JP5983595B2 - Processing container and laser processing apparatus - Google Patents

Description

  The present invention relates to a processing container that supports a head unit that scans a processing surface of a workpiece with laser light, and a laser processing apparatus that includes the head unit and the processing container.

Conventionally, various laser processing apparatuses have been proposed.
For example, the defect cause determination apparatus described in Patent Document 1 below includes an XY stage that can move in the X-axis direction and the Y-axis direction, a sample chamber that houses the XY stage, and the surface of the sample placed on the XY stage. Are provided with an alignment laser oscillator for irradiating the alignment visible laser beam, and a pulse laser oscillator for emitting a pulse laser beam for irradiating the defect portion. In addition, the defect cause determination apparatus includes a CCD video camera that photographs the sample surface on the XY stage, and the user confirms the position of the visible laser light photographed by the CCD camera on the sample surface on the monitor and displays the XY stage. It is configured to operate and align the sample.

JP-A-11-101746

  However, in the defect cause determination apparatus described in Patent Document 1, it is necessary to install a CCD video camera in the sample chamber and check the position of the sample surface on the monitor. . Further, when the sample chamber is removed and the position of the sample is aligned by visually observing the position of the visible laser beam on the sample surface, the pulse laser beam may be reflected from the sample surface to the user.

  Accordingly, the present invention has been made to solve the above-described problems, and a small processing container and a laser processing apparatus capable of safely and easily confirming an irradiation position of a visible laser beam on an object to be processed. The purpose is to provide.

In order to achieve the above object, a processing container according to claim 1 includes an oscillator that emits laser light, a visible laser light source that emits visible laser light, a laser light emitted from the oscillator, and a laser beam emitted from the visible laser light source. And a condensing unit that condenses the visible laser beam and emits the visible laser beam toward the object to be processed. provided the emission direction side, the work table for placing a workpiece, supporting the head portion, the hole in which the condensing said laser beam emitted from the optical unit and the visible laser beam passes is formed Rutotomoni , An upper surface member formed of a light shielding material that shields the laser light reflected on the workpiece, and an emission direction of the light converging unit so as to surround the laser light and the visible laser light that have passed through the hole Along and Together are arranged so as to cross have a front plate and a plurality of which are formed with a light-shielding material that shields the laser beam reflected on the workpiece and a neighboring side plates adjacent to the front plate It has a side member, and a pivot support portion for rotatably supporting the adjacent side face plate as a rotation axis side edge portion opposite to the front plate of the adjacent side plates, before Symbol adjacent The side plate is configured to cover a near side surface portion in a direction approaching the front plate from a perpendicular extending from the optical axis of the light collecting portion to the adjacent side surface plate, and the upper surface member of the light collecting portion From the perpendicular extending from the optical axis to the adjacent side plate, it has an adjacent upper surface plate that covers the ceiling portion of the processing container in a direction approaching the front plate, and the side edge on the front plate side of the adjacent upper surface plate is And the adjacent upper surface plate is fixed to a side edge portion of the front plate on the adjacent upper surface plate side. Side edge portion on the opposite side with respect to the front plate is disconnected from the side edges opposing the top face member, wherein the front plate, via the pivot support portion in the side edge portions of the positive faceplate When the adjacent side plate and the adjacent upper surface plate that are adjacent to each other are rotatably supported integrally, and the front plate is rotated integrally with the adjacent side surface plate and the adjacent upper surface plate and opened, Visible light is allowed to pass through at least a portion of the adjacent side surface portion through which a perpendicular extending from the optical axis to the adjacent side surface portion passes. It should be noted that the visible light is not limited to the case where the adjacent side plate is removed from the adjacent side surface portion and the visible light passes, but the visible light passes through the light shielding film that shields the laser light and transmits the visible light. The case of passing is also included.

Further, the processing container according to claim 2 is the processing container according to claim 1 , wherein the side edges on the front plate side of the adjacent side plates adjacent to both side edges of the front plate are adjacent to each other. The front plate and the adjacent upper surface plate are fixed to each side edge portion of the front plate, and are separated along a perpendicular extending from the optical axis of the light collecting unit to the front plate, and the rotation support unit Is configured to rotatably support the adjacent side plate with each side edge portion of the adjacent side plate fixed to each side edge portion of the front plate as a rotation axis. Features.

The laser processing apparatus according to claim 3 includes an oscillator that emits laser light, a visible laser light source that emits visible laser light, a laser light emitted from the oscillator, and a visible laser emitted from the visible laser light source. A condensing part that condenses light and emits the light toward a workpiece, and a box-shaped processing container that supports the head part, and the processing container includes the A processing base on which a processing target is placed and a hole that supports the head unit and through which the laser light and the visible laser light emitted from the condensing unit pass are provided on the emitting direction side of the condensing unit. formed Rutotomoni, wherein an upper surface member which is formed with a light-shielding material that shields the laser beam reflected on the workpiece, the laser beam and the focused beam so as to surround the visible laser light has passed through the hole Along the exit direction of the part , With and is arranged so as to intersect each other, it is formed with a light-shielding material that shields the laser beam reflected on the workpiece and a neighboring side plate adjacent the front and plate front plate more has between side member, and a pivot support portion for rotatably supporting the adjacent side face plate as a rotation axis side edge portion opposite to the front plate of the adjacent side plates, before Symbol The adjacent side plate is configured to cover a near side surface in a direction approaching the front plate from a perpendicular extending from the optical axis of the light collecting unit to the adjacent side plate, and the upper surface member includes the light collecting unit. An adjacent upper surface plate that covers a ceiling portion of the processing container in a direction approaching the front plate from a perpendicular extending from the optical axis to the adjacent side surface plate, and a side edge of the adjacent upper surface plate on the front plate side Is fixed to a side edge of the front plate on the side of the adjacent upper surface plate, and Side edge portion on the opposite side with respect to the front plate of the upper plate is disconnected from the side edges opposing the top face member, wherein the front plate is on both sides of the positive side plate via the pivot support portion The adjacent side plate and the adjacent upper surface plate adjacent to the edge portions are rotatably supported integrally, and the front plate is integrally rotated with the adjacent side plate and the adjacent upper surface plate to be opened. In this case, visible light is allowed to pass through at least a portion of the adjacent side surface portion through which a perpendicular extending from the optical axis to the adjacent side surface portion passes.

In the processing container according to the first aspect and the laser processing apparatus according to the third aspect , the visible laser beam and the laser beam are emitted from the condensing unit toward the processing target. Then, the processing container of the processing table on which the processing object is arranged is rotated integrally with the adjacent side surface plate and the adjacent upper surface plate respectively adjacent to the side edges of the front plate through the rotation support portion. It is supported freely . Further, the adjacent side plate adjacent to the front plate is provided so as to cover the adjacent side surface portion in a direction approaching the front plate from a perpendicular extending from the optical axis of the light collecting unit to the adjacent side plate. Further, the adjacent upper surface plate is provided so as to cover the ceiling portion of the processing container in a direction approaching the front plate from a perpendicular extending from the optical axis of the light collecting portion to the adjacent side surface plate. And, when the front plate is rotated integrally with the adjacent side plate and the adjacent upper surface plate and opened, from the portion through which the perpendicular extending from the optical axis of at least the light collecting portion of the adjacent side surface portion to the adjacent side surface portion passes. Allow visible light to pass through.

Thereby, the user confirms the irradiation position of the visible laser light on the workpiece from the direction facing the front plate of the processing table by opening the front plate integrally with the adjacent side plate and the adjacent upper surface plate. be able to. Further, the user can confirm the irradiation position of the visible laser beam on the object to be processed through the near side surface portion from the perpendicular direction extending from the optical axis of the light collecting portion to the adjacent side surface plate. That is, the user can visually recognize the irradiation position of the visible laser beam on the workpiece placed on the machining table directly from the biaxial direction perpendicular to the optical axis of the light collecting unit by opening the front plate. The alignment of the processing object with respect to the visible laser beam and the laser beam can be performed quickly. Furthermore, by directly opening the front plate with the adjacent side plate and the adjacent upper surface plate, the irradiation position of the visible laser beam on the processing object arranged on the processing table is directly visually confirmed from the upper side, The processing object can be quickly aligned.

In addition, by closing the front plate integrally with the adjacent side plate and the adjacent upper surface plate, the laser beam reflected on the workpiece can be blocked by the front plate , the contact surface plate and the adjacent upper surface plate , and the user can perform work. It can be done safely. In addition, the irradiation position of the visible laser beam on the workpiece placed on the processing table can be visually adjusted with a simple configuration without installing a camera or the like, and the processing container can be downsized. Can do.

Moreover, in the processing container which concerns on Claim 2 , the side edge part by the side of the front plate of an adjacent side plate is being fixed to the side edge part by the side of this adjacent side plate of this front plate. Then, the front plate and the adjacent upper surface plate are separated along a perpendicular extending from the optical axis of the light collecting portion to the front plate, and the side edge on the opposite side to the front plate via the rotation support member. Is pivotally supported about the pivot axis. As a result, the front plate and the adjacent upper surface plate can be configured to be double-opened, and the space on the near side of the processing container necessary for opening the front plate and the adjacent upper surface plate can be reduced, and the processing container is installed. It is possible to save the space required to do this.

It is a perspective view of the laser processing apparatus 1 which concerns on 1st Embodiment. 3 is a plan view showing a schematic configuration of a laser head unit 2. FIG. 2 is a side view showing a schematic configuration of a laser head unit 2. FIG. 3 is a perspective view of a processing container 3. FIG. FIG. 5 is a plan view of FIG. 4. It is a perspective view in the state where door 3A of processing container 3 was opened. FIG. 7 is a plan view of FIG. 6. It is a perspective view explaining the alignment method of the process target object. It is a side view explaining the alignment method of the process target object. It is a perspective view which shows the state which slid the slide door 75 of the laser processing apparatus 71 which concerns on 2nd Embodiment upwards. It is a side view of FIG. It is a top view of FIG. It is a perspective view which shows the state which removed the cover member 93 of the laser processing apparatus 91 which concerns on 3rd Embodiment. FIG. 14 is a side view of FIG. 13. It is a perspective view which shows the state which opened the front board 95 of the laser processing apparatus 111 which concerns on 4th Embodiment. FIG. 16 is a side view of FIG. 15.

  DETAILED DESCRIPTION Hereinafter, a processing container and a laser processing apparatus according to the present invention will be described in detail with reference to the drawings based on the first to fourth embodiments. First, a schematic configuration of the laser processing apparatus 1 according to the first embodiment will be described with reference to FIGS. 1 to 7. In the following description, as shown in FIG. 1, the double door 3 </ b> A side of the box-shaped processing container 3 is the front direction, and the back side with respect to the door 3 </ b> A of the processing container 3 is the rear direction. Further, as shown in FIG. 8, the optical axis 16A direction of the fθ lens 16 is the vertical direction, and the upper surface plate portion 36A side that supports the laser head portion 2 of the processing container 3 is the upper side. And the direction orthogonal to the up-down direction and the front-back direction of the laser processing apparatus 1 is the left-right direction of the laser processing apparatus 1.

[First Embodiment]
[Schematic configuration of laser processing apparatus 1]
As shown in FIG. 1, the laser processing apparatus 1 includes a laser head portion 2 that emits laser light L and visible laser light M (see FIG. 2) coaxially from an fθ lens 16, and the laser head portion 2 is an upper surface plate portion. It is comprised from the substantially box-shaped processing container 3 fixed on 36A.

  As shown in FIGS. 1 to 3, the laser head unit 2 includes a main body base 5, a laser oscillation unit 6 that emits laser light L, an optical shutter unit 7, an optical damper 8, a half mirror 9, and a guide. The optical unit 11, the reflection mirror 12, the optical sensor 13, the galvano scanner 15, the fθ lens 16, and the like are covered with a substantially rectangular parallelepiped housing cover 17.

  The laser oscillation unit 6 includes a laser oscillator 18, a beam expander 19, and a mounting base 21. The laser oscillator 18 is configured by a CO2 laser, a YAG laser, or the like, and outputs a laser beam L for performing marking (printing) processing on the processing surface 22A of the processing target 22. The beam expander 19 changes (for example, enlarges) the beam diameter of the laser light L, and is provided coaxially with the laser oscillator 18. The mounting base 21 is mounted so that the laser oscillator 18 can adjust the optical axis of the laser beam L, and is fixed to the upper surface on the rear side of the main body base 5 with respect to the center position in the front-rear direction by the mounting screws 23.

  The optical shutter unit 7 includes a shutter motor 25 and a flat shutter 26. The shutter motor 25 is composed of a stepping motor or the like. The shutter 26 is attached to the motor shaft of the shutter motor 25 and rotates coaxially. When the shutter 26 is rotated to a position that blocks the optical path of the laser beam L emitted from the beam expander 19, the shutter 26 reflects the laser beam L to the optical damper 8 provided in the right direction with respect to the optical shutter unit 7. To do. On the other hand, when the shutter 26 is rotated so as not to be positioned on the optical path of the laser light L emitted from the beam expander 19, the laser light L emitted from the beam expander 19 is on the front side of the optical shutter unit 7. The light is incident on the half mirror 9 disposed in the position.

  The optical damper 8 absorbs the laser light L reflected by the shutter 26. The heat generated by the optical damper 8 is thermally conducted to the main body base 5 and cooled by a cooling device (not shown). The half mirror 9 is disposed so as to form an angle of 45 degrees obliquely in the lower left direction with respect to the optical path of the laser light L. The half mirror 9 transmits almost all of the laser light L incident from the rear side. Further, the half mirror 9 reflects a part of the laser beam L incident from the rear side, for example, 1% of the laser beam L to the reflection mirror 12 at a reflection angle of 45 degrees. The reflection mirror 12 is arranged in the left direction with respect to the approximate center position of the rear side surface on which the laser light L of the half mirror 9 is incident.

  The guide light unit 11 includes a visible semiconductor laser 27 that emits visible laser light, for example, red laser light, and a lens group (not shown) that converges the visible laser light M emitted from the visible semiconductor laser 27 into parallel light. Has been. The visible laser beam M has a wavelength different from that of the laser beam L emitted from the laser oscillator 18. The guide light unit 11 is disposed in the right direction with respect to a substantially central position where the laser light L of the half mirror 9 is emitted. As a result, the visible laser beam M is incident at a substantially central position where the laser beam L of the half mirror 9 is emitted at an incident angle of 45 degrees with respect to the front side surface of the half mirror 9, that is, the reflecting surface. Is reflected on the optical path of the laser beam L at a reflection angle of. That is, the visible semiconductor laser 27 emits the visible laser light M onto the optical path of the laser light L.

  Here, the reflectance of the half mirror 9 has wavelength dependency. Specifically, the half mirror 9 is subjected to a surface treatment of a multilayer film structure of a dielectric layer and a metal layer, has a high reflectance with respect to the wavelength of the visible laser light M, and has a wavelength other than that. The light is configured to transmit almost (99%).

  The reflection mirror 12 is disposed so as to form an angle of 45 degrees obliquely in the lower left direction with respect to the front-rear direction parallel to the optical path of the laser light L, and the reflection mirror 12 reflects the laser light L reflected on the rear side surface of the half mirror 9. A part of the light is incident at an incident angle of 45 degrees with respect to a substantially central position of the reflecting surface. The reflection mirror 12 reflects the laser beam L incident on the reflection surface at an incident angle of 45 degrees toward the front side at a reflection angle of 45 degrees.

  The optical sensor 13 is configured by a photodetector or the like that detects the light emission intensity of the laser light L, and is disposed in the front direction in FIG. 2 with respect to a substantially central position where the laser light L of the reflection mirror 12 is reflected. As a result, the optical sensor 13 receives the laser beam L reflected by the reflection mirror 12 and detects the emission intensity of the incident laser beam L. Accordingly, it is possible to detect the emission intensity of the laser light L output from the laser oscillator 18 via the optical sensor 13.

  The galvano scanner 15 is attached to the upper side of the through hole 28 formed at the front end of the main body base 5, and the laser beam L emitted from the laser oscillation unit 6 and the visible laser beam M reflected by the half mirror 9 Is two-dimensionally scanned downward.

  The galvano scanner 15 includes a galvano X-axis motor 31 and a galvano Y-axis motor 32 that are fitted into the respective mounting holes 33 from the outside so that the respective motor shafts are orthogonal to each other. Scanning mirrors attached to the tip end face each other inside. Then, the laser light L and the visible laser light M are two-dimensionally scanned downward by controlling the rotation of the motors 31 and 32 and rotating the scanning mirrors. The two-dimensional scanning direction is a front-rear direction (X direction) and a left-right direction (Y direction).

  As shown in FIG. 3, the fθ lens 16 concentrically condenses the laser beam L and the visible laser beam M, which are two-dimensionally scanned by the galvano scanner 15, on the processing surface 22 </ b> A of the processing target 22 disposed below. . Therefore, by controlling the rotation of the motors 31 and 32, the laser light L and the visible laser light M are formed in a desired print pattern on the processing surface 22A of the processing target 22 in the front-rear direction (X direction) and the left-right direction. Two-dimensional scanning is performed in the (Y direction).

  Next, a schematic configuration of the processing container 3 will be described with reference to FIGS. 4 to 7. As shown in FIGS. 4 to 7, the processing container 3 includes a substantially box-shaped main body box portion 36 whose front side is open, each door 3 </ b> A with double doors covering the front side of the main body box portion 36, and a processing object. 22 includes a processing table 37 on which 22 is disposed. The main body box portion 36 and each door 3A are formed of a material such as iron or stainless steel that shields the laser light L reflected on the workpiece 22.

  The main body box portion 36 includes a substantially rectangular upper surface plate portion 36A that forms the ceiling portion 40, a rectangular rear surface plate portion 36B that forms the back side wall surface portion, and rectangular side surface plate portions that form the left and right side wall portions. 36C and a bottom frame portion 36D which is formed in a square frame shape and has a predetermined length, for example, a length of about 30 cm, and protrudes forward from each side plate portion 36C. Therefore, an opening 36E having a predetermined length from the front surface side of the main body box portion 36D of the bottom surface portion 36D, for example, a length of about 30 cm, and an upper side opened from a portion protruding forward is formed.

  The main body box portion 36 has leg members 38 fixed at four corners (three places are shown in FIG. 4) of the bottom surface portion 36D, and the laser processing apparatus 1 attaches these leg members 38 to each other. It is arranged on the floor or the like. In addition, a holding member 39 that is open in a horizontally long rectangle and is recessed inward is fitted into the upper end portion of both side surface plate portions 36 </ b> C at a substantially central portion in the front-rear direction. Therefore, the user can carry the processing container 3 with the holding members 39.

  Each door 3 </ b> A covering the opening 36 </ b> E is configured with double doors. Specifically, each door 3 </ b> A is composed of vertically rectangular front plates 41 </ b> A and 41 </ b> B, vertically rectangular adjacent side plates 42, and horizontally rectangular adjacent upper surface plates 43 </ b> A and 43 </ b> B. Each of the front plates 41A and 41B has a width dimension that is about a half of the length in the left-right direction of the top plate portion 36A in a front view, and is formed in a vertical dimension that is substantially equal to the vertical length of the side plate portion 36C. Yes. Each adjacent side plate 42 has a width dimension substantially equal to the protruding length protruding forward from the side plate part 36C of the bottom surface part 36D and a vertical dimension substantially equal to the vertical length of the side plate part 36C. Has been.

  Each adjacent upper surface plate 43A, 43B has a width dimension in the left-right direction that is about ½ of the length in the left-right direction of the upper surface plate portion 36A in plan view, and protrudes forward from the side surface plate portion 36C of the bottom surface portion 36D. It is formed in a longitudinal dimension substantially equal to the length. The rear side edge portions of the adjacent upper surface plates 43A and 43B are separated from the front side edge portion of the upper surface plate portion 36A. And the side edge part of the left-right direction outer side of each front board 41A and 41B and the side edge part of the front side of each adjacent side board 42 are being fixed by welding etc.

  The upper side edge of each front plate 41A, 41B and the front side edge of each adjacent upper surface plate 43A, 43B are fixed by welding or the like, and the upper side edge of each adjacent side plate 42 The side edges of the face plates 43A and 43B on the outer side in the left-right direction are fixed by welding or the like. Therefore, the back plate portion 36B, each side plate portion 36C, each adjacent side plate 42, and each front plate 41A, 41B are fθ so as to surround the laser light L and visible laser light M emitted from the fθ lens 16. Along the emission direction of the lens 16, they intersect each other.

  And a user contact | abuts the lower end edge part of each front plate 41A, 41B of each door 3A to the upper side of the front side protruding edge part of bottom face part 36D, and the side edge part of each adjacent upper surface board 43A, 43B rear side. Is brought into contact with the front side edge portion of the upper surface plate portion 36A, and the rear side edge portion of each adjacent side plate 42 is brought into contact with the front side edge portion of each side plate portion 36C. Then, in this state, the user attaches a pair of upper and lower hinges 45 with screws or the like between the opposing side edges of the adjacent side plate 42 of each door 3A and each side plate 36C of the main body box 36. Install.

  As a result, each door 3A covers the opening 36E in a bilaterally symmetrical manner, and via each hinge 45, the side edge portion on the rear side of the adjacent side plate 42 is used as a rotation axis to the outside in the left-right direction (FIG. 6). Middle, in the direction of arrows 46A and 46B.) Attached to a double door that rotates about 180 degrees in the central angle. Therefore, as shown in FIGS. 6 and 7, each door 3 </ b> A is configured to be able to open both sides outward in the left-right direction until the outer surface of the adjacent side plate 42 faces in the vicinity of the side plate portion 36 </ b> C. That is, each front plate 41A, 41B and each adjacent upper surface plate 43A, 43B of each door 3A are connected to each front plate from the optical axis 16A of the fθ lens 16 via each hinge 45 as shown in FIGS. It divides along the perpendicular extended to 41A and 41B, and it is comprised so that it may become double opening.

  Also, as shown in FIGS. 4 to 9, the center in the left-right direction of the front side edge of the upper surface plate portion 36A of the main body box portion 36, and the rear inward in the left-right direction of each adjacent upper surface plate 43A, 43B of each door 3A At the side corners, arc-shaped cutouts 47A, 47B, 47C are formed with the radius of curvature of the outer peripheral surface of the fθ lens 16, respectively.

  As shown in FIGS. 4 and 5, when each door 3A is closed, the central portion in the left-right direction of the front side edge of the upper surface plate portion 36A of the main body box portion 36 and each adjacent top of each door 3A. A substantially circular through hole 47 into which the fθ lens 16 of the laser head unit 2 is fitted is formed by the notches 47A to 47C formed at the rear corners of the face plates 43A and 43B in the left-right direction. The through-hole 47 is not limited to a circular shape, and may be formed in a polygonal shape such as a quadrangle, a pentagon, or a hexagon, or another shape such as a rhombus, an ellipse, or a trapezoid as long as the fθ lens 16 can be inserted. Also good.

  Here, as shown in FIG. 5, the center 48 of the substantially circular through-hole 47 is located on the front side of the upper side plate portion 36A of the main body box portion 36, that is, on the front plate 41A, 41B side. And a predetermined distance D1, for example, a position separated by a distance D1 of about 3 cm. Therefore, as shown in FIG. 9, the optical axis 16A of the fθ lens 16 fitted in the through hole 47 passes through the center 48 of the substantially circular through hole 47 or a position near the center 48, so that the upper surface plate portion 36A and the front side edge part of the side plate part 36C are located on the front side by a predetermined distance D1.

  Further, as shown in FIGS. 5 to 7, a substantially U-shaped handle 51 is attached to the front upper end of the side edge on the inner side in the left-right direction of each of the front plates 41A and 41B. A pair of quadrangular through holes 52 are formed adjacent to each other below the handle 51 of each front plate 41A, 41B. Each pair of through-holes 52 is closed on the inner side, that is, the rear side in FIG. 4, by a transparent plate 53 that is formed of a transparent glass or acrylic plate and transmits visible light.

  Furthermore, each of the transmission plates 53 shields the laser light L emitted from the laser oscillator 18 and reflected on the processing surface 22A of the workpiece 22 and shields the visible light from the light shielding film 55 (for example, “YLC-1” (manufactured by Sigma Koki Co., Ltd.) is pasted over the entire surface. And each front board 41A, 41B is attached to the front lower end part of the side edge on the inner side in the left-right direction, and a slide stopper 56 is attached to the front board 41A, 41B by sliding the slide lever 56A left and right. It is configured to be closed and locked. The slide lever 56A is always urged to slide rightward by a spring (not shown) attached to the slide stopper 56.

  As shown in FIGS. 6 and 7, a rectangular frame-like bottom plate 58 </ b> D of the main body box 36 has a horizontally long bottom plate 58 that protrudes forward from the side plate 36 </ b> C. Is mounted so as to cover the entire width in the left-right direction from the position in the vicinity of the portion to the position slightly behind the front side edge of the side plate portion 36C. Further, the bottom plate 58 is provided with a processing table 37 on which the processing object 22 is arranged at a portion facing the through hole 47 formed when each door 3A is closed.

  The processing table 37 is horizontally disposed so as to face the through hole 47 of the bottom plate 58, and is placed on the left side of the mounting plate 59 and a mounting plate 59 having a rectangular shape in plan view on which the workpiece 22 is mounted. And a slide rail 61 that supports the mounting plate 59 so as to be slidable in the vertical direction. Further, the slide rail 61 is provided with a fixing screw 61A on the front side surface portion for fixing the mounting plate 59 at a desired height after sliding the mounting plate 59 in the vertical direction.

Next, the alignment of the irradiation position of the visible laser beam M on the workpiece 22 arranged on the processing table 37 of the laser processing apparatus 1 configured as described above will be described with reference to FIGS. 2, 3, 8, and 9. This will be explained based on.
As shown in FIGS. 2, 3, 8, and 9, first, the visible semiconductor laser of the guide light unit 11 is stopped in a state where the laser light L emitted from the laser oscillator 18 is stopped via a controller (not shown). 27 is driven to emit visible laser light M. Then, the motors 31 and 32 of the galvano scanner 15 are rotationally controlled to stop at predetermined positions, and the visible laser light M is emitted onto the optical axis 16A of the fθ lens 16.

  On the other hand, the user moves the slide lever 56A of the slide stopper 56 of the processing container 3 to the left side to release the locking, and rotates each door 3A outward in the left-right direction so that the outer side surface of the adjacent side plate 42 is moved. In the vicinity of the side plate portion 36C. As a result, as shown in FIGS. 8 and 9, the front plates 41 </ b> A and 41 </ b> B approach each other from the perpendicular 63 extending from the optical axis 16 </ b> A to each adjacent side plate 42 covered with the adjacent side plate 42 of each door 3 </ b> A. The side surface portion of the processing container 3 including the adjacent side surface portion 62 that is oriented is opened. Moreover, the front part of the processing container 3 covered with each front plate 41A, 41B of each door 3A is opened.

  Therefore, the user visually recognizes the irradiation position of the visible laser beam M emitted onto the workpiece 22 along the optical axis 16A of the fθ lens 16 from the left and right directions and from the front, that is, from two orthogonal axis directions, The position of the processing object 22 on the mounting plate 59 of the processing table 37 can be adjusted. Then, after closing each door 3A and locking the slide stopper 56, the driving of the visible semiconductor laser 27 is stopped and the laser beam L is emitted from the laser oscillator 18 via a controller (not shown). Then, by controlling the rotation of the motors 31 and 32 of the galvano scanner 15 via a controller (not shown), it is possible to perform marking (printing) processing of a predetermined pattern on the processing surface 22A of the processing target 22.

  As described above in detail, in the laser processing apparatus 1 according to the first embodiment, the user releases the slide stoppers 56 and rotates the doors 3A outward in the left-right direction so that the outside of the adjacent side plates 42 is removed. The side surface is brought into contact with the side plate portion 36C. The visible semiconductor laser 27 is driven via a controller (not shown), and the motors 31 and 32 of the galvano scanner 15 are rotationally controlled to emit the visible laser light M onto the optical axis 16A of the fθ lens 16. .

  As a result, the user can visually recognize the irradiation position of the visible laser beam M emitted on the workpiece 22 arranged on the mounting plate 59 of the processing table 37 from the left and right directions and from the front, that is, from two orthogonal axes. Thus, the processing object 22 can be quickly positioned on the mounting plate 59. As a result, since the laser beam L and the visible laser beam M are emitted coaxially from the fθ lens 16, the user quickly aligns the processing target 22 on the mounting plate 59 with respect to the irradiation position of the laser beam L. Can be done.

  Further, by closing the doors 3A and locking the slide stoppers 56, the laser beams L reflected on the workpiece 22 are reflected on the front plates 41A and 41B, the adjacent side plates 42, and the adjacent upper surface plates. The light can be shielded by 43A and 43B, and the user can safely perform the work. Even if a camera or the like is not installed, the irradiation position of the visible laser beam M on the workpiece 22 placed on the processing table 37 can be visually adjusted with a simple configuration, and the processing container 3 can be downsized. Can be planned. Furthermore, since each door 3A is configured with double doors, it becomes possible to narrow the space around the front side of the processing container 3 necessary for opening each door 3A. The required space can be saved.

[Second Embodiment]
Next, a laser processing apparatus 71 according to the second embodiment will be described with reference to FIGS. 2, 3, 10 to 12. In the following description, the same reference numerals as those of the laser processing apparatus 1 according to the first embodiment in FIGS. 1 to 9 denote the same or corresponding parts as those of the laser processing apparatus 1 according to the first embodiment. It is shown.

  The schematic configuration of the laser processing apparatus 71 according to the second embodiment is substantially the same as that of the laser processing apparatus 1 according to the first embodiment. However, the difference is that a processing container 72 is provided instead of the processing container 3.

  As shown in FIGS. 10 to 12, the processing container 72 has a processing box on which a substantially box-shaped main body box part 73 whose front side is open, a sliding door 75 that slides in the vertical direction, and the processing object 22 is arranged. 37 or the like. The main body box 73 and the slide door 75 are formed of a material such as iron or stainless steel that shields the laser light L reflected on the workpiece 22.

  The main body box 73 has substantially the same configuration as the main body box 36 of the processing container 3. However, the front side edge portion of the upper surface plate portion 73A extends horizontally to the front side of the front end portion of the laser head portion 2, and corresponds to the adjacent upper surface plates 43A and 43B of the doors 3A of the first embodiment. The part is formed continuously. The upper surface plate portion 73A is formed with a substantially circular through hole 47 into which the fθ lens 16 is inserted and inserted at a position corresponding to the fθ lens 16 of the laser head portion 2 fixed on the upper surface plate portion 73A.

  As shown in FIG. 11, the center 48 of the through hole 47 is a predetermined distance D1, for example, a distance of about 3 cm, from the front side edge of each side plate 36C to the front side, that is, to the slide door 75 side. It is provided at a position away from D1. Therefore, as shown in FIG. 11, the optical axis 16A of the fθ lens 16 fitted in the through hole 47 passes through the center 48 of the substantially circular through hole 47 or a position near the center 48, so that the side plate portion It is located on the front side by a predetermined distance D1 from the front side edge of 36C.

  A slide rail 76 is provided at the front side edge of each side plate 36C to support the slide door 75 so as to be slidable in the vertical direction, that is, along the direction of the optical axis 16A. In addition, a gripping member 39 that is opened in a horizontally long rectangle and recessed inward is fitted into the side plate portions 36C. Therefore, the user can carry the processing container 72 with the gripping member 39. A slide lever 77 is provided at the front corner of the upper end portion of the left side plate portion 36C so as to be able to advance and retreat in the front-rear direction, and is urged forward by a spring (not shown).

  The slide lever 77 is configured such that when the slide door 75 moves to the uppermost side, the shaft portion 77A protrudes in the front direction and comes into contact with the lower end portion of the adjacent side plate 78 on the left side of the slide door 75. ing. Further, when the slide door 75 moves to the uppermost side and the lower end portion is supported by the shaft portion 77 </ b> A of the slide lever 77, an opening 73 </ b> E is formed in the front surface portion of the processing container 72. Further, the slide door 75 is configured to be slidable downward by pushing the slide lever 77 rearward to house the shaft portion 77A inside.

  The sliding door 75 that covers the opening 73E includes a rectangular front plate 79 that covers the front of the opening 73E, a pair of vertically adjacent side plates 78 that cover the left and right of the opening 73E, and an upper edge of the front plate 79. It is comprised from the adjacent upper surface board 81 fixed to. The front plate 79 has a width dimension substantially equal to the length in the left-right direction of the upper surface plate portion 73A and a vertical dimension substantially equal to the length in the vertical direction of the side plate portion 36C. Each adjacent side plate 78 has a width dimension substantially equal to a protruding length protruding forward from the side plate part 36C of the bottom surface part 36D, and a vertical dimension substantially equal to the vertical length of the side plate part 36C. Has been.

  Further, the adjacent upper surface plate 81 has a length substantially equal to the distance from the front side edge of the upper surface plate portion 73A to the front plate 79 in a plan view and is substantially equal to the length in the left-right direction of the upper surface plate portion 73A. Is formed. The left and right side edges of the front plate 79 and the front side edges of the adjacent side plates 78 are fixed by welding or the like. The upper side edge of the front plate 79 and the front side edge of the adjacent upper surface plate 81 are fixed by welding or the like, and the front end of the upper side edge of each adjacent side plate 78 and the adjacent upper surface plate 81. The side edges in the left and right direction are fixed by welding or the like. Therefore, the slide door 75 is constituted by the front plate 79, each adjacent side plate 78, and the adjacent upper surface plate 81.

  A slide rail 76 provided at the front side edge of each side plate 36C is provided on the side edge on the side opposite to the front plate 79 of each adjacent side plate 78, that is, on the side edge on the side plate 36C side. A slide engagement portion 82 that engages with each other is formed over substantially the entire length. Further, three through holes 83 are formed adjacent to each other at the center portion of the front plate 79 so as to be arranged in two right and left rows. Each through-hole 83 is formed of a transparent glass, an acrylic plate, or the like, and is closed on the inner side, that is, the rear side in FIG. 11, by a single transmission plate 84 that transmits visible light. Further, a light shielding film 55 that shields the laser light L emitted from the laser oscillator 18 and reflected on the processing surface of the processing target 22 and transmits visible light over the entire surface of the transmission plate 84. It is pasted.

Next, the alignment of the irradiation position of the visible laser beam M on the workpiece 22 arranged on the processing table 37 of the laser processing apparatus 71 configured as described above will be described with reference to FIGS. 2, 3, 10 to 12. This will be explained based on.
As shown in FIG. 2, FIG. 3, and FIG. 10 to FIG. 12, first, the visible semiconductor laser 27 of the guide light unit 11 is driven by a visible laser by stopping the laser light L via a controller (not shown). Light M is emitted. Then, the motors 31 and 32 of the galvano scanner 15 are rotationally controlled to stop at predetermined positions, and the visible laser light M is emitted onto the optical axis 16A of the fθ lens 16.

  On the other hand, the user moves the slide door 75 to the uppermost side, causes the shaft portion 77 </ b> A of the slide lever 77 to protrude in the front direction, and contacts the lower end portion of the adjacent side plate 78 on the left side of the slide door 75. Accordingly, as shown in FIGS. 10 and 11, in a direction approaching the front plate 79 from the vertical line 86 that is covered with each adjacent side plate 78 of the slide door 75 and extends from the optical axis 16 </ b> A to each adjacent side plate 42. The left and right side portions of the processing container 72 including the adjacent side surface portion 85 are opened. Further, the front portion of the processing container 72 covered with the front plate 79 of the slide door 75 is opened.

  Therefore, the user visually recognizes the irradiation position of the visible laser beam M emitted onto the workpiece 22 along the optical axis 16A of the fθ lens 16 from the left and right directions and from the front, that is, from two orthogonal axis directions, The position of the processing object 22 on the mounting plate 59 of the processing table 37 can be adjusted. Thereafter, the user pushes the slide lever 77 in the rearward direction to house the shaft portion 77A inside, thereby sliding the slide door 75 downward and bringing it into contact with the bottom surface portion 36D to close the opening 73E. .

  Subsequently, the driving of the visible semiconductor laser 27 is stopped and a laser beam L is emitted from the laser oscillator 18 via a controller (not shown). Then, by controlling the rotation of the motors 31 and 32 of the galvano scanner 15 via a controller (not shown), it is possible to perform marking (printing) processing of a predetermined pattern on the processing surface 22A of the processing target 22.

  As described above in detail, in the laser processing apparatus 71 according to the second embodiment, the user moves the slide door 75 to the uppermost side to project the shaft portion 77A of the slide lever 77 in the front direction, thereby sliding the slide door 75. Is brought into contact with the lower end of the adjacent side plate 78 on the left side and stopped. The visible semiconductor laser 27 is driven via a controller (not shown), and the motors 31 and 32 of the galvano scanner 15 are rotationally controlled to emit the visible laser light M onto the optical axis 16A of the fθ lens 16. .

  As a result, the user can visually recognize the irradiation position of the visible laser beam M emitted on the workpiece 22 arranged on the mounting plate 59 of the processing table 37 from the left and right directions and from the front, that is, from two orthogonal axes. Thus, the processing object 22 can be quickly positioned on the mounting plate 59. As a result, since the laser beam L and the visible laser beam M are emitted coaxially from the fθ lens 16, the user quickly aligns the processing target 22 on the mounting plate 59 with respect to the irradiation position of the laser beam L. Can be done.

  Further, the user pushes the slide lever 77 in the rearward direction and stores the shaft portion 77A inside, thereby moving the slide door 75 downward and contacting the bottom surface portion 36D to close the opening 73E. Thereby, the laser beam L reflected on the workpiece 22 can be shielded by the front plate 79, the adjacent side plates 78, and the adjacent upper surface plate 81, and the user can safely perform the work. Even if a camera or the like is not installed, the irradiation position of the visible laser beam M on the workpiece 22 arranged on the processing table 37 can be visually adjusted with a simple configuration, and the processing container 72 can be downsized. Can be planned.

  Further, the sliding door 75 can be slid in the vertical direction, that is, in the direction of the optical axis 16 </ b> A and stopped at the uppermost position, and the front side and the left and right peripheral parts of the processing container 72 necessary for opening the sliding door 75. The space required for installing the processing container 72 can be saved.

[Third Embodiment]
Next, a laser processing apparatus 91 according to the third embodiment will be described with reference to FIGS. 2, 3, 13, and 14. In the following description, the same reference numerals as those of the laser processing apparatus 1 according to the first embodiment in FIGS. 1 to 9 denote the same or corresponding parts as those of the laser processing apparatus 1 according to the first embodiment. It is shown.

The schematic configuration of the laser processing apparatus 91 according to the third embodiment is substantially the same as the configuration of the laser processing apparatus 1 according to the first embodiment. However, the difference is that a processing container 92 is provided instead of the processing container 3.
As shown in FIGS. 13 and 14, the processing container 92 has substantially the same configuration as the processing container 3, but a removable cover that covers the opening 36 </ b> E on the front side of the main body box 36 instead of each door 3 </ b> A. The difference is that the member 93 is provided. The cover member 93 is formed of a material such as iron or stainless steel that shields the laser light L reflected on the workpiece 22.

  The cover member 93 includes a rectangular front plate 95 that covers the front of the opening 36E, a pair of adjacent rectangular side plates 96 that cover the left and right of the opening 36E, and a substantially horizontally long rectangle that covers the ceiling 102 of the opening 36E. And the adjacent upper surface plate 97. The front plate 95 is formed with a width dimension substantially equal to the length in the left-right direction of the upper surface plate portion 36A in a front view and a vertical dimension substantially equal to the length in the vertical direction of the side plate portion 36C. Each adjacent side plate 96 has substantially the same shape as the adjacent side plate 42 of the first embodiment, and has a width dimension substantially equal to the protruding length protruding forward from the side plate portion 36C of the bottom surface portion 36D. The vertical dimension of the portion 36C is approximately equal to the vertical length. The rear side edge 96A of each adjacent side plate 96 is separated from the front side edge of each side plate 36C.

  Further, the adjacent upper surface plate 97 has a width dimension substantially equal to the length in the left-right direction of the upper surface plate portion 36A in a plan view, and a longitudinal length in the front-rear direction substantially equal to the protruding length protruding forward from the side surface plate portion 36C of the bottom surface portion 36D. Dimension is formed. The rear side edge portion 97B of the adjacent upper surface plate 97 is separated from the front side edge portion of the upper surface plate portion 36A. An arc-shaped notch formed at the center in the left-right direction of the front side edge of the upper surface plate portion 36A is provided at the center in the left-right direction of the rear side edge portion 97B facing the upper surface plate portion 36A of the adjacent upper surface plate 97. Along with the portion 47A (see FIG. 6), an arcuate notch 97A that forms a through hole 47 (see FIG. 4) having a diameter on the outer peripheral surface of the fθ lens 16 is formed.

  And each side edge part of the left-right direction of the front board 95 and the side edge part of the front side of the adjacent side board 96 are being fixed by welding. Further, the upper side edge of the front plate 95 and the front side edge of the adjacent upper surface plate 97 are fixed by welding or the like, and the upper side edge of each adjacent side surface plate 96 and the left and right direction of the adjacent upper surface plate 97 are fixed. Each side edge is fixed by welding or the like.

  Further, three through holes 95A are formed adjacent to each other at the center of the front plate 95 so as to be arranged in two rows on the left and right. Each through hole 95 </ b> A is closed on the inner side, that is, the rear side in FIG. 14, by a single transmission plate 94 that is formed of a transparent glass or acrylic plate and transmits visible light. Furthermore, a light-shielding film 55 that shields the laser light L emitted from the laser oscillator 18 and reflected on the processing surface of the workpiece 22 and transmits visible light over the entire surface of the transmission plate 94. It is pasted.

  On the other hand, the main body box 36 has a predetermined height, for example, a height of about 1 cm, from the inner side to the front side over the entire length at each front side edge of the top plate 36A and each side plate 36C. Protruding ribs 98A, 98B, and 98C that protrude in the above are formed. Further, a U-shaped upper surface portion of the bottom surface portion 36D protruding forward from the side surface plate portion 36C has a predetermined height, for example, a height of about 1 cm, from the inner surface to the upper side over the entire length. A protruding rib 98D is formed to protrude. Further, at the base end portions of the protruding ribs 98A to 98D, step portions 99A and 99B having a width substantially equal to the plate thickness of the front plate 95, the adjacent side plates 96, and the adjacent upper surface plate 97 forming the cover member 93, 99C and 99D are formed.

  Accordingly, the user lifts the cover member 93 and the protruding ribs 98D formed on the left and right side edge portions of the portion of the bottom surface portion 36D that protrudes forward from the lower rear corner portion of the left and right adjacent side plates 96. Is inserted from above and engaged, and brought into contact with the stepped portion 99D. Subsequently, in this state, the user pushes the cover member 93 rearward and slides it on the stepped portion 99D in the rearward direction along the protruding rib 98D. Then, the user inserts and engages the rear side edge portions 97B and 96A of the adjacent upper surface plate 97 and the adjacent side surface plates 96 with the projecting ribs 98A, 98B, and 98C, and each step portion 99A, 99B, It is made to contact 99C. Accordingly, the rear side edge portions 97B and 96A of the adjacent upper surface plate 97 and the adjacent side surface plates 96 function as an example of an engaging portion. Moreover, each protrusion rib 98A-98C functions as an example of an engaged part.

  Accordingly, the cover member 93 is detachably attached to the main body box portion 36, and the opening 36 </ b> E of the main body box portion 36 is closed by the cover member 93. Further, the notch 97A of the adjacent upper surface plate 97 and the notch 47A of the upper surface plate portion 36A are connected to form a through hole 47 into which the fθ lens 16 is inserted.

  Here, the center 48 of the substantially circular through-hole 47 has a predetermined distance D1, for example, about 3 cm, from the front side edge of the upper surface plate portion 36A of the main body box portion 36 to the front side, that is, the front plate 95 side. It is provided at a position separated by a distance D1. Therefore, as shown in FIG. 14, the optical axis 16A of the fθ lens 16 in contact with the notch 47A that forms the through hole 47 is the center 48 (see FIG. 5) of the substantially circular through hole 47 or the center. Since it passes through a position near 48, it is located on the front side by a predetermined distance D1 with respect to the front side edge portions of the top plate portion 36A and the side plate portion 36C.

Next, the alignment of the irradiation position of the visible laser beam M on the workpiece 22 arranged on the processing table 37 of the laser processing apparatus 91 configured as described above will be described with reference to FIGS. 2, 3, 13, and 14. This will be explained based on.
As shown in FIGS. 2, 3, 13, and 14, first, the visible semiconductor laser 27 of the guide light unit 11 is driven via the controller (not shown) and the visible semiconductor laser 27 of the guide light unit 11 is driven. Light M is emitted. Then, the motors 31 and 32 of the galvano scanner 15 are rotationally controlled to stop at predetermined positions, and the visible laser light M is emitted onto the optical axis 16A of the fθ lens 16.

  On the other hand, the user pulls out the cover member 93 covering the front side of the main body box portion 36 from the main body box portion 36 to the front side, and the rear side edge portions 97B and 96A of the adjacent upper surface plate 97 and the adjacent side surface plates 96, respectively. The engagement with the projecting ribs 98A, 98B, 98C is released, and the cover member 93 is removed from the main body box 36. As a result, as shown in FIGS. 13 and 14, the adjacent side surface portion 101 that is covered with the cover member 93 and is in a direction approaching the front plate 95 from the perpendicular line 103 extending from the optical axis 16 </ b> A to each adjacent side surface plate 96. The left and right side portions of the processing container 92 including the opening are opened. Further, the front portion of the processing container 92 covered with the front plate 95 of the cover member 93 is opened.

  Therefore, the user visually recognizes the irradiation position of the visible laser beam M emitted onto the workpiece 22 along the optical axis 16A of the fθ lens 16 from the left and right directions and from the front, that is, from two orthogonal axis directions, The position of the processing object 22 on the mounting plate 59 of the processing table 37 can be adjusted. Thereafter, the user lifts the cover member 93 and again closes the opening 36 </ b> E of the main body box 36 with the cover member 93.

  Then, the driving of the visible semiconductor laser 27 is stopped and a laser beam L is emitted from the laser oscillator 18 via a controller (not shown). Then, by controlling the rotation of the motors 31 and 32 of the galvano scanner 15 via a controller (not shown), it is possible to perform marking (printing) processing of a predetermined pattern on the processing surface 22A of the processing target 22.

  As described above in detail, in the laser processing apparatus 91 according to the third embodiment, the user pulls the cover member 93 that covers the front side of the main body box portion 36 from the main body box portion 36 to the front side, and from the main body box portion 36. Remove. The visible semiconductor laser 27 is driven via a controller (not shown), and the motors 31 and 32 of the galvano scanner 15 are rotationally controlled to emit the visible laser light M onto the optical axis 16A of the fθ lens 16. .

  As a result, the user can visually recognize the irradiation position of the visible laser beam M emitted on the workpiece 22 arranged on the mounting plate 59 of the processing table 37 from the left and right directions and from the front, that is, from two orthogonal axes. Thus, the processing object 22 can be quickly positioned on the mounting plate 59. As a result, since the laser beam L and the visible laser beam M are emitted coaxially from the fθ lens 16, the user quickly aligns the processing target 22 on the mounting plate 59 with respect to the irradiation position of the laser beam L. Can be done.

  Further, the user lifts the cover member 93, and the protruding ribs 98D formed on the left and right side edge portions of the portion protruding forward from the side surface plate portion 36C of the bottom surface portion 36D with the lower rear corner portion of the left and right adjacent side surface plates 96. And is brought into contact with the stepped portion 99D. Then, in this state, the user pushes the cover member 93 rearward and slides it on the stepped portion 99D along the protruding rib 98D in the rearward direction, thereby closing the opening 36E of the main body box portion 36.

  Thereby, the laser beam L reflected on the workpiece 22 can be shielded by the cover member 93, and the user can safely perform the work. Even without installing a camera or the like, the irradiation position of the visible laser light M on the workpiece 22 placed on the processing table 37 can be visually adjusted with a simple configuration, and the processing container 92 can be downsized. Can be planned.

[Fourth Embodiment]
Next, a laser processing apparatus 111 according to the fourth embodiment will be described with reference to FIGS. 3, 15, and 16. In the following description, the same reference numerals as those of the laser processing apparatus 1 according to the first embodiment shown in FIGS. 1 to 9 and the laser processing apparatus 91 according to the third embodiment shown in FIGS. This is the same as or equivalent to the configuration of the laser processing apparatus 1 according to the first embodiment and the laser processing apparatus 91 according to the third embodiment.

The schematic configuration of the laser processing apparatus 111 according to the fourth embodiment is substantially the same as that of the laser processing apparatus 1 according to the third embodiment. However, the difference is that a processing container 112 is provided instead of the processing container 92.
As shown in FIGS. 15 and 16, the processing container 112 is substantially the same as the processing container 92, but a cover member 113 that covers the opening 36 </ b> E on the front side of the main body box 36 is provided in place of the cover member 93. Is different. The cover member 113 is formed of a material such as iron or stainless steel that shields the laser light L reflected on the workpiece 22.

  Similarly to the cover member 93, the cover member 113 includes a rectangular front plate 95 that covers the front surface of the opening 36E, a pair of vertically adjacent side plates 96 that cover the left and right of the opening 36E, and a ceiling portion of the opening 36E. And an adjacent upper surface plate 97 having a substantially horizontally long rectangular shape. However, the side edges in the left-right direction of the adjacent upper surface plate 97 and the upper side edge of each adjacent side plate 96 are fixed by welding or the like so as to form a right angle, and further, the front side of the right adjacent side plate 96 The right edge of the front plate 95 is attached to the side edge so as to be rotatable outward by a pair of upper and lower hinges 114.

  Accordingly, the front plate 95 is supported via a pair of upper and lower hinges 114 so as to be rotatable outwardly with the right side edge portion as a rotation axis. A magnet 115 is attached to the inner upper end of the front side edge of the left adjacent side plate 96. On the other hand, the inner upper end of the left side edge of the front plate 95 is formed of a ferromagnetic material such as iron that is attracted to the magnet 115 at a portion facing the magnet 115 when the front plate 95 is closed. A flat suction plate 116 is attached so that the front plate 95 can be kept closed. A vertically U-shaped handle 117 is attached to the outside at the center in the vertical direction of the left side edge of the front plate 95.

  The cover member 113 is attached to the main body box portion 36 by first forming the lower rear corners of the left and right adjacent side plates 96 at the left and right side edge portions of the portion protruding forward from the side plate portions 36C of the bottom surface portion 36D. The protruding rib 98D is inserted and engaged from above, and is brought into contact with the stepped portion 99D. Then, the cover member 113 is pushed rearward and slid in the rearward direction along the projecting rib 98D on the stepped portion 99D, and the rear side edge 97B of each of the adjacent upper surface plate 97 and each adjacent side surface plate 96, 96A is made to contact | abut to the front side edge part of 36 A of upper surface board parts, and each side board part 36C.

  Thereafter, the front and rear edge portions of the pair of upper and lower flat plates 118 are respectively disposed between the side edge portions of the cover member 113 adjacent to the left and right side plate 96 and the left and right side plate portions 36C of the main body box 36. Install and connect by screwing. As a result, the cover member 113 is attached to the main body box portion 36, and the opening 36 </ b> E of the main body box portion 36 is closed by the cover member 113. Further, the notch 97A of the adjacent upper surface plate 97 and the notch 47A of the upper surface plate portion 36A are connected to form a through hole 47 into which the fθ lens 16 is inserted.

  Here, the center 48 of the substantially circular through-hole 47 has a predetermined distance D1, for example, about 3 cm, from the front side edge of the upper surface plate portion 36A of the main body box portion 36 to the front side, that is, the front plate 95 side. It is provided at a position separated by a distance D1. Accordingly, as shown in FIG. 16, the optical axis 16A of the fθ lens 16 in contact with the notch 47A that forms the through hole 47 is the center 48 (see FIG. 5) of the substantially circular through hole 47, or the center Since it passes through a position near 48, it is located on the front side by a predetermined distance D1 with respect to the front side edge portions of the top plate portion 36A and the side plate portion 36C.

  Further, the processing object 22 arranged on the mounting plate 59 of the processing table 37 is visible slightly above the central portion in the vertical direction of the left side plate 96 on the left side, and the left side from the optical axis 16A. A rectangular through-hole 121 is formed so as to include a position through which the perpendicular 119 extended to the adjacent side plate 96 passes. The through-hole 121 is closed on the inside by a single transmission plate 122 that is formed of a transparent glass or acrylic plate and transmits visible light. Further, a light shielding film 55 that shields the laser beam L emitted from the laser oscillator 18 and reflected on the processing surface of the processing target 22 and transmits visible light over the entire surface of the transmission plate 122. It is pasted.

Next, the alignment of the irradiation position of the visible laser beam M on the workpiece 22 arranged on the processing table 37 of the laser processing apparatus 111 configured as described above will be described with reference to FIGS. 3, 15, and 16. To do.
As shown in FIGS. 3, 15, and 16, first, the visible semiconductor laser 27 of the guide light unit 11 is driven to emit the visible laser light M through the controller (not shown) while the laser light L is stopped. Exit. Then, the motors 31 and 32 of the galvano scanner 15 are rotationally controlled to stop at predetermined positions, and the visible laser light M is emitted onto the optical axis 16A of the fθ lens 16.

  On the other hand, the user holds the handle 117 of the cover member 113 that covers the front side of the main body box portion 36, rotates the front plate 95 outward in the right direction, and removes the front portion of the processing container 112 covered with the front plate 95. Open. Therefore, the user sets the irradiation position of the visible laser light M emitted onto the workpiece 22 along the optical axis 16A of the fθ lens 16 from the front and the through hole 121 formed in the adjacent side plate 96 on the left side. The workpiece 22 can be aligned on the mounting plate 59 of the processing table 37 from the left side, that is, from the two orthogonal directions.

  Alternatively, a through hole 121 may be formed in the right side plate 96 on the right side, and the light shielding film 55 may be blocked by the transmission plate 122 attached over the entire surface. As a result, the user can change the irradiation position of the visible laser beam M emitted onto the workpiece 22 along the optical axis 16A of the fθ lens 16 from the front and left and right through the through holes 121 provided on the left and right. The object 22 can be positioned on the mounting plate 59 of the processing table 37 by visually recognizing from both sides, that is, from two orthogonal directions.

  Thereafter, the user closes the front plate 95 and again closes the opening 36 </ b> E of the main body box 36 with the cover member 113. Then, the driving of the visible semiconductor laser 27 is stopped and a laser beam L is emitted from the laser oscillator 18 via a controller (not shown). Then, by controlling the rotation of the motors 31 and 32 of the galvano scanner 15 via a controller (not shown), it is possible to perform marking (printing) processing of a predetermined pattern on the processing surface 22A of the processing target 22.

  As described above in detail, in the laser processing apparatus 111 according to the fourth embodiment, the user rotates the front plate 95 of the cover member 113 covering the front side of the main body box portion 36 in the right outer direction, and the front plate 95 The front part of the processing container 112 that has been covered is opened. The visible semiconductor laser 27 is driven via a controller (not shown), and the motors 31 and 32 of the galvano scanner 15 are rotationally controlled to emit the visible laser light M onto the optical axis 16A of the fθ lens 16. .

  Thereby, the user can irradiate the irradiation position of the visible laser beam M emitted on the workpiece 22 arranged on the mounting plate 59 of the processing table 37 from the front and from the left through the through hole 121, that is, It is possible to quickly align the workpiece 22 on the mounting plate 59 by visually recognizing from two axial directions orthogonal to the optical axis 16A. As a result, since the laser beam L and the visible laser beam M are emitted coaxially from the fθ lens 16, the user quickly aligns the processing target 22 on the mounting plate 59 with respect to the irradiation position of the laser beam L. Can be done.

  In addition, the user can shield the laser beam L reflected on the workpiece 22 by the cover member 113 by rotating the front plate 95 of the cover member 113 inward in the left direction and closing the cover plate 113, and the user can Work can be done safely. Even if a camera or the like is not installed, the irradiation position of the visible laser beam M on the workpiece 22 placed on the processing table 37 can be visually adjusted with a simple configuration, and the processing container 112 can be downsized. Can be planned.

  Here, the laser oscillator 18 functions as an example of an oscillator. The visible semiconductor laser 27 functions as an example of a visible laser light source. The fθ lens 16 functions as an example of a light collecting unit. The upper surface plate portion 36A and the adjacent upper surface plates 43A and 43B constitute an example of an upper surface member. The upper surface plate portion 73A and the adjacent upper surface plate 81 constitute an example of an upper surface member. The upper surface plate portion 36A and the adjacent upper surface plate 97 constitute an example of an upper surface member.

  The back plate portion 36B, each side plate portion 36C, each adjacent side plate 42, and each front plate 41A, 41B constitute an example of a side member. The back plate portion 36B, each side plate portion 36C, each adjacent side plate 78, and the front plate 79 constitute an example of a side member. The back plate portion 36B, each side plate portion 36C, each adjacent side plate 96, and the front plate 95 constitute an example of a side member. The hinge 45 and the hinge 114 function as an example of a rotation support part. The slide door 75 functions as an example of a cover member. The slide rail 76 functions as an example of a slide support part.

  In addition, this invention is not limited to the said 1st Embodiment thru | or 4th Embodiment, Of course, various improvement and deformation | transformation are possible within the range which does not deviate from the summary of this invention.

  For example, in the laser processing apparatus 111 of the fourth embodiment, the adjacent upper surface plate 97 and each adjacent side surface plate 96 of the cover member 113 are formed of a transparent plate that is formed of a transparent glass, an acrylic plate, or the like and transmits visible light. You may do it. Then, the laser beam L emitted from the laser oscillator 18 and reflected on the processing surface of the workpiece 22 is shielded and visible on the adjacent upper surface plate 97 and each adjacent side surface plate 96 formed of a transmission plate. A light shielding film 55 that transmits light may be attached over the entire surface. In this case, it is not necessary to form the through hole 121 in the adjacent side plate 96.

  Then, the user rotates the front plate 95 of the cover member 113 covering the front side of the main body box portion 36 outward in the right direction to open the front portion of the processing container 112 covered with the front plate 95. The visible semiconductor laser 27 is driven via a controller (not shown), and the motors 31 and 32 of the galvano scanner 15 are rotationally controlled to emit the visible laser light M onto the optical axis 16A of the fθ lens 16. .

  As a result, the user sets the irradiation position of the visible laser beam M emitted onto the workpiece 22 arranged on the mounting plate 59 of the processing table 37 from the front, the adjacent upper surface plate 97 of the cover member 113 and each adjacent surface. It is possible to quickly align the workpiece 22 on the mounting plate 59 from the left and right directions via the side plate 96, that is, from the biaxial direction orthogonal to the optical axis 16A. As a result, since the laser beam L and the visible laser beam M are emitted coaxially from the fθ lens 16, the user quickly aligns the processing target 22 on the mounting plate 59 with respect to the irradiation position of the laser beam L. Can be done.

DESCRIPTION OF SYMBOLS 1, 71, 91, 111 Laser processing apparatus 2 Laser head part 3, 72, 92, 112 Processing container 3A Door 6 Laser oscillator 16 f (theta) lens 16A Optical axis 22 Processing object 27 Visible semiconductor laser 37 Processing stand 47 Through-hole 36, 73 Main body box portion 36A Top plate portion 36C Side plate portion 41, 79, 95 Front plate 42, 78, 96 Adjacent side plate 43, 81, 97 Adjacent upper plate 45, 114 Hinge 52, 83, 95A, 121 Through hole 53, 84, 94, 122 Transmission plate 55 Light shielding film 62, 85, 101 Proximity side surface portion 76 Slide rail 82 Slide engagement portion 93, 113 Cover member 98A to 98D Protruding rib 99A to 99D Stepped portion

Claims (3)

An oscillator that emits laser light;
A visible laser light source that emits visible laser light;
A condensing unit that condenses the laser beam emitted from the oscillator and the visible laser beam emitted from the visible laser light source, and emits the laser beam toward a workpiece;
In a box-shaped processing container that supports the head portion provided with
The processing container is
A processing table provided on the emission direction side of the light collecting unit, on which a processing object is disposed;
Shielding material that shields the head portion supports, the condensing said laser beam and said emitted from the light unit hole visible laser beam passes is formed Rutotomoni, the laser beam reflected on the workpiece An upper surface member formed of
The laser beam passing through the hole and the visible laser beam are disposed along the emission direction of the light converging unit so as to surround the laser beam and adjacent to the front plate and the front plate. A plurality of side members formed of a light shielding material that shields the laser beam reflected on the workpiece including a side plate ;
A rotation support unit that rotatably supports the adjacent side plate with a side edge portion of the adjacent side plate opposite to the front plate as a rotation axis;
Have
Before SL adjacent side face plate, the collection from a vertical line extended to the adjacent side face plate from the light portion of the optical axis, is configured to cover the near side unit in a direction approaching the front plate,
The upper surface member has an adjacent upper surface plate that covers a ceiling portion of the processing container in a direction approaching the front plate from a perpendicular extending from the optical axis of the light collecting portion to the adjacent side surface plate,
A side edge of the adjacent top plate on the side of the front plate is fixed to a side edge of the front plate on the side of the adjacent top plate, and a side edge of the adjacent top plate opposite to the front plate. The part is separated from the opposite side edge parts of the upper surface member,
The front plate is rotatably supported integrally with the adjacent side surface plate and the adjacent upper surface plate adjacent to both side edges of the front plate via the rotation support portion , and the front plate is adjacent to the adjacent side plate. When the side plate and the adjacent upper surface plate are integrally rotated and opened, visible light is allowed to pass through at least a portion of the adjacent side surface portion through which a perpendicular extending from the optical axis to the adjacent side surface portion passes. Characteristic processing container. The side edge portions on the front plate side of the adjacent side plates adjacent to both side edge portions of the front plate are respectively fixed to the side edge portions of the adjacent front plates,
The front plate and the adjacent upper surface plate are separated along a perpendicular extending from the optical axis of the light collecting unit to the front plate,
The rotation support portion can freely rotate the adjacent side plate with each side edge portion of the adjacent side plate fixed to each side edge portion of the front plate as a rotation axis. The processing container according to claim 1 , wherein the processing container is supported by the support. An oscillator that emits laser light;
A visible laser light source that emits visible laser light;
A condensing unit that condenses the laser beam emitted from the oscillator and the visible laser beam emitted from the visible laser light source, and emits the laser beam toward a workpiece;
A head portion having
A box-shaped processing container for supporting the head portion;
With
The processing container is
A processing table provided on the emission direction side of the light collecting unit, on which a processing object is disposed;
Shielding material that shields the head portion supports, the condensing said laser beam and said emitted from the light unit hole visible laser beam passes is formed Rutotomoni, the laser beam reflected on the workpiece An upper surface member formed of
The laser beam passing through the hole and the visible laser beam are disposed along the emission direction of the light converging unit so as to surround the laser beam and adjacent to the front plate and the front plate. A plurality of side members formed of a light shielding material that shields the laser beam reflected on the workpiece including a side plate ;
A rotation support unit that rotatably supports the adjacent side plate with a side edge portion of the adjacent side plate opposite to the front plate as a rotation axis;
Have
Before SL adjacent side face plate, the collection from a vertical line extended to the adjacent side face plate from the light portion of the optical axis, is configured to cover the near side unit in a direction approaching the front plate,
The upper surface member has an adjacent upper surface plate that covers a ceiling portion of the processing container in a direction approaching the front plate from a perpendicular extending from the optical axis of the light collecting portion to the adjacent side surface plate,
A side edge of the adjacent top plate on the side of the front plate is fixed to a side edge of the front plate on the side of the adjacent top plate, and a side edge of the adjacent top plate opposite to the front plate. The part is separated from the opposite side edge parts of the upper surface member,
The front plate is rotatably supported integrally with the adjacent side surface plate and the adjacent upper surface plate adjacent to both side edges of the front plate via the rotation support portion , and the front plate is adjacent to the adjacent side plate. When the side plate and the adjacent upper surface plate are integrally rotated and opened, visible light is allowed to pass through at least a portion of the adjacent side surface portion through which a perpendicular extending from the optical axis to the adjacent side surface portion passes. A featured laser processing apparatus.

Images