JP5936918B2 - Magnetic levitation device - Google Patents

Description

  The present invention relates to a magnetic levitation apparatus that supports a levitation body with magnetic force.

  Magnetic bearings are widely used as means for supporting a rotating body in a non-contact manner. Usually, a magnetic bearing is comprised by the radial bearing which carries out non-contact support of the movement orthogonal to the rotating shaft of the rotor which rotates, and the thrust bearing which carries out non-contact support of the movement parallel to a rotating shaft. In that case, in order to stably support the rotor, which is a floating body, in a non-contact manner, it is common to apply a normal conducting attraction type magnetic levitation system that controls the attractive force of the electromagnet to any bearing. .

  In the normal conducting magnetic levitation system, it is necessary to always form a predetermined attraction force by flowing a bias current through the electromagnet in order to support the levitated body in a non-contact manner. Therefore, power is always consumed regardless of the presence or absence of external force acting on the rotor. Further, since the electromagnet coil is always energized, heat generation is unavoidable, and some cooling means must be taken.

  Applying so-called zero power control, in which a magnet unit is composed of permanent magnets and electromagnets, and the excitation current to the electromagnet is converged to zero while maintaining the stability of the levitated state in order to perform attraction type magnetic levitation with low power consumption (For example, refer to Patent Documents 1 and 2). By adopting such a configuration, the magnetic force required to support the floating body in a non-contact manner can be provided by the magnetic force caused by the permanent magnet, and the bias that needs to flow to the electromagnet in order to support the non-contact in a steady manner. No current is required. Further, even when the relative displacement between the levitating body and the magnet unit is large, a large electromagnetic force can be controlled with a small excitation current to the electromagnet.

  However, when a magnetic bearing is configured by applying zero power control, magnetic levitation control is performed so that the excitation current to the electromagnet always converges to zero, so the excitation current converges to zero and the gap length changes. As a result, it becomes stable at a position where magnetic levitation can be achieved only by the magnetic force of the permanent magnet. Accordingly, when the rotor's own weight or steady external force acts on the magnetic bearing, the rotation center of the rotor is displaced according to the external force. Displacement of the center of rotation causes, for example, a problem of swirling in a device that rotates at high speed, and in a pump or the like, a fluctuation in efficiency due to the rotational position becomes a problem. In some cases, the rotor may come into contact with a container or a pipe. .

JP 61-102105 A Japanese Patent Laid-Open No. 2001-19286

  As described above, in order to reduce the power consumption of the magnetic bearing and to design a large relative displacement between the magnet unit and the levitated body, the magnet unit is composed of an electromagnet and a permanent magnet, and zero power control is applied. The method is effective. However, when a magnetic bearing is configured by applying zero power control, there is a problem that when a steady external force acts on the magnetic bearing, the rotation center of the rotor is displaced according to the external force. This is a major factor that causes a problem of run-out in a device that rotates at a high speed and causes a reduction in efficiency.

  The present invention has been made to solve such a problem, and by using not only substantial zero power control but also control for converging the absolute position of the floating body to zero, the initial position fluctuation of the floating body due to friction or the like. A magnetic levitation apparatus that can suppress fluctuations in the position of the levitation body caused by a steady external force and can obtain good followability even when a dynamic external force is applied. provide.

A magnetic levitation apparatus according to an embodiment of the present invention includes a levitation body at least partially formed of a ferromagnetic material, a permanent magnet, and an electromagnet, and is disposed so as to face the levitation body. A magnetic unit that forms a magnetic circuit of magnetic flux caused by the permanent magnet via the air gap, and a magnetic unit that forms a magnetic circuit of magnetic flux caused by the electromagnet via the air gap on the floating body, and the magnet unit on the floating body A movable frame to which the magnet unit is fixed, a fixed frame that supports a load applied to the movable frame and the floating body, the movable frame is supported with respect to the fixed frame, and the fixed frame A movable frame support means capable of adjusting a distance between the movable frame, a first gap sensor for measuring a relative displacement between the floating body and the magnet unit, and a relative displacement between the fixed frame and the movable frame. taking measurement And second gap sensor, the first by controlling the current of the electromagnet in response to each of the relative displacement measured by the second gap sensor and gap sensor, non-contact support for the control means the floating body And means for converging the absolute position fluctuation of the levitated body derived from the relative displacements measured by the first gap sensor and the second gap sensor to zero.

  According to the embodiment of the present invention, not only the substantial zero power control but also the control for converging the absolute position of the levitated body to zero can be used to suppress the initial position fluctuation of the levitated body due to friction or the like. At the same time, fluctuations in the position of the levitated body caused by steady external force can be suppressed.

The perspective view which shows schematic structure of the magnetic levitation apparatus concerning 1st Embodiment. The perspective view which shows the structure of the vertical direction support apparatus used for the magnetic levitation apparatus of 1st Embodiment. The perspective view which shows the structure of the magnet unit attached to the vertical direction support apparatus of FIG. The perspective view which shows the structure of the horizontal direction support apparatus used for the magnetic levitation apparatus of 1st Embodiment. Schematic which shows the structure of the control apparatus of the electromagnet electric current in 1st Embodiment. The block diagram which shows the circuit structure of the control arithmetic unit used for the control apparatus of FIG. The characteristic view which shows the relationship between the magnetic support characteristic and spring support characteristic in 1st Embodiment. The block diagram which is for demonstrating the magnetic levitation apparatus concerning 2nd Embodiment, and shows the circuit structure of a control arithmetic unit. The block diagram for demonstrating the magnetic levitation apparatus concerning 3rd Embodiment, and showing the circuit structure of a control arithmetic unit. The block diagram for demonstrating the magnetic levitation apparatus concerning 4th Embodiment, and showing the circuit structure of a control arithmetic unit.

  In order to prevent the displacement of the levitated body due to the steady external force described above, a magnet unit is placed inside the movable frame supported by the elastic body against the magnetic levitating system to which zero power control is applied, and acts on the levitated body. A configuration that mechanically absorbs a change in relative displacement that changes according to the magnitude of the external force to be performed is conceivable. By setting it as such a structure, the absolute position of a floating body can be maintained in a predetermined position.

  However, when zero power control is used, there is a possibility that the initial position fluctuation of the floating body may occur due to the difference in the spring constant between the magnetic spring and the elastic body, the friction due to the elastic body support, and the like. The center of rotation of the levitated body will be deviated, which is a problem for devices that require high accuracy.

  Therefore, in the present invention, the initial position fluctuation of the levitating body is converged to zero, and even when a dynamic external force is applied, it follows well, reducing the fluctuation of the absolute position of the levitating body and exciting as a structural feature. A magnetic levitation device capable of reducing current is provided.

  Embodiments of the present invention will be described below with reference to the drawings.

(First embodiment)
FIG. 1 is a perspective view showing a schematic configuration of the magnetic levitation apparatus according to the first embodiment.

  The magnetic levitation device of this embodiment supports a cylindrical levitation body 10, a vertical support device 20 that supports the levitation body 10 in the z direction (up and down direction), and a levitation body 10 in the y direction (left and right direction). And a lateral support device 30. The levitated body 10 rotates about an axis in the x direction, and is entirely formed of a ferromagnetic material or partly formed of a ferromagnetic material.

  In FIG. 2, the structure of the vertical direction support apparatus 20 is shown. The vertical support device 20 includes a vertical fixed frame 21, a vertical movable frame 22, a magnet unit (Z-axis magnet unit) 23 disposed in the upper and lower portions of the vertical movable frame 22, the floating body 10, and the magnet unit 23. The first gap sensor 24 for measuring the relative displacement of the second gap sensor 25 for measuring the relative displacement between the vertical fixed frame 21 and the vertical movable frame 22 and the vertical movable frame 22 can be operated in the vertical direction. And a spring 27 that elastically supports the longitudinal movable frame 22. The vertical movable frame 22 is connected to the vertical fixed frame 21 via a linear guide 26 and a spring 27, and has a structure movable in the vertical direction within the vertical fixed frame 21.

  The gap sensor 24 may be provided on both the upper and lower sides of the longitudinal movable frame 22 in order to measure the relative displacement between the upper and lower magnet units 23 and the floating body 10. Since the distance between the magnet units 23 is constant and only one of them needs to be measured, for example, as shown in FIG. Similarly, the gap sensor 25 may be provided on both the upper and lower sides of the vertical fixed frame 21 in order to measure the relative displacement between the upper and lower ends of the vertical movable frame 22 and the vertical fixed frame 21. Since both are understood if only one is measured, for example, it is arranged only on the lower side as shown in FIG.

  FIG. 3 shows the configuration of the magnet unit 23. The magnet unit 23 is composed of a permanent magnet 41 and an electromagnet 44 composed of a yoke 42 and a coil 43 wound around the yoke 42. That is, the yokes 42 are connected to both ends of the permanent magnet 41, and the coils 43 are wound around the yokes 42. The magnet unit 23 forms a magnetic circuit of magnetic flux caused by the permanent magnet 41 through the air gap in the floating body 10 and forms a magnetic circuit of magnetic flux caused by the electromagnet 44 through the air gap in the floating body 10. It is supposed to be. Further, the direction of the magnetic flux generated by the electromagnet 44 changes according to the direction of the current flowing through the coil 43, and the magnetic flux formed by the permanent magnet 41 can be strengthened or weakened.

  FIG. 4 shows the configuration of the lateral support device 30. Similar to the vertical support device 20, the horizontal support device 30 includes a horizontal fixed frame 31, a horizontal movable frame 32, and magnet units (Y-axis magnet units) disposed inside the left and right sides of the horizontal movable frame 32. 33, a first gap sensor 34 that measures the relative displacement between the levitated body 10 and the laterally movable frame 32, a second gap sensor 35 that measures the relative displacement between the laterally fixed frame 31 and the laterally movable frame 32, A linear guide 36 that enables the laterally movable frame 32 to move in the left-right direction, and a spring 37 that elastically supports the laterally movable frame 32. The laterally movable frame 32 is connected to the laterally fixed frame 31 via a linear guide 36 and a spring 37, and has a structure movable in the left-right direction.

  The configuration of the magnet unit 33 is the same as that of the magnet unit 23, and is formed of a permanent magnet and an electromagnet. The gap sensor 34 may be provided on both the left and right sides of the movable frame 32 in order to measure the relative displacement between the left and right magnet units 33 and the floating body 10. Is fixed, and only one of them needs to be measured. For example, as shown in FIG. Similarly, the gap sensor 35 may be provided on both the left and right sides of the lateral fixed frame 31 in order to measure the relative displacement between the left and right ends of the lateral movable frame 32 and the lateral fixed frame 31. For example, as shown in FIG. 4, it is arranged only on the left side. Further, the lateral support device 30 includes a position adjustment leg 38 and can be adjusted in the vertical direction.

  The magnet unit 23 is disposed so as to sandwich the floating body 10 from the z direction, and the magnet unit 33 is disposed so as to sandwich the floating body 10 from the y direction. And the magnet units 23 and 33 connect the coil 43 of the electromagnet 44 to a control apparatus in order to control the voltage applied to the electromagnet 44 and to support the floating body 10 in a non-contact manner. FIG. 5 shows a schematic configuration of an electromagnet current control apparatus. Since the vertical support device 20 and the horizontal support device 30 perform control with the same configuration, the control device of the vertical support device 20 will be described as an example here.

  The control device detects the state quantity of the magnetic levitation device, and controls to calculate the voltage applied to the electromagnet 44 in order to stably support the floating body 10 in a non-contact manner in accordance with a signal from the sensor unit 50. It comprises a computing unit 60 and a power amplifier 55 that excites the electromagnet 44 in accordance with the output of the control computing unit 60, and controls the magnetic force generated between the magnet unit 23 and the levitated body 10. Yes. The sensor unit 50 includes a first gap sensor 24 that measures the relative displacement zr between the levitated body 10 and the magnet unit 23, and a second gap that measures the relative displacement zf between the vertical fixed frame 21 and the vertical movable frame 22. The sensor 25 and the current sensor 51 for detecting the excitation current iz to the electromagnet 44 are configured.

  FIG. 6 shows a specific configuration of the control arithmetic unit 60. The control arithmetic unit 60 includes differentiators 61 and 62 for calculating speeds from displacement fluctuations Δzr and Δzf, a gain compensator 63 for multiplying an appropriate feedback gain, and an absolute position deviation for setting an absolute position deviation target value. A target value generator 64, an adder 65 for adding Δzr and Δzf, a subtractor 66 for subtracting the addition output (Δzr + Δzf) from the absolute position deviation target value, and an appropriate feedback gain by integrating the output value of the subtractor 66 , The adder 68 for adding the sum of the output values of the gain compensator 63, the output value of the adder 68 is subtracted from the output value of the integral compensator 67, and the control voltage ez to the electromagnet 44 is obtained. And a subtractor 69 for outputting.

  The differentiator 61 calculates the change rate of the relative displacement between the levitated body 10 and the magnet unit 23 from the minute variation Δzr of the relative displacement between the levitated body 10 and the magnet unit 23 calculated from the output value of the first gap sensor 24. The minute variation Δvr is calculated. The differentiator 62 calculates the vertical fixed frame 21 and the vertical movable frame 22 from the minute fluctuation Δzf of the relative displacement between the vertical fixed frame 21 and the vertical movable frame 22 calculated from the output value of the second gap sensor 25. A minute variation Δvf of the change speed of the relative displacement with respect to is calculated. The gain compensator 63 multiplies an appropriate feedback gain by Δzr, Δvr, Δzf, Δvf, and the minute fluctuation Δiz of the exciting current to the electromagnet 44 calculated from the output value of the current sensor 51.

  Here, when the value of the absolute position deviation target value generator 64 is set to zero, the absolute position fluctuation of the levitated body 10 can be converged to zero in a state where the levitated body 10 is stably supported without contact. it can. Thereby, while the initial position fluctuation | variation of the floating body 10 by friction etc. can be eliminated, the position fluctuation | variation of the floating body 10 resulting from a steady external force can be suppressed. That is, the floating body 10 can be stably supported in a non-contact manner by controlling the excitation current to the electromagnet 44 by the control loop including the sensor unit 50, the control arithmetic unit 60, and the power amplifier 55. In this state, by setting the absolute position deviation target value to zero, the absolute position variation of the floating body 10 can be converged to zero while maintaining the non-contact support of the floating body 10.

  The magnet unit 33 of the lateral support device 30 is controlled in the same manner not only in the z direction but also in the y direction by using the same control device as in FIG. 5 and the same control arithmetic unit as in FIG. Can be realized. Thereby, it becomes possible to support the floating body 10 in a non-contact manner.

  When the vertical movable frame 22 and the horizontal movable frame 32 are connected to the vertical fixed frame 21 and the horizontal fixed frame 31 via the linear guides 26 and 36 and the springs 27 and 37, respectively, as in the above configuration, the permanent magnet The springs 27 and 37 having a displacement-restoring force characteristic equivalent to the displacement-attraction force characteristic by the magnetic force 41 are combined with a spring support characteristic having an inclination opposite to the magnetic support characteristic. Thereby, as a result, as shown in FIG. 7, load-displacement characteristics such as a composite support characteristic are obtained, and fluctuations in the absolute position of the floating body 10 are greatly reduced.

  However, as long as the magnetic support characteristics and the spring support characteristics are not completely matched, the absolute position variation cannot be made zero according to the configuration. Therefore, in addition to this configuration, by applying control for converging the absolute position fluctuation of the levitated body 10 to zero, the power consumption can be made substantially zero while keeping the absolute position constant.

  In the present embodiment, for example, an eddy current type gap sensor is used as a sensor for measuring the distance, so that measurement with high accuracy can be realized. On the other hand, when the detection target is something other than metal, the detection target is not limited to metal by using an optical gap sensor. Further, when the contact type is used, an inexpensive system can be configured. Note that the output command value of the power amplifier is not limited to one of current and voltage, and in any case, an effect can be obtained with the same configuration. The same applies to the embodiments described below.

  As described above, according to the present embodiment, the movable frames 22 and 32 are provided on the fixed frames 21 and 31 via the linear guides 26 and 36 and the springs 27 and 37, and the magnet units 23 and 33 are fixed to the movable frames 22 and 32. By performing the magnetic levitation control of the levitation body 10 by the above, the center deviation of the levitation body 10 due to the steady external force can be absorbed by the movable frames 22 and 32, and the center deviation of the levitation body due to the steady external force is suppressed. be able to. In addition, by performing feedback control in consideration of the displacement of the movable frames 22 and 32, it is possible to obtain good tracking characteristics even when a dynamic external force or the like is applied.

(Second Embodiment)
FIG. 8 is a block diagram for explaining a magnetic levitation apparatus according to the second embodiment and showing a circuit configuration of a control arithmetic unit. The same parts as those in FIG. 6 are denoted by the same reference numerals, and detailed description thereof is omitted.

  In the first embodiment, the control voltage ez is calculated by feeding back six integrated values of Δzr, Δvr, Δzf, Δvf, Δiz, and Δzr + Δzf. Here, an embodiment will be described in which a loop for feeding back the integrated value of Δiz is provided to switch between the integrated value of Δzr + Δzf and the integrated value of Δiz.

  As shown in FIG. 8, in addition to the configuration of FIG. 6, the current deviation target value generator 74, the subtractor 76 for subtracting Δiz from the current deviation target value generator 74, and the output value of the subtractor 76 are integrated. An integral compensator 77 for multiplying an appropriate feedback gain, an integral switching unit 81 for selecting one of the integral compensators 67 and 77, and an adder 82 for adding the output values of the integral compensators 67 and 77 are provided. . The subtracter 69 subtracts the output value of the adder 82 from the output value of the adder 68 and outputs the control voltage ez to the electromagnet.

  The integral switching unit 81 determines whether to select an integral value of Δzr + Δzf or an integral value of Δiz. At that time, any of the integral compensators 67 and 77 which are not selected is reset to zero.

  Zero power control can be realized by a loop that feeds back the integrated value of Δiz. Therefore, by using the integral switching device 81, it is possible to determine which of the absolute position fluctuation and the excitation current is positively converged to zero. Moreover, smooth switching can be realized by setting any one of the unselected integral compensators 67 and 77 to zero. The lateral support device 4 can also be controlled with the same configuration.

  As described above, according to the present embodiment, in addition to the loop that feeds back the integrated value of Δzr + Δzf, a loop that feeds back the integrated value of Δiz is provided, and by selecting one of the loops, any of the absolute position fluctuation and the excitation current can be selected. Can be positively converged to zero. Therefore, there is an advantage that control according to the performance required for the magnetic bearing of the magnetic levitation device can be obtained as well as the same effect as the first embodiment.

(Third embodiment)
FIG. 9 is a block diagram for explaining a magnetic levitation apparatus according to the third embodiment and showing a circuit configuration of a control arithmetic unit. In addition, the same code | symbol is attached | subjected to FIG. 8 and an identical part, and the detailed description is abbreviate | omitted.

  This embodiment is different from the second embodiment described above in that a state observer is used instead of a differentiator in the control arithmetic unit 60 of the control device. The state observer has a necessary motion model calculation formula, and estimates necessary information from various sensor information. The state observer 71 of the present embodiment estimates Δvr and Δvf by introducing Δzr and Δzf calculated using the first gap sensor 24 and the second gap sensor 25.

  In the previous second embodiment, the control voltage ez is calculated by feeding back six integrated values of Δzr, Δvr, Δzf, Δvf, Δiz, and Δzr + Δzf or Δiz. At this time, in order to obtain Δvr and Δvf, output values of Δzr and Δzf are obtained via differentiators 61 and 62, but in this embodiment, the state observer 71 is used. Also in this embodiment, although not basically changed, Δvr and Δvf are obtained using the state observer 91 instead of differentiating the output values of Δzr and Δzf in order to obtain Δvr and Δvf.

  When the state observer 91 is used as in the present embodiment, it is more resistant to noise than the case where the differentiators 61 and 62 are used, and the convergence speed of the estimation error can be arbitrarily changed. Thus, the levitated body 10 can be supported in a non-contact manner. The lateral support device 30 can also be controlled with the same configuration.

  As described above, according to this embodiment, the same effect as that of the second embodiment can be obtained, and since there is little noise when obtaining the minute fluctuations Δvr and Δvf of the change speed, the floating body 10 levitation control can be performed more stably.

(Fourth embodiment)
FIG. 10 is a block diagram illustrating a schematic configuration of a control arithmetic unit for explaining a magnetic levitation apparatus according to the fourth embodiment. In addition, the same code | symbol is attached | subjected to FIG. 8 and an identical part, and the detailed description is abbreviate | omitted.

  This embodiment is different from the second embodiment described above in that, like the third embodiment, in addition to estimating Δvr and Δvf by the state observer 92, the floating body 10 and the longitudinally movable The external force applied to the frame 22 is estimated and fed back to the control voltage ez.

  That is, Δzr and Δzf calculated using the first gap sensor 24 and the second gap sensor 25 and Δiz calculated using the current sensor 51 are input to the state observer 92. Then, the state observer 92 estimates Δvr, Δvf, the external force ur applied to the floating body 10 and the external force uf applied to the longitudinal movable frame 22. The gain compensator 63 multiplies ur and uf by appropriate feedback gains in addition to Δzr, Δvr, Δzf, Δvf, and Δiz, respectively. Other configurations are the same as those of the second embodiment.

  When the state observer 92 is used as in the present embodiment, a control input corresponding to the estimated external force can be applied by estimating the external force applied to the floating body 10, and the influence of the external force can be reduced. In addition, external force is not normally applied to the vertical movable frame 22, but by estimating the external force applied to the vertical movable frame 22 in advance, for example, when an unexpected disturbance acts on the vertical movable frame 22, It is possible to avoid a state where the floating body 10 and the vertical movable frame 22 are in contact with each other. The lateral support device 30 can also be controlled with the same configuration.

  As described above, according to the present embodiment, it is possible to obtain the same effect as that of the second embodiment, and to estimate the external force applied to the movable frames 22 and 32 in advance, so that the floating body 10 and the movable body 10 can move. It is possible to avoid a state in which the frames 22 and 32 are in contact with each other, and the reliability of the flying control can be further improved.

(Modification)
The present invention is not limited to the above-described embodiments. In the embodiment, the rotating body is used as the floating body. However, the floating body is not necessarily limited to the rotating body, and may be one that only needs to be supported in one direction. For example, in a use for conveying a steel plate in a non-contact manner, only a longitudinal support frame is required.

  Further, the means for supporting the movable frame on the fixed frame is not limited to a spiral spring but may be a leaf spring, and is not necessarily limited to a spring, and an elastic body may be used. Furthermore, an actuator can be used instead of the elastic body.

  Although several embodiments of the present invention have been described, these embodiments are presented by way of example and are not intended to limit the scope of the invention. These novel embodiments can be implemented in various other forms, and various omissions, replacements, and changes can be made without departing from the scope of the invention. These embodiments and modifications thereof are included in the scope and gist of the invention, and are included in the invention described in the claims and the equivalents thereof.

DESCRIPTION OF SYMBOLS 10 ... Levitation body 20 ... Vertical direction support apparatus 21 ... Vertical direction fixed frame 22 ... Vertical direction movable frame 23, 33 ... Magnet unit 24, 34 ... 1st gap sensor 25, 35 ... 2nd gap sensor 26, 36 ... Linear guide 27, 37 ... Spring 30 ... Lateral support device 31 ... Lateral fixed frame 32 ... Lateral movable frame 38 ... Position adjustment leg 41 ... Permanent magnet 42 ... Relay 43 ... Coil 44 ... Electromagnet 50 ... Sensor unit 51 ... Current sensor 55 ... Power amplifier 60 ... Control calculator 61,62 ... Differentiator 63 ... Gain compensator 64 ... Absolute position deviation target generator 65,68,82 ... Adder 66,69,76 ... Subtractor 67,77 ... Integral compensator 74 ... Current deviation target generator 81 ... Integral switch 91, 92 ... State observer

Claims (10)

A levitated body at least partially formed of a ferromagnetic material;
A permanent magnet and an electromagnet are provided opposite to each other with the floating body interposed therebetween, and a magnetic circuit of magnetic flux caused by the permanent magnet is formed in the floating body through a gap, and the floating body is formed through the gap. A magnet unit that forms a magnetic circuit of magnetic flux caused by an electromagnet;
A movable frame to which the magnet unit is fixed so that the magnet unit faces the floating body;
A fixed frame that supports a load applied to the movable frame and the floating body;
Movable frame support means for supporting the movable frame with respect to the fixed frame and capable of adjusting a distance between the fixed frame and the movable frame;
A first gap sensor for measuring a relative displacement between the floating body and the magnet unit;
A second gap sensor for measuring a relative displacement between the fixed frame and the movable frame;
Control means for supporting the floating body in a non-contact manner by controlling the current of the electromagnet according to the relative displacements measured by the first gap sensor and the second gap sensor;
Means for converging the absolute position fluctuation of the levitated body derived from the relative displacements measured by the first gap sensor and the second gap sensor to zero;
A magnetic levitation apparatus comprising:   The control means includes the relative displacement derived from the output of the first gap sensor and the time change rate of the relative displacement, the relative displacement derived from the output of the second gap sensor, and the time of the relative displacement. The control output is obtained by multiplying the change speed and the deviation from the target value of the absolute position of the levitated body derived from the outputs of the first gap sensor and the second gap sensor, respectively, by a predetermined gain. The magnetic levitation apparatus according to claim 1, wherein Means for measuring the excitation current to the electromagnet;
Means for converging the excitation current to the electromagnet to zero;
Switching means for selecting means for converging the absolute position fluctuation of the levitating body to zero and means for converging the excitation current to the electromagnet to zero, and
The magnetic levitation apparatus according to claim 1, further comprising:   The control means includes a first differentiator for obtaining a time change rate of relative displacement between the levitating body and the magnet unit from an output of the first gap sensor, and an output of the second gap sensor. The magnetic levitation apparatus according to claim 1, further comprising: a second differentiator that obtains a temporal change rate of relative displacement between the movable frame and the movable frame.   The control means receives the output of the first gap sensor and the output of the second gap sensor as inputs, and the time change rate of the relative displacement between the floating body and the magnet unit, the fixed frame and the movable frame The magnetic levitation apparatus according to claim 1, further comprising: a state observer that estimates a time change rate of the relative displacement of the magnetic field.   The control means inputs the output of the first gap sensor, the output of the second gap sensor, and the excitation current to the electromagnet, and the time change rate of relative displacement between the floating body and the magnet unit, A state observer for estimating a time change rate of relative displacement between the fixed frame and the movable frame and an external force applied to the levitating body and the movable frame. The magnetic levitation apparatus according to any one of the above. The means for converging the floating body absolute position variation to zero includes a target value generator for setting a target value of the absolute position of the floating body derived from the first gap sensor and the second gap sensor, to any one of claims 1 to 6, characterized in that it comprises an integrator compensator to the deviation of the set target value by the target value generator and the absolute position of the floating body to integrate over a gain, the The magnetic levitation device as described.   The means for converging the excitation current of the electromagnet to zero includes a target value generator that sets a target value of the excitation current to the electromagnet, a target value set by the target value generator, and an excitation current to the electromagnet. The magnetic levitation apparatus according to claim 3, further comprising: an integral compensator that integrates the deviation of the gain with a gain.   The magnetic levitation apparatus according to claim 1, wherein the movable frame support means includes an elastic element. The floating body is a rotating body,
The magnet unit includes a pair of Y-axis magnet units that sandwich the levitating body from a Y direction that is orthogonal to the rotational axis direction X of the levitating body, and a pair that sandwiches the levitating body from a Z direction that is orthogonal to the X direction and the Y direction. Z-axis magnet unit
The movable frame includes a Y-axis movable frame that fixes the Y-axis magnet unit, and a Z-axis movable frame that fixes the Z-axis magnet unit.
The magnetic levitation apparatus according to claim 1, wherein the fixed frame includes a Y-axis fixed frame that supports the Y-axis movable frame and a Z-axis fixed frame that supports the Z-axis movable frame.

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