JP5927039B2 - Electronic endoscope apparatus and imaging module thereof - Google Patents

Electronic endoscope apparatus and imaging module thereof Download PDF

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JP5927039B2
JP5927039B2 JP2012120646A JP2012120646A JP5927039B2 JP 5927039 B2 JP5927039 B2 JP 5927039B2 JP 2012120646 A JP2012120646 A JP 2012120646A JP 2012120646 A JP2012120646 A JP 2012120646A JP 5927039 B2 JP5927039 B2 JP 5927039B2
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endoscope
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JP2013244252A (en
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黒田 修
黒田  修
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Fujifilm Corp
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    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61BDIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B1/00Instruments for performing medical examinations of the interior of cavities or tubes of the body by visual or photographical inspection, e.g. endoscopes; Illuminating arrangements therefor
    • A61B1/04Instruments for performing medical examinations of the interior of cavities or tubes of the body by visual or photographical inspection, e.g. endoscopes; Illuminating arrangements therefor combined with photographic or television appliances
    • A61B1/05Instruments for performing medical examinations of the interior of cavities or tubes of the body by visual or photographical inspection, e.g. endoscopes; Illuminating arrangements therefor combined with photographic or television appliances characterised by the image sensor, e.g. camera, being in the distal end portion
    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61BDIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B1/00Instruments for performing medical examinations of the interior of cavities or tubes of the body by visual or photographical inspection, e.g. endoscopes; Illuminating arrangements therefor
    • A61B1/00064Constructional details of the endoscope body
    • A61B1/00071Insertion part of the endoscope body
    • A61B1/0008Insertion part of the endoscope body characterised by distal tip features
    • A61B1/00096Optical elements
    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61BDIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B1/00Instruments for performing medical examinations of the interior of cavities or tubes of the body by visual or photographical inspection, e.g. endoscopes; Illuminating arrangements therefor
    • A61B1/00064Constructional details of the endoscope body
    • A61B1/0011Manufacturing of endoscope parts
    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61BDIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B1/00Instruments for performing medical examinations of the interior of cavities or tubes of the body by visual or photographical inspection, e.g. endoscopes; Illuminating arrangements therefor
    • A61B1/00163Optical arrangements
    • A61B1/00186Optical arrangements with imaging filters
    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61BDIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B1/00Instruments for performing medical examinations of the interior of cavities or tubes of the body by visual or photographical inspection, e.g. endoscopes; Illuminating arrangements therefor
    • A61B1/04Instruments for performing medical examinations of the interior of cavities or tubes of the body by visual or photographical inspection, e.g. endoscopes; Illuminating arrangements therefor combined with photographic or television appliances
    • A61B1/05Instruments for performing medical examinations of the interior of cavities or tubes of the body by visual or photographical inspection, e.g. endoscopes; Illuminating arrangements therefor combined with photographic or television appliances characterised by the image sensor, e.g. camera, being in the distal end portion
    • A61B1/051Details of CCD assembly

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Description

本発明は、電子内視鏡装置及びその撮像モジュールに係り、特に、フレア対策を施した電子内視鏡装置及びその撮像モジュールに関する。   The present invention relates to an electronic endoscope apparatus and an imaging module thereof, and more particularly, to an electronic endoscope apparatus and an imaging module thereof that are provided with a countermeasure against flare.

内視鏡スコープ先端部に撮像モジュールを内蔵し、この撮像モジュールで撮像した被検体の体腔内観察画像をモニタ画面に表示する電子内視鏡装置では、撮像画像の品質を向上させるために、フレア対策を施したものがある。   In an electronic endoscope apparatus that has a built-in imaging module at the distal end of an endoscope scope and displays a body cavity observation image of a subject imaged by the imaging module on a monitor screen, a flare is used to improve the quality of the captured image. Some measures have been taken.

例えば下記の特許文献1に記載の電子内視鏡装置では、入射光の光路を撮像素子受光面側に略直角に変更するプリズム前段にフレア絞りを設け、入射光路内で反射したフレア光が撮像素子に入射しない様にしている。   For example, in the electronic endoscope apparatus described in Patent Document 1 below, a flare stop is provided in front of a prism that changes the optical path of incident light to a substantially right angle on the light receiving surface side of the image sensor, and flare light reflected in the incident optical path is imaged. The light is not incident on the element.

また、下記の特許文献2に記載の電子内視鏡装置では、撮像素子受光面を保護するカバーガラス周縁部にフレア絞りを設け、入射光路内で反射したフレア光が撮像素子に入射しない様にしている。   Further, in the electronic endoscope device described in Patent Document 2 below, a flare stop is provided on the peripheral edge of the cover glass that protects the light receiving surface of the image sensor so that flare light reflected in the incident optical path does not enter the image sensor. ing.

フレア絞りは、遮光マスクや遮光膜で形成される。一般的に撮像素子で使用される遮光膜は、黒レベルを検出するためにオプティカルブラック(OB)部の画素(フォトダイオード)に入射する光を遮断するためのものであり、撮像素子内部に設けられる。これに対し、フレア絞り用の遮光膜(遮光マスク)は、撮像素子外部の撮像素子前段に設けられる。遮光という機能は同じであるが、一方は黒レベル検出画素への入射光を全遮断するのが目的であり、他方は、入射光のうちのフレア光の画素への入射を抑制するのが目的である。このため、遮光膜を設ける位置や領域が異なる。   The flare stop is formed of a light shielding mask or a light shielding film. A light shielding film generally used in an image sensor is for blocking light incident on a pixel (photodiode) of an optical black (OB) portion in order to detect a black level, and is provided inside the image sensor. It is done. On the other hand, a light-shielding film (light-shielding mask) for flare stop is provided in front of the image sensor outside the image sensor. The function of shading is the same, but one is intended to completely block the incident light on the black level detection pixel, and the other is intended to suppress the incidence of flare light of the incident light on the pixel. It is. For this reason, the position and area | region which provide a light shielding film differ.

フレア絞りは、撮像素子の前段に設けられるが、撮像素子になるべく近い位置に設けるほど良い。特許文献1に記載のフレア絞りは、撮像素子の直前に配置されたプリズムの前段に設けられるため、フレア絞りと撮像素子受光面との間で発生したフレア光の撮像素子への入射を遮断することができない。   The flare stop is provided in front of the image sensor, but it is better to provide the flare stop as close as possible to the image sensor. Since the flare stop described in Patent Document 1 is provided in front of the prism disposed immediately before the image sensor, the flare light generated between the flare stop and the image sensor light-receiving surface is blocked from entering the image sensor. I can't.

特許文献2に記載のフレア絞りは、撮像素子受光面の周囲に設けられている接続端子やワイヤボンディングを被覆する絶縁用樹脂の上に撮像素子受光面を覆う様に取り付けられたカバーガラスの裏面側(撮像素子側)に設けられる。このため、フレア絞りが設けられたカバーガラス裏面と撮像素子受光面との間が離間し、樹脂層の内周面で反射したフレア光が撮像素子受光面に入射してしまう。   The flare stop described in Patent Document 2 is a back surface of a cover glass attached so as to cover the imaging element light receiving surface on an insulating resin covering connection terminals and wire bonding provided around the imaging element light receiving surface. Provided on the side (image sensor side). For this reason, the back surface of the cover glass provided with the flare stop and the imaging element light receiving surface are separated from each other, and flare light reflected by the inner peripheral surface of the resin layer enters the imaging element light receiving surface.

特開2009―288682号公報JP 2009-288682 A 特開平9―205590号公報JP-A-9-205590

本発明の目的は、フレアを良好に除去できる内視鏡用撮像モジュールと、この撮像モジュールを内視鏡スコープ先端部内に収納した電子内視鏡装置を提供することにある。   An object of the present invention is to provide an imaging module for an endoscope that can satisfactorily remove flare, and an electronic endoscope apparatus in which the imaging module is housed in the distal end portion of an endoscope scope.

本発明の内視鏡用撮像モジュールは、対物レンズ光学系と、該対物レンズ光学系からの被写体像光を取り込み平面の光出射面から出射する透明光学部材と、マイクロレンズ非搭載型で且つ光入射面が平面の撮像素子と、前記透明光学部材の前記光出射面と前記撮像素子の前記光入射面とを密に貼り合わせる接着材層と、前記光出射面と前記光入射面との間に介挿され前記対物レンズ光学系及び前記透明光学部材を通り前記撮像素子の光入射面に形成されるイメージサークルに整合し該イメージサークルより小径の開口が形成されたフレア対策用の遮光マスクとを備え、前記撮像素子は、各画素に三原色または補色系のカラーフィルタが積層された単板式カラー画像撮像用の撮像素子であり、前記撮像素子のうち前記フレア対策用の遮光マスクで遮光される領域に黒レベル検出用のOB画素が設けられ、該OB画素の遮光膜として前記フレア対策用の遮光マスクが兼用される構成であるものである。
また、本発明の内視鏡用撮像モジュールは、対物レンズ光学系と、該対物レンズ光学系からの被写体像光を取り込み平面の光出射面から出射する透明光学部材と、マイクロレンズ非搭載型で且つ光入射面が平面の撮像素子と、前記透明光学部材の前記光出射面と前記撮像素子の前記光入射面とを密に貼り合わせる接着材層と、前記光出射面と前記光入射面との間に介挿され前記対物レンズ光学系及び前記透明光学部材を通り前記撮像素子の光入射面に形成されるイメージサークルに整合し該イメージサークルより小径の開口が形成されたフレア対策用の遮光マスクとを備え、前記撮像素子は、各画素に三原色または補色系のカラーフィルタが積層された単板式カラー画像撮像用の撮像素子であり、前記撮像素子のうち前記フレア対策用の遮光マスクで遮光される領域に、該撮像素子の周辺回路が形成されるものである。
An imaging module for an endoscope of the present invention includes an objective lens optical system, a transparent optical member that takes in subject image light from the objective lens optical system and emits it from a flat light exit surface, a microlens non-mounted type, and a light An imaging element having a flat incident surface, an adhesive layer for closely bonding the light emitting surface of the transparent optical member and the light incident surface of the imaging element, and between the light emitting surface and the light incident surface A light-shielding mask for flare countermeasures, which is inserted into the objective lens optical system and the transparent optical member and is aligned with an image circle formed on the light incident surface of the image sensor and has an opening having a smaller diameter than the image circle. wherein the imaging device is an image pickup element for single-chip color image capturing three primary colors or complementary color filters are stacked in each pixel, the light shielding mask for the flare of the imaging element OB pixels for black level detection is provided in a region is shielded, but a configuration in which the light shielding mask for the flare as a light-shielding film of the OB pixels are also used.
The imaging module for an endoscope of the present invention is an objective lens optical system, a transparent optical member that takes in subject image light from the objective lens optical system and emits it from a flat light exit surface, and a microlens non-mounting type. And an imaging element having a flat light incident surface, an adhesive layer for closely bonding the light emitting surface of the transparent optical member and the light incident surface of the imaging element, the light emitting surface, and the light incident surface. A light shielding for flare countermeasures, which is interposed between the objective lens optical system and the transparent optical member and is aligned with an image circle formed on the light incident surface of the image sensor and has an opening having a smaller diameter than the image circle. A mask, and the image pickup device is a single-plate color image pickup device in which three primary color or complementary color filters are stacked on each pixel. The area to be shielded by the disk, in which a peripheral circuit of the image pickup element is formed.

本発明の電子内視鏡装置は、内視鏡スコープ先端部に上記の内視鏡用撮像モジュールを内蔵したことを特徴とする。   An electronic endoscope apparatus according to the present invention is characterized in that the above-described endoscope imaging module is built in a distal end portion of an endoscope.

本発明によれば、撮像素子の光入射面直前に、フレア対策用の遮光マスクを設けたため、フレア光の撮像素子への入射が良好に遮断でき、高品質な画像を撮像することが可能となる。   According to the present invention, since the light-shielding mask for preventing flare is provided immediately before the light incident surface of the image sensor, it is possible to satisfactorily block the incidence of flare light to the image sensor and to capture a high-quality image. Become.

本発明の一実施形態に係る電子内視鏡装置の全体構成図である。1 is an overall configuration diagram of an electronic endoscope apparatus according to an embodiment of the present invention. 図1に示す電子内視鏡の先端部の先端面正面図である。It is a front end surface front view of the front-end | tip part of the electronic endoscope shown in FIG. 図1に示す電子内視鏡の先端部の縦断面図である。It is a longitudinal cross-sectional view of the front-end | tip part of the electronic endoscope shown in FIG. 図3の撮像素子部分の拡大断面模式図である。FIG. 4 is an enlarged schematic cross-sectional view of the image sensor portion of FIG. 3. 図3に示す実施形態のプリズム,フレア絞り,撮像素子の分解斜視図である。It is a disassembled perspective view of the prism of the embodiment shown in FIG. 3, a flare stop, and an image sensor. イメージサークルと撮像素子との関係の一例を示す図である。It is a figure which shows an example of the relationship between an image circle and an image pick-up element.

以下、本発明の一実施形態について、図面を参照して説明する。   Hereinafter, an embodiment of the present invention will be described with reference to the drawings.

以下、本発明の一実施形態について、図面を参照して説明する。   Hereinafter, an embodiment of the present invention will be described with reference to the drawings.

図1は本発明の一実施形態に係る電子内視鏡装置のシステム全体を示した構成図である。本実施形態の電子内視鏡装置(内視鏡システム)10は、内視鏡スコープ12と、本体装置を構成するプロセッサ装置14及び光源装置16とから構成される。内視鏡スコープ12は、患者(被検体)の体腔内に挿入される可撓性の挿入部20と、挿入部20の基端部分に連設された操作部22と、プロセッサ装置14及び光源装置16に接続されるユニバーサルコード24とを備えている。   FIG. 1 is a configuration diagram showing the entire system of an electronic endoscope apparatus according to an embodiment of the present invention. An electronic endoscope apparatus (endoscope system) 10 according to the present embodiment includes an endoscope scope 12, a processor device 14 and a light source device 16 that constitute a main body device. The endoscope scope 12 includes a flexible insertion portion 20 that is inserted into a body cavity of a patient (subject), an operation portion 22 that is connected to a proximal end portion of the insertion portion 20, a processor device 14, and a light source. And a universal cord 24 connected to the device 16.

挿入部20の先端には先端部26が連設され、先端部26内に、体腔内撮影用の撮像チップ(撮像装置)54(図3参照)が内蔵される。先端部26の後方には、複数の湾曲駒を連結した湾曲部28が設けられている。湾曲部28は、操作部22に設けられたアングルノブ30が操作されたとき、挿入部20内に挿設されたワイヤが押し/引きされ、上下左右方向に湾曲動作する。これにより、先端部26が体腔内で所望の方向に向けられる。   A distal end portion 26 is connected to the distal end of the insertion portion 20, and an imaging chip (imaging device) 54 (see FIG. 3) for intra-body cavity imaging is built in the distal end portion 26. Behind the distal end portion 26 is provided a bending portion 28 in which a plurality of bending pieces are connected. When the angle knob 30 provided in the operation section 22 is operated, the bending section 28 is bent / moved in the vertical and horizontal directions by pushing / pulling the wire inserted in the insertion section 20. Thereby, the front-end | tip part 26 is orientated in the desired direction within a body cavity.

ユニバーサルコード24の基端にはコネクタ36が設けられている。コネクタ36は、複合タイプのものであり、プロセッサ装置14に接続される他、光源装置16にも接続される。   A connector 36 is provided at the base end of the universal cord 24. The connector 36 is of a composite type and is connected to the light source device 16 in addition to being connected to the processor device 14.

プロセッサ装置14は、ユニバーサルコード24内に挿通されたケーブル68(図3参照)を介して内視鏡スコープ12に給電を行い、撮像チップ54の駆動を制御すると共に、撮像チップ54からケーブル68を介して伝送された撮像信号を受信し、受信した撮像信号に各種信号処理を施して画像データに変換する。   The processor device 14 supplies power to the endoscope scope 12 via a cable 68 (see FIG. 3) inserted into the universal cord 24, controls the driving of the imaging chip 54, and connects the cable 68 from the imaging chip 54. The received image signal is received, and various signal processing is performed on the received image signal to convert it into image data.

プロセッサ装置14で変換された画像データは、プロセッサ装置14にケーブル接続されたモニタ38に内視鏡撮影画像(観察画像)として表示される。また、プロセッサ装置14は、コネクタ36を介して光源装置16とも電気的に接続され、光源装置16を含め電子内視鏡装置10の動作を統括的に制御する。   The image data converted by the processor device 14 is displayed as an endoscopic image (observation image) on a monitor 38 connected to the processor device 14 by a cable. The processor device 14 is also electrically connected to the light source device 16 via the connector 36, and comprehensively controls the operation of the electronic endoscope device 10 including the light source device 16.

図2は、内視鏡スコープ12の先端部26の先端面26aを示した正面図である。図2に示すように、先端部26の先端面26aには、観察窓40と、照明窓42と、鉗子出口44と、送気・送水用ノズル46が設けられている。   FIG. 2 is a front view showing the distal end surface 26 a of the distal end portion 26 of the endoscope scope 12. As shown in FIG. 2, an observation window 40, an illumination window 42, a forceps outlet 44, and an air / water supply nozzle 46 are provided on the distal end surface 26 a of the distal end portion 26.

観察窓40は、先端面26aの中央且つ片側に偏心して配置されている。照明窓42は、観察窓40に関して対称な位置に2個配され、体腔内の被観察部位に光源装置16からの照明光を照射する。   The observation window 40 is arranged eccentric to the center and one side of the distal end surface 26a. Two illumination windows 42 are arranged at symmetrical positions with respect to the observation window 40, and irradiate illumination light from the light source device 16 to a site to be observed in the body cavity.

鉗子出口44は、挿入部20内に配設された鉗子チャンネル70(図3参照)に接続され、操作部22に設けられた鉗子口34(図1参照)に連通している。鉗子口34には、注射針や高周波メスなどが先端に配された各種処置具が挿通され、各種処置具の先端が鉗子出口44から体腔内に出される。   The forceps outlet 44 is connected to a forceps channel 70 (see FIG. 3) disposed in the insertion portion 20 and communicates with a forceps port 34 (see FIG. 1) provided in the operation portion 22. Various treatment tools having an injection needle, a high-frequency knife or the like disposed at the distal end are inserted into the forceps port 34, and the distal ends of the various treatment instruments are ejected from the forceps outlet 44 into the body cavity.

送気・送水用ノズル46は、操作部22に設けられた送気・送水ボタン32(図1参照)の操作に応じて、光源装置16に内蔵された送気・送水装置から供給される洗浄水や空気を、観察窓40や体腔内に向けて噴射する。   The air supply / water supply nozzle 46 is cleaned from the air supply / water supply device built in the light source device 16 in accordance with the operation of the air supply / water supply button 32 (see FIG. 1) provided in the operation unit 22. Water or air is jetted toward the observation window 40 or the body cavity.

図3は内視鏡スコープ12の先端部26の縦断面図である。図3に示すように、観察窓40の奥には、体腔内の被観察部位の像光を取り込むための対物レンズ光学系50を保持する鏡筒52が配設されている。鏡筒52は、挿入部20の中心軸に対物レンズ光学系50の光軸が平行となるように取り付けられている。鏡筒52の後端には、対物レンズ光学系50を経由した被観察部位の像光を、略直角に曲げて撮像チップ54に向けて導光するプリズム56が接続されている。   FIG. 3 is a longitudinal sectional view of the distal end portion 26 of the endoscope scope 12. As shown in FIG. 3, a lens barrel 52 that holds an objective lens optical system 50 for taking in image light of a site to be observed in the body cavity is disposed behind the observation window 40. The lens barrel 52 is attached so that the optical axis of the objective lens optical system 50 is parallel to the central axis of the insertion portion 20. Connected to the rear end of the lens barrel 52 is a prism 56 that guides the image light of the site to be observed via the objective lens optical system 50 toward the imaging chip 54 by bending it at a substantially right angle.

撮像チップ54は、半導体チップに信号読出回路が形成されその上に有機層でなる光電変換層が積層された単板式のカラー画像撮像用の撮像素子58と、撮像素子58の駆動及び信号の入出力を行う周辺回路60が半導体チップに形成された撮像チップであり、支持基板62上に実装されている。   The imaging chip 54 includes a single-chip imaging device 58 for color image imaging in which a signal reading circuit is formed on a semiconductor chip and a photoelectric conversion layer made of an organic layer is stacked thereon, and driving of the imaging device 58 and input of signals. A peripheral circuit 60 that performs output is an imaging chip formed on a semiconductor chip, and is mounted on a support substrate 62.

撮像素子58の撮像面(受光面)58aは、プリズム56の光出射面と対向するように配置されている。そして、詳細は図4で後述するように、プリズム56の光出射面に、撮像素子58の受光面が、フレア絞りを介して接着材により貼り付けられている。   The imaging surface (light receiving surface) 58 a of the imaging element 58 is disposed so as to face the light emitting surface of the prism 56. As will be described in detail later with reference to FIG. 4, the light receiving surface of the image sensor 58 is attached to the light emitting surface of the prism 56 with an adhesive via a flare stop.

挿入部20の後端に向けて延設された支持基板62の後端部には、複数の入出力端子62aが支持基板62の幅方向に並べて設けられている。入出力端子62aには、ユニバーサルコード24を介してプロセッサ装置14との各種信号のやり取りを媒介するための信号線66が接合されている。入出力端子62aは、支持基板62に形成された配線やボンディングパッド等(図示せず)を介して撮像チップ54内の周辺回路60と電気的に接続されている。   A plurality of input / output terminals 62 a are arranged in the width direction of the support substrate 62 at the rear end portion of the support substrate 62 extending toward the rear end of the insertion portion 20. A signal line 66 for mediating the exchange of various signals with the processor device 14 through the universal cord 24 is joined to the input / output terminal 62a. The input / output terminal 62a is electrically connected to the peripheral circuit 60 in the imaging chip 54 via wiring, bonding pads, etc. (not shown) formed on the support substrate 62.

信号線66は、可撓性の管状のケーブル68内にまとめて挿通されている。ケーブル68は、挿入部20、操作部22、及びユニバーサルコード24の各内部を挿通し、コネクタ36に接続されている。   The signal lines 66 are collectively inserted into a flexible tubular cable 68. The cable 68 is inserted through each of the insertion unit 20, the operation unit 22, and the universal cord 24 and is connected to the connector 36.

また、図2,図3では図示を省略しているが、照明窓42の奥には、照明部が設けられている。照明部には、光源装置16からの照明光を導くライトガイドの光出射端が配されており、この光出射端が照明窓42に対面して設けられている。ライトガイドは、ケーブル68と同様に、挿入部20、操作部22、及びユニバーサルコード24の各内部を挿通し、コネクタ36に入射端が接続されている。   Although not shown in FIGS. 2 and 3, an illumination unit is provided in the back of the illumination window 42. The illumination unit is provided with a light guide end of a light guide that guides illumination light from the light source device 16, and the light exit end is provided facing the illumination window 42. Like the cable 68, the light guide is inserted through each of the insertion unit 20, the operation unit 22, and the universal cord 24, and the incident end is connected to the connector 36.

図4は、図3に示す撮像素子58部分の拡大断面模式図である。光電変換層積層型の撮像素子58は、半導体基板110に形成される。この半導体基板110の表面部には、信号読出回路としてのCMOS回路等のMOS回路71が画素毎に形成されている。信号読出回路は、CCD型でも良い。光電変換層積層型撮像素子については、本願出願人が先に出願し既に公開された特開2011―243945号などがある。   FIG. 4 is an enlarged schematic cross-sectional view of the image sensor 58 portion shown in FIG. The photoelectric conversion layer stacked type imaging device 58 is formed on the semiconductor substrate 110. On the surface of the semiconductor substrate 110, a MOS circuit 71 such as a CMOS circuit as a signal readout circuit is formed for each pixel. The signal readout circuit may be a CCD type. JP-A-2011-243945, which was previously filed by the applicant of the present application and has already been disclosed, is known as a photoelectric conversion layer stacked type imaging device.

半導体基板110の表面には絶縁層111が積層されると共に、この絶縁層111内に配線層112が埋設される。この配線層112は、上層を透過して洩れてきた入射光が信号読出回路71等に入射しない様にする遮蔽板の機能も果たす。   An insulating layer 111 is laminated on the surface of the semiconductor substrate 110, and a wiring layer 112 is embedded in the insulating layer 111. The wiring layer 112 also functions as a shielding plate that prevents incident light that has leaked through the upper layer from entering the signal readout circuit 71 and the like.

絶縁層111の表面には、画素毎に区分けされ上方から見たとき正方格子状に配列される複数の画素電極膜113が成膜されている。各画素電極膜113には、半導体基板110の表面にまで達する縦配線114が立設され、各縦配線114は、半導体基板110の表面に形成された図示省略の信号電荷蓄積部に接続される。   On the surface of the insulating layer 111, a plurality of pixel electrode films 113 are formed which are divided for each pixel and are arranged in a square lattice when viewed from above. Each pixel electrode film 113 is provided with a vertical wiring 114 extending up to the surface of the semiconductor substrate 110, and each vertical wiring 114 is connected to a signal charge storage unit (not shown) formed on the surface of the semiconductor substrate 110. .

画素毎に設けられた信号読出回路71は、対応する信号電荷蓄積部に蓄積された信号電荷量に応じた信号を被写体画像信号として外部に読み出す様になっている。なお、画素電極膜113は、本実施形態では、有効画素領域とOB部とに設けられる。   The signal readout circuit 71 provided for each pixel reads out a signal corresponding to the signal charge amount stored in the corresponding signal charge storage unit to the outside as a subject image signal. Note that the pixel electrode film 113 is provided in the effective pixel region and the OB portion in this embodiment.

正方格子状に配列形成された複数の画素電極膜113の上には、光電変換機能を有する受光層103が各画素電極膜共通に一枚構成で積層され、その上に、同様に一枚構成の上部電極膜(対向電極膜,共通電極膜ともいう。)104が、画素電極膜113に対して光入射側の上層として積層される。図3で説明した受光面58aは、受光層103が該当し、受光層103と、これを上下に挟む下部電極膜(画素電極膜)113,上部電極膜104とで光電変換部が形成される。   On the plurality of pixel electrode films 113 arranged in a square lattice pattern, a light receiving layer 103 having a photoelectric conversion function is laminated in a single configuration in common with each pixel electrode film. The upper electrode film (also referred to as a counter electrode film or a common electrode film) 104 is stacked on the pixel electrode film 113 as an upper layer on the light incident side. The light receiving surface 58a described in FIG. 3 corresponds to the light receiving layer 103, and a photoelectric conversion portion is formed by the light receiving layer 103, the lower electrode film (pixel electrode film) 113 and the upper electrode film 104 sandwiching the light receiving layer 103 vertically. .

上部電極膜104は、絶縁層111の表面に露出する対向電圧供給電極膜115に配線116を介して電気的に接続状態となっており、配線116を介して、撮像素子外部から所要電圧が印加される。   The upper electrode film 104 is electrically connected to the counter voltage supply electrode film 115 exposed on the surface of the insulating layer 111 through the wiring 116, and a required voltage is applied from the outside of the imaging device through the wiring 116. Is done.

上部電極膜104の上には保護層117が積層され、その上に、各画素電極膜113に対応するカラーフィルタ120が積層される。例えば三原色の赤(R)緑(G)青(B)のカラーフィルタがベイヤ配列され、或いは、補色系のカラーフィルタが積層される。カラーフィルタ層120の上に、オーバーコート層(保護層)118が積層される。   A protective layer 117 is laminated on the upper electrode film 104, and a color filter 120 corresponding to each pixel electrode film 113 is laminated thereon. For example, three primary color red (R), green (G), and blue (B) color filters are arranged in a Bayer array, or complementary color color filters are stacked. An overcoat layer (protective layer) 118 is laminated on the color filter layer 120.

上述した上部電極膜104は、受光層103に光を入射させる必要があるため入射光に対して透明な導電性材料で構成される。上部電極膜104の材料としては、可視光に対する透過率が高く、抵抗値が小さい透明導電性酸化物(TCO:Transparent Conducting Oxide)を用いることができる。   Since the upper electrode film 104 described above needs to make light incident on the light receiving layer 103, it is made of a conductive material transparent to the incident light. As a material of the upper electrode film 104, a transparent conductive oxide (TCO) having a high transmittance for visible light and a small resistance value can be used.

Au(金)などの金属薄膜も用いることができるが、透過率を90%以上得ようとして膜厚を薄くすると、抵抗値が極端に増大するため、TCOの方が好ましい。TCOとして、特に、酸化インジウム錫(ITO)、酸化インジウム、酸化錫、弗素ドープ酸化錫(FTO)、酸化亜鉛、アルミニウムドープ酸化亜鉛(AZO)、酸化チタン等を好ましく用いることができる。プロセス簡易性、低抵抗性、透明性の観点からはITOが最も好ましい。なお、上部電極膜104は、実施形態では全画素で共通の一枚構成としているが、画素毎に分割し各々を電源に接続する構成であっても良い。   A metal thin film such as Au (gold) can also be used. However, if the film thickness is reduced in order to obtain a transmittance of 90% or more, the resistance value increases drastically, so TCO is preferable. As TCO, indium tin oxide (ITO), indium oxide, tin oxide, fluorine-doped tin oxide (FTO), zinc oxide, aluminum-doped zinc oxide (AZO), titanium oxide, and the like can be preferably used. ITO is most preferable from the viewpoints of process simplicity, low resistance, and transparency. Note that the upper electrode film 104 is configured to be common to all pixels in the embodiment, but may be configured to be divided for each pixel and connected to a power source.

下部電極膜(画素電極膜)113は、画素毎に分割された薄膜であり、透明又は不透明の導電性材料で構成される。下部電極膜113の材料として、Cr,In,Al,Ag、W、TiN(窒化チタン)等の金属や、TCOを用いることができる。   The lower electrode film (pixel electrode film) 113 is a thin film divided for each pixel, and is made of a transparent or opaque conductive material. As a material of the lower electrode film 113, a metal such as Cr, In, Al, Ag, W, TiN (titanium nitride), or TCO can be used.

保護層117、オーバーコート層118は、透明な絶縁材料、シリコン酸化膜、シリコン窒化膜、酸化ジルコニウム、酸化タンタル、酸化チタン、酸化ハフニウム、酸化マグネシウム、アルミナ(Al)、ポリパラキシレン系樹脂、アクリル樹脂、全フッ素透明樹脂(サイトップ)等で構成される。 The protective layer 117 and the overcoat layer 118 are made of a transparent insulating material, silicon oxide film, silicon nitride film, zirconium oxide, tantalum oxide, titanium oxide, hafnium oxide, magnesium oxide, alumina (Al 2 O 3 ), polyparaxylene-based Resin, acrylic resin, all-fluorine transparent resin (Cytop), etc.

保護層117、オーバーコート層118は、化学気相法(CVD法)、原子層堆積法(ALD ALCVD)等の周知の技術で形成し、必要に応じてCVD法、原子層堆積法等で堆積された複数の絶縁膜と組み合わせた多層膜であってもよい。平滑化層、オーバーコート層は、成膜した後、化学機械研磨(CMP)により、凸部を除去し平滑、平坦化する。   The protective layer 117 and the overcoat layer 118 are formed by a known technique such as a chemical vapor deposition method (CVD method) or an atomic layer deposition method (ALD ALCVD), and are deposited by a CVD method, an atomic layer deposition method, or the like as necessary. It may be a multilayer film combined with a plurality of insulating films. The smoothing layer and the overcoat layer are formed and then smoothed and flattened by removing the convex portions by chemical mechanical polishing (CMP).

保護層117、オーバーコート層118の厚みはそれぞれの機能を果たし、かつ極力薄いことが望ましく、それぞれ、0.1μm〜10μmが好ましい。   The thickness of the protective layer 117 and the overcoat layer 118 fulfills their respective functions and is desirably as thin as possible, preferably 0.1 μm to 10 μm.

半導体基板110には、図3で説明したように、周辺回路60も形成される。撮像素子58は、半導体基板110からオーバーコート層118までであるが、この撮像素子58のオーバーコート層118表面を、プリズム56の光出射面56aに、直に、接着材120で貼り付ける。   As described with reference to FIG. 3, the peripheral circuit 60 is also formed on the semiconductor substrate 110. The image sensor 58 extends from the semiconductor substrate 110 to the overcoat layer 118, and the surface of the overcoat layer 118 of the image sensor 58 is directly attached to the light emitting surface 56 a of the prism 56 with the adhesive 120.

このとき、例えばグラファイトフィルム等の黒色且つ反射の無い薄い(例えば厚さ10μm〜30μm)のフィルムに所定径の孔121aを開けたフレア絞り(遮光マスク)121をオーバーコート層118と接着材層120との間に挟み込む。接着材層120は、遮光マスク121の厚み分を吸収し、プリズム56の光出射面56aとオーバーコート層118表面とが平行となるように固着する。   At this time, for example, a flare diaphragm (light-shielding mask) 121 in which a hole 121a having a predetermined diameter is formed in a black and non-reflective thin film (for example, a thickness of 10 μm to 30 μm) such as a graphite film is used as an overcoat layer 118 and an adhesive layer 120. And put between. The adhesive layer 120 absorbs the thickness of the light shielding mask 121 and is fixed so that the light emitting surface 56a of the prism 56 and the surface of the overcoat layer 118 are parallel to each other.

図5は、撮像チップ54と遮光マスク(フレア絞り)121とプリズム56の分解斜視図である。プリズム56が取り付けられている対物レンズ光学系50の図示は省略している。このプリズム56の光出射面に、遮光マスク121を介して、撮像チップ54の撮像素子58表面を接着材を介して貼り付けることで、撮像モジュールが製造される。   FIG. 5 is an exploded perspective view of the imaging chip 54, the light shielding mask (flare stop) 121, and the prism 56. The illustration of the objective lens optical system 50 to which the prism 56 is attached is omitted. The imaging module is manufactured by attaching the surface of the imaging element 58 of the imaging chip 54 to the light emitting surface of the prism 56 via the light shielding mask 121 via an adhesive.

この遮光マスク121に開けられている開口121aは、対物レンズ光学系50及びプリズム56を介して撮像素子58の受光面に形成されるイメージサークルと同心となるように整合し該イメージサークルより若干小径の円となる様に、開口されている。   The opening 121a opened in the light shielding mask 121 is aligned to be concentric with the image circle formed on the light receiving surface of the image sensor 58 via the objective lens optical system 50 and the prism 56, and is slightly smaller in diameter than the image circle. It is opened so as to be a circle.

本実施形態の撮像素子58は、トップレンズ(マイクロレンズ)非搭載型である。トップレンズを設けなくても、受光面全面を受光素子(光電変換部)として利用でき、受光感度が高いためである。   The image sensor 58 of this embodiment is a top lens (microlens) non-mounting type. This is because even if a top lens is not provided, the entire light receiving surface can be used as a light receiving element (photoelectric conversion unit) and the light receiving sensitivity is high.

このため、撮像素子58の表面(オーバーコート層118の表面)は平面となっている。この表面を、遮光マスク(フレア絞り)121を間に挟み、接着材120により、プリズム56の光出射面(平面)に密着して貼り付ける。密着させる領域は、プリズム56の光出射面と撮像素子58の表面とが重なり合う領域の全面である。   For this reason, the surface of the image sensor 58 (the surface of the overcoat layer 118) is flat. This surface is attached in close contact with the light emitting surface (flat surface) of the prism 56 with an adhesive 120 with a light shielding mask (flare stop) 121 interposed therebetween. The area to be in close contact is the entire area where the light emitting surface of the prism 56 and the surface of the image sensor 58 overlap.

これにより、プリズム56と撮像素子58とは、両者間に少しの隙間もなく固着され、撮像素子58の表面はプリズム56によって保護され、且つ防湿も図られる。   As a result, the prism 56 and the image sensor 58 are fixed without any gap therebetween, and the surface of the image sensor 58 is protected by the prism 56 and is also moisture-proof.

仮に、撮像素子の各画素がトップレンズを搭載している場合、トップレンズ相互間の隙間を埋めるように接着材120を塗ってしまうと、トップレンズと隙間との屈折率差が小さくなってレンズ機能が低下してしまう。このため、トップレンズ搭載型の撮像素子の場合、レンズ機能を損なわないように、例えば特開2010―98066号公報記載の様に、トップレンズから若干離間してカバーガラスを貼り付ける必要が生じる。   If each pixel of the image sensor has a top lens, if the adhesive 120 is applied so as to fill the gap between the top lenses, the difference in refractive index between the top lens and the gap becomes small. Function will be reduced. For this reason, in the case of a top lens mounting type image pickup device, it is necessary to attach a cover glass slightly apart from the top lens, for example, as described in JP 2010-98066 A, so as not to impair the lens function.

つまり、トップレンズとカバーガラスとの間の隙間に、フレア絞り121を設ける必要が生じる。この様にすると、フレア絞り121を通過後に入射光が乱反射して発生した迷光が各画素に入射し、フレアの画像が撮像されてしまう虞がある。また、隙間が存在するため、その防湿を図る必要が生じる。   That is, it is necessary to provide the flare stop 121 in the gap between the top lens and the cover glass. In this way, stray light generated by irregular reflection of incident light after passing through the flare stop 121 may enter each pixel and a flare image may be captured. Further, since there is a gap, it is necessary to prevent moisture.

しかるに、上述した本発明の実施形態では、上記の隙間が存在しないため、フレアを最小限に抑えることができ、しかも、撮像素子受光面の防湿を、別途図る必要がなくなる。   However, in the above-described embodiment of the present invention, since the gap is not present, flare can be minimized, and further, it is not necessary to separately provide moisture-proofing on the light receiving surface of the image sensor.

なお、上述した実施形態では、フレア絞り121を黒色フィルムで形成した。しかし、オーバーコート層118の表面に、黒色塗料を印刷技術で厚手に塗ってフレア絞り121を形成し、プリズム56の光出射面に撮像素子58のオーバーコート層118を直に接着材120で貼り付けても良い。   In the above-described embodiment, the flare stop 121 is formed of a black film. However, a black paint is thickly applied to the surface of the overcoat layer 118 by a printing technique to form the flare stop 121, and the overcoat layer 118 of the image sensor 58 is directly attached to the light emitting surface of the prism 56 with the adhesive 120. May be attached.

或いは逆に、プリズム56の光出射面に印刷技術で黒色塗料を厚手に塗ってフレア絞り121を形成し、プリズム56の光出射面に撮像素子58のオーバーコート層118を直に接着材120で貼り付けても良い。   Or, conversely, a black paint is thickly applied to the light exit surface of the prism 56 by a printing technique to form the flare stop 121, and the overcoat layer 118 of the image sensor 58 is directly applied to the light exit surface of the prism 56 with the adhesive 120. It may be pasted.

接着材120としては、例えば、熱硬化性の透明樹脂、或いは紫外線硬化性の透明樹脂を用いれば良く、プリズム56と撮像素子58とを密着状態に維持したまま接着面に熱または紫外線を当てることで、接着材120を硬化させることができる。   As the adhesive 120, for example, a thermosetting transparent resin or an ultraviolet curable transparent resin may be used, and heat or ultraviolet light is applied to the adhesive surface while the prism 56 and the image sensor 58 are kept in close contact with each other. Thus, the adhesive 120 can be cured.

図6は、プリズム56の光出射面から撮像素子58側を見た図であり、イメージサークル(≒遮光マスク開口121a)と撮像素子58との関係を示す図である。矩形形状の撮像素子58の受光面には、対物レンズ光学系を通りプリズム56で直角方向に曲げられた入射光のイメージサークルが形成され、このイメージサークルと整合する開口121aが開けられた遮光マスク(フレア絞り)121が設けられる。   FIG. 6 is a diagram of the image sensor 58 side as viewed from the light exit surface of the prism 56, and is a diagram illustrating the relationship between the image circle (≈the light shielding mask opening 121a) and the image sensor 58. On the light-receiving surface of the rectangular imaging element 58, an image circle of incident light that is bent in a right angle direction by the prism 56 through the objective lens optical system is formed, and a light-shielding mask having an opening 121a that matches the image circle. A (flare stop) 121 is provided.

図示する例では、撮像素子58の矩形の受光面の四隅(クロスハッチングした領域)72に、フレア絞り121で遮光された領域ができる。本実施形態では、この領域72にも、上述した画素電極膜113,受光層103,上部電極膜104、カラーフィルタ層120を設けておく。   In the example shown in the figure, regions shielded by the flare stop 121 are formed at the four corners (cross-hatched regions) 72 of the rectangular light receiving surface of the image sensor 58. In the present embodiment, the pixel electrode film 113, the light receiving layer 103, the upper electrode film 104, and the color filter layer 120 described above are also provided in this region 72.

つまり、フレア絞り121で遮光された領域72にOB部を設け、フレア絞り121を、OB部の遮光膜と兼用させる。これにより、撮像素子58の領域とは別にOB部を設ける必要がなくなり、撮像素子58の小型化を図ることができる(例えば、上記した特開2011―243945号公報記載の光電変換膜積層型撮像素子は、撮像素子とOB部とを別領域に設けている。)。   That is, the OB portion is provided in the region 72 shielded by the flare stop 121, and the flare stop 121 is also used as the light shielding film of the OB portion. Accordingly, it is not necessary to provide an OB portion separately from the area of the image sensor 58, and the image sensor 58 can be reduced in size (for example, the photoelectric conversion film stacked imaging described in Japanese Patent Application Laid-Open No. 2011-243945 described above). The element is provided with an image sensor and an OB portion in separate areas.)

尚、領域72にOB部を設けるのではなく、他の回路(例えば周辺回路)を設けることで小型化を図っても良い。   In addition, instead of providing the OB portion in the region 72, the size may be reduced by providing another circuit (for example, a peripheral circuit).

領域72にOB部を設け、そのOB画素にカラーフィルタを搭載することで、Rフィルタ搭載画素のOB信号、Gフィルタ搭載画素のOB信号、Bフィルタ搭載画素のOB信号を得ることが可能となる。黒レベル信号のオフセット量は、搭載カラーフィルタの色毎に異なることが多い。このため、カラーフィルタの色毎のOB画素積算値を求め、精度良く、オフセット量を算出することが可能となり、ノイズが少なく高品質な画像を撮像することが可能となる。   By providing an OB portion in the region 72 and mounting a color filter on the OB pixel, it is possible to obtain an OB signal for an R filter mounted pixel, an OB signal for a G filter mounted pixel, and an OB signal for a B filter mounted pixel. . The offset amount of the black level signal is often different for each color of the mounted color filter. For this reason, the OB pixel integrated value for each color of the color filter can be obtained, the offset amount can be calculated with high accuracy, and a high-quality image with less noise can be taken.

OB画素の検出信号は必要時以外には読み出さず、信号読出の高速化と省電力化を図ることも可能である。   The detection signal of the OB pixel is not read except when necessary, and it is possible to speed up the signal reading and save power.

上述した実施形態の様に、プリズム56の光出射面56aに撮像素子58の光入射面を、重なり領域全域で密着させることができるのは、半導体基板110上に光電変換層(受光層)103等を積層した構造のためである。つまり、光電変換層積層部分が半導体基板表面から上方に突き出た構造(ワイヤボンディングが邪魔にならない構造)になっているからである。半導体に形成した回路素子に接続する接続パッドは半導体基板表面部に形成され、撮像素子の光入射面は半導体基板から上方の離れた位置に形成されるため、撮像素子の光入射面をプリズム56の光出射面に密着させ貼り付けることができる。   As in the above-described embodiment, the light incident surface of the image sensor 58 can be brought into close contact with the light emitting surface 56 a of the prism 56 over the entire overlapping region. The photoelectric conversion layer (light receiving layer) 103 is formed on the semiconductor substrate 110. This is because of a laminated structure. That is, it is because the photoelectric conversion layer laminated portion protrudes upward from the surface of the semiconductor substrate (a structure in which wire bonding does not interfere). The connection pads connected to the circuit elements formed on the semiconductor are formed on the surface of the semiconductor substrate, and the light incident surface of the image sensor is formed at a position away from the semiconductor substrate. It can stick and affix to the light-projection surface.

このため、信号読出回路やその接続端子と、入射光の入射面とが反対側に来る裏面照射型撮像素子にも上述した実施形態を適用可能となる。裏面照射型撮像素子も、トップレンズを設ける必要が無く、光入射面が平面である。このため、プリズムの光出射面の広い領域に、撮像素子の光入射面で密着して固定することができる。   For this reason, the above-described embodiment can also be applied to a backside illumination type image pickup device in which the signal readout circuit and its connection terminal and the incident light incident surface are opposite to each other. The back-illuminated image sensor does not need to be provided with a top lens, and the light incident surface is flat. For this reason, it can be fixed in close contact with the light incident surface of the image sensor on a wide area of the light exit surface of the prism.

また、上述した実施形態では、プリズム56を用いて、光入射光軸を直角方向に曲げた。しかし、例えば特許文献2に記載されている様に、対物レンズ光学系から出射される像光をそのまま垂直に受光面で受光する撮像素子であれば、プリズムを用いずに、平行平板の透明カバーガラスをプリズムに替えて用いれば良い。この場合も、カバーガラスと撮像素子受光面との間にフレア絞り121を介挿し両者間を密着して貼り合わせれば良い。   In the above-described embodiment, the light incident optical axis is bent in a right angle direction using the prism 56. However, as described in Patent Document 2, for example, an imaging element that directly receives image light emitted from an objective lens optical system directly on a light receiving surface without using a prism, without using a prism, Glass may be used instead of a prism. In this case as well, a flare stop 121 may be inserted between the cover glass and the light receiving surface of the image sensor, and the two may be bonded together.

以上述べた様に、実施形態の内視鏡用撮像モジュールは、対物レンズ光学系と、該対物レンズ光学系からの被写体像光を取り込み平面の光出射面から出射する透明光学部材と、マイクロレンズ非搭載型で且つ光入射面が平面の撮像素子と、前記透明光学部材の前記光出射面と前記撮像素子の前記光入射面とを密に貼り合わせる接着材層と、前記光出射面と前記光入射面との間に介挿され前記対物レンズ光学系及び前記透明光学部材を通り前記撮像素子の光入射面に形成されるイメージサークルに整合し該イメージサークルより小径の開口が形成されたフレア対策用の遮光マスクとを備えることを特徴とする。   As described above, the imaging module for an endoscope according to the embodiment includes an objective lens optical system, a transparent optical member that captures subject image light from the objective lens optical system and emits it from a flat light exit surface, and a microlens. An imaging device that is not mounted and has a flat light incident surface, an adhesive layer that tightly bonds the light emitting surface of the transparent optical member and the light incident surface of the imaging device, the light emitting surface, and the light emitting surface A flare that is interposed between a light incident surface, passes through the objective lens optical system and the transparent optical member, is aligned with an image circle formed on the light incident surface of the image sensor, and an opening having a smaller diameter than the image circle is formed. And a light shielding mask for countermeasures.

また、実施形態の内視鏡用撮像モジュールは、前記撮像素子が、光電変換層積層型であることを特徴とする。   In the endoscope imaging module of the embodiment, the imaging element is a photoelectric conversion layer stacked type.

また、実施形態の内視鏡用撮像モジュールは、前記透明光学部材が、前記対物レンズ光学系から出射された被写体像光の光路を略直角方向に曲げて前記撮像素子の光入射面に入射させる直角プリズムであることを特徴とする。   In the endoscope imaging module according to the embodiment, the transparent optical member bends the optical path of the subject image light emitted from the objective lens optical system in a substantially right angle direction so as to enter the light incident surface of the imaging element. It is a right angle prism.

また、実施形態の内視鏡用撮像モジュールは、前記透明光学部材が、前記対物レンズ光学系から出射された被写体像光を透過させて前記撮像素子の光入射面に入射させる平行平板でなるカバーガラスであることを特徴とする。   In the endoscope imaging module according to the embodiment, the transparent optical member is a cover formed of a parallel plate that transmits the subject image light emitted from the objective lens optical system and enters the light incident surface of the imaging element. It is characterized by being glass.

また、実施形態の内視鏡用撮像モジュールの前記撮像素子は、各画素に三原色または補色系のカラーフィルタが積層された単板式カラー画像撮像用の撮像素子であることを特徴とする。   In addition, the image pickup device of the endoscope image pickup module of the embodiment is a single-plate color image pickup image pickup device in which three primary color or complementary color system color filters are stacked on each pixel.

また、実施形態の内視鏡用撮像モジュールは、前記撮像素子のうち前記フレア対策用の遮光マスクで遮光される領域に黒レベル検出用のOB画素が設けられ、該OB画素の遮光膜として前記フレア対策用の遮光マスクが兼用される構成を特徴とする。   In the endoscope imaging module according to the embodiment, an OB pixel for black level detection is provided in a region shielded by the shading mask for preventing flare in the imaging element, and the light shielding film of the OB pixel serves as the light shielding film. The light-shielding mask for preventing flare is also used as a feature.

また、実施形態の内視鏡用撮像モジュールの前記OB画素には、前記カラーフィルタの色毎の黒レベル信号を検出するためのカラーフィルタが積層されていることを特徴とする。   In addition, the OB pixel of the endoscope imaging module according to the embodiment is characterized in that a color filter for detecting a black level signal for each color of the color filter is stacked.

また、実施形態の内視鏡用撮像モジュールは、前記撮像素子のうち前記フレア対策用の遮光マスクで遮光される領域に、該撮像素子の周辺回路が形成されることを特徴とする。   The endoscope imaging module according to the embodiment is characterized in that a peripheral circuit of the imaging element is formed in an area of the imaging element that is shielded by the light shielding mask for preventing flare.

また、実施形態の電子内視鏡装置は、上記のいずれかに記載の内視鏡用撮像モジュールを内視鏡スコープ先端部に内蔵したことを特徴とする。   Moreover, the electronic endoscope apparatus according to the embodiment is characterized in that the endoscope imaging module described in any one of the above is built in the distal end portion of the endoscope scope.

以上述べた実施形態によれば、撮像素子の光入射面直前にフレア対策用の遮光マスクを設けたため、フレア光の撮像素子受光面への入射を阻止することが可能となり、高品質な画像を撮像することができる。   According to the embodiment described above, since the anti-flare mask is provided immediately before the light incident surface of the image sensor, it is possible to prevent the flare light from being incident on the image sensor light receiving surface, and a high-quality image can be obtained. An image can be taken.

本発明に係る内視鏡用撮像モジュールは、フレア光の撮像素子受光面への入射を良好に阻止することができるため、電子内視鏡装置のスコープ先端部に内蔵させると有用である。   The imaging module for an endoscope according to the present invention can effectively prevent flare light from entering the light-receiving surface of the imaging device, and thus is useful when incorporated in the distal end of a scope of an electronic endoscope apparatus.

10 電子内視鏡装置(内視鏡システム)
12 内視鏡スコープ
14 プロセッサ装置
16 光源装置
26 先端部
38 モニタ
40 観察窓
42 照明窓
50 対物レンズ光学系
54 撮像チップ
56 直角プリズム
56a プリズム光出射面
58 撮像素子(イメージセンサ)
58a 撮像素子受光面
62 基板
68 ケーブル
71 信号読出回路
103 受光層(光電変換層)
104 上部電極膜
110 半導体基板
113 画素電極膜
118 オーバーコート層
120 カラーフィルタ層
121 遮光マスク(フレア絞り)
121a フレア絞りの開口
10 Electronic Endoscope Device (Endoscope System)
DESCRIPTION OF SYMBOLS 12 Endoscope scope 14 Processor apparatus 16 Light source apparatus 26 Tip part 38 Monitor 40 Observation window 42 Illumination window 50 Objective lens optical system 54 Imaging chip 56 Right angle prism 56a Prism light emission surface 58 Imaging element (image sensor)
58a Image sensor light receiving surface 62 Substrate 68 Cable 71 Signal readout circuit 103 Light receiving layer (photoelectric conversion layer)
104 Upper electrode film 110 Semiconductor substrate 113 Pixel electrode film 118 Overcoat layer 120 Color filter layer 121 Shading mask (flare stop)
121a Flare aperture

Claims (10)

対物レンズ光学系と、該対物レンズ光学系からの被写体像光を取り込み平面の光出射面から出射する透明光学部材と、マイクロレンズ非搭載型で且つ光入射面が平面の撮像素子と、前記透明光学部材の前記光出射面と前記撮像素子の前記光入射面とを密に貼り合わせる接着材層と、前記光出射面と前記光入射面との間に介挿され前記対物レンズ光学系及び前記透明光学部材を通り前記撮像素子の光入射面に形成されるイメージサークルに整合し該イメージサークルより小径の開口が形成されたフレア対策用の遮光マスクとを備え、
前記撮像素子は、各画素に三原色または補色系のカラーフィルタが積層された単板式カラー画像撮像用の撮像素子であり、
前記撮像素子のうち前記フレア対策用の遮光マスクで遮光される領域に黒レベル検出用のOB画素が設けられ、該OB画素の遮光膜として前記フレア対策用の遮光マスクが兼用される構成である内視鏡用撮像モジュール。
An objective lens optical system, a transparent optical member that captures subject image light from the objective lens optical system and emits it from a planar light exit surface, a microlens non-mounted image sensor with a flat light incident surface, and the transparent An adhesive layer for closely bonding the light emitting surface of the optical member and the light incident surface of the imaging element; and the objective lens optical system and the optical system interposed between the light emitting surface and the light incident surface A light-shielding mask for anti-flare that is aligned with an image circle formed on a light incident surface of the image sensor through a transparent optical member and has an opening having a smaller diameter than the image circle;
The image sensor is an image sensor for imaging a single plate color image in which color filters of three primary colors or complementary colors are stacked on each pixel,
A black level detection OB pixel is provided in a region shielded by the flare countermeasure light shielding mask of the image sensor, and the flare countermeasure light shielding mask is also used as a light shielding film of the OB pixel. An imaging module for an endoscope.
請求項1に記載の内視鏡用撮像モジュールであって、前記撮像素子が、光電変換層積層型である内視鏡用撮像モジュール。   The endoscope imaging module according to claim 1, wherein the imaging element is a photoelectric conversion layer stacked type. 請求項1又は請求項2に記載の内視鏡用撮像モジュールであって、前記透明光学部材が、前記対物レンズ光学系から出射された被写体像光の光路を略直角方向に曲げて前記撮像素子の光入射面に入射させる直角プリズムである内視鏡用撮像モジュール。   3. The endoscope imaging module according to claim 1, wherein the transparent optical member bends an optical path of subject image light emitted from the objective lens optical system in a substantially perpendicular direction. An imaging module for an endoscope which is a right-angle prism that is incident on the light incident surface of the endoscope. 請求項1又は請求項2に記載の内視鏡用撮像モジュールであって、前記透明光学部材が、前記対物レンズ光学系から出射された被写体像光を透過させて前記撮像素子の光入射面に入射させる平行平板でなるカバーガラスである内視鏡用撮像モジュール。   3. The endoscope imaging module according to claim 1, wherein the transparent optical member transmits object image light emitted from the objective lens optical system to a light incident surface of the imaging element. An imaging module for an endoscope, which is a cover glass made of parallel flat plates to be incident. 請求項1乃至請求項4のいずれか1項に記載の内視鏡用撮像モジュールであって、前記OB画素には、前記カラーフィルタの色毎の黒レベル信号を検出するためのカラーフィルタが積層されている内視鏡用撮像モジュール。 The endoscope imaging module according to any one of claims 1 to 4 , wherein a color filter for detecting a black level signal for each color of the color filter is stacked on the OB pixel. An imaging module for an endoscope. 対物レンズ光学系と、該対物レンズ光学系からの被写体像光を取り込み平面の光出射面から出射する透明光学部材と、マイクロレンズ非搭載型で且つ光入射面が平面の撮像素子と、前記透明光学部材の前記光出射面と前記撮像素子の前記光入射面とを密に貼り合わせる接着材層と、前記光出射面と前記光入射面との間に介挿され前記対物レンズ光学系及び前記透明光学部材を通り前記撮像素子の光入射面に形成されるイメージサークルに整合し該イメージサークルより小径の開口が形成されたフレア対策用の遮光マスクとを備え、
前記撮像素子は、各画素に三原色または補色系のカラーフィルタが積層された単板式カラー画像撮像用の撮像素子であり、
前記撮像素子のうち前記フレア対策用の遮光マスクで遮光される領域に、該撮像素子の周辺回路が形成される内視鏡用撮像モジュール。
An objective lens optical system, a transparent optical member that captures subject image light from the objective lens optical system and emits it from a planar light exit surface, a microlens non-mounted image sensor with a flat light incident surface, and the transparent An adhesive layer for closely bonding the light emitting surface of the optical member and the light incident surface of the imaging element; and the objective lens optical system and the optical system interposed between the light emitting surface and the light incident surface A light-shielding mask for anti-flare that is aligned with an image circle formed on a light incident surface of the image sensor through a transparent optical member and has an opening having a smaller diameter than the image circle;
The image sensor is an image sensor for imaging a single plate color image in which color filters of three primary colors or complementary colors are stacked on each pixel,
An imaging module for an endoscope, wherein a peripheral circuit of the imaging element is formed in an area shielded by the light shielding mask for preventing flare in the imaging element.
請求項6に記載の内視鏡用撮像モジュールであって、前記撮像素子が、光電変換層積層型である内視鏡用撮像モジュール。  The endoscope imaging module according to claim 6, wherein the imaging element is a photoelectric conversion layer stacked type. 請求項6又は請求項7に記載の内視鏡用撮像モジュールであって、前記透明光学部材が、前記対物レンズ光学系から出射された被写体像光の光路を略直角方向に曲げて前記撮像素子の光入射面に入射させる直角プリズムである内視鏡用撮像モジュール。  The endoscope imaging module according to claim 6 or 7, wherein the transparent optical member bends an optical path of subject image light emitted from the objective lens optical system in a substantially right angle direction. An imaging module for an endoscope which is a right-angle prism that is incident on the light incident surface of the endoscope. 請求項6又は請求項7に記載の内視鏡用撮像モジュールであって、前記透明光学部材が、前記対物レンズ光学系から出射された被写体像光を透過させて前記撮像素子の光入射面に入射させる平行平板でなるカバーガラスである内視鏡用撮像モジュール。  8. The endoscope imaging module according to claim 6, wherein the transparent optical member transmits object image light emitted from the objective lens optical system to a light incident surface of the imaging element. 9. An imaging module for an endoscope, which is a cover glass made of parallel flat plates to be incident. 請求項1乃至請求項9のいずれか1項に記載の内視鏡用撮像モジュールを内視鏡スコープ先端部に内蔵した電子内視鏡装置。 An electronic endoscope apparatus in which the endoscope imaging module according to any one of claims 1 to 9 is built in a distal end portion of an endoscope scope.
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CN104349705A (en) 2015-02-11
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WO2013179816A1 (en) 2013-12-05
US20150065798A1 (en) 2015-03-05

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