JP5849661B2 - Piezoelectric motor, drive device, electronic component inspection device, electronic component transport device, printing device, robot hand, and robot - Google Patents

Description

  The present invention relates to a piezoelectric motor, a driving device, an electronic component inspection device, an electronic component transport device, a printing device, a robot hand, and a robot.

  A piezoelectric motor that drives an object by vibrating a member (vibrating body) formed of a piezoelectric material is known. This piezoelectric motor is smaller than an electromagnetic motor that uses an electromagnetic force to rotate a rotor, but can obtain a large driving force, and can also position an object with high resolution. It has characteristics. For this reason, it is used as an actuator for various devices such as a camera drive mechanism.

  The piezoelectric motor operates on the following principle. First, the vibrating body is formed in a substantially rectangular parallelepiped shape, and a convex portion is provided on the end face in the longitudinal direction. Then, by applying a voltage having a predetermined frequency to the vibrating body, a vibration in a mode in which the vibrating body expands and contracts and a vibration in a mode in which the vibrating body bends are simultaneously generated. Then, the end face of the vibrating body starts an elliptical motion that rotates in one direction. Therefore, by pressing the convex portion provided on the end surface against the target object, the target object can be moved in a certain direction by the frictional force acting between the convex portion and the target object.

  From such an operating principle, it is necessary to use the piezoelectric motor in a state where the convex portion provided on the end face of the vibrating body is pressed against the object. In addition, it is necessary to hold the vibrating body so that the vibrating body does not escape due to the reaction force that the convex portion receives from the target when driving the target. Nevertheless, the vibration of the vibrating body must be allowed so that the convex part moves elliptically. Therefore, the vibrating body is housed in a holding case with the convex portion protruding, and in the holding case, both sides of the vibrating body are held from the bending direction via an elastic member, and the holding case together with the vibrating body is used as an object. There has been proposed a technique for energizing it (Patent Document 1).

JP 11-346486 A

  However, the proposed technique has a problem that it is difficult to efficiently use the energy generated by the vibrating body for driving the object. This is because both sides of the vibrating body are supported from the bending direction, so that the vibration of the vibrating body can be easily transmitted to the outside through the holding case, and the vibration transmitted to the outside can be used to drive the object. This is because it cannot be done.

  The present invention has been made to solve at least a part of the above-described problems of the conventional technology, and an object thereof is to provide a piezoelectric motor capable of efficiently driving an object.

In order to solve at least a part of the problems described above, the piezoelectric motor of the present invention employs the following configuration. That is,
A vibrating body formed including a piezoelectric material and having a protruding portion projecting from an end face;
A vibrating body case for housing the vibrating body;
Biasing means for biasing the vibrating body case in a direction in which the convex portion of the vibrating body is brought into contact with an object;
A piezoelectric motor that moves the object by generating stretching vibration and bending vibration in the vibrating body,
A buffer portion formed by including a material having dynamic viscoelasticity, sandwiching both sides of the vibrating body from a direction intersecting a bending direction of the vibrating body in the vibrating body case,
A holding lid attached to the vibrator case;
An elastic portion provided between the pressing lid and the buffer portion and compressed by the pressing lid;
With
Between the buffer portion and the elastic portion, there is provided a pressing plate in which movement of the vibrating body in the expansion / contraction direction and the bending direction is restricted.

  In the piezoelectric motor of the present invention having such a configuration, the vibrating body housed in the vibrating body case is sandwiched on both sides by the buffering portion from the direction intersecting the bending direction of the vibrating body. The vibration is difficult to be transmitted to the vibrating body case, and therefore the object can be driven efficiently. Moreover, since the buffer part is formed including the material which has dynamic viscoelasticity, the vibration of a vibrating body is attenuate | damped when a buffer part deform | transforms and it is hard to be transmitted to a vibrating body case also from this meaning. The dynamic viscoelasticity (tan δ) is an index as follows. When a sine wave strain ε is applied in the tensile mode of the material, a sine wave stress σ is also generated in the material, but the phase of the stress σ is delayed by a phase δ with respect to the input strain. An index obtained by quantifying the dynamic viscosity of the material using the phase δ is dynamic viscoelasticity (tan δ). That is, the fact that the dynamic viscoelasticity is large, that is, the phase δ is large causes a delay in transmission of a given strain inside the material. In other words, it is possible to further slow down the transmission of vibrations and suppress the transmission of vibrations to the vibrating body case. In addition, the buffer portion is pressed against the vibrating body by an elastic portion compressed by the pressing lid. For this reason, even if the dimensions of the vibrating body and the buffer portion vary in the holding direction of the vibrating body (the direction intersecting the bending direction of the vibrating body), variations can be absorbed by the elastic deformation of the elastic portion. Further, a pressing plate is provided between the buffer portion and the elastic portion, and the pressing plate is restricted from moving in the vibration direction of the vibrating body (the expansion / contraction direction and bending direction of the vibrating body). “Movement is restricted” means that the vehicle cannot move beyond a certain amount of movement. For this reason, even when the convex part of the vibrating body receives a reaction force from the object, the elastic part is not greatly deformed in the shearing direction because the movement of the pressing plate is restricted. As described above, according to the present invention, the dimensional variation in the holding direction of the vibrating body and the buffer portion is absorbed by the elastic portion being elastically deformed, and yet the reaction force from the vibrating direction of the vibrating body and the object. The elastic part can be prevented from being almost deformed with respect to the receiving direction. As a result, troublesome operations such as actually measuring the thickness of the vibrating body and the buffer and selecting and assembling the buffer with respect to the vibrating body become unnecessary, and the piezoelectric motor can be easily manufactured.

  In the piezoelectric motor of the present invention described above, the movement of the pressing plate may be limited by fitting the pressing plate to the pressing lid. For example, a recess is formed in a part of the presser lid, and a part of the presser plate (an end surface of the presser plate or a convex part protruding from the presser plate) fits into the recess of the presser lid. As a result, the pressing plate can be prevented from moving in the vibration direction (stretching direction and bending direction) of the vibrating body. Of course, the entire pressing plate may be fitted into the recess of the pressing lid. Furthermore, a concave portion may be formed in the pressing plate, and a convex portion protruding from the pressing lid may be fitted into the concave portion of the pressing plate.

  In this way, it is possible to easily realize a structure in which the buffer portion is pressed against the vibrating body by the elastic portion and the movement of the pressing plate is restricted.

  Further, in the above-described piezoelectric motor of the present invention, irregularities may be formed on the surface (contact surface) of the pressing plate in the portion that contacts the buffer portion. Or conversely, unevenness may be formed on the surface (contact surface) of the buffer portion at the portion in contact with the pressing plate.

  In this way, the elastic portion presses the holding plate, and the unevenness formed on the holding plate bites into the buffer portion, or the unevenness formed on the buffer portion bites into the holding plate, so that the buffer surface is buffered at the contact surface with the holding plate. The part becomes difficult to slip. For this reason, it becomes difficult to produce the situation where a vibrating body moves with the buffer part by the reaction force which a convex part receives during the drive of a target object. In addition, the unevenness | corrugation formed in a pressing plate or a buffer part can be made into the unevenness | corrugation of a various aspect. For example, it may be a sawtooth-shaped unevenness with a sharpened tip, or a fine unevenness that causes the surface to be rough. Alternatively, the unevenness formed on one side and the unevenness formed on the other may be fitted to both the pressing plate and the buffer part.

  Further, a driving device, a printing device, a robot hand, a robot, or the like may be configured using the above-described piezoelectric motor of the present invention.

  The piezoelectric motor of the present invention is small in size, can realize high driving accuracy, and can be easily manufactured. Therefore, if a drive device, a printing device, a robot hand, a robot, or the like is configured using the piezoelectric motor of the present invention, a small, high-performance drive device, a printing device, a robot hand, a robot, etc. can be easily manufactured. Can do.

  Moreover, you may comprise the following electronic component inspection apparatuses using the piezoelectric motor of this invention. That is, an electronic component inspection apparatus for inspecting the electrical characteristics of the electronic component by mounting the gripped electronic component on the inspection socket, and using any one of the above-described piezoelectric motors of the present invention, Parts may be aligned.

  As described above, the piezoelectric motor of the present invention is small in size, can achieve high driving accuracy, and can be easily manufactured. For this reason, it is possible to accurately align the electronic components and easily manufacture a small electronic component inspection apparatus.

Moreover, the electronic component inspection apparatus of the present invention described above can be grasped in the following manner. That is, the electronic component inspection apparatus of the present invention is
An electronic component inspection device that inspects the electrical characteristics of the electronic component by mounting the gripped electronic component on an inspection socket,
A piezoelectric motor for aligning the electronic component with the inspection socket;
The piezoelectric motor is
A vibrating body that is formed including a piezoelectric material, has a convex portion projecting from an end surface thereof, and performs stretching vibration and bending vibration;
A vibrating body case for housing the vibrating body;
Biasing means for biasing the vibrating body case in a direction in which the convex portion of the vibrating body is brought into contact with an object;
A buffer portion formed by including a material having dynamic viscoelasticity, sandwiching both sides of the vibrating body from a direction intersecting a bending direction of the vibrating body in the vibrating body case,
A holding lid attached to the vibrator case;
An elastic portion provided between the pressing lid and the buffer portion and compressed by the pressing lid;
With
A holding plate is provided between the buffer portion and the elastic portion, and the movement of the vibrating body in the expansion and contraction direction and the bending direction is limited. You can also.

Furthermore, the electronic component inspection apparatus of the present invention described above has the following aspect, that is,
An inspection socket in which an electronic component is mounted and the electrical characteristics of the electronic component are inspected;
A gripping device for gripping the electronic component;
A moving device for moving the grip device in a total of three axial directions including a first axis and a second axis orthogonal to each other and a third axis orthogonal to the first axis and the second axis;
The electronic component provided on the first shaft or the second shaft as viewed from the inspection socket and mounted on the inspection socket, the position in the direction of the first shaft and the second shaft, and the An imaging device for detecting an angle about a third axis;
An upstream stage for transporting the electronic component from the inspection socket to the predetermined position on the first axis or the second axis connecting the imaging device;
A downstream stage that conveys the electronic component from a predetermined position opposite to the side on which the imaging device is provided when viewed from the inspection socket;
An electronic component inspection device comprising: a control device that controls the operation of the mobile device,
The controller is
A first control unit that moves the gripping device that grips the electronic component conveyed by the upstream stage to above the imaging device;
A second control unit for mounting the electronic component whose posture is confirmed by the imaging device to the inspection socket by moving the gripping device;
A third control unit configured to place the electronic component whose electrical characteristics have been inspected by the inspection socket on the downstream stage by moving the gripping device;
With
The gripping device includes a first piezoelectric motor that moves the electronic component in the first axial direction based on the attitude of the electronic component detected by the imaging device, and a second that moves the electronic component in the second axial direction. And a third piezoelectric motor that rotates around the third axis,
Said 1st thru | or 3rd piezoelectric motor is a piezoelectric motor as described in any one of Claim 1 thru | or 4, It can also grasp | ascertain in the aspect of the electronic component inspection apparatus characterized by the above-mentioned.

  The electronic component inspection apparatus having such a configuration can be mounted on the inspection socket after adjusting the posture of the electronic component using the first to third piezoelectric motors provided in the gripping device. Here, the piezoelectric motor of the present invention is small in size, can drive an object efficiently and accurately, and can be easily manufactured, so the first to third piezoelectric elements provided in the gripping device. It is particularly excellent as a motor.

  Furthermore, you may comprise the following electronic component conveyance apparatuses using the piezoelectric motor of this invention. In other words, the electronic component conveying apparatus conveys the gripped electronic component, and the electronic component may be aligned using any one of the above-described piezoelectric motors of the present invention.

  As described above, the piezoelectric motor of the present invention is small in size, can drive an object efficiently and accurately, and can be easily manufactured. Especially excellent.

Or the electronic component conveyance apparatus of this invention is the following aspects, namely,
An electronic component transport device for transporting a gripped electronic component,
A piezoelectric motor for aligning the electronic components;
The piezoelectric motor is
A vibrating body that is formed including a piezoelectric material, has a convex portion projecting from an end surface thereof, and performs stretching vibration and bending vibration;
A vibrating body case for housing the vibrating body;
Biasing means for biasing the vibrating body case in a direction in which the convex portion of the vibrating body is brought into contact with an object;
A buffer portion formed by including a material having dynamic viscoelasticity, sandwiching both sides of the vibrating body from a direction intersecting a bending direction of the vibrating body in the vibrating body case,
A holding lid attached to the vibrator case;
An elastic portion provided between the pressing lid and the buffer portion and compressed by the pressing lid;
With
A holding plate is provided between the buffer portion and the elastic portion to restrict movement of the vibrating body in the expansion / contraction direction and the bending direction. You can also.

Furthermore, the electronic component conveying apparatus of the present invention described above has the following aspects, that is,
A gripping device for gripping electronic components;
A moving device that moves the handle device in a total of three axial directions including a first axis and a second axis orthogonal to each other and a third axis orthogonal to the first axis and the second axis;
An electronic component transport device comprising: a control device that controls the operation of the moving device,
The gripping device includes: a first piezoelectric motor that moves the electronic component in the first axis direction; a second piezoelectric motor that moves the electronic component in the second axis direction; and a third piezoelectric motor that rotates about the third axis. A piezoelectric motor,
Said 1st thru | or 3rd piezoelectric motor is a piezoelectric motor as described in any one of Claim 1 thru | or 4, It can also grasp | ascertain in the aspect of the electronic component conveyance apparatus characterized by the above-mentioned.

It is explanatory drawing which showed the rough structure of the piezoelectric motor of a present Example. It is an exploded view which shows the structure of the main-body part of a present Example. It is explanatory drawing which shows the operation principle of a piezoelectric motor. It is sectional drawing which showed the clamping method of the vibrating body. It is explanatory drawing which showed the clamping method of the vibrating body. It is sectional drawing which showed the clamping method of the 1st modification. It is sectional drawing which showed the clamping method of the 2nd modification. It is the perspective view which illustrated the electronic component inspection apparatus comprised incorporating the piezoelectric motor of a present Example. It is explanatory drawing about the fine adjustment mechanism incorporated in the holding | grip apparatus. It is the perspective view which illustrated the printing apparatus incorporating the piezoelectric motor of a present Example. It is explanatory drawing which illustrated the robot hand incorporating the piezoelectric motor of a present Example. It is explanatory drawing which illustrated the robot provided with the robot hand.

Hereinafter, in order to clarify the contents of the present invention described above, examples will be described in the following order.
A. Device configuration:
B. Principle of operation of piezoelectric motor:
C. Vibration body clamping structure:
D. Variation:
E. Application example:

A. Device configuration :
FIG. 1 is an explanatory diagram showing a rough configuration of the piezoelectric motor 10 of the present embodiment. FIG. 1 (a) shows an overall view of the piezoelectric motor 10 of this embodiment, and FIG. 1 (b) shows an exploded view. As shown in FIG. 1A, the piezoelectric motor 10 according to the present embodiment is roughly composed of a main body portion 100 and a base portion 200. The main body portion 100 is attached to the base portion 200 and is movable in one direction in that state. In the present specification, the moving direction of the main body 100 is referred to as the X direction. Further, as shown in the figure, directions orthogonal to the X direction are referred to as a Y direction and a Z direction, respectively.

  The main body portion 100 and the base portion 200 are each configured by combining a plurality of parts. For example, the base part 200 is configured by fastening the first side wall block 210 and the second side wall block 220 with set screws 240 on both sides of the upper surface of the substantially rectangular substrate 230 (FIG. 1B). )checking). When assembling the piezoelectric motor 10, the first side wall block 210 and the second side wall block 220 are attached to the substrate 230 from above the main body 100 using the set screw 240.

  In addition, the first side wall block 210 is formed with three concave portions of a front housing 212, a central housing 214, and a rear housing 216. When the first side wall block 210 is attached to the substrate 230, the front side pressure spring 212 s is accommodated in the front housing 212 and the rear side pressure spring 216 s is accommodated in the rear housing 216. As a result, the main body 100 is pressed against the second side wall block 220 by the front pressure spring 212s and the rear pressure spring 216s. A front roller 102r and a rear roller 106r are attached to the side of the main body 100 facing the second side wall block 220. Further, a pressure spring 222 s is provided on the side surface of the main body 100. The pressurizing spring 222s presses the main body 100 in the X direction at a location behind the front roller 102r. In this embodiment, the pressure spring 222s that presses the main body 100 in the X direction corresponds to the “biasing means” of the present invention.

  A pressing roller 104r is provided on the side surface of the main body 100 opposite to the side on which the front roller 102r and the rear roller 106r are provided in the Z direction (upward in the drawing). With the first side wall block 210 attached, the pressing roller 104r is housed in the central housing 214 of the first side wall block 210. A pressing spring 232 s is provided between the back surface side of the portion of the main body 100 where the pressing roller 104 r is provided and the substrate 230. For this reason, the pressing roller 104r is pressed against the inner surface of the central housing 214 in the Z direction (upward in the drawing).

  FIG. 2 is an exploded view showing the structure of the main body 100 of this embodiment. The main body 100 generally has a structure in which the vibration part 110 is housed in the vibration body case 120. The vibrating unit 110 includes a vibrating body 112 formed in a rectangular parallelepiped shape by a piezoelectric material, a ceramic driving convex 114 attached to an end face in the longitudinal direction (X direction) of the vibrating body 112, and one of the vibrating bodies 112. It is composed of four surface electrodes 116 provided by dividing the side surface into four. Although not shown in FIG. 2, a back electrode covering almost the entire side surface is provided on the side surface opposite to the side on which the four front electrodes 116 are provided. This back electrode is connected to the ground. Grounded. In this embodiment, the driving convex portion 114 corresponds to the “convex portion” of the present invention.

  The vibration part 110 is formed of a material having dynamic viscoelasticity (polyimide resin, rubber, elastomer, or the like) from both side surfaces (both side surfaces in the Z direction in FIG. 2) where the front electrode 116 and the back electrode are provided. The vibrating body case 120 is housed in a state of being sandwiched between the buffer portions 130. Further, a plate-like pressing plate 140 made of a metal material, an elastic portion 142, and a pressing lid 144 are placed on the buffer portion 130 on the surface electrode 116 side, and the pressing lid 144 is a vibrating body with a set screw 146. Fastened to case 120. For this reason, the vibration unit 110 is housed in a state where the vibration body 112 can vibrate in the vibration body case 120 when the resin-made buffer section 130 is sheared and deformed while being pressed by the elastic force of the elastic portion 142. Yes. In this embodiment, a disc spring is used as the elastic portion 142. Further, the direction (Z direction) in which the buffer unit 130 clamps the vibrating body 112 from both sides is a direction that intersects the direction in which the vibrating body 112 bends and vibrates, as will be described later.

B. Principle of operation of piezoelectric motor:
FIG. 3 is an explanatory diagram showing the operation principle of the piezoelectric motor 10. The piezoelectric motor 10 operates when the driving convex portion 114 of the vibration unit 110 moves elliptically when a voltage is applied to the surface electrode 116 of the vibration unit 110 at a constant period. The drive convex part 114 of the vibration part 110 moves elliptically for the following reason.

  First, as is well known, a piezoelectric material has a property of expanding when a positive voltage is applied. Therefore, as shown in FIG. 3A, when applying a positive voltage to all the four surface electrodes 116 and then releasing the applied voltage repeatedly, the vibrating body 112 formed of the piezoelectric material becomes longitudinal ( The operation of expanding and contracting in the X direction is repeated. The operation in which the vibrating body 112 repeatedly expands and contracts in the longitudinal direction (X direction) is referred to as “stretching vibration”. Further, when the frequency at which the positive voltage is applied is changed, the amount of expansion / contraction suddenly increases when a certain frequency is reached, and a kind of resonance phenomenon occurs. The frequency at which resonance occurs due to stretching vibration (resonance frequency) is determined by the physical properties of the vibrating body 112 and the dimensions (width W, length L, thickness T) of the vibrating body 112.

  Further, as shown in FIG. 3B or FIG. 3C, a pair of two surface electrodes 116 that are diagonal to each other (a set of the front electrode 116a and the front electrode 116d, or a front electrode 116b and a front electrode 116c). A positive voltage is applied at a constant cycle. Then, the vibrating body 112 repeats an operation in which the front end portion (the portion to which the driving convex portion 114 is attached) in the longitudinal direction (X direction) swings the head in the right direction or the left direction on the drawing. For example, as shown in FIG. 3B, when a positive voltage is applied to the set of the front electrode 116a and the front electrode 116d at a constant period, the vibrating body 112 operates to swing the tip portion to the right in the drawing. repeat. Further, as shown in FIG. 3C, when a positive voltage is applied to the set of the front electrode 116b and the front electrode 116c at a constant period, the operation of swinging the tip portion leftward in the drawing is repeated. Such an operation of the vibrating body 112 is referred to as “bending vibration”. Also for such flexural vibration, there exists a resonance frequency determined by the physical properties of the vibrating body 112 and the dimensions (width W, length L, thickness T) of the vibrating body 112. Therefore, when a positive voltage is applied to the two front electrodes 116 that are diagonal to each other at the resonance frequency, the vibrating body 112 vibrates with a large swing in the right or left direction (Y direction).

  Here, both the resonance frequency of the stretching vibration shown in FIG. 3A and the resonance frequency of the bending vibration shown in FIG. 3B or FIG. It is determined by the dimensions (width W, length L, thickness T). Therefore, if the dimensions (width W, length L, thickness T) of the vibrating body 112 are appropriately selected, the resonance frequencies can be matched. When a voltage in the form of flexural vibration as shown in FIG. 3B or FIG. 3C is applied to such a vibrating body 112 at the resonance frequency, FIG. 3B or FIG. 3), the stretching vibration shown in FIG. 3A is also induced by resonance. As a result, when a voltage is applied in the manner shown in FIG. 3B, the tip portion of the vibrating body 112 (the portion to which the driving convex portion 114 is attached) starts an elliptical motion clockwise on the drawing. . When a voltage is applied in the manner shown in FIG. 3C, the tip of the vibrating body 112 starts an elliptical motion counterclockwise on the drawing.

  The piezoelectric motor 10 drives an object using such elliptical motion. That is, the elliptical motion is generated in a state where the driving convex portion 114 of the vibrating body 112 is pressed against the object. Then, when the vibrating body 112 contracts, the driving convex portion 114 moves from the left to the right (or from the right to the left) while being pressed against the object when the vibrating body 112 extends. The operation of returning to the original position while being away from the object is repeated. As a result, the object is driven in one direction by the frictional force received from the drive convex portion 114. Further, since the driving force received by the object is equal to the frictional force generated between the driving convex part 114, the magnitude of the driving force is determined by the friction coefficient between the driving convex part 114 and the target object and the driving convex part. 114 is determined by the force pressed against the object.

  As is apparent from the operation principle of the piezoelectric motor 10 described above, the piezoelectric motor 10 moves the vibrating body 112 in the expansion / contraction direction (X direction) and the bending direction (Y direction) in a state where the driving convex portion 114 is pressed against the object. ) Is used by vibrating. For this reason, the vibrating body 112 needs to be stored in the vibrating body case 120 in a state in which vibration in the expansion / contraction direction and the bending direction is allowed. Further, when the object is moved by vibrating the vibrating body 112, a reaction force from the object is applied to the drive convex portion 114. When the vibrating body 112 moves in the vibrating body case 120 due to the reaction force, a sufficient driving force cannot be transmitted to the object, and the amount of movement of the driving convex portion 114 is reduced. Becomes smaller. Furthermore, since the escape amount of the main body 100 is not always stable, the drive amount of the object becomes unstable. Therefore, in the piezoelectric motor 10 of the present embodiment, as shown in FIG. 2, the shock absorbers 130 are provided on both side surfaces of the vibrating body 112 from the direction (Z direction) intersecting the bending direction of the vibrating body 112 in the vibrating body case 120. A structure is employed in which the vibrating body 112 is held by being held between the two. In this holding structure, the vibration of the vibrating body 112 is allowed by the buffer 130 being deformed in the shearing direction, and it is not moved by the reaction force from the object due to the rigidity when the buffer 130 is deformed in the shearing direction. Thus, the vibrating body 112 can be held.

  However, this holding structure has a structure in which the vibrating body 112, which is likely to cause manufacturing variations because it is formed of a piezoelectric material, is sandwiched from both sides by a buffer portion 130, which is formed of polyimide resin, which is likely to cause manufacturing variations. Yes. For this reason, since manufacturing variations in the vibrating body 112 and the buffer portion 130 are accumulated, large variations in the dimension in the thickness direction (Z direction) are likely to occur. And since the buffer part 130 needs the rigidity of the vibration body 112 not to move even if it receives the reaction force from a target object, it is difficult for the buffer part 130 to absorb the dispersion | variation in this dimension. Therefore, in the piezoelectric motor 10 according to the present embodiment, the vibration body 112 is not simply held between the shock absorbers 130, but the shock absorbers 130 are pressed against the vibration bodies 112 by the pressing plates 140, the elastic portions 142, and the pressing lids 144. A structure that sandwiches the body 112 is employed.

C. Vibrating body clamping structure:
FIG. 4A is an explanatory diagram illustrating a structure in which the vibrating body 112 is sandwiched by taking a cross section of the vibrating portion 110 of the present embodiment. FIG. 4B is an explanatory diagram conceptually showing the structure for sandwiching the vibrating body 112. As shown in FIG. 4A, the vibrating body 112 is housed in the vibrating body case 120 with both sides in the Z direction being sandwiched between the buffer portions 130. In addition, the buffer part 130 is affixed on the vibrating body 112 with the adhesive agent. A pressing plate 140, an elastic portion 142 (disc spring in the present embodiment), and a pressing lid 144 are placed on the vibrating body 112 and the buffer portion 130 housed in the vibrating body case 120, and a set screw 146. The holding lid 144 is attached to the vibrating body case 120.

  Further, a concave portion 144c is formed on the inner surface side (the side facing the vibrating body 112) of the holding lid 144. When the holding lid 144 is attached to the vibrating body case 120 with a set screw 146, the elastic portion 142 is compressed. The upper surface side of the pressing plate 140 is fitted into the recess 144c. Here, when the holding lid 144 is attached to the vibrating body case 120 with the set screw 146, the elastic portion 142 is compressed in the Z direction and the buffer portion 130 is also compressed in the Z direction. However, the rigidity of the elastic part 142 in the Z direction is set to a value sufficiently smaller than the rigidity of the buffer part 130 in the Z direction.

  FIG. 4B conceptually shows a state in which the vibrating body 112 is sandwiched in the vibrating body case 120. In FIG. 4B, the buffer portion 130 having a large rigidity is represented by a large spring, and the elastic portion 142 having a small rigidity is represented by a small spring. Further, the illustration of the set screw 146 is omitted. As shown in the drawing, in the piezoelectric motor 10 of the present embodiment, both sides of the vibrating body 112 are sandwiched between buffer portions 130 having a large rigidity, and the whole (the vibrating body 112 and the buffer portions 130 on both sides) is buffered. The elastic portion 142 having rigidity smaller than that of the portion 130 is configured to be pressed against the vibrating body case 120 via the pressing plate 140 and held. In addition, at least in a state where the vibration part 110 is assembled, the upper surface side of the pressing plate 140 is fitted into the recess 144c, and thus the pressing plate 140 can move in the vibration direction (X direction and Y direction) of the vibrating body 112. It is in a restricted state. By doing in this way, even if a large variation occurs in the dimension in the thickness direction (Z direction) of the vibrating body 112 and the buffer portion 130, in a state where the vibrating body 112 is appropriately held by the buffer portion 130, It can be stored in the vibrating body case 120. Hereinafter, this point will be described in detail.

  FIG. 5 is an explanatory view showing a state in which the vibrating body 112 and the buffer portion 130 are housed in the vibrating body case 120. FIG. 5A shows a state before the pressing lid 144 is attached to the vibrating body case 120, and FIG. 5B shows the pressing lid 144 with a set screw 146 (not shown). The state attached to 120 is shown. In a state before the pressing lid 144 is attached to the vibrating body case 120, no compressive force is applied to any of the elastic portion 142 and the buffer portion 130. From this state, when the holding lid 144 is pressed against the vibrating body case 120 using a set screw 146 (not shown), a compressive force acts on the elastic portion 142 and the buffer portion 130.

  However, as described above, the rigidity of the elastic portion 142 is set smaller than the rigidity of the buffer portion 130. For this reason, even if the same magnitude | size force acts on the elastic part 142 and the buffer part 130, the buffer part 130 hardly deform | transforms and the elastic part 142 deform | transforms exclusively. As a result, in a state where the pressing lid 144 is attached to the vibrating body case 120, as shown in FIG. 5B, the buffer portion 130 is hardly contracted and the elastic portion 142 is contracted. At this time, the force with which the buffer part 130 is pressed against the vibrating body 112 is equal to the compressive force applied to the elastic part 142 (force to contract the elastic part 142).

  Here, if the dimensions of the vibrating body 112 and the buffer portion 130 vary, the amount of compression of the elastic portion 142 changes, so the compressive force of the elastic portion 142, that is, the force with which the buffer portion 130 is pressed against the vibrating body 112 also changes. However, as shown in FIG. 5, since the elastic portion 142 is used by being greatly compressed, even if the compression amount of the elastic portion 142 changes due to dimensional variations of the vibrating body 112 and the buffer portion 130, the overall compression amount The change to is only a small percentage. For this reason, even if a dimensional variation occurs in the vibrating body 112 and the buffer portion 130, it is possible to avoid variations in the force with which the buffer portion 130 is pressed against the vibrating body 112.

  This can be considered as follows. That is, let us consider a case where dimensional variations of a certain size occur in the vibrating body 112 and the buffer portion 130 and the dimensional variations are absorbed by deformation of the buffer portion 130 or the elastic portion 142. Since the buffer portion 130 has a large rigidity, the compression force greatly changes when it is attempted to absorb the dimensional variation by the deformation of the buffer portion 130. On the other hand, if the elastic portion 142 is less rigid than the buffer portion 130, the compressive force changes only slightly even if the same size variation is absorbed. For this reason, by providing the elastic portion 142 having rigidity smaller than that of the buffer portion 130, the buffer portion 130 is always attached to the vibrating body 112 with an appropriate force without being affected by variations in the dimensions of the vibrating body 112 and the buffer portion 130. It becomes possible to be pressed.

  However, if only a portion having a smaller rigidity than the buffer portion 130 (the elastic portion 142 in this embodiment) is provided, if a force in the shearing direction is applied to the buffer portion 130 by a reaction force when the object is driven, the rigidity is small. A part deform | transforms and the vibrating body 112 will move with reaction force at the time of the drive of a target object. However, in this embodiment, as described above with reference to FIG. 4, the pressing plate 140 is fitted into the recess 144 c. For this reason, as shown in FIG. 5B, the pressing plate 140 interferes with the pressing lid 144 even if the elastic portion 142 is deformed in the shearing direction by the reaction force from the object. As a result, the elastic portion 142 does not undergo shear deformation, and the vibrating body 112 can be firmly held by the rigidity of the buffer portion 130 in the shear direction.

  As described in detail above, in the piezoelectric motor 10 of the present embodiment, even when a large dimensional variation occurs between the vibrating body 112 and the buffer portion 130, the elasticity provided between the pressing plate 140 and the pressing lid 144 is provided. It can be absorbed by deformation of the part 142. For this reason, even if it does not perform troublesome work, such as measuring the dimension of the thickness direction (Z direction) of vibration body 112 or buffer part 130, selecting buffer part 130 to vibration body 112, etc., buffer part 130 can be accommodated in the vibrating body case 120 while being pressed against the vibrating body 112 with an appropriate force. As a result, the piezoelectric motor 10 can be easily manufactured. In addition, despite the fact that the buffer portion 130 is pressed against the vibrating body 112 using the elastic portion 142 having a small rigidity, the rigidity of the buffer portion 130 vibrates firmly against the reaction force when the object is driven. The body 112 can be held.

D. Modified example:
There are various modifications to the piezoelectric motor 10 of this embodiment described above. Hereinafter, these modified examples will be briefly described. In the following modification, the description will focus on the parts different from the above-described piezoelectric motor 10 of the present embodiment, and the same components as those of the piezoelectric motor 10 of the present embodiment will be described with the same reference numerals. Omitted.

  In the above-described embodiments, it has been described that the pressing plate 140 is fitted into the concave portion 144c of the pressing lid 144, so that the movement of the pressing plate 140 in the X direction or the Y direction is limited. However, as long as the movement of the pressing plate 140 in the X direction or the Y direction is restricted, the pressing plate 140 may not necessarily fit into the concave portion 144c. For example, as shown in FIG. 6, the pressing plate 140 may interfere with the inner wall surface of the vibrating body case 120 to restrict the movement of the pressing plate 140 in the X direction or the Y direction. Alternatively, the convex portion protruding from the presser lid 144 may be fitted into the concave portion provided in the presser plate 140.

  In the above-described embodiments, the pressing plate 140 has been described as being simply pressed against the buffer portion 130. However, as shown in FIG. 7, unevenness may be provided on the surface on the side of the pressing plate 140 (or the side of the buffering portion 130) where the pressing plate 140 and the buffering portion 130 are in contact. For example, by pressing from the elastic portion 142, the unevenness provided on the surface of the pressing plate 140 may bite into the surface of the buffer portion 130 made of polyimide resin, or the unevenness on the surfaces of the pressing plate 140 and the buffering portion 130. It may be provided so that the irregularities of each other mesh.

  In this way, the buffer unit 130 slips between the pressing plate 140 and the buffer unit 130 (or the buffer unit 130 and the vibrating body case 120) while the piezoelectric motor 10 is used for a long period of time. Can be reliably avoided. Of course, not only the contact surface between the pressing plate 140 and the buffer portion 130 but also the contact surface between the buffer portion 130 and the vibrator case 120 may be provided with unevenness on the vibration body case 120 side. If it carries out like this, it will become possible to prevent that the buffer part 130 slips on the contact surface of the buffer part 130 and the vibrating body case 120. FIG.

E. Application example:
The piezoelectric motor 10 of this embodiment described above is small, can drive an object with high accuracy, and can be easily manufactured. Therefore, the piezoelectric motor 10 can be suitably incorporated as a drive device for the following device.

  FIG. 8 is a perspective view illustrating an electronic component inspection apparatus 600 configured by incorporating the piezoelectric motor 10 of this embodiment. The illustrated electronic component inspection apparatus 600 generally includes a base 610 and a support base 630 erected on the side surface of the base 610. On the upper surface of the base 610, an upstream stage 612u on which the electronic component 1 to be inspected is placed and transported, and a downstream stage 612d on which the inspected electronic component 1 is placed and transported are provided. ing. Further, between the upstream stage 612u and the downstream stage 612d, an imaging device 614 for confirming the posture of the electronic component 1 and an inspection table on which the electronic component 1 is set for inspecting electrical characteristics. 616 is provided. Representative examples of the electronic component 1 include “semiconductors”, “display devices such as CLD and OLED”, “crystal devices”, “various sensors”, “inkjet heads”, “various MEMS devices”, and the like. Can be mentioned. The inspection table 616 of this embodiment corresponds to the “inspection socket” of the present invention.

  Further, the support base 630 is provided with a Y stage 632 that can move in a direction (Y direction) parallel to the upstream stage 612u and the downstream stage 612d of the base 610. From the Y stage 632, the base An arm portion 634 extends in a direction toward the 610 (X direction). Furthermore, an X stage 636 is provided on the side surface of the arm portion 634 so as to be movable in the X direction. The X stage 636 is provided with an imaging camera 638 and a gripping device 650 incorporating a Z stage movable in the vertical direction (Z direction). In addition, a grip portion 652 that grips the electronic component 1 is provided at the tip of the grip device 650. Further, a control device 618 for controlling the entire operation of the electronic component inspection device 600 is also provided on the front side of the base 610. In this embodiment, the Y stage 632, the arm portion 634, the X stage 636, and the gripping device 650 provided on the support base 630 correspond to the “electronic component conveying device” of the present invention. In the present embodiment, the X stage 636, the Y stage 632, and the Z stage incorporated in the gripping device 650 correspond to the “moving device” of the present invention.

  The electronic component inspection apparatus 600 having the above configuration inspects the electronic component 1 as follows. First, the electronic component 1 to be inspected is placed on the upstream stage 612u and moved to the vicinity of the inspection table 616. Next, the Y stage 632 and the X stage 636 are moved to move the gripping device 650 to a position just above the electronic component 1 placed on the upstream stage 612u. At this time, the position of the electronic component 1 can be confirmed using the imaging camera 638. When the gripping device 650 is lowered using the Z stage built in the gripping device 650 and the electronic component 1 is gripped by the gripping portion 652, the gripping device 650 is moved onto the imaging device 614 as it is to capture an image. The posture of the electronic component 1 is confirmed using the device 614. Subsequently, the posture of the electronic component 1 is adjusted using a fine adjustment mechanism built in the gripping device 650. Then, after the gripping device 650 is moved onto the inspection table 616, the Z stage built in the gripping device 650 is moved to set the electronic component 1 on the inspection table 616. Since the attitude of the electronic component 1 is adjusted using the fine adjustment mechanism in the gripping device 650, the electronic component 1 can be set at the correct position on the inspection table 616. When the inspection of the electrical characteristics of the electronic component 1 is completed using the inspection table 616, the electronic component 1 is again picked up from the inspection table 616, and then the Y stage 632 and the X stage 636 are moved to the downstream side. The gripping device 650 is moved above the side stage 612d, and the electronic component 1 is placed on the downstream stage 612d. Thereafter, the downstream stage 612d is moved to transport the electronic component 1 whose inspection has been completed to a predetermined position.

  FIG. 9 is an explanatory diagram of a fine adjustment mechanism built in the gripping device 650. As shown in the figure, a gripping device 650 is provided with a rotating shaft 654 connected to the gripping portion 652, a fine adjustment plate 656 to which the rotating shaft 654 is rotatably attached, and the like. The fine adjustment plate 656 is movable in the X direction and the Y direction while being guided by a guide mechanism (not shown).

  Here, as shown by hatching in FIG. 9, the piezoelectric motor 10θ for the rotation direction is mounted toward the end surface of the rotation shaft 654, and a drive convex portion (not shown) of the piezoelectric motor 10 θ is provided. It is pressed against the end surface of the rotating shaft 654. Therefore, by operating the piezoelectric motor 10θ, the rotation shaft 654 (and the gripping portion 652) can be accurately rotated by an arbitrary angle in the θ direction. In addition, an X-direction piezoelectric motor 10x and a Y-direction piezoelectric motor 10y are provided toward the fine adjustment plate 656, and drive convex portions (not shown) are provided on the surface of the fine adjustment plate 656. It is pressed. Therefore, by operating the piezoelectric motor 10x, the fine adjustment plate 656 (and the grip portion 652) can be accurately moved by an arbitrary distance in the X direction. Similarly, by operating the piezoelectric motor 10y, Fine adjustment plate 656 (and gripping portion 652) can be accurately moved by an arbitrary distance in the Y direction. Therefore, the electronic component inspection apparatus 600 of FIG. 8 can finely adjust the posture of the electronic component 1 gripped by the gripping portion 652 by operating the piezoelectric motor 10θ, the piezoelectric motor 10x, and the piezoelectric motor 10y. In this embodiment, the piezoelectric motor 10x and the piezoelectric motor 10y correspond to the “first piezoelectric motor” and the “second piezoelectric motor” of the present invention, respectively, and the piezoelectric motor 10θ corresponds to the “third piezoelectric motor” of the present invention. Corresponds to "motor". Further, the fine adjustment mechanism including the rotation shaft 654, the fine adjustment plate 656, the piezoelectric motor 10θ, the piezoelectric motor 10x, and the piezoelectric motor 10y corresponds to the “drive device” of the present invention.

  FIG. 10 is a perspective view illustrating a printing apparatus 700 incorporating the piezoelectric motor 10 of this embodiment. The illustrated printing apparatus 700 is a so-called inkjet printer that prints an image by ejecting ink onto the surface of the print medium 2. The printing apparatus 700 has a substantially box-shaped appearance, and is provided with a paper discharge tray 701, a discharge port 702, and a plurality of operation buttons 705 at the front center. A supply tray 703 is provided on the back side. When the print medium 2 is set on the supply tray 703 and the operation button 705 is operated, the print medium 2 is sucked from the supply tray 703 and an image is printed on the surface of the print medium 2 inside the printing apparatus 700, and then discharged. It is discharged from the outlet 702.

  Inside the printing apparatus 700, a carriage 720 that reciprocates in the main scanning direction on the printing medium 2 and a guide rail 710 that guides the movement of the carriage 720 in the main scanning direction are provided. The illustrated carriage 720 includes an ejection head 722 that ejects ink onto the print medium 2, a drive unit 724 that drives the carriage 720 in the main scanning direction, and the like. A plurality of ejection nozzles are provided on the bottom surface side of the ejection head 722 (the side facing the print medium 2), and ink can be ejected from the ejection nozzles toward the print medium 2. The drive unit 724 is equipped with piezoelectric motors 10m and 10s. The driving convex portion (not shown) of the piezoelectric motor 10m is pressed against the guide rail 710. For this reason, the carriage 720 can be moved in the main scanning direction by operating the piezoelectric motor 10m. Further, the driving convex portion 114 of the piezoelectric motor 10 s is pressed against the ejection head 722. For this reason, by operating the piezoelectric motor 10 s, it is possible to bring the bottom surface side of the ejection head 722 closer to the print medium 2 or away from the print medium 2. Further, in the printing apparatus 700 using so-called roll paper as the print medium 2, a mechanism for cutting the roll paper on which an image is printed is required. In such a case, the roll paper can be cut by attaching a cutter to the carriage 720 and moving it in the main scanning direction.

  FIG. 11 is an explanatory view illustrating a robot hand 800 incorporating the piezoelectric motor 10 of this embodiment. The illustrated robot hand 800 has a plurality of fingers 803 standing from a base 802 and is connected to an arm 810 via a wrist 804. Here, the base portion of the finger portion 803 is movable in the base 802, and the piezoelectric motor 10f is mounted in a state where the driving convex portion 114 is pressed against the base portion of the finger portion 803. For this reason, by operating the piezoelectric motor 10f, the finger part 803 can be moved and the object can be gripped. In addition, the piezoelectric motor 10r is mounted on the wrist 804 in a state where the driving convex portion 114 is pressed against the end surface of the wrist 804. For this reason, the whole base 802 can be rotated by operating the piezoelectric motor 10r.

  FIG. 12 is an explanatory view illustrating a robot 850 including the robot hand 800. As illustrated, the robot 850 includes a plurality of arms 810 and a joint portion 820 that connects the arms 810 in a bendable state. The robot hand 800 is connected to the tip of the arm 810. In the joint portion 820, a piezoelectric motor 10j is incorporated as an actuator for bending the joint portion 820. For this reason, each joint part 820 can be bent by an arbitrary angle by operating the piezoelectric motor 10j.

  As described above, the piezoelectric motor of the present invention and various devices equipped with the piezoelectric motor have been described. However, the present invention is not limited to the above-described embodiments, modified examples, and application examples, and various modifications can be made without departing from the scope of the invention. It is possible to implement in the mode.

10 ... piezoelectric motor, 100 ... main body, 102r ... front roller,
104r ... presser roller, 106r ... rear roller, 110 ... vibrating part,
112 ... Vibrating body, 114 ... Drive projection, 116 ... Front electrode,
120 ... Vibrating body case, 130 ... Buffer part, 140 ... Holding plate,
142: elastic part, 144: holding lid, 144c: concave part,
146 ... Set screw, 200 ... Base, 210 ... First side wall block,
212 ... front housing, 212s ... front side pressure spring,
214 ... center housing, 216 ... rear housing,
216s ... rear side pressure spring, 220 ... second side wall block,
222 s ... pressurizing spring, 230 ... substrate, 232 s ... holding spring,
240 ... set screw, 600 ... electronic component inspection device, 610 ... base,
612d: downstream stage, 612u: upstream stage,
614 ... Imaging device, 616 ... Inspection table, 618 ... Control device,
630 ... support base, 634 ... arm, 638 ... imaging camera,
650 ... gripping device, 652 ... gripping part, 654 ... rotating shaft,
656 ... fine adjustment plate, 700 ... printing device, 701 ... discharge tray,
702 ... Discharge port, 703 ... Supply tray, 705 ... Operation buttons,
710: guide rails, 720 ... carriage, 722 ... jetting head,
724 ... Drive unit, 800 ... Robot hand, 802 ... Base,
803 ... finger part, 804 ... wrist, 810 ... arm,
820 ... Joint part, 850 ... Robot

Claims (14)

A vibrating body formed including a piezoelectric material and having a protruding portion projecting from an end face;
A vibrating body case for housing the vibrating body;
Biasing means for biasing the vibrating body case in a direction in which the convex portion of the vibrating body is brought into contact with an object;
A piezoelectric motor that moves the object by generating stretching vibration and bending vibration in the vibrating body,
A buffer portion formed by including a material having dynamic viscoelasticity, sandwiching both sides of the vibrating body from a direction intersecting a bending direction of the vibrating body in the vibrating body case,
A holding lid attached to the vibrator case;
An elastic portion provided between the pressing lid and the buffer portion and compressed by the pressing lid;
With
A piezoelectric motor, wherein a pressing plate is provided between the buffer portion and the elastic portion, the movement of the vibrating body being restricted in the expansion / contraction direction and the bending direction. The piezoelectric motor according to claim 1,
The piezoelectric motor, wherein the pressing plate is fitted to the pressing lid. The piezoelectric motor according to claim 1 or 2,
The presser plate is formed with irregularities on the contact surface with the buffer portion. The piezoelectric motor according to claim 1 or 2,
The buffer portion is formed with irregularities on a contact surface with the pressing plate.   A drive device comprising the piezoelectric motor according to claim 1.   A printing apparatus comprising the piezoelectric motor according to any one of claims 1 to 4.   A robot hand comprising the piezoelectric motor according to any one of claims 1 to 4.   A robot comprising the piezoelectric motor according to any one of claims 1 to 4 or the robot hand according to claim 7. An electronic component inspection device that inspects the electrical characteristics of the electronic component by mounting the gripped electronic component on an inspection socket,
An electronic component inspection apparatus, wherein the electronic component is aligned with the inspection socket using the piezoelectric motor according to claim 1. An electronic component inspection device that inspects the electrical characteristics of the electronic component by mounting the gripped electronic component on an inspection socket,
A piezoelectric motor for aligning the electronic component with the inspection socket;
The piezoelectric motor is
A vibrating body that is formed including a piezoelectric material, has a convex portion projecting from an end surface thereof, and performs stretching vibration and bending vibration;
A vibrating body case for housing the vibrating body;
Biasing means for biasing the vibrating body case in a direction in which the convex portion of the vibrating body is brought into contact with an object;
A buffer portion formed by including a material having dynamic viscoelasticity, sandwiching both sides of the vibrating body from a direction intersecting a bending direction of the vibrating body in the vibrating body case,
A holding lid attached to the vibrator case;
An elastic portion provided between the pressing lid and the buffer portion and compressed by the pressing lid;
With
An electronic component inspection apparatus, wherein a pressing plate is provided between the buffer portion and the elastic portion, the movement of the vibrating body being restricted in the expansion and contraction direction and the bending direction. An inspection socket in which an electronic component is mounted and the electrical characteristics of the electronic component are inspected;
A gripping device for gripping the electronic component;
A moving device for moving the grip device in a total of three axial directions including a first axis and a second axis orthogonal to each other and a third axis orthogonal to the first axis and the second axis;
The electronic component provided on the first shaft or the second shaft as viewed from the inspection socket and mounted on the inspection socket, the position in the direction of the first shaft and the second shaft, and the An imaging device that detects an angle around a third axis as a posture of the electronic component;
An upstream stage for transporting the electronic component from the inspection socket to the predetermined position on the first axis or the second axis connecting the imaging device;
A downstream stage that conveys the electronic component from a predetermined position opposite to the side on which the imaging device is provided when viewed from the inspection socket;
A control device for controlling the operation of the mobile device;
An electronic component inspection apparatus comprising:
The controller is
A first control unit that moves the gripping device that grips the electronic component conveyed by the upstream stage to above the imaging device;
A second control unit for mounting the electronic component whose posture is confirmed by the imaging device to the inspection socket by moving the gripping device;
A third control unit configured to place the electronic component whose electrical characteristics have been inspected by the inspection socket on the downstream stage by moving the gripping device;
With
The gripping device includes a first piezoelectric motor that moves the electronic component in the first axial direction based on the attitude of the electronic component detected by the imaging device, and a second that moves the electronic component in the second axial direction. And a third piezoelectric motor that rotates around the third axis,
The electronic component inspection apparatus according to any one of claims 1 to 4, wherein the first to third piezoelectric motors are the piezoelectric motors according to any one of claims 1 to 4. An electronic component transport device for transporting a gripped electronic component,
An electronic component transport apparatus, wherein the electronic component is aligned using the piezoelectric motor according to any one of claims 1 to 4. An electronic component transport device for transporting a gripped electronic component,
A piezoelectric motor for aligning the electronic components;
The piezoelectric motor is
A vibrating body that is formed including a piezoelectric material, has a convex portion projecting from an end surface thereof, and performs stretching vibration and bending vibration;
A vibrating body case for housing the vibrating body;
Biasing means for biasing the vibrating body case in a direction in which the convex portion of the vibrating body is brought into contact with an object;
A buffer portion formed by including a material having dynamic viscoelasticity, sandwiching both sides of the vibrating body from a direction intersecting a bending direction of the vibrating body in the vibrating body case,
A holding lid attached to the vibrator case;
An elastic portion provided between the pressing lid and the buffer portion and compressed by the pressing lid;
With
An electronic component transport apparatus, wherein a pressing plate is provided between the buffer portion and the elastic portion, the movement of the vibrating body being restricted in a stretching direction and a bending direction. A gripping device for gripping electronic components;
A moving device that moves the handle device in a total of three axial directions including a first axis and a second axis orthogonal to each other and a third axis orthogonal to the first axis and the second axis;
An electronic component transport device comprising: a control device that controls the operation of the moving device,
The gripping device includes: a first piezoelectric motor that moves the electronic component in the first axis direction; a second piezoelectric motor that moves the electronic component in the second axis direction; and a third piezoelectric motor that rotates about the third axis. A piezoelectric motor,
The electronic component conveying apparatus according to any one of claims 1 to 4, wherein the first to third piezoelectric motors are piezoelectric motors according to any one of claims 1 to 4.

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