JP5894466B2 - パターン形成方法およびパターン形成装置 - Google Patents

パターン形成方法およびパターン形成装置 Download PDF

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Publication number
JP5894466B2
JP5894466B2 JP2012051210A JP2012051210A JP5894466B2 JP 5894466 B2 JP5894466 B2 JP 5894466B2 JP 2012051210 A JP2012051210 A JP 2012051210A JP 2012051210 A JP2012051210 A JP 2012051210A JP 5894466 B2 JP5894466 B2 JP 5894466B2
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JP
Japan
Prior art keywords
plate
substrate
patterning
blanket
carrier
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2012051210A
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English (en)
Japanese (ja)
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JP2013184382A (ja
Inventor
理史 川越
理史 川越
博之 上野
博之 上野
美佳 中嶋
美佳 中嶋
増市　幹雄
幹雄 増市
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Screen Holdings Co Ltd
Original Assignee
Screen Holdings Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Screen Holdings Co Ltd filed Critical Screen Holdings Co Ltd
Priority to JP2012051210A priority Critical patent/JP5894466B2/ja
Priority to KR20130022748A priority patent/KR101485654B1/ko
Publication of JP2013184382A publication Critical patent/JP2013184382A/ja
Application granted granted Critical
Publication of JP5894466B2 publication Critical patent/JP5894466B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41M—PRINTING, DUPLICATING, MARKING, OR COPYING PROCESSES; COLOUR PRINTING
    • B41M1/00—Inking and printing with a printer's forme
    • B41M1/02—Letterpress printing, e.g. book printing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41N—PRINTING PLATES OR FOILS; MATERIALS FOR SURFACES USED IN PRINTING MACHINES FOR PRINTING, INKING, DAMPING, OR THE LIKE; PREPARING SUCH SURFACES FOR USE AND CONSERVING THEM
    • B41N10/00—Blankets or like coverings; Coverings for wipers for intaglio printing
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
JP2012051210A 2012-03-08 2012-03-08 パターン形成方法およびパターン形成装置 Expired - Fee Related JP5894466B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2012051210A JP5894466B2 (ja) 2012-03-08 2012-03-08 パターン形成方法およびパターン形成装置
KR20130022748A KR101485654B1 (ko) 2012-03-08 2013-03-04 패턴 형성 방법 및 패턴 형성 장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2012051210A JP5894466B2 (ja) 2012-03-08 2012-03-08 パターン形成方法およびパターン形成装置

Publications (2)

Publication Number Publication Date
JP2013184382A JP2013184382A (ja) 2013-09-19
JP5894466B2 true JP5894466B2 (ja) 2016-03-30

Family

ID=49386254

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2012051210A Expired - Fee Related JP5894466B2 (ja) 2012-03-08 2012-03-08 パターン形成方法およびパターン形成装置

Country Status (2)

Country Link
JP (1) JP5894466B2 (ko)
KR (1) KR101485654B1 (ko)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6822534B2 (ja) * 2019-09-12 2021-01-27 株式会社ニコン 物体支持装置及び露光装置

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4313969B2 (ja) * 2001-12-19 2009-08-12 パナソニック コミュニケーションズ株式会社 画像記録装置
JP4220282B2 (ja) * 2003-03-20 2009-02-04 株式会社日立製作所 ナノプリント装置、及び微細構造転写方法
KR100870829B1 (ko) * 2005-07-18 2008-11-27 주식회사 에이디피엔지니어링 임프린트 장치 및 방법
JP4577522B2 (ja) * 2006-08-21 2010-11-10 株式会社日立ハイテクノロジーズ パターン転写装置及びパターン転写方法
JP2008260143A (ja) * 2007-04-10 2008-10-30 Mitsubishi Electric Corp スクリーン印刷装置、スクリーン印刷方法、及び前記装置或いは前記方法を用いて製造された液晶パネル
KR100982673B1 (ko) * 2008-04-22 2010-09-16 엘아이지에이디피 주식회사 미세 패턴 임프린트 장치
JP5160364B2 (ja) * 2008-10-06 2013-03-13 コマツ産機株式会社 金型装置、熱転写プレス装置、および熱転写成形品の製造方法

Also Published As

Publication number Publication date
KR101485654B1 (ko) 2015-01-22
KR20130103373A (ko) 2013-09-23
JP2013184382A (ja) 2013-09-19

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