JP5892684B2 - イオン注入法及び磁気記録媒体の製造方法 - Google Patents
イオン注入法及び磁気記録媒体の製造方法 Download PDFInfo
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- JP5892684B2 JP5892684B2 JP2011142821A JP2011142821A JP5892684B2 JP 5892684 B2 JP5892684 B2 JP 5892684B2 JP 2011142821 A JP2011142821 A JP 2011142821A JP 2011142821 A JP2011142821 A JP 2011142821A JP 5892684 B2 JP5892684 B2 JP 5892684B2
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- 238000005468 ion implantation Methods 0.000 title claims description 42
- 238000000034 method Methods 0.000 title claims description 38
- 238000004519 manufacturing process Methods 0.000 title claims description 15
- 150000002500 ions Chemical class 0.000 claims description 110
- 239000007789 gas Substances 0.000 claims description 77
- 238000012545 processing Methods 0.000 claims description 64
- 125000004429 atom Chemical group 0.000 claims description 25
- 229910052739 hydrogen Inorganic materials 0.000 claims description 22
- 239000001257 hydrogen Substances 0.000 claims description 21
- -1 C 2 H 2 Inorganic materials 0.000 claims description 20
- 239000000758 substrate Substances 0.000 claims description 20
- 125000004435 hydrogen atom Chemical group [H]* 0.000 claims description 15
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 11
- 229910052757 nitrogen Inorganic materials 0.000 claims description 6
- 239000011261 inert gas Substances 0.000 claims description 5
- 239000012466 permeate Substances 0.000 claims 2
- 230000001678 irradiating effect Effects 0.000 claims 1
- 230000001133 acceleration Effects 0.000 description 65
- 238000009826 distribution Methods 0.000 description 10
- 230000005415 magnetization Effects 0.000 description 9
- 230000001681 protective effect Effects 0.000 description 8
- 230000005347 demagnetization Effects 0.000 description 6
- 238000002474 experimental method Methods 0.000 description 6
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 5
- 229910052799 carbon Inorganic materials 0.000 description 5
- 125000004432 carbon atom Chemical group C* 0.000 description 4
- 150000001793 charged compounds Chemical class 0.000 description 4
- 150000002431 hydrogen Chemical class 0.000 description 4
- 230000000740 bleeding effect Effects 0.000 description 3
- GPRLSGONYQIRFK-UHFFFAOYSA-N hydron Chemical compound [H+] GPRLSGONYQIRFK-UHFFFAOYSA-N 0.000 description 3
- 238000005259 measurement Methods 0.000 description 3
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 2
- 238000011109 contamination Methods 0.000 description 2
- 239000000284 extract Substances 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 238000002513 implantation Methods 0.000 description 2
- 229910052742 iron Inorganic materials 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 229910052763 palladium Inorganic materials 0.000 description 2
- 229910001149 41xx steel Inorganic materials 0.000 description 1
- 229910018979 CoPt Inorganic materials 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 229910052785 arsenic Inorganic materials 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 150000001721 carbon Chemical class 0.000 description 1
- 229910002091 carbon monoxide Inorganic materials 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 229910052731 fluorine Inorganic materials 0.000 description 1
- 229910052732 germanium Inorganic materials 0.000 description 1
- 239000005001 laminate film Substances 0.000 description 1
- 239000000696 magnetic material Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 238000007790 scraping Methods 0.000 description 1
- 229910052711 selenium Inorganic materials 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- 229910001928 zirconium oxide Inorganic materials 0.000 description 1
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Claims (6)
- 減圧下で所定の処理ガスを導入してプラズマを形成し、このプラズマ中の異なる質量数のイオンを引き出し、引き出した異なる質量数のイオンを加速し、加速したイオンを処理対象物の表面に形成されたマスクを介して処理対象物内に注入するイオン注入法であって、
前記処理ガスとして、XmYn(式中、Xを質量数が5〜75の原子、Yを水素原子とし、m=1〜4、n=1〜10とする)で表される分子の中から選択されるものを用い、
前記マスクは、引き出した前記イオンのうち水素原子は透過しX原子は透過しない厚みを有することを特徴とするイオン注入法。 - 前記処理ガスは、AlH3、SiH4、CH4、PH3、C2H2、NH3、B2H6、N2H2及びAsH3の中から選択される少なくとも1種を含むことを特徴とする請求項1記載のイオン注入法。
- 前記処理ガスは、水素、窒素又は不活性ガスで希釈されたものであることを特徴とする請求項2記載のイオン注入法。
- 処理すべき基板表面に磁性膜を形成する磁性膜形成工程と、
磁性膜表面に、所定のマスクを形成するマスク形成工程と、
減圧下で所定の処理ガスを導入してプラズマを形成し、このプラズマ中の異なる質量数のイオンを引き出し、引き出した異なる質量数のイオンを加速して基板に照射するイオン注入工程と、を備え、
前記処理ガスとして、XmYn(式中、Xを質量数が5〜75の原子、Yを水素原子とし、水素原子の数を1〜6、他方の原子の数を1〜2とする)で表される分子の中から選択されるものを用い、
前記マスクは、引き出した前記イオンのうち水素原子は透過しX原子は透過しない厚みを有することを特徴とする磁気記録媒体の製造方法。 - 前記処理ガスとして、AlH3、SiH4、CH4、PH3、C2H2、NH3、B2H6、N2H2及びAsH3の少なくとも1種を含むものを用いることを特徴とする請求項4記載の磁気記録媒体の製造方法。
- 前記処理ガスは、水素、窒素又は不活性ガスで希釈されたものであることを特徴とする請求項5記載の磁気記録媒体の製造方法。
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CN112376029B (zh) * | 2020-11-11 | 2022-10-21 | 北京北方华创微电子装备有限公司 | 等离子体浸没离子注入设备 |
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JPS58100349A (ja) * | 1981-12-09 | 1983-06-15 | Hitachi Ltd | 多重イオン打込み装置 |
JPS59111324A (ja) * | 1982-12-17 | 1984-06-27 | Toshiba Corp | 半導体装置の製造方法 |
JPS62298991A (ja) * | 1986-06-18 | 1987-12-26 | Nec Corp | 情報記憶方法、磁気記憶素子及びその製造方法 |
JP3716711B2 (ja) * | 2000-06-16 | 2005-11-16 | 日新電機株式会社 | イオン照射装置におけるイオン成分比の計測方法 |
JP4597933B2 (ja) * | 2006-09-21 | 2010-12-15 | 昭和電工株式会社 | 磁気記録媒体の製造方法、並びに磁気記録再生装置 |
JP5417728B2 (ja) * | 2008-03-27 | 2014-02-19 | 富士通株式会社 | 磁気記録媒体、磁気記録再生装置及び磁気記録媒体の製造方法 |
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