JP5971777B2 - 一酸化炭素を処理する方法及び装置 - Google Patents
一酸化炭素を処理する方法及び装置 Download PDFInfo
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- JP5971777B2 JP5971777B2 JP2014515542A JP2014515542A JP5971777B2 JP 5971777 B2 JP5971777 B2 JP 5971777B2 JP 2014515542 A JP2014515542 A JP 2014515542A JP 2014515542 A JP2014515542 A JP 2014515542A JP 5971777 B2 JP5971777 B2 JP 5971777B2
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- gas
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- carbon monoxide
- carbon
- catalyst
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- UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical compound [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 title claims description 154
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- 238000000034 method Methods 0.000 title claims description 69
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- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 121
- 229910052799 carbon Inorganic materials 0.000 claims description 109
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 62
- 239000002994 raw material Substances 0.000 claims description 30
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- 238000004519 manufacturing process Methods 0.000 claims description 8
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
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Description
窒素原子を含む有機物とコバルトとを含む原料を炭素化することにより炭素触媒CA(Co)を製造した。すなわち、容積100mLのビーカー中のDMF20gに、1gのポリアクリロニトリル(PAN)(三井化学株式会社製)、1gの2−メチルイミダゾール(和光純薬工業株式会社製)及び1gの塩化コバルト六水和物(CoCl2・6H2O)(関東化学株式会社製)を溶解させた。この溶液に、0.9gのケッチェンブラック(ECP600JD、ライオン株式会社製)を加え、混練した。その後、溶媒を除去し、乾燥及び固化を行い、前駆体組成物を得た。
塩化コバルト六水和物(CoCl2・6H2O)に代えて塩化鉄(III)六水和物(FeCl3・6H2O)(シグマアルドリッチジャパン株式会社製)を使用した以外は、上述の炭素触媒CA(Co)の場合と同様にして、炭素触媒CA(Fe)を製造した。
5重量%白金担持アルミナ(シグマアルドリッチジャパン株式会社製)をアルミナで希釈することにより、2重量%の白金を含有した貴金属触媒を製造した。
39重量%白金担持カーボン触媒(石福金属興業株式会社製)をカーボンブラックで希釈することにより、2重量%の白金を含有した貴金属触媒を製造した。
気体採取器(GV−100、株式会社ガステック製)と水蒸気検知管(NO.6)とを使って30℃の処理対象ガス1L中の水蒸気量を測定し、当該測定結果と温度補正表とに基づき真の1L中の水蒸気量(mg/L)を求めた。また、次の式から湿度(相対湿度)(%)を求めた。
ガスボンベ、マスフローコントローラー、反応管(BELREA SPNS、日本ベル株式会社製)、恒温槽及びガス分析装置(ガスクロマトグラフィー GC−2014ATF、株式会社島津製作所製)を含む測定装置を使用した。すなわち、反応管内に、上述のようにして準備した触媒0.2gを充填した。なお、触媒の上流側及び下流側には石英ウール0.1gをそれぞれ充填した。
図3には、上述のようにして一酸化炭素の転化率を評価した結果を示す。図3において、横軸は反応管への処理対象ガスの流通を開始してから経過した時間である処理時間(時間)を示し、縦軸は一酸化炭素(CO)の転化率(%)を示す。また、黒塗り丸印は炭素触媒(CA(Co))の結果を示し、黒塗り四角印は炭素触媒(CA(Fe)の結果を示し、白抜き菱形印は貴金属触媒(Pt/アルミナ)の結果を示し、白抜き三角印は貴金属触媒(Pt/カーボン)の結果を示す。
上述の実施例1と同様に、炭素触媒CA(Co)を準備した。
ポリアクリロニトリル(PAN)及び2−メチルイミダゾールを使用しなかったこと以外は、上述の炭素触媒CA(Co)の場合と同様にして、コバルト担持カーボンを製造した。
カーボン担体からなる比較材料として、ケッチェンブラック(ECP600JD、ライオン株式会社製)を準備した。
上述の実施例1と同様にして、一酸化炭素の処理を行い、一酸化炭素の転化率を評価した。
図4には、一酸化炭素の転化率を評価した結果を示す。図4において、黒塗り丸印は炭素触媒(CA(Co))の結果を示し、白抜き丸印はコバルト担持カーボンの結果を示し、白抜き菱形印はカーボン担体の結果を示す。
上述の実施例1と同様に、炭素触媒CA(Co)を製造した。
水蒸気量及び相対湿度が異なる7種類の処理対象ガスを使用した以外は、上述の実施例1と同様にして、一酸化炭素の処理を行い、一酸化炭素の転化率を評価した。すなわち、処理対象ガスとして、1000ppmの一酸化炭素及び11体積%の酸素を含み、水蒸気量が0.05mg/L(相対湿度0.17%)である処理対象ガス、1000ppmの一酸化炭素及び11体積%の酸素を含み、水蒸気量が0.25mg/L(相対湿度0.8%)である処理対象ガス、水ポンプから導入された水を蒸発器で気化し合流させることにより水蒸気量を18mg/L(相対湿度60%)、14mg/L(相対湿度46%)、10mg/L(相対湿度33%)、5mg/L(相対湿度17%)又は0.7mg/L(相対湿度2.3%)に調整された処理対象ガスを使用した。
図5には、一酸化炭素の転化率を評価した結果を示す。図5において、黒塗り丸印は水蒸気量が0.05mg/L(相対湿度0.17%)の処理対象ガスを使用した場合の結果を示し、白抜き丸印は水蒸気量が0.25mg/L(相対湿度0.8%)の処理対象ガスを使用した場合の結果を示し、黒塗り菱形印は水蒸気量が0.7mg/L(相対湿度2.3%)の処理対象ガスを使用した場合の結果を示し、白抜き菱形印は水蒸気量が5mg/L(相対湿度17%)の処理対象ガスを使用した場合の結果を示し、十字印は水蒸気量が10mg/L(相対湿度33%)の処理対象ガスを使用した場合の結果を示し、黒塗り三角印は水蒸気量が14mg/L(相対湿度46%)の処理対象ガスを使用した場合の結果を示し、白抜き三角印は水蒸気量が18mg/L(相対湿度60%)の処理対象ガスを使用した場合の結果を示す。
上述の実施例1と同様に、炭素触媒CA(Co)、炭素触媒CA(Fe)、貴金属触媒(Pt/アルミナ)及び貴金属触媒(Pt/カーボン)を準備した。また、上述の実施例2と同様に、コバルト担持カーボン及びカーボン担体も準備した。
処理対象ガスとして、1000ppmの一酸化炭素及び11体積%の酸素を含み、水蒸気量が0.05mg/L(相対湿度0.17%)である処理対象ガスを使用した以外は、上述の実施例1と同様にして、一酸化炭素の処理を行い、一酸化炭素の転化率を評価した。
図6及び図7には、一酸化炭素の転化率を評価した結果を示す。図6において、黒塗り丸印は炭素触媒(CA(Co))の結果を示し、黒塗り四角印は炭素触媒(CA(Fe)の結果を示し、白抜き菱形印は貴金属触媒(Pt/アルミナ)の結果を示し、白抜き三角印は貴金属触媒(Pt/カーボン)の結果を示す。また、図7において、黒塗り丸印は炭素触媒(CA(Co))の結果を示し、白抜き丸印はコバルト担持カーボンの結果を示し、白抜き菱形印はカーボン担体の結果を示す。なお、図6に示す炭素触媒(CA(Co))の結果を図7にも示している。
上述の実施例1と同様に、炭素触媒CA(Co)を準備した。
金属酸化物触媒(CuMn2O4)(ホプカライト(II)、キシダ化学株式会社製)を準備した。
下記の点以外は上述の実施例1と同様にして、一酸化炭素の処理を行った。反応管内には、炭素触媒CA(Co)4.97g又は金属酸化物触媒9.84gを充填した。処理対象ガスとしては、2%(20000ppm)の一酸化炭素及び10%の酸素を含み、水蒸気量が0.05mg/L(相対湿度0.17%)の処理対象ガスを使用した。処理対象ガスの流量は50mL/分であった。
図8には、反応管から流出した処理後ガスに含まれている一酸化炭素の濃度を測定した結果を示す。図8において、横軸は処理時間(時間)を示し、左側の縦軸は炭素触媒(CA(Co))を使用した場合の処理後ガス中の一酸化炭素濃度(出口CO濃度)(ppm)を示し、右側の縦軸は金属酸化物触媒を使用した場合の処理後ガス中の出口CO濃度(ppm)を示す。また、黒塗り丸印は炭素触媒(CA(Co))の結果を示し、白抜き四角印は金属酸化物触媒の結果を示す。
Claims (7)
- 窒素原子を含む有機物とコバルトとを含む原料を炭素化して得られる炭素触媒と、一酸化炭素を含むガスとを接触させる一酸化炭素処理方法であって、
前記炭素触媒と前記ガスとの接触前に、水蒸気量が1mg/L以下でない前記ガスの前記水蒸気量を1mg/L以下に低減し、又は相対湿度が5%以下でない前記ガスの前記相対湿度を5%以下に低減し、
水蒸気量が1mg/L以下に低減され又は相対湿度が5%以下に低減された前記ガスと、前記炭素触媒とを接触させる
ことを特徴とする一酸化炭素処理方法。 - 前記炭素触媒と前記ガスとを200℃以下の温度で接触させる
ことを特徴とする請求項1に記載の一酸化炭素処理方法。 - 前記炭素触媒と、67%以下の濃度の一酸化炭素を含む前記ガスとを接触させる
ことを特徴とする請求項1又は2に記載の一酸化炭素処理方法。 - 前記ガスは、半導体製造工程で排出される一酸化炭素含有ガスである
ことを特徴とする請求項1乃至3のいずれかに記載の一酸化炭素処理方法。 - ガスに含まれる一酸化炭素を処理するための装置であって、
水蒸気量が1mg/L以下でない前記ガスの前記水蒸気量を1mg/L以下に低減し、又は相対湿度が5%以下でない前記ガスの前記相対湿度を5%以下に低減する吸湿剤を含む吸湿部と、
前記吸湿部の下流側において水蒸気量が1mg/L以下に低減され又は相対湿度が5%以下に低減された前記ガスと接触可能に設けられた、窒素原子を含む有機物とコバルトとを含む原料の炭素化材料である炭素触媒を含む触媒部と、
を備えた
ことを特徴とする一酸化炭素処理装置。 - 携帯型の一酸化炭素処理装置である
ことを特徴とする請求項5に記載の一酸化炭素処理装置。 - 前記ガスは、半導体製造工程で排出される一酸化炭素含有ガスである
ことを特徴とする請求項5又は6に記載の一酸化炭素処理装置。
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