130 needs to be routed around. In addition, the external electric wires 304 a and 304 b should not come into contact with the vibrating body 112 and inhibit the vibration of the vibrating body 112. Therefore, in the piezoelectric motor 10 of the present embodiment, the external electric wires 304a and 304b are routed in the vibrating body case 120 as follows.

C. External wire routing:
FIG. 5 is an explanatory diagram showing a state in which the external electric wires 304a and 304b are routed in the vibrating body case 120 of the present embodiment by taking a cross section of the main body 100 in the XY plane. As shown in the drawing, gaps G are provided between the vibrating body case 120 and both sides of the vibrating body 112 in the bending direction (Y direction). In addition, two lead holes 124a and 124b for pulling out the external electric wires 304a and 304b one by one are provided on the side (rear side) opposite to the side from which the drive projection 114 protrudes of the vibrating body case 120. These lead holes 124 a and 124 b are formed on the respective extensions obtained by extending the gaps G on both sides of the vibrating body 112 toward the rear side of the vibrating body case 120. For this reason, if the external electric wires 304a and 304b are pulled out one by one from the drawing holes 124a and 124b, the routing of the external electric wires 304a and 304b is naturally guided to the gap G on both sides of the vibrating body 112. Thus, the external electric wires 304a and 304b can be routed without interfering with the vibration of the vibrating body 112.

  In addition, after pulling out the external electric wires 304a and 304b from the drawing holes 124a and 124b, an adhesive or the like may be injected into the drawing holes 124a and 124b to fix the external electric wires 304a and 304b. In this way, since the external wires 304a and 304b are positioned by the drawing holes 124a and 124b, the direction in which the external wires 304a and 304b are routed can be defined, and the drawn out external wires 304a and 304b can be defined. Even if a force pulling outward is applied to 304b, it is possible to prevent the external electric wires 304a and 304b from coming off.

  In addition, when the external electric wires 304a and 304b are joined to the front electrode 116 with the solder 302, the wiring direction is not the rear side of the vibrating body case 120 (the side where the lead holes 124a and 124b are provided), but the vibrating body 112. It is joined toward the outside in the bending direction (the side where the gap G is provided). Thereby, the external electric wires 304 a and 304 b joined to the surface electrode 116 can be guided to the gap G on both sides of the vibrating body 112. In addition, when the external electric wires 304a and 304b are bent so as to be accommodated in the vibrating body case 120, the bent portion increases the waist (elasticity to keep the original state) compared to the non-bent portion. Since the external electric wires 304a and 304b are biased in a direction away from the vibrating body 112 (a direction approaching the vibrating body case 120), it is possible to suppress the external electric wires 304a and 304b from contacting the vibrating body 112.

  Furthermore, in the piezoelectric motor 10 of the present embodiment, two surface electrodes 116 that are diagonal to each other among the four surface electrodes 116 of the vibrating body 112 are assembled (a group of the surface electrode 116a and the surface electrode 116d, a surface electrode 116b, As a set of front electrodes 116c), not the front electrodes 116 (front electrodes 116c and 116d) on the side close to the respective extraction holes 124a and 124b, but the front electrodes 116 (front electrodes) on the side far from the extraction holes 124a and 124b. 116a and the surface electrode 116b), external electric wires 304a and 304b are respectively joined. By doing so, even if the external electric wires 304a and 304b come into contact with the vibrating body 112, the vibrating body 112 is brought into contact with a portion (node) where the amplitude of the bending vibration is small. Interference can be suppressed. Hereinafter, this point will be supplementarily described.

  FIG. 6 is an explanatory view showing a node portion of the vibrating body 112. As described above with reference to FIG. 4, the vibrating body 112 includes a pair of two front electrodes 116 that are diagonally positioned with respect to the four front electrodes 116 (a pair of the front electrode 116 a and the front electrode 116 d, a front electrode 116 b, and a front surface). When a positive voltage is applied as a set of electrodes 116c) at a constant cycle, the vibrating body 112 repeats bending vibration so that the driving convex portion 114 swings in the left-right direction (Y direction) on the drawing. In FIG. 6, a state in which no positive voltage is applied to the vibrating body 112 is indicated by a broken line, and a positive voltage is applied to the set of the surface electrode 116 a and the surface electrode 116 d of the vibrating body 112, so that the drive convex portion 114 is moved to the right. The state moved in the direction is indicated by a solid line.

  The vibration body 112 that flexes and vibrates in this manner does not vibrate with the same amplitude (moves in the Y direction) as shown in FIG. Abdominal portions 117 (117a, 117b) that vibrate at, and nodal portions 118 that are portions where the amplitude of flexural vibration is smaller than that of the distal end portion or the abdominal portion 117. The vibrating body 112 according to the present embodiment includes a central node 118b at the center in the longitudinal direction (X direction) of the vibrating body 112, a front node 118a on the side close to the driving convex 114, and a side far from the driving convex 114. The rear node 118c has three nodes 118.

  Of these three node portions 118, the front node portion 118a and the rear node portion 118c are portions where the support member 130 holds the vibrating body 112 (see FIG. 5). When the node 118 of the vibrating body 112 is sandwiched between the support members 130 in this way, the vibration body 112 is more flexibly vibrated than when a portion different from the node 118 (such as the abdomen 117) is sandwiched. Since the amplitude of the bending vibration of the vibrating body 112 (the amount of movement of the drive protrusion 114) can be increased without increasing the amount of deformation of the support member 130 in the shear direction, the object can be efficiently driven. Is advantageous.

  Further, in the central node 118b not sandwiched between the support members 130, wiring to the front electrode 116 (joining of the inter-electrode wires 300a and 300b and the external wires 304a and 304b with the solder 302) is performed (FIG. 5). As described above, if the wiring to the surface electrode 116 is performed at the node portion 118 where the amplitude of the bending vibration is small, the wiring hinders the bending vibration of the vibrating body 112 as compared with the case where the wiring is performed at the abdominal portion 117 where the amplitude of the bending vibration is large. It is difficult to prevent the wiring from coming off due to the bending vibration of the vibrating body 112.

  Further, the external electric wires 304a and 304b are joined to the surface electrodes 116 (the front electrode 116a and the front electrode 116b) on the side far from the lead holes 124a and 124b, respectively, so that the external electric wires 304a and 304b are arranged on both sides of the vibrating body 112. Even if it contacts the vibrating body 112 in the middle of being drawn around the gap G, as shown in FIG. 5, it comes into contact with the central node 118b, so that the vibrating body is compared with the case where it touches the abdomen 117. Interference with the bending vibration of 112 can be suppressed. In addition, when the external electric wires 304a and 304b come into contact with the node portion 118 of the vibrating body 112, the contacted portion is supported and the direction in which the external electric wires 304a and 304b are routed is defined in a direction away from the vibrating body 112. Therefore, it is possible to suppress the external electric wires 304a and 304b from coming into contact with the abdomen 117 of the vibrating body 112 and the like.

D. Modified example:
Below, the modification of the piezoelectric motor 10 of the present Example mentioned above is demonstrated. In the description of the modified example, the same components as those of the above-described embodiment are denoted by the same reference numerals as those of the above-described embodiment, and the detailed description thereof is omitted.

D-1. First modification:
FIG. 7 is an explanatory view showing the extraction holes 124 a and 124 b provided in the vibrating body case 120 of the first modification by taking a cross section of the main body 100 in the XY plane. In the embodiment described above, the two lead-out holes 124 a and 124 b are provided in parallel to the inner wall surface (the inner surface on the side where the gap G is provided) of the vibrating body case 120 facing the bending direction of the vibrating body 112. (See FIG. 5). On the other hand, in the vibrating body case 120 of the first modified example, as shown in FIG. 7, the distance between the two lead-out holes 124 a and 124 b is smaller on the outer side than on the inner side of the vibrating body case 120. The slant body case 120 is formed obliquely with respect to the inner wall surface.

  When the external wires 304a and 304b are pulled out one by one from the outlet holes 124a and 124b formed obliquely in this way, the external wires 304a and 304b are bent inward in the bending direction of the vibrating body 112 (directions approaching each other). Will be. As described above, the bent portions of the external electric wires 304a and 304b have higher waists (elasticity to keep the original state) than the unbent portions, and the lower waists cause the external electric wires 304a and 304b to vibrate. Since it acts in the direction away from 112 (direction approaching the vibrating body case 120), it is suitable for suppressing the external electric wires 304a and 304b from contacting the vibrating body 112.

  Further, when fixing the external electric wires 304a and 304b by injecting adhesive or the like into the extraction holes 124a and 124b, if the extraction holes 124a and 124b are formed obliquely, the extraction holes 124a and 124b are formed in the vibrating body case. Compared with the case where it is parallel to the inner wall surface of 120, it is possible to secure a longer fixing range, which is suitable for positioning the external electric wires 304a and 304b and preventing them from coming off.

D-2. Second modification:
FIG. 8 is an explanatory diagram showing a state in which the external electric wires 304a and 304b are routed in the vibrating body case 120 of the second modification. FIG. 8A shows a cross-sectional view of the main body 100 cut along the XY plane, and FIG. 8B shows the support member 130 and the vibrating body 112 cut along the XZ plane. A cross-sectional view is shown. As shown in FIG. 8A, in the second modification, unlike the above-described embodiment (see FIG. 5), the external electric wires 304a and 304b are connected to the lead holes 124a and 124b among the four surface electrodes 116 of the vibrating body 112. Are connected to the surface electrode 116 (surface electrode 116c, surface electrode 116d) on the side close to each other, and the wiring direction is directed toward the rear side of the vibrating body case 120 (the side on which the extraction holes 124a and 124b are provided). Bonded with solder 302.

  Further, as shown in FIG. 8B, a groove-shaped guide passage through which the external electric wires 304a and 304b are passed one by one on the upper surface of the support member 130 that sandwiches the vibrating body 112 (the surface on which the cover plate 140 is superimposed). 132a and 132b are provided. As shown in FIG. 8 (a), the guide passages 132a and 132b face the exit side (side near the extraction holes 124a and 124b) toward the outside in the bending direction of the vibrating body 112 (side where the gap G is provided). Is formed. The support member 130 provided with the guide passages 132a and 132b sandwiches the rear node portion 118c of the vibrating body 112 (see FIG. 6). Further, the guide passages 132a and 132b of the second modified example correspond to the “passage portion” of the present invention.

  By passing the external electric wires 304a and 304b connected to the surface electrode 116 through the guide paths 132a and 132b of the support member 130, the external electric wires 304a and 304b are supported so as not to contact the vibrating body 112, and the external electric wires It is possible to guide the gaps G on both sides of the vibrating body 112 by defining the direction in which the wires 304a and 304b are routed. As a result, the external electric wires 304 a and 304 b can be routed in the vibrating body case 120 without hindering the bending vibration of the vibrating body 112.

  The shape of the guide passages 132a and 132b provided in the support member 130 is not limited to the groove as long as the external electric wires 304a and 304b can be passed so as not to be crushed. For example, a hole penetrating the support member 130 is provided. It may be.

D-3. Third modification:
FIG. 9 is an explanatory diagram showing external electric wires 304a and 304b connected to the surface electrode 116 of the vibrator 112 of the third modification. In the third modification, the external electric wires 304a and 304b are not flexible electric wires but are formed of electric wires having a property of plastic deformation. “Plastic deformation” refers to deformation that deforms by applying a force exceeding a certain limit and does not return to its original shape even if the force is removed. The external electric wires 304a and 304b are preliminarily bent with a routing shape in the vibrating body case 120. That is, as shown in FIG. 9, in a state where the external wires 304a and 304b are joined to the surface electrodes 116 (the surface electrodes 116a and 116b) of the vibrating body 112 with the solder 302, the external electric wires 304a and 304b are first moved upward ( Bend to the rear side of the vibrating body case 120 so as not to hit the cover plate 140, and then bend the vibrating body 112 at the approximate center in the longitudinal direction (X direction) of the vibrating body 112. It is bent toward the outside in the direction (the side where the gap G is provided). Subsequently, it is bent downward along the inner wall surface of the vibrating body case 120 and further bent toward the rear side of the vibrating body case 120 so as to pass through the gap G on both sides of the vibrating body 112 (see FIG. 5). .

  As described above, the external electric wires 304a and 304b are appropriately deformed in advance so as not to come into contact with the vibrating body 112 by using plastically deformed electric wires. The external wires 304a and 304b can be routed in the case 120.

E. Application example:
The piezoelectric motor 10 of the present embodiment described above or the piezoelectric motor 10 of the modified example can be suitably incorporated as a drive device of the following device because it is small and can accurately drive an object.

  FIG. 10 is a perspective view illustrating an electronic component inspection apparatus 600 configured by incorporating the piezoelectric motor 10 of this embodiment. The illustrated electronic component inspection apparatus 600 generally includes a base 610 and a support base 630 erected on the side surface of the base 610. On the upper surface of the base 610, an upstream stage 612u on which the electronic component 1 to be inspected is placed and transported, and a downstream stage 612d on which the inspected electronic component 1 is placed and transported are provided. ing. Further, between the upstream stage 612u and the downstream stage 612d, an imaging device 614 for confirming the posture of the electronic component 1 and an inspection table on which the electronic component 1 is set for inspecting electrical characteristics. 616 is provided. Representative examples of the electronic component 1 include “semiconductor”, “display device such as CLD and OLED”, “crystal device”, “various sensors”, “inkjet head”, “various MEMS devices”, and the like. It is done. The inspection table 616 of this embodiment corresponds to the “inspection socket” of the present invention.

  Further, the support base 630 is provided with a Y stage 632 that can move in a direction (Y direction) parallel to the upstream stage 612u and the downstream stage 612d of the base 610. From the Y stage 632, the base An arm portion 634 extends in a direction toward the 610 (X direction). An X stage 636 is provided on the side surface of the arm 634 so as to be movable in the X direction. The X stage 636 is provided with an imaging camera 638 and a gripping device 650 incorporating a Z stage movable in the vertical direction (Z direction). In addition, a grip portion 652 that grips the electronic component 1 is provided at the tip of the grip device 650. Further, a control device 618 for controlling the entire operation of the electronic component inspection device 600 is also provided on the front side of the base 610. In this embodiment, the Y stage 632, the arm portion 634, the X stage 636, and the gripping device 650 provided on the support base 630 correspond to the “electronic component conveying device” of the present invention. Further, the X stage 636, the Y stage 632, and the Z stage built in the gripping device 650 correspond to the “moving device” of the present invention. Furthermore, the control device 618 of the present embodiment corresponds to the “first control unit”, “second control unit”, and “third control unit” of the present invention.

  The electronic component inspection apparatus 600 having the above configuration inspects the electronic component 1 as follows. First, the electronic component 1 to be inspected is placed on the upstream stage 612u and moved to the vicinity of the inspection table 616. Next, the Y stage 632 and the X stage 636 are moved to move the gripping device 650 to a position just above the electronic component 1 placed on the upstream stage 612u. At this time, the position of the electronic component 1 can be confirmed using the imaging camera 638. Then, when the gripping device 650 is lowered using the Z stage built in the gripping device 650 and the electronic component 1 is gripped by the gripping portion 652, the gripping device 650 is moved onto the imaging device 614 as it is. The posture of the electronic component 1 is confirmed using the device 614. Subsequently, the posture of the electronic component 1 is adjusted using a fine adjustment mechanism built in the gripping device 650. Then, after the gripping device 650 is moved onto the inspection table 616, the Z stage built in the gripping device 650 is moved to set the electronic component 1 on the inspection table 616. Since the attitude of the electronic component 1 is adjusted using the fine adjustment mechanism in the gripping device 650, the electronic component 1 can be set at the correct position on the inspection table 616. When the inspection of the electrical characteristics of the electronic component 1 is completed using the inspection table 616, the electronic component 1 is again picked up from the inspection table 616, and then the Y stage 632 and the X stage 636 are moved to the downstream side. The gripping device 650 is moved above the side stage 612d, and the electronic component 1 is placed on the downstream stage 612d. Thereafter, the downstream stage 612d is moved to transport the electronic component 1 whose inspection has been completed to a predetermined position.

  FIG. 11 is an explanatory diagram of a fine adjustment mechanism built in the gripping device 650. As shown in the figure, a gripping device 650 is provided with a rotating shaft 654 connected to the gripping portion 652, a fine adjustment plate 656 to which the rotating shaft 654 is rotatably attached, and the like. The fine adjustment plate 656 is movable in the X direction and the Y direction while being guided by a guide mechanism (not shown).

  Here, as shown by hatching in FIG. 11, a piezoelectric motor 10θ for rotation direction is mounted toward the end surface of the rotation shaft 654, and a drive convex portion (not shown) of the piezoelectric motor 10θ is provided. It is pressed against the end surface of the rotating shaft 654. Therefore, by operating the piezoelectric motor 10θ, the rotation shaft 654 (and the gripping portion 652) can be accurately rotated by an arbitrary angle in the θ direction. In addition, an X-direction piezoelectric motor 10x and a Y-direction piezoelectric motor 10y are provided toward the fine adjustment plate 656, and drive convex portions (not shown) are provided on the surface of the fine adjustment plate 656. It is pressed. Therefore, by operating the piezoelectric motor 10x, the fine adjustment plate 656 (and the grip portion 652) can be accurately moved by an arbitrary distance in the X direction. Similarly, by operating the piezoelectric motor 10y, Fine adjustment plate 656 (and gripping portion 652) can be accurately moved by an arbitrary distance in the Y direction. Therefore, the electronic component inspection apparatus 600 of FIG. 10 can finely adjust the posture of the electronic component 1 gripped by the gripping portion 652 by operating the piezoelectric motor 10θ, the piezoelectric motor 10x, and the piezoelectric motor 10y. In this embodiment, the piezoelectric motor 10x and the piezoelectric motor 10y correspond to the “first piezoelectric motor” and the “second piezoelectric motor” of the present invention, respectively, and the piezoelectric motor 10θ corresponds to the “third piezoelectric motor” of the present invention. Corresponds to "motor". Further, the fine adjustment mechanism including the rotation shaft 654, the fine adjustment plate 656, the piezoelectric motor 10θ, the piezoelectric motor 10x, and the piezoelectric motor 10y corresponds to the “drive device” of the present invention.

  FIG. 12 is a perspective view illustrating a printing apparatus 700 in which the piezoelectric motor 10 of this embodiment is incorporated. The illustrated printing apparatus 700 is a so-called inkjet printer that prints an image by ejecting ink onto the surface of the print medium 2. The printing apparatus 700 has a substantially box-shaped appearance, and is provided with a paper discharge tray 701, a discharge port 702, and a plurality of operation buttons 705 at the front center. A supply tray 703 is provided on the back side. When the print medium 2 is set on the supply tray 703 and the operation button 705 is operated, the print medium 2 is sucked from the supply tray 703 and an image is printed on the surface of the print medium 2 inside the printing apparatus 700, and then discharged. It is discharged from the outlet 702.

  Inside the printing apparatus 700, a carriage 720 that reciprocates in the main scanning direction on the printing medium 2 and a guide rail 710 that guides the movement of the carriage 720 in the main scanning direction are provided. The illustrated carriage 720 includes an ejection head 722 that ejects ink onto the print medium 2, a drive unit 724 that drives the carriage 720 in the main scanning direction, and the like. A plurality of ejection nozzles are provided on the bottom surface side of the ejection head 722 (the side facing the print medium 2), and ink can be ejected from the ejection nozzles toward the print medium 2. The drive unit 724 is equipped with piezoelectric motors 10m and 10s. The driving convex portion (not shown) of the piezoelectric motor 10m is pressed against the guide rail 710. For this reason, the carriage 720 can be moved in the main scanning direction by operating the piezoelectric motor 10m. Further, the driving convex portion 114 of the piezoelectric motor 10 s is pressed against the ejection head 722. For this reason, by operating the piezoelectric motor 10 s, it is possible to bring the bottom surface side of the ejection head 722 closer to the print medium 2 or away from the print medium 2. Further, in the printing apparatus 700 using so-called roll paper as the print medium 2, a mechanism for cutting the roll paper on which an image is printed is required. In such a case, the roll paper can be cut by attaching a cutter to the carriage 720 and moving it in the main scanning direction.

  FIG. 13 is an explanatory view illustrating a robot hand 800 incorporating the piezoelectric motor 10 of this embodiment. The illustrated robot hand 800 has a plurality of fingers 803 standing from a base 802 and is connected to an arm 810 via a wrist 804. Here, the base portion of the finger portion 803 is movable in the base 802, and the piezoelectric motor 10f is mounted in a state where the driving convex portion 114 is pressed against the base portion of the finger portion 803. For this reason, by operating the piezoelectric motor 10f, the finger part 803 can be moved and the object can be gripped. In addition, the piezoelectric motor 10r is mounted on the wrist 804 in a state where the driving convex portion 114 is pressed against the end surface of the wrist 804. For this reason, the whole base 802 can be rotated by operating the piezoelectric motor 10r.

  FIG. 14 is an explanatory diagram illustrating a robot 850 including the robot hand 800. As illustrated, the robot 850 includes a plurality of arms 810 and a joint portion 820 that connects the arms 810 in a bendable state. The robot hand 800 is connected to the tip of the arm 810. In the joint portion 820, a piezoelectric motor 10j is incorporated as an actuator for bending the joint portion 820. For this reason, each joint part 820 can be bent by an arbitrary angle by operating the piezoelectric motor 10j.

  As described above, the piezoelectric motor of the present invention and various devices equipped with the piezoelectric motor have been described. However, the present invention is not limited to the above-described embodiments, modified examples, and application examples, and various modifications can be made without departing from the scope of the invention. It is possible to implement in the mode.

10 ... piezoelectric motor, 100 ... main body, 110 ... vibrating part,
112 ... Vibrating body, 114 ... Drive projection, 116 ... Front electrode,
120 ... Vibrating body case, 124 ... Lead-out hole, 130 ... Supporting member,
132 ... guide passage, 140 ... lid plate, 142 ... disc spring,
144 ... Presser plate, 146 ... Set screw, 200 ... Base,
210 ... 1st side wall block, 220 ... 2nd side wall block, 230 ... board | substrate,
240 ... set screw, 300 ... interelectrode wire, 302 ... solder,
304 ... External wire, 306 ... Ground wire, 600 ... Electronic component inspection device,
610: Base, 612d: Downstream stage, 612u: Upstream stage,
614 ... Imaging device, 616 ... Inspection table, 618 ... Control unit,
630 ... support base, 634 ... arm, 638 ... imaging camera,
650 ... gripping device, 652 ... gripping part, 654 ... rotating shaft,
656 ... fine adjustment plate, 700 ... printing device, 701 ... discharge tray,
702 ... Discharge port, 703 ... Supply tray, 705 ... Operation buttons,
710: guide rails, 720 ... carriage, 722 ... jetting head,
724 ... Drive unit, 800 ... Robot hand, 802 ... Base,
803 ... finger part, 804 ... wrist, 810 ... arm,
820 ... Joint part, 850 ... Robot

Claims (11)

A piezoelectric motor for moving the object by applying a voltage to a vibrating body including a piezoelectric material to generate a bending vibration and bringing a convex portion provided at an end of the vibrating body into contact with the object. ,
A first electric wire and a second electric wire for applying a voltage to the vibrating body, wherein an end portion of the vibrating body provided with the convex portion is connected to a surface facing a bending direction moving by the bending vibration; ,
A housing case in which the protrusion is projected to house the vibrating body, and the first electric wire and the second electric wire are drawn out;
A support portion that is provided between the vibrating body and the storage case and sandwiches both surfaces of the vibrating body from a direction intersecting a bending direction of the vibrating body;
A first wire that joins the first electric wire to the vibrating body toward one side in a bending direction of the vibrating body.
A junction,
The second electric wire is joined to the vibrating body toward the other side in the bending direction of the vibrating body.
A joint and
On both sides in the bending direction of the vibrating body, a gap is provided between the storage case,
In the storage case, a first extraction hole and a second extraction hole are formed on an extension of each of the gaps on both sides of the vibrating body on the side opposite to the side on which the convex portion protrudes.
The first electric wire is drawn out of the storage case from the first lead hole, and the second electric wire is drawn out of the storage case from the second lead hole,
The vibrator is
A surface facing in a direction crossing the bending direction is divided into four grids, and four electrodes to which the voltage is applied;
An end provided with the convex portion and an abdomen having the same amplitude of the bending vibration;
A node having a smaller amplitude of the bending vibration than the abdomen,
Have
The four electrodes are a pair of two electrodes at diagonal positions, and each set of electrodes is connected by a third electric wire and a fourth electric wire at the node portion,
The first electric wire and the second electric wire are connected one by one to the two electrodes on the far side from the first extraction hole and the second extraction hole among the four electrodes at the node portion. A piezoelectric motor characterized by that. The piezoelectric motor according to claim 1,
The first extraction hole and the second extraction hole are formed obliquely with respect to an extending direction of the gap on both sides of the vibrating body so that a distance between the first extraction hole and the second extraction hole is smaller than the inside of the storage case. A piezoelectric motor characterized by A piezoelectric motor for moving the object by applying a voltage to a vibrating body including a piezoelectric material to generate a bending vibration and bringing a convex portion provided at an end of the vibrating body into contact with the object. ,
A first electric wire and a second electric wire for applying a voltage to the vibrating body, wherein an end portion of the vibrating body provided with the convex portion is connected to a surface facing a bending direction moving by the bending vibration; ,
A housing case in which the protrusion is projected to house the vibrating body, and the first electric wire and the second electric wire are drawn out;
A support portion that is provided between the vibrating body and the storage case and sandwiches both surfaces of the vibrating body from a direction intersecting a bending direction of the vibrating body;
With
On both sides in the bending direction of the vibrating body, a gap is provided between the storage case,
In the storage case, a first extraction hole and a second extraction hole are formed on an extension of each of the gaps on both sides of the vibrating body on the side opposite to the side on which the convex portion protrudes.
The first electric wire is drawn out of the storage case from the first lead hole, and the second electric wire is drawn out of the storage case from the second lead hole,
The piezoelectric motor, wherein the support portion is provided with a passage portion that allows the first electric wire and the second electric wire to pass therethrough and defines a wiring path of the first electric wire and the second electric wire. A drive device comprising the piezoelectric motor according to any one of claims 1 to 3 . A printing apparatus comprising the piezoelectric motor according to any one of claims 1 to 3 . A robot hand comprising the piezoelectric motor according to any one of claims 1 to 3 . A robot comprising the piezoelectric motor according to any one of claims 1 to 3 or the robot hand according to claim 7. An electronic component inspection device that inspects the electrical characteristics of the electronic component by mounting the gripped electronic component on an inspection socket,
An electronic component inspection apparatus that performs positioning of the electronic component with respect to the inspection socket using the piezoelectric motor according to any one of claims 1 to 3 . An inspection socket in which an electronic component is mounted and the electrical characteristics of the electronic component are inspected;
A gripping device for gripping the electronic component;
A moving device that moves the gripping device in a total of three axial directions including a first axis and a second axis orthogonal to each other and a third axis orthogonal to the first axis and the second axis;
The electronic component provided on the first shaft or the second shaft as viewed from the inspection socket and mounted on the inspection socket, the position in the direction of the first shaft and the second shaft, and the An imaging device that detects an angle around a third axis as a posture of the electronic component;
An upstream stage for transporting the electronic component from the inspection socket to the predetermined position on the first axis or the second axis connecting the imaging device;
From a predetermined position on the side opposite to the side where the imaging device is provided when viewed from the inspection socket,
A downstream stage for conveying the electronic component;
A control device for controlling the operation of the mobile device;
An electronic component inspection apparatus comprising:
The control device includes:
A first control unit that moves the gripping device that grips the electronic component conveyed by the upstream stage to above the imaging device;
A second control unit for mounting the electronic component whose posture is confirmed by the imaging device to the inspection socket by moving the gripping device;
A third control unit configured to place the electronic component whose electrical characteristics have been inspected by the inspection socket on the downstream stage by moving the gripping device;
With
The gripping device includes a first piezoelectric motor that moves the electronic component in the first axial direction based on the attitude of the electronic component detected by the imaging device, and a second that moves the electronic component in the second axial direction. And a third piezoelectric motor that rotates around the third axis,
The electronic component inspection apparatus according to any one of claims 1 to 3 , wherein the first to third piezoelectric motors are the piezoelectric motors according to any one of claims 1 to 3 . An electronic component transport device for transporting a gripped electronic component,
An electronic component transport apparatus, wherein the electronic component is aligned using the piezoelectric motor according to any one of claims 1 to 3 . A gripping device for gripping electronic components;
A moving device for moving the gripping device in a total of three axial directions including a first axis and a second axis orthogonal to each other and a third axis orthogonal to the first axis and the second axis;
A control device for controlling the operation of the mobile device;
An electronic component transport device comprising:
The gripping device includes a first piezoelectric motor that moves the electronic component in the first axis direction;
A second piezoelectric motor that moves in the second axis direction, and a third piezoelectric motor that rotates about the third axis.
With a piezoelectric motor
The electronic component transport apparatus according to any one of claims 1 to 3 , wherein the first to third piezoelectric motors are piezoelectric motors according to any one of claims 1 to 3 .

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