JP5912367B2 - measuring device - Google Patents

measuring device Download PDF

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JP5912367B2
JP5912367B2 JP2011208385A JP2011208385A JP5912367B2 JP 5912367 B2 JP5912367 B2 JP 5912367B2 JP 2011208385 A JP2011208385 A JP 2011208385A JP 2011208385 A JP2011208385 A JP 2011208385A JP 5912367 B2 JP5912367 B2 JP 5912367B2
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electronic component
substrate
inspection
light
component
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JP2013069948A (en
JP2013069948A5 (en
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貴志 吉井
貴志 吉井
善紀 池田
善紀 池田
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Yamaha Motor Co Ltd
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Description

本発明は、検査用の基板上に装着された電子部品の位置を測定する測定装置に関する。   The present invention relates to a measuring apparatus that measures the position of an electronic component mounted on a substrate for inspection.

検査専用治具基板に実装された電子部品の位置を測定する検査装置は、例えば特許文献1などに開示されている。このように実装済み電子部品の位置を測定して、基板上に電子部品を装着する電子部品装着装置において、装着ヘッドに対する吸着ノズルの取り付け位置についてのオフセットデータとして活用して、電子部品装着装置における電子部品の実装精度を高めている。   An inspection apparatus for measuring the position of an electronic component mounted on an inspection-dedicated jig substrate is disclosed in Patent Document 1, for example. In the electronic component mounting apparatus that measures the position of the mounted electronic component in this way and mounts the electronic component on the board, it is used as offset data for the mounting position of the suction nozzle with respect to the mounting head. The mounting accuracy of electronic parts is increased.

特開号公報Japanese Patent Publication

しかしながら、基板上に装着された電子部品の位置を検査するために、この電子部品をカメラで撮像するに際して、バックライト照明をする照明灯が必要であり、高価なものとなっていた。   However, in order to inspect the position of the electronic component mounted on the substrate, when the electronic component is imaged by a camera, an illumination lamp for performing backlight illumination is necessary and expensive.

そこで、検査用の基板上に装着された電子部品の位置を検査するために、この電子部品をカメラで撮像するに際して、バックライト照明を必要とすることなく、測定できるようにすることを目的とする。   Therefore, in order to inspect the position of an electronic component mounted on a substrate for inspection, an object of the present invention is to enable measurement without taking backlight illumination when imaging the electronic component with a camera. To do.

第1の発明は、検査用の基板上に装着された電子部品の位置を測定する測定装置であって、基板として光源から照射された光を内部で乱反射する基板を使用し、この乱反射した光による電子部品の透過像と基板表面に設けられた位置決めマークの透過像をカメラで撮像するとともに、基板に光源からの光が斜めから照射されると、電子部品および位置決めマークに照射した光は反射されてレンズにより結像されないとともに、基板内部に入射して乱反射した光はレンズにより結像されるように構成されている The first invention is a measuring device for measuring the position of the electronic components mounted on a substrate for inspection, using a substrate to diffuse the light emitted from the light source as the base plate inside, and this irregular reflection with images the transmission images of the positioning mark provided on the transmission image and board surface by that electronic components on the light with the camera, the light from the light source to the substrate is irradiated from an oblique, in the electronic component and the positioning marks The irradiated light is reflected and is not imaged by the lens, and the light incident on the inside of the substrate and irregularly reflected is imaged by the lens .

本発明は、検査用の基板上に装着された電子部品の位置を検査するために、この電子部品をカメラで撮像するに際して、バックライト照明を必要とすることなく、測定できるようにすることができる。   According to the present invention, in order to inspect the position of an electronic component mounted on a substrate for inspection, when the electronic component is imaged with a camera, measurement can be performed without requiring backlight illumination. it can.

電子部品装着装置の平面図である。It is a top view of an electronic component mounting apparatus. 照明灯を点灯させて傾斜光を検査用基板上に装着された電子部品に照射した状態の簡略説明図である。It is a simplified explanatory view of a state where an illumination lamp is turned on and an electronic component mounted on an inspection substrate is irradiated with inclined light. 電子部品が装着された検査用基板の平面図である。It is a top view of the board | substrate for a test | inspection with which the electronic component was mounted | worn. 検査用基板に照明灯からの光を斜めに照射した状態の説明図である。It is explanatory drawing of the state which irradiated the light from an illuminating lamp on the test | inspection board | substrate diagonally.

以下、図面に基づき本発明の実施形態につき説明する。図1は電子部品装着装置1の平面図であり、電子部品装着装置1の装置本体2上の前部及び後部には部品供給装置3A、3B、3C、3Dが4つのブロックに分かれて複数並設されている。部品供給装置3Aはレーン番号(部品供給ユニットの配置番号)が100番台であり、部品供給装置3Bはレーン番号が200番台であり、部品供給装置3Cはレーン番号が300番台であり、部品供給装置3Dはレーン番号が400番台である。   Hereinafter, embodiments of the present invention will be described with reference to the drawings. FIG. 1 is a plan view of an electronic component mounting apparatus 1, and component supply devices 3A, 3B, 3C, and 3D are divided into four blocks on the front and rear of the apparatus main body 2 of the electronic component mounting apparatus 1, and a plurality of them are arranged in parallel. It is installed. The component supply device 3A has a lane number (component supply unit arrangement number) in the 100s, the component supply device 3B has a lane number in the 200s, and the component supply device 3C has a lane number in the 300s. 3D has lane numbers in the 400s.

前記各部品供給装置3A、3B、3C、3Dは、取付台であるカート台のフィーダベース上に部品供給ユニット5を多数並設したものであり、部品供給側の先端部が基板としてのプリント基板Pの搬送路に臨むように前記装置本体2に連結具(図示せず)を介して着脱可能に配設され、この連結具を解除して把手を引くと下面に設けられたキャスタにより移動できる構成である。   Each of the component supply devices 3A, 3B, 3C, and 3D includes a plurality of component supply units 5 arranged in parallel on a feeder base of a cart base that is a mounting base, and a printed circuit board having a tip on the component supply side as a substrate. It is detachably disposed on the apparatus main body 2 via a connector (not shown) so as to face the conveyance path of P, and can be moved by a caster provided on the lower surface when the connector is released and the handle is pulled. It is a configuration.

そして、各部品供給装置3A、3B、3C、3Dは、部品供給側の先端部が装着ヘッド6のピックアップ領域(部品の取出し領域)に臨むように配設されており、各部品供給ユニット5は前記カート台に回転自在に載置した供給リールに巻回した状態で順次繰り出された収納テープに所定間隔で開設した送り孔にその歯が嵌合した送りスプロケットを所定角度回転させて収納テープを電子部品の部品吸着取出位置まで送りモータにより間欠送りするテープ送り機構と、剥離モータの駆動により吸着取出位置の手前でキャリアテープからカバーテープを引き剥がすためのカバーテープ剥離機構とを備え、カバーテープ剥離機構によりカバーテープを剥離してキャリアテープの収納部に装填された電子部品を順次部品吸着取出位置へ供給して先端部から後述する保持具としての吸着ノズルにより取出し可能である。   Each of the component supply devices 3A, 3B, 3C, and 3D is disposed so that the tip on the component supply side faces the pickup region (component extraction region) of the mounting head 6, and each component supply unit 5 includes The storage tape is rotated by a predetermined angle by rotating a feed sprocket whose teeth are fitted to feed holes opened at predetermined intervals on a storage tape that is sequentially wound in a state of being wound around a supply reel that is rotatably mounted on the cart table. A tape feed mechanism that intermittently feeds the electronic component to the component pickup / extraction position by a feed motor, and a cover tape release mechanism for peeling the cover tape from the carrier tape in front of the pickup / extraction position by driving the peeling motor. The cover tape is peeled off by the peeling mechanism, and the electronic parts loaded in the carrier tape storage section are sequentially supplied to the component pick-up / removal position. It can be taken out by the suction nozzle as a retainer to be described later from.

そして、手前側の部品供給装置3B、3Dと奥側の部品供給装置3A、3Cとの間には、基板搬送機構を構成する2つの供給コンベア、位置決め部8、8(コンベアを有する)及び排出コンベアが設けられている。前記各供給コンベアは上流より受けた各プリント基板Pを前記各位置決め部8に搬送し、この各位置決め部8で位置決め機構(図示せず)により位置決めされた各基板P上に電子部品が装着した後、各排出コンベアに搬送し、その後下流側装置に搬送する。なお、前記位置決め機構により、プリント基板Pは前後左右方向(平面方向)、上下方向(垂直方向)の位置決めがされる。   Between the front-side component supply devices 3B and 3D and the rear-side component supply devices 3A and 3C, there are two supply conveyors, positioning units 8 and 8 (having a conveyor) that constitute the substrate transport mechanism, and discharge. A conveyor is provided. Each supply conveyor conveys each printed board P received from the upstream to each positioning unit 8, and electronic components are mounted on each board P positioned by a positioning mechanism (not shown) in each positioning unit 8. Then, it conveys to each discharge conveyor, and conveys to a downstream apparatus after that. The printed circuit board P is positioned in the front / rear / left / right direction (planar direction) and the vertical direction (vertical direction) by the positioning mechanism.

Y方向にY軸駆動モータによりガイドレール9に沿って移動する各ビーム10にはその長手方向、即ちX方向にX軸駆動モータにより移動する装着ヘッド6が設けられ、この装着ヘッド6には複数本の吸着ノズルが設けられる。そして、前記装着ヘッド6には前記吸着ノズルを上下動させるための上下軸駆動モータが搭載され、また鉛直軸周りに回転させるためのθ軸駆動モータが搭載されている。従って、装着ヘッド6の吸着ノズルはX方向及びY方向に移動可能であり、鉛直軸回りに回転可能で、かつ上下動可能となっている。   Each beam 10 that moves along the guide rail 9 by the Y-axis drive motor in the Y direction is provided with a mounting head 6 that is moved by the X-axis drive motor in the longitudinal direction, that is, in the X direction. A book suction nozzle is provided. The mounting head 6 is equipped with a vertical axis drive motor for moving the suction nozzle up and down, and a θ-axis drive motor for rotating around the vertical axis. Therefore, the suction nozzle of the mounting head 6 can move in the X direction and the Y direction, can rotate about the vertical axis, and can move up and down.

12は部品認識カメラで、各種電子部品が吸着ノズルに対してどれだけ位置ずれして吸着保持されているかXY方向及び回転角度につき、位置認識するために前記吸着ノズルに吸着保持された電子部品を撮像する。19は前記装着ヘッド6に設けられた基板認識カメラで、プリント基板Pに付された位置決めマークを撮像する。そして、各前記カメラ12、19により撮像された画像は、認識処理装置により認識処理される。   Reference numeral 12 denotes a component recognition camera. How much each electronic component is displaced and held with respect to the suction nozzle. The electronic component sucked and held by the suction nozzle in order to recognize the position in the XY direction and the rotation angle. Take an image. Reference numeral 19 denotes a board recognition camera provided on the mounting head 6 for picking up an image of a positioning mark attached to the printed board P. The images captured by the cameras 12 and 19 are subjected to recognition processing by a recognition processing device.

前述した電子部品装着装置1は、前記プリント基板P上に装着された電子部品の実装位置を検査する検査装置としても機能するものであり、以下その構成について説明する。   The electronic component mounting apparatus 1 described above also functions as an inspection apparatus for inspecting the mounting position of the electronic component mounted on the printed circuit board P, and the configuration thereof will be described below.

図2において、前記検査のための検査用基板PPは乳白色のガラス基板やセラミック基板であって、この検査用基板PPに後述の光源である照明灯20からの光が斜めから照射された場合に、この検査用基板PP内部で乱反射する材質で作製されている。   In FIG. 2, the inspection substrate PP for the inspection is a milky white glass substrate or ceramic substrate, and when light from an illumination lamp 20 as a light source described later is irradiated obliquely onto the inspection substrate PP. These are made of a material that irregularly reflects inside the inspection substrate PP.

また、この検査用基板PP上には、この検査用基板PP上に装着された電子部品21の位置を認識するために、この装着された電子部品21の周辺位置に基板位置決めマークMが蒸着により付されている(図3参照)。具体的には、図3に示すように、位置決めマークMは装着後の電子部品21を跨ぐように且つこの電子部品と所定間隔を存して、検査用基板PP上に付されている。   Further, a substrate positioning mark M is deposited on the inspection substrate PP by vapor deposition at a peripheral position of the mounted electronic component 21 in order to recognize the position of the electronic component 21 mounted on the inspection substrate PP. (See FIG. 3). Specifically, as shown in FIG. 3, the positioning mark M is placed on the inspection substrate PP so as to straddle the electronic component 21 after mounting and at a predetermined interval from the electronic component.

20は前記検査用基板PP上に装着された電子部品21及び前記位置決めマークに斜め上方から光(傾斜光)を照射する複数個の照明灯で、前記電子部品21を平面視した場合における最長部の長さより長い間隔を置いて配設される。この複数個の照明灯20は、所定間隔を存して一列に複数個配設した照明灯20群を対向するように、前記間隔を置いて前記装着ヘッド6に二列配設するようにしてもよいし、前記間隔を直径とする円周上に環状に所定間隔を存して複数個配設するようにしてもよい。22は前記基板認識カメラ19の下面に取り付けられる鏡筒で、内部に反射像を結像するためのレンズ23が配設されている。   Reference numeral 20 denotes an electronic component 21 mounted on the inspection substrate PP and a plurality of illumination lamps that irradiate light (tilted light) obliquely from above to the positioning mark. The longest portion when the electronic component 21 is viewed in plan view. Are arranged at intervals longer than the length of. The plurality of illuminating lamps 20 are arranged in two rows on the mounting head 6 at an interval so as to face a group of illuminating lamps 20 arranged in a row at a predetermined interval. Alternatively, a plurality of the gaps may be arranged on the circumference having the diameter as a ring at a predetermined interval. A lens barrel 22 is attached to the lower surface of the substrate recognition camera 19 and has a lens 23 for forming a reflected image therein.

次に、装着済みの電子部品21の実装位置の検査のための電子部品21の装着動作について簡単に説明する。初めに、検査専用治具基板である前記検査用基板PPが上流装置より供給コンベアを介して位置決め部8に搬送されて位置決め固定され、検査対象の電子部品21の装着座標データに従い、装着ヘッド6が移動して、検査対象の電子部品21の部品種に対応した吸着ノズルが装着すべき電子部品21を所定の部品供給ユニット5から吸着して取出す。   Next, the mounting operation of the electronic component 21 for inspecting the mounting position of the mounted electronic component 21 will be briefly described. First, the inspection substrate PP, which is an inspection-dedicated jig substrate, is conveyed from the upstream device to the positioning unit 8 via the supply conveyor and positioned and fixed, and the mounting head 6 is in accordance with the mounting coordinate data of the electronic component 21 to be inspected. The electronic component 21 to be mounted by the suction nozzle corresponding to the component type of the electronic component 21 to be inspected is sucked from the predetermined component supply unit 5 and taken out.

詳述すると、この場合、対象電子部品21を収納する部品供給ユニット5上方に位置するよう移動するが、Y方向はY軸駆動モータが駆動してビーム10が移動し、X方向はX軸駆動モータが駆動して装着ヘッド6が移動し、既に所定の部品供給ユニット5は送りモータ及び剥離モータが駆動されて部品吸着取出位置にて前記電子部品21が取出し可能状態にあるため、上下軸駆動モータが所定の前記吸着ノズルを下降させて前記電子部品21を吸着して取出し、次に装着ヘッド6は上昇する。   More specifically, in this case, it moves so as to be positioned above the component supply unit 5 that houses the target electronic component 21, but in the Y direction, the Y axis drive motor drives and the beam 10 moves, and in the X direction, the X axis drive. The motor is driven to move the mounting head 6, and the predetermined component supply unit 5 has already been driven by the feed motor and the peeling motor so that the electronic component 21 can be taken out at the component picking and taking out position. The motor lowers the predetermined suction nozzle to suck and take out the electronic component 21, and then the mounting head 6 is lifted.

そして、前記吸着ノズルは位置決め部8にて位置決めされたプリント基板P上の所定位置に前記電子部品21を装着するように移動するが、この装着ヘッド6の移動途中において、装着ヘッド6が移動しながら部品認識カメラ12の上方位置を通過する際に吸着ノズルに吸着保持された前記電子部品21が部品認識カメラ12により撮像される(フライ認識)。   The suction nozzle moves so as to mount the electronic component 21 at a predetermined position on the printed circuit board P positioned by the positioning unit 8. During the movement of the mounting head 6, the mounting head 6 moves. On the other hand, when passing the upper position of the component recognition camera 12, the electronic component 21 sucked and held by the suction nozzle is imaged by the component recognition camera 12 (fly recognition).

そして、この撮像結果に基づいて前記電子部品21が当該吸着ノズルに対してどれだけ位置ずれして吸着保持されているかXY方向及び回転角度につき認識処理装置により認識処理されるが、Y軸駆動モータ及びX軸駆動モータを駆動させて前記電子部品21を保持した吸着ノズルは検査用基板PPまで移動する。検査用基板PP上へ前記電子部品21を装着する前に、基板認識カメラ19が検査用基板PPに付された基板位置決めマークMを撮像し、認識処理装置により認識処理されて検査用基板PPの位置が把握される。   Then, based on the imaging result, the recognition processing device recognizes how much the electronic component 21 is displaced and held with respect to the suction nozzle by the recognition processing device for the XY direction and the rotation angle. And the suction nozzle holding the electronic component 21 by driving the X-axis drive motor moves to the inspection substrate PP. Before the electronic component 21 is mounted on the inspection substrate PP, the substrate recognition camera 19 images the substrate positioning mark M attached to the inspection substrate PP, and the recognition processing device recognizes and processes the substrate positioning mark M. The position is grasped.

従って、装着データの装着座標にプリント基板Pの位置認識結果及び前記電子部品21の位置認識処理結果を加味して、制御装置によりY軸駆動モータ、X軸駆動モータ及びθ軸駆動モータが補正制御され、各装着ヘッド6の吸着ノズルが位置ずれを補正しつつ、それぞれ前記電子部品21がプリント基板P上の所定位置に装着される。   Therefore, the Y axis drive motor, the X axis drive motor, and the θ axis drive motor are corrected and controlled by the control device by adding the position recognition result of the printed circuit board P and the position recognition processing result of the electronic component 21 to the mounting coordinates of the mounting data. Then, the electronic component 21 is mounted at a predetermined position on the printed circuit board P while the suction nozzle of each mounting head 6 corrects the positional deviation.

以上のように、検査専用治具基板である前記検査用基板PP上に検査対象の電子部品21が装着された段階で、以下に示すような検査が行われる。即ち、前述したように、前記装着ヘッド6を前記検査用基板PPに実装された検査対象の電子部品21に上方へ移動させる。そして、前記照明灯20を点灯させると、検査用基板PPに対して斜めに光(傾斜光)が照射される。   As described above, at the stage where the electronic component 21 to be inspected is mounted on the inspection substrate PP, which is a dedicated inspection jig substrate, the following inspection is performed. That is, as described above, the mounting head 6 is moved upward to the electronic component 21 to be inspected mounted on the inspection substrate PP. When the illuminating lamp 20 is turned on, light (tilted light) is irradiated obliquely to the inspection substrate PP.

すると、図2及び図4に示すように、前記検査用基板PPは乳白色のガラス基板やセラミック基板であって、この検査用基板PPに前記照明灯20からの光が斜めから照射されると、前記電子部品21や位置決めマークMに照射した光は反射されて前記レンズ23により結像されないが、前記検査用基板PP内部に入射して乱反射した光は前記レンズ23により結像されて、前記基板認識カメラ19は前記電子部品21及び位置決めマークMの透過像を撮像することとなる。   Then, as shown in FIGS. 2 and 4, the inspection substrate PP is a milky white glass substrate or ceramic substrate, and when the inspection substrate PP is irradiated with light from the illumination lamp 20 obliquely, The light applied to the electronic component 21 and the positioning mark M is reflected and is not imaged by the lens 23, but the light incident and diffusely reflected inside the inspection substrate PP is imaged by the lens 23 to form the substrate. The recognition camera 19 takes a transmission image of the electronic component 21 and the positioning mark M.

そして、この透過像を認識処理装置が認識処理し、前記位置決めマークMの位置がわかるので、この位置決めマークMに対する実装済みの電子部品21の位置関係から、この実装済みの電子部品21の位置ズレが判明する。従って、この位置ズレ量を電子部品装着装置1に設けた記憶手段に格納し、前記装着ヘッド6に対する吸着ノズルの取り付け位置についてのオフセットデータとして活用して、電子部品装着装置1における電子部品の実装精度を高めることができる。この吸着ノズルの取り付け位置については、前記装着ヘッド6に垂直方向に昇降しないような斜め取り付けがされた場合にも、対応できる。   Then, the transmitted image is recognized by the recognition processing device, and the position of the positioning mark M is known. Therefore, the positional displacement of the mounted electronic component 21 is determined from the positional relationship of the mounted electronic component 21 with respect to the positioning mark M. Becomes clear. Therefore, the positional deviation amount is stored in the storage means provided in the electronic component mounting apparatus 1 and is used as offset data for the attachment position of the suction nozzle with respect to the mounting head 6 to mount the electronic component in the electronic component mounting apparatus 1. Accuracy can be increased. The attachment position of the suction nozzle can be dealt with even when the attachment head 6 is obliquely attached so as not to move up and down in the vertical direction.

なお、前記プリント基板Pや、検査用基板PPには、前記プリント基板P、検査用基板PP上に装着された電子部品21の位置を認識するために、前記位置決めマークMの他、このプリント基板P、検査用基板PP全体の位置を認識するための全体認識用位置決めマークも付されるので、前述した方法で、この全体認識用位置決めマークについても撮像し、位置認識することができる。この場合、前記位置決めマークM及び全体認識用位置決めマークは形状を同一にしてもよいし、異なる形状にしてもよい。   In addition to the positioning mark M, the printed circuit board P and the inspection board PP, in addition to the positioning mark M, recognize the position of the printed circuit board P and the inspection board PP. P and an overall recognition positioning mark for recognizing the position of the entire inspection substrate PP are also attached, so that the entire recognition positioning mark can be imaged and recognized by the above-described method. In this case, the positioning mark M and the overall recognition positioning mark may have the same shape or different shapes.

以上のように、本発明は検査用基板PP上に装着された電子部品21の位置を検査するために、この電子部品21を基板認識カメラ19で撮像するに際して、バックライト照明を必要とすることなく、測定できるようにすることができる。   As described above, in order to inspect the position of the electronic component 21 mounted on the inspection substrate PP, the present invention requires backlight illumination when imaging the electronic component 21 with the substrate recognition camera 19. Without being able to measure.

以上のように本発明の実施態様について説明したが、上述の説明に基づいて当業者にとって種々の代替例、修正又は変形が可能であり、本発明はその趣旨を逸脱しない範囲で前述の種々の代替例、修正又は変形を包含するものである。   Although the embodiments of the present invention have been described above, various alternatives, modifications, and variations can be made by those skilled in the art based on the above description, and the present invention is not limited to the various embodiments described above without departing from the spirit of the present invention. It encompasses alternatives, modifications or variations.

1 電子部品装着装置
6 装着ヘッド
19 基板認識カメラ
20 照明灯
21 電子部品
PP 検査用基板
DESCRIPTION OF SYMBOLS 1 Electronic component mounting apparatus 6 Mounting head 19 Substrate recognition camera 20 Illumination lamp 21 Electronic component PP Inspection board

Claims (1)

検査用の基板上に装着された電子部品の位置を測定する測定装置であって、前記基板として光源から照射された光を内部で乱反射する基板を使用し、この乱反射した光による前記電子部品の透過像と前記基板表面に設けられた位置決めマークの透過像をカメラで撮像するとともに、前記基板に前記光源からの光が斜めから照射されると、前記電子部品および前記位置決めマークに照射した光は反射されてレンズにより結像されないとともに、前記基板内部に入射して乱反射した光は前記レンズにより結像されるように構成されている、測定装置。A measuring device for measuring the position of an electronic component mounted on a substrate for inspection, wherein a substrate that internally diffuses light emitted from a light source is used as the substrate, and the electronic component of the electronic component by the irregularly reflected light is used. When a transmission image and a transmission image of a positioning mark provided on the surface of the substrate are picked up by a camera and light from the light source is irradiated obliquely onto the substrate, the light irradiated to the electronic component and the positioning mark is The measuring apparatus is configured such that light that is reflected and not imaged by the lens and that is incident and diffusely reflected inside the substrate is imaged by the lens.
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