JP5961697B2 - プラグを備える事前圧壊された容量マイクロマシン・トランスデューサセル - Google Patents

プラグを備える事前圧壊された容量マイクロマシン・トランスデューサセル Download PDF

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Publication number
JP5961697B2
JP5961697B2 JP2014537759A JP2014537759A JP5961697B2 JP 5961697 B2 JP5961697 B2 JP 5961697B2 JP 2014537759 A JP2014537759 A JP 2014537759A JP 2014537759 A JP2014537759 A JP 2014537759A JP 5961697 B2 JP5961697 B2 JP 5961697B2
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Prior art keywords
membrane
cell
plug
substrate
layer
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JP2014537759A
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Japanese (ja)
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JP2015504620A5 (enExample
JP2015504620A (ja
Inventor
ペーター ディルクセン
ペーター ディルクセン
ロナルト デッケル
ロナルト デッケル
ヴィンセント アドリアヌス ヘンネケン
ヴィンセント アドリアヌス ヘンネケン
アドリアーン レーウェンステイン
アドリアーン レーウェンステイン
バウト マーセリス
バウト マーセリス
ヨン ダウフラス フラセル
ヨン ダウフラス フラセル
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Koninklijke Philips NV
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Koninklijke Philips NV
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Publication of JP2015504620A5 publication Critical patent/JP2015504620A5/ja
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    • G—PHYSICS
    • G10—MUSICAL INSTRUMENTS; ACOUSTICS
    • G10K—SOUND-PRODUCING DEVICES; METHODS OR DEVICES FOR PROTECTING AGAINST, OR FOR DAMPING, NOISE OR OTHER ACOUSTIC WAVES IN GENERAL; ACOUSTICS NOT OTHERWISE PROVIDED FOR
    • G10K11/00—Methods or devices for transmitting, conducting or directing sound in general; Methods or devices for protecting against, or for damping, noise or other acoustic waves in general
    • G10K11/18—Methods or devices for transmitting, conducting or directing sound
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/0292—Electrostatic transducers, e.g. electret-type
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R31/00—Apparatus or processes specially adapted for the manufacture of transducers or diaphragms therefor
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49005—Acoustic transducer

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Mechanical Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Signal Processing (AREA)
  • Multimedia (AREA)
  • Pressure Sensors (AREA)
  • Transducers For Ultrasonic Waves (AREA)
  • Micromachines (AREA)
  • Measuring Fluid Pressure (AREA)
JP2014537759A 2011-10-28 2012-10-15 プラグを備える事前圧壊された容量マイクロマシン・トランスデューサセル Active JP5961697B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201161552485P 2011-10-28 2011-10-28
US61/552,485 2011-10-28
PCT/IB2012/055605 WO2013061204A2 (en) 2011-10-28 2012-10-15 Pre-collapsed capacitive micro-machined transducer cell with plug

Publications (3)

Publication Number Publication Date
JP2015504620A JP2015504620A (ja) 2015-02-12
JP2015504620A5 JP2015504620A5 (enExample) 2015-11-12
JP5961697B2 true JP5961697B2 (ja) 2016-08-02

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Family Applications (1)

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JP2014537759A Active JP5961697B2 (ja) 2011-10-28 2012-10-15 プラグを備える事前圧壊された容量マイクロマシン・トランスデューサセル

Country Status (8)

Country Link
US (1) US9117438B2 (enExample)
EP (1) EP2747904B1 (enExample)
JP (1) JP5961697B2 (enExample)
CN (1) CN103906579B (enExample)
BR (1) BR112014009698A2 (enExample)
MX (1) MX343897B (enExample)
RU (1) RU2595800C2 (enExample)
WO (1) WO2013061204A2 (enExample)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6210992B2 (ja) * 2011-10-28 2017-10-11 コーニンクレッカ フィリップス エヌ ヴェＫｏｎｉｎｋｌｉｊｋｅ Ｐｈｉｌｉｐｓ Ｎ．Ｖ． 応力層を持つ事前圧壊容量マイクロマシン・トランスデューサセル
BR112014014911A2 (pt) * 2011-12-20 2017-06-13 Koninklijke Philips Nv dispositivo transdutor de ultrassom; e método de fabricação de um dispositivo transdutor de ultrassom
CN106714903B (zh) * 2014-09-11 2020-12-18 皇家飞利浦有限公司 宽带过身体超声通信系统
EP3317026B1 (en) * 2015-06-30 2023-12-20 Koninklijke Philips N.V. Ultrasound system and ultrasonic pulse transmission method
US10043903B2 (en) 2015-12-21 2018-08-07 Samsung Electronics Co., Ltd. Semiconductor devices with source/drain stress liner
WO2018100015A1 (en) * 2016-12-01 2018-06-07 Koninklijke Philips N.V. Cmut probe, system and method
RU2732839C1 (ru) * 2019-07-09 2020-09-23 Федеральное государственное бюджетное образовательное учреждение высшего образования "Пензенский государственный университет" (ФГБОУ ВО "ПГУ") Полупроводниковый преобразователь давления с повышенной точностью и чувствительностью
US11304005B2 (en) 2020-02-07 2022-04-12 xMEMS Labs, Inc. Crossover circuit
US11172300B2 (en) * 2020-02-07 2021-11-09 xMEMS Labs, Inc. Sound producing device

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4347885B2 (ja) * 2004-06-03 2009-10-21 オリンパス株式会社 静電容量型超音波振動子の製造方法、当該製造方法によって製造された静電容量型超音波振動子を備えた超音波内視鏡装置、静電容量型超音波プローブおよび静電容量型超音波振動子
JP4885779B2 (ja) * 2007-03-29 2012-02-29 オリンパスメディカルシステムズ株式会社 静電容量型トランスデューサ装置及び体腔内超音波診断システム
US8203912B2 (en) * 2007-07-31 2012-06-19 Koninklijke Philips Electronics N.V. CMUTs with a high-k dielectric
WO2009037655A2 (en) * 2007-09-17 2009-03-26 Koninklijke Philips Electronics, N.V. Production of pre-collapsed capacitive micro-machined ultrasonic transducers and applications thereof
WO2010097729A1 (en) 2009-02-27 2010-09-02 Koninklijke Philips Electronics, N.V. Pre-collapsed cmut with mechanical collapse retention
EP2222417B1 (en) * 2007-12-14 2019-10-23 Koninklijke Philips N.V. Collapsed mode operable cmut including contoured substrate
EP2145696A1 (en) * 2008-07-15 2010-01-20 UAB Minatech Capacitive micromachined ultrasonic transducer and its fabrication method
US9132693B2 (en) * 2008-09-16 2015-09-15 Koninklijke Philps N.V. Capacitive micromachine ultrasound transducer

Also Published As

Publication number Publication date
US20140247698A1 (en) 2014-09-04
RU2014121503A (ru) 2015-12-10
WO2013061204A3 (en) 2013-09-12
EP2747904A2 (en) 2014-07-02
MX343897B (es) 2016-11-28
MX2014004905A (es) 2014-05-28
EP2747904B1 (en) 2020-04-08
CN103906579B (zh) 2016-08-24
WO2013061204A2 (en) 2013-05-02
US9117438B2 (en) 2015-08-25
RU2595800C2 (ru) 2016-08-27
BR112014009698A2 (pt) 2017-05-09
CN103906579A (zh) 2014-07-02
JP2015504620A (ja) 2015-02-12

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