JP5998980B2 - Piezoelectric motor, robot hand, robot, electronic component transport device, electronic component inspection device, liquid feed pump, printing device, electronic watch, projection device, transport device - Google Patents

Description

The present invention relates to a piezoelectric motor, a robot hand, a robot, an electronic component transport device, an electronic component inspection device, a liquid feed pump, a printing device, an electronic timepiece, a projection device, and a transport device.

A piezoelectric motor that drives an object by vibrating a vibrating body including a piezoelectric material is known.
This piezoelectric motor is smaller than an electromagnetic motor that uses an electromagnetic force to rotate a rotor, but can obtain a large driving force and can also position an object with high resolution. Features and has.

The piezoelectric motor operates on the following principle. First, a voltage is applied to the vibrating body to generate vibration in the expansion / contraction direction and vibration in the bending direction. Then, the end face in the expansion / contraction direction of the vibrating body moves so as to draw an ellipse, and the object can be friction driven by pressing the convex portion provided on the end face against the object. From such an operating principle, it is necessary to use the piezoelectric motor in a state in which the convex portion of the vibrating body is pressed against the object, and the side on which the convex portion of the vibrating body is provided using a biasing member such as a spring. It is performed by pressing the end surface opposite to the object toward the object (
For example, Patent Document 1).

JP 2008-187768 A

However, since the piezoelectric motor drives the object by a frictional force acting between the convex part of the vibrating body and the object, the convex part comes into contact when the conventional piezoelectric motor is used for a long period of time. There was a problem that only certain portions of the object were worn deeply. When such wear progresses, a sufficient frictional force does not work between the convex portion and the object, resulting in a decrease in the driving performance of the piezoelectric motor.

The present invention has been made to solve at least a part of the above-described problems of the prior art, and the drive performance of the piezoelectric motor can be improved even if the object is worn by the contact of the convex portion of the vibrating body. The purpose is to provide technology that can be maintained.

In order to solve at least a part of the problems described above, the piezoelectric motor of the present invention employs the following configuration. That is,
A vibrator that includes a piezoelectric material and that undergoes stretching vibration and bending vibration when a voltage is applied;
An abutting portion that is provided at an end portion of the vibrating body in an expansion / contraction direction that vibrates / contracts, and abuts against an object;
A plurality of urging members that bend in the expansion / contraction direction, urge the vibrating body in the expansion / contraction direction, and abut the contact portion on the object;
With
The plurality of urging members are provided from a direction intersecting both the expansion / contraction direction and the bending direction in which bending vibration occurs with respect to the vibrating body.

Here, the “biasing member” of the present invention is formed by including an elastic material and is bent by receiving an external force (
Deformation) refers to a mechanical element that is biased in the direction opposite to the direction of bending by a restoring force to return to its original shape.

In such a piezoelectric motor of the present invention, the biasing force (restoring force) of the plurality of deflected biasing members.
Thus, the vibrating body is urged in the expansion / contraction direction, and the convex portion (end portion in the expansion / contraction direction) of the vibration body can be pressed against the object. In this state, when the vibrating body vibrates in the expansion / contraction direction and the bending direction,
The object can be driven in the bending direction by the frictional force generated between the convex portion of the vibrating body and the object. When the object is worn by the frictional force received from the convex portion, the vibrating body moves in the expansion / contraction direction toward the object. At this time, the vibrating body tries to recover from the posture in which the plurality of biasing members provided from the direction (extending direction) intersecting both the expansion and contraction direction and the bending direction with respect to the vibrating body, Along with the movement in the extending direction, the position where the convex portion abuts on the object (abutting position) also moves in the extending direction. As the contact position of the object wears in this way, the contact position moves in the extending direction, so that only a certain position does not wear deeply, and wear of the object progresses on the convex portion. It can be brought into contact with a position that is not present. As a result, it is possible to maintain the driving performance of the piezoelectric motor while suppressing a large change in the contact state between the object and the convex portion (friction force generated between the target object and the convex portion).

In the above-described piezoelectric motor of the present invention, the vibrating body is configured to include a piezoelectric element including a piezoelectric material and a plate to which the piezoelectric element is attached. You may bend and form.

In this way, compared to the case where the plate (vibrating body) and the plurality of urging members are separated, the step of joining the two (fastening with joining screws, bonding with an adhesive, point welding, etc.)
This makes it easy to manufacture a piezoelectric motor. In addition, since a joining member such as a joining screw is not required, the manufacturing cost of the piezoelectric motor can be reduced.

Further, the piezoelectric motor of the present invention described above may be configured as follows. First, a first plate spring and a second plate spring are included as a plurality of urging members, and first support portions for connecting the plate and the first plate spring are provided on both sides in the bending direction of the vibrating body. The 2nd support part which connects a plate and a 2nd leaf | plate spring is provided in both sides. The first support portion and the second support portion are provided on either side of a plurality of node portions having a small amplitude of flexural vibration of the vibrating body. Then, the first plate spring, the second plate spring, the first support portion, the second support portion, and the plate are formed from a single plate material. Here, the “plate spring” of the present invention is formed into a plate shape including an elastic material, and is subjected to an external force from the facing direction to bend (deform) and return to its original shape. The mechanical element that is biased in the direction opposite to the bending direction is meant.

By providing the support portions (first support portion and second support portion) on both sides of the node portion of the vibrating body in this way, both sides of a portion different from the node portion (such as an abdomen where the amplitude of bending vibration of the vibrating body is large). Compared with the case where the support portion is provided on the base plate, it is possible to suppress the vibration generated by the vibrating body from being transmitted from the support portion to the leaf springs (first leaf spring, second leaf spring) (vibration escapes to the outside). As a result, the loss of drive energy can be reduced and the object can be efficiently driven by the piezoelectric motor. Further, if such a support portion is also formed integrally with a leaf spring or a plate, it becomes possible to facilitate the manufacture of the piezoelectric motor or to reduce the manufacturing cost.

Further, in the above-described piezoelectric motor of the present invention, the first leaf spring, the second leaf spring, the first support portion, and the second support are provided by providing the reinforcing portion connected to the first support portion and the second support portion. The part, the plate, and the reinforcing part may be formed of a single plate material.

Thus, if the reinforcement part connected to a 1st support part and a 2nd support part is provided, a support part (1st
Since the rigidity of the support portion and the second support portion is increased, it is possible to further suppress the vibration generated in the vibrating body from being transmitted from the support portion to the leaf spring. In addition, if such a reinforcing portion is formed integrally with the leaf spring, the support portion, and the plate, it is possible to facilitate the manufacture of the piezoelectric motor and to reduce the manufacturing cost.

Moreover, this invention can also be grasped | ascertained in the following aspects. That is,
A robot hand that can hold an object with a finger,
A base body erected so that the finger portion is movable;
A movable part interlocked with the movement of the finger part relative to the base or the rotation of the joint of the finger part;
A vibrator that includes a piezoelectric material and that undergoes stretching vibration and bending vibration when a voltage is applied;
An abutting portion provided at an end portion of the vibrating body in an expansion / contraction direction that vibrates and contracts, and abutting on the movable portion;
A plurality of urging members that bend in the expansion / contraction direction, urge the vibrating body in the expansion / contraction direction, and abut the contact portion on the movable portion;
With
It can also be grasped as a robot hand characterized in that the plurality of urging members are provided from a direction intersecting both the expansion / contraction direction and the bending direction in which bending vibrations occur with respect to the vibrating body.

In such a robot hand according to the present invention, it is possible to suppress a decrease in the driving performance of the finger portion due to wear of the movable portion with which the convex portion of the vibrating body abuts, so the accuracy of gripping the object with the finger portion is maintained. It becomes possible.

Moreover, this invention can also be grasped | ascertained in the following aspects. That is,
An arm provided with a rotatable joint, and
A hand portion provided on the arm portion;
A main body provided with the arm,
A robot equipped with
A movable part interlocking with the rotation of the joint part;
A vibrator that includes a piezoelectric material and that undergoes stretching vibration and bending vibration when a voltage is applied;
An abutting portion provided at an end portion of the vibrating body in an expansion / contraction direction that vibrates and contracts, and abutting on the movable portion;
A plurality of urging members that bend in the expansion / contraction direction, urge the vibrating body in the expansion / contraction direction, and abut the contact portion on the movable portion;
With
It can also be grasped as a robot characterized in that the plurality of urging members are provided from a direction intersecting both the expansion / contraction direction and the bending direction of bending vibration with respect to the vibrating body.

In the robot according to the present invention, it is possible to suppress a decrease in the driving performance of the joint portion due to wear of the movable portion with which the convex portion of the vibrating body abuts, and thus it is possible to maintain the operation accuracy of the robot. The hand unit may be a hand unit that performs, for example, an operation for gripping an object, a screw tightening operation for performing screw tightening, a painting operation, a welding operation, or the like.

Moreover, this invention can also be grasped | ascertained in the following aspects. That is,
An electronic component transport apparatus including a gripping unit that grips an electronic component,
A movable part that interlocks with the movement of the gripping part that grips the electronic component;
A vibrator that includes a piezoelectric material and that undergoes stretching vibration and bending vibration when a voltage is applied;
An abutting portion provided at an end portion of the vibrating body in an expansion / contraction direction that vibrates and contracts, and abutting on the movable portion;
A plurality of urging members that bend in the expansion / contraction direction, urge the vibrating body in the expansion / contraction direction, and abut the contact portion on the movable portion;
With
The plurality of urging members are provided from a direction intersecting both the expansion / contraction direction and the bending direction in which the bending vibration is performed with respect to the vibrating body. .

In such an electronic component conveying device of the present invention, it is possible to suppress a decrease in the driving performance of the gripping portion due to wear of the movable portion with which the convex portion of the vibrating body abuts, so that the accuracy of conveying the electronic component is maintained. Is possible.

Moreover, this invention can also be grasped | ascertained in the following aspects. That is,
A gripper for gripping electronic components;
An inspection unit for inspecting the electronic component;
An electronic component inspection apparatus comprising:
A movable part that interlocks with the movement of the gripping part that grips the electronic component;
A vibrator that includes a piezoelectric material and that undergoes stretching vibration and bending vibration when a voltage is applied;
An abutting portion provided at an end portion of the vibrating body in an expansion / contraction direction that vibrates and contracts, and abutting on the movable portion;
A plurality of urging members that bend in the expansion / contraction direction, urge the vibrating body in the expansion / contraction direction, and abut the contact portion on the movable portion;
With
The plurality of urging members are provided from a direction intersecting both the expansion / contraction direction and the bending direction in which bending vibration occurs with respect to the vibrating body. .

In such an electronic component inspection apparatus of the present invention, it is possible to suppress a decrease in the driving performance of the gripping portion due to wear of the movable portion with which the convex portion of the vibrating body abuts, so that the accuracy of inspecting the electronic component is maintained. Is possible.

Moreover, this invention can also be grasped | ascertained in the following aspects. That is,
A tube through which liquid can flow;
A closing portion that contacts the tube and closes the tube;
A moving part for moving the blocking part;
A liquid feed pump comprising:
A vibrator that includes a piezoelectric material and that undergoes stretching vibration and bending vibration when a voltage is applied;
An abutting portion that is provided at an end portion of the vibrating body in an expansion / contraction direction that vibrates and contracts, and abuts on the moving portion;
A plurality of urging members that bend in the expansion / contraction direction, urge the vibrating body in the expansion / contraction direction, and abut the contact portion on the moving portion;
With
It can also be grasped as a liquid feed pump characterized in that the plurality of urging members are provided from a direction intersecting both the expansion / contraction direction and the bending direction of bending vibration with respect to the vibrating body.

In such a liquid feed pump of the present invention, it is possible to suppress a decrease in the driving performance of the closed portion due to wear of the moving portion with which the convex portion of the vibrating body abuts, so that the accuracy of feeding the liquid in the tube is maintained. It becomes possible to do.

Moreover, this invention can also be grasped | ascertained in the following aspects. That is,
A print head for printing an image on a medium;
A moving unit for moving the print head;
A printing apparatus comprising:
A vibrator that includes a piezoelectric material and that undergoes stretching vibration and bending vibration when a voltage is applied;
An abutting portion that is provided at an end portion of the vibrating body in an expansion / contraction direction that vibrates and contracts, and abuts on the moving portion;
A plurality of urging members that bend in the expansion / contraction direction, urge the vibrating body in the expansion / contraction direction, and abut the contact portion on the moving portion;
With
The plurality of urging members may be provided from a direction intersecting both the expansion / contraction direction and the bending direction in which the bending vibration occurs with respect to the vibrating body.

In such a printing apparatus of the present invention, it is possible to suppress a decrease in the print head drive performance due to wear of the moving portion with which the convex portion of the vibrating body abuts, so that the accuracy of printing an image can be maintained. Become.

Moreover, this invention can also be grasped | ascertained in the following aspects. That is,
A coaxial rotating gear, and a rotatable rotating disk;
A gear train including a plurality of gears;
A pointer connected to the gear train and indicating the time;
An electronic timepiece comprising:
A vibrator that includes a piezoelectric material and that undergoes stretching vibration and bending vibration when a voltage is applied;
An abutting portion provided at an end portion of the vibrating body in an expansion / contraction direction that vibrates and contracts, and abutting on the rotating disk;
A plurality of urging members that bend in the expansion / contraction direction, urge the vibrating body in the expansion / contraction direction, and abut the contact portion on the rotating disk;
With
It can also be grasped as an electronic timepiece characterized in that the plurality of urging members are provided from a direction intersecting both the expansion / contraction direction and the bending direction in which the vibrating body vibrates.

In such an electronic timepiece of the present invention, it is possible to suppress a decrease in the driving performance of the pointer due to wear of the rotating disk with which the convex portion of the vibrating body abuts, so that it is possible to maintain the operation accuracy of the electronic timepiece. Become.

Moreover, this invention can also be grasped | ascertained in the following aspects. That is,
A light source that generates light;
A projection unit including an optical lens and projecting the light;
A moving unit for moving the optical lens;
A projection device comprising:
A vibrator that includes a piezoelectric material and that undergoes stretching vibration and bending vibration when a voltage is applied;
An abutting portion that is provided at an end portion of the vibrating body in an expansion / contraction direction that vibrates and contracts, and abuts on the moving portion;
A plurality of urging members that bend in the expansion / contraction direction, urge the vibrating body in the expansion / contraction direction, and abut the contact portion on the moving portion;
With
It can also be grasped as a projection device characterized in that the plurality of urging members are provided from a direction intersecting both the expansion / contraction direction and the bending direction of bending vibration with respect to the vibrating body.

In such a projection apparatus according to the present invention, it is possible to suppress a decrease in the driving performance of the optical lens due to wear of the moving part with which the convex part of the vibrating body abuts. Can be maintained.

Moreover, this invention can also be grasped | ascertained in the following aspects. That is,
A transport device for transporting an object,
A vibrator that includes a piezoelectric material and that undergoes stretching vibration and bending vibration when a voltage is applied;
An abutting portion that is provided at an end of the vibrating body in the expansion / contraction direction that vibrates and contracts, and abuts on the object;
A plurality of urging members that bend in the expansion / contraction direction, urge the vibrating body in the expansion / contraction direction, and abut the contact portion on the object;
With
The plurality of urging members may be provided from a direction that intersects both the expansion and contraction direction and the bending direction in which bending vibration occurs with respect to the vibrating body.

In such a transport apparatus according to the present invention, it is possible to suppress a decrease in driving performance due to wear of the target object with which the convex portion of the vibrating body abuts, and therefore it is possible to maintain the accuracy of transporting the target object.

It is the perspective view which showed the structure of the piezoelectric motor of a present Example. It is explanatory drawing which showed the structure of the vibrating body. It is explanatory drawing which shows the operation principle of a piezoelectric motor. It is explanatory drawing which showed the node part of the vibrating body. It is explanatory drawing which showed a mode that a vibrating body was urged | biased toward a target object. It is explanatory drawing which showed the reason which can suppress the fall of the drive performance of a piezoelectric motor by abrasion of a target object by providing two leaf | plate springs with respect to a vibrating body from a Z direction. It is explanatory drawing which showed the shape of the integrally molded part which comprises the piezoelectric motor of a 1st modification. It is explanatory drawing which showed the shape of the integrally molded part which comprises the piezoelectric motor of a 2nd modification. It is explanatory drawing which showed the shape of the integrally molded part which comprises the piezoelectric motor of a 3rd modification. It is explanatory drawing which showed the shape of the integrally molded part which comprises the piezoelectric motor of a 4th modification. It is explanatory drawing which illustrated the robot hand incorporating the piezoelectric motor of the Example or the modification. It is explanatory drawing which illustrated the single arm robot provided with the robot hand. It is explanatory drawing which illustrated the robot of the multiple arms provided with the robot hand. It is the perspective view which illustrated the electronic component test | inspection apparatus comprised incorporating the piezoelectric motor of the Example or the modification. It is explanatory drawing about the fine adjustment mechanism incorporated in the holding | grip apparatus. It is explanatory drawing which illustrated the liquid feeding pump incorporating the piezoelectric motor of the Example or the modification. It is the perspective view which illustrated the printing apparatus incorporating the piezoelectric motor of the Example or the modification. It is explanatory drawing which illustrated the electronic timepiece incorporating the piezoelectric motor of the Example or the modification. It is the perspective view which illustrated the projection apparatus incorporating the piezoelectric motor of the Example or the modification.

FIG. 1 is a perspective view illustrating a configuration of a piezoelectric motor 100 according to the present embodiment. As shown in the drawing, the piezoelectric motor 100 according to the present embodiment roughly includes a vibrating body 110 including a piezoelectric material and two leaf springs (forward leaf springs 140) for biasing the vibrating body 110 in a predetermined direction. , Rear leaf spring 150) and the like. The vibrating body 110 has a rectangular parallelepiped shape, and a convex portion 122 that comes into contact with an object driven by the piezoelectric motor 100 is provided on an end face in the longitudinal direction. The detailed structure of the vibrating body 110 will be described later with reference to another drawing. Hereinafter, the longitudinal direction of the vibrating body 110 is referred to as an X direction. Further, as shown in the figure, the short direction of the vibrating body 110 orthogonal to the X direction is referred to as the Y direction, and the vibrating body 11 orthogonal to the X direction and the Y direction.
The thickness direction of 0 is referred to as the Z direction.

The two leaf springs (the front leaf spring 140 and the rear leaf spring 150) are in the longitudinal direction of the vibrating body 110 (
Are spaced apart in the X direction). The front leaf spring 140 on the side of the vibrating body 110 on which the convex portion is provided is moved in the Z direction (in the drawing) from the fixing portion 142 that is fixed by a fixing screw 144 at a location (XY plane) where the piezoelectric motor 100 is installed. The pair is provided so as to be bent upward) and sandwich the vibrating body 110 therebetween. The front leaf spring 140 faces the X direction and can be bent in the X direction. Further, the front end side of the front leaf spring 140 (the side opposite to the fixed portion 142) is bent in the X direction (the back side in the drawing) to form a pedestal portion 146. As shown in FIG. 1, a pair of front support portions 124 and a pair of rear support portions 125 are provided on both side surfaces of the vibrating body 110 facing in the Y direction. The pedestal portion 146 is joined by a joining screw 126. In addition, adhesion | attachment, welding, etc. may be sufficient as the joining method of the front support part 124 and the base part 146. FIG.

Further, the rear leaf spring 150 on the side opposite to the side on which the convex portion 122 of the vibrating body 110 is provided is provided symmetrically with the front leaf spring 140 with respect to the YZ plane. That is, the rear leaf spring 150 is provided in a pair so as to bend in the Z direction (upward in the drawing) from the fixing portion 152 fixed by the fixing screw 154 and sandwich the vibrating body 110 therebetween. Is possible. Further, the front end side of the rear leaf spring 150 (the side opposite to the fixed portion 152) is bent in the X direction (front side in the drawing) to form a pedestal portion 156, and the rear support portion 125 of the vibrating body 110 is formed. Is joined to the pedestal 156 by a joining screw 127. The front leaf spring 140 and the rear leaf spring 150 of this embodiment correspond to the “biasing member” of the present invention. Further, the front support portion 124 and the rear support portion 125 of the present embodiment are the “first support portion” and “
This corresponds to the “second support portion”.

FIG. 2 is an explanatory view showing the structure of the vibrating body 110. FIG. 2A illustrates a cross-sectional view of the vibrating body 110 cut along the XZ plane. As shown, the vibrating body 110 is
Two piezoelectric elements (a front piezoelectric element 130 and a back piezoelectric element 13) formed into a plate shape including a piezoelectric material.
1), a laminated structure in which a shim plate 120 formed of a metal flat plate is sandwiched therebetween. Further, on the surface of the piezoelectric element (front piezoelectric element 130, back piezoelectric element 131) opposite to the surface in contact with the shim plate 120, an electrode for applying a voltage to the piezoelectric element (front electrode 132, back electrode 1).
33).

The metal shim plate 120 not only reinforces the piezoelectric elements (the front piezoelectric element 130 and the back piezoelectric element 131), but also serves as a common electrode for applying a voltage to the front piezoelectric element 130 and the back piezoelectric element 131. And is grounded to ground. Further, as described above, the convex portion 122 that abuts on the object is provided at the end of the vibrating body 110 in the longitudinal direction (X direction), and the convex portion 122 is shim by punching from a single plate material. It is formed integrally with the plate 120. The shim plate 120 of this embodiment corresponds to a “plate” of the present invention.

FIG. 2B shows a plan view of the vibrating body 110 viewed from the Z direction (the surface piezoelectric element 130 side). As described above, the surface of the surface piezoelectric element 130 opposite to the surface in contact with the shim plate 120 (
On the upper surface), a surface electrode 132 for applying a voltage to the surface piezoelectric element 130 is provided,
As shown in FIG. 2B, four rectangular surface electrodes 132 are provided so that the upper surface of the surface piezoelectric element 130 is divided into four in a lattice shape. Further, although not shown in the figure, the back surface of the four rectangular shapes is similarly formed on the surface (lower surface) opposite to the surface in contact with the shim plate 120 of the back piezoelectric element 131 so that the lower surface is divided into four grids. An electrode 133 is provided.

Further, as described above, the pair of front support portions 1 are provided on both side surfaces of the vibrating body 110 facing in the Y direction.
24 and a pair of rear support portions 125 are provided, and these support portions 124 and 125 are integrally formed with the shim plate 120 by punching from one plate material.

FIG. 3 is an explanatory diagram showing the operating principle of the piezoelectric motor 100. The piezoelectric motor 100 is
When a voltage is applied to the front electrode 132 and the back electrode 133 of the vibrating body 110 at a constant period, the convex portion 122 of the vibrating body 110 operates by elliptical motion. Convex part 12 of vibrating body 110
The reason why 2 moves elliptically is as follows. Note that the surface electrode 132 provided on the surface piezoelectric element 130.
Since the back electrode 133 provided on the back piezoelectric element 131 is plane-symmetric with respect to the XY plane and is basically the same, here, the front electrode 132 will be described as an example.

First, as is well known, a piezoelectric element containing a piezoelectric material (front piezoelectric element 130, back piezoelectric element 131)
Has a property of expanding when a positive voltage is applied. Therefore, as shown in FIG.
When a positive voltage is applied to all four front electrodes 132 and then the release of the applied voltage is repeated, the vibrating body 110 (the front piezoelectric element 130) repeats an operation of expanding and contracting in the longitudinal direction (X direction). The operation in which the vibrating body 110 repeatedly expands and contracts in the longitudinal direction (X direction) is referred to as “stretching vibration”. Hereinafter, the direction (± X direction in the drawing) in which the vibrating body 110 expands and contracts is referred to as the “stretching direction”. Further, when the frequency at which the positive voltage is applied is changed, the amount of expansion / contraction suddenly increases when a certain frequency is reached, and a kind of resonance phenomenon occurs. The frequency at which resonance occurs due to stretching vibration (resonance frequency) is determined by the physical properties of the surface piezoelectric element 130 and the dimensions (width W, length L, thickness T) of the surface piezoelectric element 130.

Further, as shown in FIG. 3B or FIG. 3C, a pair of two surface electrodes 132 that are diagonal to each other (a group of the surface electrode 132a and the surface electrode 132d, or the surface electrode 132b).
As a set of the front electrode 132c), a positive voltage is applied at a constant period. Then, the vibrating body 11
0 (surface piezoelectric element 130) repeats the operation in which the front end portion (the portion provided with the convex portion 122) in the longitudinal direction (X direction) swings the head in the left-right direction (Y direction) on the drawing. For example, FIG.
), When a positive voltage is applied to the set of the front electrode 132a and the front electrode 132d at a constant period, the vibrating body 110 repeats the operation of moving the distal end portion in the longitudinal direction to the right. Also,
As shown in FIG. 3C, when a positive voltage is applied to the set of the front electrode 132b and the front electrode 132c at a constant period, the vibrating body 110 repeats the operation in which the longitudinal tip moves to the left. Such an operation of the vibrating body 110 is referred to as “bending vibration”. Hereinafter, the direction in which the vibrating body 110 undergoes bending vibration (± Y direction in the drawing) is referred to as “bending direction”. About such bending vibration,
There is a resonance frequency determined by the physical properties of the surface piezoelectric element 130 and the dimensions (width W, length L, thickness T) of the surface piezoelectric element 130. Accordingly, the two front electrodes 132 that are diagonal to each other.
On the other hand, when a positive voltage is applied at the resonance frequency, the vibrating body 110 vibrates with a large swing in the right direction or the left direction (Y direction).

Here, the resonance frequency of the stretching vibration shown in FIG. 3A is also shown in FIG. 3B or FIG.
The resonance frequency of the bending vibration shown in FIG. 5 is also determined by the physical properties of the surface piezoelectric element 130 and the dimensions (width W, length L, thickness T) of the surface piezoelectric element 130. Accordingly, the dimension of the surface piezoelectric element 130 (width W
If the length L and the thickness T) are appropriately selected, the two resonance frequencies can be matched. When a voltage in the form of bending vibration as shown in FIG. 3B or FIG. 3C is applied to such a surface piezoelectric element 130 at a resonance frequency, FIG. 3B or FIG. c)
At the same time, the stretching vibration shown in FIG. 3A is also induced by resonance. As a result, when a voltage is applied to the set of the front electrode 132a and the front electrode 132d in the mode shown in FIG. 3B, the tip of the vibrating body 110 (the portion where the convex portion 122 is provided) is Performs an operation that draws an ellipse clockwise (elliptic motion). In addition, the surface electrode 1 in the embodiment shown in FIG.
When a voltage is applied to the set of 32b and front electrode 132c, the tip of the vibrating body 110 performs a counterclockwise elliptical motion on the drawing. In the above description, a positive voltage is applied to the front electrode 132. However, as is well known, the piezoelectric material is also deformed by applying a negative voltage. Therefore, bending vibration (and expansion / contraction vibration) may be generated by applying a negative voltage to the surface electrode 132, or bending vibration (and expansion / contraction) by applying an alternating voltage that repeats a positive voltage and a negative voltage. (Vibration) may be generated. In the above description, it is assumed that a voltage having a resonance frequency is applied. However, it is sufficient to apply a voltage having a waveform including the resonance frequency. For example, a pulse voltage may be used. Further, similarly to the front piezoelectric element 130, the back piezoelectric element 131 can generate bending vibration and stretching vibration by applying a voltage to the back electrode 133.

The piezoelectric motor 100 drives the object using such elliptical motion of the vibrating body 110. That is, elliptical motion is generated in a state where the convex portion 122 of the vibrating body 110 is pressed against the object. Then, the convex portion 122 moves from the left to the right (or from the right to the left) while being pressed against the object when the vibrating body 110 extends, and when the vibrating body 110 contracts. Repeats the operation of returning to the original position while being away from the object. As a result, the object is driven in one direction by the frictional force received from the convex portion 122.

Here, as described above, the vibrating body 110 that generates bending vibration by applying a voltage does not vibrate uniformly, and the amplitude of bending vibration is smaller than that of the tip portion provided with the convex portion 122. It has a part (node part). FIG. 4 is an explanatory view showing the node portion 116 of the vibrating body 110. In FIG. 4, a state in which no voltage is applied to the vibrating body 110 is indicated by a broken line, and a state in which the tip is moved rightward by applying a voltage to the set of the surface electrode 132a and the surface electrode 132d of the vibrating body 110 is a solid line. Is shown. As shown in the figure, the vibrating body 110 includes two abdominal portions 114 (114a and 114b) that vibrate with the same amplitude as the end portion in the X direction, and three nodes that have smaller bending vibration amplitudes. Part 116 (front joint part 116a, middle joint part 116b, rear joint part 116c
) And exist.

Of these three node portions 116, the pair of front support portions 124 described above are provided on both sides in the Y direction of the front node portion 116 a on the side close to the protrusion portion 122, and the side far from the protrusion portion 122. The pair of rear support portions 125 described above are provided on both sides in the Y direction of the rear joint portion 116c (see FIG. 2B). In this way, the support portions 124 and 125 of the vibrating body 110 are connected to the node portion 11.
6, the vibration generated in the vibrating body 110 is caused by the leaf spring 140 via the support portions 124 and 125 as compared with the case where the vibration member 110 is provided on a portion different from the node portion 116 (such as the abdomen 114).
, 150 (vibration escapes to the outside) can be suppressed. As a result, the loss of driving energy can be reduced and the object can be driven efficiently.

As is apparent from the operation principle of the piezoelectric motor 100 described above, the driving force received by the object is equal to the frictional force generated between the protrusion 122 and the piezoelectric motor 100 is the vibrating body 1.
It is necessary to press the ten convex portions 122 against the object. Piezoelectric motor 100 of this embodiment
In this case, a method of urging the vibrating body 110 toward the object using two leaf springs (the front leaf spring 140 and the rear leaf spring 150) is employed.

FIG. 5 is an explanatory view showing a state in which the vibrating body 110 is urged toward the object W. FIG. As described above, the vibrating body 110 is a pair of front support portions 12 provided on both side surfaces facing the Y direction.
4 and the pair of rear support portions 125 are one ends of the front leaf spring 140 and the rear leaf spring 150 (
It is joined to pedestals 146 and 156 provided at the upper end in the drawing. These front leaf springs 1
40 and the rear leaf spring 150 are extended from the vibration body 110 in the Z direction (direction intersecting both the expansion and contraction direction and the bending direction of the vibration body 110), and in the X direction (vibration body 1).
It is possible to bend in the X direction facing (10 stretch directions). And if the front leaf | plate spring 140 and the rear leaf | plate spring 150 are bent toward the opposite side (back side) to the side in which the convex part 122 of the vibrating body 110 was provided, the decompression | restoration of the front leaf | plate spring 140 and the rear leaf | plate spring 150 will be carried out. By virtue of the force, the vibrating body 110 can be urged (pressed) toward the side where the convex portion 122 is provided (front side). Note that when the front leaf spring 140 and the rear leaf spring 150 are bent, the vibrating body 110 moves not in the horizontal direction but also in the Z direction (downward in the drawing).

FIG. 5 shows an example in which a rotating disk is driven as the object W, and the fixing portions 142 and 152 of the front leaf spring 140 and the rear leaf spring 150 are fixed at appropriate positions with respect to the rotating disk W. Then, if the front leaf spring 140 and the rear leaf spring 150 are bent rearward, the convex portion 122 of the vibrating body 110 can be pressed against the outer peripheral surface of the rotating disk W. In this state, when the convex portion 122 performs an elliptical motion by applying a voltage to the vibrating body 110, the rotating disc W is rotated by the frictional force generated between the outer peripheral surface of the rotating disc W and the convex portion 122. Can do. The driving of the object W by the piezoelectric motor 100 is not limited to a rotational motion, and a linear motion (translational motion) is also possible.

Further, since the object W is driven by the frictional force received from the convex portion 122 of the vibrating body 110, when the piezoelectric motor 100 is used for a long period of time, the portion where the convex portion 122 abuts gradually. Wear. When such wear proceeds (deeply wears), the contact state between the object W and the convex part 122 (friction force generated between the object W and the convex part 122) changes. The driving accuracy (such as positioning accuracy of the object W) may decrease. Therefore, in the piezoelectric motor 100 of the present embodiment, the two leaf springs (the front leaf spring 140 and the rear leaf spring 150) that urge the vibrating body 110 toward the object W are in the Z direction (vibration) with respect to the vibrating body 110. The body 110 extends in a direction that intersects both the expansion and contraction direction and the bending direction. By doing so, it is possible to suppress a decrease in driving performance of the piezoelectric motor 100 due to wear of the object W.

FIG. 6 is an explanatory diagram showing the reason why the deterioration of the driving performance of the piezoelectric motor 100 due to the wear of the object W can be suppressed by providing the two leaf springs 140 and 150 with respect to the vibrating body 110 from the Z direction. . In FIG. 6, the state of the piezoelectric motor 100 before the object W is worn is indicated by a broken line, and the state where the object W is worn by the use of the piezoelectric motor 100 is indicated by a solid line. As described above, the two leaf springs (the front leaf spring 140 and the rear leaf spring 150) are bent toward the rear side of the vibrating body 110 (the side opposite to the side where the convex portion 122 is provided), and the restoring force. Thus, the vibrating body 110 is biased (pressed) toward the object W. When the object W is worn by the frictional force received from the convex portion 122 of the vibrating body 110, the vibrating body 110 moves in the X direction toward the object W. At this time, by trying to restore the posture in which the two leaf springs 140 and 150 provided in the Z direction with respect to the vibrating body 110 are bent, the vibrating body 110 is in the Z direction (
Accordingly, the position where the convex portion 122 of the vibrating body 110 abuts against the object W (hereinafter referred to as the abutment position) also moves in the Z direction (upward in the figure). As the contact position of the object W is worn in this way, the contact position moves in the Z direction, so that only a certain position is not worn deeply, and the protrusion 122 is worn by the object W. It can be brought into contact with a position not advanced. As a result, it is possible to maintain the drive performance of the piezoelectric motor 100 by suppressing a large change in the contact state between the object W and the convex portion 122.

In the piezoelectric motor 100 of the present embodiment, two leaf springs (the front leaf spring 140 and the rear leaf spring 150) are orthogonal to the vibrating body 110 in both the Z direction (the expansion and contraction direction and the bending direction of the vibrating body 110). However, the direction is not limited to the Z direction, and may be any direction that intersects both the expansion and contraction direction and the bending direction of the vibrating body 110. For example, the two leaf springs 140 and 150 may be extended from a direction inclined by 60 degrees with respect to the expansion / contraction direction and inclined by 80 degrees with respect to the bending direction. If the direction (extension direction) in which the two leaf springs 140 and 150 are extended intersects both the expansion and contraction direction and the bending direction of the vibrating body 110, the two leaf springs 140 are associated with wear of the object W. , 150 is restored from the bent posture, the position (contact position) at which the convex portion 122 of the vibrating body 110 abuts against the object W moves in the extending direction. Can be brought into contact with a position where the wear is not progressing.

Below, the modification of the piezoelectric motor 100 of the present Example mentioned above is demonstrated. In the description of the modified example, the same components as those of the above-described embodiment are denoted by the same reference numerals as those of the above-described embodiment, and the detailed description thereof is omitted.

FIG. 7 is an explanatory view showing the shape of the integrally molded portion 180 constituting the piezoelectric motor 100 of the first modification. FIG. 7A shows a development view of the integrally molded portion 180 of the first modified example. The integrally formed portion 180 is formed by punching from a single metal flat plate. As shown in the figure, the integral molding portion 180 is provided with a shim plate 120 constituting the vibrating body 110 integrally with a pair of front leaf springs 140 and a pair of rear leaf springs 150. Shim plate 120
And the front leaf spring 140 are connected by a pair of front support portions 124, and the shim plate 120 and the rear leaf spring 150 are connected by a pair of rear support portions 125. The piezoelectric motor 1
A fixing part 142 for fixing the front leaf spring 140 and a fixing part 152 for fixing the rear leaf spring 150 when installing 00 are also provided in the integral molding part 180. Furthermore, the integral molding part 180
Is provided with a reinforcing portion 128 having a configuration not in the above-described embodiment.
28 is connected to the end part of the front support part 124 on the front plate spring 140 side and the end part of the rear support part 125 on the rear plate spring 150 side.

The integrally formed portion 180 formed by punching from such a single metal flat plate is shown in FIG.
It is folded into a valley fold along the broken line inside, and folded into a mountain fold along the alternate long and short dash line. It should be noted that bending may be performed simultaneously with punching from one metal flat plate. FIG. 7B is a perspective view showing a state after the integrally molded portion 180 is bent. Thus, the integrally molded portion 180
After the sheet is bent, the shim plate 120 is sandwiched between the front piezoelectric element 130 provided with the front electrode 132 and the back piezoelectric element 131 provided with the back electrode 133 (see FIG. 2A). The vibrating body 110 is produced. As shown in FIG. 7 (b), the front leaf spring 140 and the rear leaf spring 150 of the first modification are Z with respect to the vibrating body 110 in the same manner as in the above-described embodiment.
It extends from the direction (the direction intersecting both the expansion and contraction direction and the bending direction of the vibrating body 110) and can be bent in the X direction facing the X direction (the expansion and contraction direction of the vibration body 110). It is.

In the piezoelectric motor 100 according to the first modified example, the front leaf spring 140 and the rear leaf spring 150 are arranged on the rear side of the vibrating body 110 (the side opposite to the side on which the convex portion 122 is provided) as in the above-described embodiment. If it is bent to the side), the vibrating body 110 is on the front side (the side on which the convex portion 122 is provided).
The projection 122 can be pressed against the object. Further, when the contact position of the object (position where the convex portion 122 contacts) is worn, the two leaf springs 140 are used.
, 150 tries to recover from the bent posture, so that the vibrating body 110 moves toward the object X
Since it moves not only in the direction but also in the Z direction, the convex part 122 can be brought into contact with a position where the wear of the object has not progressed. As a result, the piezoelectric motor 10 due to wear of the object.
It is possible to suppress a decrease in driving performance of zero.

Also, the front support portion 124 and the rear support portion 125 of the first modified example are provided on both sides of the node portion 116 of the vibrating body 110 (see FIG. 4), similarly to the above-described embodiment, so that the vibrating body. It is possible to suppress vibration generated in 110 from being transmitted to the leaf springs 140 and 150 via the support portions 124 and 125 (vibration escapes to the outside). And if the reinforcement part 128 connected to the front support part 124 and the back support part 125 is provided like a 1st modification, the support part 12 will be provided.
4,125 leaf springs 140, 150 side root (portion connected to leaf springs 140, 150)
Since the rigidity of the is increased, the transmission of vibration can be further suppressed.

Further, in the piezoelectric motor 100 of the first modified example, the shim plate 120, the front plate spring 140, and the rear plate spring 150 are integrally formed by bending an integrally formed portion 180 punched from one metal flat plate. Therefore, the shim plate 120, the front leaf spring 140, and the rear leaf spring 1
Compared with the case where 50 is a separate body, the step of joining the two can be omitted, so that the piezoelectric motor 100 can be easily manufactured. In addition, since joint members such as joint screws are not required,
The manufacturing cost of the piezoelectric motor 100 can be reduced.

FIG. 8 is an explanatory view showing the shape of the integrally molded portion 180 constituting the piezoelectric motor 100 of the second modified example. FIG. 8A shows a development view of the integrally molded portion 180 of the second modification. Similarly to the first modified example described above, the integrally molded portion 180 of the second modified example is also formed by punching from a single metal flat plate. The integrally molded portion 180 of the second modified example is the Y of the reinforcing portion 128.
This is different from the integrally molded portion 180 of the first modified example in that bent portions 129 are provided on both sides in the direction. The bent portion 129 is bent into a mountain fold along a fold in the X direction indicated by a one-dot chain line in the drawing.

FIG. 8B shows a perspective view of the state after the integrally molded portion 180 of the second modified example is bent. Thus, by providing the bent portions 129 on both sides of the reinforcing portion 128 connected to the front support portion 124 and the rear support portion 125, the rigidity of the reinforcing portion 128 can be increased. As a result, the vibration generated in the vibrating body 110 is transmitted through the support portions 124 and 125 to the leaf springs 140 and 1.
The effect which suppresses transmitting to 50 can be heightened.

FIG. 9 is an explanatory view showing the shape of the integrally molded portion 180 constituting the piezoelectric motor 100 of the third modified example. FIG. 9 is a perspective view showing a state after the integrally molded portion 180 of the third modified example is bent. Compared to the integrally molded portion 180 of the first modification (see FIG. 7), the integrally molded portion 180 of the third modified example is not provided with the reinforcing portion 128. The reinforcing plate 160 provided separately is a front support portion 124 and a rear support portion 125.
Are joined by joint screws 162 and 163.

In the piezoelectric motor 100 according to the third modified example, by using the reinforcing plate 160 having rigidity higher than that of the integrally molded portion 180, vibration generated in the vibrating body 110 is supported by the support portions 124 and 12.
The effect of suppressing the transmission to the leaf springs 140 and 150 via 5 can be enhanced.

FIG. 10 is an explanatory view showing the shape of the integrally molded portion 180 constituting the piezoelectric motor 100 of the fourth modified example. FIG. 10 is a perspective view showing a state after the integrally molded portion 180 of the fourth modified example is bent. The integrally molded portion 180 of the fourth modified example is not provided with the front support portion 124 and the rear support portion 125, and the front leaf spring 140 and the rear leaf spring are disposed at the end in the longitudinal direction (X direction) of the vibrating body 110. 150 are directly connected.

In the case of such an integrally molded part 180 of the fourth modified example, the front support part 124 and the rear support part 1
Since the shape becomes simple compared to the case of having 25, the integrally formed portion 18 from a single metal flat plate.
Manufacture of the piezoelectric motor 100 by punching or bending zero is facilitated.

Since the piezoelectric motor 100 of the above-described embodiment or the piezoelectric motor 100 of the modified example can suppress a decrease in driving performance due to wear of the object, it can be suitably incorporated as a driving device of the following device.

FIG. 11 shows a robot hand 2 incorporating the piezoelectric motor 100 of the embodiment or the modified example.
It is explanatory drawing which illustrated 00. The illustrated robot hand 200 has a plurality of fingers 203 standing from a base 202 and is connected to an arm 210 via a wrist 204. Here, as shown in FIG. 11A, the base portion (movable portion) of the finger 203 is a base 202.
The piezoelectric motor 100 is mounted with the convex portion 122 pressed against the base portion of the finger portion 203. For this reason, by operating the piezoelectric motor 100, the finger part 203 can be moved and the object can be gripped. This piezoelectric motor 100
Is a driving unit that moves the finger unit 203. In addition, the wrist 2 is also attached to the wrist 204.
The piezoelectric motor 100 is mounted with the convex portion 122 pressed against the end face of 04. For this reason, it is possible to rotate the whole base 202 by operating the piezoelectric motor 100.

In addition, as shown in FIG. 11B, the finger part 203 is provided with a joint part 205 that allows the finger part 203 to be bent. Also in the joint portion 205, the piezoelectric motor 100 is mounted in a state where the convex portion 122 is pressed against a portion (movable portion) to be rotated of the joint portion 205. For this reason, the finger part 203 can be bent by operating the piezoelectric motor 100.

FIG. 12 is an explanatory diagram illustrating a single-arm robot 250 including the robot hand 200 (hand unit). As shown in the figure, the robot 250 has an arm 210 (arm part) including a plurality of link parts 212 (link members) and a joint part 220 that connects the link parts 212 in a bendable state. doing. The robot hand 200 is connected to the tip of the arm 210. The joint portion 220 incorporates the piezoelectric motor 100 of the embodiment or the modified example as a drive portion for bending the joint portion 220, and the convex portion 122 is provided on a portion to be rotated (movable portion) of the joint portion 220. Is pressed. Therefore, by operating the piezoelectric motor 100, each joint 220 is bent (rotated) by an arbitrary angle.
It is possible to make it.

FIG. 13 is an explanatory diagram illustrating a multi-armed robot 260 including the robot hand 200. As shown in the figure, the robot 260 includes a plurality of link portions 212 and the link portions 2.
There are a plurality of arms 210 (two in the illustrated example) provided with joints 220 that connect the twelve members in a bendable state. A robot hand 200 and a tool 201 (hand unit) are connected to the tip of the arm 210. In addition, a plurality of cameras 263 are mounted on the head 262, and a control unit 266 that controls the overall operation is mounted inside the main body 264. Further, it can be conveyed by a caster 268 provided on the bottom surface of the main body 264. Also in this robot 260, the joint unit 220 incorporates the piezoelectric motor 100 of the embodiment or the modified example as a drive unit for bending the joint unit 220, and a part to which the joint unit 220 is rotated (movable unit). Convex part 122 is pressed on. For this reason, the piezoelectric motor 100
By operating, each joint part 220 can be bent (rotated) by an arbitrary angle.

FIG. 14 is a perspective view illustrating an electronic component inspection apparatus 300 configured by incorporating the piezoelectric motor 100 of the example or the modification. The illustrated electronic component inspection apparatus 300 is roughly provided with a base 310 and a support base 330 standing on the side surface of the base 310. Base 3
10 is an upstream stage 312u on which the electronic component 1 to be inspected is placed and transported.
And a downstream stage 312d on which the inspected electronic component 1 is placed and conveyed. Further, between the upstream stage 312u and the downstream stage 312d, an imaging device 314 for confirming the posture of the electronic component 1 and the electronic component 1 for inspecting the electrical characteristics.
Is provided with an inspection table 316 (inspection unit). Representative examples of the electronic component 1 include “semiconductor”, “semiconductor wafer”, “display device such as LCD and OLED”, “crystal device”, “various sensors”, “inkjet head”, “various types” ME
MS device "etc. are mentioned.

Further, the support base 330 is provided with a Y stage 332 that is movable in a direction (Y direction) parallel to the upstream stage 312u and the downstream stage 312d of the base 310, and from the Y stage 332, the base An arm portion 334 is extended in the direction toward X (X direction). An X stage 336 is provided on the side surface of the arm 334 so as to be movable in the X direction. The X stage 336 is provided with an imaging camera 338 and a gripping device 350 incorporating a Z stage movable in the vertical direction (Z direction). In addition, a grip portion 352 that grips the electronic component 1 is provided at the tip of the grip device 350. Further, a control device 318 for controlling the overall operation of the electronic component inspection apparatus 300 is also provided on the front side of the base 310. In this embodiment, the Y stage 332, the arm portion 334, the X
The stage 336 and the gripping device 350 correspond to the “electronic component transport device” of the present invention.

The electronic component inspection apparatus 300 having the above configuration inspects the electronic component 1 as follows. First, the electronic component 1 to be inspected is placed on the upstream stage 312u and moved to the vicinity of the inspection table 316. Next, the Y stage 332 and the X stage 336 are moved to move the gripping device 350 to a position directly above the electronic component 1 placed on the upstream stage 312u. At this time, the position of the electronic component 1 can be confirmed using the imaging camera 338. When the gripping device 350 is lowered using the Z stage built in the gripping device 350 and the electronic component 1 is gripped by the gripping portion 352, the gripping device 350 is directly used as the imaging device 3.
14, and the posture of the electronic component 1 is confirmed using the imaging device 314. continue,
The attitude of the electronic component 1 is adjusted using a fine adjustment mechanism built in the gripping device 350. Then, after moving the gripping device 350 onto the inspection table 316, the Z stage built in the gripping device 350 is moved to set the electronic component 1 on the inspection table 316. Since the posture of the electronic component 1 is adjusted using the fine adjustment mechanism in the gripping device 350, the electronic component 1 can be set at the correct position on the inspection table 316. When the inspection of the electrical characteristics of the electronic component 1 is completed using the inspection table 316, the electronic component 1 is picked up from the inspection table 316 and then Y
The stage 332 and the X stage 336 are moved to move the gripping device 350 over the downstream stage 312d, and the electronic component 1 is placed on the downstream stage 312d. Thereafter, the downstream stage 312d is moved to transport the electronic component 1 that has been inspected to a predetermined position.

FIG. 15 is an explanatory diagram of a fine adjustment mechanism built in the gripping device 350. As shown in the drawing, in the gripping device 350, a rotating shaft 354 connected to the gripping portion 352, and the rotating shaft 35
A fine adjustment plate 356 (movable part) to which 4 is rotatably attached is provided.
Further, the fine adjustment plate 356 is movable in the X direction and the Y direction while being guided by a guide mechanism (not shown).

Here, as shown by hatching in FIG. 15, a piezoelectric motor 100θ for rotation direction is mounted toward the end surface of the rotation shaft 354, and a convex portion (not shown) of the piezoelectric motor 100θ rotates. It is pressed against the end face of the shaft 354. Therefore, by operating the piezoelectric motor 100θ, the rotation shaft 354 (and the grip portion 352) can be accurately rotated by an arbitrary angle in the θ direction. In addition, an X-direction piezoelectric motor 100x and a Y-direction piezoelectric motor 100y are provided toward the fine adjustment plate 356, and respective convex portions (not shown) are pressed against the surface of the fine adjustment plate 356. It has been. For this reason,
By operating the piezoelectric motor 100x, the fine adjustment plate 356 (and the grip portion 352) can be accurately moved by an arbitrary distance in the X direction. Similarly, by operating the piezoelectric motor 100y, the fine adjustment plate It is possible to accurately move 356 (and the grip portion 352) by an arbitrary distance in the Y direction. Accordingly, the electronic component inspection apparatus 300 of FIG. 14 includes the piezoelectric motor 100θ, the piezoelectric motor 100x, and the piezoelectric motor 10.
By operating 0y, it is possible to finely adjust the posture of the electronic component 1 gripped by the grip portion 352.

FIG. 16 is an explanatory view exemplifying a liquid feed pump 400 configured by incorporating the piezoelectric motor 100 of the example or the modification. FIG. 16A shows a plan view of the liquid feed pump 400 as viewed from above, and FIG. 16B shows a cross-sectional view of the liquid feed pump 400 as viewed from the side. As shown in the figure, a liquid feed pump 400 is provided with a disk-shaped rotor 404 (moving part) rotatably in a rectangular-shaped case 402, and between the case 402 and the rotor 404, a chemical solution or the like is provided. A tube 406 through which the liquid flows is sandwiched. A part of the tube 406 is crushed and closed by a ball 408 (blocking portion) provided on the rotor 404. Therefore, when the rotor 404 rotates, the position where the ball 408 crushes the tube 406 moves, so that the liquid in the tube 406 is fed. If the convex portion 122 of the piezoelectric motor 100 is pressed against the outer peripheral surface of the rotor 404, the piezoelectric motor 100 can be used as a drive unit that drives the rotor 404. In this way, it is possible to realize a small liquid feed pump 400 that can accurately deliver a very small amount of liquid.

FIG. 17 is a perspective view illustrating a printing apparatus 500 incorporating the piezoelectric motor 100 according to the embodiment or the modification. The illustrated printing apparatus 500 is a so-called inkjet printer that prints an image by ejecting ink onto the surface of the print medium 2. The “image” printed by the printing apparatus 500 includes characters, graphics, paintings, patterns, photographic images, and the like. The printing apparatus 500 has a substantially box-shaped appearance, and is provided with a paper discharge tray 501, a discharge port 502, and a plurality of operation buttons 505 at the front center. A supply tray 503 is provided on the back side. The printing medium 2 is set on the supply tray 503 and the operation button 5
When 05 is operated, the print medium 2 is sucked from the supply tray 503, an image is printed on the surface of the print medium 2 inside the printing apparatus 500, and then discharged from the discharge port 502.

Inside the printing apparatus 500 is a print head 520 that reciprocates in the main scanning direction on the print medium 2.
And a guide rail 510 for guiding the movement of the print head 520 in the main scanning direction. The illustrated print head 520 includes a printing unit 5 that ejects ink onto the print medium 2.
22 and a scanning unit 524 for scanning the print head 520 in the main scanning direction. A plurality of ejection nozzles are provided on the bottom surface side (side facing the printing medium 2) of the printing unit 522, and ink can be ejected from the ejection nozzles toward the printing medium 2. The scanning unit 524 is equipped with piezoelectric motors 100m and 100s as driving units. A convex portion (not shown) of the piezoelectric motor 100m is pressed against the guide rail 510. For this reason, the print head 520 can be moved in the main scanning direction by operating the piezoelectric motor 100m. Further, the convex portion 122 of the piezoelectric motor 100 s has a printing portion 52.
2 is pressed against. For this reason, by operating the piezoelectric motor 100s,
It is possible to bring the bottom side of the printing unit 522 closer to the printing medium 2 or away from the printing medium 2. Further, the printing apparatus 500 includes a cutting mechanism 53 for cutting the roll paper 504.
0 is also installed. The cutting mechanism 530 includes a cutter holder 532 having a paper cutter 536 mounted at the tip thereof, and a guide shaft 534 extending through the cutter holder 532 in the main scanning direction. A piezoelectric motor 100 c is mounted in the cutter holder 532, and a convex portion (not shown) of the piezoelectric motor 100 c is pressed against the guide shaft 534. Therefore, when the piezoelectric motor 100c is operated, the cutter holder 532 is moved to the guide shaft 5
34, the paper cutter 536 cuts the roll paper 504. It is also possible to use the piezoelectric motor 100 as a drive unit for feeding the print medium 2 to paper.

FIG. 18 is an explanatory view illustrating the internal structure of an electronic timepiece 600 incorporating the piezoelectric motor 100 of the embodiment or the modification. FIG. 18 shows a plan view of the electronic timepiece 600 as viewed from the side opposite to the time display side (back cover side). An electronic timepiece 600 illustrated in FIG. 18 includes a disk-shaped rotating disk 602, a gear train 604 for transmitting the rotation of the rotating disk 602 to a pointer (not shown) for displaying time, and a rotating circle. A piezoelectric motor 100 as a driving unit for driving the plate 602, a power supply unit 606, a crystal chip 608, and an IC 610 are provided. The power supply unit 606, the crystal chip 608, and the IC 610 are mounted on a circuit board (not shown). The gear train 604 is composed of a plurality of gears including a ratchet (not shown),
The teeth of adjacent gears are meshed so that rotation is transmitted sequentially. In FIG. 18, in order to avoid complication of the illustration, a line connecting the gear teeth is shown by a thin one-dot chain line, and a line connecting the gear teeth is shown by a thick solid line. Accordingly, a double circle formed by a thick solid line and a thin one-dot chain line represents a gear. In addition, for the thin dash-dot line indicating the tooth tip, the entire circumference is not displayed, but only the periphery of the portion that meshes with another gear.

The rotating disk 602 is provided with a small gear 602g coaxially. The gear 602g
Is engaged with the gear train 604. Therefore, the rotation of the rotating disk 602 is transmitted through the gear train 604 while being decelerated at a predetermined ratio. Then, the rotation of the gear is transmitted to a hand indicating the time to display the time. And if the convex part 122 of the piezoelectric motor 100 is provided in the state pressed against the outer peripheral surface of the rotary disk 602, it can be used as a drive part which rotates the rotary disk 602.

FIG. 19 is an explanatory view illustrating a projection apparatus 700 incorporating the piezoelectric motor 100 of the example or the modification. As illustrated, the projection apparatus 700 includes a projection unit 702 including an optical lens, and displays an image by projecting light from a built-in light source (not shown). Then, the adjustment mechanism 704 (adjustment unit) for focusing the optical lens included in the projection unit 702 may be driven using the piezoelectric motor 100 as a drive unit. Since the piezoelectric motor 100 has a high positioning resolution, fine focusing can be performed. Further, while the light from the light source is not projected, it is possible to prevent the optical lens from being damaged by covering the optical lens of the projection unit 702 with the lens cover 706. The piezoelectric motor 100 can be used as a drive unit for opening and closing the lens cover 706.

As described above, the piezoelectric motor of the present invention and various devices equipped with the piezoelectric motor have been described. However, the present invention is not limited to the above-described embodiments, modified examples, and application examples, and various modifications can be made without departing from the scope of the invention. It is possible to implement in the mode.

For example, the front leaf spring 140 and the rear leaf spring 150 of the piezoelectric motor 100 may be parallel or parallel as long as the vibrating body 110 can be biased in the X direction (stretching direction) in a bent state. It does not have to be the same length. However, if the front leaf spring 140 and the rear leaf spring 150 are parallel and have the same length, the vibration body for the object is restored when the front leaf spring 140 and the rear leaf spring 150 are restored from the bent state. Since the posture of 110 is maintained, it is possible to suppress a change in a contact state (contact angle or the like) between the object and the convex portion 122.

In the above-described embodiment, as a biasing member that biases the vibrating body 110 toward the target,
Leaf springs (140, 150) were used. However, it is not limited to the leaf spring as long as it can bend in the expansion / contraction direction of the vibrating body 110 and is urged in a direction opposite to the bending direction by a restoring force to return to the original shape. Alternatively, it may be a coil spring, a rod-like or plate-like rubber member, or the like. In addition, the urging members for urging the vibrating body 110 are not limited to two like the front leaf spring 140 and the rear leaf spring 150 of the above-described embodiment, but are positioned in the expansion / contraction direction of the vibrating body 110. Three or more urging members different from each other may be provided.

DESCRIPTION OF SYMBOLS 1 ... Electronic component, 2 ... Print medium, 100 ... Piezoelectric motor,
110 ... vibrator, 114 ... abdomen, 116 ... node,
120 ... Shim plate, 122 ... Convex part, 124 ... Front support part,
125 ... Back support part, 126, 127 ... Joining screw,
128 ... reinforcement part, 129 ... bending part,
130: Front piezoelectric element 131: Back piezoelectric element 132: Front electrode,
133 ... Back electrode, 140 ... Front leaf spring, 142 ... Fixing part,
144: Fixing screw, 146: Pedestal part, 150 ... Back leaf spring,
152 ... fixing part, 154 ... fixing screw, 156 ... pedestal part,
160 ... reinforcing plates, 162,163 ... joining screws,
180 ... integrally molded part, 200 ... robot hand, 201 ... tool,
202 ... base, 203 ... finger, 204 ... wrist,
210 ... arm, 212 ... link part, 220 ... joint part,
250 ... Robot, 260 ... Robot, 262 ... Head,
263 ... Camera, 264 ... Main body part, 266 ... Control part,
268 ... Caster, 300 ... Electronic component inspection device, 310 ... Base,
312d: downstream stage, 312u: upstream stage,
314 ... Imaging device, 316 ... Inspection table, 318 ... Control device,
330 ... Supporting base 334 ... Arm part 338 ... Imaging camera 350 ... Gripping device 352 ... Gripping part 354 ... Rotating shaft
356 ... fine adjustment plate, 400 ... liquid feed pump, 402 ... case,
404 ... rotor, 406 ... tube, 408 ... ball,
500 ... Printer, 501 ... Discharge tray, 502 ... Discharge port,
503 ... Supply tray, 505 ... Operation buttons, 510 ... Guide rail,
520 ... Print head, 522 ... Printing section, 524 ... Scanning section,
600 ... an electronic timepiece, 602 ... a rotating disk, 602g ... a gear,
604 ... gear train, 606 ... battery, 608 ... crystal chip,
610 ... IC, 700 ... Projector, 702 ... Projector,
704 ... Adjustment mechanism, 706 ... Lens cover

Claims (13)

A vibrator that includes a piezoelectric material and that undergoes stretching vibration and bending vibration when a voltage is applied;
An abutting portion that is provided at an end portion of the vibrating body in an expansion / contraction direction that vibrates / contracts, and abuts against an object;
A plurality of urging members that bend in the expansion / contraction direction, urge the vibrating body in the expansion / contraction direction, and abut the contact portion on the object;
With
The piezoelectric motor, wherein the plurality of urging members are provided from a direction intersecting both the expansion / contraction direction and the bending direction in which bending vibration occurs with respect to the vibrating body. The piezoelectric motor according to claim 1,
The vibrator includes a piezoelectric element formed including a piezoelectric material, and a plate to which the piezoelectric element is attached,
The plurality of urging members and the plate are formed by bending a single plate material. The piezoelectric motor according to claim 2,
The plurality of biasing members include a first leaf spring and a second leaf spring,
A first support portion provided on both sides of the vibrating body in the bending direction and connecting the plate and the first leaf spring;
A second support portion provided on both sides of the vibrating body in the bending direction, and connecting the plate and the second leaf spring;
With
The first support portion and the second support portion are connected to the plate from either side of a plurality of node portions having a small amplitude of the bending vibration compared to the end portion of the vibrating body in the expansion / contraction direction,
The piezoelectric motor, wherein the first plate spring, the second plate spring, the first support portion, the second support portion, and the plate are formed of a single plate material. The piezoelectric motor according to claim 3,
A reinforcing portion connected to the first support portion and the second support portion;
The piezoelectric motor according to claim 1, wherein the first plate spring, the second plate spring, the first support portion, the second support portion, the plate, and the reinforcing portion are formed of a single plate material. A robot hand that can hold an object with a finger,
A base body erected so that the finger portion is movable;
A movable part interlocked with the movement of the finger part relative to the base or the rotation of the joint of the finger part;
A vibrator that includes a piezoelectric material and that undergoes stretching vibration and bending vibration when a voltage is applied;
An abutting portion provided at an end portion of the vibrating body in an expansion / contraction direction that vibrates and contracts, and abutting on the movable portion;
A plurality of urging members that bend in the expansion / contraction direction, urge the vibrating body in the expansion / contraction direction, and abut the contact portion on the movable portion;
With
The robot hand, wherein the plurality of biasing members are provided from a direction intersecting both the expansion / contraction direction and the bending direction in which the vibrating body vibrates. An arm provided with a rotatable joint, and
A hand portion provided on the arm portion;
A main body provided with the arm,
A robot equipped with
A movable part interlocking with the rotation of the joint part;
A vibrator that includes a piezoelectric material and that undergoes stretching vibration and bending vibration when a voltage is applied;
An abutting portion provided at an end portion of the vibrating body in an expansion / contraction direction that vibrates and contracts, and abutting on the movable portion;
A plurality of urging members that bend in the expansion / contraction direction, urge the vibrating body in the expansion / contraction direction, and abut the contact portion on the movable portion;
With
The robot, wherein the plurality of urging members are provided from a direction intersecting both the expansion / contraction direction and the bending direction of bending vibration with respect to the vibrating body. An electronic component transport apparatus including a gripping unit that grips an electronic component,
A movable part that interlocks with the movement of the gripping part that grips the electronic component;
A vibrator that includes a piezoelectric material and that undergoes stretching vibration and bending vibration when a voltage is applied;
An abutting portion provided at an end portion of the vibrating body in an expansion / contraction direction that vibrates and contracts, and abutting on the movable portion;
A plurality of urging members that bend in the expansion / contraction direction, urge the vibrating body in the expansion / contraction direction, and abut the contact portion on the movable portion;
With
The electronic component conveying apparatus, wherein the plurality of urging members are provided from a direction intersecting both the expansion / contraction direction and the bending direction of bending vibration with respect to the vibrating body. A gripper for gripping electronic components;
An inspection unit for inspecting the electronic component;
An electronic component inspection apparatus comprising:
A movable part that interlocks with the movement of the gripping part that grips the electronic component;
A vibrator that includes a piezoelectric material and that undergoes stretching vibration and bending vibration when a voltage is applied;
An abutting portion provided at an end portion of the vibrating body in an expansion / contraction direction that vibrates and contracts, and abutting on the movable portion;
A plurality of urging members that bend in the expansion / contraction direction, urge the vibrating body in the expansion / contraction direction, and abut the contact portion on the movable portion;
With
The electronic component inspection apparatus, wherein the plurality of urging members are provided from a direction intersecting both the expansion / contraction direction and the bending direction of bending vibration with respect to the vibrating body. A tube through which liquid can flow;
A closing portion that contacts the tube and closes the tube;
A moving part for moving the blocking part;
A liquid feed pump comprising:
A vibrator that includes a piezoelectric material and that undergoes stretching vibration and bending vibration when a voltage is applied;
An abutting portion that is provided at an end portion of the vibrating body in an expansion / contraction direction that vibrates and contracts, and abuts on the moving portion;
A plurality of urging members that bend in the expansion / contraction direction, urge the vibrating body in the expansion / contraction direction, and abut the contact portion on the moving portion;
With
The liquid feeding pump, wherein the plurality of urging members are provided from a direction intersecting both the expansion / contraction direction and the bending direction of bending vibration with respect to the vibrating body. A print head for printing an image on a medium;
A moving unit for moving the print head;
A printing apparatus comprising:
A vibrator that includes a piezoelectric material and that undergoes stretching vibration and bending vibration when a voltage is applied;
An abutting portion that is provided at an end portion of the vibrating body in an expansion / contraction direction that vibrates and contracts, and abuts on the moving portion;
A plurality of urging members that bend in the expansion / contraction direction, urge the vibrating body in the expansion / contraction direction, and abut the contact portion on the moving portion;
With
The printing apparatus, wherein the plurality of urging members are provided from a direction intersecting both the expansion / contraction direction and the bending direction of bending vibration with respect to the vibrating body. A coaxial rotating gear, and a rotatable rotating disk;
A gear train including a plurality of gears;
A pointer connected to the gear train and indicating the time;
An electronic timepiece comprising:
A vibrator that includes a piezoelectric material and that undergoes stretching vibration and bending vibration when a voltage is applied;
An abutting portion provided at an end portion of the vibrating body in an expansion / contraction direction that vibrates and contracts, and abutting on the rotating disk;
A plurality of urging members that bend in the expansion / contraction direction, urge the vibrating body in the expansion / contraction direction, and abut the contact portion on the rotating disk;
With
The electronic timepiece characterized in that the plurality of urging members are provided from a direction intersecting both the expansion / contraction direction and the bending direction in which the vibration body is bent and vibrated. A light source that generates light;
A projection unit including an optical lens and projecting the light;
A moving unit for moving the optical lens;
A projection device comprising:
A vibrator that includes a piezoelectric material and that undergoes stretching vibration and bending vibration when a voltage is applied;
An abutting portion that is provided at an end portion of the vibrating body in an expansion / contraction direction that vibrates and contracts, and abuts on the moving portion;
A plurality of urging members that bend in the expansion / contraction direction, urge the vibrating body in the expansion / contraction direction, and abut the contact portion on the moving portion;
With
The projection device, wherein the plurality of biasing members are provided from a direction intersecting both the expansion / contraction direction and the bending direction of bending vibration with respect to the vibrating body. A transport device for transporting an object,
A vibrator that includes a piezoelectric material and that undergoes stretching vibration and bending vibration when a voltage is applied;
An abutting portion that is provided at an end of the vibrating body in the expansion / contraction direction that vibrates and contracts, and abuts on the object;
A plurality of urging members that bend in the expansion / contraction direction, urge the vibrating body in the expansion / contraction direction, and abut the contact portion on the object;
With
The conveying device, wherein the plurality of urging members are provided from a direction that intersects both the expansion / contraction direction and the bending direction in which the vibrating body vibrates.

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